CN105316641B - A kind of film plating substrate frame and vacuum coating equipment - Google Patents
A kind of film plating substrate frame and vacuum coating equipment Download PDFInfo
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- CN105316641B CN105316641B CN201510759845.3A CN201510759845A CN105316641B CN 105316641 B CN105316641 B CN 105316641B CN 201510759845 A CN201510759845 A CN 201510759845A CN 105316641 B CN105316641 B CN 105316641B
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Abstract
The present invention is suitable for technical field of vacuum plating, disclose a kind of film plating substrate frame and vacuum coating equipment, the film plating substrate frame includes the external frame and at least two vertical bars and at least two cross bars that are arranged in external frame for being driven and supporting, and the inner frame of size adjustable is enclosed per two adjacent vertical bars and per two adjacent cross bars；Each vertical bar is slidably connected with each cross bar, and each vertical bar can be slided along the length direction of cross bar, and each cross bar can be slided along the length direction of vertical bar, to adjust the size of inner frame.At least two cross bars and at least two vertical bars by being slidably connected in external frame by the present invention, the inner frame of various sizes can be freely formed, cross bar and vertical bar are fixed in film plating substrate frame external frame again, can start to put sheet glass progress plated film, can quickly switch product size online；Meanwhile application of the present invention in the production of practical plated film, it had both saved production cost and has also improved production efficiency.
Description
Technical field
The invention belongs to vacuum coating equipment technical field more particularly to a kind of film plating substrate framves and vacuum coating equipment.
Background technique
Substrate frame belongs to a part of vacuum coating equipment, is the carrier of substrate and a part of Transmission system.Current
It is all a kind of dedicated a set of substrate frame of dimension glass in plated film production, as a result, due to the diversity for producing glass size, it is past
Toward more various sizes of substrate frames of set are needed, to cause the increase of production cost.Meanwhile when replacing the product size of production,
The a whole set of substrate frame for needing replacing corresponding size, virtually causes the waste of waste of time and manpower.So every kind of customization
The a set of substrate frame of specification, replaces the production method used, causes the increase of production cost and the decline of production efficiency.
Summary of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, a kind of film plating substrate frame and vacuum coating are provided
Equipment can adjust the size of inner frame conveniently and efficiently to adapt to the glass of different size, save cost, and improve
Production efficiency.
The technical scheme is that a kind of film plating substrate frame is provided, including the external frame for being driven and supporting
With at least two vertical bars and at least two cross bars being arranged in the external frame, every two adjacent vertical bars and every phase
Two adjacent cross bars enclose the inner frame of size adjustable；Each vertical bar is slidably connected with each cross bar,
Each vertical bar can be slided along the length direction of the cross bar, and each cross bar can be sliding along the length direction of the vertical bar
It is dynamic, to adjust the size of the inner frame, to adjust the size of the inner frame.
The present invention also provides a kind of vacuum coating equipments, including film plating substrate frame described above.
Of the invention a kind of film plating substrate frame and vacuum coating equipment, by erecting at least two cross bars and at least two
Bar is slidably connected in external frame, and encloses inner frame per two adjacent vertical bars and per two adjacent cross bars, can
The inner frame of various sizes is freely formed, then cross bar and vertical bar are fixed on film plating substrate frame outline border, can start to put
Sheet glass carries out plated film；During completing coating film on glass transmission, it can quickly switch product size online, overcome previous one
The shortcomings that set film plating substrate frame can only meet a kind of product size, production cost is saved；Meanwhile it is previous when changing frame operating cost
Arduously, manpower and waste of time are caused, seriously hinders production efficiency, and application of the present invention in the production of practical plated film,
Both it had saved production cost and has also improved production efficiency.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the structural schematic diagram of external frame provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of film plating substrate frame provided in an embodiment of the present invention；
Fig. 3 is the enlarged drawing of a-quadrant in Fig. 2；
Fig. 4 is the partial structure diagram of vertical bar provided in an embodiment of the present invention；
Fig. 5 is the schematic perspective view of sliding block provided in an embodiment of the present invention；
Fig. 6 is the partial structure diagram of cross bar provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or it may be simultaneously present centering elements.When an element is known as " being connected to " another element, it can
To be directly to another element or may be simultaneously present centering elements.
It is only relative concept each other it should also be noted that, the positional terms such as left and right, upper and lower in the embodiment of the present invention
It or is to refer to, and should not be regarded as restrictive with the normal operating condition of product.
As depicted in figs. 1 and 2, film plating substrate frame provided in an embodiment of the present invention includes that external frame 1, at least two is used for
The vertical bar 2 and at least two cross bars 3 for preventing glass from toppling over.Wherein, external frame 1 is for being driven and overally supporting, and at least two
Vertical bar 2 and at least two cross bars 3 are arranged in external frame 1.It is enclosed per two adjacent vertical bars 2 and per two adjacent cross bars 3
Synthesize the inner frame 4 of size adjustable.Specifically, each vertical bar 2 intersects with each cross bar 3 respectively, and in intersection reality
Now being slidably connected along the length direction of cross bar 3 and vertical bar 2, i.e., each vertical bar 2 are slidably connected with each cross bar 3, each vertical bar 2
It can be slided along the length direction of cross bar 3, each cross bar 3 can be slided along the length direction of vertical bar 2, to adjust inner frame 4
Size.By free to slide between cross bar 3 and vertical bar 2, can be convenient convenient replacing film plating substrate frame needs the embodiment of the present invention
The size wanted puts the glass substrate for production.
At least two cross bars 3 and at least two vertical bars 2 by being slidably connected in external frame 1 by the present invention, and every phase
Two adjacent vertical bars 2 and every two adjacent cross bars 3 enclose inner frame 4, can freely form the interior sash of various sizes
Frame 4, then cross bar 3 and vertical bar 2 are fixed in film plating substrate frame external frame 1, it can start to put sheet glass progress plated film；Complete
During transmitting at coating film on glass, it can quickly switch product size online, overcoming previous a set of film plating substrate frame can only expire
A kind of the shortcomings that product size of foot, production cost is saved；Meanwhile it is previous to change frame operation time-consuming and laborious, cause manpower and when
Between waste, seriously hinder production efficiency, and application of the present invention in the production of practical plated film, both saved production cost or
Improve production efficiency.
Preferably, in one embodiment of the invention, film plating substrate frame includes two vertical bars 2 and two cross bars 3, and two
A vertical bar 2 and two cross bars 3 are arranged in a mutually vertical manner, and to enclose an inner frame 4, pass through two vertical bars 2 of sliding and two
The position of cross bar 3 adjusts the size of inner frame 4.It is understood that in other embodiments of the invention, 2 He of vertical bar
The number of cross bar 3 is also possible to two or more, and the quantity of vertical bar 2 and cross bar 3 can also be different.In addition, according to actual size
Needs, vertical bar 2 and cross bar 3 can also be mutually inclined setting.
Further, equal at the both ends of each cross bar 3 and vertical bar 2 as shown in figure 3, in one embodiment of the invention
It is provided with U-shaped screw hole 21, film plating substrate frame further includes cooperating with U-shaped screw hole 21 and for when the size of inner frame 4 determines
Fastening screw (not shown) cross bar 3 and vertical bar 2 being fixed in external frame 1.Specifically, inner frame 4 is being regulated
After size, cross bar 3 and vertical bar 2 are fixed on outside by the cooperation of fastening screw and the U-shaped screw hole 21 at 2 both ends of cross bar 3 and vertical bar
In portion's frame 1, thus the size of fixing internal frame 1.
It, can also be with other fixed forms by cross bar 3 and vertical bar it is understood that in other embodiments of the invention
2 are fixed in external frame 1, as shown in figure 4, opening up mounting hole 203 at the both ends of vertical bar 2, then by screw that vertical bar 2 is fixed
In external frame 1.Specifically, vertical bar 2 includes the second fixed part 202 and is layered in above the second fixed part 202 and with second
The integrally formed second connecting portion 201 of fixed part 202, the length of second fixed part 202 are greater than second connecting portion 201, and
The both ends of second fixed part 202 are provided with multiple above-mentioned mounting holes 203.
Further, as shown in figure 5, film plating substrate frame further includes for each vertical bar 2 to be slidably connected at cross bar 3 respectively
On sliding block 5.Specifically, sliding block 5 includes sliding part 51 and the clamping part 52 being fixedly connected with sliding part 51.
Further, as shown in fig. 6, in one embodiment of the invention, being opened up along its length in each cross bar 3
Fluted 31, for above-mentioned sliding part 51 for being slidably connected in groove 31, clamping part 52 is used to clamp the second connecting portion of vertical bar 2
201。
Specifically, cross bar 3 include the first fixed part 301 and be layered in above the first fixed part 301 and with the first fixed part
301 integrally formed first connecting portions 302 are provided with above-mentioned groove 31 in the first connecting portion 302, in addition, the first fixed part
301 length is greater than first connecting portion 302, and the both ends of the first fixed part 301 are provided with above-mentioned U-shaped screw hole 21.
In another embodiment of the present invention, fluted 31 are opened up along its length in each vertical bar 2, above-mentioned sliding
Portion 51 is for being slidably connected in groove 31, and clamping part 52 is for clamping cross bar 3.
Preferably, when opening up groove 31 on cross bar 3, the lower section of vertical bar 2 is arranged in cross bar 3, to facilitate sliding vertical member
2；When opening up groove 31 on vertical bar 2, the lower section of cross bar 3 is arranged in vertical bar 2, to facilitate sliding cross bar 3.
It is further preferred that the cross section of groove 31 is trapezoidal.Correspondingly, the cross section of sliding part 51 is also trapezoidal and ruler
It is very little to be matched with groove 31.
Further, the cross section of clamping part 52 is trapezoidal, and the plane where the trapezoidal cross-section of clamping part 52 is vertical
Plane where the trapezoidal cross-section of sliding part 51.Specifically, the trapezoidal holding tank in cross section is provided in clamping part 52
501, which can be used for clamping the second connecting portion 201 of above-mentioned vertical bar 2, at this time the cross section of second connecting portion 201
It is trapezoidal.
Preferably, the film plating substrate frame of the embodiment of the present invention is used for high-temperature vacuum coating field, and material is high temperature anaerobic
Copper or high-strength stainless steel material.
The present invention also provides a kind of vacuum coating equipments comprising film plating substrate frame described above.
The present invention is fixed by the way that inner frame 4 to be set on external frame 1 by fastening screw, solves glass
The problem of support and transmission of glass substrate.Simultaneously because inner frame 4 uses at least two cross bars 3 and at least two vertical bars, 2 phase
The mode slided between mutually is freely combined, and can conveniently form various sizes.It, can be rapidly in the case where online production
Inner frame 4 is adjusted to the size needed, by sliding cross bar 3 and vertical bar 2, completes the adjusting of inner frame 4, then by tight
Gu key screw inner frame 4 is fixed in external frame 1, whole operation process loads section in waiting substrate and can be completed, and saves
Production time.Spare more set corresponding size substrate frames are eliminated simultaneously, have saved production cost.
The research and test of the above material are by project " high-performance in national high-tech research development plan (863 Program)
The financial aid of inexpensive multi-touch capacitive screen industrialization key technology ", project number: 2013AA030602.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modification, equivalent replacement or improvement etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (9)
1. a kind of film plating substrate frame, which is characterized in that including the external frame (1) for being driven and supporting and be arranged described outer
At least two vertical bars (2) and at least two cross bars (3) in portion's frame (1), per two adjacent vertical bars (2) and per adjacent
Two cross bars (3) enclose the inner frame (4) of size adjustable；Each vertical bar (2) and each cross bar (3)
It is slidably connected, each vertical bar (2) can be slided along the length direction of the cross bar (3), and each cross bar (3) can be along described
The length direction of vertical bar (2) slides, to adjust the size of the inner frame (4)；The film plating substrate frame further includes for inciting somebody to action
Each vertical bar (2) is slidably connected at the sliding block (5) on the cross bar (3) respectively, and the sliding block (5) includes sliding part (51)
The clamping part (52) being fixedly connected with the sliding part (51).
2. film plating substrate frame as described in claim 1, which is characterized in that each cross bar (3) opens up along its length
Fluted (31), the sliding part (51) match with the groove (31) and are slidably connected in the groove (31), the folder
Portion (52) are held for clamping the vertical bar (2).
3. film plating substrate frame as described in claim 1, which is characterized in that each vertical bar (2) opens up along its length
Fluted (31), the sliding part (51) match with the groove (31) and for being slidably connected in the groove (31), institute
Clamping part (52) are stated for clamping the cross bar (3).
4. film plating substrate frame as claimed in claim 2 or claim 3, which is characterized in that the cross section of the groove (31) is trapezoidal.
5. film plating substrate frame as claimed in claim 4, which is characterized in that the cross section of the clamping part (52) is trapezoidal, and
Plane where the trapezoidal cross-section of the clamping part (52) is perpendicular to flat where the trapezoidal cross-section of the sliding part (51)
Face.
6. film plating substrate frame as described in claim 1, which is characterized in that the both ends of each cross bar (3) and vertical bar (2) are equal
It is provided with U-shaped screw hole (21)；The film plating substrate frame further includes cooperating with the U-shaped screw hole (21) and in the interior sash
The fastening screw being fixed on the cross bar (3) and vertical bar (2) when the size of frame (4) determines on the external frame (1).
7. film plating substrate frame as described in claim 1, which is characterized in that the film plating substrate frame includes two vertical bars
(2) and two cross bars (3).
8. film plating substrate frame as described in claim 1, which is characterized in that the film plating substrate frame by high temperature anaerobic copper product or
Stainless steel material is made.
9. a kind of vacuum coating equipment, which is characterized in that including the described in any item film plating substrate framves of such as claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510759845.3A CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510759845.3A CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105316641A CN105316641A (en) | 2016-02-10 |
| CN105316641B true CN105316641B (en) | 2019-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510759845.3A Active CN105316641B (en) | 2015-11-09 | 2015-11-09 | A kind of film plating substrate frame and vacuum coating equipment |
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| CN (1) | CN105316641B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483637A (en) * | 2016-03-02 | 2016-04-13 | 凯盛信息显示材料(洛阳)有限公司 | Glass vacuum plated substrate frame |
| CN107574419A (en) * | 2017-10-11 | 2018-01-12 | 新乡市百合光电有限公司 | The coating film on glass frame and electric heater unit of a kind of vacuum chamber |
| CN107619196A (en) * | 2017-10-11 | 2018-01-23 | 新乡市百合光电有限公司 | A kind of ellipsoid shape coating film on glass frame |
| CN109533967B (en) * | 2018-10-18 | 2022-09-30 | 芜湖研历光电科技有限公司 | Glass substrate's transport carrier |
| CN111334768A (en) * | 2020-03-18 | 2020-06-26 | 苏州求是真空电子有限公司 | Vertical wafer loading frame suitable for magnetron sputtering coating |
| CN112251729B (en) * | 2020-10-23 | 2022-08-30 | 凯盛信息显示材料(黄山)有限公司 | Glass substrate frame for vacuum coating, coating system thereof and transmission method of coating system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805410A (en) * | 2015-04-21 | 2015-07-29 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Magnetron sputtering film coating machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204281592U (en) * | 2014-12-19 | 2015-04-22 | 湖北鸿创科技有限公司 | A kind of two-sided ITO plated film tool |
| CN104947060B (en) * | 2015-06-22 | 2017-11-14 | 安徽方兴科技股份有限公司 | A kind of substrate frame |
| CN205205223U (en) * | 2015-11-09 | 2016-05-04 | 信义光伏产业(安徽)控股有限公司 | Coating film substrate frame and vacuum coating equipment |
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- 2015-11-09 CN CN201510759845.3A patent/CN105316641B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104805410A (en) * | 2015-04-21 | 2015-07-29 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Magnetron sputtering film coating machine |
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| CN105316641A (en) | 2016-02-10 |
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