CN105158848A - Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof - Google Patents
Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof Download PDFInfo
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- CN105158848A CN105158848A CN201510530375.3A CN201510530375A CN105158848A CN 105158848 A CN105158848 A CN 105158848A CN 201510530375 A CN201510530375 A CN 201510530375A CN 105158848 A CN105158848 A CN 105158848A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
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- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention discloses a multi-mode waveguide array coupling structure of a glass substrate, and a manufacturing method thereof. The multi-mode waveguide array coupling structure comprises a glass substrate provided with multi-mode waveguides arranged at intervals. The first end surface of the glass substrate is cut to be provided with a 45-degree inclination angle, so that the end portions of the multi-mode waveguides are machined with a 45-degree reflective structure. The multi-mode waveguide array coupling structure further comprises a waveguide cover sheet arranged to cover the top surface of the multi-mode waveguides. According to the technical scheme of the invention, the glass substrate provided with the multi-mode waveguides is cut to be provided with the 45-degree inclination angle, and the end portions of the multi-mode waveguides are machined to be of the 45-degree reflective structure. Since the glass substrate is mature in cutting and grinding technique, the large-scale production and the easy implementation of the glass substrate are realized. Therefore, the technical problems that the optical fiber lapping quality and the coupling efficiency are difficult to control during the direct coupling process can be solved.
Description
Technical field
The present invention relates to optoelectronic integrated technology field, multimode waveguide array couples structure particularly relating to a kind of substrate of glass and preparation method thereof.
Background technology
Along with the increase of message capacity, the interconnection between chip and chip becomes more and more important.Optical interconnection has large distance bandwidth product, low-loss, highdensity advantage, can meet the communication needs of large high speed, high power capacity.Based on the transmission system of multimode optical fiber, there is larger coupling tolerances, reduce encapsulation difficulty and cost, thus be widely used.The photonic device that current and multimode optical fiber is corresponding is VCSEL (VerticalCavitySurfaceEmittingLaser, vertical cavity surface emitting laser) and PIN (positive-intrinsic-negative) detector array.Along with the development of technology, short wavelength is as more and more faster in VCSEL and the PIN type PD speed of 850nm, and long wavelength VCSEL performance is improved simultaneously.How to solve the coupling of photonic device and optical fiber or waveguide, become compact, highly reliable, one of the significant challenge of the optoelectronic package of low cost, based on the feature of VCSEl Vertical Launch, have much for multimode transmissions coupling scheme.
The first is: indirect coupling, adds optical element as lens between laser optical and optical fiber or waveguide, improves coupling efficiency.But, because VCSEL with PIN array adopts spun gold pressure welding to be connected with circuit, adopt lens to improve the coupling of VCSEL and PIN array and optical fiber or waveguide, but do not solve light path 90 ° of problems turned to, add packaging cost simultaneously.
The second is: direct-coupling, and laser optical is coupled directly into into optical fiber or waveguide, grinds reflection angle at 45 ° by fiber array, VCSEL and PIN array and fiber array coupling, the light path realizing 90 ° turns to output.But during optical fiber lapping, the Angle ambiguity between optical fiber and optical fiber, the glue amount of substrate bonding, the thickness decay etc. of optical fiber thin layer, determines the quality of optical fiber lapping and the efficiency of optically-coupled, and simultaneous grinding method is difficult to the efficiency improving large-scale production.
Summary of the invention
The application's multimode waveguide array couples structure that a kind of substrate of glass is provided and preparation method thereof, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
The application provides a kind of multimode waveguide array couples structure of substrate of glass, and described multimode waveguide array couples structure comprises:
Substrate of glass, is manufactured with multimode waveguide, and described multimode waveguide interval is arranged, and the first end face of described substrate of glass is cut with the inclination angle of 45 degree, makes the end of described multimode waveguide be processed into the reflection configuration of 45 degree;
Waveguide cover plate, is covered on the end face of described multimode waveguide.
Preferably, the spacing between the receipts unthreaded hole of the spacing between described multimode waveguide and the spacing between the lightening hole of vertical cavity surface emitting laser or PIN is consistent.
Preferably, the second end face opposing with described first end face in described substrate of glass is also cut into the inclination angle of 45 degree, makes the both ends of described multimode waveguide all be processed into the reflection configuration of 45 degree.
The application also provides a kind of method for making of multimode waveguide array couples structure of substrate of glass, and for making described multimode waveguide array couples structure, described method comprises:
Make described multimode waveguide on the glass substrate;
The substrate of glass upper and lower surface being manufactured with described multimode waveguide forms protective seam;
Ultrasonic cut is carried out to the one end of the substrate of glass being manufactured with described multimode waveguide, to form the inclination angle of described 45 degree at the first end face of described substrate of glass;
Ultrasonic cut is carried out to the second end face opposing with the first end face in described substrate of glass;
The end face of the multimode waveguide on described first end face and the second end face is ground;
Remove the protective seam in the upper and lower surface of described substrate of glass, and establish described cover plate at the end face lid of described multimode waveguide, obtain described multimode waveguide array couples structure.
Preferably, describedly make described multimode waveguide on the glass substrate, be specially:
Described multimode waveguide is made on the glass substrate by the mode of ion-exchange or deposition etch.
Preferably, after the described end face to the multimode waveguide on described first end face and the second end face grinds, described method also comprises: end face metal-coated films is after grinding as catoptron.
The application's beneficial effect is as follows:
The inclination angle of the application by the substrate of glass with multimode waveguide being cut with 45 degree, the end of described multimode waveguide is made to be processed into the reflection configuration of 45 degree, due to the technical maturity that substrate of glass is cut and ground, therefore, it is possible to large-scale production, be easy to realize, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described by the accompanying drawing used required in describing embodiment below, apparently, the accompanying drawing in the following describes is only some embodiments of the present invention.
Fig. 1 is the schematic diagram of the multimode waveguide array couples structure of a kind of substrate of glass of the application's better embodiment;
Fig. 2 is the schematic diagram of the multimode waveguide array couples structure of another better embodiment substrate of glass of the application
Fig. 3 is the manufacture method process flow diagram of the schematic diagram of the multimode waveguide array couples structure of a kind of substrate of glass in Fig. 1;
Fig. 4 is the structural representation of the substrate of glass being manufactured with multimode waveguide;
Fig. 5 is the side view of the substrate of glass in Fig. 4;
Fig. 6 is the schematic diagram after substrate of glass in the diagram being formed protective seam;
Fig. 7 is the schematic diagram substrate of glass in Fig. 6 being carried out to ultrasonic cut direction;
Fig. 8 is to the schematic diagram after substrate of glass ultrasonic cut in Fig. 7;
Fig. 9 is the schematic diagram other end of the substrate of glass in Fig. 8 being carried out to sound cut direction;
Figure 10 is to the schematic diagram after substrate of glass ultrasonic cut in Fig. 9;
Figure 11 is the schematic diagram substrate of glass after the cutting in Figure 10 being arranged metallic reflector.
Embodiment
The embodiment of the present application is by multimode waveguide array couples structure providing a kind of substrate of glass and preparation method thereof, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
Technical scheme in the embodiment of the present application is for solving the problems of the technologies described above, and general thought is as follows:
A kind of multimode waveguide array couples structure of substrate of glass, described multimode waveguide array couples structure comprises: substrate of glass, be manufactured with multimode waveguide, described multimode waveguide interval is arranged, first end face of described substrate of glass is cut with the inclination angle of 45 degree, makes the end of described multimode waveguide be processed into 45 degree; Waveguide cover plate, is covered on the end face of described multimode waveguide.
The inclination angle of the application by the substrate of glass with multimode waveguide being cut with 45 degree, the end of described multimode waveguide is made to be processed into the reflection configuration of 45 degree, due to substrate of glass cutting and grinding technics maturation, therefore, it is possible to large-scale production, be easy to realize, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
In order to better understand technique scheme, below in conjunction with Figure of description and concrete embodiment, technique scheme is described in detail.
Embodiment one
Adopting indirect coupling can not solve light path 90 ° to turn to, add packaging cost to solve in prior art, adopting quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.As shown in Figure 1, the multimode waveguide array couples structure of described substrate of glass comprises: substrate of glass 2 and waveguide cover plate 3.
Described substrate of glass 2 is manufactured with multimode waveguide 1, and described multimode waveguide 1 interval is arranged.The spacing that spacing between described multimode waveguide 1 and the spacing between VCSEL lightening hole and PIN receive between unthreaded hole is consistent.One end face of described substrate of glass 2 is cut with the inclination angle of 45 degree, and make the end, one end of described multimode waveguide 1 be processed into the reflection configuration of 45 degree, the end face of 45 degree can select metal coating, increases reflection.Then the other end of multimode waveguide 1 is coupled with fiber array etc., and is adhesively fixed, form the structure of Fig. 1, one end of fiber array is coupled with multimode lightguide, and the other end can be selected with the joints of optical fibre, such as MT, MPO head, support the plug coupling of optics.
In other embodiments, as shown in Figure 2, two relative end faces of described substrate of glass 2 all can be cut into the inclination angle of 45 degree, make the both ends of described multimode waveguide 1 be processed into the reflection configuration of 45 degree.
Described waveguide cover plate 3 is covered on the end face of described multimode waveguide 1, to protect described multimode waveguide 1, reduces the loss of waveguide.
Further, described multimode waveguide array couples structure also comprises multimode fiber array 4, for fixing upper fixture 5 and the lower clamp 6 of described multimode fiber array 4.
The inclination angle of the application by the substrate of glass with multimode waveguide 1 being cut with 45 degree, the end of described multimode waveguide 1 is made to be processed into 45 degree, due to the technical maturity of substrate of glass cutting, therefore, it is possible to large-scale production, be easy to realize, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
Embodiment two
Based on same inventive concept, the application also provides a kind of method for making of multimode waveguide array couples structure of substrate of glass, and the multimode waveguide array couples structure of described substrate of glass is the multimode waveguide array couples structure of a kind of substrate of glass of embodiment.As shown in Figure 2, described method for making comprises the following steps:
Step S110, described substrate of glass 2 makes described multimode waveguide 1, as shown in Figure 4 and Figure 5.In addition, specifically can be made by modes such as ion-exchanges, adopt ion-exchange to be made, make the distance of waveguide distance top covering very little, reduce the loss of coupling and waveguide covering.Described multimode waveguide 1 interval is arranged.The spacing that spacing between described multimode waveguide 1 and the spacing between VCSEL lightening hole and PIN receive between unthreaded hole is consistent.
Step S120, as shown in Figure 6, substrate of glass 2 upper and lower surface being manufactured with described multimode waveguide 1 forms protective seam, when preventing glass-cutting collapse limit and limit is collapsed in reduction.Protective seam can select paraffin or dry film.Before formation protective seam, can clean described substrate of glass 2.
Step S130, further, in order to reduce the roughness collapsing limit and ensure cut surface, needs the parameter optimizing excusing from death cutting.Ultrasonic cut is carried out to the one end of the substrate of glass 2 being manufactured with described multimode waveguide 1, to form the inclination angle of described 45 degree at the first end face of described substrate of glass 2, as shown in Figure 7 and Figure 8.Adopt the method for excusing from death cutting, the 45° angle that realizes of energy rapid, high volume is roughly ground, then passes through accurate grinding technics, realizes minute surface 45 ° reflection.
Step S140, carries out ultrasonic cut to the second end face opposing with the first end face in described substrate of glass 2, as shown in Figure 9 and Figure 10.The cutting angle of the second end face can be 45 degree or other angle determined according to demand, as 8 degree etc.
Step S150, grinds the end face of the multimode waveguide 1 on described first end face and the second end face, and end face after grinding, in addition, as required, can also select whether plate reflectance coating, as shown in figure 11.
Step S160, removes the protective seam in the upper and lower surface of described substrate of glass 2, and establishes described cover plate 3 at the end face lid of described multimode waveguide 1, reduces the loss of waveguide, obtains described multimode waveguide array couples structure.This coupled structure and the device such as VCSEL or PIN detector form optical transmission structure.
The application is by being made in substrate of glass by multimode waveguide 1, the inclination angle of 45 degree is cut with again in substrate of glass, the end of described multimode waveguide 1 is made to be processed into 45 degree, due to the technical maturity of substrate of glass cutting, therefore, it is possible to large-scale production, be easy to realize, solve in prior art and adopt indirect coupling can not solve light path 90 ° to turn to, add packaging cost, adopt quality and the coupling efficiency technical matters very rambunctious of optical fiber lapping during direct-coupling.
Although describe the preferred embodiments of the present invention, those skilled in the art once obtain the basic creative concept of cicada, then can make other change and amendment to these embodiments.So claims are intended to be interpreted as comprising preferred embodiment and falling into all changes and the amendment of the scope of the invention.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (6)
1. a multimode waveguide array couples structure for substrate of glass, is characterized in that, described multimode waveguide array couples structure comprises:
Substrate of glass, is manufactured with multimode waveguide, and described multimode waveguide interval is arranged, and the first end face of described substrate of glass is cut with the inclination angle of 45 degree, makes the end of described multimode waveguide be processed into the reflection configuration of 45 degree;
Waveguide cover plate, is covered on the end face of described multimode waveguide.
2. multimode waveguide array couples structure as claimed in claim 1, it is characterized in that, the spacing between the receipts unthreaded hole of the spacing between described multimode waveguide and the spacing between the lightening hole of vertical cavity surface emitting laser or PIN is consistent.
3. multimode waveguide array couples structure as claimed in claim 1 or 2, it is characterized in that, the second end face opposing with described first end face in described substrate of glass is also cut into the inclination angle of 45 degree, makes the both ends of described multimode waveguide all be processed into the reflection configuration of 45 degree.
4. a method for making for the multimode waveguide array couples structure of substrate of glass, for making the multimode waveguide array couples structure as described in claim arbitrary in claim 1-3, it is characterized in that, described method comprises:
Make described multimode waveguide on the glass substrate;
The substrate of glass upper and lower surface being manufactured with described multimode waveguide forms protective seam;
Ultrasonic cut is carried out to the one end of the substrate of glass being manufactured with described multimode waveguide, to form the inclination angle of described 45 degree at the first end face of described substrate of glass;
Ultrasonic cut is carried out to the second end face opposing with the first end face in described substrate of glass;
The end face of the multimode waveguide on described first end face and the second end face is ground;
Remove the protective seam in the upper and lower surface of described substrate of glass, and establish described cover plate at the end face lid of described multimode waveguide, obtain described multimode waveguide array couples structure.
5. method for making as claimed in claim 4, is characterized in that, describedly makes described multimode waveguide on the glass substrate, is specially:
Described multimode waveguide is made on the glass substrate by the mode of ion-exchange or deposition etch.
6. method for making as claimed in claim 4, it is characterized in that, after the described end face to the multimode waveguide on described first end face and the second end face grinds, described method also comprises: end face metal-coated films is after grinding as catoptron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510530375.3A CN105158848A (en) | 2015-08-26 | 2015-08-26 | Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof |
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| CN201510530375.3A CN105158848A (en) | 2015-08-26 | 2015-08-26 | Multi-mode waveguide array coupling structure of glass substrate, and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106371170A (en) * | 2016-10-26 | 2017-02-01 | 中国科学院半导体研究所 | Array waveguide type light path conversion interconnection chip |
| CN106371169A (en) * | 2016-10-19 | 2017-02-01 | 河南仕佳光子科技股份有限公司 | Multi-mode waveguide 90-degree turning array chip |
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| US6879757B1 (en) * | 2001-12-11 | 2005-04-12 | Phosistor Technologies, Inc. | Connection between a waveguide array and a fiber array |
| CN101520530A (en) * | 2009-03-26 | 2009-09-02 | 武汉电信器件有限公司 | Novel sideward coupling optical fiber component and processing method thereof |
| CN101776782A (en) * | 2010-01-25 | 2010-07-14 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions |
| CN204028413U (en) * | 2014-09-05 | 2014-12-17 | 曾振林 | A kind of novel optical fiber side coupled fiber array |
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2015
- 2015-08-26 CN CN201510530375.3A patent/CN105158848A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6879757B1 (en) * | 2001-12-11 | 2005-04-12 | Phosistor Technologies, Inc. | Connection between a waveguide array and a fiber array |
| CN1564039A (en) * | 2004-04-05 | 2005-01-12 | 武汉海博光技术有限公司 | Parallel optical array assembly with standard MPO interface |
| CN101520530A (en) * | 2009-03-26 | 2009-09-02 | 武汉电信器件有限公司 | Novel sideward coupling optical fiber component and processing method thereof |
| CN101776782A (en) * | 2010-01-25 | 2010-07-14 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrating light-emitting function of copper ions |
| CN204028413U (en) * | 2014-09-05 | 2014-12-17 | 曾振林 | A kind of novel optical fiber side coupled fiber array |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106371169A (en) * | 2016-10-19 | 2017-02-01 | 河南仕佳光子科技股份有限公司 | Multi-mode waveguide 90-degree turning array chip |
| WO2018072489A1 (en) * | 2016-10-19 | 2018-04-26 | 河南仕佳光子科技股份有限公司 | Multi-mode 90-degree-bend waveguide array chip |
| CN106371170A (en) * | 2016-10-26 | 2017-02-01 | 中国科学院半导体研究所 | Array waveguide type light path conversion interconnection chip |
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Application publication date: 20151216 |