CN105480932A - 一种惯性传感器的解粘连结构及其方法 - Google Patents
一种惯性传感器的解粘连结构及其方法 Download PDFInfo
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- CN105480932A CN105480932A CN201610004863.5A CN201610004863A CN105480932A CN 105480932 A CN105480932 A CN 105480932A CN 201610004863 A CN201610004863 A CN 201610004863A CN 105480932 A CN105480932 A CN 105480932A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/0013—Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- Microelectronics & Electronic Packaging (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
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Abstract
Description
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Priority Applications (1)
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CN201610004863.5A CN105480932B (zh) | 2016-01-04 | 2016-01-04 | 一种惯性传感器的解粘连结构及其方法 |
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CN201610004863.5A CN105480932B (zh) | 2016-01-04 | 2016-01-04 | 一种惯性传感器的解粘连结构及其方法 |
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CN105480932A true CN105480932A (zh) | 2016-04-13 |
CN105480932B CN105480932B (zh) | 2017-09-01 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105979100A (zh) * | 2016-06-30 | 2016-09-28 | 维沃移动通信有限公司 | 一种恢复惯性传感器工作状态的方法及移动终端 |
CN107991509A (zh) * | 2017-12-21 | 2018-05-04 | 成都工业学院 | 一种层结构质量块及其制作方法、加速度传感器及其制作方法 |
CN109060229A (zh) * | 2018-06-13 | 2018-12-21 | 中国科学院电子学研究所 | 一种电容式压力传感器及其制造方法 |
CN109553059A (zh) * | 2017-09-25 | 2019-04-02 | 罗伯特·博世有限公司 | 微机械传感器组件 |
CN112551474A (zh) * | 2020-12-09 | 2021-03-26 | 北京航天控制仪器研究所 | 一种具有面内止挡的mems可动结构 |
CN116909092A (zh) * | 2023-09-07 | 2023-10-20 | 苏州敏芯微电子技术股份有限公司 | 惯性传感器及其制作方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030098618A1 (en) * | 2001-11-28 | 2003-05-29 | International Business Machines Corporation | Micro-electromechanical switch having a conductive compressible electrode |
US20030160540A1 (en) * | 2002-02-28 | 2003-08-28 | Network Photonics, Inc. | Systems and methods for overcoming stiction |
US20040022483A1 (en) * | 2001-07-03 | 2004-02-05 | Network Photonics, Inc. | Systems and methods for overcoming stiction using a lever |
WO2009101757A1 (ja) * | 2008-02-14 | 2009-08-20 | Panasonic Corporation | コンデンサマイクロホン及びmemsデバイス |
CN203552946U (zh) * | 2013-10-29 | 2014-04-16 | 苏州科技学院 | 一种热致驱动可变电容器 |
CN104918194A (zh) * | 2014-03-14 | 2015-09-16 | 欧姆龙株式会社 | 声响转换器 |
CN205442630U (zh) * | 2016-01-04 | 2016-08-10 | 歌尔声学股份有限公司 | 一种惯性传感器的解粘连结构 |
-
2016
- 2016-01-04 CN CN201610004863.5A patent/CN105480932B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040022483A1 (en) * | 2001-07-03 | 2004-02-05 | Network Photonics, Inc. | Systems and methods for overcoming stiction using a lever |
US20030098618A1 (en) * | 2001-11-28 | 2003-05-29 | International Business Machines Corporation | Micro-electromechanical switch having a conductive compressible electrode |
US20030160540A1 (en) * | 2002-02-28 | 2003-08-28 | Network Photonics, Inc. | Systems and methods for overcoming stiction |
WO2009101757A1 (ja) * | 2008-02-14 | 2009-08-20 | Panasonic Corporation | コンデンサマイクロホン及びmemsデバイス |
CN203552946U (zh) * | 2013-10-29 | 2014-04-16 | 苏州科技学院 | 一种热致驱动可变电容器 |
CN104918194A (zh) * | 2014-03-14 | 2015-09-16 | 欧姆龙株式会社 | 声响转换器 |
CN205442630U (zh) * | 2016-01-04 | 2016-08-10 | 歌尔声学股份有限公司 | 一种惯性传感器的解粘连结构 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105979100A (zh) * | 2016-06-30 | 2016-09-28 | 维沃移动通信有限公司 | 一种恢复惯性传感器工作状态的方法及移动终端 |
CN105979100B (zh) * | 2016-06-30 | 2019-02-15 | 维沃移动通信有限公司 | 一种恢复惯性传感器工作状态的方法及移动终端 |
CN109553059A (zh) * | 2017-09-25 | 2019-04-02 | 罗伯特·博世有限公司 | 微机械传感器组件 |
CN107991509A (zh) * | 2017-12-21 | 2018-05-04 | 成都工业学院 | 一种层结构质量块及其制作方法、加速度传感器及其制作方法 |
CN107991509B (zh) * | 2017-12-21 | 2024-02-20 | 成都工业学院 | 一种层结构质量块及其制作方法、加速度传感器及其制作方法 |
CN109060229A (zh) * | 2018-06-13 | 2018-12-21 | 中国科学院电子学研究所 | 一种电容式压力传感器及其制造方法 |
CN109060229B (zh) * | 2018-06-13 | 2019-12-20 | 中国科学院电子学研究所 | 一种电容式压力传感器及其制造方法 |
CN112551474A (zh) * | 2020-12-09 | 2021-03-26 | 北京航天控制仪器研究所 | 一种具有面内止挡的mems可动结构 |
CN112551474B (zh) * | 2020-12-09 | 2022-05-24 | 北京航天控制仪器研究所 | 一种具有面内止挡的mems可动结构 |
CN116909092A (zh) * | 2023-09-07 | 2023-10-20 | 苏州敏芯微电子技术股份有限公司 | 惯性传感器及其制作方法 |
CN116909092B (zh) * | 2023-09-07 | 2023-11-17 | 苏州敏芯微电子技术股份有限公司 | 惯性传感器及其制作方法 |
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