CN105352664A - Leakage detection tool and method for multichannel spraying device - Google Patents
Leakage detection tool and method for multichannel spraying device Download PDFInfo
- Publication number
- CN105352664A CN105352664A CN201510677407.2A CN201510677407A CN105352664A CN 105352664 A CN105352664 A CN 105352664A CN 201510677407 A CN201510677407 A CN 201510677407A CN 105352664 A CN105352664 A CN 105352664A
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- passage
- spray
- leak detection
- adaptor
- hyperchannel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a leakage detection tool for a multichannel spraying device, aims at improving the leakage detection efficiency of the multichannel spraying device and reducing the safety risks during leakage detection, and guarantees that the performance of a key element of the multichannel spraying device in semiconductor equipment meets the production requirements. The tool comprises an adapter part, a vacuum sealing plate, and a clamping tool. The detection method comprises the steps: firstly placing the vacuum sealing plate in a groove at the center of the clamping tool; secondly locking the multichannel spraying device on the clamping tool through a screw; thirdly enabling a spraying small hole side of the multichannel spraying device to be closely attached to the vacuum sealing plate, and sealing the spraying small hole side of the multichannel spraying device, thereby enabling a leakage detector to be connected with one leakage detection port of the adapter part; fourthly opening other leakage detection port of the adapter part, and starting the leakage detector, so as to carry out the detection of one gas channel; fifthly enabling the leakage detector to be connected with other leakage detection ports of the adapter part, and starting the leakage detector, so as to carry out the leakage detection of other gas channels, thereby achieving the leakage detection of all channels of the multichannel spraying device.
Description
Technical field
The present invention relates to a kind of hyperchannel spray equipment leak detection tool equipment, be mainly used in semiconductor coated film equipment the leak detection operation with separate hyperchannel spray equipment, because these spray equipments often have multiple gases autonomous channel and the feature evenly sprayed because of technological requirement, so this hyperchannel spray equipment produced in batches when manufacturing this type of semiconductor equipment just needs mode of hunting leak easily to check one by one, this frock belongs to semiconductive thin film deposition applications and preparing technical field.
Background technology
Existing semiconductor coated film equipment is in technological process, require when thin film deposition processes because of the special nature of film, two or more gas or many gaseous mixture is passed into above film, according to the spray equipment of single channel, then when passing into different types of gas, there is the byproduct of reaction producing unfavorable film growth as solid particle or the danger having vigorous reaction, the requirement growing the qualified film product of performance can not be met, therefore the spray equipment adopting multiple gases channel separation spray is just needed, these spray equipment inside have multiple independently gas passage, the independent impermeability of obvious each passage is particularly important, and in the manufacturing of these semiconductor equipments, regular shutdown in this labyrinth spray equipment quality inspection before use of batch and film production is to the maintenance of spray equipment, just need to carry out a large amount of leak detection work to this spray equipment, and the gas access of these spray equipments varies in size mostly, position is different, outlet is again be evenly distributed on the intensive of device panel side and spray aperture that machining precision grade is very high mostly, this causes very large inconvenience just to leak detection work, need during leak detection to connect leakage detecting instrument, need again one end of shutoff spray equipment gas passage, these operations are easy to damage intensive and machining precision grade is very high spray aperture, the spray equipment of this labyrinth is caused to be scrapped, cause huge loss.
Summary of the invention
The present invention is to improve the leak detection work efficiency of hyperchannel spray equipment; reduce security risk during leak detection operation; inspection manufactures the quality of fresh processed hyperchannel spray equipment in semiconductor equipment; when semiconductor equipment produces maintenance shut-downs in thin-film process checking hyperchannel spray equipment each passage air-tightness for the purpose of, guarantee that the performance of this hyperchannel spray equipment key component in semiconductor equipment meets production requirement.
For achieving the above object, the present invention adopts following technical proposals:
Hyperchannel spray equipment leak detection tool equipment, comprises adaptor, vacuum seal plate, fixture three parts.The structure of described adaptor is by joint flange, and the leak detection mouth matched with leakage detecting instrument interface, the passage corresponding with hyperchannel spray equipment and passway form.Described vacuum seal plate is then a kind of compressible material sheet material.Described clamp structure is one piece of tabular circular metal part, and there is the mounting structure corresponding with hyperchannel spray equipment edge mounting characteristic at edge, and there is the groove placing vacuum seal plate center.
Detection method: during use, first vacuum seal plate is positioned in the groove at clamp central place, with screw, hyperchannel spray equipment is locked on fixture, the spray aperture side of hyperchannel spray equipment is made to fit tightly in vacuum seal plate, by one side closed for the spray aperture of hyperchannel spray equipment, again the air intake opening of the flange of adaptor with hyperchannel spray equipment is connected, like this, leakage detecting instrument is connected with a certain leak detection mouth of adaptor, open wide other leak detection mouths of adaptor, open leakage detecting instrument, this gas passage is hunted leak, in like manner, leakage detecting instrument is connected with other mouths of hunting leak of adaptor respectively, open leakage detecting instrument, other gas passages are hunted leak respectively, realize the leak detection operation of each passage of hyperchannel spray equipment.
Beneficial effect of the present invention and feature are:
Simple part combination is used to form leak detection tool equipment; method of operating is simple; do not collided with and scratched in protection spray face, aperture place; reduce security risk during leak detection operation; the quality of efficient inspection fresh processed hyperchannel spray equipment when manufacturing semiconductor equipment; during maintenance shut-downs, each passage air-tightness of convenient checking hyperchannel spray equipment, effectively guarantees that in semiconductor equipment, this hyperchannel spray equipment key component is qualified, meets film production requirement.Can promotion and application in semiconductor coated film equipment technical field.
Accompanying drawing explanation
Fig. 1 is adaptor structural representation of the present invention.
Fig. 2 is adaptor cut-open view of the present invention.
Fig. 3 is clamp structure schematic diagram of the present invention.
Fig. 4 is scheme of installation of the present invention.
Fig. 5 is schematic diagram of the function of the present invention.
Embodiment
Embodiment
See figures.1.and.2, monoblock aluminum is adopted the mode removing material, the bottom of adaptor 1 is made to form flange 4, there are the some screw holes 5 corresponding with the air inlet mounting hole of two passage spray equipments at flange 4 edge, in the inside of adaptor 1, offer passage A17, channel B 18, process the leak detection mouth 2 be connected with passage A17, process the leak detection mouth 3 be connected with channel B 18.
With reference to Fig. 3, monoblock aluminum is adopted the mode removing material, be processed into fixture 6, the center of fixture 6 is shaped with groove 10, edge is shaped with N number of boss 7 corresponding with two passage spray equipment edge mounting structure, and boss 7 is shaped with mounting hole 8, the structure of boss 7 is supported by reinforcement 9.
The edge of described fixture 6 is shaped with 6 boss 7 corresponding with two passage spray equipment edge mounting structure.
With reference to Fig. 4 and Fig. 5; during leak detection operation; vacuum seal plate 16 is positioned in the groove 10 of fixture 6 center; by 6 mounting holes 23 at two passage spray equipment 13 edges and 6 mounting hole 8 one_to_one corresponding at fixture 6 edge; 6 screws 14 are entangled with 6 nylon protective sleeves 15; two passage spray equipments 13 are locked on fixture 6, the spray aperture side of two passage spray equipments 13 and vacuum rubber slab 16 are fitted tightly, spray aperture is all closed.At the air intake opening A19 of two passage spray equipment 13 upper surface centers, air intake opening B20 place installs O-ring seal, fit in the flange 4 of adaptor 1 bottom and the upper surface center of two passage spray equipments 13, the passage A17 of adaptor 1 is communicated with the air intake opening A19 of two passage spray equipments 13, the channel B 18 of adaptor 1 is communicated with the air intake opening B20 of two passage spray equipments 13, screw 11 screws in the screw hole B12 of two passage spray equipment 13 upper surface centers by the screw hole A5 on adaptor 1 bottom flange 4, locking adaptor 1 and two passage spray equipments 13, like this, leakage detecting instrument pump-line joint is connected to the leak detection mouth A2 of adaptor 1, open wide leak detection mouth B3, open leakage detecting instrument, to leak detection mouth A2, passage A17, the air intake opening A19 of two passage spray equipments 13, the passage leak detection that these four features of spray aperture B22 are formed. in like manner, leakage detecting instrument pump-line joint is connected to the leak detection mouth B3 of adaptor 1, open wide leak detection mouth A2, open leakage detecting instrument, to leak detection mouth B3, channel B 18, the air intake opening B20 of two passage spray equipments 13, the passage leak detection that these four features of spray aperture A21 are formed.Achieve the independence leak detection operation of two passage spray equipments, 13 two passages.
Claims (6)
1. a hyperchannel spray equipment leak detection tool equipment, it is characterized in that: it comprises adaptor, vacuum seal plate, fixture three parts, the structure of described adaptor is by joint flange, the leak detection mouth matched with leakage detecting instrument interface, the passage corresponding with hyperchannel spray equipment and passway form; Described vacuum seal plate is then a kind of compressible material sheet material; Described clamp structure is one piece of tabular circular metal part, and there is the mounting structure corresponding with hyperchannel spray equipment edge mounting characteristic at edge, and there is the groove placing vacuum seal plate center.
2. hyperchannel spray equipment leak detection tool equipment as claimed in claim 1, it is characterized in that: monoblock aluminum is adopted the mode removing material, the bottom of adaptor is made to form flange, flange periphery has the some screw holes corresponding with the air inlet mounting hole of two passage spray equipments, in the inside of adaptor, offer passage A, channel B, process the leak detection mouth A be connected with passage A, process the leak detection mouth B be connected with channel B.
3. hyperchannel spray equipment leak detection tool equipment as claimed in claim 1, it is characterized in that: monoblock aluminum is adopted the mode removing material, be processed into fixture, the center of fixture is shaped with groove, edge is shaped with N number of boss corresponding with two passage spray equipment edge mounting structure, boss is shaped with mounting hole, and the structure of boss is supported by reinforcement.
4. hyperchannel spray equipment leak detection tool equipment as claimed in claim 3, is characterized in that: the edge of described fixture is shaped with 6 boss corresponding with two passage spray equipment edge mounting structure.
5. the detection method of hyperchannel spray equipment leak detection tool equipment as claimed in claim 1, it is characterized in that: during use, first vacuum seal plate is positioned in the groove at clamp central place, with screw, hyperchannel spray equipment is locked on fixture, the spray aperture side of hyperchannel spray equipment is made to fit tightly in vacuum seal plate, by one side closed for the spray aperture of hyperchannel spray equipment, again the air intake opening of the flange of adaptor with hyperchannel spray equipment is connected, like this, leakage detecting instrument is connected with a certain leak detection mouth of adaptor, open wide other leak detection mouths of adaptor, open leakage detecting instrument, this gas passage is hunted leak, in like manner, leakage detecting instrument is connected with other mouths of hunting leak of adaptor respectively, open leakage detecting instrument, other gas passages are hunted leak respectively, realize the leak detection operation of each passage of hyperchannel spray equipment.
6. the detection method of hyperchannel spray equipment leak detection tool equipment as claimed in claim 5, the method is realized by following concrete operation step:
Vacuum seal plate is positioned in the groove at clamp central place, by the mounting hole at two passage spray equipment edges and the mounting hole one_to_one corresponding of clamp edges, screw is entangled with nylon protective sleeve, two passage spray equipments are locked on fixture, the spray aperture side of two passage spray equipments and vacuum rubber slab are fitted tightly, spray aperture is all closed, at the air intake opening A of two passage spray equipment upper surface centers, air intake opening B place installs O-ring seal, fit in the flange of adaptor bottom and the upper surface center of two passage spray equipments, the passage A of adaptor is communicated with the air intake opening A of two passage spray equipments, the channel B of adaptor is communicated with the air intake opening B of two passage spray equipments, screw screws in the screw hole B of two passage spray equipment upper surface centers by the screw hole A on the flange of adaptor bottom, locking adaptor and two passage spray equipments, like this, leakage detecting instrument pump-line joint is connected to the leak detection mouth A of adaptor, open wide leak detection mouth B, open leakage detecting instrument, to leak detection mouth A, passage A, the air intake opening A of two passage spray equipments, the passage leak detection that these four features of spray aperture B are formed. in like manner, leakage detecting instrument pump-line joint is connected to the leak detection mouth B of adaptor, open wide leak detection mouth A, open leakage detecting instrument, to leak detection mouth B, channel B, the air intake opening B of two passage spray equipments, the passage leak detection that spray aperture A is formed, achieve the independence leak detection operation of two passage spray equipments, two passages.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510677407.2A CN105352664B (en) | 2015-10-19 | 2015-10-19 | A kind of multichannel spray equipment leak detection tool equipment and detection method |
| PCT/CN2015/096935 WO2017067048A1 (en) | 2015-10-19 | 2015-12-10 | Leakage detection tool for multichannel spraying device and detection method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510677407.2A CN105352664B (en) | 2015-10-19 | 2015-10-19 | A kind of multichannel spray equipment leak detection tool equipment and detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105352664A true CN105352664A (en) | 2016-02-24 |
| CN105352664B CN105352664B (en) | 2018-09-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510677407.2A Active CN105352664B (en) | 2015-10-19 | 2015-10-19 | A kind of multichannel spray equipment leak detection tool equipment and detection method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105352664B (en) |
| WO (1) | WO2017067048A1 (en) |
Citations (5)
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| JP2005274291A (en) * | 2004-03-24 | 2005-10-06 | Yamaha Fine Technologies Co Ltd | Leakage inspection system of multi-channel work |
| CN1894574A (en) * | 2003-12-12 | 2007-01-10 | 空中客车德国有限公司 | Vaccum sensor application and method for nondetachably joining a sensor workpiece to a body component |
| CN102865979A (en) * | 2012-09-14 | 2013-01-09 | 四川制动科技股份有限公司 | Testing system and testing method for air tightness of main valve body component of 120 valve |
| CN103837311A (en) * | 2014-02-20 | 2014-06-04 | 广东鸿图科技股份有限公司 | Method and device for detecting internal leakage of multi-cavity valve |
| WO2015038964A1 (en) * | 2013-09-12 | 2015-03-19 | Wilcox Loren | Gas monitoring device, system and methods |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202710264U (en) * | 2012-07-19 | 2013-01-30 | 河南中烟工业有限责任公司 | Blockage detection and leakage detection test device for high-pressure micro-mist humidification nozzle |
| US20140250981A1 (en) * | 2013-03-08 | 2014-09-11 | General Electric Company | Seal test fixture for a gas turbine fuel nozzle |
| JP2014228105A (en) * | 2013-05-24 | 2014-12-08 | 本田技研工業株式会社 | High-pressure gas vessel and gas leakage determination method of high-pressure gas vessel seal part |
| CN204128758U (en) * | 2014-08-02 | 2015-01-28 | 新昌县万成科技有限公司 | A kind of filter cleaner ten station vacuum-tightness differential pressure measuring machine |
| CN104316273A (en) * | 2014-10-29 | 2015-01-28 | 内蒙古科技大学 | Gas cylinder body airtightness detection device |
-
2015
- 2015-10-19 CN CN201510677407.2A patent/CN105352664B/en active Active
- 2015-12-10 WO PCT/CN2015/096935 patent/WO2017067048A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1894574A (en) * | 2003-12-12 | 2007-01-10 | 空中客车德国有限公司 | Vaccum sensor application and method for nondetachably joining a sensor workpiece to a body component |
| JP2005274291A (en) * | 2004-03-24 | 2005-10-06 | Yamaha Fine Technologies Co Ltd | Leakage inspection system of multi-channel work |
| CN102865979A (en) * | 2012-09-14 | 2013-01-09 | 四川制动科技股份有限公司 | Testing system and testing method for air tightness of main valve body component of 120 valve |
| WO2015038964A1 (en) * | 2013-09-12 | 2015-03-19 | Wilcox Loren | Gas monitoring device, system and methods |
| CN103837311A (en) * | 2014-02-20 | 2014-06-04 | 广东鸿图科技股份有限公司 | Method and device for detecting internal leakage of multi-cavity valve |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017067048A1 (en) | 2017-04-27 |
| CN105352664B (en) | 2018-09-14 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |