CN105371834B - Detect mass block and the gyroscope using the detection mass block - Google Patents
Detect mass block and the gyroscope using the detection mass block Download PDFInfo
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- CN105371834B CN105371834B CN201410412739.3A CN201410412739A CN105371834B CN 105371834 B CN105371834 B CN 105371834B CN 201410412739 A CN201410412739 A CN 201410412739A CN 105371834 B CN105371834 B CN 105371834B
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Abstract
The present invention provides a kind of detection mass block and the gyroscope using the detection mass block, and detection mass block includes anchor point, the first mass block, the second mass block, third mass block；The anchor point is arranged in first mass block, and is fixed in an external substrate；The first mass block setting is suspended in the second mass block, and by symmetrical first spring beam in a first direction on the anchor point；Second mass block is arranged in third mass block, and by being suspended on first mass block in symmetrical second spring beam of second direction；The third mass block is suspended on by symmetrical third spring beam in a first direction on the second mass block, and by being connect with external drive mass block in symmetrical 4th spring beam of second direction；The first direction is vertical with the second direction；There is first mass block shaft of first direction, second mass block there is the shaft of first direction and second direction, the third mass block to have the shaft of second direction.
Description
Technical field
The present invention relates to micro mechanical technology field more particularly to a kind of detection mass block and using the top of the detection mass block
Spiral shell instrument.
Background technology
MEMS（Micro Electro Mechanical System, MEMS）Gyroscope utilizes Coriolis force
（Coriolis force, also known as coriolis force）Phenomenon.Coriolis force be particle to moving along a straight line in rotating system due to
A kind of description of the offset for the linear motion that inertia phase generates rotating system.Coriolis force comes from possessed by object of which movement
Inertia, the particle to move along a straight line in rotating system have due to the effect of inertia and continue to move along original direction of motion
Trend, but due to system itself be rotation, after it experienced the movement of a period of time, the position meeting of particle in system
It is varied from, and the direction of its original movement tendency will occur to a certain degree if going to observe with the visual angle of rotating system
Deviation.MEMS gyroscope is small, at low cost, integration is good, has been more and more widely used, such as mobile terminal,
In the products such as camera stabilization, game paddle, toy airplane, navigation.
MEMS gyroscope includes drive part and detection part, and the coupling by driving and detecting movement is realized to fortune
The measurement of dynamic angular speed；When gyro is in drive motion mode, and axially vertical second direction is being moved with driven-mode
When having turning rate input, since coriolis effect gyroscope is moved in the axial sensed-mode that generates of detection, passes through and measure sensed-mode
The displacement of movement measures the rotational angular velocity of object at once.The displacement for measuring sensed-mode movement can be by measuring electricity
The variation of appearance is realized, for example, the variation by determining capacitance caused by the movement by traveling electrode at a resonant condition, comes
The displacement of sensed-mode movement is detected with capacitive method, the detection of capacitance can be by interdigital electrode or plate electrode come real
It is existing.With the development of microelectromechanicgyroscope gyroscope technology, high integration, two axis of low cost or three-axis measurement gyro meet the modern times and disappear
The demand for taking electronic product becomes the trend of micro-electro-mechanical gyroscope development.Two axis or three-axis gyroscope are usually by multiple tops
Spiral shell instrument is integrated in be realized on single substrate.And a kind of detection mass block in gyroscope is only capable of the angle speed in one direction of detection
If desired degree detects the angular speed of multiple directions, then needs at least three detection mass blocks, this cannot meet consumption electronic product
Requirement to gyroscope miniaturization.
Invention content
Technical problem to be solved by the invention is to provide a kind of detection mass block and using the gyro of the detection mass block
Instrument can use a detection mass block to realize the detection of both direction angular speed, reduce gyroscope volume.
To solve the above-mentioned problems, the present invention provides a kind of detection mass blocks, including anchor point, the first mass block, second
Mass block, third mass block；The anchor point is arranged in first mass block, and is fixed in an external substrate；Described
The setting of one mass block is suspended in the second mass block, and by symmetrical first spring beam in a first direction on the anchor point；
Second mass block is arranged in third mass block, and by being suspended on described the in symmetrical second spring beam of second direction
On one mass block；The third mass block is suspended on by symmetrical third spring beam in a first direction on the second mass block, and
By being connect with external drive mass block in symmetrical 4th spring beam of second direction；The first direction and the second direction
Vertically；There is first mass block shaft of first direction, second mass block to have first direction and second direction
Shaft, the third mass block have the shaft of second direction.
Further, first mass block position corresponding with first spring beam is provided with the first recess, and described
One recess is for accommodating first spring beam.
Further, second mass block position corresponding with second spring beam is provided with the second recess, and described
Two recess are for accommodating second spring beam.
Further, second mass block position corresponding with the third spring beam is provided with third recess, and described the
Three recess are for accommodating the third spring beam.
Further, third mass block position corresponding with the 4th spring beam is provided with the 4th recess, and described the
Four recess are for accommodating the 4th spring beam.
Further, the third mass block has a protrusion, second mass block in the 4th recess corresponding position
In position corresponding with the protrusion there is a receiving portion, the protrusion to stretch into described accommodation section.
Further, the anchor point, the first mass block, the second mass block, third mass block, the first spring beam, the second elasticity
Beam, third spring beam and the 4th spring beam are integrally formed.
The present invention also provides a kind of gyroscope, including substrate, detection mass block and driving mass block, the detection mass blocks
Including anchor point, the first mass block, the second mass block, third mass block；The anchor point is arranged in first mass block, and solid
Determine on the substrate；First mass block is arranged in the second mass block, and passes through symmetrical first bullet in a first direction
Property beam is suspended on the anchor point；Second mass block is arranged in third mass block, and by symmetrical in second direction
Second spring beam is suspended on the first mass block；The third mass block is hung by symmetrical third spring beam in a first direction
On the second mass block, and by being connect with the driving mass block in symmetrical 4th spring beam of second direction；Described first
Direction is vertical with the second direction；There is first mass block shaft of first direction, second mass block to have the
The shaft in one direction and second direction, the third mass block have the shaft of second direction；The gyroscope detectable first
The angular speed in direction and second direction.
Further, first direction described in the substrate upper edge is symmetrically arranged with first electrode, and second mass block corresponds to
Position forms the first capacitance group with the first electrode, for detecting electricity of the gyroscope with first direction angular speed when
Hold.
Further, second direction described in the substrate upper edge is symmetrically arranged with second electrode, and second mass block corresponds to
Position forms the second capacitance group with the second electrode, for detecting electricity of the gyroscope with second direction angular speed when
Hold.
An advantage of the present invention is that the inspection of the angular speed of both direction can be realized using a detection mass block
It surveys, reduces the quantity for detecting mass block in gyroscope, reduce the volume of gyroscope, realize the demand of gyroscope miniaturization.
It is a further advantage of the present invention that accommodating corresponding spring beam using sunk structure so that spring beam and detection
Each mass block of mass block partly overlaps, and reduces described spring beam the space occupied, to further decrease detection mass block
Size.
Description of the drawings
Fig. 1 is the structural schematic diagram of present invention detection the first specific implementation mode of mass block；
Fig. 2 is the structural schematic diagram of present invention detection the second specific implementation mode of mass block；
Fig. 3 is the structural schematic diagram of a specific implementation mode of gyroscope of the present invention.
Specific implementation mode
Below in conjunction with the accompanying drawings to the specific of the gyroscope provided by the invention for detecting mass block and using the detection mass block
Embodiment elaborates.
Referring to Fig. 1, in the first specific implementation mode of the invention, detection mass block 1 includes anchor point 10, the first mass block
11, the second mass block 12, third mass block 13.
The anchor point 10 is arranged in first mass block 11, and is fixed on an external substrate（It is not indicated in attached drawing）
On.In this embodiment, first mass block 11 is the framework of inner hollow, and the anchor point 10 is arranged in framework
Portion.The anchor point 10 is fixed in the external substrate, cannot be rotated and be moved.
First mass block 11 is arranged in the second mass block 12, and passes through symmetrical first spring beam in a first direction
14 are suspended on the anchor point 10.Second mass block 12 is the framework of inner hollow, and the suspension of the first mass block 11 is set
It sets inside framework.
Second mass block 12 is arranged in third mass block 13, and by symmetrical second spring beam of second direction
15 are suspended on the first mass block 11.The third mass block 13 is the framework of inner hollow, and second mass block 12 is hung
It is arranged inside framework.
The third mass block 13 is suspended on by symmetrical third spring beam 16 in a first direction on the second mass block 12,
And by symmetrical 4th spring beam 17 of second direction and external drive mass block（It is not indicated in attached drawing）Connection.
The anchor point 10 cannot rotate, and first mass block 11 is restricted by first spring beam 14 so that described
The first mass block 11 only rotation axis with first direction, i.e. first mass block 11 can be rotated around the first direction.Institute
It states third mass block 13 to connect with external drive mass block by symmetrical 4th spring beam 17 of second direction, the third quality
Block 13 is restricted by the 4th spring beam 17 so that the third the mass block 13 only rotation axis with second direction, i.e. institute
Stating third mass block 13 can rotate around the second direction.Second mass block 12 passes through symmetrical second elasticity of second direction
Beam 15 is suspended on the first mass block 11, and the third mass block 13 is suspended on by symmetrical third spring beam 16 in a first direction
On second mass block 12, meanwhile, there is first mass block 11 rotation axis of first direction, the third mass block 13 to have
The rotation axis of second direction, so, second mass block 12 has the rotation axis of first direction and second direction.
The first direction is vertical with the second direction.In this embodiment, the first direction is the side Y
To the second direction is X-direction.The motion principle of present invention detection mass block is described below in detail.
When external drive mass block drives the detection mass block, the external drive mass block drives described symmetrical
4th spring beam 17 is to first direction（Y-direction）Positive negative sense（+Y direction and -Y direction）It moves respectively, at this point, first matter
Gauge block 11, the second mass block 12 and third mass block 13 do clockwise rotation.
When the detection mass block 1 by one around second direction（X-direction）Angular speed when, first mass block 11,
Second mass block 12 and third mass block 13 are by around first direction（Y-direction）Ge Shi torques, 11 He of the first mass block
Second mass block 12 is around the first direction（Y-direction）Rotation, and in a first direction due to the third mass block 13（Y-direction）
There is no rotation axis, so, the third mass block 13 is not around the first direction（Y-direction）Rotation.
When the detection mass block 1 by one around first direction（Y-direction）Angular speed when, first mass block 11,
Second mass block 12 and third mass block 13 are by around second direction（X-direction）Ge Shi torques, 12 He of the second mass block
Third mass block 13 is around the second direction（X-direction）Rotation, and in a first direction due to first mass block 11（Y-direction）
There is no rotation axis, so, first mass block 11 is not around the second direction（X-direction）Rotation.
Due to the second mass block 12 not only rotation axis with first direction, but also the rotation axis with second direction, so, this
Invention detection mass block 1 can rotate in a first direction, can also be rotated in second direction.I.e. merely with a detection mass block 1
It can realize the purpose that can be detected first direction angular speed and detect second direction angular speed.To greatly reduce
The volume of gyroscope realizes the miniaturization of gyroscope.
In order to further decrease the size of present invention detection mass block 1, the volume of the gyroscope is reduced, the present invention also carries
The second specific implementation mode is supplied.
Referring to Fig. 2, in the second specific implementation mode of the invention, first mass block 11 and first spring beam 14
Corresponding position is provided with the first recess 20, and first recess 20 is for accommodating first spring beam 14.Second matter
The position corresponding with second spring beam 15 of gauge block 12 is provided with the second recess 21, and second recess 21 is described for accommodating
Second spring beam 15.The position corresponding with the third spring beam 16 of second mass block 12 is provided with third recess 22, institute
Third recess 22 is stated for accommodating the third spring beam 16.The third mass block 13 is corresponding with the 4th spring beam 17
Position is provided with the 4th recess 23, and the 4th recess 23 is for accommodating the 4th spring beam 17.
First spring beam 14, the second spring beam 15, third spring beam 16 and the 4th spring beam 17 are separately positioned on
In one the 20, second recess 21 of recess, third recess 22 and the 4th recess 23 so that the first spring beam 14, the second spring beam 15, the
Three spring beams 16 and the 4th spring beam 17 have portion with first mass block 11, the second mass block 12 and third mass block 13 respectively
Divide overlapping, reduces the sky that first spring beam 14, the second spring beam 15, third spring beam 16 and the 4th spring beam 17 occupy
Between, so as to further decrease the size of the detection mass block 1, the volume of the gyroscope is reduced, realizes gyroscope
Miniaturization.
Further, outline border is equivalent in detecting mass block 1 due to third mass block 13, so it is possible to which there are third matter
The relatively narrow situation of gauge block 13 so that the 4th recess 23 is shallower, and the 4th spring beam 17 cannot be completely by the 4th recess 23
It accommodates.There is the 4th spring beam 17 of part to be exposed to except the 4th recess 23, to increase the ruler of the detection mass block 1
It is very little.In consideration of it, the present invention detects third mass block 13 described in mass block 1 has a protrusion in 23 corresponding positions of the 4th recess
24, second mass block 12 has a receiving portion 25 with the raised 24 corresponding position, described raised 24 stretch into it is described
Receiving portion 25.Due to the cooperation of protrusion 24 and receiving portion 25, the depth of the 4th recess 23 is increased so that the 4th bullet
Property beam 17 can wholly or largely by the 4th recess 23 accommodate, further decrease it is described detection mass block 1 size, reduce institute
The volume for stating gyroscope realizes the miniaturization of gyroscope.
Further, the anchor point 10, the first mass block 11, the second mass block 12, third mass block 13, the first spring beam
14, the second spring beam 15, third spring beam 16 and the 4th spring beam 17 are integrally formed, and are made simple.
The present invention, which detects mass block 1, can detect the angular speed of first direction, can also detect the angle speed of second direction
Degree, therefore the present invention detects gauge block 1 and can be used for two axis gyroscope instrument, it can also be used to three-axis gyroscope.The present invention provides a kind of gyro
Instrument only by taking two axis gyroscope instrument as an example, illustrates to detect application of the mass block 1 in gyroscope in this embodiment.Three axis
Gyroscope is further added by a Z axis detection on the basis of two axis gyroscope instrument, and this will not be repeated here.
Referring to Fig. 3, the gyroscope includes substrate 2, detection mass block 1 and driving mass block 3.The detection mass block 1
Structure it is identical as the above-described detection structure of mass block 1, this will not be repeated here.The anchor point 10 is fixed on the base 2.
The third mass block 13 in symmetrical 4th spring beam 17 of second direction with the driving mass block 3 by connecting.Described
First direction is symmetrically arranged with first electrode 4 described in 2 upper edge of substrate（It is indicated using dotted line in attached drawing）, second mass block 12
Corresponding position forms the first capacitance group with the first electrode 4, when for detecting the gyroscope with first direction angular speed
Capacitance.Second direction is symmetrically arranged with second electrode 5 described in 2 upper edge of the substrate（It is indicated using dotted line in attached drawing）, described
Second mass block, 12 corresponding position forms the second capacitance group with the second electrode 5, has second for detecting the gyroscope
Capacitance when directional angular velocity.In this embodiment, the first direction is Y-direction, and the second direction is the side X
To.
The driving mass block 3 includes upper driving mass block 30 and lower driving mass block 31.In driving electrodes（In attached drawing not
Mark）Under the action of the driving mass block 3 vibrate, upper driving mass block 30 and lower driving mass block 31 are respectively to first
Direction（Y-direction）Positive negative direction（+Y direction and -Y direction）Vibration, for example, upper driving mass block 30 is vibrated to +Y direction, under
Mass block 31 is driven to be vibrated to -Y direction, which passes to detection mass block 1, first mass by the 4th spring beam 17
Block 11, the second mass block 12 and third mass block 13 rotate clockwise vibration.
When gyroscope by one around second direction（X-direction）Angular speed, i.e., the detection mass block 1 by one around second
Direction（X-direction）Angular speed when, first mass block 11, the second mass block 12 and third mass block 13 are by around first party
To（Y-direction）Ge Shi torques, first mass block, 11 and second mass block 12 is around the first direction（Y-direction）Rotation,
And in a first direction due to the third mass block 13（Y-direction）There is no rotation axis, so, the third mass block 13 is not around institute
State first direction（Y-direction）Rotation.The second electrode 5 detects mass block 12 with described second and forms the second capacitance group, according to
Capacitance variations, to can detect that gyroscope in second direction（X-direction）Angular speed.
When gyroscope by one around first direction（Y-direction）Angular speed, i.e., the detection mass block 1 by one around first
Direction（Y-direction）Angular speed when, first mass block 11, the second mass block 12 and third mass block 13 are by around second party
To（X-direction）Ge Shi torques, second mass block 12 and third mass block 13 are around the second direction（X-direction）Rotation,
And in a first direction due to first mass block 11（Y-direction）There is no rotation axis, so, first mass block 11 is not around institute
State second direction（X-direction）Rotation.The first electrode 4 detects mass block 12 with described second and forms the first capacitance group, according to
Capacitance variations, to can detect that gyroscope in a first direction（Y-direction）Angular speed.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (10)
1. a kind of detection mass block, which is characterized in that including anchor point, the first mass block, the second mass block, third mass block；
The anchor point is arranged in first mass block, and is fixed in an external substrate；
The first mass block setting is suspended on institute in the second mass block, and by symmetrical first spring beam in a first direction
It states on anchor point；
Second mass block is arranged in third mass block, and by being suspended on institute in symmetrical second spring beam of second direction
It states on the first mass block；
The third mass block is suspended on by symmetrical third spring beam in a first direction on the second mass block, and by
Symmetrical 4th spring beam in two directions is connect with external drive mass block；
The first direction is vertical with the second direction；
There is first mass block shaft of first direction, second mass block to have first direction and turn of second direction
Axis, the third mass block have the shaft of second direction, and second mass block is as detection first direction and second direction
Angular speed mass block.
2. detection mass block according to claim 1, which is characterized in that first mass block and first spring beam
Corresponding position is provided with the first recess, and first recess is for accommodating first spring beam.
3. detection mass block according to claim 1, which is characterized in that second mass block and second spring beam
Corresponding position is provided with the second recess, and second recess is for accommodating second spring beam.
4. detection mass block according to claim 1, which is characterized in that second mass block and the third spring beam
Corresponding position is provided with third recess, and the third recess is for accommodating the third spring beam.
5. detection mass block according to claim 1, which is characterized in that the third mass block and the 4th spring beam
Corresponding position is provided with the 4th recess, and the 4th recess is for accommodating the 4th spring beam.
6. detection mass block according to claim 5, which is characterized in that the third mass block is in the 4th recess pair
Answer position that there is a protrusion, second mass block in position corresponding with the protrusion there is a receiving portion, the protrusion to stretch
Enter described accommodation section.
7. detection mass block according to claim 1, which is characterized in that the anchor point, the first mass block, the second mass
Block, third mass block, the first spring beam, the second spring beam, third spring beam and the 4th spring beam are integrally formed.
8. a kind of gyroscope, which is characterized in that including substrate, detection mass block and driving mass block, the detection mass block packet
Include anchor point, the first mass block, the second mass block, third mass block；
The anchor point is arranged in first mass block, and fixes on the substrate；
The first mass block setting is suspended on institute in the second mass block, and by symmetrical first spring beam in a first direction
It states on anchor point；
Second mass block is arranged in third mass block, and by being suspended on the in symmetrical second spring beam of second direction
On one mass block；
The third mass block is suspended on by symmetrical third spring beam in a first direction on the second mass block, and by
Symmetrical 4th spring beam in two directions is connect with the driving mass block；
The first direction is vertical with the second direction；
There is first mass block shaft of first direction, second mass block to have first direction and turn of second direction
Axis, the third mass block have the shaft of second direction, and second mass block is as detection first direction and second direction
Angular speed mass block；
The gyroscope can detect the angular speed of first direction and second direction.
9. gyroscope according to claim 8, which is characterized in that first direction is symmetrically arranged with described in the substrate upper edge
First electrode, the second mass block corresponding position forms the first capacitance group with the first electrode, for detecting the gyro
Instrument has capacitance when first direction angular speed.
10. gyroscope according to claim 8, which is characterized in that second direction described in the substrate upper edge is symmetrical arranged
There is second electrode, the second mass block corresponding position forms the second capacitance group with the second electrode, for detecting the top
Spiral shell instrument has capacitance when second direction angular speed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410412739.3A CN105371834B (en) | 2014-08-21 | 2014-08-21 | Detect mass block and the gyroscope using the detection mass block |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410412739.3A CN105371834B (en) | 2014-08-21 | 2014-08-21 | Detect mass block and the gyroscope using the detection mass block |
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| CN105371834B true CN105371834B (en) | 2018-08-31 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107782299B (en) * | 2016-08-27 | 2023-09-29 | 深迪半导体(绍兴)有限公司 | Two-axis MEMS gyroscope |
| CN107192384B (en) * | 2017-07-24 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | MEMS triaxial gyroscope |
| CN111174772B (en) * | 2020-01-13 | 2023-05-02 | 无锡莱斯能特科技有限公司 | Triaxial MEMS gyroscope |
| CN114646309B (en) * | 2022-05-18 | 2022-08-23 | 绍兴圆方半导体有限公司 | Three-axis gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| FI116543B (en) * | 2004-12-31 | 2005-12-15 | Vti Technologies Oy | Oscillating micro-mechanical angular velocity sensor, for vehicle, has seismic masses that are connected to support areas using springs or auxiliary structures |
| US20100071467A1 (en) * | 2008-09-24 | 2010-03-25 | Invensense | Integrated multiaxis motion sensor |
| FI122397B (en) * | 2008-04-16 | 2011-12-30 | Vti Technologies Oy | A vibrating micromechanical angular velocity sensor |
| CN101858929B (en) * | 2010-05-21 | 2012-09-05 | 中国科学院上海微***与信息技术研究所 | Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof |
| CN103424110B (en) * | 2012-05-15 | 2015-08-05 | 中国科学院上海微***与信息技术研究所 | Mini-size angular velocity sensor |
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