CN1052735A - Standard source type thin film coaxial thermoelectric conveter - Google Patents
Standard source type thin film coaxial thermoelectric conveter Download PDFInfo
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- CN1052735A CN1052735A CN 90109299 CN90109299A CN1052735A CN 1052735 A CN1052735 A CN 1052735A CN 90109299 CN90109299 CN 90109299 CN 90109299 A CN90109299 A CN 90109299A CN 1052735 A CN1052735 A CN 1052735A
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Abstract
The present invention relates to a kind of measurement instrument that is used to set up the employing thermoelectric converter of normal voltage value, be used to realize that finishing low frequency, high frequency, the unified of ultrahigh frequency voltage standard with a standard sets up, its value directly is traceable to direct current and can be independently duplicated.It is placed in heater-type film-type thermocouple in the measuring seat of the coaxial configuration with two ports of input and output, input port imposes AC and DC voltage, produce voltage drop on the resistive film of film-type thermocouple, its pairing Joule heat makes the thermocouple film produce thermoelectrical potential, is set up the known voltage value and transmitted by output port on the resistive film end face by the alternating current-direct current method of substitution.
Description
The present invention relates to a kind of device of measuring electric variable, relate to a kind of standard metrology appliance that is used to set up the employing thermoelectric converter of normal voltage value or rather.
But the measured frequency scope of voltage measurement is extremely wide, from direct current to several gigahertz (GHZ)s even higher frequency.The method of measuring voltage mainly contains detection method, sampling method, thermo-electric method, bolometer method and penalty method etc., and alternating current is converted to direct current.
The voltage standard of countries in the world foundation at present to the low-frequency voltage standard below tens kilo hertzs, is used the low frequency thermoelectric converter standard of the F.L.Harmach of NBS exploitation more and is directly measured; Extremely high frequency, the ultrahigh frequency voltage standard of several gigahertz (GHZ)s can adopt the bolometer formula voltage standard of the M.C.Selby of NBS exploitation directly to measure to tens megahertzes; And, also not having the directly standard of metering for tens kilo hertzs of voltages to the upper frequency of tens megahertzes, the coaxial type thermoelectric converter of generally using the F.L.Harmach of NBS exploitation is as the transmission standard.
The present existing high frequency coaxial thermoelectric converter that is based upon on the thermoelectric effect basis, all belong to the terminator type device that has only an output port, be single cylinder chamber structure, form by high frequency or ultrahigh frequency thermocouple serial connection bar-shaped current-limiting resistance of film and metallic cylinder.The sealing of the terminal in chamber, be coaxial outer conductor be again radome, input end adopts the coaxial fitting of certain pattern.When input voltage, flow through electric current in the heater strip, produce temperature rise and make other thermocouple two ends of putting produce a thermoelectrical potential.When the thermoelectrical potential that HF voltage and DC voltage produced that applies respectively equates, just think that the effective value of HF voltage equals dc voltage value.But in fact two values are discrepant, alternating current-direct current difference that Here it is, i.e. AC-DC conversion error.
The shortcoming of above-mentioned high frequency coaxial thermoelectric converter is the raising along with frequency, and its impedance operator variation shows as the fluctuation of alternating current-direct current difference, can be up to 2% even 20% in 1 gigahertz (GHZ).Thereby the coaxial thermoelectric device can be used as the primary voltage standard when low frequency,, just will be used as standard of time one-level its calibration back by the standard of upper level then as the transmission standard at high frequency, ultrahigh frequency.
Use vacuum type thermocouple and two kinds of dissimilar thermoelectric conversion elements of film-type thermocouple and form the coaxial thermoelectric device of two major types.Adopt the coaxial thermoelectric device of vacuum type thermocouple, the alternating current-direct current difference is 5% to 20% when 1 gigahertz (GHZ).The coaxial thermoelectric device of the employing film-type thermocouple of at first succeeding in developing by the upright company of day intrinsic safety, the alternating current-direct current difference has obtained certain improvement, but only be applied in the product of An Li company as voltage reference device in the machine, because its terminator cavity physical dimension can't accomplish broadband compensation, thus to the accuracy of 1 gigahertz (GHZ) can only reach ± 2%.
Because in sum problem, thereby set up the technological difficulties that the technology that is used for directly metering from tens kilo hertzs of voltage standards to the tens mhz frequency scopes also becomes this field.China's magazine " metering journal " the 5th the 2nd phase of volume of April in 1984 is " HF Coaxial Thermal Transfer Standard " P.86, be in series by high frequency rod resistance and ultrahigh frequency vacuum thermocouple, place on the axis of metallic cylinder, the article states and understand by Theoretical Calculation and experimental verification and determine tens kilo hertzs of alternating current-direct current differences to the tens megahertz frequency ranges, accessible accuracy during for 1MHz is ± 0.01%, during 10MHz be ± 0.03%, during 30MHz be ± 0.1%, during 50MHz be ± 0.2%.Present this theory and experimental verification work are still being carried out in NBS.
The purpose of this invention is to provide a kind of novel voltage standard device, not only can directly set up aforementioned tens kilo hertzs of voltage standard values to the tens megahertz operating frequency ranges, and reach the accuracy index, the high frequency of being set up with present various countries, the accuracy unanimity of ultrahigh frequency primary voltage standard, and can cover from several conspicuous operating frequency ranges to several gigahertz (GHZ)s, and has a good frequency characteristic, its alternating current-direct current difference need not be calibrated, thereby realize finishing low frequency with a standard, the unified of high frequency and ultrahigh frequency voltage standard set up, be a kind of standard items that can be independently duplicated, its value can arrive DC voltage in direct north source.
Standard source type thin film coaxial thermoelectric conveter of the present invention, used heater-type film-type thermocouple, be placed in the measuring seat of coaxial configuration, can be considered perpendicular to one section coaxial cable that heater-type film-type thermocouple is housed in the electromagnetic field transmission direction with two ports of input and output.
The present invention includes measuring seat, the coaxial cable that is made of inner wire and outer conductor forms cavity and has input, export two ports, insulating substrate perpendicular to inner wire is arranged in the cavity, it is right to be coated with resistive film on the end face of insulating substrate, it is right to be coated with the thermocouple film on another end face, form heater-type film-type thermocouple, resistive film is in being connected to, between outer conductor with in, the reliable contact of outer conductor and towards output port, thermocouple film pair with in, outer conductor is isolated and is drawn outside the measuring seat, when input port imposes interchange or DC voltage, resistive film on produce voltage drop, the pairing Joule heat of this voltage drop makes the thermocouple film produce thermoelectrical potential to being heated, monitor that critically this thermoelectrical potential can be according to the power principle of substitution, utilize the calorimetric technology to replace HF voltage with known direct current or low-frequency voltage, by means of this alternating current-direct current method of substitution, thereby on insulating substrate resistive film end face, set up the known voltage value, and transmit by output port.
Describe technology of the present invention in detail below in conjunction with the embodiment accompanying drawing.
The coaxial thermoelectric device structure principle chart of accompanying drawing 1. prior aries
Accompanying drawing 2. standard source type thin film coaxial thermoelectric conveter structure principle charts of the present invention
The structure and the side view 3-1 thereof of heater-type film-type thermocouple in accompanying drawing 3. accompanying drawings 2
Accompanying drawing 4. standard source type thin film coaxial thermoelectric conveters are used for the electrical schematic diagram of voltage standard metering
The example structure figure of accompanying drawing 5. standard source type thin film coaxial thermoelectric conveters
Referring to accompanying drawing 1, has garden tube cavity configuration, the metal garden tube 1 of the terminal sealing in chamber, inner wire 2 in the chamber is the coaxial cable of outer conductor, the heated filament 4,5 of serial connection bar-shaped current-limiting resistance 3 of film and thermocouple is a thermocouple, and the heated filament 4 of thermocouple 5 is made by current flow heats and produces thermoelectrical potential output.
Because this coaxial thermoelectric device is designed to the tabular form structure, the load type structure that promptly has an input port, use as a kind of voltage table, due to the standing wave of inside configuration, its loaded impedance changes with the variation of frequency and becomes the key factor that causes measuring error, show that the AC and DC under high frequency, the ultrahigh frequency is poor, and owing to make, particularly the welding of thermocouple causes the inconsistency of identical product.
Referring to accompanying drawing 2, be designed to source formula structure and promptly have input U
iWith output U
0The measuring seat of the coaxial configuration of two ports, form by inner wire 24 and outer conductor 25, the both ends of the surface of insulating substrate 21 be coated with respectively resistive film to 22 and the thermocouple film to 23, form heater-type film-type thermocouple, be positioned on the vertical plane of measuring seat inner wire 24, resistive film to 22 towards output port U
0, the thermocouple film to 23 towards input port U
iThe resistive film of heater-type film-type thermocouple contacts with outer conductor 25 with inner wire 24 on AA ' xsect reliably to 22, the thermocouple film is then isolated with inner and outer conductor 24,25 23 and is led to outside the measuring seat, during enforcement, thermocouple film on AA ' end face must be vertical with inner wire 24, promptly perpendicular to the electromagnetic field transmission direction.
Thin film coaxial thermoelectric device of the present invention is designed to standard source formula structure by two-port, is to use as a kind of voltage source, thereby the thermoelectric converter of thoroughly having broken away from prior art uses the error component that is brought as load.Only relevant in principle with the frequency response of film thermocouple element itself; and since the resistive film opposite towards output port; output directly is taken to the normal voltage set up on AA ' end face (or by a very thin dividing plate output that is used for protective film thermocouple element;) have strict voltage reference plane, not only there are good Frequency Response but also product to have uniqueness.
Referring to accompanying drawing 3 and 3-1 thereof, side heating film thermocouple comprises insulating substrate 21, be coated with on the one end face resistive film to 22 and area district by being equipped with oblique line among large-area gold-plated district such as the figure and inner wire 24 and outer conductor 25(figure in do not draw) reliably contact, be coated with the thermocouple film to 23 on another end face of insulating substrate 21, by antimony telluride S
bT
eLight color district among (dark district among the figure), the bismuth Bi(figure) two kinds of materials constitute, and the thermocouple film is all isolated with inner and outer conductor 23, the positive and negative electrode exit of thermoelectrical potential is arranged and be coated with gold, so that reliably draw.
In the enforcement, the right former degree of resistive film must be enough little, and promptly working as frequency of operation is last prescribing a time limit, and the right former degree of resistive film should be less than electromagnetic field to 0.07 of the film metal piercing degree of depth, just can think that resistive film has same resistance under direct current and radio frequency, and not influence the normal transmission of electromagnetic field.
Referring to accompanying drawing 4, standard source type thin film coaxial thermoelectric conveter 41 of the present invention, its input port U
iMeet radio frequency alternating current source AC, output port U
0Connect tested Table V, thermocouple meets digital voltmeter DVM to thermoelectrical potential output positive and negative electrode, and levelling R makes tested Table V that one fixing indication V be arranged
m, and write down the thermoelectrical potential value emf of DVM indication this moment, with the radio frequency AC source in another direct current DC standard source alternate figures, levelling R, when the value of indicating among the DVM was consistent with the former emf value, DC value at this moment was exactly radio frequency V accurately
RfValue, and the error of tested Table V is V
mWith V
RfDifference, can finish the work of other voltage standards being carried out error metering with standard source type thin film coaxial thermoelectric conveter of the present invention by above-mentioned measuring process.
Referring to Fig. 5, the embodiment of the invention is pressed the system design of 7mm coaxial cable, overall size is φ 40 * 40mm, the housing 51 that has the negative coaxial input adapter nut of N type is being fixed inner wire 53 by support ring 52, two the ring-type semicircles of the thermoelectrical potential extraction electrode plate 54 of thermocouple for being divided into two accompany one deck insulation film 55 between the inner face of they and housing 1; They and output are being laid heater-type multi-element film thermocouple 57 between the pole plate 56, and output pole plate 56 contacts with the resistive film external electrode of film thermocouple 57.The thermoelectrical potential extraction electrode plate 54 of thermocouple contacts with the thermocouple film positive and negative electrode of film thermocouple 57, and is drawn outside the shell by a pair of plug 58.The coaxial out splice going splice nut 59 of replaceable pattern fastens and makes output pole plate 56 to contact well with housing 51 the whole parts in addition in the housing 51 by contact ring 511 under the effect of gland nut 510.The inner wire output plug 512 of replaceable pattern is connected by means of the elasticity with inner wire 53 and compresses film thermocouple 57, makes that electrode has good the contact with inner wire 53 in the resistive film.Formation has N type negative input adapter and replaceable out splice going splice form, the voltage standard device of the coaxial configuration of heater-type film thermocouple is housed.Can change other part 59 and 512 easily, form and the adaptive interface of tested table.Can directly measure high resistant sonde-type voltage table, also can directly measure the low-resistance table with coaxial probe, 513 is connection state with NRS type power meter asexual joint shown in the figure.
Standard source type thin film coaxial thermoelectric conveter of the present invention has been used heater-type multi-element film thermocouple, has formed a constant pressure source formula voltage standard device based on simple AC and DC method of substitution principle.Both keep bolometer in the good spoke of hyper band characteristic frequently, overcome bolometer temperature drift, shortcoming that the high frequency seat is too big simultaneously; Kept the precision of coaxial thermoelectric device under low frequency again in principle, overcome the shortcoming of its impedance mismatching simultaneously in transmission line characteristics, especially to tens mhz frequency scopes, can directly set up enough voltage value accurately at tens kilo hertzs, and can cover from several conspicuous operating frequency ranges to several gigahertz (GHZ)s.
First sample of the present invention is 0.01% with the inconsistency of traditional thermoelectric converter comparison at 1 kilo hertz to the 0.1 megahertz operating frequency range, inconsistency with the bolometer comparison under the frequency of operation of 1 gigahertz (GHZ), 2,5 gigahertz (GHZ)s is 0.2%, 0.3%, and theoretical work frequency of the present invention can reach more than 10 gigahertz (GHZ)s.
Claims (3)
1, a kind of heater-type thin film coaxial thermoelectric device, comprise the measuring seat of the coaxial configuration of forming by inner wire and outer conductor and be coated with the heater-type film-type thermocouple of resistive film respectively, it is characterized in that forming with the right insulating substrate of thermocouple film by two end faces:
1) measuring seat of the described coaxial configuration of being made up of inner wire and outer conductor is the standard source formula structure with input, two ports of output;
2) the resistive film opposite end face of described heater-type film-type thermocouple is towards the output port of described measuring seat.
2, a kind of heater-type thin film coaxial thermoelectric device according to claim 1 is characterized in that described heater-type film-type thermocouple lays perpendicular to its axis in described measuring seat.
3, a kind of heater-type thin film coaxial thermoelectric device according to claim 1 and 2, the resistive film that it is characterized in that described heater-type film-type thermocouple is between the inner wire and outer conductor that are attempted by described measuring seat, and reliably contacts with inner wire and outer conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90109299 CN1052735A (en) | 1990-11-22 | 1990-11-22 | Standard source type thin film coaxial thermoelectric conveter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90109299 CN1052735A (en) | 1990-11-22 | 1990-11-22 | Standard source type thin film coaxial thermoelectric conveter |
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| Publication Number | Publication Date |
|---|---|
| CN1052735A true CN1052735A (en) | 1991-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90109299 Pending CN1052735A (en) | 1990-11-22 | 1990-11-22 | Standard source type thin film coaxial thermoelectric conveter |
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| CN (1) | CN1052735A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101566643B (en) * | 2008-04-22 | 2012-05-09 | 中国计量学院 | Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof |
| CN101566506B (en) * | 2008-04-22 | 2013-07-03 | 中国计量学院 | Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof |
| CN107732404A (en) * | 2017-08-31 | 2018-02-23 | 西安空间无线电技术研究所 | A kind of integrated dual spiral antenna |
-
1990
- 1990-11-22 CN CN 90109299 patent/CN1052735A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101566643B (en) * | 2008-04-22 | 2012-05-09 | 中国计量学院 | Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof |
| CN101566506B (en) * | 2008-04-22 | 2013-07-03 | 中国计量学院 | Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof |
| CN107732404A (en) * | 2017-08-31 | 2018-02-23 | 西安空间无线电技术研究所 | A kind of integrated dual spiral antenna |
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