CN105290723B - The nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly - Google Patents
The nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly Download PDFInfo
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- CN105290723B CN105290723B CN201510599005.5A CN201510599005A CN105290723B CN 105290723 B CN105290723 B CN 105290723B CN 201510599005 A CN201510599005 A CN 201510599005A CN 105290723 B CN105290723 B CN 105290723B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
- B23P23/04—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass for both machining and other metal-working operations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Abstract
The invention discloses a kind of nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly, including the following steps carried out successively：Precision cutting process；Accurate grinding is processed；Precise finiss polishing；Nontraditional precision machining.Compared with prior art, the present invention has following advantageous effect：The Situation of Modern Special Machining Technology of the precision processing technology of ion source of ion implanter ionization starting the arc chamber assembly, especially ion source of ion implanter ionization starting the arc chamber assembly is provided, solves the problems, such as that brittle metal material is difficult to.
Description
Technical field
The present invention relates to precision processing technology more particularly to the ion notes of ion source of ion implanter ionization starting the arc chamber assembly
Enter the modern special process method of machine ion source ionization starting the arc chamber assembly.
Background technology
20 th century laters industry with fastest developing speed is si-substrate integrated circuit, and not only itself is rapid for semiconductor IC industry
Growth has also driven the emergence of other a collection of industries and perfect, such as computer, communication, space flight, precision optical machinery etc..We are existing
Semiconductor integrated circuit is all originated from pure water, the purifying garment of medical staff, nanometer technology, supercomputer drunk etc. to grind
System.Prevailing semiconductor has become the center of 21 century technological revolution in microelectric technique, by this period
Referred to as the silicon epoch are exactly the approval optimal to semiconductor.
Ion implanting is a kind of impurity that controllable quantity is introduced into silicon substrate, to change the method for its electric property,
It is a physical process, that is to say, that reaction of the injection action independent of impurity and wafer material.Cannon squeezes into shell
It is exactly the example of a displaying ion implanting concept in wall.Enough kinetic energy is obtained from the gunpowder of cannon, cannon can inject wall
Body stops within surface of wall.Identical situation occurs in ion implantation process, substitute shell is ion, foreign atom
It is ionized, separates, accelerating (acquisition kinetic energy), forming ion beam current, inswept wafer, ion beam current carries out physical bombardment to wafer,
It stops into surface and below surface.Ion implanting has in the modern silicon chip manufacturing process of the advanced circuits of sub- below 0.25um
Extensive use.
Ion is exactly the atom or molecule of positively charged or negative electricity, and the ion injected is that atoms of dopant ionization generates,
Ionization process is happened in the ionization reaction chamber for be connected with source steam and carries out.The reaction chamber keeps the low pressure of 10-3 supports, in reaction chamber
Portion's filament heating can be attracted to its surface with the temperature of launching electronics, electronegative electronics by the positive electrode in reaction chamber, electronics
From filament move to positive electrode during with impurity source molecular collision, element contained by a large amount of molecules of output formed just from
Son.
The 50% of the indoor parts of the ion implantation apparatus ionization starting the arc is made of the Precision Machining part of tungsten, 30% 0
Component is made of the Precision Machining part of metal molybdenum and molybdenum alloy (TZM), and 5% parts are the Precision Machining part structures by metal tantalum
Into, therefore tungsten, molybdenum, the Precision Machining irregular part of TZM and tantalum have irreplaceable role in IP industries.
The advantages of tungsten is rare refractory metal, and crystal structure is body-centered cubic, tungsten is fusing point, intensity and elasticity modulus
Height, the coefficient of expansion is small, and steam forces down, and conductive, thermal conductivity is good and superior etch resistant properties, and shortcoming is low temperature brittleness and high temperature oxygen
Change serious.Since tungsten is complete brittle substance, Precision Machining is extremely difficult.
Molybdenum is rare refractory metal, and crystal structure is body-centered cubic, and the fusing point of molybdenum is high, and steam forces down, evaporation rate compared with
Small, the hardness and strength limiting proportion tungsten of molybdenum is low, its coefficient of thermal expansion is approached with glass, and molybdenum is also brittle substance, Precision Machining
Also it is relatively difficult.
TZM is that carbon, titanium, zirconium trace element are with the addition of in molybdenum raw material, and substantially as molybdenum, elevated temperature strength, low temperature prolong performance
Property and welding performance it is better than molybdenum, however Precision Machining is more difficult than molybdenum.
Metal tantalum is also rare refractory metal, but the craftsmanship of its mechanical processing is bad, is existed in Precision Machining tired
It is difficult.
Precise machine machining is to change material shape using cutter or destroy material surface, is reached with cutting form
Required shape, in conclusion tungsten, molybdenum, TZM and tantalum metal have the following disadvantages in machine parts'precise processing：
1st, tungsten is complete brittle substance, and general machining is highly difficult, and precision optical machinery processes extremely difficult, specific manifestation
For：Product is frangible in mechanical processing, it is quick-fried to be also easy to produce crackle, easy chip, and processing part product roughness bottom processes part product
Dimensional accuracy is low, and the part product accuracy of form and position is low；
2nd, there is processing part product roughness bottom in the part product of molybdenum and TZM intermetallic composite coatings, process part product size
Precision is low, and the part product accuracy of form and position is low；
3rd, tantalum metal very viscous knife in mechanical processing, therefore the product roughness bottom processed, dimensional accuracy is low, the accuracy of form and position
It is low.
The content of the invention
There is provided the precisions of ion source of ion implanter ionization starting the arc chamber assembly for the technical problem to be solved in the invention
The Situation of Modern Special Machining Technology of processing technology more particularly to ion source of ion implanter ionization starting the arc chamber assembly, it is intended in solution
State problem.
The present invention is achieved by the following technical solutions：
A kind of nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly, including what is carried out successively
Following steps：
Precision cutting process, to process finish, dimensional accuracy and the high product parts of the accuracy of form and position.Superhard coating
The advantages of hard alloy cutter, is that its small with non-ferrous metal affinity, hardness, wearability and thermal conductivity are all very superior, and
And cutting edge can grind very sharp, generally R10 μm of practical application, can process the surface roughness better than Ra0.4 μm.
In addition, precision cutting process additionally uses high-precision CNC machining centers and CNC turning centers process equipment and high-resolution
The microfeed structure of rate.Lathe takes the measures such as constant temperature, vibrationproof and vibration isolation in itself, also to there is the dress for preventing pollution workpiece
It puts.
Preferably, the CNC precisions milling is cut in CNC precision vehicle cutting operations, controls CNC Milling Speeds V
It is 8~25mm/min for 30~90m/min and CNC milling feed amounts Ft, CNC vehicle cutting speeds V is 10~25m/min, CNC vehicles
Cutting feed amount Ft is 0.001mm/min~0.002mm/min.
Accurate grinding is processed, which is grown up based on general grinding, is existed with accurate trimmed emery wheel
The micro cutting processing carried out on precision grinder, the removal amount of metal can even smaller in the micron-scale, very high ruler can be reached
Very little precision, the accuracy of form and position and very low surface roughness value.
Preferably, the nib mould taper control of the diamond pen on the precision grinder is 72 °~78 °, controls institute
The linear velocity of emery wheel is stated as 10~22m/s, dressing lead：0.015~0.05mm/r modifies depth：0.02~0.1mm.
Precise finiss polishing can make product to be processed reach the high and lower surface of dimensional accuracy, the accuracy of form and position thick
Rugosity value；
Nontraditional precision machining,
Preferably, the step of precision cutting process specifically includes following operation：
CNC precision millings are carried out to green body on precision machine tool using the superhard coating hard alloy cutter below micron order
It cuts and is cut with CNC precisions vehicle.
Preferably, the step of accurate grinding processing specifically includes following operation：
The micro cutting that green body carries out is processed on precision grinder with emery wheel.
Preferably, the step of precise finiss polishing includes following operation：
Sand paper grinding, magnetic grinding, the processing method of mechanical polishing are passed sequentially through, micro amendment is carried out to green body.
Preferably, the nontraditional precision machining of the nontraditional precision machining includes at least one of following operation：
Electron beam process, micro EDM, Wire-cut Electrical Discharge Machining, electrochemical polish processing and Medium frequency induction
Heating-liquid nitrogen cooling assembling.
Wherein, electron beam process is under vacuum, to utilize the high (106~109W/cm of energy density after focusing2)
Electron beam, in high velocity shock to the minimum area of workpiece surface, within the extremely short time (part microsecond),
Energy is largely converted into as thermal energy, the temperature that the workpiece material for being impacted part is made to reach thousands of degrees Celsius or more, so as to
Cause local melting or the gasification of material.Control the size of beam energy density and the injection length of energy, it is possible to reach
Different processing purposes makes material local melting that can carry out electron beam welding.
Electrical discharge machining refers to what is generated in the working solution of insulation by pulse spark electric discharge between tool-electrode and workpiece
Instantaneous localized hyperthermia melts and gasifies and controlledly removes workpiece material and make material deformation, change performance or plated
The special process covered.The characteristics of micro EDM is the discharge energy very little of each pulse, and working solution Xun Huan is difficult, stablizes
Discharging gap scope it is small etc..Due to there is no the cutting force of macroscopic view in process between instrument and workpiece, as long as critically controlling
Individual pulse discharge energy simultaneously coordinates precise micro feeding to achieve that the removal of atomic thin metal material, can process fine
Axis, hole, screw thread etc..
Wire-cut Electrical Discharge Machining is to make electrode pair workpiece using mobile thin plain conductor (copper wire or molybdenum filament) to carry out arteries and veins
Rush spark discharge, excision forming.
Electrochemical polish is the dissolution using anode, makes the raw selective dissolution of anode bosses distribution smooth to be formed
The method on surface.Electrobrightening can be applicable in metal material, by tungsten, the molybdenum product of reasonable preposition processing, through electrobrightening
Afterwards, product micro-crack source can be removed, the surface roughness of product reaches Ra0.1 μm.
In electrochemical polish processing, the sodium phosphate that electrolyte when being processed to the green body of tungsten material is 160g/L is molten
Liquid, decomposition voltage are 20~24V, current density is 38~45A/dm2, electrolysis time be 90~120s；To the green body of molybdenum materials matter
Electrolyte when being processed is the mixed solution of phosphoric acid, chromic acid and water, decomposition voltage is 8~10V, current density be 20~
80A/dm2, electrolysis time be 90~120s.
Preferably, in the mixed solution of the phosphoric acid, chromic acid and water, the mass fraction of phosphoric acid is the 80%, weight of chromic acid
Number is 16%, the mass fraction of water is 4%.
Frequency Induction Heating-liquid nitrogen cooling assembly technology：Assembling principle of expanding with heat and contract with cold has obtained dripping on bearing industry
The performance caused to the greatest extent, but simultaneously by Frequency Induction Heating outer ring, assembly technology of the liquid nitrogen cooling of central on a workpiece, so far not
Have, the present invention by Frequency Induction Heating-liquid nitrogen cooling assembly technology successfully apply to upper cathode threaded mandrel and with hole round plate,
The assembling of cup body with holes.
One ion implantation apparatus is the integrated of the subsystem of multiple extremely complex precisions, and each subsystem plays ion implanting
Specific effect, an ion implantation apparatus average value are 3,000,000 dollars.Ion implanting machine equipment includes following 5 parts：From
Component, extraction electrode (extraction electrode) and ion separator, accelerating tube, scanning system, process chamber.Ion source has ionization to play arc chamber, base
Seat, the introducing element of power are formed, and ionization, which plays arc chamber, to be had：Electric arc cavity (ARC CHAMBER), ion beam pass through plate (ARC
SLIT), cathode (CATHODE), repellel (REPELLER), filament (FILAMENT), REPELLER STUD, FILAMENT
CLAMP, etc. more than 20 kinds of parts form.The indoor parts of the ion implantation apparatus ionization starting the arc are manufactured according to wafer silicon chip
Different purposes have the Precision Machining part of tungsten to form respectively, the Precision Machining part of metal molybdenum and TZM are formed, the essence of metal tantalum
Close workpiece is formed and the Precision Machining part of graphite is formed.
Compared with prior art, the present invention has following advantageous effect：
Provide the precision processing technology of ion source of ion implanter ionization starting the arc chamber assembly, especially ion implantation apparatus from
The Situation of Modern Special Machining Technology of component ionization starting the arc chamber assembly, while create ion source of ion implanter ionization starting the arc chamber assembly
The technical matters route map of large-scale production solves the problems, such as that brittle metal material is difficult to form industrial large-scale production.
Description of the drawings
Fig. 1 cools down installation diagram for Frequency Induction Heating-liquid nitrogen in the present invention；
Fig. 2 is the enlarged diagram that shaft portion is cooled down in Fig. 1；
In figure：1st, hand pulls forcing press；2nd, cup body is heated；3rd, cup body is cooled down；4th, sliding block；5th, mandrel.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection domain.
The nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly disclosed by the invention includes as follows
Step：
First, precision cutting process
1st, precision CNC milling machinings：
Equipment is U.S.'s HAAS VF-3SS high Spee ' d Vertical Machining Centres, and milling cutter is agreed superhard below nano-micro level for the U.S.
TiAlN cutting tool coated with hard alloy.
According to slotting cutter speed of mainshaft calculation formula:N=1000*V/3.14*D；
V:Cutting speed m/min；
D:Cutter diameter mm；
N:The speed of mainshaft rev/min；
According to the calculation formula of slotting cutter feed speed:F=Ft*T*N；
F:Feed speed mm/min per minute；
Ft:Single-blade cutting output mm/min；
T:Milling cutter sword number sword；
CNC millings tungsten, molybdenum, the optimal V of tantalum:Cutting speed is 30~90m/min；
CNC millings tungsten, molybdenum, the optimal Ft of tantalum:8~25mm/min；
Example CNC Cutter Body Processing with Machining Center pure tungsten starting the arc chambers：Cutter Body Processing with Machining Center technology is generally used at present, but
Processing in pure tungsten material is with almost nil, the ion source ionization of the invention that CNC milling Machining Technology for Cutting is applied to complexity
Starting the arc chamber component produces, and ionization starting the arc cavity configuration is complicated, and associated technical parameters have more than 100, and the accumulated error of technical parameter is only
There is ± 0.05mm, Product Precision is high, and invention successfully produces various pure tungsten ionization starting the arc chambers, and realizes industrialization, this adds
Work technology is unique in the world at present.
2nd, precision CNC turnery processings：
Equipment be U.S.'s HAAS SL-20 turning centers, cutter be adopted as oneself modification blade before angular dimensions waag this into
Mouth thread forming knife.
According to lathe tool speed of mainshaft calculation formula:N=1000*V/3.14*D；
V:Cutting speed m/min；
D:Cutter diameter mm；
N:The speed of mainshaft rev/min；
According to the calculation formula of lathe tool feed speed:F=Ft*T*N；
F:Feed speed mm/min per minute；
Ft:Single-blade cutting output mm/min；
T:Milling cutter sword number sword；
CNC turning tungsten, molybdenum, the optimal V of tantalum:Cutting speed is 10~25m/min；
CNC turning tungsten, molybdenum, the optimal F of tantalum:0.001mm/min~0.002mm/min；
Cathode mandrel external screw thread in example numerical control Vehicle Processing：Upper cathode is by threaded mandrel and with hole round plate, cup body with holes
Assemble, the material of upper cathode is made of tungsten, metal tantalum, metal molybdenum.Great Procedure Thread Numerical Control driving skills art is in modern manufacturing industry
In be commonly employed, but the processing utilization in pure tungsten, pure tantalum material is almost seldom, 2500 revolutions per seconds of rotating speed of processing, into grade
0.03mm, diesel oil coolant, cutter are measured as this import thread forming knife of the waag of angular dimensions, the spiral shell of processing before oneself modification blade
Line electrode complies fully with layout design standard.
2nd, accurate grinding is processed：
1st, it is the spare part for the parts composition for having more than 20 kinds of tungsten, molybdenum, TZM and tantalum in ion implantation apparatus ionization starting the arc room,
Ionization rise arc chamber assembling morpheme and dimensional tolerance general control in ± 0.05mm, therefore the morpheme and dimensional tolerance of part processing
General control will reach Ra0.4 μm or more in ± 0.03mm, Part Surface Roughness, it is ensured that the assembling tolerance of ± 0.05mm,
The processing of reference plane is most important, and the assembling benchmark surface parts that ion implantation apparatus ionization plays arc chamber are electric arc cavity (ARC
CHAMBER), ion beam has the liner polishing leaf of 5 pieces of 1.6mm thickness, belongs to thin plate by plate (ARC SLIT) in arc chamber body
Yielding flat surface grinding, and tungsten, molybdenum, tantalum metal are no magnetic metals, grinding performance is similar to glass.The present invention utilizes flat stone mill essence
Close grinding technique, by electric arc cavity and ion beam by all planar dimension allowance controls of plate in ± 0.015mm, morpheme
Allowance control is controlled in ± 0.02mm, surface roughness at Ra0.4 μm or more, and concrete technology is as follows：
(1) installation of diamond pen and sword is repaiied：It is sharp to repair sword instrument diamond, using after a certain period of time, should will modify
Instrument rotates an angle, and new sharp blade tip is allowed to work, and so doing can extend the service life of dressing diamond, gold
The nib conicity of hard rock finishing pen is controlled at 72 °~78 °.
(2) when diamond pen is installed, nib should be made to be slightly below emery wheel center about 1~2mm, penholder tilts 10 °~13 °, with
Preventing vibration and diamond " gnawing " from entering, wheel face is scratched or diamond pen bursts apart.
(3) crushing dosage is answered small and uniform, this is the necessary condition for repairing micro- sword, grinding speed：10~22m/
S, dressing lead：0.015~0.05mm/r modifies depth：0.02~0.1mm.
(4) stock removal of precision plane mill, from obtaining relatively low roughness and accurate dimensional tolerance, the speed of part
Degree (Vg) and length feed amount (S) all should be selected smaller.Part linear velocity：4~18m/min；During grinding workbench longitudinal direction into
To speed:30~120mm/min；Grinding depth:0.005~0.015mm.
(5) to ensure the superior geometric tolerance of part, the special ultraprecise flat-nose pliers by the use of various specifications as clamping tool,
Because the no magnetism of tungsten, molybdenum, tantalum metal, will be fixed on by various frocks, the positioning of fixture on surface grinding machine work top,
Precision surface grinding processing could be carried out, all frocks, the geometric tolerance of fixture are less than 5u, and dimensional tolerance is less than 8u.
2nd, track formation mill processing：Ion beam is a big cambered surface by the front of plate (ARC SLIT), the size of cambered surface
Between, between part length 100mm~130mm of ARC SLIT, the specification type of ARC SLIT
Number there is hundreds of, and the dimensional tolerance of cambered surface requirement is in ± 0.015mm and surface roughness 0.4um, this small segmental arc cutting
Processing, product precision control is extremely difficult, the reason is that can not find a kind of measurement means of authority in measuring instrument at present.The present invention
It is different according to arc size, different frocks, fixture is selected to carry out mill processing, other grinding process data are ground in precision plane
In be introduced, no longer discuss here, the product finally processed complies fully with design drawing requirement.
3rd, precise finiss polishing
1st, sand paper is ground：Sand paper grinding be by the use of being stained with the banding sand paper of sand grains as a kind of processing method of cutting element,
Because tungsten, molybdenum, tantalum metal are without magnetic, tungsten is complete brittle substance again, some parts are difficult clamping when carrying out micro cutting,
Therefore part is ground by sand paper, and dimensional accuracy is up to 3um, and glacing flatness is in 1um, product roughness 0.2um.What the present invention used
Sand paper grinding replaces sand paper successively by the size of 300 mesh to 600 mesh granularities, while using the NAOH solution of 6% concentration as lubrication
Liquid.
2nd, magnetic grinding：Magnetic grinding has a wide range of applications in jewel industry, its effect is deburring, throws bright
Product, Situation of Molybdenum Metals Products can improve 0.2um by magnetic grinding, surface roughness.Magnetic grinding stick is band magnetic stainless steel, is advised
Lattice areThe NaOH solution of 6% mass fraction is as lapping liquid, grinding rod weight and part
It is equal in weight, milling time is determined on a case-by-case basis.
3rd, mechanically polish:It mechanically polishes and is played in the accurate processing for playing arc chamber parts in ion implantation apparatus ionization to pass weight
The effect wanted, because when the small place of some parts and complex-shaped surface mould inner surface are processed in precision cutting, the surface of product
Roughness only has 0.8um, and by mechanically polishing the product of processing, the surface roughness of product can reach more than 0.4um.Machinery
The equipment of polishing is portable small polishing machine, and bistrique is home built, various shapes, mainly there is cylinder, taper, spherical shape,
Material hard wool with glass washing in hard wool surfaces, then rolls special-shaped wool surfaces in 400 mesh diamond grits
It crosses, in 100 degree of drying in oven, it is possible to carry out the mechanical polishing of various product.
4th, nontraditional precision machining：Nontraditional precision machining includes electron beam welding processing, micro EDM, electric spark
Linear cutter and electrochemical polish processing and Frequency Induction Heating-liquid nitrogen cooling assembly technology.
1st, electron beam welding is processed：
The lower cathode of electron beam welding processing：Lower cathode is to be welded by external screw thread tube body with cylinder, so convenient for electricity
Son transmitting, the material of lower cathode is made of tungsten, metal tantalum.Electron beam welding has obtained extensive fortune in the automotive industry
With this project selects equipment electron-beam welder EBW-6CH types, and project has reasonably selected welding parameter of electron beam, weldingvoltage
0.705-0.697 milliamperes 52KV, 25 milliamperes of welding current, 6 seconds weld intervals/circle, welding of focus value, by electron beam welding success
The super dystectic material welding of tungsten, tantalum is applied to, solves cathode on electron emission (CATHODE) erection welding difficult point.
2nd, micro EDM：
The lower cathodic protection shield (SHIELD, CATHODE) of fine electric spark translation screw thread machining, lower cathode is by external screw thread
Tube body, function are launching electronics, but it must be precisely mounted on starting the arc chamber, and installation connecting element is exactly cathodic protection shield (tungsten
Internal thread body), when producing screw thread in arc chamber body, originally using CNC Cutter Body Processing with Machining Center, since tungsten is brittle substance, production
Product rejection rate is very high, and can not produce cathodic protection shield.Fine electric spark translation rib machine utilizes electric pulse process principle,
In process, make the spark discharge that pulse feature is constantly generated between instrument and workpiece, the high temperature that Local Instantaneous generates during electric discharge
Metal ablation is got off；The principle of electrical discharge machining is put based on the spark that pulse feature is generated between piece pole and tool-electrode
Electricity generates galvanic corrosion phenomenon during electric discharge to remove extra metal, achievees the purpose that dimensioned, while accurate digital control is translatable head
At the electrode of EDN machines, machined electrode is mounted on orbital head, this completes EDM Curve Machinings, product waste products
Rate will most zero, EDM translation screw thread machining technique application, realize the breakthrough of tungsten product inner nut processing technology.
3rd, Wire-cut Electrical Discharge Machining：
Equipment choosing Japan Fa Nake (FANUC) α-oiE types, the parameter of slow wire feeding, electric current 1A~16A, voltage 6V~
26V, 4~6rpm of speed, 1~2550T of line tension.
4th, electrochemical polish is processed：
The surface state of workpiece is very big to the influential effect of electrochemical polish, therefore to be sufficiently prepared place to workpiece
Reason.Prepare processing include with it is smooth and purification (activation) be target mechanical polishing and degreasing, pickling, while polishing effect also by
To the influence of following factors：Voltage and current, temperature and processing time, clamp tool and interpolar distance, wherein clamp tool is not according to
Same workpiece, designed, designed, here is tungsten, molybdenum electropolishing formula of liquid and process conditions statistical form：
| Material | Electrolyte forms | Voltage/V | Current density/(A/dm2) | Temperature/DEG C | Time/second |
| Tungsten | Sodium phosphate 160 (g/L) | 20~24 | 9 | 38~45 | 90~120 |
| Molybdenum | 80% phosphoric acid, 16% chromic acid, 4% water | 8~10 | 20 | 80 | 90~120 |
5th, Frequency Induction Heating-liquid nitrogen cooling assembly technology：
Assembling principle of expanding with heat and contract with cold has obtained performance incisively and vividly on bearing industry, but simultaneously by Frequency Induction Heating
Outer ring, assembly technology of the liquid nitrogen cooling of central on a workpiece, does not have so far, and the present invention is cold by Frequency Induction Heating-liquid nitrogen
But assembly technology successfully applies to the assembling of upper cathode threaded mandrel and with hole round plate, cup body with holes, as depicted in figs. 1 and 2,
Heating cup body 2 is fixed in 4 bottom of sliding block that hand pulls forcing press 1, and hand pulls the fixed cooling cup body 3 in bottom of forcing press 1, the top of mandrel 5
Portion withstands on the inside of heating cup body 2, and the bottom of mandrel 5 is against the inside of cooling cup body 3.
In the present invention：
1st, precision CNC milling machinings：Cutter Body Processing with Machining Center technology is generally used at present, but in pure tungsten material
Processing with almost nil, CNC milling Machining Technology for Cutting is applied to complicated ion source ionization starting the arc chamber component by the present invention
Production, ionization starting the arc cavity configuration is complicated, and associated technical parameters have more than 100, and the accumulated error of technical parameter only has ± 0.05mm,
Product Precision is inadequate, and the present invention successfully produces various pure tungsten ionization starting the arc chambers, and realizes industrialization, wherein, CNC millings speed
Degree V (30~90m/min) and CNC milling feed amount Ft (8~25mm/min) is crucial and protection point, this processing technology is in mesh
It is unique on former world.
2nd, precision CNC turnery processings：Great Procedure Thread Numerical Control driving skills art is commonly employed in modern manufacturing industry, but pure
Processing utilization in tungsten, pure tantalum material is almost seldom, wherein, cutting speed V (10~25m/min) and amount of feeding Ft
(0.001mm/min~0.002mm/min), diesel oil coolant, cutter are this import of the waag of angular dimensions before oneself modification blade
Thread forming knife is crucial and protection point, complies fully with layout design standard with the screw thread electrode that above-mentioned technological parameter is processed, sends out
It is bright successfully to produce various repellels and cathode, and industrialization is realized, this processing technology is in a leading position in the world at present
Status.
3rd, accurate grinding is processed：Accurate grinding it is critical that dressing diamond nib conicity control 72 °~
78 °, when diamond pen is installed, nib should be made to be slightly below emery wheel center about 1~2mm, penholder tilts 10 °~13 °, emery wheel linear speed
Degree：10~22m/s, dressing lead：0.015~0.05mm/r modifies depth：0.02~0.1mm, part linear velocity：4~18m/
min；Workbench length feed speed during grinding；30~120mm/min；Grinding depth：0.005~0.015mm because tungsten, molybdenum,
Tantalum metal will be fixed on surface grinding machine work top by various frocks, the positioning of fixture, could carry out essence without magnetism
Close flat surface grinding processing, all frocks, the geometric tolerance of fixture are less than 5u, and dimensional tolerance is less than 8u.
4th, track formation mill processing:0.8u-1.0u is generally by the part arc-shaped surface roughness of Cutter Body Processing with Machining Center,
And the part arc-shaped surface roughness of this equipment processing is generally 0.6u, therefore the design of track formation mill is used, and makes tungsten part
Arc-shaped surface quality has qualitative leap, and compared with existing production technology, track formation mill processing is an innovation, as schemed institute
Show.
5th, sand paper is ground：The sand paper that the present invention uses is ground replaces sand paper successively by the size of 300 mesh to 600 mesh granularities,
Simultaneously using the NaOH solution of 6% mass fraction as lubricating fluid.
6th, magnetic grinding：Magnetic grinding stick is band magnetic stainless steel, and specification is6%
The NaOH solution of concentration is as lapping liquid, and grinding rod weight is equal with pts wt, and milling time is determined on a case-by-case basis.
7th, mechanically polish:The equipment of mechanical polishing is portable small polishing machine, and bistrique is home built, various shapes,
Mainly there are cylinder, taper, a spherical shape, material hard wool, with glass washing in hard wool surfaces, then by special-shaped wool table
Face is rolled across in 400 mesh diamond grits, in 100 DEG C of drying in oven, it is possible to carry out the mechanical polishing of various product.It is existing
Production technology connect knife in inner cavity and corner has and significantly connects tool marks, these positions processing roughness is generally 0.8u, accurate
Mechanical polishing is increased to 0.3u~0.5u with by these positions processing roughness, accurate compared with existing production technology
Mechanical polishing is the innovation of processing technology.
8th, electron beam welding is processed：The present invention selects equipment electron-beam welder EBW-6CH types, and invention key reasonably selects
Welding parameter of electron beam, weldingvoltage 52KV, 25 milliamperes of welding current, 6 seconds weld intervals/circle, welding focus value 0.705~
0.697 milliampere.
9th, micro EDM：The principle of electrical discharge machining is to be based on generating pulse between piece pole and tool-electrode
Property spark discharge, galvanic corrosion phenomenon is generated during electric discharge to remove extra metal, achievees the purpose that dimensioned, while by precision
Numerical control orbital head is mounted at the electrode of EDN machines, machined electrode is mounted on orbital head, this completes EDM curves to add
Work, the application of EDM translation screw thread machining techniques, realizes the breakthrough of tungsten product inner nut processing technology, this processing technology
It is pioneering in the world at present.
10th, Wire-cut Electrical Discharge Machining：Equipment choosing Japan Fa Nake (FANUC) α-oiE types, the parameter of slow wire feeding, electricity
Flow 1A~16A, voltage 6V~26V, 4~6rpm of speed, 1~2550T of line tension.
11st, electrochemical polish is processed：Tungsten, molybdenum electropolishing formula of liquid and process conditions statistical form
In conclusion Precision Machining is a kind of processing technology of multiple technologies synthesis, it is to obtain high form accuracy, surface essence
The necessary means of degree and surface integrity, precision processing technology have become the basis of current high-tech technical field.
The present invention has broken tungsten, molybdenum, the forbidden zone of tantalum metal product field of deep, is tungsten, molybdenum, tantalum metal product is in ion
The extensive utilization in injection field establishes technology theory basis.
Due to the successful application of the present invention, Xi Pu companies have become zero that world's ion source of ion implanter ionization plays arc chamber
The main supplier of component and assembly, the type in general offer market western at present are：GSD HE-10、GSD200E2、ⅦSion
80-200, VII Sta 80, EHP-500 and the new architecture constantly researched and developed, company is support with the present invention, just in active development ion
Implanter ion source assembly, it is in the near future, western general that the core component ion source for voluntarily producing and manufacturing ion implantation apparatus is total
Into.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring the substantive content of the present invention.
Claims (4)
- A kind of 1. nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly, which is characterized in that including according to The following steps of secondary progress：Precision cutting process；Accurate grinding is processed；Precise finiss polishing；Nontraditional precision machining；The step of precision cutting process, specifically includes following operation：Using the superhard coating hard alloy cutter below micron order on precision machine tool to green body carry out CNC precision millings cut and CNC precisions vehicle is cut；It is 30 ~ 90m/min and CNC that the CNC precisions milling, which cuts and in CNC precision vehicle cutting operations, controls CNC Milling Speeds V, Milling feed amount Ft is 8 ~ 25mm/min, and CNC vehicle cutting speeds V is 10 ~ 25m/min, and CNC vehicle cutting feed amounts Ft is 0.001mm/min~0.002mm/min；The step of accurate grinding processing, specifically includes following operation：The micro cutting that green body carries out is processed on precision grinder with emery wheel；The nib mould taper control of diamond pen on the precision grinder is 72 ° ~ 78 °, control the linear velocity of the emery wheel for 10 ~ 22m/s, dressing lead：0.015 ~ 0.05mm/r modifies depth：0.02~0.1mm；The step of precise finiss polishing, includes following operation：Sand paper grinding, magnetic grinding, the processing method of mechanical polishing are passed sequentially through, micro amendment is carried out to green body.
- 2. the nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly as described in claim 1, special Sign is that the nontraditional precision machining includes at least one of following operation：Electron beam process, micro EDM, Wire-cut Electrical Discharge Machining, electrochemical polish processing and Frequency Induction Heating- Liquid nitrogen cooling assembling.
- 3. the nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly as claimed in claim 2, special Sign is, in the electrochemical polish processing, sodium phosphate that electrolyte when being processed to the green body of tungsten material is 160g/L Solution, decomposition voltage are 20 ~ 24V, current density is 38 ~ 45A/dm2, electrolysis time be 90 ~ 120s；To the green body of molybdenum materials matter into Electrolyte during row processing is the mixed solution of phosphoric acid, chromic acid and water, decomposition voltage is 8 ~ 10V, current density is 20 ~ 80A/ dm2, electrolysis time be 90 ~ 120s.
- 4. the nontraditional precision machining method of ion source of ion implanter ionization starting the arc chamber assembly as claimed in claim 3, special Sign is, in the mixed solution of the phosphoric acid, chromic acid and water, the mass fraction of phosphoric acid is 80%, the parts by weight of chromic acid are 16%, The mass fraction of water is 4%.
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| CN1497655A (en) * | 2002-10-07 | 2004-05-19 | 株式会社东芝 | Ion source, ion injection equipment, manufacturing method of semiconductor device |
| CN2935461Y (en) * | 2006-04-24 | 2007-08-15 | 北京中科信电子装备有限公司 | Discharging arc room of long life ion source |
| CN101530917A (en) * | 2008-03-11 | 2009-09-16 | 上海西普钨钼业制品有限公司 | Method for manufacturing irregular part structure constituted by powder metallurgy pure tungsten materials |
| CN201799758U (en) * | 2010-08-20 | 2011-04-20 | 许加庆 | Tungsten electrode of large-power braze-welding tungsten-inert-gas (TIG) welding torch |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1497655A (en) * | 2002-10-07 | 2004-05-19 | 株式会社东芝 | Ion source, ion injection equipment, manufacturing method of semiconductor device |
| CN2935461Y (en) * | 2006-04-24 | 2007-08-15 | 北京中科信电子装备有限公司 | Discharging arc room of long life ion source |
| CN101530917A (en) * | 2008-03-11 | 2009-09-16 | 上海西普钨钼业制品有限公司 | Method for manufacturing irregular part structure constituted by powder metallurgy pure tungsten materials |
| CN201799758U (en) * | 2010-08-20 | 2011-04-20 | 许加庆 | Tungsten electrode of large-power braze-welding tungsten-inert-gas (TIG) welding torch |
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