CN105102953A - Method for detecting defect in porous membrane, and defect inspection device - Google Patents

Method for detecting defect in porous membrane, and defect inspection device Download PDF

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Publication number
CN105102953A
CN105102953A CN201480019648.1A CN201480019648A CN105102953A CN 105102953 A CN105102953 A CN 105102953A CN 201480019648 A CN201480019648 A CN 201480019648A CN 105102953 A CN105102953 A CN 105102953A
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China
Prior art keywords
signal intensity
signal
hollow fiber
fiber membrane
determining step
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CN201480019648.1A
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Chinese (zh)
Inventor
平冈康太郎
隅敏则
藤木浩之
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Mitsubishi Rayon Co Ltd
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Mitsubishi Rayon Co Ltd
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Publication of CN105102953A publication Critical patent/CN105102953A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
    • B01D65/102—Detection of leaks in membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

In the present invention, a signal resulting from a defect in a porous membrane is accurately differentiated from a detected signal; in particular, a defect in a porous hollow-fiber membrane is correctly detected. A defect-detection method for a device for detecting a defect in a porous hollow-fiber membrane, the method having: a measurement step for measuring, at a prescribed sampling cycle, a signal from a light-receiving unit; a separation step for separating the measured signal into a signal portion caused by air bubbles from a defect, and a noise signal portion; and an output step for outputting, as a result of the defect inspection on the porous hollow-fiber membrane, the signal portion caused by air bubbles.

Description

The defect inspection method of multiple aperture plasma membrane and flaw detection apparatus
Technical field
The present invention relates to multiple aperture plasma membrane, particularly relate to defect inspection method and flaw detection apparatus that the defect of Porous hollow fiber membrane is detected.
Background technology
Time when manufacturing water treatment as the multiple aperture plasma membrane of filtering membrane, especially Porous hollow fiber membrane, check the presence or absence of the defect such as crackle, pin hole.So far as device with presence or absence of the defect checking Porous hollow fiber membrane, known following flaw detection apparatus (such as with reference to patent documentation 1): it has: the container with high leakproofness of collecting liquid; Limited the limiting unit of advancing of Porous hollow fiber membrane by the mode be contained in the liquid of described container with Porous hollow fiber membrane; Air is discharged and decompressing unit that internal tank is reduced pressure from the gas phase of described container; And detect the bubble detecting unit being sucked into the bubble liquid from the defect of Porous hollow fiber membrane.In the defect inspection using this flaw detection apparatus to carry out, be exhausted by the air of the gas phase had in the container of high leakproofness to collecting liquid, the pressure of this gas phase reduces, the pressure being accompanied by this liquid in container reduces, therefore, when hollow fiber membrane existing defects, the air of the hollow space of the Porous hollow fiber membrane of advancing in a liquid is sucked into liquid from defect and produces bubble.By detecting the bubble produced from the defect of this Porous hollow fiber membrane, the defect of Porous hollow fiber membrane indirectly can be detected.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2007-218859 publication
In such flaw detection apparatus, in order to detect the defect of Porous hollow fiber membrane, bubble detecting unit is used to detect from the bubble be sucked in the defect being contained in the Porous hollow fiber membrane passed through the liquid of above-mentioned container in liquid.That is, based on the defect of the detection signal detection Porous hollow fiber membrane of bubble.
Invent problem to be solved
But, produce following noise signal sometimes, this noise signal is the signal produced due to the such key element except the defect of Porous hollow fiber membrane of the bubble being mixed into the foreign matter be contained in the liquid of container, produce from the dissolved gas liquid, the micro-bubble that produces because of the current in container.The noise signal produced for above-mentioned reasons likely can by the signal being judged to mistakenly to produce due to the defect of Porous hollow fiber membrane.Such error detection brings harmful effect can to the manufacture efficiency of product.
Summary of the invention
Therefore, the object of the present invention is to provide the signal that can judge definitely from detection signal because the defect of multiple aperture plasma membrane produces and detect the multiple aperture plasma membrane especially signal processing apparatus of the defect of Porous hollow fiber membrane and signal processing method exactly.
In order to achieve the above object, the present invention relates to the defect inspection method of the flaw detection apparatus of Porous hollow fiber membrane, it is characterized in that, described flaw detection apparatus has: container, contains liquid; Channel member, be formed with in the mode of the inside of this channel member through the hollow fiber membrane that Porous hollow fiber membrane is continued through to advance stream and advancing stream branch by the branch flow passage of a wall from this hollow fiber membrane, and described hollow fiber membrane is advanced, the opening at the two ends of stream to be configured in described liquid and to be full of by described liquid in stream; Limiting unit, the mode in the liquid of being advanced in stream by the hollow fiber membrane of described channel member with described Porous hollow fiber membrane limits advancing of described Porous hollow fiber membrane; Liquid pump unit, the liquid that its hollow fiber membrane aspirating described channel member via described branch flow passage is advanced in stream, make described hollow fiber membrane advance the liquid in stream pressure reduce; And bubble detecting unit, there is light out part that to inject in described liquid and check light and be received in the light accepting part of inspection light of transmission in described liquid, detection is sucked into the bubble described liquid from the defect of described Porous hollow fiber membrane, described defect inspection method has: measurement step, with the signal of the sample period specified measurement from described light accepting part; Measured described Signal separator is the signal section owing to producing from the bubble of defect and noise signal portions by separating step; And output step, the signal section produced due to bubble is exported as the defect inspection result of Porous hollow fiber membrane.
In addition, preferably, the invention is characterized in, described separating step has: binarization step, and measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation; 1st determining step, when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 regulation the enabledisable judgement time within signal intensity again become signal intensity 1 from signal intensity 0; 1st treatment step, when being judged as that signal intensity is changed to signal intensity 1 within the described enabledisable judgement time in described 1st determining step, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1; 2nd determining step, when being judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 1st determining step, judge the effective judgement the time whether time becoming the state being in signal intensity 1 before 0 in signal intensity continue for regulation more than; And the 3rd determining step, for from the revised signal of described 1st treatment step and be judged as that in described 2nd determining step signal intensity becomes the signal of more than the time remaining of the state being in signal intensity 1 before 0 described effective judgement time, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation further.
In addition, preferably, the invention is characterized in, in described output step, when being judged as that the state of signal intensity 1 continue for more than described minimum duration in described 3rd determining step, exporting the check result of multiple aperture plasma membrane existing defects.
In addition, preferably, the invention is characterized in, also there is the 2nd treatment step, 2nd treatment step, be judged as, when the time that signal intensity becomes the state being in signal intensity 1 before 0 does not continue more than described effective judgement time, the part correcting process of this signal intensity 1 being become signal intensity 0 in described 2nd determining step.
In addition, preferably, the invention is characterized in, the state being judged as signal intensity 1 does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects in described 3rd determining step.
In addition, preferably, the invention is characterized in, described separating step has the step of measured described signal being carried out to moving average process.
In addition, the invention is characterized in, container, contain liquid; Channel member, be formed with the internal type of this channel member through the hollow fiber membrane that Porous hollow fiber membrane is continued through to advance stream and advancing stream branch by the branch flow passage of a wall from this hollow fiber membrane, and described hollow fiber membrane is advanced, the opening at the two ends of stream to be configured in described liquid and to be full of by described liquid in stream; Limiting unit, the mode in the liquid of being advanced in stream by the hollow fiber membrane of described channel member with Porous hollow fiber membrane limits advancing of Porous hollow fiber membrane; Liquid pump unit, the liquid that the hollow fiber membrane aspirating described channel member via described branch flow passage is advanced in stream, make described hollow fiber membrane advance the liquid in stream pressure reduce; Bubble detecting unit, has light out part that to inject in described liquid and check light and is received in the light accepting part of inspection light of transmission in described liquid, detects the bubble be sucked into from the defect of described Porous hollow fiber membrane described liquid; And check processing unit, possess: measuring means, with the signal of the sample period specified measurement from described light accepting part; Measured described Signal separator is the signal section owing to producing from the bubble of defect and noise signal portions by separative element; And output unit, the signal section produced due to bubble is exported as the defect inspection result of Porous hollow fiber membrane.
In addition, preferably, the invention is characterized in, described separative element also has: binarization unit, and the signal binaryzation using the threshold value of regulation described measuring means to be measured is the signal be made up of signal intensity 1 and signal intensity 0; Judging unit, has carried out the signal of binaryzation for by described binarization unit, and the change of the signal intensity of the described signal of binaryzation judges to the carrying out played from a certain moment during the stipulated time; and processing unit, according to the judged result of described judging unit, for the described signal having carried out binaryzation, signal intensity is become 1 or become 0 from 1 correcting process from 0 correcting process, described output unit outputs signal according to the judged result of described judging unit, described judging unit performs the 1st determining step, 1st determining step be judge to have carried out binaryzation described signal whether signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again become signal intensity 1 from signal intensity 0, when described in described 1st determining step, judging unit is judged as that signal intensity is changed to signal intensity 1 within the described enabledisable judgement time, described processing unit performs the 1st treatment step, described 1st treatment step is, signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes the step of 1, when described in described 1st determining step, judging unit is judged as that signal intensity does not become signal intensity 1 within described enabledisable determination time, described judging unit performs the 2nd determining step, 2nd determining step is, judge the step of the effective judgement the time whether time becoming the state being in signal intensity 1 before 0 in signal intensity continue for regulation more than, be judged as that signal intensity becomes the signal of more than the time remaining of the state being in signal intensity 1 before 0 described effective judgement time for the signal revised at processing unit described in described 1st treatment step and at judging unit described in described 2nd determining step, described judging unit performs the 3rd determining step further, described 3rd determining step judges whether the state of signal intensity 1 continue for the step of more than the minimum duration of regulation.
In addition, preferably, the invention is characterized in, when described in described 3rd determining step, judging unit is judged as that the state of signal intensity 1 continue for more than described minimum duration, described output unit exports the check result of multiple aperture plasma membrane existing defects.
In addition, preferably, the invention is characterized in, described judging unit is judged as that in described 2nd determining step the part correcting process of this signal intensity 1 is become signal intensity 0 by described processing unit when the time that signal intensity becomes the state being in signal intensity 1 before 0 does not continue more than 2nd judgement time.
In addition, preferably, the invention is characterized in, the state that described judging unit is judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
In addition, preferably, the invention is characterized in, described separative element carries out moving average process to measured described signal.
In addition, preferably, the invention is characterized in, described separating step has: binarization step, and measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation; 1st determining step, judges the effective judgement the time whether time being in the state of signal intensity 1 when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1 continue for regulation more than; 2nd determining step, do not continued to the signal of more than described effective judgement time the time being judged as the state being in signal intensity 1 in described 1st determining step, judge whether further signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again become signal intensity 1 from signal intensity 0; 1st treatment step, when being judged as that signal intensity becomes signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1; And the 3rd determining step, for be judged as in described 1st determining step more than effective judgement time that the time remaining of the state being in signal intensity 1 specifies signal and by the revised signal of described 1st treatment step, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation further.
In addition, preferably, the invention is characterized in, in described output step, when being judged as that the state of signal intensity 1 continue for more than described minimum duration in described 3rd determining step, export the check result of multiple aperture plasma membrane existing defects.
In addition, preferably, the invention is characterized in, also there is the 2nd treatment step, 2nd treatment step is, when being judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the part correcting process of described signal intensity 1 is become signal intensity 0.
In addition, preferably, the invention is characterized in, the state being judged as signal intensity 1 does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects in described 3rd determining step.
In addition, preferably, the invention is characterized in, described separative element also has: binarization unit, and the signal binaryzation using the threshold value of regulation described measuring means to be measured is the signal be made up of signal intensity 1 and signal intensity 0; Judging unit, has carried out the signal of binaryzation for by described binarization unit, and the change of the signal intensity of the described signal of binaryzation judges to the carrying out played from a certain moment during the stipulated time; and processing unit, according to the judged result of described judging unit, for the described signal having carried out binaryzation, signal intensity is become 1 or become 0 from 1 correcting process from 0 correcting process, described output unit outputs signal according to the judged result of described judging unit, described judging unit performs the 1st determining step, 1st determining step is, judge the step of the effective judgement the time whether time being in the state of signal intensity 1 when the described signal having carried out binaryzation is changed to signal intensity 0 from signal intensity 1 continue for regulation more than, for being judged as that at judging unit described in described 1st determining step the time of the state being in signal intensity 1 does not continue the signal of more than described effective judgement time, described judging unit performs the 2nd determining step further, 2nd determining step is, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again to become the step of signal intensity 1 from signal intensity 0, when described in described 2nd determining step, judging unit is judged as that signal intensity becomes signal intensity 1 within the described enabledisable judgement time, described processing unit performs the 1st treatment step, described 1st treatment step be signal strength is played when described signal intensity 1 is changed to signal intensity 0 when signal intensity is changed to signal intensity 1 again from described signal intensity 0 till during signal intensity correcting process become 1 step, for be judged as at judging unit described in described 1st determining step more than effective judgement time that the time remaining of the state being in signal intensity 1 specifies signal and in described 1st treatment step by the revised signal of described processing unit, described judging unit performs the 3rd determining step further, described 3rd determining step judges whether the state of signal intensity 1 continue for the step of more than the minimum duration of regulation.
In addition, preferably, the invention is characterized in, when described in described 3rd determining step, judging unit is judged as that the state of signal intensity 1 continue for more than described minimum duration, described output unit exports the check result of multiple aperture plasma membrane existing defects.
In addition, preferably, the invention is characterized in, described judging unit is judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the part correcting process of described signal intensity 1 is become signal intensity 0 by described processing unit.
In addition, preferably, the invention is characterized in, the state that described judging unit is judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
In addition, preferably, the invention is characterized in, described separating step has: binarization step, and measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation; Enabledisable determining step, when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 regulation the enabledisable judgement time within signal intensity again become signal intensity 1 from signal intensity 0; Treatment step, be judged as in described enabledisable determining step signal strength from signal intensity 1 is changed to signal intensity 0 specify the enabledisable judgement time within signal intensity be again changed to signal intensity 1 from signal intensity 0, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1; And minimum duration determining step, for do not become described enabledisable determining step and described treatment step object signal and by the revised signal of described treatment step, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation respectively.
In addition, preferably, the invention is characterized in, when being judged as that the state of signal intensity 1 continue for more than described minimum duration in described minimum duration determining step, export the check result of multiple aperture plasma membrane existing defects.
In the present invention formed like this, can restraint speckle signal impact and detect the defect of multiple aperture plasma membrane especially Porous hollow fiber membrane definitely.
Invention effect
According to the present invention, from detection signal, the signal that produces due to the defect of multiple aperture plasma membrane can be judged definitely and detect the defect of multiple aperture plasma membrane especially Porous hollow fiber membrane exactly.
Accompanying drawing explanation
Fig. 1 is the front schematic view of an example of the flaw detection apparatus representing Porous hollow fiber membrane of the present invention.
Fig. 2 is the stereographic map of the channel member in the flaw detection apparatus of the Porous hollow fiber membrane of Fig. 1.
Fig. 3 is by the channel member of Fig. 2 linearly I-I ' cutting and the cut-open view obtained.
Fig. 4 is by the channel member of Fig. 2 linearly II-II ' cutting and the cut-open view obtained.
Fig. 5 and Fig. 4 similarly will be formed with the channel member cutting of other embodiments in space enlargement portion and obtain cut-open view at the upper cover back side.
Fig. 6 is by the channel member of Fig. 4 linearly III-III ' cutting and the cut-open view obtained.
Fig. 7 is by the channel member of Fig. 4 linearly IV-IV ' cutting and the cut-open view obtained.
Fig. 8 is the process flow diagram of the defect inspection method representing the 1st embodiment of the present invention.
Fig. 9 is the figure representing the signal detected by the light accepting part of flaw detection apparatus of the present invention and the signal this signal binaryzation obtained.
Figure 10 is the process flow diagram of the defect inspection method representing the 2nd embodiment of the present invention.
Embodiment
The flaw detection apparatus > of < Porous hollow fiber membrane
One embodiment of the flaw detection apparatus of Porous hollow fiber membrane is shown and explains.As shown in figures 1-4, the flaw detection apparatus 1 of Porous hollow fiber membrane is (hereinafter referred to as work " flaw detection apparatus 1 ".) there is the container 10 and channel member 20 of accommodating liquid L.Channel member 20 is formed as: be full of the through channel member 20 of the stream 21 and hollow fiber membrane making Porous hollow fiber membrane M pass through is advanced by liquid L in stream.Hollow fiber membrane stream 21 of advancing has opening 21a, 21b at two ends, and these openings 21a, 21b are configured in liquid L.In addition, channel member 20 has space enlargement portion 22, is formed with the branch flow passage 23 of stream 21 branch of advancing from hollow fiber membrane in this space enlargement portion 22 part in the mode of through inside.And flaw detection apparatus 1 has: limiting unit 30, its restriction the advancing of Porous hollow fiber membrane M, in the liquid L advanced in stream 21 and space enlargement portion 22 by the hollow fiber membrane of channel member 20 to make Porous hollow fiber membrane M; Liquid suction (decompression) unit 40 is (following, be set to liquid pump unit 40), its liquid L advanced in stream 21 via the hollow fiber membrane of branch flow passage 23 flow path parts 20 from space enlargement portion 22 aspirates, make hollow fiber membrane advance the liquid L in stream 21 pressure reduce; And bubble detecting unit 50, its detection is sucked into the bubble liquid L from the defect of Porous hollow fiber membrane M.In addition, flaw detection apparatus 1 has the liquid stream lambda line 60 that L for liquid flows into container 10.Liquid stream lambda line 60 has: liquid supply line 61, and its one end is connected to liquid supply source (not shown), and the other end is connected to container 10, from described liquid supply source influent; And liquid-circulating line 63, its one end is connected to the branch flow passage 23 of channel member 20, and the other end is connected to container 10, flows into container 10 and circulate from the liquid L of branch flow passage 23 sucking-off of channel member 20.Liquid pump unit 40 is arranged at the midway of liquid-circulating line 63, can aspirate the liquid L that hollow fiber membrane advances in stream 21 via branch flow passage 23, liquid-circulating line 63.
Container 10 is the container of collecting liquid L as mentioned above, in the present embodiment, in above-mentioned accommodated liquid L, floods channel member 20.As long as the material of container 10 can not by moisture, liquid L burn into or the starting material that can not be invaded by liquid L just without particular limitation of, such as can enumerate the metals such as the resins such as polyester, Polyvinylchloride, tygon, polyamide, polypropylene, polyacetal, iron, aluminium, copper, stainless steel, nickel, titanium, alloy type or these raw-material compound substances etc.As long as the shape of container 10 and size can guarantee following liquid deeply, described liquid deeply can flood channel member 20 and opening 21a, 21b at the two ends from channel member 20 suck the liquid L in container 10 time can not produce whirlpool and dark from the liquid of liquid level withdrawing air.
Container 10 is connected by liquid supply line 61 with liquid supply source (not shown), is provided with deaeration unit 64 and degas module 65 in the midway of liquid supply line 61.From liquid supply source via liquid supply line 61 to container 10 feed fluid L.In addition, the bubble in the liquid L supplied is removed by deaeration unit 64.Thereby, it is possible to suppress the error detection because the bubble being contained in supplied liquid L causes, therefore improve from the reliability of the detection of the bubble of the defect sucking-off of Porous hollow fiber membrane M.In addition, dissolved gas is removed by degas module 65.Thus, improve further from the reliability of the detection of the bubble of the defect sucking-off of Porous hollow fiber membrane M.As deaeration unit 64 and degas module 65, as long as the bubble in the liquid L supplied to container 10, dissolved gas are removed and reach the parts that can not detect the degree impacted to bubble, such as deaeration unit 64, can enumerate filtering accuracy that use also can have the removing function of foreign matter concurrently is that filter assemblies of the diffusion barrier of about 0.1 μm etc. etc. can the parts of bubble in separating liquid L.In addition, as degas module 65, the unit etc. can enumerated to the degassed assembly combination decompressing unit 66 using gas separaion film etc. can carry out degassed unit to the dissolved gas in liquid L.
In addition, be formed with the leakage fluid dram of overflow at container 10, the liquid L being contained in container 10 discharges line 62 overflow via liquid, and the liquid level of the liquid L in container 10 remains constant.Preferably as in this embodiment deaeration unit 67 is set in the midway of liquid-circulating line 63.Thus, can remove efficiently be mixed in the liquid L of container 10 Inner eycle foreign matter, become the dissolved gas resulting from the bubble in liquid L in channel member 20 and liquid pump unit 40, the error detection that the bubble comprised by the liquid L circulated causes can be suppressed.Even the deaeration unit 64 being arranged at liquid supply line 61, the deaeration unit 67 being arranged at liquid-circulating line 63 are used alone also have effect, but both preferably using in the lump.In addition, deaeration unit 67 pairs of bubbles are separated and arrange freeing port in the part of accumulation, all the time appropriate liquid L is discharged outside container 10, or utilize liquid level meter to detect liquid level and utilize solenoid valve etc. intermittently to discharge liquid L, can prevent gas accumulation from deaeration unit 67, liquid filtering area is reduced thus.As deaeration unit 67, the parts identical with the unit exemplified by deaeration unit 64 can be enumerated.In addition, in order to improve the reliability that bubble detects further, also degas module can be set at liquid-circulating line 63.
As liquid L, such as, can enumerate the mixed liquor etc. of water, methyl alcohol as wetting tension test reagent, ethanol, formamide or these materials and water.Capillary size can have influence on the size of the defect that can detect, therefore the liquid of preferred exact knowledge surface tension characteristics, from the viewpoint of process, drainage sunk well, particularly preferably water (about the surface tension 73.0mN/m at 28 DEG C).In addition, the potpourri that have adjusted capillary water and methyl alcohol by regulating temperature, mixing ratio etc. also can be used to be used as liquid L.In addition, when assembling defect detecting device and detect defect continuously in the manufacture line of Porous hollow fiber membrane on the manufacture line of Porous hollow fiber membrane, such as, also can will be used for the liquid (such as pure water) of the cleaning of Porous hollow fiber membrane as liquid L.That is, container 10 also can be the container of collecting cleaning fluid in the cleaning device of Porous hollow fiber membrane after cleaning spinning.In addition, during checking flowing out from Porous hollow fiber membrane material that the surface tension of liquid L is reduced and make the surface tension of liquid L reduce such, preferably there is following mechanism: by monitoring the surface tension of liquid L and the surface tension of liquid L remains constant by the quantity delivered controlled to the water of container 10.
As shown in Fig. 1, Fig. 3, Fig. 4, in channel member 20, be formed with in the mode of through inside the hollow fiber membrane that Porous hollow fiber membrane M is passed through and advance the branch flow passage 23 of stream 21 and stream 21 branch of advancing from hollow fiber membrane.Hollow fiber membrane advance width that the middle body of stream 21 is provided with stream be expanded after space enlargement portion 22, form branch flow passage 23 element branches in space enlargement portion 22.In the present embodiment, be impregnated in by channel member 20 in the liquid L accommodated at container 10, thus hollow fiber membrane is advanced, opening 21a, the 21b at the two ends of stream 21 are configured in liquid L, thus from opening 21a, 21b influent L, the hollow fiber membrane comprising space enlargement portion 22 stream 21 inside that is overall and branch flow passage 23 of advancing is full of by liquid L.Branch flow passage 23 is connected to liquid pump unit 40 via liquid-circulating line 63, and liquid pump unit 40 can be utilized to aspirate from space enlargement portion 22 via branch flow passage 23 the liquid L that hollow fiber membrane advances in stream 21.Thereby, it is possible to by stream 21 of advancing at hollow fiber membrane and the peripheral part of Porous hollow fiber membrane M and hollow fiber membrane advance stream 21 wall between the pressure of liquid L of the flowing pressure loss of liquid L that flows inside that hollow fiber membrane is advanced in stream 21 reduce.The advance pressure of the liquid L in stream 21 of hollow fiber membrane becomes minimum with the coupling part of branch flow passage 23 in space enlargement portion 22.Flaw detection apparatus 1 becomes: by being full of liquid L and hollow fiber membrane is advanced in stream 21 from space enlargement portion 22 towards branch flow passage 23 by lasting suction by liquid L in the stream of channel member 20 like this, thus Porous hollow fiber membrane M is continuously traveling in the hollow fiber membrane being maintained decompression state advances stream 21.
As shown in Fig. 2 ~ 4, Fig. 6 and Fig. 7, the channel member 20 of present embodiment is formed in the following way: be formed and closed by upper cover part 20b for the formation of the advance top of the groove of stream 21 and the channel member main body 20a of branch flow passage 23 of the hollow fiber membrane in central authorities with space enlargement portion 22.For channel member main body 20a and upper cover part 20b, even if do not have special mechanism, also can to reduce because of the suction of liquid pump unit 40 that channel member main body 20a and upper cover part 20b is close to each other is fixing by the advance pressure of the liquid L in stream 21 and branch flow passage 23 of hollow fiber membrane.According to such structure, though when Porous hollow fiber membrane M be blocked in hollow fiber membrane advance the inside of stream 21, also easily Porous hollow fiber membrane M can be removed from channel member main body 20a by opening upper cover part 20b.Also can arrange at channel member main body 20a and upper cover part 20b and be used for the closed mechanism of this channel member main body 20a and upper cover part 20b.In addition, by be formed for the formation of hollow fiber membrane advance the groove of stream 21 and the channel member main body 20a of branch flow passage 23 top by upper cover part 20b close form channel member 20 when, if aspirate a little ambient atmos from the involutory surface of channel member main body 20a and upper cover part 20b and be mixed into liquid L, be then defect by this bubble error detection sometimes.In order to prevent this problem, fully guaranteeing the bubble-tight structure of the involutory surface of channel member main body 20a and upper cover part 20b even if employing can be enumerated or being configured such that the closing line mass-impregnation of involutory surface of channel member main body 20a and upper cover part 20b is in liquid L thus the impermeability of the involutory surface of channel member main body 20a and upper cover part 20b impaired also pumping liquid L and do not aspirate the structure of ambient atmos.In addition, by signal transacting and the defect inspection method of application present embodiment as described later, the higher detection of precision can be carried out.
When hollow fiber membrane advance stream 21 cross sectional shape by be formed for the formation of the hollow fiber membrane with space enlargement portion 22 advance the top of channel member main body 20a of groove of stream 21 closed by upper cover part 20b and formed, consider from this point of formation easness of stream, preferably this cross sectional shape is rectangle as shown in Figure 6.In addition, if hollow fiber membrane is advanced, the cross sectional shape of stream 21 is rectangle, then compared with the situation being rectangle with cross sectional shape, even if Porous hollow fiber membrane M is contacted with the wall of stream, this contact area is also less, more difficult to be damaged, and this point is favourable.In addition, semicircular groove is formed with both involutory surfaces of upper cover part 20b and by both is closed and situation that is that form circular stream is compared with in channel member main body 20a side, if make the advance cross sectional shape of stream 21 of hollow fiber membrane be rectangle and be formed one side of this rectangle by the bottom of upper cover part 20b, then for the formation of the groove of formation stream, channel member main body 20a side can not only be made smooth, the involutory surface of upper cover part 20b also can be made smooth.Thus, stream handling ease and do not need the contraposition of the precision of channel member main body 20a and upper cover part 20b.In addition, when Porous hollow fiber membrane M is configured in stream, in the groove that Porous hollow fiber membrane M can be made to enter into completely be formed at channel member main body 20a, therefore need not worry when closed upper cover part 20b can sandwich Porous hollow fiber membrane M at involutory surface.Advance under the cross sectional shape of stream 21 is leg-of-mutton situation at hollow fiber membrane, if formed by the bottom of upper cover part 20b, this is leg-of-mutton, then also can obtain the effect identical with the situation of rectangle.Wherein, the advance cross sectional shape of stream 21 of hollow fiber membrane is not limited to rectangle, triangle, also can be the polygon, circle etc. of more than pentagon.
The advance wall of stream 21 and the gap of Porous hollow fiber membrane M of hollow fiber membrane is preferably 5% ~ 40% of the diameter of Porous hollow fiber membrane M, is more preferably 10% ~ 20%.If hollow fiber membrane is advanced, the gap of stream 21 is more than described lower limit, then the surface damage easily suppressing the contact of wall of advancing stream 21 due to Porous hollow fiber membrane M and hollow fiber membrane to cause, the running resistance of Porous hollow fiber membrane M increase.If hollow fiber membrane is advanced, the gap of stream 21 is below described higher limit, then can prevent hollow fiber membrane advance stream 21 internal cause liquid L flowing and vibrate at Porous hollow fiber membrane M, the bending thus running resistance of Porous hollow fiber membrane M increases, and easily suppresses the pressure of the liquid L that the hollow fiber membrane of advancing for Porous hollow fiber membrane M is advanced in stream 21 to be reduced to the aspiration of the liquid L performed by liquid pump unit 40 needed for authorised pressure.The advance width d1 of the part except space enlargement portion 22 of stream 21 of hollow fiber membrane is preferably 110% ~ 180% of the diameter of Porous hollow fiber membrane M, is more preferably 120% ~ 140%.Hollow fiber membrane advance stream 21 the part except space enlargement portion 22 height d2 too, be preferably Porous hollow fiber membrane M diameter 110% ~ 180%, be more preferably 120% ~ 140%.
In addition, even if hollow fiber membrane is advanced, the internal face of stream 21 is not in order to damage the surface of Porous hollow fiber membrane M yet when contacting with Porous hollow fiber membrane M, and be processed into smooth preferably by accurate grinding processing, attrition process, the processing of pears surface etc., the advance processing of internal face of stream of hollow fiber membrane both can adopt same processing, also can adopt different processing.In addition, on this basis, be also preferably implement to reduce to apply with the fluorine class of the frictional resistance of Porous hollow fiber membrane M, diamond like carbon coating etc.
In addition, hollow fiber membrane advances the cross sectional shape of stream 21 when for being preferably square when rectangle, is preferably equilateral triangle, or is preferably circular in leg-of-mutton situation.If make the advance cross sectional shape of stream 21 of hollow fiber membrane be regular polygon or circle, then advance the flow state of liquid L of ambient dynamic of the Porous hollow fiber membrane M in stream 21 relative to the central shaft state axisymmetricly of Porous hollow fiber membrane M at hollow fiber membrane, the travel condition of the Porous hollow fiber membrane M that hollow fiber membrane is advanced in stream 21 easily becomes stable.
The advance length D (Fig. 3) of stream 21 of hollow fiber membrane is also different according to inspection speed (gait of march of Porous hollow fiber membrane M) etc., but preferably 100mm ~ 2000mm, be more preferably 300mm ~ 1000mm.If hollow fiber membrane is advanced, the length D of stream 21 is more than described lower limit, then easy from the detection transfiguration of the bubble of the defect sucking-off of Porous hollow fiber membrane M.If hollow fiber membrane is advanced, the length D of stream 21 is below described higher limit, then easily suppress the situation that the running resistance of Porous hollow fiber membrane M, flaw detection apparatus 1 are excessive.
Namely can be identical to the structure of the distance of branch flow passage 23 and stream from opening 21b, opening 21a, also can be different, suitably selected according to desired condition.From opening 21b, opening 21a to the structure of the stream of branch flow passage 23 preferably relative to branch flow passage 23 structure symmetrically.If be set to such structure, then by liquid pump unit 40 from branch flow passage 23 pumping liquid L time, symmetrical relative to branch flow passage 23 to the pressure distribution of the liquid L of branch flow passage 23 from opening 21b, opening 21a, in hollow fiber membrane advances stream 21 and space enlargement portion 22, from the defect of Porous hollow fiber membrane M, therefore there is the position of bubble and no longer occur that the position of bubble is symmetrical across branch flow passage 23.Thus, the bubble detecting unit 50 detecting and to be sucked into the bubble liquid L from the defect of the Porous hollow fiber membrane M advanced can be utilized, and according to the defective locations starting to detect the time of bubble, the gait of march of time bubble no longer being detected and Porous hollow fiber membrane M identifies Porous hollow fiber membrane M accurately.
The width w1 in space enlargement portion 22 and height h (Fig. 3 and Fig. 7) are larger than the hollow fiber membrane width d1 of the part except space enlargement portion 22 of stream 21 and height d2 that advances.The advance space enlargement portion 22 in stream 21 and coupling part in addition thereof of preferred hollow fiber membrane is processed to round and smooth in the mode that there is not acute angle part.By eliminating acute angle part, easily prevent liquid L this part when this partial-flow from becoming the generation of whirlpool, the generation source of air pocket, easily suppression the decompression generation of bubble, the vibration of Porous hollow fiber membrane M etc.Based on same reason, preferred branch flow passage 23 is also processed to round and smooth in the mode that there is not acute angle part with the coupling part in space enlargement portion 22.
Flow into from opening 21a, 21b the liquid L that hollow fiber membrane advances in stream 21 to flow towards branch flow passage 23 around Porous hollow fiber membrane M, flow in space enlargement portion 22 from the surrounding of Porous hollow fiber membrane M.Now, in space enlargement portion 22, flow into and flow without barrier towards branch flow passage 23 in space enlargement portion 22 by the liquid L of the position of branch flow passage 23 side than Porous hollow fiber membrane M.On the other hand, in space enlargement portion 22, that flow into Porous hollow fiber membrane M must by the gap of the wall in Porous hollow fiber membrane M and space enlargement portion 22 in order to flow to branch flow passage 23 with liquid L that the is contrary side of branch flow passage 23.If liquid L produces flowing pressure loss when the Clearance Flow in Porous hollow fiber membrane M and space enlargement portion 22, then relative to branch flow passage 23 side of Porous hollow fiber membrane M, the pressure increase of the liquid L of its opposition side.This pressure increase is larger, then in space enlargement portion 22, Porous hollow fiber membrane M more significantly bends towards branch flow passage 23 side, thus, likely become the rising of the running resistance of Porous hollow fiber membrane M, the reason of advance at hollow fiber membrane stream 21 and the surface damage of the Porous hollow fiber membrane M of the connecting portion office in space enlargement portion 22.
As the method suppressing such phenomenon, such as can enumerate make the width w1 (Fig. 3) in space enlargement portion 22 than hollow fiber membrane advance the large method of the width d1 of the part except space enlargement portion 22 of stream 21, extend the method etc. of the length f (Fig. 3) in space enlargement portion 22.The width w1 in space enlargement portion 22 is preferably hollow fiber membrane and advances more than 2 times of width d1 of the part except space enlargement portion 22 of stream 21.Thus, the sectional area in the gap in Porous hollow fiber membrane M and space enlargement portion 22 expands, and significantly can reduce flowing pressure loss when liquid L flows.The length f in space enlargement portion 22 is preferably 2 times ~ 20 times degree of the diameter of Porous hollow fiber membrane M, is more preferably 4 times ~ 10 times degree.If the length f in space enlargement portion 22 is more than lower limit, then the sectional area in the gap in Porous hollow fiber membrane M and space enlargement portion 22 expands, and flowing pressure loss reduces.If the length f in space enlargement portion 22 is below higher limit, then easily suppress Porous hollow fiber membrane M because supporting interval that limiting unit 30 couples of Porous hollow fiber membrane M support becomes large to branch flow passage 23 lateral bend.
If the width w1 in space enlargement portion 22 is more than described lower limit and the length f in space enlargement portion 22 is below described higher limit, flowing pressure loss when the liquid L then easily reducing the gap in Porous hollow fiber membrane M and space enlargement portion 22 flows and prevent Porous hollow fiber membrane M from significantly bending towards branch flow passage 23 side in space enlargement portion 22, can maintain the travel condition that Porous hollow fiber membrane M advances in stream 21 and space enlargement portion 22 at hollow fiber membrane more well.
In addition, channel member 20 also can be following channel member 20A as shown in Figure 5: the groove being formed with stream 21 of advancing for the formation of hollow fiber membrane at channel member main body 20a, in the part suitable with space enlargement portion 22 of the involutory surface of upper cover part 20b, be formed with the position of the space enlargement groove 22b of about 2 times of the flat shape Formation Depth identical with the groove in the space enlargement portion 22 the being formed at channel member main body 20a diameter that is Porous hollow fiber membrane M, and this position is closed and form channel member 20A.If increase the spatial volume of the side contrary with branch flow passage 23 in space enlargement portion 22 like this, then also can be reduced in the velocity flow profile of the liquid L of the Clearance Flow in Porous hollow fiber membrane M and space enlargement portion 22, reduce the flowing pressure loss produced.
The advance pressure of the liquid L in stream 21 of hollow fiber membrane more then more reduces from the part of opening 21a, 21b of two sides towards the inside of stream, namely becomes minimum at the intake section of the branch flow passage 23 of pumping liquid L in the part of the branch of stream institute in the space enlargement portion 22 that hollow fiber membrane is advanced in stream 21.Width W 1 and the height h in space enlargement portion 22 are larger, then the flowing pressure loss of the liquid L in space enlargement portion 22 is less, and the pressure variety on length f direction is fewer, and the inside in space enlargement portion 22 can be made to be higher degree of decompression.Therefore, when detecting the bubble from the defect sucking-off of Porous hollow fiber membrane M, can be also easy from only producing sufficient bubble in the defect of high degree of decompression generation bubble, long bubble detection time can be obtained, thus the resolution characteristic of defects detection improves.The height h in space enlargement portion 22 is preferably 1 ~ 10 times of the width w1 in space enlargement portion 22.If the height h in space enlargement portion 22 is more than lower limit, then the pressure variety on the length f direction in space enlargement portion 22 can become less.If the height h in space enlargement portion 22 is below higher limit, then easily suppress the increase of the time swap of the liquid L caused due to the volume increase in space enlargement portion 22, result from delay portion increase bubble accuracy of detection, check the reduction of speed.
For the cross sectional shape of branch flow passage 23, become Rotational Symmetry from the distribution of the cross sectional flow rate of the liquid L in internal flow, be mixed into the flow locations of the bubble of liquid L and more stablize this point and consider, be preferably circular.But, the cross sectional shape of branch flow passage 23 is not limited to circle, as long as rectangle etc. can make liquid L, bubbly flow, just can have any shape and suitably selectes according to desired condition.As the material of channel member 20, as long as just can not be not particularly limited by liquid L burn into or by the starting material that liquid L invades, such as, can enumerate the metals such as the resins such as polyester, Polyvinylchloride, tygon, polyamide, polypropylene, polyacetal, fluorine, polyetheretherketone, iron, aluminium, copper, nickel, titanium, stainless steel, alloy type or these raw-material compound substances etc.
Limiting unit 30 comprises 4 guide reels 31 ~ 34.Porous hollow fiber membrane M limits advancing of this Porous hollow fiber membrane M by these guide reels 31 ~ 34, as shown in Figure 1, Porous hollow fiber membrane M is pulled into continuously and is contained in the liquid L of container 10, advanced in stream 21 by the hollow fiber membrane importing channel member 20 from opening 21a, after being advanced by hollow fiber membrane in the liquid L in stream 21 and derived from opening 21b, pulled into the outside of liquid L.As the guide reel 31 ~ 34 in limiting unit 30, the guide reel of the manufacture being generally used for Porous hollow fiber membrane can be used.
Liquid pump unit 40 from space enlargement portion 22 via branch flow passage 23 aspirate hollow fiber membrane advance the liquid L in stream 21 and make hollow fiber membrane advance the liquid L in stream 21 pressure reduce.In the present embodiment, liquid pump unit 40 is connected with branch flow passage 23 via liquid-circulating line 63, can from hollow fiber membrane advance stream 21 space enlargement portion 22 in via branch flow passage 23, liquid-circulating line 63 pumping liquid L.In addition, the liquid L aspirated returns in container 10 via liquid-circulating line 63.But, flaw detection apparatus of the present invention is not limited to this embodiment, also can be the embodiment discarded by the liquid L be drawn into by liquid pump unit 40.
As long as can aspirate via branch flow passage 23 the liquid L that hollow fiber membrane advances in the space enlargement portion 22 of stream 21 as liquid pump unit 40, such as, can enumerate gear-type pump, cascade rotary pump (cascadepump) etc.Especially the pump turning axle of the pump without seal type that magnetic shaft coupling is such and ambient atmos are isolated, therefore do not worry ambient atmos from sealing bleed high decompression state liquid L and among liquid L, become small bubble and flow into container 10, the pump of particularly preferably such type in this.In order to obtain desired degree of decompression, liquid pump unit 40 needs adjustment unit.As long as this adjustment unit can adjust degree of decompression just can use arbitrary unit.Such as, existence arranges bypass pipe arrangement and uses manually adjustment, self-adjusting method.Wherein, for the method for the rotational speed by inverter control liquid pump unit 40, because the circular route of liquid L becomes simple, adjustment is also easy, therefore preferred the method.In addition, it is further preferred that as shown in Figure 1, the upstream of the liquid pump unit 40 in liquid-circulating line 63 arranges pressure gauge 68, the output feedack of this pressure gauge 68 also can be controlled automatically the pump rotational speed etc. of liquid pump unit 40 to inverter.
Bubble detecting unit 50 detects the unit being sucked into the bubble liquid L from Porous hollow fiber membrane M.By detecting the bubble be sucked into from the defect of Porous hollow fiber membrane M liquid L, the defect of Porous hollow fiber membrane M indirectly can be detected.As bubble detecting unit 50, as long as bubble can be detected just can use arbitrary parts.Wherein, when carrying out multiple detection, preferred detecting means is little and can the photoelectric sensor of compact setting.Specifically, the Fibre Optical Sensor etc. of the Omron system (model E3X-DA11AN-S) of built-in scale-up version, Keyemce system (model FS-N11N (FS-N10 series)) can such as be enumerated.
In this device, bubble detecting unit is preferably disposed on hollow fiber membrane and advances between stream and liquid pump unit.Specifically, in the present embodiment, bubble detecting unit be preferably disposed in branch flow passage 23 by between the openend of side, space enlargement portion 22 and the openend of the outer side surface side of the branch flow passage 23 or midway be arranged at from the openend of the outer side surface side of branch flow passage 23 to the pipe arrangement of liquid pump unit.Also can bubble detecting unit be set in hollow fiber membrane circuit portion of advancing and detect from the bubble of Porous hollow fiber membrane sucking-off, but different according to the degree of the size of defect, the decompression of liquid etc. from the position of the defect sucking-off bubble of Porous hollow fiber membrane in hollow fiber membrane advances stream.In addition, especially when the gait of march of the Porous hollow fiber membrane in order to boost productivity is high, before bubble leaves Porous hollow fiber membrane, this bubble is high-speed mobile together with Porous hollow fiber membrane.Therefore, in this case, in order to stably detect the bubble produced from Porous hollow fiber membrane in advancing stream at hollow fiber membrane, need to arrange multiple bubble detecting unit along the advance stream axle of stream of hollow fiber membrane.On the other hand, from being moved together with the liquid flowed because of suction by the advance bubble of defect sucking-off of Porous hollow fiber membrane of stream of hollow fiber membrane.Therefore, if the openend of side, space enlargement portion 22 as described above in branch flow passage 23 and the midway between the openend of the outside wall surface side of branch flow passage 23 or from the openend of the outer side surface side of branch flow passage 23 to the pipe arrangement of liquid pump unit arrange bubble detecting unit, then the air of the inner space of Porous hollow fiber membrane M be sucked out via defect and the bubble produced together with the liquid L of suction by these parts, even therefore 1 bubble detecting unit also stably can detect bubble.
Bubble detecting unit 50 is arranged at branch flow passage 23 part of channel member 20 in the embodiment of Fig. 4 and Fig. 5.Hollow fiber membrane advances stream 21, flow into branch flow passage 23 from the bubble of the defect sucking-off of Porous hollow fiber membrane M together with the liquid L flowed from opening 21a, 21b towards branch flow passage 23, detected by bubble detecting unit 50.
Bubble detecting unit 50 has injects the light out part 51 checking light and the light accepting part 52 received from the inspection light in liquid L in liquid L.As long as the light out part 51 in bubble detecting unit 50 and light accepting part 52 can detect bubble and just can arrange in any way, light out part, light accepting part top can be contact or noncontact with liquid L.Wherein, the tip portion of light out part, light accepting part is preferably set to be arranged in and advances the liquid L that stream 21 aspirates from hollow fiber membrane.In the present embodiment, light out part 51 and light accepting part 52 are preferably to arrange from the mode that the wall of branch flow passage 23 is outstanding in branch flow passage 23 to contact with liquid L.Thus, error detection is easily prevented to be attached to wall dirt, the bubble of branch flow passage 23.But, carried out the situations such as the process suppressing the attachment of dirt, bubble such at the parts for branch flow passage 23 periphery of flow path parts 20, the internal face of liquid-circulating line 63 under, also can be as under type: not with the tip portion of light out part and light accepting part be projected into mode in the liquid L that aspirates and arranging in the mode that the tip portion of light out part and light accepting part and wall are the same face.In addition, when the part of branch flow passage 23 periphery, liquid-circulating line 63 are formed by the resin material etc. of transmitted light, it also can be the mode of arranged outside light out part at branch flow passage 23, liquid-circulating line 63 and light accepting part.
For light out part 51 and the light accepting part 52 of bubble detecting unit 50, from the light penetrated from light out part 51 is taken into light accepting part 52 efficiently and delicately detect bubble have passed time light quantity change this point consider, be preferably set to toward each other.In this bubble detecting unit 50, bubble by between the light out part 51 in branch flow passage 23 and light accepting part 52 time, the inspection light be injected into liquid L from light out part 51 reflects because of this bubble, scattering, thus the amount arriving the inspection light of light accepting part 52 reduces, therefore, it is possible to detect bubble according to the change of this light quantity.In addition, in this device, intersect in the optical axis of optical axis and light accepting part 52 that bubble detecting unit 50 also can the be set to light out part 51 liquid L in branch flow passage 23.When arranging light out part 51 and light accepting part 52 in like fashion, the light penetrated from light out part 51 when there is not bubble can not arrive light accepting part 52, the light penetrated from light out part 51 when bubble have passed is reflected or scattering by this bubble, this reflected light or scattered light arrive light accepting part 52, therefore, it is possible to detect bubble according to the change of this light quantity.But, with utilize the shading of bubble to compared with the mode detecting bubble, the mode detecting bubble by receiving the reflected light that caused by bubble or scattered light is easily subject to the impact of ambient light, the light quantity change of light accepting part 52 reduces because of the effect of the bubble overlapping with each optical axis direction in the optical axis of the light out part 51 in liquid L and the optical axis of light accepting part 52 in addition, therefore preferably adopts by carrying out shading to reduce affecting or improve the such unit of the inspection light intensity that penetrates from light out part 51 to ambient light.
In addition, light out part 51 and light accepting part 52 are preferably set to: the optical axis of light out part 51 and the optical axis of light accepting part 52 are by the flow velocity the best part in the working fluid of flowing in branch flow passage 23.High by the probability of the flow velocity the best part in working fluid by the bubble in branch flow passage 23, therefore by making the optical axis of light out part 51 and light accepting part 52 by this part, more stably bubble can be detected.Specifically, the optical axis of light out part 51 and light accepting part 52 is preferably by the mode at the center of branch flow passage 23.In addition, the optical axis of light out part 51 and light accepting part 52 can be orthogonal with the stream axle of branch flow passage 23, also can tilt relative to the stream axle of branch flow passage 23.
In defect detecting device 1, be immersed in be contained in the liquid L of container 10 by channel member 20, liquid L flows into hollow fiber membrane from opening 21a, 21b of channel member 20 and advances in stream 21 and branch flow passage 23, and these streams are full of by liquid L.In addition, the liquid L that hollow fiber membrane is advanced in stream 21 is aspirated from space enlargement portion 22 via branch flow passage 23, liquid-circulating line 63 by liquid pump unit 40, and pressure reduces because of flowing pressure loss.And, make Porous hollow fiber membrane M advance in the mode in the liquid L advanced by hollow fiber membrane in stream 21 in this condition, thus the air in hollow fiber membrane advances stream 21 in Porous hollow fiber membrane M is produced bubble by from defect part sucking-off.Detect this bubble by bubble detecting unit 50, implement signal transacting as described later and detect the defect of Porous hollow fiber membrane M.
Signal transacting > in < flaw detection apparatus
As discussed above, in this flaw detection apparatus, bubble detecting unit 50 detects the bubble of the defect sucking-off from Porous hollow fiber membrane M, detects the defect of Porous hollow fiber membrane M based on this detection signal.As has been described, in order to improve the reliability of the detection of bubble, the liquid supply line 61 of connecting container 10 and not shown liquid supply source is provided with deaeration unit 64 and degas module 65, but when contingency deaeration unit 64, degas module 65 cannot play the function of regulation, also preferably, for detected signal, in order to remove de-noised signal and the signal produced due to the bubble of the defect sucking-off from Porous hollow fiber membrane M be detected definitely, carry out signal transacting further.Below, about the signal detected by bubble detecting unit 50, the signal transacting and defect inspection method that are performed by not shown signal conditioning package are described.
Usually, the tendency that the duration that the signal produced due to the bubble of the defect sucking-off from Porous hollow fiber membrane M exists large, the other signal of its intensity is also grown.On the other hand, for noise signal, the situation that intensity is little is many, even if the tendency of the signal of the duration that also there is this signal when intensity is large short needle pattern.The defect inspection method of present embodiment utilizes this tendency to carry out the process of signal.
Fig. 8 is the process flow diagram representing the process that defect detecting device 1 carries out in the defect inspection method of the 1st embodiment of the present invention.The light penetrated from light out part 51 arrives light accepting part 52 by branch flow passage 23, produces signal.The example of the signal exported from light accepting part 52 is shown at the epimere of Fig. 9.Transverse axis is set to the elapsed time, the longitudinal axis is set to output voltage and carries out pictorialization.In this embodiment, use photoelectric sensor as light accepting part 52, the light penetrated from light out part 51 under bubble is not by the state in branch flow passage 23 is not scattered and arrives light accepting part 52, and therefore magnitude of voltage is high value.On the other hand, bubble, other impurity are by under the state in branch flow passage 23, and the light penetrated from light out part 51 is by scatterings such as bubbles, and the amount therefore arriving the light of light accepting part 52 reduces, and its result, the magnitude of voltage shown in photoelectric sensor becomes low value.
In the defect inspection method of the 1st embodiment of the present invention, defect detecting device 1 receives the signal from such light accepting part 52, starts (S100) by carrying out measuring with the sample period of 5ms.In the present embodiment, although the sample period is set as 5ms, preferably suitably set according to environment when system, sample, mensuration etc.First defect detecting device 1 carries out the binary conversion treatment of this signal in binary conversion treatment step (S101).The hypomere of Fig. 9 shows the example of the signal after carrying out binary conversion treatment.As mentioned above, under bubble is not by the state in branch flow passage 23, magnitude of voltage is high value, magnitude of voltage step-down under the state that bubble is passing through, therefore to lower than the voltage distribution signal intensity " 1 " of binaryzation level V0 becoming threshold value, to the voltage distribution signal intensity " 0 " higher than binaryzation level V0.So, the impact of small noise signal is first eliminated.In addition, the threshold value that binary conversion treatment uses can according to suitably settings such as environment when system, sample, mensuration.In each step in flow charts, in order to illustrate which kind of signal accepts and judge process, and show the example of signal in flow charts.
Then, defect detecting device 1 has carried out the signal of binaryzation to by binary conversion treatment step (S101), is undertaken the 1st judge (S102) by the 1st determining step.1st is judged as, monitor the change of signal intensity in the signal after binaryzation, when creating signal intensity and being changed to the situation of signal intensity 0 from signal intensity 1, judge whether from this signal intensity from signal intensity 1 is changed to signal intensity 0 regulation enabledisable judge time T0 within signal intensity again become signal intensity 1 from signal intensity 0.In the present embodiment, this enabledisable judges that time T0 is set as 80ms, but can according to suitably settings such as environment when system, sample, mensuration.When judging to be judged as signal strength from signal intensity 1 is changed to signal intensity 0 when enabledisable to judge within time T0 that signal intensity is changed to signal intensity 1 again from signal intensity 0 (being yes among S102) by the 1st, then enter the step (S103) of process A.When being judged as signal strength from signal intensity 1 is changed to signal intensity 0 when enabledisable to judge within time T0 that signal intensity does not become signal intensity 1 again from signal intensity 0 (being no among S102), then enter the 2nd determination step (S104).
In the 1st determining step (S102), be judged as signal strength from signal intensity 1 is changed to signal intensity 0 when enabledisable judges that within time T0, signal intensity is changed to signal intensity 1 again from signal intensity 0, defect detecting device 1 implements process A by step S103 to this signal.Process A is following process: be during 0 for the signal intensity during signal strength plays till signal intensity becomes signal intensity 1 again when signal intensity 1 is changed to signal intensity 0, and signal intensity is modified to 1.Originally, the intensity of the signal produced due to the bubble of the defect sucking-off from the Porous hollow fiber membrane M duration that is large, signal in addition is also long, but is likely eliminated because of the setting of the threshold value of binary conversion treatment.The signal that the duration of the signal produced due to bubble is long, another aspect noise signal is the needle pattern between short-term mostly.In addition, it is also long that the signal produced due to the bubble of the defect sucking-off from Porous hollow fiber membrane M obtains the intensity duration that is large, signal in addition, but the difference of generation state according to bubble, bubble produces intermittently, occurs the signal of needle pattern thus intermittently.In addition, the signal produced due to bubble is also likely eliminated because of binary conversion treatment.The present invention is correction and binary conversion treatment by making the signal of the needle pattern occurred intermittently be set to continuous print signal in process A, also carry out producing due to bubble be eliminated after the recovery of signal.After like this process A being implemented to signal, then enter the 3rd determination step (S106).
On the other hand, signal strength is judged as from signal intensity 1 is changed to signal intensity 0 when enabledisable judges that within time T0, signal intensity does not become signal intensity 1 again from signal intensity 0 in the 1st determining step (S102), enter the 2nd determining step (S104), defect detecting device 1 carries out the 2nd to this signal and judges.2nd judges it is following judgement: for the signal after this binaryzation, judge whether signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective judgement time more than T1.In the present embodiment, this effectively judges that time T1 is set as 80ms, but can according to suitably settings such as environment when system, sample, mensuration.Being judged as that when judging by the 2nd signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective when judging time more than T1 (being yes in S104), then entering the 3rd determination step (S106).When being judged as that signal strength non-continuous and effective of signal intensity 1 from signal intensity 0 is changed to signal intensity 1 judges time more than T1 (being no in S104), then enter the step (S105) of treatments B.
When being judged as that in the 2nd determining step signal strength non-continuous and effective of signal intensity 1 from signal intensity 0 is changed to signal intensity 1 judges time more than T1 (being no in S104), defect detecting device 1 implements treatments B by step S105 to this signal.Treatments B is following process: part signal strength non-continuous and effective from signal intensity 0 is changed to signal intensity 1 being judged to the signal intensity 1 of time more than T1, is modified to 0 by signal intensity.As mentioned above, noise signal is mostly the signal of the needle pattern between short-term, therefore when the non-continuous and effective of the state of signal intensity 1 judges time more than T1, is interpreted as noise signal, enter following correcting process: signal intensity is modified to 0, remove noise.If implement treatments B to signal like this, then then enter the non-detection of defect and export step (S108).
After process A being implemented to signal by step S103, or be judged as judging by the 2nd signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective judge time more than T1 (be yes at S104) after, defect detecting device 1 carries out the 3rd by the 3rd determining step (S106) to these signals and judges.3rd is judged as, judges whether signal intensity 1 continue for the time longer than minimum duration T2 in these signals.This minimum duration T2 is set as 100ms in the present embodiment, but can according to suitably settings such as environment when system, sample, mensuration.As mentioned above, there is duration long tendency in the signal produced due to bubble, therefore when the state of signal intensity 1 continue for the time longer than minimum duration T2, thinks the signal that this signal can be judged as producing due to bubble.By the 3rd determining step, present embodiment judges that whether detected signal is the signal because the bubble of the defect sucking-off from Porous hollow fiber membrane M produces.When being judged as that when judging by the 3rd the state of signal intensity 1 continue for the time longer than minimum duration T2 (being yes in S106), then entering defects detection and exporting step (S107).Export in step (S107) in defects detection, defect detecting device 1 exports the information represented as the Porous hollow fiber membrane M existing defects of check object.User knows Porous hollow fiber membrane M existing defects by this output.The state being judged as signal intensity 1 when judging by the 3rd does not continue the time longer than minimum duration T2 (be no in S106), then enter non-detection output step (S108) of defect.
After treatments B being implemented to signal in step S105, or after being judged as that judging by the 3rd the state of signal intensity 1 does not continue the time (being no in S106) longer than minimum duration T2, then entering the non-detection of defect and exporting step (S108).The signal implementing the part of treatments B is signal intensity 0, and judges by the 3rd and judge that the state of signal intensity 1 does not continue the signal of the time longer than minimum duration T2 and not thinks it is the signal produced due to the bubble from defect sucking-off.Therefore, export in step (S108) in the non-detection of defect, defect detecting device 1 exports the information of the Porous hollow fiber membrane M not existing defects represented as check object.
When defect detecting device 1 by defects detection export step (S107) or the non-detection of defect export step (S108) export time, a series of Flow ends (S109).
By setting like this, from detection signal, the signal produced due to the defect of Porous hollow fiber membrane M can be judged definitely, detect the defect of Porous hollow fiber membrane exactly.In addition, according to the present embodiment, judged by the 1st judgement and the 2nd and be judged as that the part of the noise of needle pattern is implemented treatments B, thus removed by from signal, the output data therefore existed from defect detecting device 1 are organized and easily observe and also can the such advantage of amount of compressed data.
Figure 10 is the process flow diagram representing the process that defect detecting device 1 carries out in the defect inspection method of second embodiment of the present invention.2nd embodiment is replaced and carry out the embodiment of signal transacting at the order of the 1st determining step in the 1st embodiment and the 2nd determining step.Below, the part common with the 1st embodiment is omitted the description, be described centered by the part different from the 1st embodiment.
Also in a same manner as in the first embodiment, defect detecting device 1 receives the signal from light accepting part 52 to 2nd embodiment, starts (S200) by carrying out measuring with the sample period of 5ms.In the present embodiment, although the sample period is set as 5ms, preferably suitably set according to environment when system, sample, mensuration etc.The binary conversion treatment of this signal is carried out in binary conversion treatment step (S201).
Then, for signal binarized in binary conversion treatment step (S201), defect detecting device 1 is undertaken the 1st by the 1st determining step and judges (S202).1st is judged as, for the signal after binaryzation, judges whether signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective judgement time more than T1, is equivalent to the 2nd in the 1st embodiment and judges.In the present embodiment, although this effective judgement time T1 is set as 80ms, can according to suitably settings such as environment when system, sample, mensuration.Being judged as that when judging by the 1st signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective when judging time more than T1 (being yes in S201), then entering the 3rd determining step (S206).When being judged as that signal strength non-continuous and effective of signal intensity 1 from signal intensity 0 is changed to signal intensity 1 judges time more than T1 (being no in S201), then enter the 2nd determining step (S203).
Carry out in the 2nd determining step (S203) the 2nd judges, when create be changed to the situation of signal intensity 0 from signal intensity 1, judge whether from this from signal intensity 1 is changed to signal intensity 0 regulation enabledisable judge time T0 within signal intensity again become signal intensity 1 from signal intensity 0, be equivalent in the 1st embodiment the 1st judgement.In the present embodiment, although this enabledisable judges that time T0 is set as 80ms, can according to suitably settings such as environment when system, sample, mensuration.Being judged as signal strength when judging by the 2nd from signal intensity 1 is changed to signal intensity 0 when enabledisable to judge within time T0 that signal intensity is changed to signal intensity 1 again from signal intensity 0 (being yes among S203), then entering the step (S204) of process A.When being judged as signal strength from signal intensity 1 is changed to signal intensity 0 when enabledisable to judge within time T0 that signal intensity is not changed to signal intensity 1 again from signal intensity 0 (being no among S203), then enter the step (S205) of treatments B.
In step S204, same with the process A of the 1st embodiment, for signal strength play when signal intensity 1 is changed to signal intensity 0 again become signal intensity 1 till during signal intensity be during 0, process signal intensity being modified to 1 is implemented to signal.After like this process A being implemented to signal, then enter the 3rd determination step (S206).
On the other hand, in step S205, same with the treatments B of the 1st embodiment, signal strength non-continuous and effective from signal intensity 0 is changed to signal intensity 1 is judged to the part of the signal intensity 1 of time more than T1, process signal intensity being modified to 0 is implemented to signal.After like this treatments B being implemented to signal, enter the non-detection of defect and export step S208.
Be judged as judging by the 1st signal strength signal intensity 1 from signal intensity 0 is changed to signal intensity 1 continue for effective judge time more than T1 (being yes in S202) after, or implement process A to signal in the step (S204) of process A after, defect detecting device 1 carries out the 3rd by the 3rd determining step (S206) to these signals and judges.3rd is judged as, judges in these signals, whether signal intensity 1 continue for the time longer than minimum duration T2, and this judges same judgement with the 3rd in the 1st embodiment.In the present embodiment, although this minimum duration T2 is set as 100ms, can according to suitably settings such as environment when system, sample, mensuration.When being judged as that when judging by the 3rd the state of signal intensity 1 continue for the time longer than minimum duration T2 (being yes in S206), then entering defects detection and exporting step (S207).Export in step (S207) in defects detection, defect detecting device 1 exports the information represented as the Porous hollow fiber membrane M existing defects of check object.User knows Porous hollow fiber membrane M existing defects according to this output.The state being judged as signal intensity 1 when judging by the 3rd does not continue the time longer than minimum duration T2 (be no in S206), then enter defects detection output step (S208).
After treatments B being implemented to signal in step S205, or break as after the state lasting time (among S206s be no) longer than minimum duration T2 of signal intensity 1 judging by the 3rd, then enter the non-detection of defect and export step (S208), defect detecting device 1 exports the information of the Porous hollow fiber membrane M not existing defects represented as check object.
So, when defect detecting device 1 by defects detection export step (S207) or the non-detection of defect export step (S208) export time, a series of Flow ends (S209).
By setting like this, from detection signal, the signal produced due to the defect of Porous hollow fiber membrane can be judged definitely, detect the defect of Porous hollow fiber membrane exactly.In addition, according to the present embodiment, judged by the 1st judgement and the 2nd and be judged as that the part of the noise of needle pattern is implemented treatments B, thus removed by from signal, the output data therefore existed from defect detecting device 1 are organized and easily observe and also can the such advantage of amount of compressed data.
In addition, in the flow process of the 1st embodiment, also can omit the step (S105) of the 2nd determining step (S104) and treatments B and simplify processes.In this case, a series of flow process has beginning step (S100), binary conversion treatment step (S101), the 1st determining step (S102), the step (S103) of process A, the 3rd determining step (S106), defects detection exports step (S107) and the non-detection of defect exports step (S108).In the 1st determining step (S102), when being judged as at enabledisable, signal strength judges that within time T0, signal intensity does not become signal intensity 1 again from signal intensity 0 from signal intensity 1 is changed to signal intensity 0, be set to this signal former state and enter the 3rd determining step unchangeably, synthetically as not being that the signal produced due to the defect of Porous hollow fiber membrane carries out processing in the 3rd determination step (S106).
Owing to not carrying out treatments B in the flow process after this simplification, therefore the noise of needle pattern is not removed by from signal, and data volume increases, but has flow process and can simplify such advantage.
In addition, the signal transacting of the respective embodiments described above, the flow process of defects detection are by being realized by signal conditioning package executive routines such as not shown computing machines.That is, the binarization unit of carrying out binaryzation, the judging unit carrying out each judgement, processing unit signal being carried out to correcting process all can be realized by signal conditioning package.Such signal conditioning package is assembled in defect detecting device 1, but, also can replace and be assembled in defect detecting device 1, and be connected in outside by wired, wireless.
In addition, in the embodiments of the present invention, also can be add into the step to the common moving average process of measured signal rows further, similarly the signal having carried out moving average process be applied to above-mentioned binary conversion treatment, respectively judged process.
As discussed above, according to the present invention, in the flaw detection apparatus of Porous hollow fiber membrane, from detection signal, the signal produced due to the defect of Porous hollow fiber membrane can be judged definitely, detect the defect of Porous hollow fiber membrane exactly.In addition, for the flaw detection apparatus of the Porous hollow fiber membrane of the structure had than the above described structure, as long as check by detecting the bubble be sucked into liquid from the defect of Porous hollow fiber membrane the flaw detection apparatus that the defect of Porous hollow fiber membrane is such, just this defect inspection method can be applied.
Symbol description
The flaw detection apparatus of 1 Porous hollow fiber membrane
10 containers
20,20A channel member
21 hollow fiber membranes are advanced stream
22 space enlargement portions
23 branch flow passage
30 limiting units
31 ~ 34 guide reels
40 liquid suction (decompression) unit
50 bubble detecting units
51 light out part
52 light accepting parts
60 liquid stream lambda lines
61 liquid supply lines
62 liquid discharge line
63 liquid-circulating lines
64,67 deaeration unit
65 degas modules
66 decompressing unit
68 pressure gauges
D hollow fiber membrane is advanced flow path length
D1 hollow fiber membrane is advanced flowing path section width
D2 hollow fiber membrane is advanced flowing path section height
W1 space enlargement portion width
F space enlargement minister degree
H space enlargement portion height

Claims (22)

1. a defect inspection method, is the defect inspection method of the flaw detection apparatus of Porous hollow fiber membrane, it is characterized in that, described flaw detection apparatus has:
Container, contains liquid;
Channel member, be formed with in the mode of the inside of this channel member through the hollow fiber membrane that Porous hollow fiber membrane is continued through to advance stream and advancing stream branch by the branch flow passage of a wall from this hollow fiber membrane, and described hollow fiber membrane is advanced, the opening at the two ends of stream to be configured in described liquid and to be full of by described liquid in stream;
Limiting unit, the mode in the liquid of being advanced in stream by the hollow fiber membrane of described channel member with described Porous hollow fiber membrane limits advancing of described Porous hollow fiber membrane;
Liquid pump unit, the liquid that its hollow fiber membrane aspirating described channel member via described branch flow passage is advanced in stream, make described hollow fiber membrane advance the liquid in stream pressure reduce; And
Bubble detecting unit, there is light out part that to inject in described liquid and check light and be received in the light accepting part of inspection light of transmission in described liquid, detection is sucked into the bubble described liquid from the defect of described Porous hollow fiber membrane, described defect inspection method has:
Measurement step, with the signal of the sample period specified measurement from described light accepting part;
Measured described Signal separator is the signal section owing to producing from the bubble of defect and noise signal portions by separating step; And
Export step, the signal section produced due to bubble is exported as the defect inspection result of Porous hollow fiber membrane.
2. defect inspection method according to claim 1, is characterized in that,
Described separating step has:
Binarization step, measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation;
1st determining step, when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 regulation the enabledisable judgement time within signal intensity again become signal intensity 1 from signal intensity 0;
1st treatment step, when being judged as that signal intensity is changed to signal intensity 1 within the described enabledisable judgement time in described 1st determining step, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1;
2nd determining step, when being judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 1st determining step, judge the effective judgement the time whether time becoming the state being in signal intensity 1 before 0 in signal intensity continue for regulation more than; And
3rd determining step, for from the revised signal of described 1st treatment step and be judged as that in described 2nd determining step signal intensity becomes the signal of more than the time remaining of the state being in signal intensity 1 before 0 described effective judgement time, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation further.
3. defect inspection method according to claim 2, is characterized in that,
In described output step, when being judged as that the state of signal intensity 1 continue for more than described minimum duration in described 3rd determining step, export the check result of multiple aperture plasma membrane existing defects.
4. defect inspection method according to claim 3, is characterized in that,
Also there is the 2nd treatment step, 2nd treatment step, be judged as, when the time that signal intensity becomes the state being in signal intensity 1 before 0 does not continue more than described effective judgement time, the part correcting process of this signal intensity 1 being become signal intensity 0 in described 2nd determining step.
5. the defect inspection method according to claim 3 or 4, is characterized in that,
The state being judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
6. defect inspection method according to claim 1, is characterized in that,
Described separating step has the step of measured described signal being carried out to moving average process.
7. a defect detecting device, is characterized in that, has:
Container, contains liquid;
Channel member, be formed with the internal type of this channel member through the hollow fiber membrane that Porous hollow fiber membrane is continued through to advance stream and advancing stream branch by the branch flow passage of a wall from this hollow fiber membrane, and described hollow fiber membrane is advanced, the opening at the two ends of stream to be configured in described liquid and to be full of by described liquid in stream;
Limiting unit, the mode in the liquid of being advanced in stream by the hollow fiber membrane of described channel member with Porous hollow fiber membrane limits advancing of Porous hollow fiber membrane;
Liquid pump unit, the liquid that the hollow fiber membrane aspirating described channel member via described branch flow passage is advanced in stream, make described hollow fiber membrane advance the liquid in stream pressure reduce;
Bubble detecting unit, has light out part that to inject in described liquid and check light and is received in the light accepting part of inspection light of transmission in described liquid, detects the bubble be sucked into from the defect of described Porous hollow fiber membrane described liquid; And
Check processing unit, possesses: measuring means, with the signal of the sample period specified measurement from described light accepting part; Measured described Signal separator is the signal section owing to producing from the bubble of defect and noise signal portions by separative element; And output unit, the signal section produced due to bubble is exported as the defect inspection result of Porous hollow fiber membrane.
8. flaw detection apparatus according to claim 7, is characterized in that,
Described separative element also has:
Binarization unit, the signal binaryzation using the threshold value of regulation described measuring means to be measured is the signal be made up of signal intensity 1 and signal intensity 0;
Judging unit, has carried out the signal of binaryzation for by described binarization unit, and the change of the signal intensity of the described signal of binaryzation judges to the carrying out played from a certain moment during the stipulated time; And
Processing unit, according to the judged result of described judging unit, for the described signal having carried out binaryzation, becomes 1 or become 0 from 1 correcting process by signal intensity from 0 correcting process,
Described output unit outputs signal according to the judged result of described judging unit,
Described judging unit performs the 1st determining step, 1st determining step be judge to have carried out binaryzation described signal whether signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again become signal intensity 1 from signal intensity 0
When described in described 1st determining step, judging unit is judged as that signal intensity is changed to signal intensity 1 within the described enabledisable judgement time, described processing unit performs the 1st treatment step, described 1st treatment step is, signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes the step of 1
When described in described 1st determining step, judging unit is judged as that signal intensity does not become signal intensity 1 within described enabledisable determination time, described judging unit performs the 2nd determining step, 2nd determining step is, judge the step of the effective judgement the time whether time becoming the state being in signal intensity 1 before 0 in signal intensity continue for regulation more than
Be judged as that signal intensity becomes the signal of more than the time remaining of the state being in signal intensity 1 before 0 described effective judgement time for the signal revised at processing unit described in described 1st treatment step and at judging unit described in described 2nd determining step, described judging unit performs the 3rd determining step further, and described 3rd determining step judges whether the state of signal intensity 1 continue for the step of more than the minimum duration of regulation.
9. flaw detection apparatus according to claim 8, is characterized in that,
When described in described 3rd determining step, judging unit is judged as that the state of signal intensity 1 continue for more than described minimum duration, described output unit exports the check result of multiple aperture plasma membrane existing defects.
10. flaw detection apparatus according to claim 9, is characterized in that,
Described judging unit is judged as that in described 2nd determining step the part correcting process of this signal intensity 1 is become signal intensity 0 by described processing unit when the time that signal intensity becomes the state being in signal intensity 1 before 0 does not continue more than 2nd judgement time.
11. flaw detection apparatus according to claim 9 or 10, is characterized in that,
The state that described judging unit is judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
12. flaw detection apparatus according to claim 7, is characterized in that,
Described separative element carries out moving average process to measured described signal.
13. defect inspection methods according to claim 1, is characterized in that,
Described separating step has:
Binarization step, measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation;
1st determining step, judges the effective judgement the time whether time being in the state of signal intensity 1 when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1 continue for regulation more than;
2nd determining step, do not continued to the signal of more than described effective judgement time the time being judged as the state being in signal intensity 1 in described 1st determining step, judge whether further signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again become signal intensity 1 from signal intensity 0;
1st treatment step, when being judged as that signal intensity becomes signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1; And
3rd determining step, for be judged as in described 1st determining step more than effective judgement time that the time remaining of the state being in signal intensity 1 specifies signal and by the revised signal of described 1st treatment step, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation further.
14. defect inspection methods according to claim 13, is characterized in that,
In described output step, when being judged as that the state of signal intensity 1 continue for more than described minimum duration in described 3rd determining step, export the check result of multiple aperture plasma membrane existing defects.
15. defect inspection methods according to claim 14, is characterized in that,
Also have the 2nd treatment step, the 2nd treatment step is, when being judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the part correcting process of described signal intensity 1 is become signal intensity 0.
16. defect inspection methods according to claims 14 or 15, is characterized in that,
The state being judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
17. flaw detection apparatus according to claim 7, is characterized in that,
Described separative element also has:
Binarization unit, the signal binaryzation using the threshold value of regulation described measuring means to be measured is the signal be made up of signal intensity 1 and signal intensity 0;
Judging unit, has carried out the signal of binaryzation for by described binarization unit, and the change of the signal intensity of the described signal of binaryzation judges to the carrying out played from a certain moment during the stipulated time; And
Processing unit, according to the judged result of described judging unit, for the described signal having carried out binaryzation, becomes 1 or become 0 from 1 correcting process by signal intensity from 0 correcting process,
Described output unit outputs signal according to the judged result of described judging unit,
Described judging unit performs the 1st determining step, 1st determining step is, judge the step of the effective judgement the time whether time being in the state of signal intensity 1 when the described signal having carried out binaryzation is changed to signal intensity 0 from signal intensity 1 continue for regulation more than
For being judged as that at judging unit described in described 1st determining step the time of the state being in signal intensity 1 does not continue the signal of more than described effective judgement time, described judging unit performs the 2nd determining step further, 2nd determining step is, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 within the enabledisable judgement time of regulation signal intensity again to become the step of signal intensity 1 from signal intensity 0
When described in described 2nd determining step, judging unit is judged as that signal intensity becomes signal intensity 1 within the described enabledisable judgement time, described processing unit performs the 1st treatment step, described 1st treatment step be signal strength is played when described signal intensity 1 is changed to signal intensity 0 when signal intensity is changed to signal intensity 1 again from described signal intensity 0 till during signal intensity correcting process become 1 step
For be judged as at judging unit described in described 1st determining step more than effective judgement time that the time remaining of the state being in signal intensity 1 specifies signal and in described 1st treatment step by the revised signal of described processing unit, described judging unit performs the 3rd determining step further, and described 3rd determining step judges whether the state of signal intensity 1 continue for the step of more than the minimum duration of regulation.
18. flaw detection apparatus according to claim 17, is characterized in that,
When described in described 3rd determining step, judging unit is judged as that the state of signal intensity 1 continue for more than described minimum duration, described output unit exports the check result of multiple aperture plasma membrane existing defects.
19. flaw detection apparatus according to claim 18, is characterized in that,
Described judging unit is judged as that signal intensity does not become signal intensity 1 within the described enabledisable judgement time in described 2nd determining step, the part correcting process of described signal intensity 1 is become signal intensity 0 by described processing unit.
20. flaw detection apparatus according to claim 18 or 19, is characterized in that,
The state that described judging unit is judged as signal intensity 1 in described 3rd determining step does not continue more than described minimum duration, in described output step, export the check result of multiple aperture plasma membrane not existing defects.
21. defect inspection methods according to claim 1, is characterized in that,
Described separating step has:
Binarization step, measured described signal binaryzation is the signal be made up of signal intensity 1 and signal intensity 0 by the threshold value using regulation;
Enabledisable determining step, when the signal having been carried out binaryzation by described binarization step is changed to signal intensity 0 from signal intensity 1, judge whether signal strength from signal intensity 1 is changed to signal intensity 0 regulation the enabledisable judgement time within signal intensity again become signal intensity 1 from signal intensity 0;
Treatment step, be judged as in described enabledisable determining step signal strength from signal intensity 1 is changed to signal intensity 0 specify the enabledisable judgement time within signal intensity be again changed to signal intensity 1 from signal intensity 0, the signal intensity correcting process during till being played by signal strength when signal intensity is changed to signal intensity 1 again from described signal intensity 0 when described signal intensity 1 is changed to signal intensity 0 becomes 1; And
Minimum duration determining step, for do not become described enabledisable determining step and described treatment step object signal and by the revised signal of described treatment step, judge whether the state of signal intensity 1 continue for more than the minimum duration of regulation respectively.
22. defect inspection methods according to claim 21, is characterized in that,
When being judged as that the state of signal intensity 1 continue for more than described minimum duration in described minimum duration determining step, export the check result of multiple aperture plasma membrane existing defects.
CN201480019648.1A 2013-03-01 2014-03-03 Method for detecting defect in porous membrane, and defect inspection device Pending CN105102953A (en)

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