CN105333972A - Double-acoustic-path acoustic surface wave temperature sensor - Google Patents
Double-acoustic-path acoustic surface wave temperature sensor Download PDFInfo
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- CN105333972A CN105333972A CN201510836156.8A CN201510836156A CN105333972A CN 105333972 A CN105333972 A CN 105333972A CN 201510836156 A CN201510836156 A CN 201510836156A CN 105333972 A CN105333972 A CN 105333972A
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Abstract
The invention provides a double-acoustic-path acoustic surface wave temperature sensor. The double-acoustic-path acoustic surface wave temperature sensor comprises a signal processing unit, and an interdigital transducer, a plurality of coupling devices, a first positive and negative reflection grid and a second positive and negative reflection grid which are arranged on a piezoelectric substrate, wherein the interdigital transducer is used for receiving an excitation signal which is transmitted by an antenna, generating acoustic surface waves on the surface of the piezoelectric substrate and receiving a signal reflected by the positive and negative reflection grids; the plurality of coupling devices are used for changing a transmission direction of a surface wave signal in the acoustic surface waves so that the surface wave signal passes through the first positive and negative reflection grid and the second positive and negative reflection grid in sequence; and when the transmission direction of the surface wave signal in the acoustic surface waves is not changed and a body acoustic wave signal is transmitted to the lining edge of the piezoelectric substrate, the signal is absorbed by an acoustic absorption material. Compared with the prior art, according to the double-acoustic-path acoustic surface wave temperature sensor provided by the invention, the frequency response can be improved, a side lobe in a frequency response curve is inhibited, the quality factor is improved, the external disturbance quantity is eliminated, the temperature measuring precision is improved, the size of the sensor is reduced and the integration is convenient to realize.
Description
Technical field
The present invention relates to sensor technical field, be specifically related to a kind of double-sound-channel surface acoustic wave temperature sensor.
Background technology
Sensor is not only widely used in industrial every aspect, also closely bound up with our daily life.Sensor can provide real-time information for us, helps us to make important decision.Sensor and sensor-based system are the indispensable parts of intelligent grid.How reliable design, low cost, undersized wireless senser are a great problems of scientific circles.SAW Temperature Sensors (SAWSensor) has a series of advantage relative to general sensor.Surface acoustic wave techniques starts new era that is wireless, Miniature Sensor.The SAW Temperature Sensors of wireless and passive is the novel sensor that development in recent years is got up, and has excellent character and the prospect of widespread use.The characteristic of its wireless and passive has also expanded the application of sensor greatly, makes the sensing detection under rugged surroundings become safe and reliable.
Therefore, for existing temperature sensor poor reliability, noise immunity is not strong, precision is not high, is difficult to slight temperature variable quantity be detected, and volume is unfavorable for slightly greatly problem that is integrated and batch production, need to provide a kind of volume little, temperature measurement accuracy is high, is convenient to integrated SAW Temperature Sensors.
Summary of the invention
In order to meet the needs of prior art, the invention provides a kind of double-sound-channel surface acoustic wave temperature sensor.
Technical scheme of the present invention is:
Described SAW Temperature Sensors comprises signal processing unit, and is arranged on interdigital transducer, multistrip coupler, the first positive and negative reflecting grating and the second positive and negative reflecting grating on piezoelectric substrate; Described piezoelectric substrate surface is also laid with acoustic absorbant;
Described interdigital transducer, for the pumping signal that receiving antenna sends, surface acoustic wave is produced on piezoelectric substrate surface, and receive the second reflected signal that the first reflected signal of being reflected back of the first positive and negative reflecting grating and the second positive and negative reflecting grating be reflected back, and the signal be reflected back is sent to signal processing unit through antenna;
Described multistrip coupler, changes the direction of propagation of surface wave signal in described surface acoustic wave, makes it successively through the first positive and negative reflecting grating and the second positive and negative reflecting grating; Do not change the direction of propagation of bulk acoustic wave signal in described surface acoustic wave, when described bulk acoustic wave signal is transmitted to piezoelectric substrate edges of substrate, absorbed by described acoustic absorbant.
Preferably, described signal processing unit, for sending pumping signal to described interdigital transducer;
Described signal processing unit, according to the variable quantity of the phase difference value between described first reflected signal and the second reflected signal, the variable quantity of tolerance temperature;
Preferably, the variation delta φ of described phase difference value
21computing formula be:
Δφ
21＝2πf
0×Δt
21(1)
Wherein, t
21be the mistiming that the first reflected signal and the second reflected signal arrive interdigital transducer,
d is the distance between the first positive and negative reflecting grating and the second positive and negative reflecting grating, V
sAWfor the velocity of propagation of surface acoustic wave, described distance d and velocity of propagation V
sAWchange according to the change of temperature; Δ t
21for the variable quantity of described mistiming;
φ
21the first reflected signal received for interdigital transducer and the phase difference value of the second reflected signal, φ
21=2 π f
0t
21;
F
0for the resonance frequency of surface acoustic wave;
Preferably, described first positive and negative reflecting grating and the second positive and negative reflecting grating include open-circuit reflection grid and short-circuiting reflection grid;
Preferably, described interdigital transducer comprises single port input and single port output;
Preferably, described piezoelectric substrate is quartz crystal.
Compared with immediate prior art, excellent effect of the present invention is:
1, a kind of double-sound-channel surface acoustic wave temperature sensor provided by the invention, can improve frequency response, the secondary lobe in blanketing frequency response curve, improves quality factor, eliminates external disturbance amount, improves temperature measurement accuracy, reduces sensor bulk, is convenient to integrated;
2, a kind of double-sound-channel surface acoustic wave temperature sensor provided by the invention.Stable performance, volume is little, and accuracy is high, practicality number, has higher using value.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention is further described.
Fig. 1: a kind of double-sound-channel surface acoustic wave arrangement of temperature sensor schematic diagram in the embodiment of the present invention;
Fig. 2: open-circuit reflection grid schematic diagram;
Fig. 3: short-circuiting reflection grid schematic diagram;
Fig. 4: positive and negative reflecting grating schematic diagram in the embodiment of the present invention.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
The embodiment of a kind of double-sound-channel surface acoustic wave temperature sensor provided by the invention as shown in Figure 1, is specially:
This SAW Temperature Sensors comprises signal processing unit, and is arranged on interdigital transducer, multistrip coupler, the first positive and negative reflecting grating and the second positive and negative reflecting grating on piezoelectric substrate.
1, interdigital transducer
Interdigital transducer (IDT) is a kind of novel surface acoustic wave-electric transducer, can effectively receive and send surface acoustic wave, completes the mutual conversion of acoustic energy and electric energy.The interdigital transducer of wavelet function envelope card weighting is adopted to improve frequency response, and the secondary lobe in blanketing frequency response curve, improve quality factor, use the structure of the single ended input Single-end output of an IDT, efficiently reduce the volume of sensor.
In the present embodiment, interdigital transducer comprises single port input and single port output, for the pumping signal that receiving antenna sends, surface acoustic wave is produced on piezoelectric substrate surface, and receive the second reflected signal that the first reflected signal of being reflected back of the first positive and negative reflecting grating and the second positive and negative reflecting grating be reflected back, and the signal be reflected back is sent to signal processing unit through antenna.
2, multistrip coupler
Multistrip coupler (MultistripCoupler) is the parallel metal strip array be deposited on piezoelectric substrate, it can by acoustical power from an Orbit Transformation to another track, appropriate design metal number, a hundred per cent conversion of power can be realized, and only have very little structural loss, change the propagation sound travel of surface acoustic wave, inhibit bulk acoustic wave and triple travel signal significantly.
Multistrip coupler in the present embodiment, changes the direction of propagation of surface wave signal SAW in surface acoustic wave, makes it successively through the first positive and negative reflecting grating and the second positive and negative reflecting grating; Do not change the direction of propagation of bulk acoustic wave signal BAW in surface acoustic wave, when bulk acoustic wave signal BAW is transmitted to piezoelectric substrate edges of substrate, absorbed by acoustic absorbant.
3, piezoelectric substrate
In the present embodiment, piezoelectric substrate adopts quartz crystal, and its surface is also laid with acoustic absorbant, for absorbing the bulk acoustic wave signal in surface acoustic wave.
4, positive and negative reflecting grating
As shown in Figure 4, in the present embodiment, the first positive and negative reflecting grating and the second positive and negative reflecting grating include open-circuit reflection grid and short-circuiting reflection grid.Wherein, as shown in Figure 2, short-circuiting reflection grid as described in Figure 3 for open-circuit reflection grid.
5, signal processing unit
Signal processing unit in the present embodiment, for sending pumping signal to interdigital transducer.
Signal processing unit, according to the variable quantity of the phase difference value between the first reflected signal and the second reflected signal, measures the variable quantity of temperature.Wherein,
The variation delta φ of phase difference value
21computing formula be:
Δφ
21＝2πf
0×Δt
21(1)
In formula (1), t
21be the mistiming that the first reflected signal and the second reflected signal arrive interdigital transducer,
d is the distance between the first positive and negative reflecting grating and the second positive and negative reflecting grating, V
sAWfor the velocity of propagation of surface acoustic wave, distance d and velocity of propagation V
sAWchange according to the change of temperature; Δ t
21for the variable quantity of described mistiming.
φ
21the first reflected signal received for interdigital transducer and the phase difference value of the second reflected signal, φ
21=2 π f
0t
21;
F
0for the resonance frequency of surface acoustic wave.
In the present embodiment, the course of work of double-sound-channel surface acoustic wave temperature sensor is:
Pumping signal through antenna loading on interdigital transducer, piezoelectric substrate surface will produce surface acoustic wave, the acoustic surface wave propagation produced is to multistrip coupler, the surface acoustic wave signal of upper sound travel can be transferred to lower sound travel and export by multistrip coupler completely, but do not change the bulk acoustic wave direction of propagation and route in primary sound road, bulk acoustic wave is transmitted to edges of substrate place, is then absorbed by acoustic absorbant, achieve surface acoustic wave and bulk acoustic wave Signal separator, eliminate the object of external disturbance amount.The surface acoustic wave being transmitted to lower sound travel place, through the first positive and negative reflecting grating and the second positive and negative reflecting grating, then can be reflected back, when ambient temperature changes, and the velocity of propagation V of surface acoustic wave
sAWand first distance d between positive and negative reflecting grating and the second positive and negative reflecting grating can change thereupon, thus the surface acoustic wave phase difference value causing the first positive and negative reflecting grating and the second positive and negative reflecting grating to produce reflection changes, the variable quantity of phase difference value as the tolerance of temperature parameter, thus obtains temperature signal.
Finally should be noted that: described embodiment is only some embodiments of the present application, instead of whole embodiments.Based on the embodiment in the application, spectrum logical technician in this area is not making the every other embodiment obtained under creative work prerequisite, all belongs to the scope of the application's protection.
Claims (6)
1. a double-sound-channel surface acoustic wave temperature sensor, is characterized in that, described SAW Temperature Sensors comprises signal processing unit, and is arranged on interdigital transducer, multistrip coupler, the first positive and negative reflecting grating and the second positive and negative reflecting grating on piezoelectric substrate; Described piezoelectric substrate surface is also laid with acoustic absorbant;
Described interdigital transducer, for the pumping signal that receiving antenna sends, surface acoustic wave is produced on piezoelectric substrate surface, and receive the second reflected signal that the first reflected signal of being reflected back of the first positive and negative reflecting grating and the second positive and negative reflecting grating be reflected back, and the signal be reflected back is sent to signal processing unit through antenna;
Described multistrip coupler, changes the direction of propagation of surface wave signal in described surface acoustic wave, makes it successively through the first positive and negative reflecting grating and the second positive and negative reflecting grating; Do not change the direction of propagation of bulk acoustic wave signal in described surface acoustic wave, when described bulk acoustic wave signal is transmitted to piezoelectric substrate edges of substrate, absorbed by described acoustic absorbant.
2. double-sound-channel surface acoustic wave temperature sensor as claimed in claim 1, is characterized in that, described signal processing unit, for sending pumping signal to described interdigital transducer;
Described signal processing unit, according to the variable quantity of the phase difference value between described first reflected signal and the second reflected signal, the variable quantity of tolerance temperature.
3. double-sound-channel surface acoustic wave temperature sensor as claimed in claim 2, is characterized in that, the variation delta φ of described phase difference value
21computing formula be:
Δφ
21＝2πf
0×Δt
21(1)
Wherein, t
21be the mistiming that the first reflected signal and the second reflected signal arrive interdigital transducer,
d is the distance between the first positive and negative reflecting grating and the second positive and negative reflecting grating, V
sAWfor the velocity of propagation of surface acoustic wave, described distance d and velocity of propagation V
sAWchange according to the change of temperature; Δ t
21for the variable quantity of described mistiming;
φ
21the first reflected signal received for interdigital transducer and the phase difference value of the second reflected signal, φ
21=2 π f
0t
21;
F
0for the resonance frequency of surface acoustic wave.
4. double-sound-channel surface acoustic wave temperature sensor as claimed in claim 1, it is characterized in that, described first positive and negative reflecting grating and the second positive and negative reflecting grating include open-circuit reflection grid and short-circuiting reflection grid.
5. double-sound-channel surface acoustic wave temperature sensor as claimed in claim 1, is characterized in that, described interdigital transducer comprises single port input and single port exports.
6. double-sound-channel surface acoustic wave temperature sensor as claimed in claim 1, it is characterized in that, described piezoelectric substrate is quartz crystal.
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| CN201510836156.8A CN105333972A (en) | 2015-11-26 | 2015-11-26 | Double-acoustic-path acoustic surface wave temperature sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680199A (en) * | 2018-04-28 | 2018-10-19 | 北京机械设备研究所 | A kind of surface acoustic wave Temperature Humidity Sensor |
| CN110954254A (en) * | 2019-12-16 | 2020-04-03 | 上海工程技术大学 | Small-range SAW pressure sensor based on MSC |
| CN113155305A (en) * | 2021-01-18 | 2021-07-23 | 国网吉林省电力有限公司长春供电公司 | Passive surface acoustic wave temperature measurement reader for high-voltage power cable connector |
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| CN102901580A (en) * | 2011-07-25 | 2013-01-30 | 上海工程技术大学 | Multicoupler-based surface acoustic wave temperature sensor |
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Cited By (3)
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|---|---|---|---|---|
| CN108680199A (en) * | 2018-04-28 | 2018-10-19 | 北京机械设备研究所 | A kind of surface acoustic wave Temperature Humidity Sensor |
| CN110954254A (en) * | 2019-12-16 | 2020-04-03 | 上海工程技术大学 | Small-range SAW pressure sensor based on MSC |
| CN113155305A (en) * | 2021-01-18 | 2021-07-23 | 国网吉林省电力有限公司长春供电公司 | Passive surface acoustic wave temperature measurement reader for high-voltage power cable connector |
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Application publication date: 20160217 |