CN105334573A - Surface plasmon waveguide - Google Patents
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- CN105334573A CN105334573A CN201410279849.7A CN201410279849A CN105334573A CN 105334573 A CN105334573 A CN 105334573A CN 201410279849 A CN201410279849 A CN 201410279849A CN 105334573 A CN105334573 A CN 105334573A
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Abstract
Disclosed in the invention is a surface plasmon waveguide comprising a metal substrate and at least two metal walls. The at least two metal walls arranged on the substrate are parallel to each other. A groove is formed between the metal walls, so that the surface plasmon can be transmitted at the metal substrate surface at the bottom of the groove along the extending direction of the groove. According to the invention, because of the metal walls at the surface of the metal substrate, an electromagnetic filed with transverse locality can be formed in the groove between the metal walls from the metal wall to the metal wall, thereby limiting transmission of the surface plasmon to the outside of the metal walls. Therefore, the surface plasmon only can be transmitted along the interfaces of the metal substrate and the dielectric layer between the two metal walls at the direction parallel to the metal walls. Because the metal walls play a good role in limiting the surface plasmon in the waveguides, the crosstalk between waveguides can be avoided even though the interval between the two waveguides is small. With the surface plasmon waveguide, small-radius large-angle turning transmission of the surface plasmon as well as application to an optical beam splitter can be realized.
Description
Technical field
The present invention relates to waveguide field, particularly a kind of surface plasmon waveguide.
Background technology
When light wave (electromagnetic wave) incides metal and dielectric interface, will there is collective oscillation in the free electron of metal surface, light wave is coupled with the free electron of described near metal surface and forms a kind of near field electromagnetic ripple propagated along metal surface.If the oscillation frequency of the free electron of described metal surface is consistent with incident light wave frequency will produce resonance, under resonance state, the energy of electromagnetic field is changed into the collective vibration energy of metal surface free electron effectively, at this moment, a kind of special electromagnetic mode is just defined: electromagnetic field to be limited in the very little scope in metal surface and to strengthen.This phenomenon is called as surface phasmon (SurfacePlasmon) phenomenon.
Due to the above-mentioned phenomenon of surface phasmon, make people that surface phasmon can be utilized to manipulate in the scope interior focusing (electromagnetic wave) of micron and even nanoscale, therefore generally believe that surface phasmon will obtain important application in nanophotonics field.Become focus in recent years based on the research of the various devices of surface phasmon and correlation theory research, attract the concern of numerous scientific research personnel.
At present, along with the develop rapidly of infotech, the requirement for device miniaturization and Highgrade integration is more and more higher, and the transmission process that nanoscale realizes information has become an important topic of scientific research.Surface phasmon can break through diffraction limit, and has very strong Localized field enhancement feature, can realize the optical information transmission and processing of nanoscale.The unique property of surface phasmon in addition, makes it obtain a wide range of applications in fields such as highly sensitive biological detection, sensing and new type light sources.
In the correlative study of the optical transmission of information of nanoscale, surface plasmon waveguide is an important research direction, and more existing relevant achievements.Such as, metal level and low refractive index dielectric layer stack successively and form Multilayer waveguide; The and for example surface plasmon waveguide (Dielectric-loadedsurfaceplasmon-polaritonwaveguides) etc. of supporting medium.
The surface plasmon waveguide of supporting medium is prepared on metal or on metal film, and high refractive index medium is as the sandwich layer of waveguide, and peripheral low refractive index dielectric part is covering.Because at the form ducting that the surface phasmon at sandwich layer and clad interface place is with total internal reflection, cause there is a certain proportion of energy transmission in covering, make the locality of energy be deteriorated.In addition, in above-mentioned two kinds of waveguiding structures, if two waveguide distances are comparatively near, then there is crosstalk in the overlap that can produce pattern, simultaneously, above-mentioned two kinds of waveguides are restricted to radius of turn when turning, tight-turning turning can not be realized, not too large in radius of turn, such as, when radius of turn is no more than effective wavelength, also restricted to angle of turn, 180 degree even wide-angle of 360 degree can not be realized and turn.
Summary of the invention
In view of this, the invention provides a kind of surface plasmon waveguide, the locality propagated to make surface phasmon is good, avoids the crosstalk between waveguide, the propagation and the minor radius wide-angle realizing surface phasmon is turned.
The technical scheme of the application is achieved in that
A kind of surface plasmon waveguide, comprising:
Metal substrate, and be positioned on described substrate and at least 2 metal walls be parallel to each other;
Form groove between described metal wall, surface phasmon is propagated along the bearing of trend of described groove at the metal substrate surface of described channel bottom.
Further, described surface plasmon waveguide also comprises:
Be positioned at the dielectric layer on described metal substrate surface and metal wall surface.
Further, the groove width between described metal wall is greater than the half of described surface phasmon effective wavelength.
Further, the height of described metal wall is more than or equal to 50nm.
Further, the thickness of described metal wall is more than or equal to described surface phasmon 4 times of penetration depth in this metal wall.
Further, the thickness of described metal wall is more than or equal to 100nm.
Further, under operation wavelength, the real part of the specific inductive capacity of described metal substrate and metal wall material is less than zero.
Further, described metal substrate material is identical with metal wall material or different.
Further, described metal wall material is made up of a kind of material; Or described metal wall material is made up of at least bi-material layer superposed.
Further, the material of described metal substrate and metal wall comprises the alloy of at least a kind of metal or at least 2 kinds of metals in gold, silver, aluminium.
Further, the real part of permittivity of described dielectric layer material is greater than zero, and the absolute value of the real part of permittivity of described dielectric layer material is less than the absolute value of described metal substrate and metal wall material dielectric constant real part.
Further, described dielectric layer material comprises air, water, silicon dioxide and/or silicon.
Further:
The metal wall sidewall being positioned at described groove both sides extends straight at described metal substrate surface; Or
The metal wall sidewall being positioned at described groove both sides is that broken line extends at described metal substrate surface; Or
Be positioned at the metal wall sidewall of described groove both sides in the curved extension of described metal substrate surface; Or
The metal wall sidewall being positioned at described groove both sides at described metal substrate surface linearly, broken line and the curve form that combines extend.
As can be seen from such scheme, surface plasmon waveguide of the present invention, due to metal substrate surface metal wall existence so that the electromagnetic field of metal wall to the horizontal locality of metal wall can be formed in the groove between metal wall, limiting surface phasmon, to the propagation outside metal wall, makes surface phasmon only can the interface of metal substrate between metal wall and dielectric layer be propagated along the bearing of trend of groove.In the present invention, the surface phasmon in waveguide and outside waveguide can be propagated on same surface, and, by the conversion between the opening of waveguide can realize in waveguide and waveguide is propagated outward surface phasmon.Because metal wall has good local effect to the surface phasmon in waveguide, even if two waveguide separation very little (width of metal wall is greater than 4 times (about 100 nanometers) of surface phasmon penetration depth) also can avoid the crosstalk between waveguide.Utilize metallic walls to the reflection of the surface phasmon propagated in waveguide, and then achieve the minor radius wide-angle turning propagation of surface phasmon and the application in beam splitter.
Accompanying drawing explanation
Fig. 1 a is the first specific embodiment structural representation of surface plasmon waveguide of the present invention;
Fig. 1 b is the sectional view of Fig. 1 a illustrated embodiment structure;
Fig. 2 a is the second specific embodiment structural representation of surface plasmon waveguide of the present invention;
Fig. 2 b is the sectional view of Fig. 2 a illustrated embodiment structure;
Fig. 3 a is that surface plasmon waveguide of the present invention realizes 90 degree of embodiment schematic top plan view of turning;
Fig. 3 b is the embodiment schematic top plan view that surface plasmon waveguide of the present invention realizes turning through 180 degree;
Fig. 4 a to Fig. 4 c is the embodiment plan structure figure that the present invention is applied to beam splitter;
Fig. 5 a to Fig. 5 e is the example structure figure of surface plasmon waveguide of the present invention;
Fig. 6 a is Electric Field Distribution schematic cross-section in surface plasmon waveguide of the present invention;
Fig. 6 b be the present invention realize 90 degree turn time electric-field intensity distribution schematic diagram;
Fig. 6 c is the electric-field intensity distribution schematic diagram that the present invention realizes when turning through 180 degree;
Fig. 7 a is the electric-field intensity distribution figure of the present invention for beam splitter;
Fig. 7 b is the electric-field intensity distribution figure of the present invention for 180 degree of beam splitters;
Fig. 7 c is the electric-field intensity distribution figure of the present invention for 360 degree of beam splitters.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, to develop simultaneously embodiment referring to accompanying drawing, the present invention is described in further detail.
Surface plasmon waveguide of the present invention, mainly comprises metal substrate and is positioned on described substrate and at least 2 metal walls be parallel to each other; Wherein, groove is formed between described metal wall, in described groove, the constraint due to metal wall forms the electromagnetic field of the horizontal locality from metal wall to metal wall, and surface phasmon is propagated along the bearing of trend of described groove at the metal substrate surface of described channel bottom.
Fig. 1 a is a specific embodiment structural representation of surface plasmon waveguide of the present invention, and Fig. 1 b is the sectional view of Fig. 1 a illustrated embodiment structure.In this embodiment, the metal wall 2 be positioned in described surface plasmon waveguide structure in metal substrate 1 is 2, form groove 3 between 2 metal walls 2, surface phasmon can be propagated along the bearing of trend (as shown in the direction of arrow in Fig. 1 a) of groove 3 on metal substrate 1 surface bottom groove 3.In Fig. 1 a and Fig. 1 b illustrated embodiment, also there is the dielectric layer 4 being positioned at described metal substrate 1 surface and metal wall 2 surface, and dielectric layer 4 fills up the space of described groove 3.
In Fig. 1 a and Fig. 1 b illustrated embodiment, the width of the groove 3 between described metal wall 2 is greater than the half of surface phasmon effective wavelength, specifically can set according to used concrete surface phasmon effective wavelength, such as when operation wavelength is 800nm (nanometer), the width of the groove 3 between metal wall 2 can be 600nm.
In Fig. 1 a and Fig. 1 b illustrated embodiment, the thickness of metal wall 2 is more than or equal to described surface phasmon 4 times of penetration depth in this metal wall 2, and such as the thickness of metal wall 2 is more than or equal to 100nm, and the height of metal wall 2 is more than or equal to 50nm.The reflectivity that in metal wall 2 pairs of waveguides, surface phasmon is very large can be realized like this, surface phasmon can be propagated well, the spread scope preventing from surface phasmon from propagating out waveguide of the present invention limiting it along surface plasmon waveguide of the present invention.
Fig. 2 a is another specific embodiment structural representation of surface plasmon waveguide of the present invention, and Fig. 2 b is the sectional view of Fig. 2 a illustrated embodiment structure.Be with the difference of Fig. 1 a and Fig. 1 b illustrated embodiment, in the embodiment of Fig. 2 a and Fig. 2 b, the metal wall 2 be positioned in described surface plasmon waveguide structure in metal substrate 1 is 3, groove 3 is formed respectively between 2 often adjacent metal walls 2, have 2 grooves 3, and then surface phasmon can be propagated (in as Fig. 2 a shown in the direction of arrow) along the bearing of trend of groove 3 on metal substrate 1 surface bottom 2 grooves 3, namely define 2 surface plasmon waveguide.What illustrate is, the thickness being arranged in middle metal wall 2 is more than or equal to described surface phasmon 4 times of this metal wall 2 penetration depth, such as, when the thickness of metal wall 2 is more than or equal to 100nm, the crosstalk between 2 surface plasmon waveguide that effectively can prevent metal wall 2 both sides of this centre.
In surface plasmon waveguide of the present invention, the material of metal substrate 1 and metal wall 2 is the metal that can excite and propagate described surface phasmon, and namely under operation wavelength, the real part of the specific inductive capacity of metal substrate 1 and metal wall 2 material is less than zero.As specific embodiment, the material of described metal substrate 1 and metal wall 2 comprises the alloy of at least one metal or at least 2 kinds of metals in the material such as gold, silver, aluminium.Metal substrate 1 material can be identical or different with metal wall 2 material.
Such as, metal substrate 1 material and metal wall 2 material can be a kind of metal in gold, silver, aluminium, or metal substrate 1 material and metal wall 2 material can be the alloy of at least 2 kinds of metals in gold, silver, aluminium; And for example, metal substrate 1 material is a kind of metal in gold, silver, aluminium and metal wall 2 material is the gold, silver except metal substrate 1 metal used, another metal in aluminium; For another example, metal substrate 1 material is a kind of metal in gold, silver, aluminium and metal wall 2 material is the alloy of at least 2 kinds of metals in gold, silver, aluminium, or metal substrate 1 material is the alloy of at least 2 kinds of metals in gold, silver, aluminium and metal wall 2 material is a kind of metal in gold, silver, aluminium; For another example, metal substrate 1 material another alloy at least 2 kinds of metals in gold, silver, aluminium that to be the alloy of at least 2 kinds of metals in gold, silver, aluminium and metal wall 2 material be except metal substrate 1 metal alloy used etc.
In addition, the material of metal wall 2 can be made up of a kind of material, or is made up of at least bi-material layer superposed.For the bi-material layer of superposition, the material of metal wall 2 bottom can be silver, and the material on top can be gold, as a specific embodiment, metal wall 2 is highly 500nm, and wherein the 300nm part of metal wall 2 bottom is silver, and the 200nm on metal wall 2 top part is gold etc.According to the embodiment of the present invention, silver wherein can be replaced with gold or aluminium by those skilled in the art, or silver wherein can be replaced with the alloy of at least 2 kinds of metals in gold, silver, aluminium, gold wherein also can be replaced with silver or aluminium by those skilled in the art, or gold wherein can be replaced with the alloy etc. of at least 2 kinds of metals in gold, silver, aluminium.In metal wall 2, the thickness of the different material layer of superposition also can adjust.
The real part of permittivity of dielectric layer 4 material is greater than zero, and the absolute value of the real part of permittivity of dielectric layer 4 material is less than the absolute value of metal substrate 1 and metal wall 2 material dielectric constant real part, as specific embodiment, the material of dielectric layer 4 can be silicon dioxide, air, water and/or silicon etc.Described dielectric layer 4 can be single material medium, also can be multilayer, or even the mixing of several dielectric layer more complicated.Such as, dielectric layer 4 is only silicon dioxide, air or water etc.; And for example, waveguide gash depth is 500nm (namely the height of metal wall 2 is 500nm), fills 100nm silicon, then cover with water at channel bottom; For another example, at metal wall 2 sidewall growth one deck silicon, this layer of silicon substrate 1 of can getting along well contacts, and its complementary space is taken by air, and in this dielectric layer 4 be jointly made up of silicon and air, silicon and air occupy certain region separately.The array mode of the middle material of dielectric layer 4 also has a lot, no longer exemplifies herein and repeats.
In surface plasmon waveguide of the present invention, metal wall 2 effects on surface phasmon own has very large reflectivity, do not need total internal reflection, utilize the reflection of this metal wall 2 effects on surface phasmon can realize the turning of the minor radius wide-angle of phasmon in metal substrate 1.This turning, realizes by the extension mode of metal wall 2 sidewall on metal substrate 1 surface that be positioned at groove 3 both sides.Such as, metal wall 2 sidewall being positioned at groove 3 both sides extends straight on metal substrate 1 surface, and then can realize the rectilinear propagation of surface phasmon; Or metal wall 2 sidewall being positioned at groove 3 both sides extends in broken line on described metal substrate 1 surface, and then the broken line that can realize surface phasmon is propagated; Or be positioned at metal wall 2 sidewall of groove 3 both sides in the surperficial curved extension of metal substrate 1, and then the curve that can realize surface phasmon is propagated; Or metal wall 2 sidewall being positioned at groove 3 both sides on metal substrate 1 surface linearly, broken line and the curve form that combines extend, and then the propagation that the straight line of surface phasmon, broken line and curve combine can be realized, the turning such as achieving surface phasmon is propagated, and refers to follow-up explanation.
In the embodiment plan structure of a kind of surface plasmon waveguide shown in Fig. 3 a, by the design moved towards metal wall 2 sidewall being positioned at groove 3 both sides, and then formed groove 3 linearly, broken line and curve combine the extension of form, achieve 90 degree of turnings of surface plasmon waveguide, and then in the surface plasmon waveguide structure shown in Fig. 3 a, 90 degree of turnings of phasmon can be realized.For Fig. 3 a illustrated embodiment, the turning structure of its best is, metal wall 2 sidewall inside the groove 3 at turning is the circular arc of a section 90 degree, and outside is one section of specific broken line.For the meander line structure of metal wall 2 sidewall outside the groove 3 at turning, the transmitance of turning can be improved.Certainly, for the structure of Fig. 3 a, metal wall 2 sidewall outside groove 3 also can be one section of circular arc of 90 degree paralleled with metal wall 2 sidewall of inner side, so also can realize 90 degree of turnings of phasmon, but the transmitance of turning does not have the transmitance of the structure of Fig. 3 a high.
In the embodiment plan structure of the another kind of surface plasmon waveguide shown in Fig. 3 b, by the design moved towards metal wall 2, the groove 3 formed combines in another kind of rectilinear curve the extension of form, achieve turning through 180 degree of surface plasmon waveguide, and then in the surface plasmon waveguide structure shown in Fig. 3 b, turning through 180 degree of phasmon can be realized.Identical with structure shown in Fig. 3 a, for Fig. 3 b illustrated embodiment, the turning structure of its best is, metal wall 2 sidewall inside the groove 3 at turning is the circular arc of a section 180 degree, and outside is one section of specific broken line.The meander line structure of metal wall 2 sidewall outside the groove 3 at turning, can improve the transmitance of turning through 180 degree equally.
Phasmon waveguide of the present invention is realized to the structure of phasmon turning propagation, metal wall 2 sidewall inside the groove 3 at turning is one section of circular arc, and outside all can be designed to one section of specific broken line.The specific broken line in outside, can improve the transmitance that phasmon is turned.Metal wall 2 sidewall outside the groove 3 at turning is specific meander line structure, is equally applicable to following beam splitter.If metal wall 2 sidewall design outside groove 3 is one section of circular arc paralleled with metal wall 2 sidewall of inner side, although can realize phasmon equally to turn, metal wall 2 sidewall design outside groove 3 is not all the effective of one section of specific broken line by the transmitance of turning.
Fig. 4 a, Fig. 4 b and Fig. 4 c are the embodiment plan structure figure that surface plasmon waveguide of the present invention is applied to beam splitter.In Fig. 4 a, by the design moved towards metal wall 2, form entrance at a place, electromagnetic wave can be introduced the parallel surface plasmon waveguide of two row; In Fig. 4 b, by the design moved towards metal wall 2, form entrance at a place, form the beam splitter of 180 degree; In Fig. 4 c, by the design moved towards metal wall 2, form entrance at a place, form the beam splitter of 360 degree.In the beam splitter of Fig. 4 a, Fig. 4 b and Fig. 4 c, metal wall 2 sidewall outside the groove 3 at turning all in specific meander line structure, and then can improve the transmitance of phasmon turning.
Waveguiding structure in Fig. 3 a, Fig. 3 b, Fig. 4 a, Fig. 4 b and Fig. 4 c, is only the use of signal, and in reality, the curvilinear structures of the metal wall 2 inside the specific meander line structure of metal wall 2 sidewall outside groove 3 and groove 3, may be identical or different with it.Under different wave length, different in width, metal wall 2 side wall construction inside to groove 3 and metal wall 2 side wall construction outside groove 3 is needed to adjust accordingly.Such as, the waveguiding structure of Fig. 5 a to Fig. 5 e.
Wherein, in the waveguiding structure embodiment of Fig. 5 a, the straight line portion at two ends is connected with the straight waveguide of same widths respectively; Be 90 degree of circular arcs inside turning, outside is one section of broken line, is made up of four line segments, and the angle between adjacent two line segments is 150 degree.
In the waveguiding structure embodiment of Fig. 5 b, the straight line portion at two ends is connected with the straight waveguide of same widths respectively; Be 180 degree of circular arcs inside turning, outside is one section of broken line, is made up of four line segments, and the angle between adjacent two line segments is 120 degree.
In the waveguiding structure embodiment of Fig. 5 c, the straight line portion at two ends is connected with the straight waveguide of three same widths respectively; Beam splitting place center is that an isosceles triangle is connected with narrow wave guide wall, and what leg-of-mutton drift angle size was got herein is 11.3 degree, but this is not necessary, can adjust under different wave length, different in width, the triangular parallel at beam splitting place lateral wall and center.
The waveguiding structure embodiment of Fig. 5 d can with reference to the waveguiding structure example structure of figure 5a, through expanding latter two round about 90 degree structures of turning round also namely form the optimum structure to the 180 degree of beam splitting in two ends together.
In the waveguiding structure embodiment of Fig. 5 e, surface plasmon waveguide structure is by entrance a, expand at b place afterwards, beam splitting is carried out again through the propagation distance of a section wider after expanding, the center c of beam splitting is an isosceles right triangle, in the both sides of the center c of beam splitting, beam splitting is carried out in waveguide, after beam splitting, at the inwall of the outside metal wall 2 of turning groove 3, turn respectively through the obtuse angles of 3 135 degree, at the circular arc that the inwall of the inner metal wall 2 of turning groove 3 is then 180 degree, waveguide after just entering beam splitting after turning, finally terminate at outlet d, the surface plasmon waveguide structure be positioned near entrance a and outlet d is parallel to each other, and then the waveguiding structure embodiment of whole Fig. 5 e defines the surface plasmon waveguide structure of 360 degree of best beam splitters.
Fig. 6 a is Electric Field Distribution schematic cross-section in surface plasmon waveguide of the present invention, and the white line in figure is the border of metallic walls, and the size of the electric field intensity in whole region is represented by black and white degree.As can be seen from Fig. 6 a, be positioned at waveguide core place, the center electric field intensity being namely arranged in groove 3 metal substrate 1 is maximum, and from waveguide core to the direction of metal wall 2 and to metal substrate 1 outwardly bearing of trend, electric field intensity decays rapidly.Because metal wall 2 effects on surface phasmon has very large reflectivity, therefore electric field can be limited in waveguide the loss avoiding laterally leaking.
Fig. 6 b is that surface plasmon waveguide of the present invention realizes 90 degree of electric-field intensity distribution schematic diagram when turning, and Fig. 6 c is the electric-field intensity distribution schematic diagram that surface plasmon waveguide of the present invention realizes when turning through 180 degree.As can be seen from Fig. 6 b and Fig. 6 c, surface plasmon waveguide of the present invention utilizes the reflection of metal pair surface phasmon can realize the turning of wide-angle, and when carrying out wide-angle turning, radius of turn can keep very little; Such as when operation wavelength is 800nm, when radius of turn little to 200nm, still can realize the turning of 90 degree and 180 degree, and keep the energetic transmittance of more than 70%.And in whole surface plasmon waveguide, almost do not decay in ducting direction, very little in the energy loss of turning electric field, the energetic transmittance of turning electric field is very high, and reflectivity is very little.
Fig. 7 a is the electric-field intensity distribution figure of surface plasmon waveguide of the present invention for beam splitter, Fig. 7 b is the electric-field intensity distribution figure of surface plasmon waveguide of the present invention for 180 degree of beam splitters, Fig. 7 c is the electric-field intensity distribution figure of surface plasmon waveguide of the present invention for 360 degree of beam splitters.As can be seen from Fig. 7 a, Fig. 7 b and Fig. 7 c, when surface plasmon waveguide of the present invention is used for various beam splitter, the wavelet after beam splitting all can produce the Electric Field Distribution almost do not decayed in ducting direction in leading.
As can be seen from Fig. 6 a, Fig. 6 b, Fig. 6 c, Fig. 7 a, Fig. 7 b and Fig. 7 c, adopt surface plasmon waveguide of the present invention, the propagation of the high permeability of surface phasmon can be realized.In surface plasmon waveguide of the present invention: for the surface plasmon waveguide with linear structure, almost do not decay in surface phasmon ducting direction, propagation loss is little; For having turning structure surface plasmon waveguide, radius of turn when surface phasmon can be made to propagate can be very little and angle of turn can be very large.This is that other existing surface plasmon waveguide structures cannot realize.Simultaneously, for the surface plasmon waveguide structure of the beam splitter in the present invention, can make when various beam splitting still to avoid crosstalk when keeping very little interval between different waveguide, such as, when operation wavelength is 800nm, waveguide separation is 200nm, only need take very little turns area simultaneously the beam splitting angle of surface phasmon can be made larger than the beam splitting angle of other existing beam splitter of employing when carrying out wide-angle beam splitting.
Surface plasmon waveguide structure of the present invention is simple, method conventional in this area can be used to be prepared, such as template or template stripping method (XinliZhu, YangZhang, JiasenZhang, JunXu, YueMa, ZhiyuanLiandDapengYu, AdvancedMaterials22 (39), 4345-4349 (2010)) etc.
Surface plasmon waveguide of the present invention, due to the constraint of metal wall, the electromagnetic field of metal wall to the horizontal locality of metal wall is formed in groove between metal wall, and then in metal substrate surface phasmon being constrained between 2 metal walls, and propagate along the bearing of trend being parallel to groove.Further, in the present invention, when the width of metal wall is greater than surface phasmon penetration depth 4 times (about 100 nanometer), the crosstalk between waveguide can be ignored.Because metal wall effects on surface phasmon own has very large reflectivity, therefore do not need total internal reflection, and then the present invention utilizes the reflection of this metal pair surface phasmon to achieve the minor radius wide-angle turning propagation of surface phasmon and the application in beam splitter.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within the scope of protection of the invention.
Claims (13)
1. a surface plasmon waveguide, is characterized in that, comprising:
Metal substrate, and be positioned on described substrate and at least 2 metal walls be parallel to each other;
Form groove between described metal wall, surface phasmon is propagated along the bearing of trend of described groove at the metal substrate surface of described channel bottom.
2. surface plasmon waveguide according to claim 1, is characterized in that, described surface plasmon waveguide also comprises:
Be positioned at the dielectric layer on described metal substrate surface and metal wall surface.
3. surface plasmon waveguide according to claim 1, is characterized in that, the groove width between described metal wall is greater than the half of described surface phasmon effective wavelength.
4. surface plasmon waveguide according to claim 1, is characterized in that, the height of described metal wall is more than or equal to 50nm.
5. surface plasmon waveguide according to claim 1, is characterized in that, the thickness of described metal wall is more than or equal to described surface phasmon 4 times of penetration depth in this metal wall.
6. surface plasmon waveguide according to claim 5, is characterized in that, the thickness of described metal wall is more than or equal to 100nm.
7. the surface plasmon waveguide according to any one of claim 1 to 6, is characterized in that: under operation wavelength, and the real part of the specific inductive capacity of described metal substrate and metal wall material is less than zero.
8. surface plasmon waveguide according to claim 7, is characterized in that, described metal substrate material is identical with metal wall material or different.
9. surface plasmon waveguide according to claim 7, is characterized in that:
Described metal wall material is made up of a kind of material;
Or described metal wall material is made up of at least bi-material layer superposed.
10. surface plasmon waveguide according to claim 7, is characterized in that, the material of described metal substrate and metal wall comprises the alloy of at least a kind of metal or at least 2 kinds of metals in gold, silver, aluminium.
11. surface plasmon waveguide according to claim 2, is characterized in that:
The real part of permittivity of described dielectric layer material is greater than zero, and the absolute value of the real part of permittivity of described dielectric layer material is less than the absolute value of described metal substrate and metal wall material dielectric constant real part.
12. surface plasmon waveguide according to claim 11, is characterized in that, described dielectric layer material comprises air, water, silicon dioxide and/or silicon.
13. surface plasmon waveguide according to any one of claim 1 to 6, is characterized in that:
The metal wall sidewall being positioned at described groove both sides extends straight at described metal substrate surface; Or
The metal wall sidewall being positioned at described groove both sides is that broken line extends at described metal substrate surface; Or
Be positioned at the metal wall sidewall of described groove both sides in the curved extension of described metal substrate surface; Or
The metal wall sidewall being positioned at described groove both sides at described metal substrate surface linearly, broken line and the curve form that combines extend.
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| CN105811055A (en) * | 2016-05-20 | 2016-07-27 | 厦门大学 | Surface plasmon filter |
| CN105811055B (en) * | 2016-05-20 | 2019-05-10 | 厦门大学 | A kind of surface phasmon filter |
| CN106207326A (en) * | 2016-09-12 | 2016-12-07 | 厦门大学 | A kind of surface phasmon notch filter |
| CN106785265A (en) * | 2017-01-04 | 2017-05-31 | 梧州学院 | It is a kind of that there are 90 degree of microwave filters of bent angle |
| CN107422404A (en) * | 2017-09-25 | 2017-12-01 | 厦门大学 | A kind of surface phasmon Y type beam splitters of integrating filtering function |
| CN107678080A (en) * | 2017-11-23 | 2018-02-09 | 广西师范大学 | A kind of tunable graphene nano laser |
| CN107959224A (en) * | 2018-01-04 | 2018-04-24 | 华侨大学 | A kind of surface phasmon laser based on wire chamber |
| CN110395687A (en) * | 2018-04-24 | 2019-11-01 | 中国科学院物理研究所 | The preparation method of metal nanometer line |
| CN108828714A (en) * | 2018-05-17 | 2018-11-16 | 江苏大学 | A kind of strong local, low-loss hydridization surface plasma waveguide |
| CN109752799A (en) * | 2019-03-05 | 2019-05-14 | 金华伏安光电科技有限公司 | A kind of circularly polarized wave leaded light source reducing energy loss |
| CN114336280A (en) * | 2021-12-20 | 2022-04-12 | 华侨大学 | Laser controllable output device based on metal cavity surface plasmon and output method thereof |
| CN114336280B (en) * | 2021-12-20 | 2024-03-12 | 华侨大学 | Metal cavity surface plasmon-based laser controllable output device and output method thereof |
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