CN105509816A - 一种基于法布里珀罗原理的传感器 - Google Patents
一种基于法布里珀罗原理的传感器 Download PDFInfo
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- CN105509816A CN105509816A CN201610064409.9A CN201610064409A CN105509816A CN 105509816 A CN105509816 A CN 105509816A CN 201610064409 A CN201610064409 A CN 201610064409A CN 105509816 A CN105509816 A CN 105509816A
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 85
- 238000006073 displacement reaction Methods 0.000 claims abstract description 63
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- 238000005259 measurement Methods 0.000 claims description 89
- 230000003287 optical effect Effects 0.000 claims description 28
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
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Claims (38)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN201610064409.9A CN105509816B (zh) | 2016-01-29 | 2016-01-29 | 一种基于法布里珀罗原理的传感器 |
US15/342,610 US10145668B2 (en) | 2016-01-29 | 2016-11-03 | Fabry-Perot(F-P) sensor with sliding block having inclined reflective surface |
Applications Claiming Priority (1)
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CN201610064409.9A CN105509816B (zh) | 2016-01-29 | 2016-01-29 | 一种基于法布里珀罗原理的传感器 |
Publications (2)
Publication Number | Publication Date |
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CN105509816A true CN105509816A (zh) | 2016-04-20 |
CN105509816B CN105509816B (zh) | 2018-02-16 |
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CN201610064409.9A Active CN105509816B (zh) | 2016-01-29 | 2016-01-29 | 一种基于法布里珀罗原理的传感器 |
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US (1) | US10145668B2 (zh) |
CN (1) | CN105509816B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019028943A1 (zh) * | 2017-08-08 | 2019-02-14 | 江苏弘开传感科技有限公司 | 一种微波谐振腔的腔长测量装置、传感器 |
WO2019028945A1 (zh) * | 2017-08-08 | 2019-02-14 | 江苏弘开传感科技有限公司 | 一种压强传感器 |
CN109764804A (zh) * | 2019-02-26 | 2019-05-17 | 江苏弘开传感科技有限公司 | 一种基于法布里-珀罗原理的位移传感器 |
WO2019173944A1 (zh) * | 2018-03-12 | 2019-09-19 | 江苏弘开传感科技有限公司 | 一种倾斜仪 |
CN110595379A (zh) * | 2019-10-22 | 2019-12-20 | 武汉理工大学 | 一种全同光纤光栅长距离隧道截面变形监测报警*** |
CN110940442A (zh) * | 2018-09-21 | 2020-03-31 | 国家电网有限公司 | 一种基于法布里-珀罗原理的高灵敏度测力计及测力方法 |
CN111323062A (zh) * | 2020-04-28 | 2020-06-23 | 深圳市特发信息股份有限公司 | 一种多通道光纤预警设备的安装机构 |
CN113670359A (zh) * | 2021-08-26 | 2021-11-19 | 中国核动力研究设计院 | 一种光纤珐珀传感器高速解调***和方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110654680A (zh) * | 2018-06-29 | 2020-01-07 | 鸿富锦精密电子(郑州)有限公司 | 伸缩机构 |
CN111289472B (zh) * | 2020-03-11 | 2024-07-02 | 大连理工大学 | 一种基于法珀光纤探针的纳米精度钢筋表面腐蚀深度测试装置 |
CN113143231B (zh) * | 2021-04-19 | 2023-08-22 | 武汉理工大学 | 一种人体有创压力温度多参量实时光纤检测方法与*** |
CN114152279B (zh) * | 2021-11-08 | 2024-05-10 | 四川泛华航空仪表电器有限公司 | 一种基于光纤微光液体传感器检测***的检测方法 |
CN115355977B (zh) * | 2022-10-11 | 2024-06-07 | 季华实验室 | 振动检测装置、设备及振动检测方法 |
CN115371582B (zh) * | 2022-10-26 | 2023-03-24 | 上海拜安传感技术有限公司 | 光纤f-p应变计及其组装方法 |
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CN86104916A (zh) * | 1986-08-08 | 1988-02-17 | 中国科学技术大学 | 斜行光干涉仪伸缩计量方法及装置 |
DE3816950A1 (de) * | 1988-05-18 | 1989-11-30 | Siemens Ag | Vorrichtung zur optischen messung einer weglaenge oder einer weglaengenaenderung |
US5394741A (en) * | 1990-07-11 | 1995-03-07 | Olympus Optical Co., Ltd. | Atomic probe microscope |
DE102004020059A1 (de) * | 2004-04-20 | 2005-11-24 | BAM Bundesanstalt für Materialforschung und -prüfung | Messvorrichtung und Verfahren zur diskontinuierlichen Absolutmessung von Verschiebungen |
CN202748040U (zh) * | 2012-06-07 | 2013-02-20 | 上海森珀光电科技有限公司 | 一种光纤光栅井盖开关状态磁感应器 |
CN104034274A (zh) * | 2013-03-04 | 2014-09-10 | 赵恩国 | 一种光纤应变传感结构体 |
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DE3369196D1 (en) | 1982-02-24 | 1987-02-19 | Kent Scient Ind Projects | Optical displacement sensing apparatus |
GB8902034D0 (en) | 1989-01-31 | 1989-03-22 | Kent Scient Ind Projects | Optical displacement sensor |
US5420688A (en) | 1992-12-14 | 1995-05-30 | Farah; John | Interferometric fiber optic displacement sensor |
US5565987A (en) * | 1995-03-23 | 1996-10-15 | Anvik Corporation | Fabry-Perot probe profilometer having feedback loop to maintain resonance |
US6281976B1 (en) | 1997-04-09 | 2001-08-28 | The Texas A&M University System | Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement |
KR100332833B1 (ko) | 1999-04-23 | 2002-04-17 | 윤덕용 | 투과형 외인성 패브리-페롯 광섬유 센서와, 이를 이용한 변형률 및 온도 측정방법 |
US7492463B2 (en) | 2004-04-15 | 2009-02-17 | Davidson Instruments Inc. | Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor |
US7134346B2 (en) | 2004-04-15 | 2006-11-14 | Davidson Instruments Inc. | Differential pressure transducer with Fabry-Perot fiber optic displacement sensor |
EP1869737B1 (en) | 2005-03-16 | 2021-05-12 | Davidson Instruments, Inc. | High intensity fabry-perot sensor |
US7355723B2 (en) | 2006-03-02 | 2008-04-08 | Symphony Acoustics, Inc. | Apparatus comprising a high-signal-to-noise displacement sensor and method therefore |
US7359067B2 (en) | 2006-04-07 | 2008-04-15 | Symphony Acoustics, Inc. | Optical displacement sensor comprising a wavelength-tunable optical source |
US7551295B2 (en) | 2006-06-01 | 2009-06-23 | Symphony Acoustics, Inc. | Displacement sensor |
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2016
- 2016-01-29 CN CN201610064409.9A patent/CN105509816B/zh active Active
- 2016-11-03 US US15/342,610 patent/US10145668B2/en active Active
Patent Citations (6)
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CN86104916A (zh) * | 1986-08-08 | 1988-02-17 | 中国科学技术大学 | 斜行光干涉仪伸缩计量方法及装置 |
DE3816950A1 (de) * | 1988-05-18 | 1989-11-30 | Siemens Ag | Vorrichtung zur optischen messung einer weglaenge oder einer weglaengenaenderung |
US5394741A (en) * | 1990-07-11 | 1995-03-07 | Olympus Optical Co., Ltd. | Atomic probe microscope |
DE102004020059A1 (de) * | 2004-04-20 | 2005-11-24 | BAM Bundesanstalt für Materialforschung und -prüfung | Messvorrichtung und Verfahren zur diskontinuierlichen Absolutmessung von Verschiebungen |
CN202748040U (zh) * | 2012-06-07 | 2013-02-20 | 上海森珀光电科技有限公司 | 一种光纤光栅井盖开关状态磁感应器 |
CN104034274A (zh) * | 2013-03-04 | 2014-09-10 | 赵恩国 | 一种光纤应变传感结构体 |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109387234B (zh) * | 2017-08-08 | 2021-11-16 | 江苏弘开传感科技有限公司 | 一种腔长测量装置、传感器 |
WO2019028945A1 (zh) * | 2017-08-08 | 2019-02-14 | 江苏弘开传感科技有限公司 | 一种压强传感器 |
CN109387309A (zh) * | 2017-08-08 | 2019-02-26 | 江苏弘开传感科技有限公司 | 一种压强传感器 |
CN109387234A (zh) * | 2017-08-08 | 2019-02-26 | 江苏弘开传感科技有限公司 | 一种微波谐振腔的腔长测量装置、传感器 |
WO2019028943A1 (zh) * | 2017-08-08 | 2019-02-14 | 江苏弘开传感科技有限公司 | 一种微波谐振腔的腔长测量装置、传感器 |
CN109387309B (zh) * | 2017-08-08 | 2024-06-18 | 陈艺征 | 一种压强传感器 |
WO2019173944A1 (zh) * | 2018-03-12 | 2019-09-19 | 江苏弘开传感科技有限公司 | 一种倾斜仪 |
CN110940442A (zh) * | 2018-09-21 | 2020-03-31 | 国家电网有限公司 | 一种基于法布里-珀罗原理的高灵敏度测力计及测力方法 |
CN109764804A (zh) * | 2019-02-26 | 2019-05-17 | 江苏弘开传感科技有限公司 | 一种基于法布里-珀罗原理的位移传感器 |
CN110595379A (zh) * | 2019-10-22 | 2019-12-20 | 武汉理工大学 | 一种全同光纤光栅长距离隧道截面变形监测报警*** |
CN110595379B (zh) * | 2019-10-22 | 2021-07-06 | 武汉理工大学 | 一种全同光纤光栅长距离隧道截面变形监测报警*** |
CN111323062B (zh) * | 2020-04-28 | 2021-08-06 | 深圳市特发信息股份有限公司 | 一种多通道光纤预警设备的安装机构 |
CN111323062A (zh) * | 2020-04-28 | 2020-06-23 | 深圳市特发信息股份有限公司 | 一种多通道光纤预警设备的安装机构 |
CN113670359A (zh) * | 2021-08-26 | 2021-11-19 | 中国核动力研究设计院 | 一种光纤珐珀传感器高速解调***和方法 |
Also Published As
Publication number | Publication date |
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CN105509816B (zh) | 2018-02-16 |
US20170219333A1 (en) | 2017-08-03 |
US10145668B2 (en) | 2018-12-04 |
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Inventor after: Chen Changlin Inventor after: Yuan Yong Inventor after: Gao Qiang Inventor after: Liu Xian Inventor after: Yu Qingxu Inventor after: Zhang Zhengping Inventor after: Li Hua Inventor after: Jing Xiuyan Inventor after: Yi Chuanbao Inventor before: Tang Yan Inventor before: Jing Xiuyan Inventor before: Yi Chuanbao Inventor before: Chen Yizheng Inventor before: Yuan Yong Inventor before: Gao Qiang Inventor before: Liu Xian Inventor before: Yu Qingxu Inventor before: Chen Changlin Inventor before: Zhang Zhengping Inventor before: Li Hua |
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