CN105333962B - 一种修正双波段测温误差的温度测量方法及*** - Google Patents
一种修正双波段测温误差的温度测量方法及*** Download PDFInfo
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CN201410272583.3A CN105333962B (zh) | 2014-06-18 | 2014-06-18 | 一种修正双波段测温误差的温度测量方法及*** |
TW103123868A TW201600838A (zh) | 2014-06-18 | 2014-07-10 | 修正雙波段測溫誤差的溫度測量方法及系統 |
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CN201410272583.3A CN105333962B (zh) | 2014-06-18 | 2014-06-18 | 一种修正双波段测温误差的温度测量方法及*** |
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CN105333962A CN105333962A (zh) | 2016-02-17 |
CN105333962B true CN105333962B (zh) | 2018-06-22 |
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KR101867715B1 (ko) * | 2016-12-12 | 2018-06-14 | 주식회사 포스코 | 고로 출선구 온도 측정 장치 |
CN113375757B (zh) * | 2020-03-27 | 2022-12-02 | 洛森自动化科技(上海)有限公司 | 一种应用曲线模拟和核辐射原理测量物位的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN2365659Y (zh) * | 1999-04-07 | 2000-02-23 | 何民才 | 多色比色温度仪 |
CN102749141A (zh) * | 2012-07-30 | 2012-10-24 | 中国科学院自动化研究所 | 一种测量目标真实温度的辐射测温方法和仪器 |
CN103439003A (zh) * | 2013-09-03 | 2013-12-11 | 重庆大学 | 一种提高红外测温精度的方法 |
CN103604504A (zh) * | 2013-10-15 | 2014-02-26 | 中国人民解放军海军工程大学 | 一种红外辐***确测温方法 |
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JPH07324982A (ja) * | 1994-05-30 | 1995-12-12 | Nkk Corp | 消耗型光ファイバ温度計 |
US6179466B1 (en) * | 1994-12-19 | 2001-01-30 | Applied Materials, Inc. | Method and apparatus for measuring substrate temperatures |
CN103411684B (zh) * | 2013-07-17 | 2016-04-06 | 中微半导体设备(上海)有限公司 | 测量反应腔室内薄膜温度的方法 |
CN103604507B (zh) * | 2013-11-25 | 2016-08-17 | 国家电网公司 | 一种用于在线监测gis罐体内部导体温升的方法 |
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- 2014-06-18 CN CN201410272583.3A patent/CN105333962B/zh active Active
- 2014-07-10 TW TW103123868A patent/TW201600838A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2365659Y (zh) * | 1999-04-07 | 2000-02-23 | 何民才 | 多色比色温度仪 |
CN102749141A (zh) * | 2012-07-30 | 2012-10-24 | 中国科学院自动化研究所 | 一种测量目标真实温度的辐射测温方法和仪器 |
CN103439003A (zh) * | 2013-09-03 | 2013-12-11 | 重庆大学 | 一种提高红外测温精度的方法 |
CN103604504A (zh) * | 2013-10-15 | 2014-02-26 | 中国人民解放军海军工程大学 | 一种红外辐***确测温方法 |
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CN105333962A (zh) | 2016-02-17 |
TWI504868B (zh) | 2015-10-21 |
TW201600838A (zh) | 2016-01-01 |
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Application publication date: 20160217 Assignee: Nanchang Medium and Micro Semiconductor Equipment Co., Ltd. Assignor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Contract record no.: 2018990000345 Denomination of invention: Temperature measurement method and system for correcting dual-wave-band temperature measurement error Granted publication date: 20180622 License type: Exclusive License Record date: 20181217 |
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Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |
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