CN105388187B - The test method of the semiconductor gas sensor of controlled humidity - Google Patents
The test method of the semiconductor gas sensor of controlled humidity Download PDFInfo
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- CN105388187B CN105388187B CN201510778949.9A CN201510778949A CN105388187B CN 105388187 B CN105388187 B CN 105388187B CN 201510778949 A CN201510778949 A CN 201510778949A CN 105388187 B CN105388187 B CN 105388187B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
- G05D22/02—Control of humidity characterised by the use of electric means
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Abstract
The test method of the semiconductor gas sensor of controlled humidity belongs to element test field, and the test method for solving the problems, such as existing formaldehyde gas sensor is incomplete, and the problem that humid control precision is low, technical essential are：Have：Semiconductor gas sensor tests the step of system buildup is with test, a kind of humidity control system has been used in the step, including master controller, moisture detection sensor, dehumidifier, ultrasonic humidifier and buzzer, wherein, moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in gas chamber, and master controller is connect with moisture detection sensor, dehumidifier, ultrasonic humidifier, buzzer respectively.The invention enables the test for formaldehyde gas sensor is more perfect, and improve the controllability and control accuracy of humidity.
Description
Technical field
The invention belongs to element test field more particularly to a kind of test sides of the semiconductor gas sensor of controlled humidity
Method.
Background technology
When the development of semiconductor gas sensor technology is like a raging fire, the development of semiconductor gas sensor measuring technology
The gas sensor technology speed of development is not kept up with.Understanding and transformation activity of the mankind to objective world, often to test work
Based on.Engineering Testing Technique is exactly especially to be changed over time to the various signals in engineering using modern means of testing
Dynamic physical signal be detected, test, analyze, and therefrom extract useful information an emerging technology.It measures and divides
The result of analysis objectively describes state, variation and the feature of research object, and is carried for further transformation and control research object
Reliable foundation is supplied.Equally, the progress of sensor technology also be unable to do without the raising of its means of testing.Currently, limitation half
The progress of conductor gas sensor and large-scale production key factor are that detection means falls behind, and test environment is multiple
Miscellaneous, testing efficiency, precision are low, simultaneously because lacking perfect test equipment, cannot get the complete of gas sensor various characteristics
Parameter and curve also limit the further research and application of semiconductor gas sensor, therefore, no matter for production and science
Research, is all badly in need of a set of perfect semiconductor gas sensor performance parameter testing system.
Due to the importance of significance and gas sensor test of the semiconductor gas sensor in reality, both at home and abroad
Scientific research personnel a large amount of further investigation work all has been done to the test system of semiconductor gas sensor, they are using different
Mode has set up the semiconductor gas sensor test system of Various Functions, to the hair of sensor performance test and its calibration technique
Exhibition played an important role.These test systems are made a general survey of, are essentially all by computer, instrument hardware, sensor test chamber
It is formed etc. several parts, currently, external L.Harvey, G.s.v, coles, Hildegard D.Jander, Wolfgang
Scholars' priority research and design such as Gottler has gone out a set of Auto-Test System, it can in pure air, in pure gas,
Gas sensor is tested in mixed gas, while considering the influence of environment temperature, humidity to its performance parameter, but
Many operations are required for manual progress, make tester that can not need to further increase its automation far from toxic test environment
Degree, while the parameter type that can be tested is also less, it is also restricted to the shape for being tested semiconductor gas sensor；It is domestic
Guan Yuguo, Peng Zhongming, the scholars such as soldier also successively have developed a set of Auto-Test System to woods forever, collection test chamber, detecting system
It is integrated, reliable data is provided for new product development, but the degree of automation is high not enough, the parameter of acquisition is single, makes
With hardware is excessive, reliability is not high, various pure gas are difficult to mix in high dynamic, low strength range and needed for being difficult to meet
The concentration wanted and required precision.There is also the difficulties of the inspection and stepping of realizing gas sensor simultaneously.Many manufacturers are with hand
Based on work test, testing efficiency is low, precision is low, much can not meet the needs of production development, what is more important manual test
It cannot achieve dynamic to measure, to which certain parameters of gas sensor can not accurately be measured, such as response time curve, recovery time
Curve etc..The deficiency that cannot obtain the complete parameter of gas sensor various characteristics, limit gas sensor it is further research and
Using.To meet the needs of enterprise's production and research, the development of gas sensor needs a whole set of perfect test system.
Need to study sensor in the development process of semiconductor gas sensor under varying environment and operating condition
Gas response characteristic weighs the quality of sensor, and best working condition is found out in summary, and this be unable to do without good test and sets
It is standby.
The gas response characteristic of research semiconductor gas sensor has static and two kinds of test modes of gas at present, will sense
Device is mounted in gas chamber, oneself is injected in gas chamber and knows certain gas of concentration, by acquiring the response signal of sensor, can be obtained
Obtain air-sensitive response characteristic of the sensor to this gas.The system for carrying out static test under normal conditions uses closed great Rong
Gas chamber is measured, the test gas of certain volume is uniformly mixed by injection sample gas and in a reservoir, this test method
Equipment is relatively simple, but the desorption time of sample gas is longer on device in gas chamber, is not suitable for carrying out a large amount of gas test.And
It is to be passed through the constant air-flow of flow in compared with low capacity gas chamber by the way of gas, passes through a certain concentration in a period of time
Sample gas, and acquire the sensor response data of this period.Since gas chamber is smaller in this mode, residual gas is cleaned
Time is shorter, and sensor component can return to original state quickly, can quickly carry out repeated experiment, is especially carrying out
It is highly advantageous when the gas-sensitive property research of sensor array.
Invention content
In order to solve the above-mentioned technical problem, and to humidity in test process accurately control, the present invention provides one kind
The test method of the semiconductor gas sensor of controlled humidity.
The technical solution adopted by the present invention is：A kind of test method of the semiconductor gas sensor of controlled humidity, has：
Semiconductor gas sensor tests the step of system buildup is with test, and tests system to semiconductor gas sensor
And the step of semiconductor gas sensor performance evaluation；Wherein,
There is the step controlled the humidity of gas chamber in the step of gas sensor test system is set up and tested
Suddenly, a kind of humidity control system, including master controller, moisture detection sensor, dehumidifier, ultrasonic wave has been used to add in the step
Wet device and buzzer, wherein moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in gas chamber, master controller point
It is not connect with moisture detection sensor, dehumidifier, ultrasonic humidifier, buzzer.
Further, the semiconductor gas sensor was tested in the step of system buildup and test, and semi-conductor gas passes
Sensor test system is logical for carrying out dynamic air-distributing at a given concentration to gas with various and branched sensor array being made to be listed in gas
The fashionable variation to gas sensor surface conductivity is monitored in real time；
The semiconductor gas sensor tests system：The automatic sampling device for carrying out sample gas concentration proportioning,
Gas sensor heats with temperature measuring equipment, for sampling device coordination, and the automatic collection 4 under different gas sample environment
Measuring signal of the signal measurement of~6 road gas sensor measuring signals with data acquisition circuit, to acquisition carries out data processing
Data processing circuit；With the temperature-compensation circuit compensated to the caused temperature change of intake process and room temperature variation；
Gas sensor array is mounted in gas chamber, and the gas concentration variation measured by gas sensor is gas in gas chamber
Variation, gas chamber is that cavity shape is round and smooth and the organic glass chamber of the drying of squarish；
The gas sensor heating heats gas sensor with temperature measuring equipment, and measures gas sensor in real time
Operating temperature；When the operating temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit in real time into
Trip temperature compensation control, makes the operating temperature of sensor remain unchanged；The signal measurement is used for data acquisition circuit to letter
It number adjusts and AD samplings, Signal Regulation is the AD samplings for gas sensor to be changed into electric signal to the response for testing gas sample
By analog signal by data processing circuit by analog-signal transitions be digital signal, and will collected 4~No. 6 sensor letter
Number pass through normalized, be changed into the required standard signal of BP neural network；
The output of standard gas sample is divided into two tunnels or multichannel, the one mass flow controller control of each freedom, and accesses test
Device, carrier gas and under test gas are sufficiently mixed under the control of mass flow controller into drying chamber respectively, are made into target survey
Gas testing sample simultaneously enters in the test chamber in test device, and gas sensor test system is under control of the computer to set
Aimed concn gas carries out distribution, and the carrier gas of the target gas sample of one or more normal concentrations and standard is proportionally matched
Than, and be passed through in hybrid channel and be sufficiently mixed under mass flow controller control, when mixed test gas sample is passed through
When test chamber, 4~6 tunnel response signals of gas sensor array in gas chamber are acquired, and by the gas sensor of acquisition
Array is transmitted on computer the response message of sample gas and carries out data processing and data analysis, make test gas inlet,
Response signal acquires and data processing sequence carries out；When temperature monitoring system finds that semiconductor gas sensor operating temperature becomes
When change, temperature-compensation circuit carries out element manipulation temperature-compensating in real time, and the heating voltage of regulation resistance silk makes the work temperature of element
Degree remains unchanged；
Moisture detection sensor detects moisture signal in gas chamber in real time, and by the signal transmission to master controller, main control
Device is based on humidity set point constant in gas chamber or a humidity range set, the setting value of the moisture signal and controller
It compares, controller exports Staged cotrol signal；When the indoor humidity of gas is less than 10%RH, and humidifier has opened to the maximum, and is
When system cannot continue humidification or the indoor humidity of gas is higher than 60%RH, and when dehumidifier is opened to maximum, master controller will control bee
Ring device ring, and master controller is called to interrupt, stop exporting the signal of dehumidifier and ultrasonic humidifier, and humidity is more than
When 60%RH, system automatically powers off and stops testing.
Further, the software section of the gas sensor test system includes gas circuit control module, voltage sample mould
Block, temperature compensation module, data processing module and display function module, wherein：
Gas circuit control module to control parameter be arranged, the parameter include ventilation before time, duration of ventilation, stop the supple of gas or steam after when
Between, data sampling time interval, mixed gas type, various gas concentrations and carrier gas control voltage, gas circuit control module is to ginseng
Number setting realizes distribution to control multichannel gas sample output quantity, and during distribution, the operating temperature of gas flow and element is entire
It is remained unchanged in test process；
Voltage sample module starts voltage sample, Sampling interrupt terminates that progress is corresponding to be controlled to sampling；
Data processing module carries out data acquisition, data preserve, image preserves, image prints, historical data extraction process.
Further, data acquisition module completes the data tracking acquisition in sampling time interval, the experiment to offer
Data automatically save six files for two kinds of formats after being tested to this, respectively the voltage of 4~No. 6 sensors,
Resistance, response sensitivity digital quantity and dynamic changing curve, while on time to the printing immediately of the image of preservation and to historical data
Between extract；In data acquisition, according to different demands in display module the normal voltage of 4~No. 6 sensor of real-time display,
The dynamic changing curve of resistance and response sensitivity at any time.
5. the test method of the semiconductor gas sensor of controlled humidity as claimed in claim 4, which is characterized in that described
The step of to gas sensor test system and gas sensor performance evaluation includes the various mistakes to gas sensor test system
Difference is analysed, and is divided the sensitivity of measurement resistance, resistance-temperature characteristic, sensitivity-temperature characterisitic, sensitivity-grey density characteristics
The analysis that analysis and doping influence element function.
Further, 4~6 road sign calibration signals sensor used carry out the normalized of data, and will be at data
It is as follows to manage into the step of BP neural network obtains required normal data source, carries out BP neural network gas analysis：
Quantitative analysis：
It selects single formaldehyde gas to detect sample, carries out quantitative detection, sensor array is formed by 4~6 sensors
The input neuron number of the mixed gas quantitative judge such as PARA FORMALDEHYDE PRILLS(91,95) gas, ammonia, benzene, neural network is 6, output neuron
Number is 1, and dynamic changes hidden layer number and seeks its corresponding training error, with the best hidden layer neuron number of determination；
Using one two-tier network of newff function creations, the hidden layer neuron number of network is set as S (i), range
It is 3-13, the training function of network is set as Trainbr, if the weights of network and threshold value are the stochastic variables of special distribution,
Network weight and threshold value are estimated with statistical method, using input vector P as the input for the neural network trained, is utilized
Train function pair networks are trained, and are carried out quantitative detection using the formaldehyde gas of 30 groups of various concentrations as input, are quantified
The output result and corresponding experimental error of detection；
Qualitative analysis：
Three kinds of gas characteristic amounts of sensor array PARA FORMALDEHYDE PRILLS(91,95), ammonia, the benzene being made of 4~6 sensors carry out qualitative knowledge
Not, the input neuron number of network is 6, and output neuron number is 3, and best hidden layer is determined by error comparison
Number, dynamic, which changes, implies the number of plies；
Using one three-layer network of newff function creations, network hidden layer neuron number is set as a dynamic and is become
S (i) is measured, range is 3-13, and by 10 training, one group of neuron number for obtaining training error minimum is best nerve
First number estimates network weight and threshold if the weights of network and threshold value are the stochastic variables of special distribution with statistical method
Value；Training is until experimental error meets the requirements stopping；Using odd number group as the neural network input trained.
Further, the humidity control system, further includes host computer, and host computer has human-computer interaction interface, is used in combination
In man-machine interactive operation, real-time display humidity set point and humidity measurements, the master controller are PLC, and use PLC's
PID adjustment modules carry out closed-loop control to the indoor humidity of gas.
Further, it is to the method for humid control using 7 softwares of STEP：
Carry out establishment project and hardware configuration：First, into 7 software interfaces of STEP, menu is then clicked, creates new item
Mesh, the entry name in right button menu on the left side are clicked and are inserted into S7-300 websites, double-click the S7-300 websites opened and be inserted into later, double
The hardware for hitting right side window carries out hardware configuration in the hardware window of pop-up；
Configuration：
Rack is found in right frame, after double-click sets rack, then slot 2 is clicked, corresponding model is found in right frame
CPU, double-click and can be inserted into slot 2.Then CPU is double-clicked, corresponding subnet MPI is set in the window of pop-up, analog quantity is defeated
No. 4 slots should be inserted in by entering module, identical as CPU operation is inserted into；
After whole hardware are inserted into corresponding slot, the shortcut key for clicking " preserve and compile " of top menu bar is completed firmly
Part configuration returns to 7 main interfaces of STEP and carries out next step programming；
There are OB1 tissue blocks in main interface after hardware configuration is good, adds other required tissue blocks in blank space and patrols
Block is collected, the insertion of top menu bar is clicked, S7 modules are clicked in the drop-down menu of pop-up, selects required module to be added；
Each section controls required programmed method：Hand automatically switches, the start and stop that dehumidify manually, humidifies manually
Start and stop, manually operation output, the folding of normally-open normally-close contact are simulated by intermediate relay, to reach the mesh of control and self-locking
, when humidity less than 20%RH and is higher than 40%RH alarms, output winding sets 1, buzzer is made to blow a whistle, and interrupts main program,
Stop the pulse of solid-state relay outside all feedings, i.e. dehumidifier, ultrasonic humidifier dehumidifying or humidification；
Closed loop adjusting is carried out to humidity using PID adjustment modules, is FB58 " TCONT_CP ", for control it is continuous or
Person has the humidity processing procedure of pulse signal；It calls this module that can generate block of background data DB58, double-clicks and click main interface
Parameter is checked in DB58 block of background data, click, and data are observed at the interface of pop-up；
The method of FB58 module arrange parameters is as follows：
(1) PV_IN is the setting value of controlled variable；
(2) SP_INT is the actual value of controlled variable, needs to input humidity measurements；
(3) QPULSE is output pulse, is connected with external solid-state relay；
Built-in variable setting method is：
(1) dehumidifying call module GAIN be set as negative, GAIN is set as -4.0, humidification part GAIN values be just,
GAIN initial values are 2；
(2) PULSE_ON opens for impulse generator, when this value is changed to TURE by FALSE, sensitizing pulse generator；
(3) TI integral actions resetting time, initial value 4.0S；
(4) TD differential actions resetting time, initial value 1.0S；
(5) TUN_ON self-regulations are opened, and initial value FALSE is changed to TURE here；
(6) TUN_ST starts self-regulation, and initial value FALSE is changed to TURE here.
Advantageous effect：
1. the present invention high-precision can realize distribution of the common test gas in routine test concentration range；It can be simultaneously
Test branched sensor or gas sensor array.
2. the present invention can realize measuring multiple parameters：Since the test system is modular, multiple surveys can be connected simultaneously
Module is measured, each measurement module can realize multi-channel measurement again, therefore be tested while multiple, multiple types parameter easy to implement.
3. the present invention prepares and test the sensing element of a variety of doping techniques, semiconductor gas sensor is made to have volatility
The detection of machine gas has progress.
4. the present invention by gas sensor array and artificial neural network technology phase technology, and be based on BP algorithm realize it is more
The qualitative recognition of kind gas and the quantitative judge of pure gas.
5. it is wet effectively to feel humidity environment, dehumidifying, is humidified for humidity control system of the present invention, humidity is shown
Show and the controls such as humidity alarm.Humidity is effectively monitored and controlled, test process is smoothed out, realization 10~
Humid control in 60%RH humidity ranges under closed environment, effect on moisture extraction is notable, effectively meet gas sensor test when pair
The requirement of humid control.And the present invention sets gas chamber humidity when being more than 60%RH, system cut-off, it is therefore intended that ensures to test and pacify
It is carried out under full ambient engine, when humidity is more than 60%RH, test system is in the hole, is not suitable for test experiments and carries out.
Description of the drawings
Fig. 1 is the flow chart of the method for the embodiment of the present invention 1；
Fig. 2 is that the semiconductor gas sensor of the embodiment of the present invention 2 tests the schematic diagram of system closed loop flow；
Fig. 3 is that the semiconductor gas sensor of the embodiment of the present invention 2 tests the structure diagram of system；(humidity is increased
Control system)
Fig. 4 is the software functional block diagram of the embodiment of the present invention 3；
Fig. 5 is the measuring circuit of the semiconductor gas sensor test system in the embodiment of the present invention 5；
Fig. 6 .1 are the schematic diagram of the BP neural network structure of the quantitative judge in the embodiment of the present invention 6；
Fig. 6 .2 are the schematic diagram of the training process of the gasometry detection in the embodiment of the present invention 6；
Fig. 6 .3 are the schematic diagram of the BP neural network structure of the qualitative recognition in the embodiment of the present invention 6；
Fig. 6 .4 are the schematic diagram of the qualitative analysis training result in the embodiment of the present invention 6；
Fig. 7 is the structure diagram schematic diagram of humidity control system of the present invention；
Fig. 8 is the block diagram of the closed-loop control system of humidity control system of the present invention.
Specific implementation mode
Embodiment 1：
A kind of test method of the semiconductor gas sensor of controlled humidity, has：SnO2The step of prepared by gas sensitive, gas
The step of quick element makes, semiconductor gas sensor tests the step of system buildup is with test, and is sensed to semi-conductor gas
Device tests the step of system and semiconductor gas sensor performance evaluation.
There is the step controlled the humidity of gas chamber in the step of gas sensor test system is set up and tested
Suddenly, a kind of humidity control system, including master controller, moisture detection sensor, dehumidifier, ultrasonic wave has been used to add in the step
Wet device and buzzer, wherein moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in gas chamber, master controller point
It is not connect with moisture detection sensor, dehumidifier, ultrasonic humidifier, buzzer.
Embodiment 2：
With technical solution same as Example 1, more specifically：SnO2Gas sensitive prepare the step of be：With
SnCl4·5H2O is raw material, using weak aqua ammonia as precipitating reagent, weighs a certain amount of SnCl4·5H2O raw materials, be dissolved in it is suitable go from
In sub- water, a small amount of citric acid is added, is stirred, be allowed to be completely dissolved, be then heated to boiling, and is allowed to react；It will
Prepared weak aqua ammonia, is slowly dropped to SnCl4In aqueous solution, and it is stirred continuously, when, it is to be precipitated to be washed completely with warm water, from
Heart cleaning is multiple, to remove Cl- therein, then sediment is dried at 60~100 DEG C, in 700 in Muffle furnace after grinding
DEG C or so 2~4h of calcination, obtain SnO2Gas sensitive.
Embodiment 3：
With technical solution identical with embodiment 1 or 2, more specifically：It is described in the step of gas sensor makes
Sensing element tube core tool there are one capillary ceramic tube, heater strip penetrates in ceramic tube, and metal electrode conduct is coated outside pipe
The signal electrode of measuring cell resistance coats gas sensitive SnO outside metal electrode2, and fire；
Making step is：The ceramic tube substrate that both ends are coated with to metal electrode is surpassed with toluene, alcohol and deionized water successively
Sound cleans, and ground slurry is coated in ceramic pipe surface after being dried under infrared lamp, is dried under infrared lamp, then in tubular type
It is sintered in resistance furnace, finally penetrates the heater strip with appropriate resistance in burned tube core, and by contact conductor and heating
Silk lead is welded on the tube socket of element, is fabricated to gas sensor, and gas gas sensor is made using gas sensor.
This structure overcomes the shortcomings that directly-heated type element, since heater strip is not contacted with gas sensitive, avoids measurement
The consistency of interfering with each other between circuit and heating circuit, element function improves a lot, and mechanical strength is also greatly improved.
Embodiment 4：
With with embodiment 1 or 2 or 3 identical technical solutions, more specifically：The semiconductor gas sensor is surveyed
Test system set up with test the step of in, semiconductor gas sensor test system be used for gas with various at a given concentration into
Mobile state distribution and the variation for making branched sensor array be listed in when gas is passed through to gas sensor surface conductivity are supervised in real time
It surveys；
The semiconductor gas sensor tests system：The automatic sampling device for carrying out sample gas concentration proportioning,
Gas sensor heats with temperature measuring equipment, for sampling device coordination, and the automatic collection 4 under different gas sample environment
Measuring signal of the signal measurement of~6 road gas sensor measuring signals with data acquisition circuit, to acquisition carries out data processing
Data processing circuit；With the temperature-compensation circuit compensated to the caused temperature change of intake process and room temperature variation；
Described to refer to sampling device coordination, signal acquisition and sample introduction are synchronous or corresponding, so that sample introduction and acquisition can be with
Realize the coordination in time sequencing.
Gas sensor array is mounted in gas chamber, and the gas concentration variation measured by gas sensor is gas in gas chamber
Variation, gas chamber is that cavity shape is round and smooth and the organic glass chamber of the drying of squarish；
The gas sensor heating heats gas sensor with temperature measuring equipment, and measures gas sensor in real time
Operating temperature；When the operating temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit in real time into
Trip temperature compensation control, makes the operating temperature of sensor remain unchanged；The signal measurement is used for data acquisition circuit to letter
It number adjusts and AD samplings, Signal Regulation is the AD samplings for gas sensor to be changed into electric signal to the response for testing gas sample
By analog signal by data processing circuit by analog-signal transitions be digital signal, and will collected 4~No. 6 sensor letter
Number pass through normalized, be changed into the required standard signal of BP neural network；
Moisture detection sensor detects moisture signal in gas chamber in real time, and by the signal transmission to master controller, main control
Device is based on humidity set point constant in gas chamber or a humidity range set, the setting value of the moisture signal and controller
It compares, controller exports Staged cotrol signal；When the indoor humidity of gas is less than 10%RH, and humidifier has opened to the maximum, and is
When system cannot continue humidification or the indoor humidity of gas is higher than 60%RH, and when dehumidifier is opened to maximum, master controller will control bee
Ring device ring, and master controller is called to interrupt, stop exporting the signal of dehumidifier and ultrasonic humidifier, and humidity is more than
When 60%RH, system automatically powers off and stops testing.
The humidity control system further includes host computer, and host computer has human-computer interaction interface, and is used for human-computer interaction
Operation, real-time display humidity set point and humidity measurements, the master controller is PLC, and uses the PID adjustment modules of PLC
Closed-loop control is carried out to the indoor humidity of gas.
Wherein：Programmable controller (Programmable Controller) is a member in computer family, for industry
Control application and embodiment manufacture, the programmable controller of early stage is referred to as programmable logic controller (PLC) (Programmable
Logic Controller), abbreviation PLC, it is mainly used to that relay is replaced to realize logic control.Although PLC of today is already
It can not only realize the task of logic control, but people are out of habit, are still called PLC, it only will in Chinese
Logic is gone out, referred to as programmable controller.The present embodiment uses the S7-300 type PLC that Siemens Company produces, it belongs to medium-sized
PLC, using modular construction, application range is very extensive.
Dew cell is simplest humidity sensor, and dew cell mainly has resistance-type, condenser type two major classes, this implementation
Example uses HM1500 humidity sensors, belongs to condenser type, and specifically it is a kind of Linear voltage output formula integrated humidity biography
Sensor.
The method very abundant of dehumidifying, most common method are that ventilation keeps drying.The more effective method of indoor dehumidification is
Different types of dehumidifier, dehumidifier is selected to be divided into freezing type dehumidifier, cycle type dehumidifier because of the difference of its operation principle
With electro-osmosis formula dehumidifier.Most of domestic dehumidifying machines are all freezing type dehumidifiers, the dehumanization method category selected by the present embodiment
In freezing type dehumidifier scope.
The mode very abundant of humidification, tradition humidification are to be sprinkled upon water on the ground, are increased with reaching using moisture natural evaporation
The purpose of air humidity.Modern times are mainly humidified using humidifier.By different use scopes, humidifier can be divided into industry
With, commercial and three kinds of household.Evaporation type humidifier is industrially generally used, it is commercial generally to use ultrasonic humidifying
Device.Household humidifier much all selects purified humidifier.The present embodiment uses ultrasonic humidifier, and humidification module is mainly by electricity
Source unit (same to humidifying unit), ultrasonic transducer, pond and wind turbine are constituted.
The present embodiment is to the method for humid control using 7 softwares of STEP：
Carry out establishment project and hardware configuration：First, into 7 software interfaces of STEP, menu is then clicked, creates new item
Mesh, the entry name in right button menu on the left side are clicked and are inserted into S7-300 websites, double-click the S7-300 websites opened and be inserted into later, double
The hardware for hitting right side window carries out hardware configuration in the hardware window of pop-up；
Configuration：
Rack is found in right frame, after double-click sets rack, then slot 2 is clicked, corresponding model is found in right frame
CPU, double-click and can be inserted into slot 2.Then CPU is double-clicked, corresponding subnet MPI is set in the window of pop-up, analog quantity is defeated
No. 4 slots should be inserted in by entering module, identical as CPU operation is inserted into；
After whole hardware are inserted into corresponding slot, the shortcut key for clicking " preserve and compile " of top menu bar is completed firmly
Part configuration returns to 7 main interfaces of STEP and carries out next step programming；
There are OB1 tissue blocks in main interface after hardware configuration is good, adds other required tissue blocks in blank space and patrols
Block is collected, the insertion of top menu bar is clicked, S7 modules are clicked in the drop-down menu of pop-up, selects required module to be added；
Each section controls required programmed method：Hand automatically switches, the start and stop that dehumidify manually, humidifies manually
Start and stop, manually operation output, the folding of normally-open normally-close contact are simulated by intermediate relay, to reach the mesh of control and self-locking
, when humidity less than 20%RH and is higher than 40%RH alarms, output winding sets 1, buzzer is made to blow a whistle, and interrupts main program,
Stop the pulse of solid-state relay outside all feedings, i.e. dehumidifier, ultrasonic humidifier dehumidifying or humidification；
Closed loop adjusting is carried out to humidity using PID adjustment modules, is FB58 " TCONT_CP ", for control it is continuous or
Person has the humidity processing procedure of pulse signal；It calls this module that can generate block of background data DB58, double-clicks and click main interface
Parameter is checked in DB58 block of background data, click, and data are observed at the interface of pop-up；
The method of FB58 module arrange parameters is as follows：
(1) PV_IN is the setting value of controlled variable；
(2) SP_INT is the actual value of controlled variable, needs to input humidity measurements；
(3) QPULSE is output pulse, is connected with external solid-state relay；
Built-in variable setting method is：
(7) dehumidifying call module GAIN be set as negative, GAIN is set as -4.0, humidification part GAIN values be just,
GAIN initial values are 2；
(8) PULSE_ON opens for impulse generator, when this value is changed to TURE by FALSE, sensitizing pulse generator；
(9) TI integral actions resetting time, initial value 4.0S；
(10) TD differential actions resetting time, initial value 1.0S；
(11) TUN_ON self-regulations are opened, and initial value FALSE is changed to TURE here；
(12) TUN_ST starts self-regulation, and initial value FALSE is changed to TURE here.
In semiconductor gas sensor test process：The output of standard gas sample is divided into two tunnels or multichannel, one quality of each freedom
Flow controller controls, and accesses test device, and carrier gas and under test gas enter under the control of mass flow controller respectively
Drying chamber is sufficiently mixed, and is made into target detection gas sample and is entered in the test chamber in test device, gas sensor test system
Distribution is carried out to set aimed concn gas under control of the computer, by the target gas sample of one or more normal concentrations
Carrier gas with standard is proportionally matched, and is passed through in hybrid channel under mass flow controller control and is fully mixed
It closes, when mixed test gas sample is passed through test chamber, 4~6 tunnel response signals of gas sensor array in gas chamber is carried out
Acquisition, and by the gas sensor array of acquisition to the response message of sample gas be transmitted on computer carry out data processing and
Data analysis makes test gas inlet, response signal acquisition and data processing sequence carry out；When temperature monitoring system discovery is partly led
When body gas sensor operating temperature changes, temperature-compensation circuit carries out element manipulation temperature-compensating, regulation resistance silk in real time
Heating voltage, so that the operating temperature of element is remained unchanged.
Wherein：Since semiconductor gas sensor working characteristics is related with temperature, thus need to semiconductor gas sensor into
Row heating, the operating temperature of gas sensor directly affects transducer sensitivity, while needing temperature sensor, measures gas in real time
The operating temperature of sensor, thus the test system in the present embodiment has gas sensor heating and, temperature measuring equipment and work
Temperature-compensation circuit.
In test, select resistive heater for nichrome, resistance is 30 ohm, and electricity is heated using DC power control
Pressure is realized and is controlled the operating temperature of gas sensor.The temperature of the ceramic pipe surface of thermocouple temperature sensor detection for thermometric
Degree, but since temperature is obtained by the surface of thermocouple direct detection element, and contact element surface not only surface area
It is small and extremely flimsy after surfacing contact, while the reduction of element surface temperature can be made when thermometric, it is brought centainly to measurement
Deviation, for this purpose, with the calibration element surface temperature that voltage is rough before experiment, in test afterwards, directly with heating electricity
It presses to indicate that element surface temperature, following table are the relationship of gas sensor surface temperature and heating voltage.
| Heating voltage | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 |
| Temperature (DEG C) | 26 | 55 | 89 | 137 | 179 | 225 | 268 | 302 | 343 | 377 | 416 |
The output of standard gas sample is divided into two tunnels or multichannel, the one mass flow controller control of each freedom, and accesses test
Device, carrier gas and under test gas (such as formaldehyde, ammonia, benzene, carbon monoxide, oxygen etc.) are respectively in the control of mass flow controller
It is lower to be sufficiently mixed into drying chamber, it is made into test gas sample and enters in the test chamber in test device, gas sensor test system
System carries out distribution to set aimed concn gas under control of the computer, by the target gas of one or more normal concentrations
The carrier gas of sample and standard is proportionally matched, and is passed through in hybrid channel and is carried out fully under mass flow controller control
Mixing, when mixed test gas sample is passed through gas chamber, is acquired the response signal of gas sensor array in gas chamber, and
The gas sensor array of acquisition is transmitted on computer the response message of sample gas and carries out data analysis, makes test gas
Body air inlet, response signal acquisition and data processing sequence carry out；When temperature monitoring system finds semiconductor gas sensor work temperature
When degree changes, temperature-compensation circuit carries out element manipulation temperature-compensating in real time, and the heating voltage of regulation resistance silk makes element
Operating temperature remain unchanged.Excessive manpower will not only be consumed by overcoming traditional test method, but also manual operations has perhaps
More destabilizing factor so that measurement is attached with relatively large deviation value.
For intuitively observed responses process, corresponding application software has graphical interfaces on computer, can show in real time
The response curve of sensor array is shown, which includes automated gas divider, data acquisition, control circuit and mutually accrued
The control of calculation machine, this several part using processing software, each section is connected by data/address bus with computer, in conjunction with computer software
Real-time processing control, test gas inlet, response signal acquisition and data processing sequence can be made to carry out, form complete survey
Examination process.
Embodiment 5：
With with embodiment 1 or 2 or 3 or 4 identical technical solutions, more specifically：The gas sensor test
The software section of system includes gas circuit control module, voltage sample module, temperature compensation module, data processing module and display work(
Energy module, wherein：
Gas circuit control module to control parameter be arranged, the parameter include ventilation before time, duration of ventilation, stop the supple of gas or steam after when
Between, data sampling time interval, mixed gas type, various gas concentrations and carrier gas control voltage, gas circuit control module is to ginseng
Number setting realizes distribution to control multichannel gas sample output quantity, and during distribution, the operating temperature of gas flow and element is entire
It is remained unchanged in test process；
Voltage sample module starts voltage sample, Sampling interrupt terminates that progress is corresponding to be controlled to sampling；
Data processing module carries out data acquisition, data preserve, image preserves, image prints, historical data extraction process.
Embodiment 6：
With with embodiment 1 or 2 or 3 or 4 or 5 identical technical solutions, more specifically：Data acquisition module is completed
Data tracking acquisition in sampling time interval, it is two to be automatically saved after being tested to this to the experimental data of offer
Six files of kind format, the respectively voltage of 4~No. 6 sensors, resistance, response sensitivity digital quantity and dynamic change are bent
Line, while to the printing immediately of the image of preservation and historical data is temporally extracted；In data acquisition, according to different demands
The dynamic change of normal voltage, resistance and the response sensitivity of 4~No. 6 sensor of real-time display at any time is bent in display module
Line.
Embodiment 7：
With with embodiment 1 or 2 or 3 or 4 or 5 or 6 identical technical solutions, more specifically：It is described that gas is passed
Sensor tests the step of system and gas sensor performance evaluation, includes the various error analyses to gas sensor test system,
The sensitivity of measurement resistance, resistance-temperature characteristic, sensitivity-temperature characterisitic, sensitivity-grey density characteristics are analyzed and mixed
The miscellaneous analysis that element function is influenced.
Embodiment 8：
With with embodiment 1 or 2 or 3 or 4 or 5 or 6 or 7 identical technical solutions, more specifically：Sensor is adopted
4~6 road sign calibration signals carry out the normalized of data, and process data into BP neural network and obtain required mark
The step of quasi- data source, progress BP neural network gas analysis, is as follows：
Quantitative analysis：
It selects single formaldehyde gas to detect sample, carries out quantitative detection, sensor array is formed by 4~6 sensors
The input neuron number of the mixed gas quantitative judge such as PARA FORMALDEHYDE PRILLS(91,95) gas, ammonia, benzene, neural network is 6, output neuron
Number is 1, and dynamic changes hidden layer number and seeks its corresponding training error, with the best hidden layer neuron number of determination；
Using one two-tier network of newff function creations, the hidden layer neuron number of network is set as S (i), range
It is 3-13, the training function of network is set as Trainbr, if the weights of network and threshold value are the stochastic variables of special distribution,
Network weight and threshold value are estimated with statistical method, using input vector P as the input for the neural network trained, is utilized
Train function pair networks are trained, and are carried out quantitative detection using the formaldehyde gas of 30 groups of various concentrations as input, are quantified
The output result and corresponding experimental error of detection；
Qualitative analysis：
Three kinds of gas characteristic amounts of sensor array PARA FORMALDEHYDE PRILLS(91,95), ammonia, the benzene being made of 4~6 sensors carry out qualitative knowledge
Not, the input neuron number of network is 6, and output neuron number is 3, and best hidden layer is determined by error comparison
Number, dynamic, which changes, implies the number of plies；
Using one three-layer network of newff function creations, network hidden layer neuron number is set as a dynamic and is become
S (i) is measured, range is 3-13, and by 10 training, one group of neuron number for obtaining training error minimum is best nerve
First number estimates network weight and threshold if the weights of network and threshold value are the stochastic variables of special distribution with statistical method
Value；Training is until experimental error meets the requirements stopping；Using odd number group as the neural network input trained.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope of present disclosure, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (1)
1. a kind of test method of the semiconductor gas sensor of controlled humidity, which is characterized in that have：
Semiconductor gas sensor is tested the step of system buildup is with test, and tests system and half to semiconductor gas sensor
The step of conductor gas sensor performance evaluation；Wherein,
There is the step of controlling the humidity of gas chamber in the step of gas sensor test system is set up and tested, it should
A kind of humidity control system, including master controller, moisture detection sensor, dehumidifier, ultrasonic humidifier have been used in step
And buzzer, wherein moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in gas chamber, master controller respectively with
Moisture detection sensor, dehumidifier, ultrasonic humidifier, buzzer connection；
In the step of semiconductor gas sensor test system buildup and test, semiconductor gas sensor is tested system and is used
In carrying out dynamic air-distributing at a given concentration to gas with various and branched sensor array made to be listed in when gas is passed through to gas sensor
The variation of surface conductivity is monitored in real time；
The semiconductor gas sensor tests system：Automatic sampling device, the gas for carrying out sample gas concentration proportioning
Sensor heats with temperature measuring equipment, for sampling device coordination, and the automatic collection 4~6 under different gas sample environment
Measuring signal of the signal measurement of road gas sensor measuring signal with data acquisition circuit, to acquisition carries out the number of data processing
According to processing circuit；With the temperature-compensation circuit compensated to the caused temperature change of intake process and room temperature variation；
Gas sensor array is mounted in gas chamber, and the gas concentration variation measured by gas sensor is the change of gas in gas chamber
Change, gas chamber is that cavity shape is round and smooth and the organic glass chamber of the drying of squarish；
The gas sensor heating heats gas sensor with temperature measuring equipment, and measures the work of gas sensor in real time
Temperature；When the operating temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit carries out temperature in real time
Degree compensation control, makes the operating temperature of sensor remain unchanged；The signal measurement is used for data acquisition circuit to signal tune
It saves and AD samplings, Signal Regulation is for gas sensor to be changed into electric signal to the response for testing gas sample, AD is sampled mould
Analog-signal transitions are digital signal by data processing circuit by quasi- signal, and collected 4~6 tunnel sensor signal is passed through
Normalized is crossed, the required standard signal of BP neural network is changed into；
The output of standard gas sample is divided into two tunnels or multichannel, the one mass flow controller control of each freedom, and accesses test device,
Carrier gas and under test gas are sufficiently mixed under the control of mass flow controller into drying chamber respectively, are made into target detection gas sample
And enter in the test chamber in test device, gas sensor test system is under control of the computer to set target rich
It spends gas and carries out distribution, the carrier gas of the target gas sample of one or more normal concentrations and standard is proportionally matched, and
It is passed through in hybrid channel and is sufficiently mixed under mass flow controller control, when mixed test gas sample is passed through test chamber
When, 4~6 tunnel response signals of gas sensor array in gas chamber are acquired, and by the gas sensor array pair of acquisition
The response message of sample gas, which is transmitted on computer, carries out data processing and data analysis, makes test gas inlet, response letter
Number acquisition and data processing sequence carry out；When temperature monitoring system finds that semiconductor gas sensor operating temperature changes,
Temperature-compensation circuit carries out element manipulation temperature-compensating in real time, and the heating voltage of regulation resistance silk makes the operating temperature of element protect
It holds constant；
Moisture detection sensor detects moisture signal in gas chamber in real time, and by the signal transmission to master controller, master controller base
In humidity set point constant in gas chamber or a humidity range set, the moisture signal is compared with the setting value of controller
Compared with controller exports Staged cotrol signal；When the indoor humidity of gas is less than 10%RH, and humidifier has opened to the maximum, and system cannot
When continuing humidification or the indoor humidity of gas is higher than 60%RH, and when dehumidifier is opened to maximum, master controller will control buzzer ring
It rings, and master controller is called to interrupt, stop exporting the signal of dehumidifier and ultrasonic humidifier, and when humidity is more than 60%RH,
System automatically powers off and stops testing；
4~6 road sign calibration signals that sensor is used carry out the normalized of data, and process data into BP nerve nets
The step of required normal data source of network acquisition, progress BP neural network gas analysis, is as follows：
Quantitative analysis：
It selects single formaldehyde gas to detect sample, carries out quantitative detection, sensor array is formed to first by 4~6 sensors
The input neuron number of the mixed gas quantitative judge such as aldehyde gas, ammonia, benzene, neural network is 6, and output neuron number is
1, dynamic changes hidden layer number and seeks its corresponding training error, with the best hidden layer neuron number of determination；
Using one two-tier network of newff function creations, the hidden layer neuron number of network is set as S (i), range is 3-
13, the training function of network is set as Trainbr, if the weights of network and threshold value are the stochastic variables of special distribution, with system
Meter method estimates network weight and threshold value, using input vector P as the input for the neural network trained, utilizes train
Function pair network is trained, and is carried out quantitative detection using the formaldehyde gas of 30 groups of various concentrations as input, is obtained quantitative detection
Output result and corresponding experimental error；
Qualitative analysis：
Three kinds of gas characteristic amounts of sensor array PARA FORMALDEHYDE PRILLS(91,95), ammonia, the benzene being made of 4~6 sensors carry out qualitative recognition, net
The input neuron number of network is 6, and output neuron number is 3, and the best implicit number of plies is determined by error comparison, dynamic
Change and implies the number of plies；
Using one three-layer network of newff function creations, network hidden layer neuron number is set as a dynamic variable S
(i), range is 3-13, and by 10 training, one group of neuron number for obtaining training error minimum is best neuron
Number estimates network weight and threshold value if the weights of network and threshold value are the stochastic variables of special distribution with statistical method；
Training is until experimental error meets the requirements stopping；Using odd number group as the neural network input trained.
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| CN201710890243.0A CN107677709B (en) | 2015-11-13 | 2015-11-13 | Method for testing semiconductor gas sensitive element with gas sensitive material preparation step |
| CN201710890870.4A CN107807154A (en) | 2015-11-13 | 2015-11-13 | The method of testing of the semiconductor gas sensor of controlled humidity with gas sensor making step |
| CN201710890627.2A CN107807153A (en) | 2015-11-13 | 2015-11-13 | Humidity control method in the semiconductor gas sensor test of controlled humidity |
| CN201710890876.1A CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
| CN201710890245.XA CN107807152A (en) | 2015-11-13 | 2015-11-13 | SnO2The method of testing of gas sensitive preparation method and semiconductor gas sensor |
| CN201510778949.9A CN105388187B (en) | 2015-11-13 | 2015-11-13 | The test method of the semiconductor gas sensor of controlled humidity |
| CN201710890877.6A CN107817270A (en) | 2015-11-13 | 2015-11-13 | The method of testing of gas sensor preparation method and semiconductor gas sensor |
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| CN201710890243.0A Division CN107677709B (en) | 2015-11-13 | 2015-11-13 | Method for testing semiconductor gas sensitive element with gas sensitive material preparation step |
| CN201710890245.XA Division CN107807152A (en) | 2015-11-13 | 2015-11-13 | SnO2The method of testing of gas sensitive preparation method and semiconductor gas sensor |
| CN201710890876.1A Division CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
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| CN201710890876.1A Withdrawn CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
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| CN201710890877.6A Withdrawn CN107817270A (en) | 2015-11-13 | 2015-11-13 | The method of testing of gas sensor preparation method and semiconductor gas sensor |
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| CN201710890876.1A Withdrawn CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
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| CN106404839A (en) * | 2016-08-19 | 2017-02-15 | 北京艾立特科技有限公司 | An intelligent gas-sensitive analytical device used for an indirectly heated gas sensor |
| CN106646086B (en) * | 2017-02-25 | 2019-05-28 | 郑州畅威物联网科技有限公司 | A kind of detection method of semiconductor gas sensor heater strip fracture of wire |
| CN108562697A (en) * | 2018-03-30 | 2018-09-21 | 歌尔股份有限公司 | A kind of indoor harmful gas monitoring device |
| CN108645894A (en) * | 2018-04-25 | 2018-10-12 | 北京交通大学 | Monitor NAPLs migration process and test method of phase transformation in unsaturated soil |
| CN108982396A (en) * | 2018-05-30 | 2018-12-11 | 南京信息工程大学 | A kind of infrared CO2Gas sensor and its calibration system and humiture compensation method |
| CN108828010B (en) * | 2018-08-22 | 2021-03-02 | 云南大学 | Sensitive material for detecting formaldehyde gas, preparation method and application |
| EP3699582A1 (en) * | 2019-02-25 | 2020-08-26 | Infineon Technologies AG | Gas sensing device and method for operating a gas sensing device |
| CN110220945B (en) * | 2019-04-23 | 2021-12-07 | 金卡智能集团股份有限公司 | Full-range temperature compensation method of semiconductor gas sensor |
| CN112540150A (en) * | 2019-09-20 | 2021-03-23 | 中国石油化工股份有限公司 | Sensor performance evaluation device, method and system |
| CN112578133A (en) * | 2019-09-27 | 2021-03-30 | 深圳迈瑞生物医疗电子股份有限公司 | Sample analysis system and test management method of analysis equipment |
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| CN113138210B (en) * | 2021-06-22 | 2021-09-24 | 电子科技大学 | Self-adaptive local Gaussian temperature and humidity compensation method for intelligent gas sensor |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN107807152A (en) | 2018-03-16 |
| CN107807154A (en) | 2018-03-16 |
| CN107677710A (en) | 2018-02-09 |
| CN105388187A (en) | 2016-03-09 |
| CN107817270A (en) | 2018-03-20 |
| CN107677709A (en) | 2018-02-09 |
| CN107807153A (en) | 2018-03-16 |
| CN107677709B (en) | 2020-07-21 |
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