CN105547145A - Super-resolution structure detection confocal coherent imaging device and imaging method thereof - Google Patents

Super-resolution structure detection confocal coherent imaging device and imaging method thereof Download PDF

Info

Publication number
CN105547145A
CN105547145A CN201510868029.6A CN201510868029A CN105547145A CN 105547145 A CN105547145 A CN 105547145A CN 201510868029 A CN201510868029 A CN 201510868029A CN 105547145 A CN105547145 A CN 105547145A
Authority
CN
China
Prior art keywords
confocal
super
imaging device
detection
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510868029.6A
Other languages
Chinese (zh)
Other versions
CN105547145B (en
Inventor
王宝凯
张甦
邹丽敏
谭久彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201510868029.6A priority Critical patent/CN105547145B/en
Publication of CN105547145A publication Critical patent/CN105547145A/en
Application granted granted Critical
Publication of CN105547145B publication Critical patent/CN105547145B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02048—Rough and fine measurement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

A super-resolution structure detection confocal coherent imaging device and an imaging method thereof relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The spatial-cut-off frequency of a confocal coherent imaging system is improved, and the space frequency domain bandwidth is broadened, so that the transverse resolution of the imaging system is substantially improved; and moreover, the super-resolution structure detection confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

Description

A kind of super-resolution structure detects confocal coherent imaging device and formation method thereof
Technical field
The present invention relates to imaging device and formation method thereof, be specifically related to a kind of super-resolution structure and detect confocal coherent imaging device and formation method thereof, belong to technical field of optical precision measurement.
Background technology
Optical microscopy is a kind of with a long history and very important in destructive technology, is widely used in the fields such as biological and material science.Confocal micro-measurement technology is a kind of three-dimensional optical microtechnic being applicable to micron and submicron-scale measurement.The chromatography ability of reflection-type confocal microscopic system makes it to seem very important in three-dimensional imaging field.
In middle and later periods the 1950's, confocal microscope is invented by Minsky, 1977, C.J.R.Sheppard and A.Choudhury illustrates confocal microscope system first under the effect of a pinhole mask, to sacrifice visual field for cost, lateral resolution is made to bring up to 1.4 times of same apertures simple microscope.After this, confocal micro-measurement technology is subject to common concern, becomes the important branch in micrology field.
But conventional confocal technology is subject to the impact of detector size always, the resolving power of confocal microscopy is difficult to improve.
Summary of the invention
The resolving power that the object of the invention is to solve existing confocal microscopy is difficult to improve, the unsharp problem of confocal imaging.
Technical scheme of the present invention is: a kind of super-resolution structure detects confocal coherent imaging device, comprise LASER Light Source, be provided with collimator and extender device, Amici prism, quarter wave plate, scanning system, illumination objective lens, production piece, collecting lens and ccd detector successively along LASER Light Source light transmition direction, the imaging process of whole light path is coherent imaging.
Described scanning system comprises scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
Detect the formation method of confocal coherent imaging device based on described a kind of super-resolution structure, comprise the following steps:
Step one, the probe function of ccd detector is utilized to obtain the integration light intensity of confocal system;
Step 2, obtain the three-dimensional amplitude points spread function of confocal system according to the integration light intensity described in step one;
Step 3, two-dimensional Fourier transform is carried out to the three-dimensional amplitude points spread function described in step 2, obtain the two-dimentional coherence transfer function of confocal system;
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods, obtain super resolution image.
Described step one specifically comprises: described test surface adopts non-homogeneous detection mode, detection sensitivity coefficient in test surface is made to become Sine distribution, detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system.
Described test surface adopts non-homogeneous detection mode, integration is carried out in test surface region, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution, within the system, because probe function is Sine distribution, probe function frequency spectrum effective width compared with common confocal system increases, thus system CTF bandwidth can be made to increase, system transverse resolution significantly improves the transverse direction of fully excavating confocal system while playing the chromatography ability of reflection-type confocal microscopic system and differentiates potentiality.
The method that described step 2 obtains the three-dimensional amplitude points spread function of confocal system comprises: root of making even after converting the integration light intensity described in step one to Three dimensional convolution form, in thin sample is measured, equiphase in focal beam spot can be thought, then the expression distribution of amplitudes that the square root of light distribution that ccd detector collects can be similar to.
Described scanning system detects the invariant position of hot spot at test surface in scanning process.
Described detection hot spot light intensity root is the circular function of Airy disk radius at radius and realizes pin hole detection to light intensity integration in the circular function after calculating, and the pin hole before the detector utilizing the method to instead of in existing confocal system, achieves pin hole detecting function.
The present invention compared with prior art has following effect: super-resolution structure of the present invention detect confocal coherent imaging device with in, do not need the pin hole of test surface in common confocal system; Carry out integration in test surface specific region, change the luminous sensitivity of corresponding detecting location, probe function becomes Sine distribution, makes search coverage identical with common confocal middle pin hole region; The invention structure detection imaging method is combined with confocal relevant microscopic system, improve the spatial-cut-off frequency of confocal coherence imaging system, widen spatial frequency domain bandwidth, thus significantly improve imaging system transverse resolution, be applicable to the fields of measurement of industrial pattern imaging.
Accompanying drawing explanation
Fig. 1 is that superstructure of the present invention detects confocal coherent imaging device structural representation;
Fig. 2 is NA=0.1, λ=660nm, test surface pin hole radius time, the test surface frequency spectrum normalization analogous diagram of substantially confocal relevant microscopic system;
Fig. 3 is NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, structure detects confocal coherent system test surface frequency spectrum normalization analogous diagram;
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radius time, the CTF normalization analogous diagram of substantially confocal relevant microscopic system;
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, structure detects confocal coherent system CTF normalization analogous diagram;
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, structure detects confocal coherent system CTF with substantially confocal coherent system CTF at f xdirection contrast normalization analogous diagram;
Fig. 7 is striped sample analogous diagram x direction and y direction being spaced apart 3.5um;
Fig. 8 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius time substantially confocal relevant microscopic system in the frequency spectrum analogous diagram that detects;
Fig. 9 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius time substantially confocal relevant microscopic system in imaging amplitude normalization analogous diagram;
Figure 10 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, the confocal relevant microscopic system of structure detection in the frequency spectrum analogous diagram that detects;
Figure 11 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, imaging amplitude normalization analogous diagram in the confocal aobvious relevant micro-system of structure detection;
Figure 12 be striped sample and its detect imaging in confocal microscope system at basic confocal microscope system and structure and contrast normalization analogous diagram at x direction amplitude;
In figure: 1, LASER Light Source, 2, collimator and extender device, 3, Amici prism, 4, collecting lens, 5, quarter wave plate, 6, ccd detector, 7, scanning system, 8, illumination objective lens, 9, production piece.
Embodiment
Accompanying drawings the specific embodiment of the present invention, a kind of super-resolution structure of the present invention detects confocal coherent imaging device, comprise LASER Light Source 1, be provided with collimator and extender device 2, Amici prism 3, quarter wave plate 5, scanning system 7, illumination objective lens 8, production piece 9, collecting lens 4 and ccd detector 6 successively along LASER Light Source 1 light transmition direction.
Described scanning system comprises scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
Detect the formation method of confocal coherent imaging device based on described a kind of super-resolution structure, comprise the following steps:
Step one, described step one specifically comprise: described test surface adopts non-homogeneous detection mode, detection sensitivity coefficient in test surface is made to become Sine distribution, detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system:
I ( r s ) = | ∫ ∫ - ∞ ∞ exp ( i k ( - 2 z 1 ) ) h ( M 1 r 1 ) o ( r s - r 1 ) h 2 ( r 1 + M 2 r 2 ) D ( r 2 ) dr 1 dr 2 | 2 - - - ( 1 ) ;
Due to reality substantially confocal coherent system detection light intensity be test surface amplitude to the integration of test surface in limited range square, so the potentiality of the lateral resolution of confocal relevant microscopic system will be affected, namely the detection of finite size will cause system lateral resolution to be deteriorated.
Wherein D (r) is probe function, r in formula 1, r s, r 2represent object space coordinate respectively; M 1, M 2represent illuminator and detection system enlargement ratio respectively; Scanning position coordinate and image space coordinate, h 1(r), o (r) and h 2r () represents illuminator point spread function respectively, thing function and detection system point spread function.
Described test surface adopts non-homogeneous detection mode, in test surface region, carry out integration, changes the luminous sensitivity coefficient of corresponding detecting location, and then makes probe function become Sine distribution.
Step 2, convert the integration light intensity described in step one to Three dimensional convolution form:
I ( r s ) = | o ( r s ) ⊗ 3 ∫ - ∞ ∞ exp ( i k ( - 2 z s ) ) h ( M 1 r s ) h 2 ( r s + M 2 r 2 ) D ( r 2 ) dr 2 | 2 - - - ( 2 ) ;
In formula for Three dimensional convolution symbol, (2) formula evolution being obtained three-dimensional amplitude points spread function (APSF) h (r) is:
h ( r ) = ∫ - ∞ ∞ exp ( i k ( - 2 z ) ) h ( M 1 r ) h 2 ( r + M 2 r 2 ) D ( r 2 ) dr 2 - - - ( 3 ) ;
Step 3, suppose that axial defocusing amount z=0 carries out two-dimensional Fourier transform to three-dimensional amplitude points spread function (APSF) h (r), the two-dimentional coherence transfer function (CTF) of system can be obtained:
C ( m ) - F 2 [ h 1 ( M 1 r ) ] ⊗ 2 { F 2 [ h 2 ( r ) ] F 2 [ D ( r / M 2 ) ] } - - - ( 4 ) ;
From CTF angle analysis, CTF and the probe function frequency spectrum product of collecting object lens cause the equivalent CTF bandwidth of collecting object lens to diminish, thus whole system CTF bandwidth diminishes.Under some detection condition, system CTF bandwidth is maximum, is 2 times of simple microscope.Under the infinitely great condition of detection area, system CTF bandwidth is the most minimum.
In basic confocal system, probe function is D (r)=circ (r/r d) δ (z), its Fourier transform normalization analogous diagram is as shown in Figure 2.
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods, obtain super resolution image.
Described scanning system 7 detects the invariant position of hot spot at test surface in scanning process.
Described test surface adopts non-homogeneous detection mode, makes detection sensitivity coefficient in test surface become Sine distribution, in test surface region, carries out integration, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution.
Getting probe function in the present embodiment is:
F in formula 0represent the spatial frequency of cosine component in probe function; represent the initial phase of different directions cosine component respectively; r drepresent the radius of probe function.
In formula, nA=0.1, λ=660nm, obtains integration light intensity to above formula, carries out Fourier transform after changing into convolution form:
In formula represent probe function frequency spectrum; M, n represent x respectively, y direction frequency content.
Fig. 3 is probe function fourier transform normalization analogous diagram.
Now, the CTF of confocal system becomes:
In above formula there is phase place aliasing in the cross one another part of five component frequency information, needs repeatedly to change with value, obtained image is reconstructed, removes the frequency information of a part of phase place overlapping area, obtain last super resolution image.
Described detection hot spot light intensity root is the circular function of Airy disk radius at radius and realizes pin hole detection to light intensity integration in the circular function after calculating.
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radius time, the CTF normalization analogous diagram of substantially confocal relevant microscopic system;
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, structure detects confocal coherent system CTF normalization analogous diagram;
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe function f 0 = N A λ Time, structure detects confocal coherent system CTF with substantially confocal coherent system CTF at f xdirection contrast normalization analogous diagram;
By two curves in comparison diagram 6, can obviously find out, the confocal relevant microscopic system CTF cutoff frequency of structure detection is improved relative to substantially confocal relevant microscopic system.
Fig. 7 is striped sample analogous diagram x direction and y direction being spaced apart 3.3um;
Fig. 8 and Fig. 9 is the sample spectrum information detected in substantially confocal relevant microscopic system respectively, and sample imaging analogous diagram in substantially confocal relevant microscopic system.
Figure 10 and Figure 11 is the sample spectrum information detected in the confocal relevant microscopic system of structure detection respectively, and sample imaging analogous diagram in the confocal relevant microscopic system of structure detection.
Can find out that the highest sample frequency that the present embodiment can detect is apparently higher than substantially confocal relevant microscopic system by comparison diagram 8 and Figure 10.
By comparison diagram 9 and Figure 11, can find out that structure detects integral image resolving power that confocal ultra-resolution method obtains apparently higher than basic confocal microscope system, in conjunction with the comparing result of Figure 12, the present embodiment achieves the two-dimensional super-resolution of confocal relevant microscopic system, and the equivalent CTF bandwidth of confocal relevant microscopic system is expanded.

Claims (8)

1. a super-resolution structure detects confocal coherent imaging device, comprise LASER Light Source (1), it is characterized in that: be provided with collimator and extender device (2), Amici prism (3), quarter wave plate (5), scanning system (7), illumination objective lens (8), production piece (9), collecting lens (4) and ccd detector (5) along LASER Light Source (1) light transmition direction successively.
2. a kind of super-resolution structure detects confocal coherent imaging device according to claim 1, it is characterized in that: described scanning system (7) comprises scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
3. detect the formation method of confocal coherent imaging device based on super-resolution structure a kind of described in claim 1, it is characterized in that: comprise the following steps:
Step one, the probe function of ccd detector is utilized to obtain the integration light intensity of confocal system;
Step 2, obtain the three-dimensional amplitude points spread function of confocal system according to the integration light intensity described in step one;
Step 3, two-dimensional Fourier transform is carried out to the three-dimensional amplitude points spread function described in step 2, obtain the two-dimentional coherence transfer function of confocal system;
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods, obtain super resolution image.
4. a kind of super-resolution structure according to claim 3 detects the formation method of confocal coherent imaging device, it is characterized in that: described step one specifically comprises: described test surface adopts non-homogeneous detection mode, detection sensitivity coefficient in test surface is made to become Sine distribution, detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system.
5. a kind of super-resolution structure according to claim 4 detects the formation method of confocal coherent imaging device, it is characterized in that: described test surface adopts non-homogeneous detection mode, integration is carried out in test surface region, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution.
6. a kind of super-resolution structure according to claim 3 detects the formation method of confocal coherent imaging device, it is characterized in that: the method that described step 2 obtains the three-dimensional amplitude points spread function of confocal system comprises: root of making even after converting the integration light intensity described in step one to Three dimensional convolution form.
7. a kind of super-resolution structure according to claim 3 detects the formation method of confocal coherent imaging device, it is characterized in that: described scanning system 7 detects the invariant position of hot spot at test surface in scanning process.
8. a kind of super-resolution structure according to claim 3 detects the formation method of confocal coherent imaging device, it is characterized in that: described detection hot spot light intensity root is multiplied by circular function that radius is Airy disk radius and realizes pin hole detection to light intensity integration in the circular function after calculating.
CN201510868029.6A 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method Expired - Fee Related CN105547145B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510868029.6A CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510868029.6A CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Publications (2)

Publication Number Publication Date
CN105547145A true CN105547145A (en) 2016-05-04
CN105547145B CN105547145B (en) 2019-02-05

Family

ID=55826508

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510868029.6A Expired - Fee Related CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Country Status (1)

Country Link
CN (1) CN105547145B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107085290A (en) * 2017-06-12 2017-08-22 哈尔滨工业大学 A kind of Laser Scanning Confocal Microscope parallel scan device and scan method based on scanning galvanometer and semiconductor laser
CN108535217A (en) * 2018-04-08 2018-09-14 雄安华讯方舟科技有限公司 optical coherence tomography system
CN109883955A (en) * 2019-03-04 2019-06-14 哈尔滨工业大学 Obtain the device and method of the optimum structure probe function of structure detection micro imaging system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614457A (en) * 2004-11-30 2005-05-11 哈尔滨工业大学 Confocal interference microscope with high-space resolution imaging ability
CN101182992A (en) * 2007-12-27 2008-05-21 哈尔滨工业大学 Compound shade ultra-distinguish differential confocal measurement method and device
US20110235045A1 (en) * 2008-10-10 2011-09-29 Universitaet Stuttgart Method and apparatus for interferometry
US20110310395A1 (en) * 2010-06-18 2011-12-22 National Taiwan University Three-dimensional optical coherence tomography confocal imaging apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614457A (en) * 2004-11-30 2005-05-11 哈尔滨工业大学 Confocal interference microscope with high-space resolution imaging ability
CN101182992A (en) * 2007-12-27 2008-05-21 哈尔滨工业大学 Compound shade ultra-distinguish differential confocal measurement method and device
US20110235045A1 (en) * 2008-10-10 2011-09-29 Universitaet Stuttgart Method and apparatus for interferometry
US20110310395A1 (en) * 2010-06-18 2011-12-22 National Taiwan University Three-dimensional optical coherence tomography confocal imaging apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MIN CHANG ET AL: "Factors Influencing the Resolution of the Confocal Laser Scanning Optical Microscope", 《ADVANCES IN OPTOELECTRONICS AND MICRO/NANO-OPTICS》 *
ZHENGJUN LIU ET AL: "Super-resolution imaging based on virtual airy spot", 《PROC. OF SPIE》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107085290A (en) * 2017-06-12 2017-08-22 哈尔滨工业大学 A kind of Laser Scanning Confocal Microscope parallel scan device and scan method based on scanning galvanometer and semiconductor laser
CN107085290B (en) * 2017-06-12 2019-02-01 哈尔滨工业大学 A kind of Laser Scanning Confocal Microscope parallel scan device and scan method based on scanning galvanometer and semiconductor laser
CN108535217A (en) * 2018-04-08 2018-09-14 雄安华讯方舟科技有限公司 optical coherence tomography system
CN109883955A (en) * 2019-03-04 2019-06-14 哈尔滨工业大学 Obtain the device and method of the optimum structure probe function of structure detection micro imaging system
CN109883955B (en) * 2019-03-04 2021-10-08 哈尔滨工业大学 Device and method for obtaining optimal structure detection function of structure detection microscopic imaging system

Also Published As

Publication number Publication date
CN105547145B (en) 2019-02-05

Similar Documents

Publication Publication Date Title
CN105319195B (en) A kind of super-resolution structure detection array confocal fluorescent imaging device and its imaging method
CN105758799B (en) A kind of super-resolution array virtual architecture optical illumination imaging device and its imaging method
CN100398980C (en) Three-dimensional super-resolution confocal array scanning and micro-detecting method and device
CN105486638B (en) A kind of super-resolution array scanning Structured Illumination imaging device and its imaging method
US10139219B2 (en) Optical distance measuring apparatus
CN105510229A (en) Super-resolution virtual structural light illuminated imaging device and imaging method thereof
CN102636118A (en) Laser three-differential cofocal theta imaging detection method
CN104568982A (en) Detection method and detection system for sub-surface defects of optical components
CN105547145A (en) Super-resolution structure detection confocal coherent imaging device and imaging method thereof
JP6194404B2 (en) Optical distance measuring device
Maruyama et al. Confocal volume in laser Raman microscopy depth profiling
Komuro et al. Object plane detection and phase-amplitude imaging based on transport of intensity equation
CN105319196B (en) A kind of super-resolution structure detection confocal fluorescent imaging device and its imaging method
Arvidson et al. Lateral resolution enhancement of vertical scanning interferometry by sub-pixel sampling
Xue et al. Quantitative interferometric microscopy cytometer based on regularized optical flow algorithm
CN104931481A (en) Laser biaxial differential confocal induction breakdown-Raman spectrum imaging detecting method and device
Wang et al. Divided-aperture differential confocal fast-imaging microscopy
Trujillo-Sevilla et al. High-resolution wave front phase sensor for silicon wafer metrology
CN105547144A (en) Super-resolution structure detection array confocal coherent imaging device and imaging method thereof
CN103256888B (en) A kind of super-resolution moving grating confocal imaging apparatus and method
CN103245292A (en) Super-resolution acousto-optic modulation confocal imaging device and method
CN1261791C (en) Shaping circular light three differential confocal microscope
WO2020037837A1 (en) Three-dimensional imaging apparatus based on k space transformation and imaging method thereof
JP7090334B2 (en) Optical distance measuring device
Kume et al. Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190205