CN105235083B - Cutting fluid dehydrating structure for silicon wafer cutting machine - Google Patents
Cutting fluid dehydrating structure for silicon wafer cutting machine Download PDFInfo
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- CN105235083B CN105235083B CN201510639958.XA CN201510639958A CN105235083B CN 105235083 B CN105235083 B CN 105235083B CN 201510639958 A CN201510639958 A CN 201510639958A CN 105235083 B CN105235083 B CN 105235083B
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- water
- pipe
- preheating cabinet
- cutting fluid
- heating
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Abstract
The invention relates to a cutting fluid dehydrating structure for a silicon wafer cutting machine. By the adoption of the cutting fluid dehydrating structure for the silicon wafer cutting machine, the technical problem that in the prior art, a cutting fluid dehydrating device of the silicon wafer cutting machine is low in dehydrating efficiency is solved. The cutting fluid dehydrating structure for the silicon wafer cutting machine comprises a preheating box, a flow divider box, a flow divider valve and at least two heating boxes. Cutting fluid is preheated through the preheating box and then enters the flow divider box to be divided into at least two branches through the flow divider valve, and the heating boxes are arranged on the branches respectively. The preheated cutting fluid is divided and then heated, and thus the dehydrating efficiency of a cutting fluid dehydrating structure is greatly improved.
Description
Technical field
The present invention relates to silicon chip cutter accessory, more particularly, to a kind of silicon chip cutter cutting fluid removes water-bound.
Background technology
In silicon chip cutting, mortar online recycling technology starts to rise at home, and increasing producer starts oneself purchase and sets
Standby oneself reclaim mortar, but in the cutting fluid reclaiming, moisture can increase with recovered frequency and increase although different type of machines is to cutting
The upper limit cutting liquid water content requires difference, but in cutting fluid, the lower conforming product rate of the content of water is higher.Many is specially done now
The producer reclaiming mortar is all distillation equipment, and the cutting fluid separated is distilled, but existing distillation equipment valency
Costly, and heat utilization rate is low for lattice, wastes serious, takes longer, emphasis is done to the medium-sized and small enterprises of silicon chip production
Buy this equipment unactual.
It is used for the cutting fluid water trap complex structure of silicon chip cutter in prior art and production cost is high, in addition,
In prior art, the water removal efficiency of cutting fluid water trap is low, and the cutting fluid of infeed is unified in a distillation interior and removes water, and steams
Evaporate room due to volume larger, slower therefore in the indoor cutting fluid temperature rise ratio of distillation, thus causing of the prior art cutting
Cut liquid water trap water removal efficiency low.
Content of the invention
A kind of silicon chip cutter cutting fluid that the present invention provides removes water-bound it is intended to overcome silicon chip cutting in prior art
The machine low deficiency of cutting fluid water trap water removal efficiency.
In order to solve above-mentioned technical problem, the present invention adopts the following technical scheme that a kind of silicon chip cutter cutting fluid is gone
Water-bound, including water supply line, preheating cabinet, current divider box and at least two heater boxes, described water supply line is communicated with preheating cabinet, institute
State preheating cabinet to communicate with current divider box, in described current divider box, be provided with the shunting that the cutting fluid in current divider box is separated at least two tributaries
Valve, every tributary is equipped with heater box, and described heater box is provided with gland steam exhauster and drain pipe, and described gland steam exhauster and drain pipe are equal
Communicate with heater box；It is respectively equipped with heating steam pipe and heating pipe, described heating steam pipe and heating pipe are equal in described preheating cabinet
It is coiled in preheating cabinet, described gland steam exhauster is all communicated with heating steam pipe, and described drain pipe is all communicated with heating pipe, described preheating
Case is provided with and heats the steam discharge mouth that steam pipe communicates, and described preheating cabinet is additionally provided with the water draining beak being communicated with heating pipe, described
The feed water inlet being communicated with water supply line is additionally provided with preheating cabinet, is communicated by water-supply-pipe between described preheating cabinet and current divider box, institute
State and the water delivery mouth being connected with water-supply-pipe is additionally provided with preheating cabinet, the level height of described water delivery mouth is higher than the level height of feed water inlet
Degree；It is provided with calandria in described heater box.
In above-mentioned composition, by arranging flow divider, the cutting fluid in current divider box is separated at least two tributaries, at every
Heater box is equipped with stream, the cutting fluid being fed by water supply line is heated to it by heater box after shunting again, each heater box
Only heat the cutting fluid on a tributary, so that water process is carried out to the cutting fluid on this tributary, because each heater box only adds
Cutting fluid on a hot tributary, accordingly, with respect to prior art, the water that goes that technique scheme substantially increases cutting fluid is imitated
Rate.
It is additionally provided with water fender at feed water inlet in place, described water fender is fixed on preheating cabinet by support on described preheating cabinet
On, described water fender and support are fixed together by welding manner, and described support is fixed by screws on preheating cabinet.Supplying
Water fender is set at the mouth of a river, and the cutting fluid being fed by feed water inlet can rush at water fender, and water fender plays the effect of buffering, it is to avoid supplies
The cutting fluid that the mouth of a river feeds directly impacts original cutting fluid in preheating cabinet so that cutting fluid can be sunk in preheating cabinet
Form sediment, improve the water quality of cutting fluid.
At least one of which heat-insulation layer is enclosed with described water-supply-pipe；At least one of which warming plate is bonded with described preheating cabinet.Defeated
Cutting fluid in water pipe and preheating cabinet is all that therefore, the cutting liquid temp in preheating cabinet and water-supply-pipe is all through preheating
Higher than room temperature, heat-insulation layer and warming plate play the effect of insulation, reduce heat in preheating cabinet and water-supply-pipe for the cutting fluid and damage
Lose.
A kind of optional scheme, described heating steam pipe and heating pipe are equipped with heating column.Heating column increases heating
The heat exchange area of cutting fluid in steam pipe, heating pipe and preheating cabinet, improves heating steam pipe, the pre- thermal efficiency of heating pipe.
A kind of optional scheme, described calandria is provided with least one heated beam, and described heated beam and calandria are one
Body formula structure.Heated beam increases the heat exchange area of calandria and cutting fluid in heater box, improves the heating effect of heater box
Rate.
Compared with prior art, a kind of silicon chip cutter cutting fluid that the present invention provides removes water-bound, has excellent as follows
Point: include preheating cabinet, current divider box, flow divider and at least two heater boxes, the preheated case of cutting fluid preheats, subsequently into current divider box
It is split valve and separates at least two tributaries, every tributary is respectively provided with heater box, carry out adding after the cutting fluid shunting after preheating again
Heat, substantially increases the water removal efficiency that cutting fluid removes water-bound；
In addition, gland steam exhauster is with heating, and steam pipe communicates, drain pipe is communicated with heating pipe, and heat steam pipe and heating pipe is equal
It is coiled in preheating cabinet, the cutting fluid after the water vapour discharged by heater box, heating is directed in heating steam pipe and heating pipe,
And the cutting fluid in preheating cabinet is preheated, save the energy；Meanwhile, when preheating to the cutting fluid in preheating cabinet,
The cutting fluid in water vapour and heating pipe in heating steam pipe can be lowered the temperature by the cutting fluid in preheating cabinet, by steam discharge mouth and
The water vapour that water draining beak is discharged, cutting liquid temp are low, will not scald technical staff.
Brief description
Accompanying drawing 1 is the schematic diagram that a kind of present invention silicon chip cutter cutting fluid removes water-bound；
Accompanying drawing 2 is sectional view at a-a in accompanying drawing 1；
Accompanying drawing 3 is the sectional view that a kind of present invention silicon chip cutter cutting fluid goes heater box in water-bound.
Specific embodiment
Below in conjunction with the accompanying drawings, water-bound is gone to be described further a kind of silicon chip cutter cutting fluid of the present invention.As
Shown in Fig. 1, Fig. 2, Fig. 3, a kind of silicon chip cutter cutting fluid removes water-bound, referring to Fig. 1, including water supply line 1, preheating cabinet 2,
Current divider box 3 and at least two heater boxes 4, water supply line 1 is connected with water system, for causing in preheating cabinet 2 cutting fluid
Row preheating, described water supply line 1 is communicated with preheating cabinet 2, and described preheating cabinet 2 is communicated with current divider box 3, is provided with described current divider box 3
Cutting fluid in current divider box 3 is separated the flow divider 5 at least two tributaries, every tributary is equipped with heater box 4, described heating
Case 4 is provided with gland steam exhauster 6 and drain pipe 7, and described gland steam exhauster 6 is located at top, described gland steam exhauster 6 and the draining of described heater box 4
Pipe 7 is all communicated with heater box 4；It is respectively equipped with heating steam pipe 8 and heating pipe 9 in described preheating cabinet 2,
During actually used, feed pipe feeds cutting fluid into preheating cabinet 2, and the preheated case of cutting fluid 2 enters current divider box
3, so separate at least two tributaries through flow divider 5 again, finally the cutting fluid in every tributary is heated case 4 heating heel row to heating
In water pipe 9, and the water vapour being evaporated in heater box 4 can drain in heating steam pipe 8, using water vapour in heating steam pipe 8
Waste heat and heating pipe 9 in the waste heat of cutting fluid the cutting fluid in preheating cabinet 2 is preheated, positioned at the water of heating steam pipe 8
Cutting fluid in steam and heating pipe 9 is discharged through steam discharge mouth 10 and water draining beak 11, and complete cutting fluid entirely goes water process；
In order to improve the utilization ratio of water vapour in heating steam pipe 8, the interior cutting fluid residual heat of heating pipe 9, referring to Fig. 1, figure
2, described heating steam pipe 8 and heating pipe 9 be all coiled in preheating cabinet 2, described gland steam exhauster 6 all with heat steam pipe 8 communicate, described
Drain pipe 7 is all communicated with heating pipe 9, described heating steam pipe 8 and heating pipe 9 is equipped with heating column 19, this heating column 19
Increase heating steam pipe 8, heating pipe 9 and the heat exchange area of cutting fluid in preheating cabinet 2, optimize the pre- thermal effect of preheating cabinet 2
Really, described heating column 19 is welded on heating pipe 9, and described heating column 19 is welded on heating steam pipe 8, on described preheating cabinet 2
It is provided with and heats the steam discharge mouth 10 that steam pipe 8 communicates to discharge water vapour, described preheating cabinet 2 is additionally provided with and communicates with heating pipe 9
Water draining beak 11 to discharge cutting fluid；
Referring to Fig. 1, Fig. 2, described preheating cabinet 2 is additionally provided with the feed water inlet 12 being communicated with water supply line 1, described preheating cabinet 2
Communicated by water-supply-pipe 13 between current divider box 3, described preheating cabinet 2 is additionally provided with the water delivery mouth 14 being connected with water-supply-pipe 13, ginseng
See Fig. 2, the level height of described water delivery mouth 14 is higher than the level height of feed water inlet 12；Due to cutting fluid be contained within certain miscellaneous
Matter, referring to Fig. 1, Fig. 2, described preheating cabinet 2 is additionally provided with water fender 16 at feed water inlet 12 in place, and described water fender 16 passes through support
17 are fixed on preheating cabinet 2, and described water fender 16 and support 17 are fixed together by welding manner, and described support 17 passes through spiral shell
Nail is fixed on preheating cabinet 2, and the cutting fluid being fed by feed water inlet 12 can be stopped by water fender 16, plays the work of buffering and off-load
With reducing the impact of original cutting fluid in cutting fluid and the preheating cabinet 2 of feed water inlet 12 infeed, making the cutting fluid can be in preheating cabinet
Precipitated in 2, optimized the water quality of cutting fluid；
Referring to Fig. 3, in described heater box 4, it is provided with calandria 15；Described calandria 15 is provided with least one heated beam 20,
Described heated beam 20 and calandria 15 are integral type structure, and heated beam 20 increases the heat-exchange surface of calandria 15 and cutting fluid
Long-pending, improve the efficiency of heating surface of heater box 4.
Referring to Fig. 1, Fig. 2, in order to reduce thermal loss in course of conveying for the cutting fluid after being preheated, described water-supply-pipe
It is enclosed with least one of which heat-insulation layer on 13；It is bonded with least one of which warming plate 18 on described preheating cabinet 2.Heat-insulation layer and warming plate 18
Play the effect of insulation, reduce the thermal loss of cutting fluid.
These are only the preferred embodiment of the present invention it is intended to embody prominent technique effect and the advantage of the present invention, not
It is the restriction to technical scheme.Those skilled in the art will appreciate that all are based on the technology of the present invention content
Modification, change or the substitute technology feature made, all should be covered by the technology category that claims of the present invention are advocated
Interior.
Claims (3)
1. a kind of silicon chip cutter cutting fluid remove water-bound it is characterised in that: include water supply line (1), preheating cabinet (2), point
Stream case (3) and at least two heater boxes (4), described water supply line (1) communicates with preheating cabinet (2), described preheating cabinet (2) and shunting
Case (3) communicates, and is provided with the flow divider that the cutting fluid in current divider box (3) separates at least two tributaries in described current divider box (3)
(5), every tributary is equipped with heater box (4), described heater box (4) is provided with gland steam exhauster (6) and drain pipe (7), described row
Steam pipe (6) and drain pipe (7) are all communicated with heater box (4)；It is respectively equipped with heating steam pipe (8) and heating in described preheating cabinet (2)
Water pipe (9), described heating steam pipe (8) and heating pipe (9) are all coiled in preheating cabinet (2), described gland steam exhauster (6) all with heat
Steam pipe (8) communicates, and described drain pipe (7) is all communicated with heating pipe (9), and described preheating cabinet (2) is provided with and heats steam pipe (8)
The steam discharge mouth (10) communicating, described preheating cabinet (2) is additionally provided with the water draining beak (11) being communicated with heating pipe (9), described preheating
The feed water inlet (12) being communicated with water supply line (1) is additionally provided with case (2), passes through defeated between described preheating cabinet (2) and current divider box (3)
Water pipe (13) communicates, and described preheating cabinet (2) is additionally provided with the water delivery mouth (14) being connected with water-supply-pipe (13), described water delivery mouth (14)
Level height be higher than feed water inlet (12) level height；
It is provided with calandria (15) in described heater box (4)；
Upper feed water inlet in place (12) place of described preheating cabinet (2) is additionally provided with water fender (16), and described water fender (16) passes through support
(17) it is fixed on preheating cabinet (2), described water fender (16) and support (17) are fixed together by welding manner, described support
(17) it is fixed by screws on preheating cabinet (2)；
It is enclosed with least one of which heat-insulation layer on described water-supply-pipe (13)；It is bonded with least one of which warming plate on described preheating cabinet (2)
(18).
2. a kind of silicon chip cutter cutting fluid according to claim 1 remove water-bound it is characterised in that:
It is equipped with heating column (19) on described heating steam pipe (8) and heating pipe (9).
3. a kind of silicon chip cutter cutting fluid according to claim 1 remove water-bound it is characterised in that:
Described calandria (15) is provided with least one heated beam (20), and described heated beam (20) and calandria (15) are integral type
Structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510639958.XA CN105235083B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid dehydrating structure for silicon wafer cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510639958.XA CN105235083B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid dehydrating structure for silicon wafer cutting machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105235083A CN105235083A (en) | 2016-01-13 |
| CN105235083B true CN105235083B (en) | 2017-02-01 |
Family
ID=55033025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510639958.XA Expired - Fee Related CN105235083B (en) | 2015-09-30 | 2015-09-30 | Cutting fluid dehydrating structure for silicon wafer cutting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105235083B (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19580845T1 (en) * | 1994-06-22 | 1996-10-31 | Noritake Co Ltd | Method and device for regenerating used working fluid |
| IT1299540B1 (en) * | 1998-07-01 | 2000-03-16 | Memc Electronic Materials | PROCEDURE TO SEPARATE AND REGENERATE WASTE ABRASIVE BASED ON GLYCOL AND SILICON CARBIDE FOR THE PURPOSE OF THEIR REUSE |
| EP2275241B1 (en) * | 2005-08-25 | 2012-10-17 | Freiberger Compound Materials GmbH | Wire saw and method for cutting a workpiece by wire saw |
| CN101033066B (en) * | 2006-03-06 | 2011-06-22 | 张捷平 | Method of recovering silicon carbide micro-powder |
| JP2011502054A (en) * | 2007-10-30 | 2011-01-20 | ポール・コーポレーション | Method for treating spent abrasive slurry |
| CN101513753B (en) * | 2009-03-24 | 2011-06-01 | 河南醒狮高新技术股份有限公司 | Method for recovering waste slurry of multiline cut silicon chips |
| CN101623898B (en) * | 2009-04-28 | 2012-02-15 | 江西赛维Ldk太阳能高科技有限公司 | Chemical recovery method for mortar in wire cutting technology |
| CN101708634B (en) * | 2009-11-11 | 2012-01-18 | 黑旋风工程机械开发有限公司 | Stone waste sludge recycling device |
| CN204955162U (en) * | 2015-09-30 | 2016-01-13 | 浙江辉弘光电能源有限公司 | Silicon chip is cutting fluid structure of anhydrating for cutting machine |
-
2015
- 2015-09-30 CN CN201510639958.XA patent/CN105235083B/en not_active Expired - Fee Related
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| CN105235083A (en) | 2016-01-13 |
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| GR01 | Patent grant | ||
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Address after: 314200 No. 899 Xinxing three road, Pinghu economic and Technological Development Zone, Jiaxing, Zhejiang Patentee after: Zhejiang Hui Guang light Limited by Share Ltd Address before: 314200 No. 899 Xinxing three road, Pinghu Economic Development Zone, Jiaxing, Zhejiang Patentee before: ZHEJIANG HUIHONG PHOTOELECTRIC ENERGY CO., LTD. |
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Granted publication date: 20170201 Termination date: 20180930 |
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| CF01 | Termination of patent right due to non-payment of annual fee |