CN105301358A - Film layer resistance online detection device used for vacuum coiling film coating equipment - Google Patents

Film layer resistance online detection device used for vacuum coiling film coating equipment Download PDF

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Publication number
CN105301358A
CN105301358A CN201510764294.XA CN201510764294A CN105301358A CN 105301358 A CN105301358 A CN 105301358A CN 201510764294 A CN201510764294 A CN 201510764294A CN 105301358 A CN105301358 A CN 105301358A
Authority
CN
China
Prior art keywords
resistance
thread guide
guide devices
rete
copper roller
Prior art date
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Pending
Application number
CN201510764294.XA
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Chinese (zh)
Inventor
李灿伦
景加荣
黄涛
范秋林
倪俊
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Shanghai Institute of Satellite Equipment
Original Assignee
Shanghai Institute of Satellite Equipment
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Satellite Equipment filed Critical Shanghai Institute of Satellite Equipment
Priority to CN201510764294.XA priority Critical patent/CN105301358A/en
Publication of CN105301358A publication Critical patent/CN105301358A/en
Pending legal-status Critical Current

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Abstract

The invention provides a film layer resistance online detection device used for vacuum coiling film coating equipment. The film layer resistance online detection device comprises contact copper rollers, crimping lead devices, a penetration sealed connector (6) and a resistance measuring instrument (7). The contact copper rollers are connected with the crimping lead devices. The contact copper rollers are used for measuring the resistance value of a film layer and transmitting the measured resistance value of the film layer to the resistance measuring instrument (7) via the crimping lead devices and the penetration sealed connector (6) in turn. Real-time online monitoring can be performed on the resistance value of the film layer by the resistance measuring instrument (7). The device can detect film layer resistance of the vacuum coiling film coating equipment in real time online and can be directly installed and used on the equipment so that the assembling method is simple and measurement accuracy is great.

Description

Rete resistance on-line measuring device on vacuum winding filming equipment
Technical field
The present invention relates to resistance detection field, particularly, relate to the rete resistance on-line measuring device on vacuum winding filming equipment.
Background technology
Vacuum winding plated film is the technology of method continuous coating on flexible substrate of applied physics vapour deposition, and its maximum feature volume to volume can carry out plated film exactly continuously.
When fexible film is coated with metallic diaphragm, need to detect in real time the quality that thicknesses of layers guarantees product, but due to direct-on-line, to detect the Thickness Ratio of rete more difficult, so can carry out indirect inspection thicknesses of layers by measuring rete resistance.In addition, when being coated with the conductive film layer of similar ITO, the resistance of its rete of General Requirements on-line checkingi, with adjusting process parameter in real time.If be coated with the thickness that directly or indirectly cannot detect rete in the process of rete, will shut down after recovering atmospheric pressure and can detect thicknesses of layers, consuming time longer.If introduce a set of online resistance pick-up unit in equipment, just can when being coated with rete Real-Time Monitoring.
Therefore, the rete resistance on-line measuring device on a set of vacuum winding filming equipment is devised.
Summary of the invention
For defect of the prior art, the object of this invention is to provide a kind of rete resistance on-line measuring device on vacuum winding filming equipment.
According to the rete resistance on-line measuring device on vacuum winding filming equipment provided by the invention, comprise: contact copper roller, crimping thread guide devices, crossing cabin hermetically sealed connector, resistance measuring instrument, wherein, described contact copper roller is connected with crimping thread guide devices, contact copper roller is for measuring the resistance value of rete, and by crimping thread guide devices, crossing cabin hermetically sealed connector, the rete resistance value recorded being transferred to resistance measuring instrument successively, described resistance measuring instrument can carry out real time on-line monitoring to the resistance value of rete.
Preferably, the quantity of described contact copper roller is at least two, is designated as respectively: contact copper roller A, contact copper roller B; Described crimping thread guide devices comprises: crimping thread guide devices A, crimping thread guide devices B; The test lead of described crimping thread guide devices A connects contact copper roller A, the test lead link contact copper roller B of described crimping thread guide devices B, and the output terminal of described crimping thread guide devices A, crimping thread guide devices B is connected to resistance measuring instrument respectively by after wire and crossing cabin hermetically sealed connector.
Preferably, described contact copper roller comprises: copper roller and erecting frame, and wherein, described copper roller comprises: circlip for shaft, bearing, copper roller insulation tetrafluoro cover, copper sheathing, home roll; Described bearing is arranged on the two ends of described home roll, and described copper sheathing is open column shape, and described copper sheathing with described home roll for axle center surrounds described home roll and bearing; Be provided with copper roller between described bearing and the inwall of copper sheathing to insulate tetrafluoro cover, the two ends end face of described home roll is also provided with circlip for shaft.
Preferably, described crimping thread guide devices comprises: pressure head component, erecting frame, and wherein, described pressure head component comprises: red copper head, mounting blocks, screw cap, socket head cap screw, spring; Described mounting blocks is open column shape, and is provided with hex screw, spring and part red copper head and segment screw cap in the hollow area of described mounting blocks; One end of mounting blocks is stretched out in one end of described red copper head, and described screw cap stretches out the other end of mounting blocks; One end of described red copper head forms the test lead of described crimping thread guide devices, the other end of described red copper head is connected with one end of wire by socket head cap screw, the other end of described wire is connected to crossing cabin hermetically sealed connector through the through hole of screw cap, be provided with spring between described screw cap and socket head cap screw, described spring is through on wire.
Preferably, described crimping thread guide devices also comprises: pressure head component insulation tetrafluoro cover, tetrafluoro block, and described pressure head component insulation tetrafluoro is set between mounting blocks inwall and red copper head; Described tetrafluoro block is arranged between socket head cap screw and mounting blocks inwall.
Preferably, described resistance measuring instrument is provided with remote communication module, and described remote communication module is connected with computing machine, achieves the real-time detection of rete resistance value.
Compared with prior art, the present invention has following beneficial effect:
1, the device in the present invention can directly be installed and used on equipment, and assemble method is simple, good measuring accuracy.
2, the resistance measuring instrument in the device in the present invention is provided with remote communication module, and described remote communication module is connected with computing machine, achieves the real-time detection of rete resistance value.
3, the device in the present invention is fully contacted with rete by contact copper roller, realizes the contact of pick-up unit and rete, and copper roller inside uses teflon to realize the insulation of contact copper sheathing and vacuum tank, thus can guarantee to demonstrate,prove the accuracy measured.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Fig. 1 is the structural representation of the rete resistance on-line measuring device on vacuum winding filming equipment provided by the invention;
Fig. 2 is the copper roll structure schematic diagram in the rete resistance on-line measuring device on vacuum winding filming equipment provided by the invention;
Fig. 3 is the pressure head component structural representation in the rete resistance on-line measuring device on vacuum winding filming equipment provided by the invention.
In figure:
1-contacts copper roller A;
2-crimps thread guide devices A;
3-contacts copper roller B;
4-crimps thread guide devices B;
5-wire;
6-crossing cabin hermetically sealed connector;
7-resistance measuring instrument;
8-circlip for shaft;
9-bearing;
10-copper roller insulation tetrafluoro cover;
11-copper sheathing;
12-home roll;
13-red copper head;
14-pressure head component insulation tetrafluoro cover;
15-mounting blocks;
16-screw cap;
17-socket head cap screw;
18-tetrafluoro block;
19-spring.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
According to the rete resistance on-line measuring device on vacuum winding filming equipment provided by the invention, comprise: contact copper roller, crimping thread guide devices, crossing cabin hermetically sealed connector 6, resistance measuring instrument 7, wherein, described contact copper roller is connected with crimping thread guide devices, contact copper roller is for measuring the resistance value of rete, and by crimping thread guide devices, crossing cabin hermetically sealed connector 6, the rete resistance value recorded being transferred to resistance measuring instrument 7 successively, described resistance measuring instrument 7 can carry out real time on-line monitoring to the resistance value of rete.
For vacuum winding filming equipment needing on-line checkingi rete resistance, provide a set of easy rete resistance on-line measuring device, to improve the film quality of winding film plating.
Rete resistance on-line measuring device on vacuum winding filming equipment of the present invention a kind ofly can detect the device of rete resistance by real-time online when winding film plating equipment plated film.This device fully contacts with rete, and insulate with vacuum tank, to guarantee the accuracy measured, and by crossing cabin hermetically sealed connector 6, measured value is guided on length of run resistance measuring instrument 7, to realize remote real time monitoring.This rete resistance on-line measuring device is primarily of parts compositions such as contact copper roller, crimping thread guide devices, wire, crossing cabin hermetically sealed connector 6, resistance measuring instruments 7.
Described contact copper roller comprises: contact copper roller A1, contact copper roller B2; Described crimping thread guide devices comprises: crimping thread guide devices A2, crimping thread guide devices B4; The test lead of described crimping thread guide devices A2 connects contact copper roller A1, the test lead link contact copper roller B2 of described crimping thread guide devices B4, and the other end of described crimping thread guide devices A2, crimping thread guide devices B4 is connected to resistance measuring instrument 7 respectively by after wire and crossing cabin hermetically sealed connector 6.
Described contact copper roller comprises: copper roller and erecting frame, and wherein, described copper roller comprises: circlip for shaft 8, bearing 9, copper roller insulation tetrafluoro cover 10, copper sheathing 11, home roll 12; Described bearing 9 is arranged on the two ends of described home roll 12, described copper sheathing 11 in open column shape, and described copper sheathing 11 with described home roll 12 for axle center surrounds described home roll 12 and bearing 9; Be provided with the copper roller tetrafluoro that insulate between described bearing 9 and the inwall of copper sheathing 11 and overlap 10, the two ends end face of described home roll 12 is also provided with circlip for shaft 8.
Particularly, as shown in Figure 1, rete resistance on-line measuring device is primarily of compositions such as 2 cover contact copper rollers, 2 cover crimping thread guide devices, wire, crossing cabin connector and resistance measuring instruments.
Described contact copper roller A, contact copper roller mainly comprise copper roller and erecting frame.Erecting frame carries out design processing according to equipment requirement.Copper roll structure as shown in Figure 2, forms primarily of circlip for shaft 8, bearing 9, copper roller insulation tetrafluoro cover 10, copper sheathing 11 and home roll 12.Copper sheathing 11 diameter is by diameter be copper rod finishing form, in process, need to guarantee that copper sheathing 11 thickness is 10mm, outside surface right alignment is better than 0.08mm, and total run-out is due to 0.1mm, and surfaceness is better than 0.8 μm.Realized the insulation of copper sheathing 11 and home roll 12 by copper roller insulation tetrafluoro cover 10, thus ensure that the insulation of pick-up unit and vacuum tank.After copper roller installation assembling completes, need to carry out static balancing test to it, require that amount of unbalance is less than 3g, thus guarantee the quality of fexible film through copper roller.
Described crimping thread guide devices comprises: pressure head component, erecting frame, and wherein, described pressure head component comprises: red copper 13, mounting blocks 15, screw cap 16, socket head cap screw 17, spring 19; Described mounting blocks 15 is open column shape, and is provided with hex screw 17, spring 19 and part red copper 13 and segment screw cap 16 in the hollow area of described mounting blocks 15; One end of mounting blocks 15 is stretched out in one end of described red copper 13, and described screw cap 16 stretches out the other end of mounting blocks 15; One end of described red copper 13 forms the test lead of described crimping thread guide devices, the other end of described red copper 13 is connected with one end of wire by socket head cap screw 17, the other end of described wire is connected to crossing cabin hermetically sealed connector 6 through the through hole of screw cap 16, be provided with spring 19 between described screw cap 16 and socket head cap screw 17, described spring is through on wire.
Particularly, as shown in Figure 3, described crimping thread guide devices A2, crimping thread guide devices B4 mainly comprise pressure head component and erecting frame.Erecting frame carries out design processing according to equipment requirement.Pressure head component forms, as Fig. 3 institute primarily of red copper 13, tetrafluoro cover 14, mounting blocks 15, screw cap 16, socket head cap screw 17, tetrafluoro block 18, spring 19.Wherein, red copper 13 is processed by red copper, and red copper 13 contacts with copper roller, and is linked together by socket head cap screw 17 and wire, thus the signal realized on copper roller is drawn.Realized the insulation of red copper 13 and mounting blocks 15 by pressure head component insulation tetrafluoro cover 14, tetrafluoro block 18, thus realize, with the insulation of vacuum tank, guaranteeing measuring accuracy.The compression of red copper between 13 and copper roller is realized by spring 19, screw cap 16, when there are wearing and tearing in red copper, can copper roller spring 19 automatic impaction.
Described crimping thread guide devices also comprises: pressure head component insulation tetrafluoro cover 14, tetrafluoro block 18, and described pressure head component insulation tetrafluoro cover 14 is arranged between mounting blocks 15 inwall and red copper 13; Described tetrafluoro block 18 is arranged between socket head cap screw 17 and mounting blocks 15 inwall.
Described resistance measuring instrument 7 is provided with remote communication module, and described remote communication module is connected with computing machine, achieves the real-time detection of rete resistance value.
Particularly, the instrument that resistance measuring instrument needs the thickness range according to rete, electric conductivity selects different range, resistance measuring instrument need have remote communicating function, thus realizes the connection with remote computer, real time record resistance.
The effect that the present invention has: this rete resistance on-line measuring device can meet the resistance on-line checkingi of vacuum winding filming equipment in continuous coating process, and can be connected on remote measurement instrument and realize remote monitoring.Fully contacted with rete by contact copper roller, and realize wire and the contact contacting copper roller with crimping thread guide devices, wire on the resistance measuring instrument outside vacuum tank by crossing cabin hermetically sealed connector lead-in wire, is formed measuring circuit, realizes rete resistance on-line checkingi.
Rete resistance on-line measuring device of the present invention is fully contacted with rete by contact copper roller, realize the contact of pick-up unit and rete, copper roller inside uses teflon to realize the insulation of contact copper sheathing and vacuum tank, thus ensure that the accuracy of measurement.
Rete resistance on-line measuring device of the present invention is the signal transmission being realized inlet side and atmospheric side by crossing cabin hermetically sealed connector.
Rete resistance on-line measuring device of the present invention is the final measurement that resistance measuring instrument realizes resistance, selects the resistance measuring instrument of different measuring scope according to different retes.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.

Claims (6)

1. the rete resistance on-line measuring device on vacuum winding filming equipment, it is characterized in that, comprise: contact copper roller, crimping thread guide devices, crossing cabin hermetically sealed connector (6), resistance measuring instrument (7), wherein, described contact copper roller is connected with crimping thread guide devices, contact copper roller is for measuring the resistance value of rete, and by crimping thread guide devices, crossing cabin hermetically sealed connector (6), the rete resistance value recorded being transferred to resistance measuring instrument (7) successively, described resistance measuring instrument (7) can carry out real time on-line monitoring to the resistance value of rete.
2. the rete resistance on-line measuring device on vacuum winding filming equipment according to claim 1, it is characterized in that, the quantity of described contact copper roller is at least two, is designated as respectively: contact copper roller A (1), contact copper roller B (2); Described crimping thread guide devices comprises: crimping thread guide devices A (2), crimping thread guide devices B (4); The test lead of described crimping thread guide devices A (2) connects contact copper roller A (1), test lead link contact copper roller B (2) of described crimping thread guide devices B (4), and the output terminal of described crimping thread guide devices A (2), crimping thread guide devices B (4) is connected to resistance measuring instrument (7) respectively by after wire and crossing cabin hermetically sealed connector (6).
3. the rete resistance on-line measuring device on vacuum winding filming equipment according to claim 2, it is characterized in that, described contact copper roller comprises: copper roller and erecting frame, wherein, described copper roller comprises: circlip for shaft (8), bearing (9), copper roller insulation tetrafluoro cover (10), copper sheathing (11), home roll (12); Described bearing (9) is arranged on the two ends of described home roll (12), described copper sheathing (11) in open column shape, and described copper sheathing (11) with described home roll (12) for axle center surrounds described home roll (12) and bearing (9); Be provided with copper roller between the inwall of described bearing (9) and copper sheathing (11) to insulate tetrafluoro cover (10), the two ends end face of described home roll (12) be also provided with circlip for shaft (8).
4. the rete resistance on-line measuring device on vacuum winding filming equipment according to claim 2, it is characterized in that, described crimping thread guide devices comprises: pressure head component, erecting frame, wherein, described pressure head component comprises: red copper head (13), mounting blocks (15), screw cap (16), socket head cap screw (17), spring (19); Described mounting blocks (15) is open column shape, and is provided with hex screw (17), spring (19) and part red copper head (13) and segment screw cap (16) in the hollow area of described mounting blocks (15); One end of mounting blocks (15) is stretched out in one end of described red copper head (13), and described screw cap (16) stretches out the other end of mounting blocks (15); One end of described red copper head (13) forms the test lead of described crimping thread guide devices, the other end of described red copper head (13) is connected with one end of wire by socket head cap screw (17), the other end of described wire is connected to crossing cabin hermetically sealed connector (6) through the through hole of screw cap (16), be provided with spring (19) between described screw cap (16) and socket head cap screw (17), described spring is through on wire.
5. the rete resistance on-line measuring device on vacuum winding filming equipment according to claim 4, it is characterized in that, described crimping thread guide devices also comprises: pressure head component insulation tetrafluoro cover (14), tetrafluoro block (18), and described pressure head component insulation tetrafluoro cover (14) is arranged between mounting blocks (15) inwall and red copper head (13); Described tetrafluoro block (18) is arranged between socket head cap screw (17) and mounting blocks (15) inwall.
6. the rete resistance on-line measuring device on vacuum winding filming equipment according to claim 1, it is characterized in that, described resistance measuring instrument (7) is provided with remote communication module, and described remote communication module is connected with computing machine, achieves the real-time detection of rete resistance value.
CN201510764294.XA 2015-11-09 2015-11-09 Film layer resistance online detection device used for vacuum coiling film coating equipment Pending CN105301358A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
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CN108802102A (en) * 2018-07-18 2018-11-13 北京铂阳顶荣光伏科技有限公司 A kind of detection method and system of coating quality

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CN108802102A (en) * 2018-07-18 2018-11-13 北京铂阳顶荣光伏科技有限公司 A kind of detection method and system of coating quality

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Application publication date: 20160203