CN105405959A - Ternary system relaxation ferroelectric monocrystal piezoelectric transformer having high power density - Google Patents

Ternary system relaxation ferroelectric monocrystal piezoelectric transformer having high power density Download PDF

Info

Publication number
CN105405959A
CN105405959A CN201510725277.5A CN201510725277A CN105405959A CN 105405959 A CN105405959 A CN 105405959A CN 201510725277 A CN201510725277 A CN 201510725277A CN 105405959 A CN105405959 A CN 105405959A
Authority
CN
China
Prior art keywords
lead
piezoelectric transformer
ternary system
single crystal
relaxation ferroelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510725277.5A
Other languages
Chinese (zh)
Other versions
CN105405959B (en
Inventor
王飞飞
石旺舟
罗豪甦
马传国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Normal University
University of Shanghai for Science and Technology
Original Assignee
Shanghai Normal University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Normal University filed Critical Shanghai Normal University
Priority to CN201510725277.5A priority Critical patent/CN105405959B/en
Publication of CN105405959A publication Critical patent/CN105405959A/en
Application granted granted Critical
Publication of CN105405959B publication Critical patent/CN105405959B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/40Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8536Alkaline earth metal based oxides, e.g. barium titanates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8548Lead-based oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

The invention provides a ternary system relaxation ferroelectric monocrystal piezoelectric transformer having the high power density, the monocrystal piezoelectric transformer comprises a piezoelectric element, and a material of the piezoelectric element is lead magnesium niobate-lead indium niobate-lead titanate monocrystalline. The ternary system relaxation ferroelectric monocrystal piezoelectric transformer provided in the invention has the advantages of the small volume, the light weight and simple manufacture; the power density of a current piezoelectric transformer can be obviously improved, and requirements of micromation and integration of related information processing equipment are met; and the ternary system relaxation ferroelectric monocrystal piezoelectric transformer is a power device having simple structure and excellent comprehensive performance.

Description

A kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer with high power density
Technical field
The invention belongs to electricity field, relate to a kind of transformer, particularly relate to a kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer with high power density.
Background technology
Along with information processing apparatus microminiaturization, integrated in the urgent need to the reaching its maturity of drive circuit, transformer is extended to AC/DC, DC/DC from high pressure field (power is usually less) and changes constant power field of electronic devices, these power electronic devices require to realize larger power stage in smaller size smaller, prepare the focus that the novel transformer with high power density also becomes Recent study.
Piezoelectric transformer is a kind of based on piezoelectricity coupling effect, is realized the electronic devices and components of voltage up-down by impedance transformation.Compared with traditional electromagnetic transformers, have that transformation ratio is large, conversion efficiency is high, without unique advantage such as electromagnetic interference, high temperature resistant and short-circuit protection.
Piezoelectric is the core parts of piezoelectric transformer, the quality of piezoelectric performance directly determines the quality of transformer performance, the mainly piezoelectric ceramic that traditional piezoelectric transformer uses, for reducing its volume, bring to power density further, in the urgent need to finding novel High-power piezoelectric material.
With PMN-PT ((1-x) Pb (Mg 1/3nb 2/3) O 3-xPbTiO 3) (hereinafter abbreviated as PMN-PT) be representative binary system high-performance relaxor ferroelectric monocrystal material tripartite's alpha region piezoelectric property near accurate homotype phase boundary can reach the 5-10 of piezoceramic material doubly, wherein, piezoelectric coefficient d 33and d 312,500pC/N, 2, more than 000pC/N can be reached respectively, electromechanical coupling factor k 33and k 31all can reach more than 90%, therefore, in the application of transducer of new generation, driver and transducer, show extraordinary prospect, also result in the extensive concern of scientific and technological circle and industrial quarters.
Applicant utilizes the piezoelectric property of PMN-PT monocrystalline excellence, take the lead in reporting individual layer and multilayer Rosen type transformer, wherein individual layer Rosen type transformer open circuit step-up ratio reaches 138, and power density is about 4 times of pattern ceramic transformer of the same race, and conversion efficiency can reach 95%.
But, further research finds, the problem that coercive field is lower, depolarization temperature is not high enough is there is in binary system PMN-PT monocrystalline when high-power applications, namely there is heating and make material property degradation, and then causing the problem of component failure, this is very disadvantageous for the application of transformer under relatively high power.How while maintenance high tension electricity coefficient and electromechanical coupling factor, mechanical quality factor can be improved, reduce the wastage, increase the coercive field of monocrystalline and widen the temperature scope of application and just seem extremely important.
Research shows, on the basis of binary system PMN-PT monocrystalline, introduce indium (In) element and prepare ternary system relaxation ferroelectric single crystal PMN-PIN-PT, monocrystalline coercive field can be made to be increased to more than 5kV/cm from 2-3kV/cm, depolarization temperature is increased to more than 100 DEG C, the mechanical quality factor of monocrystalline also increases to some extent, and ternary system relaxation ferroelectric single crystal PMN-PIN-PT brings into use on sonac, but does not find its relevant report on the transformer so far.
Summary of the invention
In order to solve the problems referred to above that binary system PMN-PT monocrystalline piezoelectric transformer exists, the invention provides a kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer with high power density.
The object of the present invention is to provide a kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer with high power density, described monocrystalline piezoelectric transformer comprises piezoelectric element, and the material of described piezoelectric element is lead magnesio-niobate-lead niobate lead indate-lead-lead titanates (PMN-PIN-PT) monocrystalline.
As a preferred embodiment of the present invention, described PMN is lead magnesio-niobate, and described PIN is lead niobate lead indate-lead, and described PT is lead titanates.
As a preferred embodiment of the present invention, the chemical composition of described PMN-PIN-PT is (1-x-y) Pb (Mg 1/3nb 2/3) O 3– yPb (In 1/2nb 1/2) O 3-xPbTiO 3, wherein, x=0.05-0.50, y=0.05-0.50; Be preferably x=0.25-0.35, y=0.30-0.38.
As a preferred embodiment of the present invention, described PMN-PIN-PT is positioned at tripartite's alpha region near accurate homotype phase boundary.
As a preferred embodiment of the present invention, the crystallographic orientation of described PMN-PIN-PT is [100] direction, length edge, [011] direction, thickness edge, width edge direction.
As a preferred embodiment of the present invention, described piezoelectric element comprises upper surface and lower surface, described upper surface comprises importation and output, described importation comprises at least 2 inputs, described output comprises at least 1 output, and described output is between described input; Described lower surface comprises common ground end.
As a preferred embodiment of the present invention, described common ground end is full electrode.
As a preferred embodiment of the present invention, can be connected in parallel or be connected in series between described input, and be preferably connected in parallel.
As a preferred embodiment of the present invention, at the upper surface fired electrodes of described piezoelectric element, described piezoelectric element is divided at least three identical parts by described electrode, respectively as input and the output of transformer, go between as the upper/lower electrode of described monocrystalline piezoelectric transformer from the upper and lower surface of described input and described output respectively.
As a preferred embodiment of the present invention, described ferroelectric single crystal material PMN-PIN-PT is along thickness [011] direction polarization, and polarised direction is from upper surface to lower surface.
As a preferred embodiment of the present invention, described ferro-electricity single crystal is of a size of: length: width >=5:1, width: thickness >=3:1.
As a preferred embodiment of the present invention, described ferro-electricity single crystal is of a size of length (12-25) mm ╳ width (1-6) mm ╳ thickness (0.5-3) mm, is preferably length (15-18) mm ╳ width (2-4) mm ╳ thickness (0.5-2) mm.
As a preferred embodiment of the present invention, the top electrode size shape of described input, output is equal just as, size.
As a preferred embodiment of the present invention, the top electrode of described input, output is of a size of: length 4-7mm, width 1-6mm; Be preferably length 5-6mm, width 2-4mm.
As a preferred embodiment of the present invention, the direction of vibration of described input and output all along its length.
As a preferred embodiment of the present invention, described input is identical with output shape, size is equal.
As a preferred embodiment of the present invention, interval 0.5-2mm between described input and output, as 0.7mm, 1.8mm; Be preferably 0.8-1.5mm, as 1.0mm.
As a preferred embodiment of the present invention, the one or more combination thing in described monocrystalline piezoelectric transformer employing silver, gold, platinum etc., as electrode, is preferably and adopts silver as electrode, be more preferably and adopt the silver fired as electrode.
The present invention utilizes the character such as the high-curie temperature of ternary system piezoelectric monocrystalline, high phase transition temperature, large coercive field, high tension electricity coefficient and superior mechanical-electric coupling performance to obtain high power density and exports, and is up to 50W/cm 3above, 6 times of the power density of current identical type piezoelectric ceramic transformer are about.This device volume is little, quality light, it is simple to make, and can significantly improve the power density of current piezoelectric transformer, meets the requirement that relevant information treatment facility is microminiaturized and integrated, is that a kind of structure is simple, the power device of high comprehensive performance.
Accompanying drawing explanation
Fig. 1 is the structural representation of monocrystalline piezoelectric transformer provided by the invention;
Fig. 2 is the impedance spectrogram near monocrystalline piezoelectric transformer inputs resonance frequency provided by the invention;
Fig. 3 is the impedance spectrogram near monocrystalline piezoelectric transformer output resonance frequency provided by the invention;
Fig. 4 is monocrystalline piezoelectric step-up ratio provided by the invention with the change curve of different loads and frequency;
Fig. 5 is the relation curve of power output and input voltage under monocrystalline piezoelectric transformer matched load provided by the invention.
Embodiment
monocrystalline piezoelectric transformer device structure
As shown in Figure 1, for ternary system relaxation ferroelectric single crystal piezoelectric transformer provided by the invention, get the monocrystalline being of a size of length 17mm ╳ width 3mm ╳ thickness 1mm, silver electrode is fired at monocrystalline upper surface, monocrystalline is divided into three parts of same size by silver electrode, three parts are respectively as the input of transformer and output, and output is between input.Go between as the upper/lower electrode of transformer from the upper and lower surface of input and output respectively, two inputs are connected in parallel.
Transformer comprises importation and output, importation comprises two inputs in left and right, output is between two inputs, the upper surface interval 1mm of importation and output, importation and output share bottom surface, as the common ground end of transformer, namely the upper surface of importation, output is of a size of length 5mm, and width is 3mm.
Ternary system relaxation ferroelectric single crystal piezoelectric transformer provided by the invention adopts the silver fired as electrode, the thickness of silver electrode is 10 μm, respectively from importation, the upper surface of output and lower surface draw upper/lower electrode as ternary system relaxation ferroelectric single crystal piezoelectric transformer provided by the invention.
Ternary system relaxation ferroelectric single crystal piezoelectric transformer polarised direction through-thickness provided by the invention, from upper surface to lower surface, direction as shown by the arrows in Figure 1, importation and output all utilize the transversal stretching vibration mode of piezoelectric vibrator, direction of vibration along its length, the transversal stretching pattern electromechanical coupling factor k of transformer 31more than 90%, d can be reached 31can 1, more than 500pC/N be reached.
The piezoelectric element of ternary system relaxation ferroelectric single crystal piezoelectric transformer provided by the invention is ternary system relaxation ferroelectric single crystal material PMN-PIN-PT, and concrete component is 0.35PMN-0.32PIN-0.33PT, and component is positioned at tripartite's alpha region near accurate homotype phase boundary.
ternary system relaxation ferroelectric single crystal piezoelectric transformer electric property
impedance
The impedance spectrum of input and output utilizes electric impedance analyzer to test, the impedance spectrum of input, output respectively as shown in Figure 2 and Figure 3, during the impedance spectrum of test input, output short circuit is connected, during the impedance spectrum of test output terminal, input short circuit is connected, from Fig. 2, Fig. 3, in a short-circuit situation, the resonance frequency of transformer inputs, output is about 35kHz.
step-up ratio
Signal generator is connected to power amplifier, output signal is connected to input, output is connected with purely resistive load, is jointly connected to oscilloscope two ends, and to test the step-up ratio under different loads and frequency, result as shown in Figure 4.As shown in Figure 4, along with the increase of load, step-up ratio constantly increases, and resonance frequency moves to high frequency direction.
power
Under matched load, the test input of transformer and voltage, the electric current of output, the actual power of transformer under calculating respective load, thus obtain the operating efficiency of transformer, transformer all has higher efficiency in wider frequency range, can reach more than 95%.
Fig. 5 is the relation curve of power output and input voltage, and when input voltage is 250V, power output is 2W.In test process, utilize infrared radiation thermometer to monitor the variations in temperature of transformer, be no more than the condition of 5 DEG C in transformer temperature rise under, power output is maximum reaches 2.5W, and corresponding power density is about 50W/cm 3, significantly higher than the power density of ceramic transformer and the power density of binary PMN-PT monocrystalline transformer, wherein, the power density of conventional ceramic transformer is 7.7W/cm 3, the power density of binary PMN-PT monocrystalline transformer is about 12W/cm 3.
Be described in detail specific embodiments of the invention above, but it is just as example, the present invention is not restricted to specific embodiment described above.To those skilled in the art, any equivalent modifications that the present invention is carried out and substituting also all among category of the present invention.Therefore, equalization conversion done without departing from the spirit and scope of the invention and amendment, all should contain within the scope of the invention.

Claims (10)

1. have a ternary system relaxation ferroelectric single crystal piezoelectric transformer for high power density, it is characterized in that, described monocrystalline piezoelectric transformer comprises piezoelectric element, and the material of described piezoelectric element is lead magnesio-niobate-lead niobate lead indate-lead-lead titanate monocrystal.
2. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 1, is characterized in that, the chemical composition of described lead magnesio-niobate-lead niobate lead indate-lead-lead titanates is (1-x-y) Pb (Mg 1/3nb 2/3) O 3-yPb (In 1/2nb 1/2) O 3-xPbTiO 3, wherein, x=0.05-0.50, y=0.05-0.50.
3. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 1, is characterized in that, described lead magnesio-niobate-lead niobate lead indate-lead-lead titanates is positioned at tripartite's alpha region near accurate homotype phase boundary.
4. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 1, is characterized in that, the crystallographic orientation of described lead magnesio-niobate-lead niobate lead indate-lead-lead titanates is [100] direction, length edge, [011] direction, thickness edge, width edge direction, and along thickness [011] direction polarization.
5. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 1, it is characterized in that, described piezoelectric element comprises upper surface and lower surface, described upper surface comprises importation and output, described importation comprises at least 2 inputs, described output comprises at least 1 output, and described output is between described input; Described lower surface comprises common ground end.
6. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 5, is characterized in that, described ferro-electricity single crystal is of a size of: length: width >=5:1, width: thickness >=3:1.
7. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 5, is characterized in that, interval 0.5-2mm between described input and output.
8. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 5, is characterized in that, the top electrode shape of described input, output is identical, size is equal.
9. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 5, is characterized in that, the transversal stretching pattern electromechanical coupling factor k of described monocrystalline piezoelectric transformer 31be greater than 90%, d 31be greater than 1,500pC/N.
10. ternary system relaxation ferroelectric single crystal piezoelectric transformer according to claim 5, is characterized in that, described monocrystalline piezoelectric transformer is under temperature rise is less than 5 DEG C of conditions, and power density is more than or equal to 50W/cm 3.
CN201510725277.5A 2015-10-29 2015-10-29 A kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer of transversal stretching vibration mode Active CN105405959B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510725277.5A CN105405959B (en) 2015-10-29 2015-10-29 A kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer of transversal stretching vibration mode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510725277.5A CN105405959B (en) 2015-10-29 2015-10-29 A kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer of transversal stretching vibration mode

Publications (2)

Publication Number Publication Date
CN105405959A true CN105405959A (en) 2016-03-16
CN105405959B CN105405959B (en) 2018-02-09

Family

ID=55471333

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510725277.5A Active CN105405959B (en) 2015-10-29 2015-10-29 A kind of ternary system relaxation ferroelectric single crystal piezoelectric transformer of transversal stretching vibration mode

Country Status (1)

Country Link
CN (1) CN105405959B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106441509A (en) * 2016-09-14 2017-02-22 华北电力大学 Non-immersive liquid-level measurement sensor and installation and application method thereof
CN106500800A (en) * 2016-09-27 2017-03-15 华北电力大学 A kind of closed vessel liquid level measuring method based on supersonic guide-wave
CN106876574A (en) * 2017-03-03 2017-06-20 合肥工业大学 A kind of array piezoelectric transformer
CN108358634A (en) * 2018-01-19 2018-08-03 淮阴工学院 Textured piezoelectric ceramic material and preparation method thereof
CN109400153A (en) * 2018-10-11 2019-03-01 北京工业大学 It is a kind of to collect the quaternary series ceramic material with high transducing coefficient and preparation applied to piezoelectric energy
CN113964266A (en) * 2021-10-13 2022-01-21 中国科学院光电技术研究所 Method for preparing high-performance bismuth-based lead-free piezoelectric actuator

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001223408A (en) * 1999-11-30 2001-08-17 Kyocera Corp Piezoelectric transformer and converter
CN1574408A (en) * 2003-05-21 2005-02-02 川铁矿业株式会社 Piezoelectric single crystal device and fabrication method thereof
US20130134838A1 (en) * 2011-11-28 2013-05-30 Qualcomm Mems Technologies, Inc. Piezoelectric mems transformer
US8894765B1 (en) * 2009-11-13 2014-11-25 Trs Technologies, Inc. High polarization energy storage materials using oriented single crystals
CN104419984A (en) * 2013-09-10 2015-03-18 中国科学院上海硅酸盐研究所 Preparation method of perovskite-structure relaxor ferroelectric single crystal lead indium niobate-lead magnesium niobate-lead titanate
CN104993045A (en) * 2015-05-31 2015-10-21 上海交通大学 Piezoelectric transformer based on single crystal surface cutting mode

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001223408A (en) * 1999-11-30 2001-08-17 Kyocera Corp Piezoelectric transformer and converter
CN1574408A (en) * 2003-05-21 2005-02-02 川铁矿业株式会社 Piezoelectric single crystal device and fabrication method thereof
US8894765B1 (en) * 2009-11-13 2014-11-25 Trs Technologies, Inc. High polarization energy storage materials using oriented single crystals
US20130134838A1 (en) * 2011-11-28 2013-05-30 Qualcomm Mems Technologies, Inc. Piezoelectric mems transformer
CN104419984A (en) * 2013-09-10 2015-03-18 中国科学院上海硅酸盐研究所 Preparation method of perovskite-structure relaxor ferroelectric single crystal lead indium niobate-lead magnesium niobate-lead titanate
CN104993045A (en) * 2015-05-31 2015-10-21 上海交通大学 Piezoelectric transformer based on single crystal surface cutting mode

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
C E SUN等: "Elastic, dielectric, and piezoelectric constants of Pb ( In 1/2 Nb 1/2 ) O 3 – Pb ( Mg 1/3 Nb 2/3 ) O 3 – PbTiO 3 single crystal poled along [011]", 《APPLIED PHYSICS LETTERS》 *
JIASHI YANG: "Piezoelectric Transformer Structural Modeling—A Review", 《IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL》 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106441509A (en) * 2016-09-14 2017-02-22 华北电力大学 Non-immersive liquid-level measurement sensor and installation and application method thereof
CN106500800A (en) * 2016-09-27 2017-03-15 华北电力大学 A kind of closed vessel liquid level measuring method based on supersonic guide-wave
CN106876574A (en) * 2017-03-03 2017-06-20 合肥工业大学 A kind of array piezoelectric transformer
CN106876574B (en) * 2017-03-03 2019-05-17 合肥工业大学 A kind of array piezoelectric transformer
CN108358634A (en) * 2018-01-19 2018-08-03 淮阴工学院 Textured piezoelectric ceramic material and preparation method thereof
CN109400153A (en) * 2018-10-11 2019-03-01 北京工业大学 It is a kind of to collect the quaternary series ceramic material with high transducing coefficient and preparation applied to piezoelectric energy
CN109400153B (en) * 2018-10-11 2021-05-25 北京工业大学 Quaternary ceramic material with high transduction coefficient applied to piezoelectric energy collection and preparation
CN113964266A (en) * 2021-10-13 2022-01-21 中国科学院光电技术研究所 Method for preparing high-performance bismuth-based lead-free piezoelectric actuator
CN113964266B (en) * 2021-10-13 2023-09-19 中国科学院光电技术研究所 Method for preparing high-performance bismuth-based leadless piezoelectric driver

Also Published As

Publication number Publication date
CN105405959B (en) 2018-02-09

Similar Documents

Publication Publication Date Title
CN105405959A (en) Ternary system relaxation ferroelectric monocrystal piezoelectric transformer having high power density
KR100707949B1 (en) Film speaker using 0-3 type piezoelectric composite and method of producing the same
JP2023110020A (en) High-voltage tunable multilayer capacitor
US20150028726A1 (en) Piezoelectric sheet, piezoelectric device including the same, and method of fabricating piezoelectric device
Du et al. High-power, multioutput piezoelectric transformers operating at the thickness-shear vibration mode
US20140266144A1 (en) On-chip power converter circuit and on-chip power supply using the power converter circuit
CN104882277B (en) The method of the controllable electric capacity of layered composite structure and piezoelectric stress regulation and control dielectric
JP5313904B2 (en) Method for polarization treatment of laminated piezoelectric / electrostrictive element
JP3706509B2 (en) Piezoelectric transformer
JPH08330643A (en) Piezoelectric transformer and its manufacture
JP5011887B2 (en) Method of polarization of laminated piezoelectric element
KR20010102673A (en) Piezoelectric ceramic material with large power output ability and transformer made of it
CN105645957B (en) A kind of high mechanical-electric coupling performance lead zirconate titanate fine grain piezoelectric ceramics and preparation method thereof
DE102015117106A1 (en) Piezoelectric transformer
CN105185899A (en) Preparation method of piezoelectric ceramic polymer composite material
Wang et al. Multilayer Rosen-type piezoelectric transformer prepared with Pb (Mg1/3Nb2/3) O3–PbTiO3 single crystal
JPH10241993A (en) Laminated ceramic electronic component
JP2014072357A (en) Laminated piezoelectric element
JP3673433B2 (en) Piezoelectric transformer
JPH05251785A (en) Manufacture of thickness-wise vibration piezoelectric-porcelain transformer and manufacture thereof
CN203668249U (en) PZT piezoelectric ceramic slice high-voltage polarization device
JP4721540B2 (en) Piezoelectric transformer and power supply device
JPH05235432A (en) Thickness longitudinal vibration piezoelectric porcelain transformer and driving method therefor
JP3709114B2 (en) Piezoelectric transformer
EP1672710B1 (en) Piezoelectric transformer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant