CN105489526B - A kind of semiconductor equipment shunting supercharging device and its control method - Google Patents
A kind of semiconductor equipment shunting supercharging device and its control method Download PDFInfo
- Publication number
- CN105489526B CN105489526B CN201410479987.XA CN201410479987A CN105489526B CN 105489526 B CN105489526 B CN 105489526B CN 201410479987 A CN201410479987 A CN 201410479987A CN 105489526 B CN105489526 B CN 105489526B
- Authority
- CN
- China
- Prior art keywords
- fan
- electrical control
- control electric
- electric fan
- governor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Control Of Positive-Displacement Air Blowers (AREA)
Abstract
The present invention relates to a kind of semiconductor equipment shunting supercharging devices and its control method.Apparatus of the present invention include dividing wind box, and the air outlet of collection air port alignment air feed system shunts the wind of air outlet, relieve heat mouth is separately connected electrical control electric fan；Electrical control electric fan is two, is all connected with a point wind box；Fan governor connects electrical control electric fan, the rotating speed for controlling electrical control electric fan, and then adjusts wind flow and uniformity；Power supply connects the fan governor, for powering to the fan governor.Method includes：Setting speed is inputted by the input unit in fan governor；Setting speed is subtracted in the processor that the actual speed of electrical control electric fan is input in fan governor；The input is converted to PWM value by the processor in fan governor by PID control, and the PWM value is passed to electrical control electric fan：The present invention carries out the adjustment of shunting supercharging by the wind flow distribution of air feed system, ensure that the uniformity of operating area wind flow, largely saves the reprocessing time, reduces equipment and adjust the period.
Description
Technical field
The present invention relates to semicon industry production field, specially a kind of semiconductor equipment shunting supercharging device and its control
Method processed.
Background technology
In the production process of the preceding road technique wafer of semiconductor, because process complexity is with high costs, to wafer production capacity and qualification
Rate requires very strict.It, can be often uneven because of humiture inside equipment and wind flow in semiconductor equipment actual production
Property and cause production capacity reduce, cannot be satisfied product qualification rate.In the prior art, the direct air draft of air feed system is to working region, and
The distribution of air feed system and inhomogeneities can not ensure wafer process demand, need repeatedly to be adjusted, when seriously affecting operation
Between, reduce accepted product percentage.
Invention content
Place aiming at the above shortcomings existing in the prior art, the technical problem to be solved in the present invention is to provide one kind partly to lead
Body equipment shunting supercharging device and its control method, solution make because of the inhomogeneities of air feed system wind flow in the prior art
The problem of wafer process precision susceptible.
Present invention technical solution used for the above purpose is：A kind of semiconductor equipment shunting supercharging device,
Including：
Wind box, including a collection air port and multiple relieve heat mouths, collection air port is divided to be connected to relieve heat mouth, collection air port alignment air feed system
The air outlet of system shunts the wind of air outlet, and each relieve heat mouth connects 1 electrical control electric fan；
Electrical control electric fan is multiple, and quantity is consistent with scattered inlet number, is all connected with a point wind box；
Fan governor, connect electrical control electric fan, the rotating speed for controlling electrical control electric fan, so adjust wind flow and uniformly
Property；
Power supply connects the fan governor, for powering to the fan governor.
The fan governor includes：
Processor connects electrical control electric fan, receives the frequency signal of electrical control electric fan, the pwm signal of generation is passed to automatically controlled
Fan；
Display device, connection processing device, for showing wind speed；
Input unit, connection processing device carry out wind speed setting for external.
The fan governor further includes house dog, connection processing device, for making place when processor program occurs abnormal
Device is managed to reset.
The power supply is 24V DC power supplies.
A kind of semiconductor equipment control method of shunting supercharging device, includes the following steps：
Setting speed R is inputted by the input unit in fan governor；
Setting speed R is subtracted in the processor that the actual speed Y of electrical control electric fan is input in fan governor；
The input is converted to PWM value by the processor in fan governor by following formula, and the PWM value is passed to electricity
Control fan：
Wherein, e=R-Y is setting speed and actual difference, and device exports PWM value to u in order to control, and Y is that electrical control electric fan is practical
Rotating speed, t are time, KPFor ratio control parameter, KIIntegration control parameter, KDFor differential control parameter.
The present invention has the following advantages and beneficial effects：
1. the present invention carries out the adjustment of shunting supercharging by the wind flow distribution of air feed system, operating area wind ensure that
The uniformity of flow largely saves the reprocessing time, reduces equipment and adjusts the period.
2. the present invention uses automatically controlled adjusting electrical control electric fan rotating speed, simple operation and operating area wind flow can be effectively improved
The uniformity of distribution.
3. the present invention is using dividing wind box structure, can systematic wind flow and uniformity to air feed system be distributed,
Craft precision requirement of the equipment to wind flow is improved, the efficiency of actual production is promoted.
4. the present invention has simple in structure, realization convenience, lower-price characteristic.
Description of the drawings
Fig. 1 is the implementation illustration of apparatus of the present invention application；
Wherein, 1,24V power supplys, 2, fan governor, 3, air feed system, 4, air feed system air volume adjustment, 5, divide wind box, 6,
Pressurized electrically controlled fan, 7, shunting supercharging wind flow distribution；
Fig. 2 is fan governor principle schematic；
Fig. 3 is pid algorithm schematic diagram.
Specific implementation mode
The present invention is described in further detail with reference to the accompanying drawings and embodiments.
Apparatus of the present invention are at semiconductor equipment air feed system, alloing the wind flow of operating area to meet needed for equipment
Technological requirement achievees the purpose that the craft precision for effectively improving semiconductor crystal wafer and saves the equipment operation time.
The present invention is mounted on semiconductor equipment air feed system lower part.The ventilating duct provided when air feed system works it is single and
Wind flow is uneven, cannot be satisfied the process requirements of operating area wafer.Shunting supercharging device provided by the present invention can basis
The uneven distribution of air feed system and the process requirements of equipment optionally adjust electrical control electric fan rotating speed.
The specific work process of the present invention is as follows：
It is single and uneven in 3 air draft distribution channel of air feed system, as shown in Figure 1, by dividing wind box 5 to air feed system
3 air drafts of uniting are shunted, and provide power supply to fan governor 2 by 24V power supplys 1, and fan governor 2 is to electrical control electric fan
6 rotating speed is adjusted, and a point wind flow for wind box 5 is made to be uniformly distributed, and ultimately forms uniform wind flow 7 and is delivered to operating area.
In uneven wind flow in changing air feed system, multi gear can be carried out to fan governor 2 according to its inhomogeneities
Position is adjusted, and so that the electrical control electric fan 6 on point wind box 5 is pressurized and is formed the distinguished and admirable of stable and uniform, final to realize that air draft is uniform, meets technique
Demand.
Fan governor uses ARM for processor, passes through the input set target pressure of capture button, target electrical control electric fan
Rotating speed is fed back, processor carries out PID arithmetic by electrical control electric fan current rotating speed and rotating speed of target, carried out to electrical control electric fan with PWM
PID is adjusted, as shown in Fig. 2, this control method has many advantages, such as high speed, low error than general linear control.
Fan governor has self-checking function, when electrical control electric fan and when being connected with open circuit conditions of fan governor, system
It with automatic discrimination and can alarm, when program, which is run, occurs abnormal, house dog can be such that processor resets immediately.
If Fig. 3, R are setting speed, e is setting speed and actual difference (e=R-Y), and device exports PWM value to u in order to control,
For fan governor by electrical control electric fan feedback speed, Y is electrical control electric fan actual speed.
Controller obtains u by e by PID calculation formula.Finally by reconciling tri- parameter (K of PIDPIt is controlled for ratio
Parameter, KIIntegration control parameter, KDFor differential control parameter) come the control effect that recalls best.
Claims (1)
1. a kind of semiconductor equipment control method of shunting supercharging device, this method is based on semiconductor equipment shunting supercharging
What device was realized, which includes：
Wind box, including a collection air port and multiple relieve heat mouths, collection air port is divided to be connected to relieve heat mouth, collection air port alignment air feed system
Air outlet shunts the wind of air outlet, and each relieve heat mouth connects 1 electrical control electric fan；
Electrical control electric fan is multiple, and quantity is consistent with scattered inlet number, is all connected with a point wind box；
Fan governor connects electrical control electric fan, the rotating speed for controlling electrical control electric fan, and then adjusts wind flow and uniformity；Institute
Stating fan governor includes：Processor connects electrical control electric fan, receives the frequency signal of electrical control electric fan, and the pwm signal of generation is passed
Pass electrical control electric fan；Display device, connection processing device, for showing wind speed；Input unit, connection processing device, for it is external into
Sector-style speed is set；
Power supply connects the fan governor, for powering to the fan governor；
It is characterized in that, this approach includes the following steps：
Setting speed R is inputted by the input unit in fan governor；
Setting speed R is subtracted in the processor that the actual speed Y of electrical control electric fan is input in fan governor；
The input is converted to PWM value by the processor in fan governor by following formula, and the PWM value is passed to automatically controlled wind
Fan：
Wherein, e=R-Y is setting speed and actual difference, and device exports PWM value to u in order to control, and Y is electrical control electric fan actual speed,
T is time, KPFor ratio control parameter, KIIntegration control parameter, KDFor differential control parameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479987.XA CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479987.XA CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105489526A CN105489526A (en) | 2016-04-13 |
| CN105489526B true CN105489526B (en) | 2018-08-14 |
Family
ID=55676430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410479987.XA Active CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105489526B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102385366B1 (en) * | 2017-09-20 | 2022-04-08 | 삼성전자주식회사 | Control system of semiconductor manufacturing equipment, method of controlling the same, and method of fabricating integrated circuit using the same and method of fabricating processor |
| CN111162004B (en) * | 2019-12-27 | 2022-08-19 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Method and device for adjusting internal environment of semiconductor equipment and electronic equipment |
| CN113327869A (en) * | 2020-12-17 | 2021-08-31 | 钟兴进 | Shunting and pressurizing device and method for semiconductor equipment |
| CN114151373B (en) * | 2021-10-28 | 2024-01-23 | 苏州浪潮智能科技有限公司 | Method, system, terminal and storage medium for regulating and controlling rotation speed of server fan |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2379626Y (en) * | 1999-03-05 | 2000-05-24 | 李少魁 | Double air flow air conditioning installation |
| CN202171301U (en) * | 2011-06-15 | 2012-03-21 | 上海聚舍机械制造有限公司 | Fresh air energy-saving system device in machine room |
| EP2557591A1 (en) * | 2010-04-08 | 2013-02-13 | Sharp Kabushiki Kaisha | Heating control system, deposition device provided therewith, and temperature control method |
-
2014
- 2014-09-17 CN CN201410479987.XA patent/CN105489526B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2379626Y (en) * | 1999-03-05 | 2000-05-24 | 李少魁 | Double air flow air conditioning installation |
| EP2557591A1 (en) * | 2010-04-08 | 2013-02-13 | Sharp Kabushiki Kaisha | Heating control system, deposition device provided therewith, and temperature control method |
| CN202171301U (en) * | 2011-06-15 | 2012-03-21 | 上海聚舍机械制造有限公司 | Fresh air energy-saving system device in machine room |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105489526A (en) | 2016-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105489526B (en) | A kind of semiconductor equipment shunting supercharging device and its control method | |
| CN103028480B (en) | Intelligent control system for vertical mill based on fuzzy PID (proportion integration differentiation) algorithm | |
| CN104315683B (en) | Fuzzy PID (proportion integration differentiation) -based water-cooled air conditioner regulation and control method | |
| CN102883587B (en) | Controllable energy-saving heat dissipation system for communication room servers | |
| CN113231189A (en) | Intelligent control method and device for feeding and crushing balanced production of gravel coarse crushing workshop | |
| CN207067779U (en) | A kind of roller kilns temperature control device | |
| CN204493248U (en) | Rotation speed of fan bucking-out system | |
| CN204227584U (en) | The self balancing central air-conditioning of a kind of air outlet air quantity | |
| CN202785954U (en) | Glass tank furnace cooling device | |
| CN103318631A (en) | Speed control device of disk feeder | |
| CN207936411U (en) | A kind of textile manufacturing workshop of constant temperature and humidity | |
| CN204902119U (en) | Computer room of data center temperature intelligent control device | |
| CN208618482U (en) | A kind of industrial regeneration water constant pressure water supply system | |
| CN101574837A (en) | Device for controlling temperature of water tank of extruding machine | |
| CN204912088U (en) | Automatic air adjusting device | |
| CN206709796U (en) | Extruded product plane calibration system | |
| CN103885414A (en) | Distributed PID control magnetic levitation ball system based on CAN bus | |
| CN202951541U (en) | Improved structure of screw feeder | |
| CN205478486U (en) | Air -blower variable frequency control device based on power frequency motor | |
| CN107186217B (en) | Tungsten powder reduction equipment and control method thereof | |
| CN215721078U (en) | Automatic high pressure reducer of adjusting | |
| CN205966236U (en) | Resin flow closed -loop control device | |
| CN203756617U (en) | Energy conservation and emission reduction sulfuration machine group vacuum-pumping system | |
| CN107479586A (en) | A kind of cleaning machine flow control system and method | |
| CN204387439U (en) | Hot finishing mill emulsion flow amount control system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
|
| CP03 | Change of name, title or address |