CN105428966A - External optical path compensation adjusting device and laser device formed thereby - Google Patents
External optical path compensation adjusting device and laser device formed thereby Download PDFInfo
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- CN105428966A CN105428966A CN201510974621.4A CN201510974621A CN105428966A CN 105428966 A CN105428966 A CN 105428966A CN 201510974621 A CN201510974621 A CN 201510974621A CN 105428966 A CN105428966 A CN 105428966A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- Optics & Photonics (AREA)
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention provides a turning mirror adjustment-based external optical path compensation adjusting device, which comprises a turning mirror, a piezoelectric ceramic micro-displacement actuator and a rotatable base. The turning mirror is driven to rotate by changing the size of a voltage applied to the micro-displacement actuator, so that automatic compensation of an optical path is achieved. On this basis, the invention provides an external optical path compensation adjusting device-based laser device, which comprises a laser device body, the external optical path compensation adjusting device, an optical path shaping module, a focusing spherical mirror and a feedback control module, wherein the feedback control module detects an output laser and adjusts an offset light beam to a standard position by adjusting the deflection angle of the turning mirror through an optical path compensation adjusting system; the stability of laser output powers and the stability of the modes of the laser device under various duty ratios can be ensured; and the overall stability of the laser device is improved, so that efficient and stable working of a radio frequency slab laser device processing system is ensured; the processing quality of a processed device is ensured; and the processing efficiency is improved.
Description
Technical field
The invention belongs to laser technology field, design and develop a kind of based on high power RF CO slab
2the turning mirror of laser regulates the bucking-out system of shaping light path skew, radio frequency CO slab
2the orthopedic systems light path skew that laser chamber mirror thermal distoftion causes compensates.
Background technology
High-power strip CO
2laser beam quality is high, and structure is closely small and exquisite, undesirable gas heat exchanger, and optical loss is low, and thermal stability is very high, and gas consumption is low, does not have gas flow, and resonant cavity optics can not pollute, beam quality quality factor M
2can 1.2 be reached, represent current CO
2the developing direction of laser.Laser adopts the project organization of surely non--waveguide hybrid chamber, and this resonant cavity is made up of outgoing mirror, speculum and electric discharge planar waveguide.Laser near field output facula is approximately the straight line of thickness inequality in the direction being parallel to electrode plane; In far field, light beam is very large at the directional divergence perpendicular to electrode plane, and needing to carry out outer light path beam shaping could realize commercial Application.
High power RF CO slab
2the chamber mirror thermal distoftion of laser can cause light beam unstable in beam shaping system.The secondary lobe of initial output beam effectively can not be eliminated by beam shaping system spatial filter, radio-frequency (RF) board bar CO
2there is secondary lobe in the output beam after laser shaping, output power stability is affected.Light spot shape is also no longer desirable subcircular basic mode Gaussian Profile simultaneously, and beam quality does not improve.The instability of power output and beam quality can not get improving the quality having had a strong impact on laser processing.In addition, the transverse direction imbalance of spatial filter means the increase of the loss of power output equally, if laterally imbalance is serious for spatial filter, the energy of center main peak will be made also to be eliminated.Because it is Gaussian Profile, imbalance displacement is larger, and the power of loss will sharply increase.
Existing adjustment chamber mirror method is lacked of proper care for light path, and place electric-heating-wire-heating at the back side of chamber mirror, its deformation direction is identical with the deformation direction of chamber mirror reflecting surface, and identical deformation is made at the pull chamber mirror back side, reaches the object of compensated regulation.The shortcoming of this compensated regulation method: one: the reaction time of heating is longer, the advantage regulated in real time is not obvious; Its two: computer heating control difficulty is comparatively large, can affect the effect of compensated regulation.Existing spatial filter method, by regulating spatial filter position, coupling light beam focal line and spatial filter slit.The method real-time is comparatively strong, but degree of regulation is not high, wants to obtain high accuracy adjustment and redesign need be used to select new micrometric displacement locator, redesign regulating system.In addition, the method does not carry out any correction to the optical axis of skew, and by means of only the imbalance regulating spatial filter stop position to adapt to light path, its beam-pointing will be deteriorated, and practicality is not strong.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of outer optical path compensation adjusting device regulated based on turning mirror, the light beam of skew is its object is to be adjusted to normal place, make laser output mode and power reach the level before offseting with light path, solve high power RF CO slab thus
2the chamber mirror thermal distoftion of laser causes the technical problem of light beam instability in beam shaping system.
For achieving the above object, according to one aspect of the present invention, provide a kind of outer optical path compensation adjusting device regulated based on turning mirror.Realize turning mirror around the rotation of the central axis of rotatable pedestal by micro-displacement driver to regulate.Focusing on the launching position on spherical mirror by changing light beam during turning mirror rotation, after the reflection of line focus spherical mirror, the position of light beam meeting focal line will change.When light beam meeting focal line again Regressive filter stop position, the laser power that laser exports reaches maximum, is also filtered out by spatial filter in hot spot because light path offsets the secondary lobe caused simultaneously.Realize the object that laser output mode and power reach the level before offseting with light path.
Technical scheme of the present invention is:
A kind of outer optical path compensation adjusting device, it comprises turning mirror, micro-displacement driver and rotatable pedestal, it is characterized in that:
Described turning mirror is at right angles triangular prism shaped, and be fixed on described rotatable pedestal by the bottom surface of self, triangular prism shaped inclined-plane is reflecting surface, for by the incident laser direction perpendicular to fixing bottom surface, turns to 90 degree, changes into and is parallel to direction, fixing bottom surface; By the rotation of described rotatable pedestal, the deflection angle of adjustable described turning mirror;
Described micro-displacement driver is Piezoelectric, and its one end is fixed, and the other end is flexibly connected by connecting rod circular shaft and second connecting rod by first connecting rod; The other end of second connecting rod is connected to another bottom surface of turning mirror, rotates fixing in the middle part of second connecting rod by fixing circular shaft; First connecting rod move horizontally the rotation that second connecting rod can be driven relative to fixing circular shaft; By changing the size being added to voltage on micro-displacement driver, changing the horizontal displacement of first connecting rod, drive second connecting rod two ends to rotate around circular shaft, thus the turning mirror driving its other end to be fixedly connected with rotating.
Further, in described outer optical path compensation adjusting device, the outer convexity handle that described rotatable pedestal comprises metal derby, groups of springs, indent cup dolly and matches with it, metal derby is used for fixing described turning mirror, outer convexity handle one end is fixedly connected with metal derby, and the other end has a round tube hole, by base circular shaft, make evagination disc rotate tangent cooperation with the indent disc of indent cup dolly, outer convexity handle can with base circular shaft for axle center be rotated relative to indent cup dolly.
Further, in described outer optical path compensation adjusting device, the spring that described groups of springs is laid by identical with mechanics parameter, the rectangular triangle of three root architecture sizes forms.
Based on described outer optical path compensation adjusting device, the present invention proposes a kind of laser, comprises laser, outer optical path compensation adjusting device, light path Shaping Module, focuses on spherical mirror and feedback control module, it is characterized in that:
The turning mirror of outer optical path compensation adjusting device is aimed at laser and is gone out optical window, after being reflected by laser, incides and focuses on spherical mirror;
Described focusing spherical mirror and turning mirror are positioned at same light path, and its focus place is the spatial filter of light path Shaping Module; The non-steady direction of laser line focus spherical mirror to output beam focuses on, and after collimating the wave guide direction of output beam, sends into light path Shaping Module;
Described light path Shaping Module comprises spatial filter, cylindrical mirror, and export spherical mirror, three is on same optical axis; Before its central column face mirror is positioned at and exports spherical mirror, after spatial filter; For eliminating the secondary lobe in output beam, improve the beam quality in the non-steady direction of output beam;
The transducer of feedback control module is arranged in Output of laser light path, and its output is connected with outer optical path compensation adjusting device, for controlling turning mirror action; Feedback control module detects the shoot laser of light path Shaping Module by transducer, according to the change of the Output optical power detected, calculate the voltage needing to be carried on micro-displacement driver, then outer optical path compensation adjusting device is given by electrical signal transfer, control micro-displacement driver and produce corresponding displacement, thus make turning mirror deflection angle, reach the object automatically regulated.
In general, the above technical scheme conceived by the present invention compared with prior art, owing to only needing to regulate turning mirror deflection angle, do not change the position of the device such as Primary Component spherical mirror, spatial filter, cylindrical mirror of light beam shaping module, following beneficial effect can be obtained: the outer optical path compensation adjusting device that 1, the present invention proposes can regulate radio-frequency (RF) board bar CO with higher precision
2because of orthopedic systems light path offset problem that chamber mirror thermal distoftion causes in laser works process; 2, ensure the stable of the stable and mode profile of laser power output under each duty ratio, improve the resistance to overturning of laser; 3, realizing migration fine motion simultaneously, beam-pointing sex chromosome mosaicism is avoided; 4, ensure the crudy of processed device, improve working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is outer optical path compensation adjusting device schematic diagram;
Fig. 2 is the laser principle schematic based on outer optical path compensation adjusting device;
Fig. 3 is the overall laser design schematic block diagram based on outer optical path compensation adjusting device;
Fig. 4 is that light path does not offset end view;
Fig. 5 is that light path does not offset vertical view;
Fig. 6 is the end view of light path offset;
Fig. 7 is the vertical view of light path offset;
Fig. 8 is light path end view after outer optical path compensation device regulates;
Fig. 9 is light path vertical view after outer optical path compensation device regulates;
Figure 10 is laser output power comparison diagram before and after regulating;
Figure 11 is facular model comparison diagram before and after regulating; A () is that before regulating, facular model figure (b) is facular model figure after regulating.
In figure: 1-laser, the outer optical path compensation device of 2-, 3-light path Shaping Module, 4-focuses on spherical mirror, 5-spatial filter, 6-cylindrical mirror, 7-exports spherical mirror, 8-feedback control module, 9-micro-displacement driver, 10-first connecting rod, 11-second connecting rod, 12-turning mirror, the rotatable pedestal of 13-, 14-metal derby, 15-groups of springs, the recessed cup dolly of 16-, 17-convexity handle, 18-base circular shaft, 19-connecting rod circular shaft, 20-fixes circular shaft.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As Fig. 1 shows, the outer optical path compensation adjusting device of the present embodiment is formed primarily of turning mirror 12, piezoelectric micro-displacement actuator 9 and rotatable pedestal 13.The convexity handle 17 that rotatable pedestal 13 comprises metal derby 14, groups of springs 15, recessed cup dolly 16 and matches with it, convexity handle 17 one end is fixedly connected with metal derby 14, convexity one end has a round tube hole, by base circular shaft 18 and the tangent placement of recessed cup dolly 16, convexity handle 17 can rotate relative to recessed cup dolly 16 for axle center with base circular shaft 18.Spring is separately fixed at the right angle of square metal block, and piezoelectric ceramic produces displacement, drivening rod, thus drives turning mirror movable, by the effect of spring, makes turning mirror produce angle change, thus changes light path, reach the object of adjustment light path.
Fig. 2 is shown in by system principle schematic diagram based on the laser of outer optical path compensation adjusting device, and overall system design schematic block diagram is shown in Fig. 3;
Fig. 4-9 gives light path skew and compensated regulation schematic diagram.
In Fig. 4,5, radio-frequency (RF) board bar CO
2the outer light path light beam shaping module of laser offsets without light path.Light beam is transferred to spherical mirror after turning mirror reflection, focus at spatial filter place after spherical mirror converges, the slit width of spatial filter equals light beam and focuses on rear main lobe width, main lobe can pass through completely, secondary lobe is filtered by spatial filter, after light beam shaping module, laser can obtain better mode profile, and beam quality is improved.In fig. 6 and 7, after non-steady waveguide cavity speculum generation thermal distoftion light path by the normal place shown in deflection graph 4,5.Light beam its focal position after mirror spherical mirror focuses on will no longer overlap with the position of spatial filter.The main lobe of light beam some stopped by spatial filter, be attended by a part of secondary lobe simultaneously and by spatial filter filtering, rear class light beam shaping module can not be entered into.Stopped because of main lobe and have secondary lobe to pass through, the final Output of laser power of laser will decline, and beam quality will be attended by secondary lobe.In Fig. 8,9, outer optical path compensation adjusting device is by regulating the deflection angle of turning mirror, and the light beam of skew is adjusted to normal place, and light beam main lobe will all pass through spatial filter again, secondary lobe will by filtering again simultaneously, and laser output mode and power reach the level before offseting with light path.
The effect of feedback control circuit is feedback regulation, and its course of work is first judge whether laser optical path offsets by the luminous power detecting output beam; Judge the size of light path side-play amount according to the minimizing of luminous power, calculate the magnitude of voltage needing to be carried on piezoelectric ceramic, by control circuit, voltage is applied on piezoelectric ceramic, thus change the angle of turning mirror, by optical path adjusting to normal place.Control procedure is carried out in real time, full-automatic regulation, ensures that the light path moment is all in normal place, thus ensures the stability of laser output power.
For the effect of the outer optical path compensation adjusting device of checking the present invention, replication experiment and the turning mirror control method measure of merit of turning mirror control method are carried out.
1, setting laser power, regulates the test of bucking voltage.Under specific laser power duty ratio, full scale adjustment is carried out to turning mirror, regulation voltage is spaced apart 0.1V, total regulation voltage is 1.12V, observe and the power output of laser under being recorded in each adjustable range, contrast with the calibration power parameter of laser under duty ratio corresponding, judge the regulating effect of light path compensation system.Outer optical path compensation adjustable range and duty ratio linear proportional example relation, therefore only need measure turning mirror under the highest use power and regulate whether can meet regulatory demand.
When piezoelectric ceramic control voltage reaches 0.9V, the output peak power of 2KW laser is 1843W, and this power and the laser standard laser power 1811W under 90% duty ratio closely; After voltage is more than 0.9V, the power output of laser starts to reduce, and this illustrates that adjustable range is beyond the scope needing to regulate, and makes outer light path offset criteria position again.Therefore apparatus of the present invention can meet laser in duty ratio is the regulatory demand under 90%.
2, setting compensation voltage, regulates laser power duty ratio.Selected 5%, 15%, 25%, 35%, 45%, 55%, 65%, 75% totally 8 experimental points, respectively add cavity mirror misalignment do not become regulating system and do not add the condition of outer optical path compensation adjusting device under the power output of testing laser device.Figure 10 is the comparison of front and back power output, can under low duty ratio, outer optical path compensation adjusting device is not obvious to the contribution of laser output power, after power is more than 50%, the effect of outer optical path compensation adjusting device is more and more obvious, and maximum work rate variance is about 100W.Figure 11 is the facular model comparison diagram that laser carries out that outer optical path compensation regulates front and back, and hot spot does not have secondary lobe substantially when duty ratio is 15%, be that 35%-75% all has secondary lobe, and the size of secondary lobe becomes large gradually in duty ratio; All occur without secondary lobe under each duty ratio after compensated regulation, the compensation to facular model that system well meets.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. an outer optical path compensation adjusting device, it comprises turning mirror (12), micro-displacement driver (9) and rotatable pedestal (13), it is characterized in that:
Described turning mirror (12) is at right angles triangular prism shaped, be fixed on described rotatable pedestal (13) by the bottom surface of self, triangular prism shaped inclined-plane is reflecting surface, for by the incident laser direction perpendicular to fixing bottom surface, turn to 90 degree, change into and be parallel to direction, fixing bottom surface; By the rotation of described rotatable pedestal (13), the deflection angle of adjustable described turning mirror (12);
Described micro-displacement driver (9) is Piezoelectric, and its one end is fixed, and the other end is flexibly connected by connecting rod circular shaft (19) and second connecting rod (11) by first connecting rod (10); The other end of second connecting rod (11) is connected to another bottom surface of turning mirror (12), and second connecting rod (11) middle part rotates fixing by fixing circular shaft (20); First connecting rod (10) move horizontally the rotation that second connecting rod (11) can be driven relative to fixing circular shaft (20); By changing the size being added to the upper voltage of micro-displacement driver (9), change the horizontal displacement of first connecting rod (10), drive second connecting rod (11) two ends to rotate around circular shaft (20), thus the turning mirror (12) driving its other end to be fixedly connected with rotate.
2. outer optical path compensation adjusting device according to claim 1, it is characterized in that, described rotatable pedestal (13) comprises metal derby (14), groups of springs (15), indent cup dolly (17) and the outer convexity handle (16) matched with it, metal derby (14) is for fixing described turning mirror (12), outer convexity handle (16) one end is fixedly connected with metal derby (14), the other end has a round tube hole, by base circular shaft (18), evagination disc (16) is made to rotate tangent cooperation with the indent disc of indent cup dolly (17), outer convexity handle (16) can with base circular shaft (18) for axle center be rotated relative to indent cup dolly (17).
3. outer optical path compensation adjusting device according to claim 1 and 2, is characterized in that, the spring that described groups of springs (15) is laid by identical with mechanics parameter, the rectangular triangle of three root architecture sizes forms.
4. the laser based on outer optical path compensation adjusting device described in claim 1 or 2 or 3, comprise laser (1), outer optical path compensation adjusting device (2), light path Shaping Module (3), focus on spherical mirror (4) and feedback control module (8), it is characterized in that:
The turning mirror of outer optical path compensation adjusting device (2) is aimed at laser (1) and is gone out optical window, after being reflected by laser (1), incides and focuses on spherical mirror (4);
Described focusing spherical mirror (4) and turning mirror are positioned at same light path, and its focus place is the spatial filter (5) of light path Shaping Module; The non-steady direction of laser line focus spherical mirror (4) to output beam focuses on, and after collimating the wave guide direction of output beam, sends into light path Shaping Module (3);
Described light path Shaping Module (3) comprises spatial filter (5), cylindrical mirror (6), and export spherical mirror (7), three is on same optical axis; Before its central column face mirror (6) is positioned at and exports spherical mirror (7), after spatial filter (5); For eliminating the secondary lobe in output beam, improve the beam quality in the non-steady direction of output beam;
The transducer of feedback control module (8) is arranged in Output of laser light path, and its output is connected with outer optical path compensation adjusting device (2), for controlling turning mirror action; Feedback control module (8) detects the shoot laser of light path Shaping Module (3) by transducer, according to the change of the Output optical power detected, calculate and need to be carried in the voltage on micro-displacement driver (9), then outer optical path compensation adjusting device (2) is given by electrical signal transfer, control micro-displacement driver (9) and produce corresponding displacement, thus make turning mirror deflection angle, reach the object automatically regulated.
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| CN201510974621.4A CN105428966A (en) | 2015-12-21 | 2015-12-21 | External optical path compensation adjusting device and laser device formed thereby |
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| CN201510974621.4A CN105428966A (en) | 2015-12-21 | 2015-12-21 | External optical path compensation adjusting device and laser device formed thereby |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106725845A (en) * | 2017-03-09 | 2017-05-31 | 海南瑞韩医学美容医院管理有限公司海口龙华京华城红妆医学美容门诊部 | A kind of CO2Laser therapy hand tool |
| CN106814463A (en) * | 2016-12-29 | 2017-06-09 | 华中科技大学 | One kind is applied to high-power RF CO slab2The Automatic adjusument spatial filter of laser |
| CN109244817A (en) * | 2018-10-08 | 2019-01-18 | 华中科技大学 | A kind of CO2 laser output system based on the distribution of output beam circular power |
| CN110221441A (en) * | 2019-06-17 | 2019-09-10 | 佛山根固激光科技有限公司 | RF board bar CO2The Adaptable System of laser stripes shaped light beam cylindrical mirror shaping |
| CN110441913A (en) * | 2019-08-13 | 2019-11-12 | 中国科学院半导体研究所 | For laser charging and hot spot reforming unit and its application of lossless energy |
| CN113985561A (en) * | 2021-11-10 | 2022-01-28 | 中国科学院长春光学精密机械与物理研究所 | Light beam position fine adjustment device |
| CN114409238A (en) * | 2021-12-31 | 2022-04-29 | 安徽银锐智能科技股份有限公司 | Integrated glass laser cutting equipment and glass processing line with same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106725845A (en) * | 2017-03-09 | 2017-05-31 | 海南瑞韩医学美容医院管理有限公司海口龙华京华城红妆医学美容门诊部 | A kind of CO2Laser therapy hand tool |
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| CN110441913A (en) * | 2019-08-13 | 2019-11-12 | 中国科学院半导体研究所 | For laser charging and hot spot reforming unit and its application of lossless energy |
| CN113985561A (en) * | 2021-11-10 | 2022-01-28 | 中国科学院长春光学精密机械与物理研究所 | Light beam position fine adjustment device |
| CN114409238A (en) * | 2021-12-31 | 2022-04-29 | 安徽银锐智能科技股份有限公司 | Integrated glass laser cutting equipment and glass processing line with same |
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Application publication date: 20160323 |