CN105135876A - Continuous production and sintering device for self-supported ceramic thin film - Google Patents
Continuous production and sintering device for self-supported ceramic thin film Download PDFInfo
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- CN105135876A CN105135876A CN201510568122.5A CN201510568122A CN105135876A CN 105135876 A CN105135876 A CN 105135876A CN 201510568122 A CN201510568122 A CN 201510568122A CN 105135876 A CN105135876 A CN 105135876A
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Abstract
The invention discloses a continuous production and sintering device for a self-supported ceramic thin film, and relates to a ceramic thin film. The continuous production and sintering device is provided with a high-temperature furnace system and a sample conveying system. The high-temperature furnace system is provided with a furnace body, a heating device and a vacuum device. The furnace body is provided with a hearth, a heat insulation layer and a vacuum layer. The hearth is divided by the heat insulation layer into a sample introduction chamber, a sintering chamber, a cooling chamber and a sample collection chamber. The heating device is provided with a thermocouple and a temperature controller. The vacuum device is provided with an inner furnace vacuum pump and a vacuum layer vacuum pump. The sample conveying system is provided with a sample introduction chamber sample winding device, a sample conveying device and a sample collection chamber sample winding device. The sample introduction chamber sample winding device is provided with a film winding drum, a fixing rod, a bearing, a motor shaft gear, a bearing gear and a film winding drum motor. The sample conveying device is provided with a sample carrier table, a fixing rod, a bearing, a motor shaft gear, a bearing gear, a big gear wheel, a conveying device motor, a chain and a conveying belt. The sampling chamber sample winding device is provided with a film winding drum, a fixing rod, a bearing, a motor shaft gear, a bearing gear and a film winding drum motor.
Description
Technical field
The present invention relates to ceramic membrane, especially relate to the continuous prodution sintering equipment of a kind of self-supporting ceramic membrane under hot environment atmosphere.
Background technology
Ceramic membrane is with special process technology, ceramic material is made thickness still can keep a ceramic superior function class ceramic material in micron level.Made thin-film device can be used in the technology such as integrated circuit, semiconductor circuit.In recent years, microelectromechanical systems (MEMS), as emerging technology, achieves development with rapid changepl. never-ending changes and improvements by means of its powerful vitality, has driven research and the improvement of large quantities of new material thus.Wherein, various ceramic membrane material is subject to the favor of numerous researcher owing to having some superior performances.Common ceramic membrane has: the barium titanate film of high-k, lead titanate thin film, can be used for manufacturing jumbo thin film capacitor; Mix the strontium ba titanate film of lanthanum, can be made into temperature-sensitive bolometer; Strontium barium niobate film, can be made into pyroelectric detector; Bismuth titanate film, can be made into ferroelectric display; Yttrium barium copper oxide film, can be made into superconductor; Aluminum oxide film, zirconia film, thin film of titanium oxide, can be used as solid-liquid separation film and use; Carborundum films has that breakdown electric field is high, thermal conductivity is large, dielectric constant is little, electron mobility is high, thermal coefficient of expansion is low, capability of resistance to radiation is strong and the chemical stability excellent physicochemical characteristics such as good, plays an important role in the fields such as MEMS, power device, light emitting diode (LED).
Current thin film technology of preparing is numerous, mainly concentrates on physical vapor transport (PVT), chemical vapour deposition (CVD) (CVD), rheotaxial growth (LPE), molecular beam epitaxy (MBE) and polymer precursor conversion method (PDC) etc.Chemical vapour deposition technique is the common method preparing film, because its uniformity of film prepared is good, can in large-area substrates film forming and be easy to the advantages such as control and gain great popularity, thus be widely used in semiconductor production and components and parts coating process, but still there is many weak points in CVD, SiC sedimentation rate is slow, cost is high, and can only carry out surface deposition, and the manufacture for the three-dimensional microstructures of complicated high-ratio surface is inapplicable.Research shows, by silicon chip high temperature deposition 3C-SiC film, film and substrate Si also exist comparatively Macrolattice mismatch (being about 20%) and thermal expansion mismatch (being about 8%), cause product to there is a large amount of residual stress, seriously constrain the scope of application of SiC film.And when making the structure member such as microactrator and micro mechanism, the stripping of substrate causes the serious waste of complicated and resource of the rough surface of film product, technique.Comparatively speaking, polymer precursor conversion method (PDC method) just shows significant advantage in the preparation of film, its raw material can be liquid polymer, solution or melt, being coated on substrate or injecting adopts photo-crosslinking to solidify after mould or the method such as hot-forming makes it solidify, can use for reference processing of high molecular material technique to process various parts, it is particularly suitable for the miniature ceramic component of high-ratio surface manufacturing complicated shape.The advantages such as PDC Faxian reveals that raw material selection range is wide, preparation technology is simple and precursor synthesis method temperature is lower, and can the structure of precursor be designed, to change composition, the stuctures and properties of product, meet the instructions for use of different materials.Therefore, PDC method all has good prospect in high temperature MEMS Domain Theory investigation and application.
Precursor pyrolysis and hot pressing is a major transformation of field of ceramic material preparation, and it is using organometallic polymer as precursor, through cure treatment and Pintsch process, makes it to become inorganic ceramic material.For self-supporting silicon carbide ceramic thin film, precursor pyrolysis and hot pressing and melting are spun embrane method and are combined and prepare continuous self-supporting silicon carbide ceramic thin film by the applicant in Chinese patent ZL2008100705331, it utilizes a kind of special film shaping device, prepare that film thickness is less, surface more smooth, dense uniform, the former film of continuous print PCS, can obtain self-supporting silicon carbide ceramic thin film through follow-up cure treatment and Pintsch process, and this technology production technology is simple, cost is low.But, due to existing high temp sintering device exist uniform temperature zone shorter, can not the problems such as automation be realized, the sintering process causing film follow-up cannot realize serialization.
Have some at present about the patent of continuous sintering furnace apparatus, but the continuous prodution sintering equipment being applicable to self-supporting ceramic membrane also not yet finds.
About the design of many stoves section continuous fritting furnace in Chinese patent CN201311177Y, because its inside exists multiple tracks door structure, therefore be only suitable for the sintering of some the small size parts manufactured for methods such as metal powder injection moldings, continuous prodution sintering cannot be carried out to continuous self-supporting ceramic membrane.
About the design of continuous fritting furnace and manufacturing system in Chinese patent CN101839637A, although may be used for the continuous prodution sintering of continuous self-supporting ceramic membrane, but because the entrance and exit of this device communicates with external environment condition, special sintering atmosphere requirement therefore cannot be met.
About the design of push boat type vacuum resistance direct-heating hot-press continuous sintering furnace in Chinese patent CN2375937Y, although vacuum and special atmosphere requirement can be realized, but the continuous feeding and discharging mechanism of its push boat type cannot meet the serialization sintering requirement of continuous self-supporting ceramic membrane, and therefore this device is also only applicable to the R&D and production of diamond composition, powder metallurgy and cermet product.
By researching and analysing discovery above, designing a kind of continuous prodution sintering equipment of self-supporting ceramic membrane under hot environment atmosphere that can be used for and being very important.
Summary of the invention
Object of the present invention is intended to the low limitation that namely cannot realize continuous prodution sintering of, automaticity short for existing ceramic post sintering device uniform temperature zone, provides the continuous prodution sintering equipment of a kind of self-supporting ceramic membrane that can be used under hot environment atmosphere.
The present invention is provided with high temperature furnace system and sample conveyance system;
Described high temperature furnace system is provided with body of heater, heater, vacuum plant;
Described body of heater is interior stove and outer stove double-decker, body of heater is provided with burner hearth, thermal insulation layer and vacuum layer, burner hearth is divided into Sample Room, agglomerating chamber, cooling chamber, receipts specimen chamber by thermal insulation layer, vacuum layer is located between inner furnace body and external furnace body, Sample Room is provided with Sample Room glove box, Sample Room optical transmission window and Sample Room fire door, receives specimen chamber and is provided with receipts specimen chamber glove box, receives specimen chamber optical transmission window and receive specimen chamber fire door;
Described heater is provided with thermocouple and temperature controller, and thermocouple is located in agglomerating chamber, and thermocouple is connected with temperature controller;
Described vacuum plant is provided with interior stove vavuum pump and vacuum layer vavuum pump, and the air inlet of interior stove vavuum pump is connected with the gas outlet of receiving specimen chamber, and the air inlet of vacuum layer vavuum pump is connected with the gas outlet of vacuum layer;
Described sample conveyance system is provided with Sample Room sample coiler device, device for transferring samples and receipts specimen chamber sample coiler device, and device for transferring samples is located at Sample Room sample coiler device and is received between specimen chamber sample coiler device;
Described Sample Room sample coiler device is provided with Sample Room volume film cylinder, Sample Room fixed bar, Sample Room bearing, Sample Room generator shaft gear, Sample Room Bearing gear and Sample Room volume film cylinder motor, Sample Room volume film cylinder is fixed on body of heater by Sample Room fixed bar, Sample Room bearing is located between Sample Room volume film cylinder and Sample Room fixed bar, Sample Room rolls up film cylinder with Sample Room fixed bar for central axis, Sample Room generator shaft gear engages with Sample Room Bearing gear, and Sample Room generator shaft gear is located on the motor shaft of Sample Room volume film cylinder motor;
Described device for transferring samples is provided with load sample platform, sample transmits fixed bar, sample transmission bearing, sample transmits generator shaft gear, sample transmission bearing gear, sample transmits gear wheel, conveyer motor, sample transmission chain and sample conveyer belt, load sample platform is for connecting device for transferring samples and sample coiler device, sample transmits gear wheel, sample transmission bearing gear, sample transmission chain and sample conveyer belt transmit fixed bar by sample and are fixed on body of heater, sample transmits gear wheel and sample transmission chain engages each other, sample conveyer belt is attached on sample transmission chain, sample transmission bearing is located at sample transmission gear wheel and sample transmits between fixed bar, sample transmits gear wheel and transmits fixed bar for central axis with sample, the sample be located in cooling chamber transmits gear wheel and realizes transmission by sample transmission generator shaft gear and conveyer motor, conveyer motor transmits generator shaft gear by sample and drives sample transmission chain to rotate,
Described receipts specimen chamber sample coiler device is provided with and receives specimen chamber volume film cylinder, receive specimen chamber fixed bar, receive specimen chamber bearing, receive specimen chamber generator shaft gear, receive specimen chamber Bearing gear and receive specimen chamber volume film cylinder motor, receiving specimen chamber volume film cylinder is fixed on body of heater by receiving specimen chamber fixed bar, receive specimen chamber bearing be located at receipts specimen chamber volume film cylinder and receive between specimen chamber fixed bar, receive specimen chamber volume film cylinder to receive specimen chamber fixed bar for central axis, receive specimen chamber generator shaft gear to engage with receipts specimen chamber Bearing gear, receive specimen chamber generator shaft gear and be located on the motor shaft of receipts specimen chamber volume film cylinder motor.
The setting-up piece for fixing inner furnace body can be provided with in described vacuum layer.
Proper Design of the present invention is interior stove and outer stove double-decker, interior stove Main Function ensures high temperature, burner hearth material can select magnesia (fusing point 2800 DEG C), thermal insulation layer can select polycrystalline mullite fibre plate material (Long-Time Service temperature 0 ~ 1500 DEG C), Sample Room optical transmission window can be made up of high temperature transparent material aluminium oxide sapphire, receive specimen chamber optical transmission window to be made up of the high temperature resistant light transmissive material of quartz glass, and be embedded with heat resistant gloves case, body of heater operation can be stretched into; Outer stove Main Function guarantees vacuum, is made up of vacuum layer and outer wall, accompanies the setting-up piece of fixing interior stove in vacuum layer.In heater, be provided with thermocouple in each uniform temperature zone agglomerating chamber, each thermocouple connects separately a temperature controller, by regulating outside temperature controller to set different temperature and programming rate, for sintering sample.On vacuum plant is arranged; body of heater is provided with air inlet and venthole, is undertaken vacuumizing and being vented, pass into required protective gas by air inlet by gas outlet; simultaneously the vacuum layer of outer stove is also provided with gas outlet and is used for vacuumizing, and keeps the vacuum of outer stove vacuum layer.
In sample conveyance system of the present invention, volume film cylinder is fixed on body of heater by fixed bar, it is bearing arrangement that volume film cylinder is followed between fixed bar, therefore rolling up film cylinder can take fixed bar as central axis, roll up film cylinder simultaneously and realize mutual transmission with motor shaft by gears meshing, by the adjustable motor speed of frequency converter, motor shaft is rotated by gear driven volume film cylinder, thus can the winding speed of Quality control; The load sample platform of device for transferring samples is for connecting device for transferring samples and sample coiler device, conveyer belt is attached on chain, high temperature alloy or ceramic material is preferably selected to make to meet high temperature requirement conveyer belt with chain, therefore gear wheel can take fixed bar as central axis with being bearing arrangement between fixed bar, gear wheel in cooling chamber realizes transmission by gear structure with motor shaft, by the adjustable motor speed of frequency converter, motor shaft is rotated by gear driven chain, thus can the transfer rate of Quality control.
Method of operating of the present invention is as follows:
1) film sample to be sintered volume film cylinder is put on the bearing of fixed bar by the fire door of Sample Room, and operated by glove box, film leading portion being guided on load sample platform, on the bearing receiving specimen chamber fixed bar, then putting into empty volume film cylinder for collecting sintered film sample;
2) temperature of each uniform temperature zone and the rotating speed of motor is set according to the heating schedule of sintering process;
3) pass into the protective gas of certain flow after repeatedly being vacuumized by furnace chamber with vavuum pump, then externally stove vacuum layer vacuumizes;
4) run the heating schedule of each uniform temperature zone, reach until furnace temperature the motor successively opening Sample Room volume film cylinder, conveyer and receipts specimen chamber volume film cylinder after design temperature in order, make sample start to transmit;
5) after first section of sintered sample enters and receives specimen chamber, by receiving the operation of specimen chamber glove box by sample around on volume film cylinder;
6) after sample terminates, close the heater of all uniform temperature zone agglomerating chamber and all motors, after sample cooling, close air-breather, take out sample volume film cylinder from receipts specimen chamber fire door.
As can be seen here, the present invention has following outstanding advantage:
1. self-supporting ceramic membrane continuous prodution sintering equipment of the present invention adopts double-layer furnace body structure, both can ensure vacuum, and can play again the effect of insulation, the condition sintered under meeting high temperature and protective atmosphere;
2. self-supporting ceramic membrane continuous prodution sintering equipment of the present invention adopts insulating partitions agglomerating chamber to be divided into different temperatures uniform temperature zone agglomerating chamber, the length of each uniform temperature zone agglomerating chamber can be designed, in conjunction with the sintering time of the rational Quality control of transfer rate at different temperatures uniform temperature zone;
3. self-supporting ceramic membrane continuous prodution sintering equipment coiler device of the present invention and conveyer are all provided with motor driving and gear drive, can realize the serialization of producing.
Accompanying drawing explanation
Fig. 1 is the structure composition schematic diagram of the embodiment of the present invention.
Fig. 2 is the plan structure schematic diagram of the embodiment of the present invention.
Fig. 3 is the Sample Room of the embodiment of the present invention and the structural representation of receipts specimen chamber sample coiler device.
Fig. 4 is the structural representation of the device for transferring samples of the embodiment of the present invention.
Detailed description of the invention
Following examples will elaborate to structure of the present invention and operation principle by reference to the accompanying drawings.
See Fig. 1 ~ 4, the embodiment of the present invention is provided with high temperature furnace system 1 and sample conveyance system 2.
Described high temperature furnace system 1 is provided with body of heater 11, heater 12, vacuum plant 13.
Described body of heater 11 is interior stove and outer stove double-decker, body of heater 11 is provided with burner hearth 111, thermal insulation layer 112 and vacuum layer 113, burner hearth 111 is divided into Sample Room 1111, agglomerating chamber 1112, cooling chamber 1113 by thermal insulation layer 112, receives specimen chamber 1114, vacuum layer 113 is located between inner furnace body and external furnace body, Sample Room 1111 is provided with Sample Room glove box 1151, Sample Room optical transmission window 1161 and Sample Room fire door 1171, receives specimen chamber 1114 and is provided with receipts specimen chamber glove box 1152, receives specimen chamber optical transmission window 1162 and receive specimen chamber fire door 1172.
Described heater 12 is provided with thermocouple 121 and temperature controller 122, and thermocouple 121 is located in agglomerating chamber 1112, and thermocouple 121 is connected with temperature controller 122.
Described vacuum plant 13 is provided with interior stove vavuum pump 1361 and vacuum layer vavuum pump 1362, and the air inlet of interior stove vavuum pump 1361 is connected with the gas outlet 132 of receiving specimen chamber 1114, and the air inlet of vacuum layer vavuum pump 1362 is connected with the gas outlet 133 of vacuum layer 113.
Described sample conveyance system 2 is provided with Sample Room sample coiler device 21, device for transferring samples 22 and receives specimen chamber sample coiler device 23, and device for transferring samples 22 is located at Sample Room sample coiler device 21 and is received between specimen chamber sample coiler device 23.
Described Sample Room sample coiler device 21 is provided with Sample Room volume film cylinder 211, Sample Room fixed bar 212, Sample Room bearing 213, Sample Room generator shaft gear 214, Sample Room Bearing gear 215 and Sample Room volume film cylinder motor 217, Sample Room volume film cylinder 211 is fixed on body of heater 11 by Sample Room fixed bar 212, Sample Room bearing 213 is located between Sample Room volume film cylinder 211 and Sample Room fixed bar 212, Sample Room rolls up film cylinder 211 with Sample Room fixed bar 212 for central axis, Sample Room generator shaft gear 214 engages with Sample Room Bearing gear 215, Sample Room generator shaft gear 214 is located on the motor shaft of Sample Room volume film cylinder motor 217.
Described device for transferring samples 22 is provided with load sample platform 221, sample transmits fixed bar 222, sample transmission bearing 223, sample transmits generator shaft gear 224, sample transmission bearing gear 225, sample transmits gear wheel 226, conveyer motor 227, sample transmission chain 228 and sample conveyer belt 229, load sample platform 221 is for connecting device for transferring samples 22 and sample coiler device 23, sample transmits gear wheel 226, sample transmission bearing gear 225, sample transmission chain 228 and sample conveyer belt 229 transmit fixed bar 222 by sample and are fixed on body of heater 11, sample transmits gear wheel 226 and engages each other with sample transmission chain 228, sample conveyer belt 229 is attached on sample transmission chain 228, sample transmission bearing 223 is located at sample transmission gear wheel 226 and sample transmits between fixed bar 222, sample transmits gear wheel 226 and transmits fixed bar 222 for central axis with sample, the sample be located in cooling chamber 1113 transmits gear wheel 226 and realizes transmission by sample transmission generator shaft gear 224 with conveyer motor 227, conveyer motor 227 transmits generator shaft gear 224 by sample and drives sample transmission chain 228 to rotate.
Described receipts specimen chamber sample coiler device 23 is provided with receives specimen chamber volume film cylinder 231, receive specimen chamber fixed bar 232, receive specimen chamber bearing 233, receive specimen chamber generator shaft gear 234, receive specimen chamber Bearing gear 235 and receive specimen chamber volume film cylinder motor 237, receiving specimen chamber volume film cylinder 231 is fixed on body of heater 11 by receiving specimen chamber fixed bar 232, receive specimen chamber bearing 233 be located at receipts specimen chamber volume film cylinder 231 and receive between specimen chamber fixed bar 232, receive specimen chamber volume film cylinder 231 to receive specimen chamber fixed bar 232 for central axis, receive specimen chamber generator shaft gear 234 to engage with receipts specimen chamber Bearing gear 235, receive specimen chamber generator shaft gear 234 to be located on the motor shaft of receipts specimen chamber volume film cylinder motor 237.
The setting-up piece 114 for fixing inner furnace body can be provided with in described vacuum layer 113.
In fig 1 and 2, mark 118 is fixed screw, and 119 is base of furnace body, and 131 is the air inlet of Sample Room, and 134 is air valve, and 135 is air gauge.
Spin the combine sintering process of the continuous self-supporting silicon carbide ceramic thin film prepared of embrane method with reference to precursor pyrolysis and hot pressing and melting and design continuous prodution sintering equipment, the heating schedule of its sintering process can be: 50min is raised to 200 DEG C from room temperature, 200min is raised to 600 DEG C, 250min is raised to 850 DEG C, 100min is raised to 1000 DEG C, then 200min is raised to 1200 DEG C of insulation 10min.According to the heating-up time of each temperature section, in design, stove is 200 DEG C, 600 DEG C, 850 DEG C, 1000 DEG C, 1200 DEG C five uniform temperature zones, and according to heating-up time ratio, interior stove uniform temperature zone length ratio is designed to 1: 4: 5: 2: 4, its concrete sintering step is as follows:
1) by the volume film cylinder of the crosslinked rear former membrane sample of PCS to be sintered, be put on the bearing of fixed bar by the fire door of Sample Room, and operated by glove box, film leading portion being guided on load sample platform, on the bearing receiving specimen chamber fixed bar, then putting into empty volume film cylinder for collecting sintered film sample;
2) temperature setting five uniform temperature zone temperature controllers according to sintering procedure is respectively 200 DEG C, 600 DEG C, 850 DEG C, 1000 DEG C, 1200 DEG C, and according to the length of uniform temperature zone and the rotating speed of volume film cylinder girth setting Sample Room volume film cylinder motor, conveyer motor and receipts specimen chamber volume film cylinder motor, sample is made to be about 50min by the duration of 200 DEG C of uniform temperature zones, then according to each uniform temperature zone length ratio 1: 4: 5: 2: 4, be respectively 200min, 250min, 100min, 200min by the duration of 600 DEG C, 850 DEG C, 1000 DEG C, 1200 DEG C uniform temperature zones;
3) by interior stove gas outlet vavuum pump, furnace chamber is vacuumized repeatedly, pass into the high-purity argon gas protection of certain flow from air inlet, then vacuumized by the outer stove gas outlet external stove vacuum layer of vavuum pump;
4) run heating schedule, after each uniform temperature zone furnace temperature reaches the design temperature of temperature controller, successively open Sample Room volume film cylinder motor, conveyer motor in order and receive specimen chamber volume film cylinder motor, making sample start to transmit by certain speed;
5), after first section of sintered sample enters and receives specimen chamber, by receiving the operation of specimen chamber glove box, sample is detoured on volume film cylinder;
6) treat that sample sintering terminates, close temperature controller and three motors of uniform temperature zone heater, after sample cooling, close air-breather, open receipts specimen chamber fire door and take out sample volume film cylinder, namely obtain continuous print self-supporting silicon carbide ceramic thin film.
Claims (2)
1. a continuous prodution sintering equipment for self-supporting ceramic membrane, is characterized in that being provided with high temperature furnace system and sample conveyance system;
Described high temperature furnace system is provided with body of heater, heater, vacuum plant;
Described body of heater is interior stove and outer stove double-decker, body of heater is provided with burner hearth, thermal insulation layer and vacuum layer, burner hearth is divided into Sample Room, agglomerating chamber, cooling chamber, receipts specimen chamber by thermal insulation layer, vacuum layer is located between inner furnace body and external furnace body, Sample Room is provided with Sample Room glove box, Sample Room optical transmission window and Sample Room fire door, receives specimen chamber and is provided with receipts specimen chamber glove box, receives specimen chamber optical transmission window and receive specimen chamber fire door;
Described heater is provided with thermocouple and temperature controller, and thermocouple is located in agglomerating chamber, and thermocouple is connected with temperature controller;
Described vacuum plant is provided with interior stove vavuum pump and vacuum layer vavuum pump, and the air inlet of interior stove vavuum pump is connected with the gas outlet of receiving specimen chamber, and the air inlet of vacuum layer vavuum pump is connected with the gas outlet of vacuum layer;
Described sample conveyance system is provided with Sample Room sample coiler device, device for transferring samples and receipts specimen chamber sample coiler device, and device for transferring samples is located at Sample Room sample coiler device and is received between specimen chamber sample coiler device;
Described Sample Room sample coiler device is provided with Sample Room volume film cylinder, Sample Room fixed bar, Sample Room bearing, Sample Room generator shaft gear, Sample Room Bearing gear and Sample Room volume film cylinder motor, Sample Room volume film cylinder is fixed on body of heater by Sample Room fixed bar, Sample Room bearing is located between Sample Room volume film cylinder and Sample Room fixed bar, Sample Room rolls up film cylinder with Sample Room fixed bar for central axis, Sample Room generator shaft gear engages with Sample Room Bearing gear, and Sample Room generator shaft gear is located on the motor shaft of Sample Room volume film cylinder motor;
Described device for transferring samples is provided with load sample platform, sample transmits fixed bar, sample transmission bearing, sample transmits generator shaft gear, sample transmission bearing gear, sample transmits gear wheel, conveyer motor, sample transmission chain and sample conveyer belt, load sample platform is for connecting device for transferring samples and sample coiler device, sample transmits gear wheel, sample transmission bearing gear, sample transmission chain and sample conveyer belt transmit fixed bar by sample and are fixed on body of heater, sample transmits gear wheel and sample transmission chain engages each other, sample conveyer belt is attached on sample transmission chain, sample transmission bearing is located at sample transmission gear wheel and sample transmits between fixed bar, sample transmits gear wheel and transmits fixed bar for central axis with sample, the sample be located in cooling chamber transmits gear wheel and realizes transmission by sample transmission generator shaft gear and conveyer motor, conveyer motor transmits generator shaft gear by sample and drives sample transmission chain to rotate,
Described receipts specimen chamber sample coiler device is provided with and receives specimen chamber volume film cylinder, receive specimen chamber fixed bar, receive specimen chamber bearing, receive specimen chamber generator shaft gear, receive specimen chamber Bearing gear and receive specimen chamber volume film cylinder motor, receiving specimen chamber volume film cylinder is fixed on body of heater by receiving specimen chamber fixed bar, receive specimen chamber bearing be located at receipts specimen chamber volume film cylinder and receive between specimen chamber fixed bar, receive specimen chamber volume film cylinder to receive specimen chamber fixed bar for central axis, receive specimen chamber generator shaft gear to engage with receipts specimen chamber Bearing gear, receive specimen chamber generator shaft gear and be located on the motor shaft of receipts specimen chamber volume film cylinder motor.
2. the continuous prodution sintering equipment of a kind of self-supporting ceramic membrane as claimed in claim 1, is characterized in that the setting-up piece be provided with in described vacuum layer for fixing inner furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510568122.5A CN105135876B (en) | 2015-09-09 | 2015-09-09 | Continuous production and sintering device for self-supported ceramic thin film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510568122.5A CN105135876B (en) | 2015-09-09 | 2015-09-09 | Continuous production and sintering device for self-supported ceramic thin film |
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| CN105135876A true CN105135876A (en) | 2015-12-09 |
| CN105135876B CN105135876B (en) | 2017-03-22 |
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| CN201510568122.5A Expired - Fee Related CN105135876B (en) | 2015-09-09 | 2015-09-09 | Continuous production and sintering device for self-supported ceramic thin film |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442608A (en) * | 2016-10-31 | 2017-02-22 | 北京仁创砂业科技有限公司 | Thermal expansivity determining instrument |
| CN107417284A (en) * | 2017-09-18 | 2017-12-01 | 钟斌海 | A kind of Environment-friendlyceramic ceramic material processing unit (plant) and processing method |
| CN108864325A (en) * | 2018-08-10 | 2018-11-23 | 江苏富淼科技股份有限公司 | A kind of attemperator for belt polymerization |
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| JPH0456707A (en) * | 1990-06-26 | 1992-02-24 | Daido Steel Co Ltd | Continuous type vacuum furnace |
| JPH11267426A (en) * | 1998-03-23 | 1999-10-05 | Toshiba Ceramics Co Ltd | Production of ceramics filter |
| CN2375937Y (en) * | 1999-06-10 | 2000-04-26 | 孙立言 | Push boat type vacuum resistance direct-heating hot-press continuous sintering furnace |
| CN201311177Y (en) * | 2008-10-16 | 2009-09-16 | 济南大学 | Multi-stage continuous sintering furnace |
| CN101839637A (en) * | 2009-03-17 | 2010-09-22 | Tdk株式会社 | Continuous fritting furnace and manufacturing system |
| CN202558936U (en) * | 2012-05-23 | 2012-11-28 | 徐明生 | Apparatus for large-scale continuous preparation of two-dimensional nanometer film |
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2015
- 2015-09-09 CN CN201510568122.5A patent/CN105135876B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0456707A (en) * | 1990-06-26 | 1992-02-24 | Daido Steel Co Ltd | Continuous type vacuum furnace |
| JPH11267426A (en) * | 1998-03-23 | 1999-10-05 | Toshiba Ceramics Co Ltd | Production of ceramics filter |
| CN2375937Y (en) * | 1999-06-10 | 2000-04-26 | 孙立言 | Push boat type vacuum resistance direct-heating hot-press continuous sintering furnace |
| CN201311177Y (en) * | 2008-10-16 | 2009-09-16 | 济南大学 | Multi-stage continuous sintering furnace |
| CN101839637A (en) * | 2009-03-17 | 2010-09-22 | Tdk株式会社 | Continuous fritting furnace and manufacturing system |
| CN202558936U (en) * | 2012-05-23 | 2012-11-28 | 徐明生 | Apparatus for large-scale continuous preparation of two-dimensional nanometer film |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442608A (en) * | 2016-10-31 | 2017-02-22 | 北京仁创砂业科技有限公司 | Thermal expansivity determining instrument |
| CN107417284A (en) * | 2017-09-18 | 2017-12-01 | 钟斌海 | A kind of Environment-friendlyceramic ceramic material processing unit (plant) and processing method |
| CN108864325A (en) * | 2018-08-10 | 2018-11-23 | 江苏富淼科技股份有限公司 | A kind of attemperator for belt polymerization |
| CN108864325B (en) * | 2018-08-10 | 2023-06-09 | 江苏富淼科技股份有限公司 | Heat preservation device for belt polymerization |
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| CN105135876B (en) | 2017-03-22 |
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