CN105244344B - Used in the Inductive component of integrated circuit, segment set is formed into the transformer and inductor of circuit - Google Patents
Used in the Inductive component of integrated circuit, segment set is formed into the transformer and inductor of circuit Download PDFInfo
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- CN105244344B CN105244344B CN201510377927.1A CN201510377927A CN105244344B CN 105244344 B CN105244344 B CN 105244344B CN 201510377927 A CN201510377927 A CN 201510377927A CN 105244344 B CN105244344 B CN 105244344B
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0033—Printed inductances with the coil helically wound around a magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/30—Fastening or clamping coils, windings, or parts thereof together; Fastening or mounting coils or windings on core, casing, or other support
- H01F27/303—Clamping coils, windings or parts thereof together
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
The Inductive component of such as transformer can be by including that magnetic core is improved.However, the advantage with magnetic core will lose if magnetic core enters magnetic saturation.A kind of mode of saturation is avoided to be to provide biggish magnetic core, but this is expensive in the environment of integrated circuit.Present inventors have recognized that magnetic flux density changes with the position of magnetic core in integrated circuit, so that part magnetic core is saturated earlier than other parts.The final performance of magnetic core is reduced in this way.Present disclose provides the structures that delay early stage saturation starts, so that transformer processing is more high-power.
Description
Technical field
The present invention relates to a kind of improvement inductor manufactured using microelectric technique or transformer is improved, and including in this way
Inductance element integrated circuit.
Background technique
Known magnetic component (such as, inductor and transformer) has many purposes.For example, inductor can be used for manufacturing
Filter and resonance circuit, or can be used for switch type power converter to increase or decrease input voltage, for generating difference
Output voltage.Transformer can be used for from a circuit to another circuit transmission power supply or signal, and provide high level simultaneously
Be galvanically isolated.
Inductor and transformer can manufacture in integrated circuit environment.For example, as it is known that being usually formed spiral or spiral
Approximation conductor spaced apart can be formed in or semiconductor base on or within, to form one as inductor or transformer
Partial coil.The spiral inductance separated in this way can placed side by side or stack arrangement.
" coil " of the ferromagnetic core in integrated circuit can also be formed.However, such be arranged in its performance is in
It is existing non-linear.This is beneficial to provide improved component in integrated circuit.
Summary of the invention
According to the disclosure in a first aspect, providing a kind of Inductive component in integrated circuit.Inductive component includes: magnetic
Core；Multiple conductors are arranged on the first side of magnetic core；And multiple conductors, it is arranged in second side of magnetic core.Simply to rise
See, each conductor on the first side of magnetic core and second side can be considered respectively in magnetic core following below and above, is formed and surrounds magnetic core
Coil part.Conductor on magnetic core is connected to the conductor under magnetic core by multiple conductive connections, to form First Line
Circle.Inductive component further comprises compensation device, such as collocation structure for compensating saturation nonlinearity or heterogeneity.
Accordingly, it is possible to provide on a kind of integrated circuit or as part thereof of magnet assembly, wherein the magnetic core is more evenly
Saturation.This generates the bigger linearity and improved power transfer again in turn in operating area, wherein there is no
Magnetic core has reached magnetic saturation.This may be implemented, without causing magnet assembly in the substrate (such as, semiconductor) for carrying magnet assembly
Increased footprint.
Advantageously, multiple conductors above and below magnetic core interconnect in this way, to form the around the magnetic core core
One and second coil, to form transformer.
Collocation structure may include the parameter for changing first coil.The parameter can be the wire turn density of first coil, when
When they pass through the other side from the side of coil, it can be realized by changing the spacing of conductor；Interval between conductor；Or
The width of conductor.Two or more parameters can combine variation.When inductance component includes multiple coils, such as because it is to become
Depressor, then the parameter of the second coil can also change as described above.
Advantageously, in embodiment of the disclosure, the conductor width for forming the conductor of first coil increases with from magnetic core end
Add distance and increase, preferably from the both ends of magnetic core.This arrangement, which has to reduce, surrounds magnetic core (end for being located remotely from magnetic core)
Part coil effective wire turn density the advantages of, and avoid the unnecessary increase of coil resistance simultaneously.
Advantageously, which can be formed as being separated from each other by insulating regions multiple laminated portions of magnetic active material.Have
Sharp ground, the thickness and/or dielectric material provided between the multi-layered magnetic functional material for forming core can be periodically or once in a while
Variation.
The shape of the magnetic core can change, such as have reduction wide from simple rectangular shape to compared to central area
The end of degree.The spatial variations of core shapes can be used for modifying the Distribution of Magnetic Field in magnetic core, so that the magnetic flux in magnetic core is close
Degree distribution is relatively uniform.Wherein magnetic core is stacked core, and the shape of each lamination can change, to modify the magnetic in magnetic core
Flux density distribution.
Preferably, the inductance element is formed in the substrate for carrying other integrated circuit components.Substrate, which can be, partly leads
Structure base board, the most common example are silicon.However other matrix can be used and can be selected as in high frequencies of operation.Such base
Bottom may include glass or other semiconductors (such as, germanium).
According to the second aspect of present disclosure, providing a kind of formed includes more than first a conductors of deposition in substrate
Magnet assembly method；Insulator is formed between multiple conductors；Magnetic core is formed on insulator；On magnetic core
Side constitutes insulating layer；Multiple conductors are formed on the insulating layer；It is led in interconnection pattern in more than first a conductors and more than second
It is formed and is electrically interconnected between body, so as to the coil formed around the magnetic core.At least one of magnetic core or winding are non-uniform.
Heterogeneity can be realized by the width or thickness of change magnetic core or along winding/wire turn density of the coil of coil axis.
Detailed description of the invention
Example is described implementation of the disclosure by way of only non-limiting example with reference to the drawings, in which:
Fig. 1 is the schematic diagram of the transformer formed in integrated circuits；
Fig. 2 is the plan view of the centre-tapped transformer in integrated circuit；
Fig. 3 is the circuit diagram for indicating the circuit for measuring the function that magnetic flux density is coil current；
Fig. 4 shows the curve graph of the magnetic flux density vs coil current of the typical transformer on integrated circuit；
Fig. 5 is the curve graph for having the magnetic flux density vs coil current of beeline approaching to its response that coil is added,
The advantages of for illustrating the disclosure；
Fig. 6 is to indicate the coil around rectangular magnetic core along coil axis, the curve graph of the wire turn density as position function；
Fig. 7 is the schematic diagram of the coiling of coil, is suitable in inductor or transformer according to the present invention；
Fig. 8 is the cross-sectional view by laminated magnetic core；
Fig. 9 is the schematic cross-section by constituting the equipment of the embodiment of the present disclosure；
What the profile that Figure 10 shows wherein magnetic core was modified is further change in；With
Figure 11 is that the curve graph of the AC power transmission of transformer is used for basis as the function of direct current (DC) bias current
The variable wire turn density equipment of the embodiment of Fig. 7 and the equivalent apparatus with constant wire turn density.
Specific embodiment
Fig. 1 schematically shows the example of the transformer 1 in a part for being formed in substrate 4 with magnetic core, usually by referring to
Number 2 indicates.Advantageously, substrate 4 is semiconductor base so that other component (such as, driving circuit and with transformer 1 just
Grade and the associated acceptor circuit of secondary windings) substrate 4 that can also be formed in same integrated antenna package or physically
On un-mixing bases bottom.However, in some applications, non-semiconductor base material can be used for their electric property, such as higher
Impedance.
For illustrative purposes, the structure around magnetic core 2 (such as, such as insulation material layer of polyimides) is saved
Slightly.Therefore, structure shown in FIG. 1 is only substrate 4, magnetic core 2 and conductor rail, and the conductor rail provides any for being formed in magnetic core 2
In first layer and the second layer on side and multiple conductors of (and also parallel with plane of Fig. 1) are parallel in the plane of substrate 4.
Therefore, multiple conductors are present in above and below magnetic core 2.The second layer of conductor is considered on magnetic core 2, therefore is compared
First layer is closer to viewer, and the first layer is between magnetic core 2 and substrate 4.Conductor across 2 lower section of magnetic core is shown in Fig. 1
In chain profiles, and solid outline is shown in by the conductor of the top of magnetic core 2.
First coil or winding (for example, armature winding 10) can be formed by linear guides part 12,14,16 and 18,
Wherein, part 12 and 16 is formed in the second metal layer of 2 top of magnetic core and part 14 and 18 is respectively formed under core 2
In the first metal layer of side, and linked together by through-hole or equivalent interconnection area 20,22,24.Second winding 30 can be by putting down
Face orbit portion 32,34,36 and 38 form, and part 34 and 38 is formed in the second metal layer of 2 top of magnetic core and portion
32 and 36 are divided to be formed in the first metal layer of 2 lower section of magnetic core, and part is by the mode or other interconnections appropriate of through-hole
Part 40,42 and 44 links together.As can be seen that primary and secondary coil is formed around the helical structure of magnetic core 2.It is primary
It is insulated with secondary coil from magnetic core 2, and insulated from each other.Therefore, logical without electricity between armature winding 10 and secondary windings 30
Road, and be magnetic by the main mechanism of coil coupling together.Secondary parasitic capacitance can also be formed primary and secondary around
Signal flow paths between group, but these are quite few significant.Y-direction in Fig. 1 is it is also assumed that be coil axis.
Fig. 2 shows the more true plan views of the transformer of type shown in Fig. 1, but actually can shape on the integrated
At.As can be seen that armature winding 10 and the spiral of secondary windings 30 its mode 2 around magnetic core.Through-hole (generally with label 50)
The conductor of first layer and the conductor of the second layer are connected, to form the coil of wounded core or the plane approximation of winding.Winding
It can be centre cap, the track extended as shown in Figure 2 from the central cross of each coil.In transformer shown in Fig. 2, formed
The width of each conductor of winding is uniform, the space between winding adjacent in any conductor layer or conductor.In general,
Substantially minimized in the space in layer between adjacent conductor, it is consistent with the Ohmic resistance of coil is reduced, while giving phase
There is the expectation breakdown voltage between coil of enough intervals to realize transformer between adjacent conductor, and manufacturing defect is avoided to generate
Coil between short circuit.The uniform winding of diagram can maximize the quantity of given personal assets.
Although describing two-winding transformer, embodiment can have more than two winding.Equally, single tap winding can
It is used to form auto-transformer, or single winding can be used to form inductor.
When forming equipment (such as, transformer), saturation current (can be become before core saturation generation by armature winding
The maximum current of depressor) it is the determinant attribute of transformer and its ferromagnetic core and the general power rated value for being linked to transformer.Cause
This, maximizes the saturation current for giving big small transformers and power transmission is in demand.
Magnetic flux density known to those skilled in the art in ideal solenoidal magnetic core is by core material and winding or core knot
Structure determines, because the inductance of coil L is
Wherein
μ 0=permeability of free space=4 π x 10-7Hm-1
The relative permeability of μ r=magnetic core
The quantity of the revolution of N=coil
T=core thickness (height)
W=magnetic core width
L=core length
So t w (it is represented by t x w)=magnetic core cross sectional area
0 μ r H of magnetic flux density B=μ
Wherein for ideal solenoid
Finally, for long solenoid, the magnetic flux density of magnetic core becomes:
B=μ nI
Wherein, n is wire turn density (rotation number of per unit distance), and I is the electric current in coil.Becoming magnetic saturation and its
(case of materials that fully saturated, then before 1) its magnetic permeability drops to, magnetic material can only for the significant decline of relative permeability
Take certain magnetic flux.Therefore, the wire turn density and saturation flux density of relative permeability built-up coil determine equipment saturation electricity
Stream.
However, magnetic interference is towards solenoidal end, therefore magnetic field strength H adjacent end reduces.Further problem
It is the presence of demagnetizing field.Demagnetizing field generates the magnetic field of the body interior of magnetic core, and it is used in the opposite direction from helical
Pipe applies electric field.The end of demagnetizing field towards magnetic core is most strong.The spatial variations of demagnetizing field can become relative to the space of magnetic permeability
Change to describe.Because demagnetizing field obtain it is stronger towards the end of magnetic core, relative permeability towards end decline, it is than in magnetic core
The heart needs higher electric current with the end of magnetic saturation magnetic core.
In general, demagnetizing field becomes stronger when solenoid is shorter.In addition, no matter applying or demagnetization, magnetic field exists
In three dimensions.Therefore, although magnetic core be it is substantially planar, undergo in some regions of its end, and that is out flat
The plane of face magnetic core.This creates the terminal different fields insides to pretend as the function of position in magnetic core.
As these factors as a result, due to uneven distribution in magnetic core magnetic flux density, ferromagnetic magnetic core of transformer can meet with
It is saturated by the early stage in central magnetic core area.The beginning (being grown in spatial dimension when bias current increases) of the saturation introduces transformer
Early stage imperfection energy therefore limit available saturation current.
Fig. 3 shows the device that can be used for the performance of measuring transformer.As indicated, (it can be electricity to DC electric current bias 52
Stream source) for applying armature winding 10 of the DC electric current by transformer.Inductor 54 generally includes series direct current bias generator 52, with
High impedance is presented to AC signal.The series connection DC of AC signal generator 56 is used to bias superposition AC signal to DC every capacitor 58.It is secondary
Then the voltage occurred in the output of winding 30 measures, be subsequently compared with the voltage as provided by AC driving source 56.This
Allow the instantaneous AC power transfer of transformer to be measured as the function of DC bias current.
It is shown in Fig. 4 for the experiment curv figure with the transformer of the uniform winding relationship.As can be seen that at a fairly low
Bias current, the ratio of Vout and Vin are relatively high, and can be considered as in its magnetic core being to operate to become in unsaturated region
Depressor.Therefore, the small change of Effective permeability and primary current indicates the high level of relativepermeabilityμr.On the contrary, when DC is biased
When electric current becomes larger, magnetic core is fully saturated, outputIt is reduced to lesser value, this is more closely similar to air core transformer, because
For when the small change of electric current, ferromagnetic core can no longer provide the magnetic flux density of enhancing.
Fig. 5 repaints the data of Fig. 4 to become apparent from display saturation and unsaturated region, and also with straight line is approximate
Part suitable for the figure.
It is transition region between unsaturation region and fully saturated region, is generally referenced as 60, wherein magnetic permeability is satisfied from non-
Be transitioned into fully saturated value.
Mathematical modeling shows that the magnetic flux density B in ferromagnetic core is non-uniform, and in edge or the end of the core
It dies down, and fiercer towards the center of core.As a result, the central portion of magnetic core starts to be saturated when DC bias current increases,
It is indicated by the point in Fig. 5, in the point, ratioStart to reduce around the region for the figure for being generally referenced as 62.The area of saturation
Then continue to increase from the middle to both ends, until magnetic core becomes fully saturated.
It is desirable that magnetic core, which is transitioned into saturation state, will start at higher bias current, it can operate from unsaturation and be saturated
Operate more suddenly transition.This will make the magnetic core of the intended size more power of processing and electric current before saturation generation, although
The then decline rapidly of its performance.
Present inventors have recognized that it is full with the end earlier than magnetic core to reduce the tendency of the central portion of magnetic core to take measures
With.This can be realized by the structure feature of magnetic part, and in one embodiment, this is the line by changing coil
What circle density was realized as the function of the distance along coil axis.
Fig. 6 is schematically shown along with any one unit LCLength magnetic core, wire turn variable density be used as away from
From function curve graph.As can be seen that the wire turn density can increase and (such as be indicated with x=0 and x=1) towards the end of core, court
It is reduced to the center of core to reduce the tendency of central portion early stage saturation.
Coil dimension in integrated circuit around magnetic core is quite compact, and being therefore less likely to circle can be with excellent in Fig. 6
The smooth change mode that changing curve indicates is modified, but gradually approximation is also possible to as shown in fig. 6.It is gradually close as applying
Like to wire turn density as a result, it is possible to achieve rolling density as shown in Figure 7, wherein the coil may include spaced apart leads
Body, wherein only showing top layer, but corresponding pattern is formed on the lowest level under magnetic core 2.Conductor bar is arranged to obtain court
There is a times in the coil (being appointed as density 1) of relatively low rolling density and the region of hub of a spool to the center portion of coil
The intermediate rolling density (being appointed as density 2) of side.The either end of coil has compared to center and the higher volume of intermediate density
Around density, it is appointed as density 3.In the illustrated embodiment, different density is led by the different piece for changing in coil
Body width is realized.The first part of coil includes the relatively wide strip of conductive material, is appointed as with width w1 and leads
100,102 and the 104 of clearance distance g1 between body.The middle area (density 2) of loop density includes having conductor width w2 and interframe
The conductor 90,92 and 94 of conductor clearance gap g2, and similar earthed conductor 110,112 and 114.End with highest rolling density
Portion's (density 3) includes conductor 80,82 and 84 and similar earthed conductor 120,122 and 124, has width w3 and transconductor spacing
g3。
In Figure 11, according to the embodiment of Fig. 7 and with same core area and identical the number of turns but there is constant wire turn density
Equivalent of the apparatus, provide transformer AC power supplies transmitting as direct current (DC) bias current function curve.As shown in figure 11,
Compared with the equipment that the whole length along equipment has constant wire turn density, the curve of variable wire turn density is biased in higher DC
Electric current experience output voltage substantially reduces the ratio of input voltage (Vout/Vin).Also as shown in Figure 11, according to Fig. 7 can
The saturation current of modified line circle density equipment can be about 550mA, and the saturation current of corresponding constant wire turn density equipment can be with
It is 455 milliamperes.Therefore, compared with the constant wire turn density equipment of correspondence, according to the full of the variable wire turn density equipment of the embodiment of Fig. 7
It can be high by 20% or so with electric current.
Gap between changeable conductor, and keep the conductor width identical, so that w1=w2=w3 and g3 > g2 > g1.So
And although assign it is generally desirable to magnetic characteristic, compared to by keep adjacent conductor between gap it is identical, this structure can
It is not intended to increase to generate coil resistance, so that g1=g2=g3, and then change the relatively wide of conducting element w1, w2 and w3
Degree, so that w1 > w2 > w3.The width for forming the conductor of coil is closed, rather than changes dielectric gap, maximizes and carries electric current
By the number of conductors (for giving the conductor of thickness) of coil, to reduce resistance.
Ensure that the magnetic flux generated by armature winding 10 is effectively coupled to using the ferromagnetic core with opposite high permeability
Secondary windings 30.
However, as undergone in large scale transformer, the magnetic flux and 2 phase interaction of magnetic core that are generated around armature winding 10
With, and the vortex 2 flowed in magnetic core can be caused.These eddy currents flow through the resistance material of magnetic core 2 and generate loss mechanisms.This
The efficiency of magnet assembly is reduced, and when primary winding energization frequency increases, it can be with itself performance in the case where transformer
For obviously increasing in the coil resistance of primary and secondary winding.
Using the experience of large scale transformer, the method for solving eddy current problem is for magnetic core to be segmented into insulated from each other more
A part.In the case of an integrated circuit, it is believed that simplest method is that a series of grooves are formed in magnetic core, the longitudinal direction of groove
Axis is parallel to be extended by the magnetic direction that winding generates, and in this case, groove can be from the top of Fig. 1 to Fig. 1 (Y-direction)
Bottom operation, so that magnetic core is divided into multiple parallel " fingers ".In fact, in micro- scale environment of integrated circuit,
This method will be it is very unfavorable because thin finger then shape anisotropy will be presented, this will lead to ferromagnetic material
Magnetic easy axis extends along the Y-direction of Fig. 1.This will cause the low value of biggish hysteresis loss and saturation current in material, this can pass through
So that magnetic easily direction is avoided along X-axis (level) extension of Fig. 1.This arrangement will lead to " hard " direction parallel magnetic field,
And Y-axis, and apply on magnetic field in much broader range, the direction usually has much smaller hysteresis loop, and returns in magnetic hysteresis
It works in the substantial linear region of line.
However, magnetic easy axis can keep direction " X " in Fig. 1, each layer of presence if magnetic core is divided into multiple individual courses
In the X-Y plane of Fig. 1.During the deposition of flux material layer, light axis can be defined.Multiple technologies are for those skilled in the art
Be it is known, do not need to illustrate herein.
Fig. 8 schematically shows the cross section of the magnetic core 2 in Fig. 1.Although hereafter showing relative to Fig. 1 for convenience
Meaning plan view and direction specified in it are described, it should be understood that the magnetic core 2 of Fig. 2 can be with the wire turn variable density of constitutional diagram 7
And/or the core change in size of Figure 10.Cross section shows the layer stacked in Z-direction from the upward work of substrate 4 perpendicular to the plane of Fig. 1
Make.Fig. 8 is not drawn on scale, and the size of component layer is not exemplified by ratio relative to each other within magnetic core 2, the ruler of magnetic core 2
Very little be also not correctly shows relative to the rest part of integrated circuit.
As shown in figure 8, substrate 4 can have one layer be formed thereon or more between the substrate 4 and base layer of magnetic core 2
Layer material is generally designated as 150.Layer 150 may include that metal track forms a part of the first metal layer shown in FIG. 1 simultaneously
It and can also include one or more layers insulating materials, such as aluminium nitride or polyimides.
The magnetic core 2 includes multiple layers.Under normal circumstances, the first subdivision (being generally designated as 160) of magnetic core includes the
The layer 170,172,174,176 and 178 of one insulating materials, first insulating materials are arranged in the layer with magnetic functional material
180,182,184,186 and 188 alternating sequence.In the present embodiment, five layers of magnetic functional material is located at being alternately stacked
On five layer of first insulating materials.It should be pointed out that magnetic functional material and the first insulating materials is less or actually more
Layer can be used to form the first subdivision 160.
The layer 200 (it can be different from the first insulating materials) of second insulating materials is formed in the first subdivision of magnetic core 2
On 160.Alternatively, the relatively thick-layer of the first insulating materials can be deposited.The layer 200 of second insulating materials can be deposited directly to
The top layer 88 of magnetic functional material in first subdivision 60.Alternatively, barrier layer can be formed in the second insulating materials
Layer 200 and magnetic functional material top layer 188 between.This barrier layer 190 is shown in fig. 8.For convenience's sake,
Barrier layer 190 can be formed by the first insulating materials.As previously mentioned, the second subdivision (being generally designated as 210) of magnetic core 2 includes magnetic
The alternating layer of sexual function material and the first insulating materials, the second subdivision are formed on layer 200.Magnetic functional material A is most
Lower layer 220 can be deposited directly to the layer 200 of the second insulating materials.However, in one embodiment, the first insulation material layer
222 are formed in the top of the second insulation material layer 200, and are used as the seed layer of the layer 220 of magnetic functional material.Therefore, such as Fig. 8
It is shown, the layer 200 of the second insulating materials by the first insulating materials layer engagement on it, lower surface.This can have further
Advantage, such as when layer 200 is generated by oxide (such as, silica), such as the magnetic activity material in stop-layer 188 and 220
The deterioration of material.
Second subdivision 210 includes five layers of magnetic functional material 220,224,226,228 and 230, magnetic functional material
Each layer is separated from the adjacent layer of magnetic functional material by the layer 232,234,236 and 238 of the first insulating materials.
The top layer of the magnetic functional material 230 of second subdivision 210 is boundary by the second layer 250 of the second insulating materials.
The same as before, the layer 250 of the second insulating materials can sandwich between the layer 252 and 254 of the first insulating materials.As deposition
The substitution of the layer of second insulating materials can be deposited with increased thickness (being compared to each layer in subdivision) the first insulation material
The layer of material.The third subdivision 260 of magnetic core 2 is formed on the second subdivision 210.This process can proceed with, until reaching
The topmost portion of magnetic core 2, wherein may include for last two layers one layer of magnetic functional material, titled with the layer of the first insulating materials.Therefore,
If magnetic core is partially fabricated by two sons, one layer of the second insulating materials can be arranged only to separate subdivision.If magnetic core by
Three sons are partially fabricated, then two layers of the insulating materials can be provided that separate subdivision.Under normal circumstances, it can be seen that
If magnetic core is made of N number of subdivision, N-1 layers of the second insulating materials can be provided.
In this example, each subdivision includes five layers of magnetic function material.Under normal circumstances, although this arrangement is retouched
It states, but each subdivision need not be identical to other subdivisions.Equally, each character segment does not need to include five layers of magnetic function material
Material.In the embodiment of magnetic core as shown in Figure 8, the 1st insulating materials can be aln layer (although other insulating materials can also
To be used for some or all of first insulation material layer, such as aluminum oxide), and there is the thickness for being about 10 nanometers, but its
His thickness can be used and it is contemplated that first layer can be typically with 5 to 30 nanometers of thickness range.Magnetic active layer can be by
Ferronickel, nickel cobalt or cobalt, iron, zirconium, niobium and boron are compounded to form, and usually with about 100 nanometers of thickness, but thinner or thicker
Layer (for example, range of 50 to 200 nanometer thickness) can use.Second insulating materials can be disposed such that each character segment
Between capacitive coupling compared in subdivision between adjacent magnetic material layer capacitive coupling reduce, by means of following one
Top layer's magnetic functional layers of or two: one subdivisions and next subdivision most descend between magnetic function layer increased point
From and reduction dielectric constant of second insulating materials relative to the first insulating materials.
Aluminium nitride has about 8.5 relative dielectric constant, and silica has about 3.9 relative dielectric constant.Therefore,
In one embodiment, the first insulating materials is aluminium nitride and the second insulating materials is silica.
Fig. 9 be include the schematic cross-section with the integrated circuit of transformer of magnetic core, generally by 2 table of appended drawing reference
Show, constitutes the embodiment of the present invention.Magnetic core 2 shown in Fig. 8 is divided into six subdivisions 301 by the middle layer of the second insulating materials
To 306.As previously mentioned, each subdivision includes the alternating layer of the first insulation material layer and magnetic functional material.
As shown in figure 9, integrated circuit includes substrate 4, it has undermost metal layer 310 deposited thereon.Heavy
After product, metal layer 310 is masked and etches, to form conductive traces, some of them be used to form Fig. 1 track 14,18,
32 and 36, it constitutes the part of primary and secondary winding 10,30.As discussed previously with respect to Fig. 8, although with reference to the schematic of Fig. 1
Plan view, it should be appreciated that the structure of Fig. 9 can combined reference Fig. 7 description wire turn variable density and/or below with reference to Figure 10 describe
Magnetic core profile variations.Insulating layer 320 (for example, polyimides) is subsequently deposited upon on metal layer 310, with from transformer winding
Insulate magnetic core.Then transformer layer 301-306 is deposited, such as the whole for passing through deposition substrate.Then the structure is shielded and right
After be etched, so as on insulating layer 320 formed isolating transformer core areas.Other insulating materials can then deposit
To fill the gap in substrate 4 between adjacent transformers iron core 2, and magnetic core is covered to encapsulate them in the medium.The insulating layer
322 be designated as in Fig. 9.Then, insulating layer 322 can be planarized to form the substantially flat upper surface of integrated circuit.
Then the surface can shelter and etch, to be formed in the recess 340 of insulating layer 322 and layer 320, extend downwardly into most lower
The metal layer 310 of layer.The upper surface can have the metal layer 350 being deposited thereon.Metal also deposits insertion V-arrangement recess 340,
The interconnection between lowest level metal layer 310 and topmost metal layer 350 is formed whereby.Layer 350 then can be masked and be etched,
With formation (among other things) conductor rail 12,16,34 and 38 shown in FIG. 1, the portion of primary and secondary winding 10,30 is constituted
Part.
Undermost metal layer 310 can be formed on insulating layer 360 (for example, silica), this can be stacked exists in itself
By the way that raw material or acceptor impurity are injected the various semiconductor devices (not shown) that substrate 4 is formed.Such as those skilled in the art
Member well known to, before depositing the first metal layer 310, hole can be formed in a insulating layer, so as to formed various circuit elements it
Between apparatus interconnection 360.
In addition to changing wire turn density in transformer, the magnetic flux density in magnetic core can also be changed by changing core shapes.
These methods may be used alone or in combination use.Therefore, as shown in Figure 10, the rectangular shaped core 2 of Fig. 1 be can be modified in magnetic
The end of core has conical section 400 and 402, to reduce the magnetic core width of its end.By the phase for the winding that conducting element is formed
Diameter can also be changed to meet magnetic core, schematically illustrated by guide rail 410,412 and 414, middle orbit 410 is shorter than track 412,
And track 412 is shorter than track 414.Profiling does not need to go to magnetic core entirety, and wherein magnetic core is formed by separating layer, such as about figure
8 and 9 are discussed, but profiling can be to certain layers rather than other layers execute.In addition, the spatial dimension of layer can also change,
The vertical height of magnetic core is changed, so that the center of such as magnetic core has the vertical height bigger than the end of magnetic core.
This can be realized by changing some layers of space range, when magnetic core is provided as laminar structure, be used for shape
At magnetic core.
Therefore, a kind of improved magnet assembly, inductor or transformer in such as integrated circuit can be formed.Such as this field
Known to technical staff, the substrate for carrying magnet assembly and other components can be encapsulated in chip-scale (integrated circuit) encapsulation
In.
Although the claim herein proposed is filed in single dependent format of U.S.Patent & Trademark Office, it will be appreciated that
Any claim can be dependent on same type of any preceding claims, unless being clearly technically infeasible.
Claims (17)
1. the transformer for being used for transmission power in a kind of integrated circuit, comprising:
The magnetic core of the transformer；
The first side of the magnetic core is arranged in multiple conductors；
Second side of the magnetic core is arranged in multiple conductors, wherein on the multiple conductors and described second side on first side
Multiple interconnection of conductors with formed surround the magnetic core the transformer first coil and around the change of the magnetic core
Second coil of depressor, wherein the first coil and second coil are staggered；And
Collocation structure, for compensating the transformer by the saturation current increase for making the first coil of the transformer
The magnetic core core saturation heterogeneity.
2. transformer as described in claim 1, wherein the collocation structure includes coil heterogeneous, and wherein non-equal
Even coil is one in the first coil or second coil.
3. transformer as described in claim 1, wherein the wire turn density of the first coil is as the position along coil axis
Function and change.
4. transformer as claimed in claim 3, wherein the wire turn density is with along the coil axis and the magnetic core
Threshold value increases and reduces.
5. transformer as claimed in claim 2, wherein the conductor width of the coil heterogeneous with along coil axis with
The distance of the end of the magnetic core increases and increases.
6. transformer as described in claim 1, wherein the width of coil changes with the distance along coil axis.
7. transformer as described in claim 1, wherein the collocation structure includes non-rectangle magnetic core.
8. transformer as described in claim 1, wherein the width of the magnetic core as the position along coil axis function and
Variation.
9. transformer as described in claim 1, wherein the thickness of the magnetic core as position function and change.
10. transformer as described in claim 1, wherein the magnetic core is formed by multiple layers, and in the multiple layer extremely
One in few one layer of shape or composition is variation.
11. transformer as described in claim 1, wherein second coil has the wire turn density of spatial variations.
12. a kind of integrated circuit, including transformer as described in claim 1.
13. a kind of monolithic integrated optical circuit, including transformer as described in claim 1.
14. a kind of method for forming transformer, including a conductor more than first is formed on the substrate；More than second are formed on magnetic core
A conductor so that a conductor more than described first and more than the second a conductor form the staggered coil for surrounding the magnetic core,
Described in coil be included in the transformer, and wherein at least one at least one of the magnetic core or the coil
It is a be it is heterogeneous along coil shaft space, with the saturation of at least one coil in the coil by making the transformer
Electric current increase compensates the heterogeneity of the core saturation of the magnetic core of the transformer.
15. method as claimed in claim 14, wherein at least one of described coil is formed so that compared to neighbouring
Wire turn density along magnetic core axis in the end of the magnetic core, the end far from the magnetic core have lower wire turn close
Degree.
16. method as claimed in claim 15, wherein the shape of the magnetic core is modified so that compared in the magnetic core
End, far from the magnetic core end part at the magnetic core shape it is wider or thicker.
17. a kind of integrated circuit, including transformer, the transformer is by the different metal layer of the integrated circuit and company
It connects to form the conductive traces of the coil of the magnetic core around the transformer separated and be formed, wherein the wire turn of the coil is close
Degree changes between the overhang and the center of the coil along coil axis, so that towards the center of the coil
The first wire turn density be lower than the neighbouring overhang the coil the second wire turn density to compensate the transformer
The magnetic core core saturation heterogeneity and the power transmission of the transformer is increased.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/322,321 | 2014-07-02 | ||
| US14/322,321 US20160005530A1 (en) | 2014-07-02 | 2014-07-02 | Inductive component for use in an integrated circuit, a transformer and an inductor formed as part of an integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105244344A CN105244344A (en) | 2016-01-13 |
| CN105244344B true CN105244344B (en) | 2018-12-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510377927.1A Active CN105244344B (en) | 2014-07-02 | 2015-07-01 | Used in the Inductive component of integrated circuit, segment set is formed into the transformer and inductor of circuit |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20160005530A1 (en) |
| EP (1) | EP2963661B1 (en) |
| CN (1) | CN105244344B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105575626A (en) * | 2011-06-30 | 2016-05-11 | 美国亚德诺半导体公司 | Isolated power converter with magnetics on chip |
| US10551215B2 (en) | 2015-06-11 | 2020-02-04 | Analog Devices Global Unlimited Company | Systems, circuits and methods for determining a position of a movable object |
| US10145906B2 (en) | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
| DE102016106655A1 (en) * | 2016-04-12 | 2017-10-12 | B. Braun Avitum Ag | Medical device with monitor device |
| WO2017205644A1 (en) * | 2016-05-26 | 2017-11-30 | The Trustees Of The University Of Pennsylvania | Laminated magnetic cores |
| US9859357B1 (en) * | 2016-07-14 | 2018-01-02 | International Business Machines Corporation | Magnetic inductor stacks with multilayer isolation layers |
| DE102018113765B4 (en) | 2017-06-09 | 2023-11-02 | Analog Devices International Unlimited Company | TRANSFORMER WITH A THROUGH CONTACT FOR A MAGNETIC CORE |
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Also Published As
| Publication number | Publication date |
|---|---|
| US20160005530A1 (en) | 2016-01-07 |
| EP2963661A2 (en) | 2016-01-06 |
| EP2963661A3 (en) | 2016-03-30 |
| CN105244344A (en) | 2016-01-13 |
| EP2963661B1 (en) | 2019-10-23 |
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