CN105136039A - Novel optical arm amplification type one-dimensional linear measuring head - Google Patents
Novel optical arm amplification type one-dimensional linear measuring head Download PDFInfo
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- CN105136039A CN105136039A CN201510658573.8A CN201510658573A CN105136039A CN 105136039 A CN105136039 A CN 105136039A CN 201510658573 A CN201510658573 A CN 201510658573A CN 105136039 A CN105136039 A CN 105136039A
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Abstract
The invention discloses a novel optical arm amplification type one-dimensional linear measuring head comprising a laser source, a measuring head base, a photoelectric detector, a translation part and a processing system. The laser source is used for emitting laser beams. The measuring head base is used for reflecting the laser beams emitted by the laser source. The measuring head base comprises at least one reflecting surface. The measuring head base is provided with a detection rod and a detection ball used for detection. The photoelectric detector is used for receiving the laser beams reflected by the reflecting surfaces arranged on the measuring head base. The translation part is used for enabling the measuring head base or the photoelectric detector and the measuring head base together to perform linear movement so that the positions of the reflecting points of the laser beams on the reflecting surfaces of the measuring head base can be changed. The processing system obtains a detection ball displacement change value through calculation according to the change value of the reflecting positions of the laser beams received by the photoelectric detector. The measuring head can measure one-dimensional displacement of the measuring head caused by contacting of the measuring head and a detected workpiece so that measurement deviation of positioning of the detected workpiece can be compensated, more accurate measurement coordinates can be acquired and measurement precision can be enhanced. The structure is simplified and production cost is reduced by the measuring head so that mass processing and manufacturing are easy.
Description
Technical field
The present invention relates to a kind of Technology of Precision Measurement field, particularly the novel smooth arm amplifying type one-dimensional linear gauge head of one.
Background technology
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, and the development level of gauge head directly affects the measuring accuracy of precision measurement instrument and measurement efficiency.Precision feeler be usually divided into contact measuring head and contactless survey first two, wherein contact measuring head is divided into again mechanical type gauge head, touch trigger probe and scanning probe; Contactless gauge head is divided into laser feeler and optical video gauge head.
Mechanical type gauge head is a kind of gauge head that precision measurement instrument uses comparatively early.This gauge head is surveyed end by gauge head and directly to be contacted with measured workpiece and carry out position measurement, is mainly used in manual measurement.Such measuring head structure is simple, easy to operate, and its shortcoming is that precision is not high, measures efficiency low, and there be limited evidence currently of is used for field of industrial measurement.The widely used precision feeler in current industrial field is touch trigger probe.The measuring principle of touch trigger probe surveys precision measurement instrument when end contacts with measured workpiece when gauge head to send sampling pulse signal, and now survey the coordinate figure of the end centre of sphere by the disposal system latch of instrument, determines with this coordinate surveying end and measured workpiece contact point.Such gauge head has the advantages such as simple, the easy to use and higher triggering precision of structure, is most widely used gauge head in three dimensional probe, 3-D probe.But the shortcoming of such gauge head is: there is anisotropy (triangle effect), or contact measuring head produces micro-displacement when contacting measured workpiece because of resistance thus causes the offset deviation of gauge head, limit the further raising of its measuring accuracy, full accuracy can only reach zero point several microns.On the other hand, be spot measurement because touch trigger probe measuring principle determines its measuring process, measure efficiency low, limit it and promote the use of.
The gauge head type that current application is the widest is scanning probe, and such gauge head output quantity is directly proportional to gauge head side-play amount, and, function high as a kind of precision is strong, the gauge head of wide adaptability, possesses the function that workpiece spot measurement and continuous sweep are measured simultaneously.The measuring principle of such gauge head is that gauge head surveys end after contact measured workpiece, gauge head is subjected to displacement due to the effect of contact force, the conversion equipment of gauge head exports the signal be directly proportional to the minor shifts of measuring staff, and the respective coordinate value superposition of this signal and precision measurement instrument just can obtain the accurate coordinates that measured workpiece is put.If do not consider the distortion of measuring staff, scanning probe is isotropic, therefore its precision is far away higher than touch trigger probe.But the shortcoming of such gauge head is complex structure, and manufacturing cost is high, fewer companies is only had to produce at present in the world.
Summary of the invention
To the object of the invention is to overcome in prior art existing mechanical type gauge head and touch trigger probe precision not high, and scanning probe complex structure, above-mentioned deficiency that cost is higher, the novel smooth arm amplifying type one-dimensional linear gauge head that a kind of structure is simple, measuring accuracy is high is provided.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of novel smooth arm amplifying type one-dimensional linear gauge head, comprising:
Lasing light emitter, for Emission Lasers bundle;
Gauge head pedestal, comprises at least one reflecting surface, and for reflecting the laser beam that described lasing light emitter is launched, described gauge head pedestal is provided with the measuring staff for detecting and surveys ball;
Photodetector, for receiving the laser beam of reflective surface on described gauge head pedestal;
Member of translational, for making described gauge head pedestal do rectilinear motion, or for making described gauge head pedestal and photodetector jointly do rectilinear motion, to change the laser beam reflection point position on described gauge head pedestal reflecting surface;
Reply parts, for described gauge head pedestal is returned back to initial position, or described gauge head pedestal and photodetector are returned back to initial position jointly;
Disposal system, according to laser beam reflection change in location value received on described photodetector, calculates the change in displacement value of described survey ball.
This novel smooth arm amplifying type one-dimensional linear gauge head, utilize a lasing light emitter Emission Lasers bundle, this laser beam is collimated laser beam, incide on gauge head pedestal, laser beam reflection is gone out by the reflecting surface on gauge head pedestal, and inciding on photodetector, photodetector can respond to the reflection position of laser beam.Member of translational can make gauge head pedestal do rectilinear motion, or described gauge head pedestal and photodetector do rectilinear motion jointly, namely member of translational can rectilinear translation gauge head pedestal, or translation gauge head pedestal and photodetector simultaneously, to change the laser beam reflection point position on described gauge head pedestal reflecting surface, the position that its laser beam reflected away incides on photodetector also changes to some extent, by disposal system to the changing value of photodetector to different laser beam reflection position, carry out calculating and analyzing, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, by replying part reverts to initial position after gauge head pedestal is subjected to displacement, or described gauge head pedestal and photodetector be jointly subjected to displacement after by replying part reverts to initial position, be convenient to measurement next time.
This gauge head is arranged on precision measurement instrument, owing to gauge head pedestal connecting measuring staff and surveying ball, survey ball to be used for directly contacting with measured workpiece positioning and completing precision measurement instrument and measure, when surveying ball and directly contacting with measured workpiece, be subject to resistance and produce displacement, survey spherical zone moves gauge head pedestal, on member of translational, straight-line displacement occurs, pass through lasing light emitter, reflecting surface on gauge head pedestal, photodetector, disposal system coordinates, the displacement surveying ball can be calculated, the measured deviation when measured workpiece that when surveying ball contact measured workpiece to compensate, survey displacement of ball causes is located, obtain measured workpiece gauge head pedestal straight-line displacement direction and one-dimensional square to surving coordinate more accurately, full accuracy can reach Nano grade, improve the precision of measurement.This gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture.
Preferably, described member of translational is used for described gauge head pedestal to do rectilinear motion along the direction perpendicular to described photodetector.
Preferably, this one-dimensional linear gauge head also comprises housing, and described lasing light emitter is fixed in described housing, and described photodetector is rotatable to be arranged in described housing, described member of translational comprises the gathering sill being positioned at described housing, and described gauge head pedestal is provided with the slide block with described gathering sill adaptation.
This gauge head comprises the housing be located on precision measurement instrument, this housing is integrated with lasing light emitter, photodetector and member of translational, is convenient to installation and removal.Wherein member of translational is gathering sill, and gauge head pedestal can do rectilinear motion by slide block in gathering sill, to change the laser beam reflection point position on described gauge head pedestal reflecting surface.
Preferably, described reply parts to be located in described housing and for described gauge head pedestal is returned back to initial position, or for described gauge head pedestal and photodetector are returned back to initial position jointly.
Preferably, reply parts are spring, and its one end is connected on described gauge head pedestal, and the other end connects on the housing.Survey ball be subject to measured workpiece resistance and be subjected to displacement and cause that gauge head pedestal is corresponding to be subjected to displacement, after gauge head completes measurement, reply parts and gauge head pedestal can be returned back to initial position (i.e. installation site), so that the Measurement accuracy of next measured workpiece measurement point.
Preferably, this one-dimensional linear gauge head also comprises housing, described member of translational and reply parts are parallel spring structure, wherein said parallel spring structure comprises the contiguous block be connected on described gauge head pedestal and the seat board be fixed on housing, be connected with two reeds be parallel to each other between described contiguous block and described seat board, described contiguous block can move in parallel and reset by relatively described seat board.
This member of translational and reply parts can pass through two parallel reeds, contiguous block is connected on gauge head pedestal, during gauge head pedestal top offset, two parallel reeds are driven to move, now contiguous block relative seat board generation parallel displacement, because reed has restoring force, because original position can be returned to, return back to initial position by gauge head pedestal.
Preferably, described photodetector is Position-Sensitive Detector.
The Position-Sensitive Detector into commonly using selected by this photodetector, and (English is PositionSensitiveDetector, be called for short PSD), belong to semiconductor devices, generally make PN, its principle of work is based on lateral photo effect, can be used in the accurate measurement of position coordinates, there is the advantages such as high sensitivity, high resolving power, fast response time and configuration circuit are simple.
Preferably, described photodetector is One Dimensional Position Sensitive Detectors.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD), can detect the movement of a bright spot at its unique direction upper surface.Respectively one-dimensional PSD is arranged on the X-axis of housing, Y-axis or Z axis, or other directions, to obtain its shift value in this direction, and is compensated on the measured value of measured workpiece, to obtain this one-dimensional square to measured value more accurately.
Preferably, described One Dimensional Position Sensitive Detectors is rotatable on the side being positioned at described housing.
Rotatable One Dimensional Position Sensitive Detectors can change its position of rotation according to actual required measuring accuracy, relative position and the angle of One Dimensional Position Sensitive Detectors and gauge head pedestal reflecting surface can be changed, thus change the enlargement factor that One Dimensional Position Sensitive Detectors measures gauge head displacement, to meet actual needs.
Preferably, described gauge head pedestal is trapezoidal stage body, and described reflecting surface is positioned at bucking ladder body side surface.
The gauge head pedestal side of trapezoidal stage body is plane, is convenient to manufacture processing reflecting surface, and installs measuring staff and survey ball, reduces production cost.
Preferably, the shape of described gauge head pedestal is rectangular parallelepiped, and described reflecting surface is positioned on this rectangular parallelepiped one side, and the laser beam oblique incidence that described lasing light emitter is launched is on described reflecting surface.
The shape of this gauge head pedestal is rectangular parallelepiped, rectangular parallelepiped slides by member of translational, and a side is vertically set to reflecting surface, by lasing light emitter slant setting to this rectangular parallelepiped, the laser beam oblique incidence enabling it launch on reflecting surface, and reflexes to photodetector.The gauge head pedestal of rectangular parallelepiped is easy to process, and install simple, reflecting surface and installed surface are processed in its side, and precision easily ensures.
Preferably, connect measuring staff below described gauge head pedestal, described measuring staff end connects surveys ball.
Compared with prior art, beneficial effect of the present invention:
1, the novel smooth arm amplifying type one-dimensional linear gauge head of one of the present invention, utilize a lasing light emitter Emission Lasers bundle, incide on gauge head pedestal, laser beam reflection is gone out by the reflecting surface on gauge head pedestal, and incide on photodetector, photodetector can respond to the reflection position of laser beam, member of translational can make gauge head pedestal do rectilinear motion, or described gauge head pedestal and photodetector do rectilinear motion jointly, when the laser beam reflection point position on gauge head pedestal reflecting surface changes, its laser beam reflected away incides that position on photodetector is corresponding to change, calculate by the changing value of disposal system to the laser beam reflection position of photodetector and analyze, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, this gauge head is arranged on precision measurement instrument, when surveying ball and directly contacting with measured workpiece, be subject to resistance and produce displacement, survey spherical zone moves gauge head pedestal, on member of translational, straight-line displacement occurs, disposal system can calculate the displacement surveying ball, the measured workpiece deviations that when surveying ball contact measured workpiece to compensate, displacement causes, obtain measured workpiece at gauge head pedestal straight-line displacement direction surving coordinate more accurately, full accuracy can reach Nano grade, improve the precision of measurement, by replying part reverts to initial position after gauge head pedestal is subjected to displacement, or gauge head pedestal and photodetector be jointly subjected to displacement after by replying part reverts to initial position, be convenient to measurement next time, this gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture,
2, gauge head of the present invention comprises the housing be located on precision measurement instrument, this housing is integrated with lasing light emitter, photodetector and member of translational, is convenient to installation and removal.Wherein member of translational is gathering sill, and gauge head pedestal can do rectilinear motion by slide block in gathering sill, to change the laser beam reflection point position on gauge head pedestal reflecting surface;
3, reply parts are also provided with in housing of the present invention, it replys parts is spring, survey ball be subject to measured workpiece resistance and be subjected to displacement and cause that gauge head pedestal is corresponding to be subjected to displacement, after gauge head completes measurement, reply parts and gauge head pedestal can be returned back to initial position, i.e. installation site, so that the Measurement accuracy of next measured workpiece measurement point;
4, One Dimensional Position Sensitive Detectors selected by photodetector of the present invention, and rotatable installation, one-dimensional PSD Position-Sensitive Detector is arranged on the X-axis of housing, Y-axis or Z axis, or other directions, to obtain its shift value in this direction, and compensated on the measured value of measured workpiece, relative position and the angle of One Dimensional Position Sensitive Detectors and gauge head pedestal reflecting surface can be changed simultaneously, thus change the enlargement factor that One Dimensional Position Sensitive Detectors measures gauge head displacement, to obtain this one-dimensional square to measured value more accurately, meet actual needs;
5, the shape of gauge head pedestal of the present invention is trapezoidal stage body or rectangular parallelepiped, and the side of its gauge head pedestal is plane, is convenient to manufacture processing reflecting surface, and installs measuring staff and survey ball, reduces production cost.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of a kind of novel smooth arm amplifying type one-dimensional linear gauge head of the present invention;
Fig. 2 is the light path schematic diagram of a kind of novel smooth arm amplifying type one-dimensional linear gauge head of the present invention;
Fig. 3 be in Fig. 2 gauge head pedestal be subjected to displacement after light path schematic diagram;
Fig. 4 be in Fig. 3 Position-Sensitive Detector rotate to an angle after light path schematic diagram;
Fig. 5 is the another kind of structural representation of a kind of novel smooth arm amplifying type one-dimensional linear gauge head of the present invention;
Fig. 6 is the light path schematic diagram of Fig. 5 one-dimensional linear gauge head;
Fig. 7 is the member of translational of one-dimensional linear gauge head in embodiment 4 and replys the structural representation that parts are parallel spring structure.
Mark in figure:
1, lasing light emitter, 2, laser beam, 3, photodetector, 4, gauge head pedestal, 5, reflecting surface, 6, measuring staff, 7, survey ball, 8, gathering sill, 9, reply parts, 10, housing, 11, contiguous block, 12, seat board, 13, reed, 14, auxiliary reed.
Embodiment
Below in conjunction with embodiment and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1
As shown in Figure 1, a kind of novel smooth arm amplifying type one-dimensional linear gauge head, comprising:
Lasing light emitter 1, for Emission Lasers bundle 2;
Gauge head pedestal 4, comprises at least one reflecting surface 5, and for the laser beam 2 that reflected laser light source 1 is launched, gauge head pedestal 4 is provided with the measuring staff 6 for detecting and surveys ball 7;
Photodetector 3, for receiving the laser beam 2 that on gauge head pedestal 4, reflecting surface 5 reflects;
Member of translational, for making gauge head pedestal 4 do rectilinear motion, or gauge head pedestal 4 does rectilinear motion, to change laser beam 2 reflection point position on gauge head pedestal 4 reflecting surface 5 jointly with photodetector 3;
Reply parts 9, will for described gauge head pedestal 4 being returned back to initial position;
Disposal system, according to laser beam 2 reflection position changing value received on photodetector 3, calculates the change in displacement value surveying ball 7.
This gauge head also comprises housing 10, and lasing light emitter 1 is fixed in described housing 10, and photodetector 3 is rotatable to be arranged in housing 10.Member of translational is for translation gauge head pedestal 4, in particular for gauge head pedestal 4 is done rectilinear motion along the direction perpendicular to photodetector 3.Concrete, member of translational comprises the gathering sill 8 being positioned at housing 10, gauge head pedestal 4 is provided with the slide block with gathering sill 8 adaptation, slide block is located at bottom gauge head pedestal 4, gauge head pedestal 4 can do rectilinear motion by slide block in gathering sill 8, to change laser beam 2 reflection point position on gauge head pedestal 4 reflecting surface 5.Integrated laser source 1, photodetector 3 and member of translational in this housing 10, be convenient to installation and removal.
In addition, replying parts 9 is located in housing 10, replying parts 9 is spring, survey ball 7 be subject to measured workpiece resistance and be subjected to displacement the gauge head pedestal 4 caused and be subjected to displacement, after gauge head completes measurement, reply parts 9 and gauge head pedestal can be returned back to initial position, i.e. installation site, be convenient to the Measurement accuracy of next measured workpiece measurement point.
Above-mentioned gauge head pedestal 4 selects trapezoidal stage body, and reflecting surface 5 is positioned at bucking ladder body side surface, connects measuring staff 6 below gauge head pedestal 4, and measuring staff 6 end connects surveys ball 7.Its side of gauge head pedestal 4 of trapezoidal stage body is plane, is convenient to manufacture processing reflecting surface 5, and installs measuring staff 6 and survey ball 7, reduces production cost.
This novel smooth arm amplifying type one-dimensional linear gauge head, utilize a lasing light emitter 1 Emission Lasers bundle 2, this laser beam 2 is collimated laser beam, incide on gauge head pedestal 4, laser beam 2 reflects away by the reflecting surface 5 on gauge head pedestal 4, and inciding on photodetector 3, photodetector 3 can respond to the reflection position of laser beam 2.Member of translational can make gauge head pedestal 4 do rectilinear motion, or the gauge head of translation simultaneously pedestal 4 and photodetector 3, to change laser beam 2 reflection point position on gauge head pedestal 4 reflecting surface 5, calculate by the changing value of disposal system to photodetector 3 pairs of different reflection positions of laser beam 2 and analyze, gauge head pedestal 4 can be obtained and be positioned at the change in displacement value in its straight-line displacement direction.
This gauge head is arranged on precision measurement instrument, owing to gauge head pedestal 4 connecting measuring staff 6 and surveying ball 7, survey ball 7 to position for directly contacting with measured workpiece and complete precision measurement instrument and measure, when surveying ball 7 and directly contacting with measured workpiece, be subject to resistance and produce displacement, surveying ball 7 drives gauge head pedestal 4, on member of translational, straight-line displacement occurs, by lasing light emitter 1, reflecting surface 5 on gauge head pedestal 4, photodetector 3, disposal system coordinates, the displacement surveying ball 7 can be calculated, the measured workpiece deviations that when ball 7 contacts measured workpiece, displacement causes is surveyed to compensate, due to the displacement of gauge head pedestal 4 that photodetector 3 obtains, the more accurately surving coordinate of measured workpiece in gauge head pedestal 4 straight-line displacement direction can be obtained, improve the precision of measurement.This gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture.
Conventional Position-Sensitive Detector selected by photodetector 3 used in the present invention.Position-Sensitive Detector, English name is PositionSensitiveDetector, be called for short PSD, belong to semiconductor devices, generally make PN, its principle of work is based on lateral photo effect, can be used in the accurate measurement of position coordinates, has the advantages such as high sensitivity, high resolving power, fast response time and configuration circuit are simple.This Position-Sensitive Detector is divided into One Dimensional Position Sensitive Detectors and two-dimensional position-sensitive detector, and in order to cost-saving, the present embodiment selects One Dimensional Position Sensitive Detectors.One Dimensional Position Sensitive Detectors, be called for short one-dimensional PSD, detectable go out the movement of bright spot on the surface in its a unique direction.Respectively one-dimensional PSD is arranged on the X-axis of housing 10, Y-axis or Z axis, or other directions, to obtain its shift value in this direction, and is compensated on the measured value of measured workpiece, to obtain this one-dimensional square to measured value more accurately.
Measure the enlargement factor of this gauge head displacement to adjust One Dimensional Position Sensitive Detectors, this One Dimensional Position Sensitive Detectors is rotatable on the side being positioned at housing 10.
Rotatable One Dimensional Position Sensitive Detectors can change its position of rotation according to actual required measuring accuracy, change relative position and the angle of the reflecting surface 5 of One Dimensional Position Sensitive Detectors and gauge head pedestal 4, thus change the enlargement factor that One Dimensional Position Sensitive Detectors measures this gauge head displacement, meet actual needs.
As shown in Figure 2 and Figure 3, the measuring principle of this gauge head as shown in the figure, gauge head pedestal 4 moves horizontally in process, laser beam 2 vertically incides on gauge head pedestal 4, incidence point on reflecting surface 5 changes, suppose that surface level and reflected light angle are α, the gauge head pedestal surface of emission 5 is β with the angle of surface level, wherein α=2 β-90 °, wherein 45 ° of < β <90 °, when translation distance is x to gauge head in the horizontal direction, One Dimensional Position Sensitive Detectors measuring distance is y, so, the gauge head pedestal 4 displacement equations multiple obtained measured by One Dimensional Position Sensitive Detectors is
As shown in Figure 4, One Dimensional Position Sensitive Detectors is rotated and the certain angle that tilts, after θ, again can adjust enlargement factor, obviously can find out when the distance x that gauge head pedestal 4 translation is identical in figure, on One Dimensional Position Sensitive Detectors after inclination, the reflection position of two reflection lasering beams 2 there occurs change, the spacing of the two becomes large, the spacing of the two is xtan β cos θ+xtan β sin θ tan (α+θ), now, the gauge head pedestal 4 displacement equations multiple obtained measured by this One Dimensional Position Sensitive Detectors is tan β cos θ+tan β sin θ tan (α+θ).This angle can adjust according to different needs.
Embodiment 2
The present embodiment is consistent with the basic structure of embodiment 1, difference is, gauge head pedestal 4 and photodetector 3 are done rectilinear motion jointly by moving-member, reply parts 9 and connect gauge head pedestal 4 and photodetector 3, for gauge head pedestal 4 and photodetector 3 are returned back to initial position jointly, namely carry out in measuring process at gauge head, gauge head pedestal 4 and photodetector 3 associated movement, obtain the displacement equations multiple of this embodiment according to geometric relationship.
Embodiment 3
As shown in Figure 5,6, be the structural representation of the novel smooth arm amplifying type one-dimensional linear gauge head of another kind, as in embodiment 1, include: for the lasing light emitter 1 of Emission Lasers bundle 2; For the gauge head pedestal 4 of the laser beam 2 that reflected laser light source 1 is launched, this gauge head pedestal 4 comprises at least one reflecting surface 5, and gauge head pedestal 4 is provided with the measuring staff 6 for detecting workpiece and surveys ball 7; For the photodetector 3 of the laser beam 2 that the reflecting surface 5 received on gauge head pedestal 4 reflects; For making gauge head pedestal 4 do rectilinear motion, to change the member of translational of laser beam 2 reflection point position on the reflecting surface 5 of gauge head pedestal 4; For described gauge head pedestal 4 being returned back to the reply parts 9 of initial position; And according to laser beam 2 reflection position changing value received on photodetector 3, calculate the disposal system of the change in displacement value surveying ball 7.
With in embodiment 1 unlike, the shape of gauge head pedestal 4 is rectangular parallelepiped, and this rectangular parallelepiped slides in the horizontal direction by member of translational, and a side is vertically set to reflecting surface to this rectangular parallelepiped.For the ease of measure, by lasing light emitter 1 slant setting, its degree of tilt is 90 ° of-α, the laser beam 2 making it launch can oblique incidence on reflecting surface 5, incident angle is also 90 ° of-α, and reflexes on photodetector 3.
Gauge head pedestal 4 is made rectangular shape, is convenient to processing, installing also can be more simple, and in addition, reflecting surface 5 installed surface is processed in the side of rectangular parallelepiped, and precision easily ensures.
Embodiment 4
As shown in Figure 7, be the structural representation of the novel smooth arm amplifying type one-dimensional linear gauge head of another kind, as in embodiment 1, include: for the lasing light emitter 1 of Emission Lasers bundle 2; For the gauge head pedestal 4 of the laser beam 2 that reflected laser light source 1 is launched, this gauge head pedestal 4 comprises at least one reflecting surface 5, and gauge head pedestal 4 is provided with the measuring staff for detecting workpiece and surveys ball; For the photodetector 3 of the laser beam 2 that the reflecting surface 5 received on gauge head pedestal 4 reflects; For making gauge head pedestal 4 do rectilinear motion, to change the member of translational of laser beam 2 reflection point position on the reflecting surface 5 of gauge head pedestal 4; For described gauge head pedestal 4 being returned back to the reply parts 9 of initial position; And according to laser beam 2 reflection position changing value received on photodetector 3, calculate the disposal system of the change in displacement value surveying ball 7.
With in embodiment 1 unlike, this member of translational and reply parts 9 are parallel spring structure, wherein parallel spring structure comprises the contiguous block 11 be connected on gauge head pedestal 4 and the seat board 12 fixed on the housing 10, be connected with two reeds be parallel to each other 13 between contiguous block 11 and seat board 12, contiguous block 11 can move in parallel and reset by relatively described seat board 12.
Concrete, isometric with two the respectively reed 13 that is parallel to each other of contiguous block 11 and seat board 12 is connected, contiguous block 11 is made to form a parallelogram parallel spring structure with the relative motion of seat board 12, move because gauge head pedestal 4 is stressed, contiguous block 11 relatively seat board 12 can only do translation, restriction gauge head pedestal 4 can only at one-dimensional square to being subjected to displacement, moving up and down as shown by the arrows in Figure 7.Two reeds 13 can provide restoring force, and in order to increase the recovery efficiency of restoring force, between contiguous block 11 and seat board 12, be also provided with an auxiliary reed 14 increases restoring force.This parallel spring structure is simple, it is high to reply efficiency, effectively can realize gauge head pedestal 4 at one-dimensional square to the translation of such as X or Y or Z-direction and return action.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (10)
1. a novel smooth arm amplifying type one-dimensional linear gauge head, is characterized in that, comprising:
Lasing light emitter (1), for Emission Lasers bundle (2);
Gauge head pedestal (4), comprise at least one reflecting surface (5), for reflecting the laser beam (2) that described lasing light emitter (1) is launched, described gauge head pedestal (4) is provided with the measuring staff (6) for detecting and surveys ball (7);
Photodetector (3), for receiving the laser beam (2) that the upper reflecting surface (5) of described gauge head pedestal (4) reflects;
Member of translational, rectilinear motion is done for making described gauge head pedestal (4), or for making described gauge head pedestal (4) and photodetector (3) jointly do rectilinear motion, to change laser beam (2) reflection point position on described gauge head pedestal (4) reflecting surface (5);
Reply parts (9), for described gauge head pedestal (4) is returned back to initial position, or described gauge head pedestal (4) and photodetector (3) are returned back to initial position jointly;
Disposal system, according to upper received laser beam (2) the reflection position changing value of described photodetector (3), calculates the change in displacement value of described survey ball (7).
2. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 1, it is characterized in that, also comprise housing (10), described lasing light emitter (1) is fixed in described housing (10), described photodetector (3) is rotatable to be arranged in described housing (10), described member of translational comprises the gathering sill (8) being positioned at described housing (10), and described gauge head pedestal (4) is provided with the slide block adaptive with described gathering sill (8).
3. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 2, it is characterized in that, described reply parts (9) to be located in described housing (10) and for described gauge head pedestal (4) is returned back to initial position.
4. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 3, it is characterized in that, described reply parts (9) are spring, and its one end is connected on described gauge head pedestal (4), the other end is connected on described housing (10).
5. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 1, it is characterized in that, also comprise housing (10), described member of translational and reply parts (9) are parallel spring structure, wherein said parallel spring structure comprises the contiguous block (11) be connected on described gauge head pedestal (4) and the seat board (12) be fixed on housing (10), two reeds be parallel to each other (13) are connected with between described contiguous block (11) and described seat board (12), described contiguous block (11) relatively described seat board (12) can move in parallel and reset.
6., according to the arbitrary described novel smooth arm amplifying type one-dimensional linear gauge head of one of claim 1-5, it is characterized in that, described photodetector (3) is Position-Sensitive Detector.
7. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 6, it is characterized in that, described photodetector (3) is One Dimensional Position Sensitive Detectors.
8. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 7, it is characterized in that, described One Dimensional Position Sensitive Detectors is rotatable on the side being positioned at described housing (10).
9. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 6, it is characterized in that, described gauge head pedestal (4) is trapezoidal stage body, and described reflecting surface (5) is positioned at bucking ladder body side surface.
10. the novel smooth arm amplifying type one-dimensional linear gauge head of one according to claim 6, it is characterized in that, the shape of described gauge head pedestal (4) is rectangular parallelepiped, described reflecting surface (5) is positioned on a side of this rectangular parallelepiped, and laser beam (2) oblique incidence that described lasing light emitter (1) is launched is on described reflecting surface (5).
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| CN201510658573.8A CN105136039B (en) | 2015-10-12 | 2015-10-12 | A kind of smooth arm amplifying type one-dimensional linear gauge head |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111397555A (en) * | 2020-04-14 | 2020-07-10 | 中国计量科学研究院 | Parameter error measuring method and system of trigger type measuring head |
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| CN105136039B (en) | 2019-02-15 |
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Address after: 225800 No.5 No.6 workshop, Anyi Industrial Park, Baoying County, Yangzhou City, Jiangsu Province Patentee after: Qihao Precision Machinery (Yangzhou) Co.,Ltd. Address before: 225800 No.5 No.6 workshop, Anyi Industrial Park, Baoying County, Yangzhou City, Jiangsu Province Patentee before: JIANGSU QIHAO PRECISION MACHINERY Co.,Ltd. |