CN105353542A - Support rod and substrate-receiving box equipped with same - Google Patents
Support rod and substrate-receiving box equipped with same Download PDFInfo
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- CN105353542A CN105353542A CN201510874758.2A CN201510874758A CN105353542A CN 105353542 A CN105353542 A CN 105353542A CN 201510874758 A CN201510874758 A CN 201510874758A CN 105353542 A CN105353542 A CN 105353542A
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- support bar
- ceiling plate
- plate portion
- substrate
- carrying case
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Casings For Electric Apparatus (AREA)
Abstract
The invention relates to a support rod and a substrate-receiving box equipped with the same. The support rod comprises a main body with a hollow interior. One side of the main body is used for supporting a substrate. In order to communicate the hollow interior with the exterior of the main body and further decrease a pressure difference between the interior and the exterior of the main body, pressure-buffering portions are arranged on the other sides of the main body.
Description
Technical field
the present invention relates to a kind of support bar and the substrate carrying case possessing support bar.
Background technology
generally, the display screen of liquid crystal indicator is by the thin film transistor (TFT) of the pixel after relying on gateline transmission to define, the thin film transistor base plate possessing pixel electrode, filter layer with possess the color filter substrate of public electrode and the liquid crystal layer be loaded between two substrates is formed.
as mentioned above, the manufacturing process of the liquid crystal indicator of assembling can be divided into substrate manufacturing process, battery manufacturing process and this three class of module manufacturing process.
first, substrate manufacturing process can be subdivided into thin film transistor (TFT) manufacturing process and color filter manufacturing process.Thin film transistor (TFT) manufacturing process refers to the process manufacturing the thin film transistor (TFT) that is attached on infrabasal plate and pixel electrode, and color filter manufacturing process refers to and uses dyestuff or pigment make the filter layer of RGB form and aspect and form the process of public electrode at the upper substrate forming black matrix.
further, battery manufacturing process refer to thin film transistor (TFT) manufacturing process terminate after infrabasal plate and filter technique terminate after upper substrate between in order to keep certain spacing to lay attachment packing ring, inject liquid crystal and manufacture the process of liquid crystal display device panel.
finally, the module that liquid crystal display device panel is connected with signal processing circuit with manufacture by the circuit that module manufacturing process refers to manufacture processing signals.
as above, in the manufacturing process of liquid crystal indicator, in order to each program can be performed, need to provide a kind of method that simultaneously can store two pieces of substrates.
in dry run after cleaning, the inside and outside generation pressure differential of support bar, makes moisture enter the inside of support bar, and when substrate is arranged on support bar, the water in support bar can flow out whereabouts, causes substrate damage.
embodiment of the present invention are to provide a kind of support bar, the internal and external pressure balance of support bar in the dry run after making cleaning process, prevent water in cleaning process from flowing into support bar inner.
Summary of the invention
the problem solved.
the support bar be arranged on substrate carrying case of the present invention comprises the inner main body for hollow structure, and the one side of described main body is used for supporting substrate, and another side is provided with pressure buffer portion, for reducing the inside and outside pressure differential of support bar.
in the case, described main body is shaft-like, main body one side is wherein provided with combined hole, described pressure buffer portion is arranged on described combined hole, and described pressure buffer portion being provided with the first intercommunicating pore joint body portion for being connected with outside by described hollow bulb, being installed on use porosint joint body portion being used for covering the first described intercommunicating pore and making cover plate.
in the case, the first intercommunicating pore is covered by the one side of the first ceiling plate portion, and the another side of the first ceiling plate portion is covered by the second ceiling plate portion, and described cover plate comprises at least one in the first ceiling plate portion and the second ceiling plate portion.
in the case, described joint body portion is that the outer peripheral face in cylindrical, described joint body portion matches with combined hole, is connected with described combined hole to make described joint body portion.
in the case, the described outer peripheral face in joint body portion is thermal welding with the connected mode of the inner peripheral surface of combined hole, ultrasonic soldering, adhesion agent be connected in wherein a kind of.
in the case, the one side in described joint body portion is provided with the groove caved inward, the center of described groove is provided with the first described intercommunicating pore, the area of section of described groove is greater than the area of section of the first described intercommunicating pore, supports described cover plate to enable described joint body portion.
in the case, a cover piece is also provided with in the groove in described joint body portion, described cover piece is for covering the first described ceiling plate portion and the second ceiling plate portion, described cover piece is also provided with the second intercommunicating pore, and the second described intercommunicating pore is used for being connected with the second ceiling plate portion with the first ceiling plate portion.
in the case, the first described ceiling plate portion makes with nonwoven fabrics or plastics.
in the case, the thickness of the first described ceiling plate portion is 50 ~ 150.
in the case, the second described ceiling plate portion is that sponge plastics is made.
in the case, the thickness of the second described ceiling plate portion is 10 ~ 200, and the aperture in the hole of described sponge plastics is 0.01 ~ 1.0.
substrate carrying case provided by the invention, it comprises upper frame, lower frame, the support of multiple vertical setting is provided with between described upper frame and lower frame, described support is used for described upper frame to be connected with lower frame, and described propping up is set up in described upper frame and the both sides of lower frame.
the effect of invention
support bar of the present invention, comprises pressure buffer portion, to slow down the inside and outside pressure differential of support bar, prevents water from flowing in support bar.
in addition, support bar described according to an embodiment of the present invention, external and internal pressure difference can be reduced, prevent because the water flow in cleaning process in support bar spills and cause substrate damage, also can prevent from causing the damage of support bar because backside gas in dry run afterwards expands.
and the substrate carrying case that the present invention possesses support bar in practice can prevent the water be left from flowing into substrate in dry run after washing.
the stable manufacturing process of flat display devices can be made, produce the product of high-quality.
Accompanying drawing explanation
fig. 1 is the stereographic map of the substrate carrying case possessing support bar in embodiment of the present invention;
fig. 2 is the planimetric map having possessed the thing loaded in the substrate carrying case of support bar in embodiment of the present invention;
fig. 3 is the stereographic map of support bar in embodiment of the present invention;
fig. 4 is the stereographic map in the pressure buffer portion of middle according to an embodiment of the present invention support bar;
fig. 5 is the pressure buffer portion cross-sectional perspective view of middle according to an embodiment of the present invention support bar;
fig. 6 is the stereographic map in the joint body portion of middle according to an embodiment of the present invention support bar;
fig. 7 is the stereographic map of the cover piece of middle according to an embodiment of the present invention support bar,
wherein, 1, substrate carrying case; 2, upper frame; 3, lower frame; 5, substrate; 7, support; 9, rod member; 10, support bar; 11, main body; 12, insert port; 13, combined hole; 14, protruding part; 14a, columnar part; 14b, head; 15,15a, 15b: elastic component; 16, protrusion inserting hole; 20, fixture; 21, fixed part; 22, screw member insertion hole; 23, teat; 23a, insertion groove; 30, pressure buffer portion; 31, joint body portion; 31a, 33a, 41a, screw thread; 32, the first screw hole; 33, groove; 35, the first intercommunicating pore; 36, cover plate; 37, the first ceiling plate portion; 39, the second ceiling plate portion; 41, cover piece; 43, the second screw hole; 45, the second intercommunicating pore.
Embodiment
below, with reference to the figure of annex, the common people in the technical field residing for this invention can be made easily to implement.The present invention, by many different morphosises, is not limited only to explanation herein.For the present invention described on accurate key diagram, so eliminate and irrelevant part is described, by detailed bill, common reference symbol is appended to same or similar inscape.
" comprise " in this detailed bill or the term such as " having " be just in order to specify this detailed bill is recorded feature, numeral, the stage, action, inscape, annex or associated thing existence, should understand and not get rid of one or exceed other features more than one, numeral, stage, action, inscape, the existence of annex or associated article or other possibility herein in advance.Further, the layer described in literary composition, film, field, plate etc. part when other parts " top " exist, this not only comprise it appear at " directly over " situation, further comprises the situation appearing at centre or other parts.
fig. 1 is the stereographic map possessing the substrate carrying case 1 of support bar 10 in embodiments of the invention.Fig. 2 is the planimetric map that the present invention possesses the thing loaded in the substrate carrying case 1 of support bar 10 in an embodiment.
substrate carrying case 1 of the present invention, wherein, the side that substrate 5 is housed is front, and its reverse direction is rear.
with reference to figure 1, in the present embodiment, the substrate carrying case 1 possessing support bar 10 of the present invention contains upper frame, underframe, vertical frame, rod member 9 and support bar 10.
the substrate carrying case 1 possessing support bar 10 in the embodiment of the present invention, the process of mounting substrate 5 and the process of again substrate 5 loaded being taken out substantially steady, and can prevent from producing bad substrate 5 during ensuing technological process.
with reference to figure 1, the upper frame 2 in the embodiment of the present invention and lower frame 3 can be arranged to tabular.Now, upper frame 2 and lower frame 3 can be arranged to the shape of each substrate 5 similar, with supporting substrate 5 reposefully.
that is, as shown in Figure 1, upper frame 2 and lower frame 3 can be arranged to rectangle.And upper frame 2 and lower frame 3 are in order to be connected up and down, between upper frame 2 and lower frame 3, be connected with the support 7 of multiple vertical setting.
now, multiple support 7 can be arranged to shaft-like, described support 7 transverse partition arrangement with by described upper frame 2 and lower frame 3 isolated.
and compartment of terrain is provided with multiple rod members 9 along the vertical direction on multiple support 7, for supporting rectangular substrate 5.
with reference to figure 2, rod member 9 in a tubular form, inwardly protruding on upper frame 2 and lower frame 3, and described rod member 9 parallels with upper frame 2 and lower frame 3, for supporting substrate 5.
now rod member 9 be arranged on substrate 5 sidepiece and with substrate 5 homeotropic alignment, for supporting substrate 5.
in addition, with reference to figure 1, upper frame 2 and lower frame 3 are connected up and down with vertical frame, and the rear side of upper frame 2 and lower frame 3 is provided with the framework of multiple vertical direction setting, for arranging support bar 10.
now the cross section in the perpendicular direction of vertical frame is H-shaped, and combines with the fixture 20 of hereinafter described support bar 10.
in embodiment of the present invention, support bar 10 comprises main body 11, protruding part 14, fixed part 21 and pressure buffer portion 30.
support bar 10 of the present invention vertically compartment of terrain is arranged on multiple vertical frame, for supporting substrate 5.
with reference to figure 2, support bar 10 of the present invention is arranged between multiple rod member 9.When only using the two ends of rod member 9 supporting substrate 5, the mediad of substrate 5 sinks, and can clash, be arranged in by multiple support bars 10 between multiple rod members 9 and can prevent such danger with mounting substrate in carrying case 5 or the robot etc. that unloads carried base board 5.
now, as shown in Fig. 1 and Fig. 2 illustrate, support bar 10 is arranged in sustained height with the rod member 9 of supporting substrate 5, and substrate 5 can not be bent downwardly together with rod member 9, can guarantee stable loading.
fig. 3 is the stereographic map of support bar 10 in embodiment of the present invention.
on the other hand, with reference to figure 1 and Fig. 3, support bar 10 inside in embodiment of the present invention forms hollow, can be arranged to shaft-like main body 11.Main body 11 inside forms hollow, can save material, alleviate overall weight, and operation transfiguration is easy.
now, the cross section of main body 11 may be circular, oval, polygon etc., but is also not limited to this.
in addition, in embodiment of the present invention, main body 11 may be made up of carbon fiber reinforced plastic, carbon film, glass reinforced film, aramid fiber film and metallic film single or multiple lift.
now, carbon fiber reinforced plastic is by known specific strength, rigidity, the carbon fibre fabric that fracture strength is very outstanding or sheet material adds the material after epoxy resin cure.
in addition, for one end of main body 11 in embodiment of the present invention, as shown in Figure 3, form fixture 20 in the rear end of main body 11, the vertical frame for main body 11 and carrying case combines.
in embodiment of the present invention, by described fixture 20, support bar 10 is fixed on support 7, makes the upper side energy mounting substrate 5 of support bar 10.Now support bar 10 meeting and fixture 20 are combined into one, but are not limited only to this, and fixture 20 also combines by alternate manner.
on the other hand, with reference to figure 3, the present invention in embodiments fixture 20 has possessed fixed part 21 and teat 23.As shown in Figure 3, the cross section of fixed part 21 of the present invention is sexangles, is made up of the non-ferrous metal such as aluminium alloy, steel and alloy.
in addition, form multiple screw member insertion hole 22 with reference to the two sides of figure 1 fixed part 21 and trailing flank, be connected by screw with vertical frame to make described fixed part 21.
now, the screw member insertion hole 22 of fixed part 21 can be combined with vertical frame after being connected with screw.Now vertical frame and fixed part 21 in conjunction with time, the screw member insertion hole 22 of fixed part 21 is corresponding with the screw hole position on vertical frame.
with reference to figure 3, the teat 23 before fixed part 21 forward side is given prominence to.Now teat 23 can be shaft-like, and cross section can be quadrilateral, but is not limited by this.
in addition, for one of main body 11 section, the later half side ports of the main body 11 shown in Fig. 3 can form insert port 12.Now, the lateral surface of insert port 12 and teat 23 is corresponding, and teat 23 inserts insert port 12, and fixed part 21 and main body 11 combine.
with reference to figure 3, the teat in embodiment of the present invention can form insertion groove 23a in upper surface both sides, and now insertion groove 23a extends along the horizontal direction of teat.
thus, insert teat 23 in the insert port 12 of support bar 10, in conjunction with time due to the effect of insertion groove 23a, the protruding part 14 of support bar 10 is by the impact of teat 23.
and thus, main body 11 is combined with the vertical frame of carrying case and fixes.
with reference to figure 3, for the other end of main body 11, in order to sealed body 11, can combine with encapsulation fitting, but not limited.
now, because the hollow bulb of main body 11 is airtight from outside, when using in flat pannel display manufacturing engineering, can prevent air from importing to inside or inject when washing the dry run inner air after water washing due to close have main body 11 break wait dangerous, and wash the water that spills from inside in metacoxal plate 5 loading process thus cause bad.
on the other hand, in embodiment of the present invention, main body above substrate 5 is housed, in order to the impact between main body and substrate 5 with scrape damage, be provided with protruding part at the upper surface of substrate 5, the upper surface of described substrate 5 is provided with the protruding mounting hole of the protruding part described in installation.
at this, described protrusion member is the cylindrical of projection, can be plastic material, but be not limited only to plastic material.In addition in order to enable protruding part combine with protrusion inserting hole, the outer peripheral face of described protruding part can be connected for being threaded or embedding with described protrusion inserting hole.
fig. 4 is the stereographic map in the pressure buffer portion 30 of support bar in embodiment of the present invention.Fig. 5 is the sectional view in the pressure buffer portion 30 of support bar in embodiment of the present invention.
on the other hand, with reference to figure 4, for the another side of main body, be combined with pressure buffer portion 30 in the downside of main body 11.The downside of main body 11 is provided with combined hole 13, can insert and fix on the main body 11 to make the pressure buffer portion 30 of the downside being arranged at main body 11.
in addition, the cross section of combined hole 13 can be circular, but corresponding with the pressure buffer portion 30 arranged.
with reference to figure 4, pressure buffer portion 30 comprises joint body portion 31, cover plate 36, cover piece 41, and in addition, described cover plate 36 at least comprises one in the first ceiling plate portion 37 and the second ceiling plate portion 39.
according to embodiment of the present invention, owing to support bar being provided with pressure buffer portion 30, dry run after cleaning makes support bar inner air expand, in the process returning to normal temperature, cooling meat, now the hollow bulb of support bar inside and the pressure differential of outside are cushioned, and the water that can prevent cleaning process from leaving over enters the inside of support bar.
with reference to figure 5, pressure buffer portion 30 is arranged on the combined hole of main body, and the inside and outside of main body is connected, and reduces to make the inside and outside pressure differential of main body.
fig. 6 is the stereographic map in the joint body portion 31 of the support bar of embodiment of the present invention.Fig. 7 is the stereographic map of the cover piece 41 of the support bar of embodiment of the present invention.
on the other hand, with reference to figure 6 and Fig. 7, joint body portion 31 is cylindrical, and the outer peripheral face in described joint body portion 31 is provided with screw thread 31a, is threaded with combined hole to make described joint body portion 31.
now, the outer peripheral face in described joint body portion 31 can for being threaded with the inner peripheral surface of combined hole.In addition, a kind of mode during the outer peripheral face in joint body portion 31 and the inner peripheral surface of combined hole also can use thermal welding, ultrasonic soldering, adhesion agent to be connected connects, with the inside preventing water from entering support bar.
at this, described adhesion agent can be epoxy resin, but is not limited thereto, and also can use Polyurethane or silicon materials.
with reference to figure 6, the center in joint body portion 31 caves inward and forms groove 33.At this, the cross section of groove 33 can be circular, but is not limited thereto.
on the other hand, in embodiments of the invention, the first ceiling plate portion 37 and the second ceiling plate portion 39 can be inserted in groove 33.In addition, in embodiments of the invention, the inner peripheral surface of groove 33 is provided with screw thread 33a, can be threaded to make described groove 33 with cover piece 41.
with reference to figure 6, in order to make the hollow bulb of main body be connected with outside, the center of the groove 33 in joint body portion 31 is provided with the first intercommunicating pore 35 along its vertical direction.
at this, the cross section of the first intercommunicating pore 35 is circular, and the area of section of its area ratio groove 33 is little, can support cover plate 36 to make groove 33.First ceiling plate portion 37 and the second ceiling plate portion 39 are located in groove 33 and are combined with cover piece 41.
in addition, with reference to figure 6, joint body portion 31 is combined with combined hole by screw thread 31a, conveniently swivel adapter head body 31, can arrange the first screw hole 32 on a surface in joint body portion 31.
now, revolving part is inserted the first screw hole 32, after fixing, can swivel adapter head body 31, make it combine with the combined hole of body or be separated.
in addition, in order to make the inside and outside of body be connected, the first described ceiling plate portion 37 and the second ceiling plate portion 39 use nonwoven fabrics or plastics to make.
in addition, in order to make the second ceiling plate portion 39 that the inside and outside of main body can be made to be connected, the second described ceiling plate portion 39 can use sponge plastics to make.Now, the pore opening of the second ceiling plate portion 39 is 0.01 ~ 1.0, and the porosint of the second ceiling plate portion 39 should select the heat-resisting material of the heating-up temperature can born in dry run.
with reference to figure 4 and Fig. 5, the first ceiling plate portion 37 and the second ceiling plate portion 39 are in disc, and its area ratio groove 33 area of section is little, can be installed in groove 33.
in addition, first ceiling plate portion 37 and thermotolerance and the good synthon of water proofing property can be used to make also can be PET(polyethylene terephthalate), PP(polypropylene), PC(polycarbonate) and the mat made of the plastics such as PE (tygon), but be not limited thereto.
at this, the thickness of the first ceiling plate portion 37 is 50 ~ 150, has and better air permeability.
in addition, the second ceiling plate portion 39 can use to be made with thermotolerance and the good synthon of water proofing property, also can make with PTFE (teflon), but be not limited thereto.
in addition, the thickness of the second ceiling plate portion 39 is 10 ~ 200, has good air permeability.Now, in embodiments of the invention, when passing through the pressure P=0.01MPa of the second ceiling plate portion 39, flow is 1000m3/ ㎡ .24hr.
in the present invention, cover piece 41 is cylindrical, and the outer peripheral face of described cover piece 41 is provided with screw thread 41a, can be threaded to make described cover piece 41 with the groove 33 in joint body portion 31.
at this, the outer peripheral face of cover piece 41 is threaded with the inner peripheral surface of groove 33.Cover piece 41 covers the first ceiling plate portion 37 and the second ceiling plate portion 39, is fixed in groove 33 to make the first ceiling plate portion 37 and the second ceiling plate portion 39.
the center of cover piece 41 caves inward formation second screw hole 43, and at this, the cross section of the second screw hole 43 can be set to hexagon, but is not limited only to this.
in embodiment of the present invention, mounting article (not shown) can insert rotation in the second screw hole 43, to make cover piece 41 be attached in groove 33, or be removed in groove 33.
in addition, with reference to figure 6, the first ceiling plate portion 37, second ceiling plate portion 39, first intercommunicating pore 35 is connected with the hollow bulb of main body, and the central part of the second screw hole 43 of cover piece 41 is provided with the second intercommunicating pore 45 in its axial direction.
at this, the cross section of the second intercommunicating pore 45 is square, and the area of section of its area ratio second screw hole 43 is little.
in embodiment of the present invention, support bar is provided with buffer part, alleviates the pressure differential that support bar is outside and inner, make water can not enter support bar inside.
in addition, support bar described according to an embodiment of the present invention, external and internal pressure difference can be reduced, prevent because the water flow in cleaning process in support bar spills and cause substrate 5 to damage, also can prevent from causing the damage of support bar because backside gas in dry run afterwards expands.
and the substrate carrying case 1 possessing support bar 10 of the present invention can prevent the water left in washing dry run from entering substrate 5.The manufacture process of panel display apparatus can be made to stablize, produce the product of high-quality.
above for the explanation of invention, thought of the present invention is the content being not limited in indication in this instructions, the practitioner understanding thought of the present invention can in the scope of same idea, adding according to inscape, change, delete, to add etc. and easyly to advise, this also belongs to thought of the present invention.
Claims (12)
1. be arranged on the support bar for supporting substrate on substrate carrying case, it comprises:
Main body, its inside is hollow, and the one side of main body is used for supporting substrate;
Be arranged on the pressure buffer portion on other faces of main body, it is for alleviating the hollow bulb of main body and outside pressure differential.
2. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 1, it is characterized in that: described main body is shaft-like, main body one side is wherein provided with combined hole, described pressure buffer portion is arranged on described combined hole, and described pressure buffer portion comprises:
Joint body portion, described joint body portion is provided with the first intercommunicating pore for being connected with outside by described hollow bulb;
Be installed on for covering the cover plate of the first described intercommunicating pore in joint body portion, described cover plate is that porosint is made.
3. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 2, it is characterized in that: the first intercommunicating pore is covered by the one side of the first ceiling plate portion, the another side of the first ceiling plate portion is covered by the second ceiling plate portion, and described cover plate comprises at least one in the first ceiling plate portion and the second ceiling plate portion.
4. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 2, it is characterized in that: described joint body portion is cylindrical, the outer peripheral face in described joint body portion matches with combined hole, is connected with described combined hole to make described joint body portion.
5. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 4, is characterized in that: the described outer peripheral face in joint body portion is thermal welding with the connected mode of the inner peripheral surface of combined hole, ultrasonic soldering, adhesion agent be connected in wherein a kind of.
6. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 5, it is characterized in that: the one side in described joint body portion is provided with the groove caved inward, the center of described groove is provided with the first described intercommunicating pore, the area of section of described groove is greater than the area of section of the first described intercommunicating pore, supports described cover plate to enable the groove in described joint body portion.
7. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 6, it is characterized in that: in the groove in described joint body portion, be also provided with a cover piece, described cover piece is for covering the first described ceiling plate portion and the second ceiling plate portion, described cover piece is also provided with the second intercommunicating pore, and the second described intercommunicating pore is used for being connected with the second ceiling plate portion with the first ceiling plate portion.
8. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 2, is characterized in that: the first described ceiling plate portion makes with nonwoven fabrics or plastics.
9. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 8, is characterized in that: the thickness of the first described ceiling plate portion is 50 ~ 150.
10. a kind of support bar for supporting substrate be arranged on substrate carrying case according to claim 2, is characterized in that: the second described ceiling plate portion is that sponge plastics is made.
11. a kind of support bars for supporting substrate be arranged on substrate carrying case according to claim 2, it is characterized in that: the thickness of the second described ceiling plate portion is 10 ~ 200, the aperture in the hole of described sponge plastics is 0.01 ~ 1.0.
12. 1 kinds of substrate carrying cases possessing the support bar described in any one of claim 1 ~ 11, it comprises upper frame, lower frame, the support of multiple vertical setting is provided with between described upper frame and lower frame, described support is used for described upper frame to be connected with lower frame, and described propping up is set up in described upper frame and the both sides of lower frame.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150144927A KR101725264B1 (en) | 2015-10-16 | 2015-10-16 | Support bar and substrate loading cassette having the same |
| KR10-2015-0144927 | 2015-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105353542A true CN105353542A (en) | 2016-02-24 |
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ID=55329536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510874758.2A Pending CN105353542A (en) | 2015-10-16 | 2015-12-03 | Support rod and substrate-receiving box equipped with same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101725264B1 (en) |
| CN (1) | CN105353542A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107758041A (en) * | 2016-08-18 | 2018-03-06 | 象牙弗隆泰克株式会社 | Box and its including the support bar for supporting substrate carrying case insert structure body |
| CN110687700A (en) * | 2018-07-05 | 2020-01-14 | 象牙弗隆泰克株式会社 | Insert structure and substrate loading cassette provided with same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200487579Y1 (en) * | 2017-06-21 | 2018-11-28 | 이이원 | Cassette for carrying glass substrate |
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| CN1743245A (en) * | 2004-08-30 | 2006-03-08 | 三星电子株式会社 | Sustrate loading casing |
| CN1808224A (en) * | 2005-01-20 | 2006-07-26 | 象牙芙蓉太克股份有限公司 | Substrate cassette with rail connecting groupware |
| KR20100000687U (en) * | 2008-07-14 | 2010-01-22 | 안병홍 | storage case for photomask |
| KR20100046431A (en) * | 2008-10-27 | 2010-05-07 | (주)케이엠 | A support bar for the substrate-loading cassette and the manufacturing method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107758041A (en) * | 2016-08-18 | 2018-03-06 | 象牙弗隆泰克株式会社 | Box and its including the support bar for supporting substrate carrying case insert structure body |
| CN110687700A (en) * | 2018-07-05 | 2020-01-14 | 象牙弗隆泰克株式会社 | Insert structure and substrate loading cassette provided with same |
| CN110687700B (en) * | 2018-07-05 | 2022-05-10 | 象牙弗隆泰克株式会社 | Insert structure and substrate loading cassette provided with same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101725264B1 (en) | 2017-04-10 |
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Application publication date: 20160224 |