CN105181203B - A kind of softness haptic perception sensor array structure - Google Patents
A kind of softness haptic perception sensor array structure Download PDFInfo
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- CN105181203B CN105181203B CN201510463245.2A CN201510463245A CN105181203B CN 105181203 B CN105181203 B CN 105181203B CN 201510463245 A CN201510463245 A CN 201510463245A CN 105181203 B CN105181203 B CN 105181203B
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- dielectric base
- induction electrode
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Abstract
A kind of softness haptic perception sensor array structure belongs to softness haptic perception sensor array technical field.By integrated friction electric touch sensor array, the acquisition to haptic signal is realized.Friction electricity sensor array and upper grounding electrode, lower grounding electrode including being made of the electric sensing unit of multiple frictions form.Sensing unit is made of upper frictional layer, upper dielectric base, lower frictional layer, lower dielectric base and upper induction electrode, lower induction electrode.Upper dielectric base, lower dielectric base are Kapton；The micrometre array structure of surface gold-plating is located at the upper dielectric base back side as upper frictional layer, and lower dielectric base also serves as lower frictional layer.Softness haptic perception sensor array of the present invention provides active sensing signal using the electric sensing unit that rubs, and has collecting energy and completes self-powered ability.Grounding electrode realizes the signal acquisition mode of double single electrodes, can effectively simplify device architecture, reduces the signal interference between adjacent cells, effectively improves resolution ratio.
Description
Technical field
The present invention relates to a kind of softness haptic perception sensor array structure, belong to soft based on triboelectrification and electrostatic induction principle
Property tactile sensing array technical field.
Background technique
By vision, the sense of hearing, tactile etc., people are able to experience the excellent of world around.For the disabled, artitificial ear
The exploitation of the bionical devices such as snail, artificial retina, artificial electron's skin can help recovered part or complete movement or sense
Know ability.By electronic skin sensed pressure, the information such as shape, size, the hardness of judgment object are to reproduce diving for sensitive tactile
In approach.
Summary of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of softness haptic perception sensor array structure.
A kind of softness haptic perception sensor array structure is realized by integrated friction electric touch sensor array to haptic signal
Acquisition.
A kind of softness haptic perception sensor array structure, including the friction electricity sensor array being made of multiple electric sensing units that rub
And upper grounding electrode, lower grounding electrode.Wherein sensing unit is by upper frictional layer, upper dielectric base, lower frictional layer, lower insulation base
Bottom and upper induction electrode, lower induction electrode composition.
Dielectric base described in above scheme is flexible insulating material, such as polyethylene terephthalate
(polyethyleneterephthalate, PET), polyimides (Polyimide, PI), polyvinyl chloride
(polyvinylchloride, PVC), polyethylene (polyethylene, PE) or polystyrene (Polystyrene, PS) etc..
Upper induction electrode, lower induction electrode and upper grounding electrode described in above scheme, lower grounding electrode are good conductivity
Material, such as copper, gold metal, indium tin oxide semiconductor (I TO) etc.；It further include the conducting polymers such as PEDOT.
Two kinds of materials that upper frictional layer, lower frictional layer described in above scheme, preferably attraction charge capability differ greatly,
Or has different surfaces structure and generate the same material for charging difference.Such as dimethyl silicone polymer
(polydimethylsiloxane, PDMS) and ethylene terephthalate (polyethyleneterephthalate, PET),
Or polyimides (Polyimide, PI) and gold etc..
The invention has the advantages that
1, softness haptic perception sensor array provided by the invention is designed using the simple structure of structure, and cheap is processed into
This, realizes highly sensitive haptic signal acquisition.
2, softness haptic perception sensor array provided by the invention provides active sensing signal using the electric sensing unit that rubs, can be same
When have collecting energy and complete self-powered ability.
3, it by the design of grounding electrode, realizes the signal acquisition mode of double single electrodes, can not only effectively simplify device
Structure, while greatly reducing the signal interference between adjacent cells, effectively improve resolution ratio.
Detailed description of the invention
When considered in conjunction with the accompanying drawings, by referring to following detailed description, the present invention can be more completely and better understood with
And be easy to learn many adjoint advantages, but the drawings described herein are used to provide a further understanding of the present invention,
A part of the invention is constituted, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, does not constitute to this hair
Bright improper restriction is such as schemed wherein:
Fig. 1 is the cross section structure schematic diagram of upper dielectric base of the invention.
Fig. 2 is the cross section structure schematic diagram of lower dielectric base of the invention.
Fig. 3 is the top electrode array and grounding electrode structure schematic diagram of softness haptic perception sensor array of the invention.
Fig. 4 is the lower electrod-array and grounding electrode structure schematic diagram of softness haptic perception sensor array of the invention.
Present invention will be further explained below with reference to the attached drawings and examples.
Specific embodiment
Obviously, those skilled in the art belong to guarantor of the invention based on many modifications and variations that spirit of the invention is done
Protect range.
Embodiment 1: as shown in Figure 1, Figure 2, Figure 3 and Figure 4, a kind of softness haptic perception sensor array structure, comprising: above insulate base
Bottom 1, lower dielectric base 2, upper frictional layer 3, upper induction electrode array 40, upper induction electrode array 50.Wherein upper grounding electrode, under
Grounding electrode does not indicate in figure.
Upper dielectric base 1, lower dielectric base 2 are Kapton.
The micrometre array structure of surface gold-plating is located at upper 1 back side of dielectric base as upper frictional layer 3, and lower dielectric base 2 is same
When also serve as lower frictional layer.
Fig. 3 show induction electrode array 40, lower induction electrode array 50 and upper grounding electrode 41 and lower grounding electrode
51 structural schematic diagram.
Upper induction electrode array 40, upper grounding electrode 41 are located at upper 1 front of dielectric base, by same layer metal copper film figure
Shape forms.
Lower induction electrode array 50, lower grounding electrode 51 are located at lower 2 back side of dielectric base, by same layer metal copper film figure
Shape forms.
Upper induction electrode array 40, lower induction electrode array 50 respectively constitute horizontal, vertical array, correspond to each sensing unit,
Upper grounding electrode 41, lower grounding electrode 51 then insulate with upper induction electrode array 40, lower induction electrode array 50, and are filled in
Induction electrode array 40, lower 50 gap of induction electrode array are formed to upper induction electrode array 40, lower induction electrode array 50
It surrounds.
Specific annotation is carried out to the principle of the present invention and embodiment by example to the present invention above, to help to understand
The central principle and method of present aspect.Present invention is not limited to the embodiments described above, and the content of the present specification should not be construed as to this
The limitation of invention, those skilled in the art are under the premise of without departing substantially from substantive content of the invention, any improvement, the replacement done
Etc. belonging in the scope of the invention.
Claims (5)
1. a kind of softness haptic perception sensor array structure, it is characterised in that pass through integrated friction electric touch sensor array, realization pair
The acquisition of haptic signal；
Including by multiple friction electricity sensor arrays and upper grounding electrode, lower grounding electrode group that electric sensing unit is constituted that rub
At；
Sensing unit is made of dielectric base, upper frictional layer, lower frictional layer and upper induction electrode, lower induction electrode, and insulate base
Bottom is upper dielectric base and lower dielectric base；
With upper dielectric base, lower dielectric base, upper frictional layer, upper induction electrode array, lower induction electrode array, upper ground connection electricity
Pole, lower grounding electrode；
Upper dielectric base, lower dielectric base are Kapton；
The micrometre array structure of surface gold-plating is located at the upper dielectric base back side as upper frictional layer, and lower dielectric base also serves as
Lower frictional layer；
Upper induction electrode array, upper grounding electrode are located at upper dielectric base front, are graphically formed by same layer metal copper film,
Lower induction electrode array, lower grounding electrode are located at the lower dielectric base back side, are graphically formed by same layer metal copper film；
Upper induction electrode array, lower induction electrode array respectively constitute horizontal, vertical array, correspond to each sensing unit, upper ground connection electricity
Pole, lower grounding electrode then with upper induction electrode array, lower induction electrode array insulate, and be filled in induction electrode array, under
Induction electrode array gap forms the encirclement to upper induction electrode array, lower induction electrode array.
2. a kind of softness haptic perception sensor array structure according to claim 1, it is characterised in that dielectric base is flexible exhausted
Edge material is polyethylene terephthalate, polyimides, polyvinyl chloride, polyethylene or polystyrene.
3. a kind of softness haptic perception sensor array structure according to claim 1, it is characterised in that upper induction electrode, lower induction
Electrode and upper grounding electrode, the material that lower grounding electrode is good conductivity are copper, golden metal or indium tin oxide semiconductor.
4. a kind of softness haptic perception sensor array structure according to claim 1, it is characterised in that upper induction electrode, lower induction
Electrode and upper grounding electrode, the material that lower grounding electrode is good conductivity, including PEDOT conducting polymer.
5. a kind of softness haptic perception sensor array structure according to claim 1, it is characterised in that upper frictional layer, lower frictional layer
For two kinds of materials for attracting charge capability to differ greatly, dimethyl silicone polymer and ethylene terephthalate or polyimides
With gold.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510463245.2A CN105181203B (en) | 2015-07-31 | 2015-07-31 | A kind of softness haptic perception sensor array structure |
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| CN201510463245.2A CN105181203B (en) | 2015-07-31 | 2015-07-31 | A kind of softness haptic perception sensor array structure |
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| CN105181203A CN105181203A (en) | 2015-12-23 |
| CN105181203B true CN105181203B (en) | 2018-12-04 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3566112A2 (en) * | 2017-01-06 | 2019-11-13 | SABIC Global Technologies B.V. | Triboelectric sensor with haptic feedback |
| CN108762525B (en) * | 2018-05-14 | 2024-02-09 | 苏州大学 | Self-powered six-axis sensor and manufacturing method thereof |
| CN111256571A (en) * | 2020-01-20 | 2020-06-09 | 腾讯科技（深圳）有限公司 | Flexible capacitive touch sensor, preparation method thereof and touch sensing system |
| CN111273823B (en) * | 2020-03-17 | 2023-03-14 | 东南大学 | Flexible self-powered sign board based on triboelectricity |
| CN111595491B (en) * | 2020-05-18 | 2021-08-31 | 重庆大学 | Low-crosstalk matrix type touch sensing unit capable of being infinitely subdivided |
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| CN103973154A (en) * | 2013-01-28 | 2014-08-06 | 北京大学 | Mini-type generator with single friction surface and manufacturing method thereof |
| CN204155434U (en) * | 2014-10-24 | 2015-02-11 | 纳米新能源（唐山）有限责任公司 | For control device of wireless and the wireless control system of mobile phone |
| CN204214475U (en) * | 2014-11-11 | 2015-03-18 | 浙江大学 | A kind of prosthetic hand Wearable flexible touch sensation sensor and sense of touch pick-up unit thereof |
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| JPH0465645A (en) * | 1990-07-05 | 1992-03-02 | Toshiba Corp | Pressure sensor array |
| JP5198608B2 (en) * | 2010-03-18 | 2013-05-15 | 韓国標準科学研究院 | Flexible force or pressure sensor array using semiconductor strain gauge, method for manufacturing the flexible force or pressure sensor array, and force or pressure measuring method using the flexible force or pressure sensor array |
| CN105765511A (en) * | 2013-09-26 | 2016-07-13 | 泰克图斯科技公司 | Touch sensor |
| CN104660094A (en) * | 2013-11-25 | 2015-05-27 | 北京大学 | Transparent power generator and manufacturing method thereof |
| CN104236591B (en) * | 2014-05-20 | 2016-11-16 | 北京纳米能源与***研究所 | A kind of sensing device based on triboelectricity technology and preparation and application thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103973154A (en) * | 2013-01-28 | 2014-08-06 | 北京大学 | Mini-type generator with single friction surface and manufacturing method thereof |
| CN204155434U (en) * | 2014-10-24 | 2015-02-11 | 纳米新能源（唐山）有限责任公司 | For control device of wireless and the wireless control system of mobile phone |
| CN204214475U (en) * | 2014-11-11 | 2015-03-18 | 浙江大学 | A kind of prosthetic hand Wearable flexible touch sensation sensor and sense of touch pick-up unit thereof |
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