CN105406685B - A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece - Google Patents
A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece Download PDFInfo
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- CN105406685B CN105406685B CN201510936938.9A CN201510936938A CN105406685B CN 105406685 B CN105406685 B CN 105406685B CN 201510936938 A CN201510936938 A CN 201510936938A CN 105406685 B CN105406685 B CN 105406685B
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- cavity
- electrode slice
- conductive filament
- electrode
- conductive
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K44/00—Machines in which the dynamo-electric interaction between a plasma or flow of conductive liquid or of fluid-borne conductive or magnetic particles and a coil system or magnetic field converts energy of mass flow into electrical energy or vice versa
- H02K44/02—Electrodynamic pumps
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Abstract
The present invention relates to a kind of plug-type electrohydrodynamic Micropumps of multi-electrode piece, including multiple electrodes piece, cavity, conductive filament, conductive filament pin；There is the cavity internal cavity being in the form of a column, the electrode slice being mutually parallel to be fixed on the inner wall of cavity；The conductive filament has two, and disjunct two conductive filaments are fixed on the inner wall of cavity, and the same end of all electrode slices is in contact with a conductive filament, and the other end of all electrode slices is in contact with another conductive filament；There are two positioned at the conductive filament pin of containment portion, two conductive filament pins are connected with two conductive filaments respectively.The flowing of the good driving fluid of energy of the invention, reaches good heat dissipation effect, belongs to microelectronics heat dissipation and micro-fluidic technical field.
Description
Technical field
The present invention relates to microelectronics heat dissipation and micro-fluidic technical field more particularly to a kind of plug-type electricity of multi-electrode piece
Fluid dynamic Micropump.
Background technology
Higher and higher with the integrated level of electronic component in microelectronics field of radiating, the power density of electronic chip is not
Disconnected to increase, heat flow density also begins to dramatically increase.The temperature of chip greatly affects the service life of chip, to ensure chip energy
It is enough to work within the scope of suitable temperature, it is necessary to be discharged in time using the heat that good heat dissipation solution is generated.
Researchers by radiator structure the study found that in micro-channel heat sink to fluid working substance carry out forced convertion
Heat dissipation effect can be significantly improved；And by chip heat source the study found that accounting for about total heat dissipation from chip top dispersed heat
The 20% of amount, the 80% of total amount of heat concentrates on the bottom of chip, and fluid cooling technology most common air-cooled and traditional at present
It radiates, cannot tackle the problem at its root just for part above chip.Therefore it is to meet dissipating for future electronic product
Heat demand, researcher propose novel cooling scheme, that is, are directed to chip heat source core and prepare microchannel radiator structure, by core
Piece is integrated with microchannel structure, is regulated and controled to the temperature of chip using fluid-cooled mode.
However, fluid working substance flows in microchannel structure will produce very high flow differential pressure, conventional fluid driving side
Method (such as conventional gear pumps, plunger pump etc.) is not applicable in microchannel structure, while integrated chip has size again
Stringent limitation；This just needs a kind of to be not only not take up too many volume but also can provide for the fluid in micro-channel structure sufficient dynamic
Power, the driving device of steady operation are used as the power source of fluid working substance flowing.
In micro-fluidic field, when studying microfluidic device, it is often necessary to give consideration to how the driving for realizing fluid, control fluid
Flow direction and speed, enhancing fluid between mixing or the problems such as separation different ions.The actuation techniques of microfluid are micro-
The running basis of fluidic chip, the driving of microfluid and the operation core for controlling and be microfluidic system, the sample introduction related to,
The processes such as mixing, reaction, separation are required for complete in the movement of controllable microfluid.
According to the growth requirement of current microfluidic system, Micropump becomes the head for solving fluid actuation techniques in microfluidic system
Select scheme.Microfluidic system mainly has volume, the requirement of three aspects of flow and pump pressure for Micropump.In terms of volume, protecting
The size of Micropump wants as small as possible under the premise of card performance, can realize Micropump and chip or the collection of other micro-systems in this way
At；In terms of flow, it is desirable that the stability and exact controllability of flow；In terms of pump pressure, different micro-analysis systems is due to answering
Respectively different requirements is suffered from the difference of occasion.In micro-fluidic chip chromatographic analysis system, the requirement to drive system
Higher, general flow is less than 3% in the μ l/min of 50nl/min~50, fluid pulse, and flow control accuracy is ± 5% etc..Except this
Except, Micropump should also have following characteristics in microfluidic system：It is easily manipulated, long lifespan, replaces fluid conveniently, be easy to clear
It is clean, it is corrosion-resistant etc. for variety classes fluid wide adaptability.
It can be seen that script can be pumped as the tradition machinery of hydrodynamic source since volume is big, power consumption is high, noise
Greatly, the shortcomings of flow control accuracy is poor either still all shows at micro-fluidic aspect in microelectronics field of radiating serious
Inadaptability；And Micropump shows uniqueness since itself is with the features such as small, low in energy consumption in terms of micro fluid dynamcis
Value and wide application prospect.
Electrohydrodynamic pump has many advantages, such as movement-less part, reliable for operation, low consumption, is easy making and Maintenance free；And
And can be directly integrated with chip or runner, it is not necessarily to separate space, (but some electrohydrodynamic pumps can also using DC driven
Do not use DC driven), complementary field is not generated, electronic component will not be interfered to work.It is that solution is micro- that this kind of Micropump, which is not only recognized,
A breakthrough of the cooling problem of high hot-fluid device, can also be used in microfluid cooling system, drug is defeated in electronics industry
It send and the fields such as MEMS.
Invention content
For the technical problems in the prior art, the purpose of the present invention is：It is plug-type to provide a kind of multi-electrode piece
Electrohydrodynamic Micropump, the flowing of the good driving fluid of energy, reaches good heat dissipation effect.
In order to achieve the above object, the present invention adopts the following technical scheme that：
A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece, it is characterised in that：Including multiple electrodes piece, cavity, lead
Electrical filament, conductive filament pin；There is the cavity internal cavity being in the form of a column, the electrode slice being mutually parallel to be fixed on the inner wall of cavity
On；The conductive filament has two, and disjunct two conductive filaments are fixed on the inner wall of cavity, all electrode slices
The same end is in contact with a conductive filament, and the other end of all electrode slices is in contact with another conductive filament；Positioned at containment portion
Conductive filament pin have two, two conductive filament pins are connected with two conductive filaments respectively.The Micropump divides internal cavity,
The division to big runner inner cavity chamber is realized, while being provided with conductive filament and conductive filament pin, makes multiple electrodes piece while being powered
Electric field is generated, to drive the flowing of the fluid of multiple chambers in internal cavity, and finally converges outflow, effectively increases Micropump
The electric field of efficiency, formation has stronger active force to the ion of fluid, greatly improves the use effect of electrohydrodynamic Micropump
Fruit.In use, electrode slice is inserted into cavity, then Micropump entrance and exit is connect with external circulating system respectively, allows stream
Body is full of entire internal cavity.It will be connected with the anode of adjustable DC power supply after the emitter terminal tandem of multiple electrodes piece, it is multiple
It is connected with the cathode of adjustable DC power supply after the collector terminal tandem of electrode slice, then connects 500V DC power supplies, utilizes electric current
Body dynamic effect drives fluid flowing.
Technical solution is described further below：
It is further：The inner wall of the cavity is equipped with the groove being adapted with electrode slice, and the electrode slice is fixed
On the groove.Being fixed on groove of formula can be inserted in electrode slice.
It is further：The groove is rectangular, and the length of the groove is equal to the length of electrode slice.
It is further：The internal cavity cylindrical form, from the end face of cavity, from the electrode slice of middle to
The width of electrode slice at both ends, electrode slice is smaller and smaller.
It is further：From the end face of cavity, the internal cavity is rectangular, and the width of the electrode slice is homogeneous
Together.
It is further：Alternately arranged emitter and collector successively is equipped in the plane at the electrode slice both ends,
Putting in order for the emitter and collector being arranged in the plane at electrode slice both ends is opposite.
It is further：The electrode slice is horizontally or vertically arranged.
It is further：Spacing ＜ 1mm between the opposite transverse plane of the two adjacent electrode slices.
It is further：The cavity is equipped with two through-holes communicated with internal cavity, and two conductive filament pins lead to respectively
Two through-holes are crossed with two conductive filaments to be connected.
It is further：The cavity is in hollow cylindrical shape.
Generally speaking, the invention has the advantages that：
1. the electric field that the present invention is formed has stronger active force to the ion of fluid, it is micro- to greatly improve electrohydrodynamic
The using effect of pump.
2. the electrode slice of the present invention can be used diversified forms and be fixed on the inner wall of cavity.
3. two through-holes that the present invention is arranged can allow conductive filament to be connected with conductive filament pin.
Description of the drawings
Fig. 1 is the structural schematic diagram of front view of the present invention.
Fig. 2 is the sectional view of Fig. 1 left views, and cross-sectional plane is the symmetrical plane of Fig. 1.
Fig. 3 is the structural schematic diagram of electrode slice of the present invention.
Fig. 4 is the structural schematic diagram of stereogram of the present invention.
Fig. 5 is the structural schematic diagram inside stereogram of the present invention, is splitted along the symmetrical plane of the present invention.
Fig. 6 is the structural schematic diagram after electrode slice partial enlargement of the present invention.
Wherein, 1 is electrode slice, and 2 be cavity, and 3 be conductive filament, and 4 be conductive filament pin, and 5 be groove, and 6 serve as theme, and 7 be comb
Line.
Specific implementation mode
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
Embodiment 1
In conjunction with shown in Fig. 1, Fig. 2, Fig. 4 and Fig. 5, a kind of overall plan of the plug-type electrohydrodynamic Micropump of multi-electrode piece
It is as follows：Including multiple electrodes piece, cavity, conductive filament, conductive filament pin；The cavity has the internal cavity being in the form of a column, mutually
Parallel electrode slice is fixed on the inner wall of cavity；The conductive filament has two, and disjunct two conductive filaments are fixed on chamber
On the inner wall of body, the same end of all electrode slices is in contact with a conductive filament, the other end of all electrode slices with it is another
One conductive filament is in contact；Have two positioned at the conductive filament pin of containment portion, two conductive filament pins respectively with two conductions
Silk is connected.
The invention is further described in detail below：
In conjunction with shown in Fig. 1 and Fig. 2, cavity is in hollow cylindrical shape, and as a preferred mode, the internal diameter of cavity is
10.8mm, outer diameter 12mm.The inner wall of cavity is equipped with the groove being adapted with electrode slice, and electrode slice is fixed on groove, should
Groove is rectangular, can also be other shapes, the length of groove should be greater than or equal to electrode slice length；As a kind of preferred
Mode, the length of the rectangular recess is 40mm, width be 1.6mm (left and right directions of length, that is, Fig. 2, width, that is, Fig. 2 up and down
Direction).At the front end position of the rectangular recess, two disjunct conductive filaments are equipped with, as shown in Figure 1, conductive filament is at upper end
It is disconnected at lower end, one, left side conductive filament, one, the right conductive filament；In the lower end of cavity, equipped with two communicated with internal cavity
A through-hole, two conductive filament pins are connected by the two through-holes with two conductive filaments respectively.The internal cavity is cylinder
Shape, from the end face of cavity, from the electrode slice of the electrode slice of middle to from both ends, the width of electrode slice is smaller and smaller；Such as
Shown in Fig. 1, electrode slice has 5, and horizontal is arranged on the inner wall of cavity, from the electrode slice of upper end to intermediate electrode slice, from
For the electrode slice of lower end to intermediate electrode slice, the width of electrode slice is smaller and smaller (left and right directions of width, that is, Fig. 1)；Electrode slice
It can be vertically arranged.Spacing ＜ 1mm between the opposite transverse plane of two adjacent electrode slices, i.e., as shown in Figure 1, positioned at top
Spacing ＜ 1mm of the lower end plane of electrode slice to next upper transverse plane positioned at following electrode slice.
In conjunction with shown in Fig. 3, alternately arranged emitter and collector successively, electrode are equipped in the plane at electrode slice both ends
Putting in order for the emitter and collector being arranged in the plane at piece both ends is opposite.I.e. in the plane of electrode slice upper end, from electricity
To right end, emitter, collector are alternately arranged the left end of pole piece successively；In the plane of electrode slice lower end, from a left side for electrode slice
Right end, collector, emitter is held to be alternately arranged successively.
Direction up and down described in this section of content is consistent with the direction up and down of Fig. 6.Emitter and collector is referred to as
For electrode, in conjunction with shown in Fig. 6, the end face of shown electrode slice is equipped with two longitudinally disposed main lines, a plurality of comb being laterally arranged
Line.The setting of one main line is on the left side, and on the right, a plurality of comb line is in contact with the main line on the left side for another main line setting, not with the right side
The main line on side is in contact；The comb line of identical quantity is in contact with the main line on the right, is not in contact with the main line on the left side；With left side master
Comb line that line is in contact and the comb line being in contact with the right main line mutually stagger.The main line on one side and the comb line that contacts as
Collector uses, and the main line of another side and the comb line contacted are used as emitter, and the arrangement of collector and emitter is in
Comb teeth-shaped.The line width for combing line is 0.3mm (upper and lower directions of line width, that is, Fig. 6), and (the comb line and the main line on the right connect first comb line
Touch) spacing of the lower sideline of contour line to the upper sideline of Article 2 comb line (primary line contact of the comb line and the left side) contour line is
0.2mm, the spacing are known as electrode spacing；Article 2 combs the lower sideline of line (primary line contact of the comb line and the left side) contour line to the
The spacing of the upper sideline of three comb line (primary line contact of the comb line and the right) contour lines is 0.3mm, which is known as electrode pair
Spacing.
As shown in Figure 1, a kind of preferred embodiment, cavity is in hollow cylindrical shape, and the internal diameter of cavity is 10.8mm, outside
Diameter is 12mm.Electrode slice has 5, and the line width for combing line is 0.3mm, and electrode spacing 0.2mm, electrode is 0.3mm to spacing；Upper end
Spacing between two main line of lower end electrode on piece is 5.2mm；Spacing on middle and upper part and middle and lower part electrode slice between two main lines
For 7.6mm, the spacing between two main line of target on piece is 8.4mm；5 plate electrode on piece beginnings comb line to end comb line away from
From being 37.7mm；The quantity of electrode pair is 36 pairs.
When electrohydrodynamic Micropump plug-type using a kind of multi-electrode piece, electrode slice is inserted into cavity, it then will be micro-
Pump intake and outlet are connect with external circulating system respectively, and fluid is allowed to be full of entire internal cavity.By the emitter of multiple electrodes piece
Be connected with the anode of adjustable DC power supply after terminal tandem, after the collector terminal tandem of multiple electrodes piece with adjustable DC power supply
Cathode be connected, then connect 500V DC power supplies, utilize electrical hydrodynamic effect driving fluid flowing.
Embodiment 2
For the present embodiment in addition to following technical characteristic, remaining does not refer to that technical characteristic is same as Example 1.
From the end face of cavity, the internal cavity of cavity is rectangular, the width all same of electrode slice.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (1)
1. a kind of plug-type electrohydrodynamic Micropump of multi-electrode piece, it is characterised in that：Including multiple electrodes piece, cavity, conduction
Silk, conductive filament pin；There is the cavity internal cavity being in the form of a column, the electrode slice being mutually parallel to be fixed on the inner wall of cavity
On；The conductive filament has two, and disjunct two conductive filaments are fixed on the inner wall of cavity, the same end of all electrode slices
It is in contact with a conductive filament, the other end of all electrode slices is in contact with another conductive filament；Positioned at the conduction of containment portion
Silk pin has two, and two conductive filament pins are connected with two conductive filaments respectively；
The inner wall of the cavity is equipped with the groove being adapted with electrode slice, and the electrode slice is fixed on the groove；
The groove is rectangular, and the length of the groove is equal to the length of electrode slice；
The internal cavity cylindrical form, from the end face of cavity, from the electrode slice of the electrode slice of middle to from both ends,
The width of electrode slice is smaller and smaller；
From the end face of cavity, the internal cavity is rectangular, the width all same of the electrode slice；
Alternately arranged emitter and collector successively, the plane at electrode slice both ends are equipped in the plane at the electrode slice both ends
Putting in order for the emitter and collector of upper setting is opposite；
The electrode slice is horizontally or vertically arranged；
Spacing ＜ 1mm between the opposite transverse plane of two adjacent electrode slices；
The cavity is equipped with two through-holes communicated with internal cavity, and two conductive filament pins pass through two through-holes respectively
It is connected with two conductive filaments；
The cavity is in hollow cylindrical shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510936938.9A CN105406685B (en) | 2015-12-15 | 2015-12-15 | A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510936938.9A CN105406685B (en) | 2015-12-15 | 2015-12-15 | A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105406685A CN105406685A (en) | 2016-03-16 |
| CN105406685B true CN105406685B (en) | 2018-10-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510936938.9A Expired - Fee Related CN105406685B (en) | 2015-12-15 | 2015-12-15 | A kind of plug-type electrohydrodynamic Micropump of multi-electrode piece |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113904521B (en) * | 2021-12-08 | 2022-05-06 | 杭州未名信科科技有限公司 | Multi-stage electroosmosis micropump |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100763934B1 (en) * | 2006-11-20 | 2007-10-05 | 삼성전자주식회사 | Electrohydrodynamic micropump and method of operating the same |
| CN102832779A (en) * | 2012-08-24 | 2012-12-19 | 华南理工大学 | Microminiature electro-hydraulic power pump |
| CN104753309A (en) * | 2015-03-19 | 2015-07-01 | 华南理工大学 | Multi-group electrode flush type electric hydrodynamic force micro-pump |
| CN205212679U (en) * | 2015-12-15 | 2016-05-04 | 华南理工大学 | Plug -type electrohydrodynamic micropump of multi -electrode piece |
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| CN105406685A (en) | 2016-03-16 |
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Granted publication date: 20181009 Termination date: 20211215 |