CN105161394A - High-voltage cable leading-in device of field emission electron gun - Google Patents
High-voltage cable leading-in device of field emission electron gun Download PDFInfo
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- CN105161394A CN105161394A CN201510496580.2A CN201510496580A CN105161394A CN 105161394 A CN105161394 A CN 105161394A CN 201510496580 A CN201510496580 A CN 201510496580A CN 105161394 A CN105161394 A CN 105161394A
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Abstract
The invention discloses a high-voltage cable leading-in device of a field emission electron gun. The leading-in device comprises an insulated sealing member, a high-voltage cable, a high-voltage power reception end and an insulated filler, wherein the insulated sealing member is mounted in a chamber of the electron gun, and comprises an installation cavity and a leading-in port, the high-voltage cable includes multiple strands, extends into the installation cavity of the insulated sealing member via the leading-in port, and is used to lead external power supply into the chamber of the electron gun, the two ends of the high-voltage power reception end are coupled to the high-voltage cable and the field emission electron gun respectively, and the insulated filler is filled among the different strands of high-voltage cable, between the high-voltage cable and the inner wall of the insulated sealing member, and in the leading-in port. It can be ensured that certain withstanding voltage exists among the different strands of high-voltage cable, gas is prevented from entering the chamber of the electron gun, and an vacuum environment of the chamber of the electron gun is not damaged.
Description
Technical field
The present invention relates to a kind of introducing device of field emission gun, high-tension cable, belong to high voltage source and introduce equipment technical field.
Background technology
ESEM is a kind of electronic optical instrument, is to utilize focused beam to line by line scan at sample surfaces, makes beam bombardment sample surfaces produce secondary electron, utilizes above-mentioned secondary electron to present the device of sample surface morphology.The resolution of scanning electron microscope image can reach nanoscale and even be better than 1.0 nanometers, is widely used in fields such as new material, new forms of energy, national defence, scientific researches.
Above-mentioned focused beam is provided by the field emission gun, on ESEM, and field emission gun, needs to introduce voltage source by an introducing device, above-mentioned voltage source demand fulfillment is 30kV relative to large ground voltage, voltage across poles is up to 6000V, such guarantee focused beam is more stable, but, because the space of introducing device is less, when introducing multiply high-tension cable in gun chamber, distance between adjacent high-tension cable certainly will reduce, thus cause the withstand voltage between adjacent high-tension cable not enough, voltage across poles is made easily to surmount above-mentioned withstand voltage, cause the operation that equipment can not be stable.
Meanwhile, the introducing of high-tension cable easily destroys the vacuum degree of gun chamber, thus causes electron beam unstable, affects the image quality of ESEM.
Summary of the invention
Therefore, the introducing device that the technical problem to be solved in the present invention is to overcome existing field emission gun, high-tension cable easily cause not enough relative to the earth withstand voltage, high-tension cable interpolar withstand voltage not enough and then cause equipment stable operation and the introducing of the high-tension cable vacuum degree of easily destroying gun chamber can not carry out affecting the technological deficiency of ESEM image quality; Thus provide one can meet relative to the earth withstand voltage, high-tension cable interpolar withstand voltage, make equipment stable operation and the vacuum degree that the introducing of high-tension cable can not destroy gun chamber carries out improving the introducing device of ESEM image quality.
To achieve these goals, the invention provides a kind of introducing device of field emission gun, high-tension cable, comprising: a kind of introducing device of field emission gun, high-tension cable, comprising:
Insulating sealer, is arranged on the inside of gun chamber, has installation cavity and intake;
High-tension cable is some stocks, is extend in the installation cavity of described insulating sealer by described intake, for the high voltage source of gun chamber outside is incorporated into gun chamber inside;
High voltage source receiving terminal, two ends couple described high-tension cable and field emission gun, respectively; And
Insulation filler, is filled between each stock high-tension cable, between high-tension cable and the inwall of insulating sealer, and described intake place.
In the introducing device of above-mentioned field emission gun, high-tension cable, between described high voltage source receiving terminal and described high-tension cable, silver-bearing copper is adopted to be weldingly connected.
In the introducing device of above-mentioned field emission gun, high-tension cable, described insulating sealer is high-tension porcelain insulator.
In the introducing device of above-mentioned field emission gun, high-tension cable, described insulating sealer extend into gun chamber inside through the flange being arranged on gun chamber outside.
In the introducing device of above-mentioned field emission gun, high-tension cable, described high-tension cable is five strands.
In the introducing device of above-mentioned field emission gun, high-tension cable, described high voltage source receiving terminal is five the high pressure sealing electrodes coupled with per share high-tension cable one_to_one corresponding respectively, and described high pressure sealing electrode is arranged on the outside of described installation cavity.
In the introducing device of above-mentioned field emission gun, high-tension cable, described insulation filler is insulating epoxy glue.
In the introducing device of above-mentioned field emission gun, high-tension cable, described connecting hole is arranged on the flange in gun chamber.
Technique scheme of the present invention has the following advantages compared to existing technology:
1, in the introducing device of field emission gun, high-tension cable of the present invention, in order to promote relative to the earth, withstand voltage between each stock high-tension cable, insulation filler is filled with between insulating sealer and each stock high-tension cable, insulation filler two aspect effect: 1, when introducing device arranges multiply high-tension cable, although the pitch smaller between adjacent high-tension cable, but, by filling insulation filler between adjacent high-tension cable, can ensure withstand voltagely between each stock wire to reach more than 6000V, thus when not increasing introducing device volume, make device security, reliability service, 2, the intake of insulating sealer is sealed, and the gap between insulating sealer and high-tension cable, thus prevent gas from entering into gun chamber from introducing device, the vacuum degree of gun chamber can not be destroyed, carry out raising ESEM image quality.
In the introducing device of 2, field emission gun, high-tension cable of the present invention, insulating sealer extend into gun chamber inside through the flange arranging gun chamber outside, high-tension cable couples through insulating sealer and high pressure sealing electrode, when the setting of this insulating sealer makes to introduce high-tension cable in gun chamber, ultra high vacuum degree in gun chamber is not damaged, thus ensure that the steady quality of ESEM imaging.
In the introducing device of 3, field emission gun, high-tension cable of the present invention, silver-bearing copper material is adopted to weld between high-tension porcelain insulator and high pressure sealing electrode, silver-bearing copper weldering is compared with other materials welding and is had the following advantages: 1, the intensity of silver-bearing copper weldering is higher, can ensure stable between high-tension cable and high pressure sealing electrode connection; 2, the electric conductivity of silver-bearing copper weldering is strong; 3, the good sealing effect of silver-bearing copper weldering, can effectively prevent gas from entering into gun chamber from welding position, thus ensures that the vacuum degree of gun chamber is not destroyed.
Accompanying drawing explanation
In order to make content of the present invention be more likely to be clearly understood, below in conjunction with accompanying drawing, the present invention is further detailed explanation, wherein,
Fig. 1 is the cross-sectional schematic of the introducing device of field emission gun, high-tension cable of the present invention;
Fig. 2 is the left view of Fig. 1.
Description of reference numerals
10-flange; 11-connecting hole; 20-high-tension porcelain insulator; 30-high pressure sealing electrode.
Embodiment
Be described further below with reference to the introducing device of accompanying drawing to field emission gun, high-tension cable of the present invention, it should be noted that at this, the explanation for following execution mode understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can be combined with each other.
Embodiment 1
The present embodiment provides a kind of introducing device of field emission gun, high-tension cable, for providing working power for field emission gun, wherein, field emission gun, be arranged on there is ultra high vacuum degree gun chamber in.
With reference to figure 1 and Fig. 2, the introducing device of the field emission gun, high-tension cable of the present embodiment is arranged on flange 10 both sides in gun chamber, and high voltage source input that is to say that multiply high-tension cable is incorporated in gun chamber by the outside of flange 10; High voltage source receiving terminal that is to say that high pressure sealing electrode 30 is positioned at the inner side of described flange 10, its one end and high-tension cable couple, the associated components of the other end and field emission gun, couples, and described associated components specifically refers to emitting cathode, suppresses pole, sucking-off pole, focusing electrode and heater.In the present embodiment, flange 10 is provided with connecting hole 11, installing insulating seal in connecting hole 11, insulating sealer extend into gun chamber inside through the flange arranging gun chamber outside, when the setting of this insulating sealer makes to introduce high-tension cable in gun chamber, ultra high vacuum degree in gun chamber is not damaged, thus ensure that the steady quality of ESEM imaging.Because the space in gun chamber is less, gap between each stock high-tension cable is less, and air is withstand voltage limited, therefore be difficult to ensure withstand voltage 6000V between each stock high-tension cable, in order to promote the withstand voltage between each stock high-tension cable, between insulating sealer and each stock high-tension cable, be filled with insulation filler, particularly, this insulation filler is insulating epoxy glue, and it is circulated in high-tension porcelain insulator 20 after installing each assembly.Insulating epoxy glue has two aspect effects: 1, when introducing device arranges multiply high-tension cable, although the pitch smaller between adjacent high-tension cable, but, by filling insulation filler between adjacent high-tension cable, can ensure withstand voltagely between each stock wire to reach more than 6000V, thus when not increasing introducing device volume, make device security, reliability service; 2, the intake of insulating sealer is sealed, and the gap between insulating sealer and high-tension cable, thus prevent gas from entering into gun chamber from introducing device, the vacuum degree of gun chamber can not be destroyed, carry out raising ESEM image quality.
Particularly, shown in figure 1, described insulating sealer is be arranged on the high-tension porcelain insulator 20 arranged in described connecting hole 11 and towards high voltage source receiving terminal, after high-tension cable stretches into high-tension porcelain insulator 20, coupling with the high pressure sealing electrode 30 be arranged on high-tension porcelain insulator 20 is soldered, as one preferred embodiment, silver-bearing copper material is adopted to weld between high-tension porcelain insulator 20 and high pressure sealing electrode 30, silver-bearing copper weldering is compared with other materials welding and is had the following advantages: 1, the intensity of silver-bearing copper weldering is higher, can ensure stable between high-tension cable and high pressure sealing electrode 30 connection; 2, the electric conductivity of silver-bearing copper weldering is strong; 3, the good sealing effect of silver-bearing copper weldering, can effectively prevent gas from entering into gun chamber from welding position, thus ensures that the vacuum degree of gun chamber is not destroyed.It should be noted that, in the present embodiment, high pressure sealing electrode 30 and each stock high-tension cable are one-to-one relationship.
As one preferred embodiment, with reference to figure 2, described high-tension cable is five strands, accordingly, described high pressure sealing electrode 30 is five, and meanwhile, each high pressure sealing electrode 30 equidistant placement is circumferentially same, avoid the hypotelorism between certain two high pressure sealing electrode 30, enough large to ensure the withstand voltage between each high pressure sealing electrode 30.
The operating voltage maximum of gun chamber is 30KV, therefore at least should ensure withstand voltage more than 30KV between high-tension cable and the earth.Voltage across poles simultaneously between each high pressure sealing electrode 30 is maximum 6000V, and what therefore also need to ensure between each high pressure sealing electrode 30 or each sub-thread high-tension cable is withstand voltage more than 6KV, thus the stable operation of the equipment of guarantee.
Obviously, above-described embodiment is only for clearly example being described, the restriction not to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all execution modes.And thus the apparent change of extending out or variation be still among the protection range of the invention.
Claims (8)
1. an introducing device for field emission gun, high-tension cable, is characterized in that: comprising:
Insulating sealer, is arranged on the inside of gun chamber, has installation cavity and intake;
High-tension cable is some stocks, is extend in the installation cavity of described insulating sealer by described intake, for the high voltage source of gun chamber outside is incorporated into gun chamber inside;
High voltage source receiving terminal, two ends couple described high-tension cable and field emission gun, respectively; And
Insulation filler, is filled between each stock high-tension cable, between high-tension cable and the inwall of insulating sealer, and described intake place.
2. the introducing device of field emission gun, high-tension cable according to claim 1, is characterized in that: adopt silver-bearing copper to be weldingly connected between described high voltage source receiving terminal and described high-tension cable.
3. the introducing device of field emission gun, high-tension cable according to claim 1 and 2, is characterized in that: described insulating sealer is high-tension porcelain insulator (20).
4. the introducing device of the field emission gun, high-tension cable according to any one of claim 1-3, is characterized in that: described insulating sealer extend into gun chamber inside through the flange being arranged on gun chamber outside.
5. the introducing device of the field emission gun, high-tension cable according to any one of claim 1-4, is characterized in that: described high-tension cable is five strands.
6. the introducing device of field emission gun, high-tension cable according to claim 5, it is characterized in that: described high voltage source receiving terminal is five the high pressure sealing electrodes (30) coupled with per share high-tension cable one_to_one corresponding respectively, and described high pressure sealing electrode (30) is arranged on the outside of described installation cavity.
7. the introducing device of the field emission gun, high-tension cable according to any one of claim 1-6, is characterized in that: described insulation filler is insulating epoxy glue.
8. the introducing device of the field emission gun, high-tension cable according to any one of claim 1-7, is characterized in that: described connecting hole (11) is arranged on the flange (10) in gun chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510496580.2A CN105161394A (en) | 2015-08-13 | 2015-08-13 | High-voltage cable leading-in device of field emission electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510496580.2A CN105161394A (en) | 2015-08-13 | 2015-08-13 | High-voltage cable leading-in device of field emission electron gun |
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| CN105161394A true CN105161394A (en) | 2015-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510496580.2A Pending CN105161394A (en) | 2015-08-13 | 2015-08-13 | High-voltage cable leading-in device of field emission electron gun |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115966942A (en) * | 2022-11-29 | 2023-04-14 | 北京中科科仪股份有限公司 | Electron gun high-voltage cable leading-in device for scanning electron gun |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60107248A (en) * | 1983-11-14 | 1985-06-12 | Hitachi Seiko Ltd | Input shielding device for electron bean machinery |
| JPS6139353A (en) * | 1984-07-30 | 1986-02-25 | Internatl Precision Inc | Electron gun |
| JPH03133040A (en) * | 1989-10-18 | 1991-06-06 | Hitachi Ltd | High voltage electron gun apparatus |
| JPH03225739A (en) * | 1990-01-30 | 1991-10-04 | Shinko Electric Co Ltd | Structure of power source introduction part for electron beam generation device |
| US20040094327A1 (en) * | 2001-03-07 | 2004-05-20 | Takanori Sato | High-voltage electric apparatus |
| JP2009048810A (en) * | 2007-08-16 | 2009-03-05 | Hitachi High-Technologies Corp | Charged particle beam device |
-
2015
- 2015-08-13 CN CN201510496580.2A patent/CN105161394A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60107248A (en) * | 1983-11-14 | 1985-06-12 | Hitachi Seiko Ltd | Input shielding device for electron bean machinery |
| JPS6139353A (en) * | 1984-07-30 | 1986-02-25 | Internatl Precision Inc | Electron gun |
| JPH03133040A (en) * | 1989-10-18 | 1991-06-06 | Hitachi Ltd | High voltage electron gun apparatus |
| JPH03225739A (en) * | 1990-01-30 | 1991-10-04 | Shinko Electric Co Ltd | Structure of power source introduction part for electron beam generation device |
| US20040094327A1 (en) * | 2001-03-07 | 2004-05-20 | Takanori Sato | High-voltage electric apparatus |
| JP2009048810A (en) * | 2007-08-16 | 2009-03-05 | Hitachi High-Technologies Corp | Charged particle beam device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115966942A (en) * | 2022-11-29 | 2023-04-14 | 北京中科科仪股份有限公司 | Electron gun high-voltage cable leading-in device for scanning electron gun |
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Application publication date: 20151216 |
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