CN105093806B - UV (ultraviolet) mask plate and exposure method thereof - Google Patents
UV (ultraviolet) mask plate and exposure method thereof Download PDFInfo
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- CN105093806B CN105093806B CN201510512365.7A CN201510512365A CN105093806B CN 105093806 B CN105093806 B CN 105093806B CN 201510512365 A CN201510512365 A CN 201510512365A CN 105093806 B CN105093806 B CN 105093806B
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Abstract
The invention discloses a UV mask plate and an exposure method thereof, wherein the UV mask plate comprises: the mask plate comprises a mask plate body and a shading sheet; the mask plate body comprises a shading area and a light leakage area; a light leakage area is formed between the adjacent light shielding areas; the light leakage region is a gap in a first direction or a gap in a second direction; the shading sheet is used for shading the non-exposure area. According to the invention, the substrate is exposed in a mode of splicing and shielding the mask plate and the shading sheet, so that the effect of sharing the UV mask plate is achieved, substrates with different sizes can be exposed and developed by adopting the UV mask plate provided by the invention, the UV mask plate does not need to be opened independently, and the manufacturing cost of the display device is saved.
Description
Technical Field
The invention relates to a UV (ultraviolet) mask plate and an exposure method thereof, belonging to the technical field of liquid crystal manufacturing.
Background
A Display device such as a Liquid Crystal Display (LCD) is a widely used flat panel Display device, and a manufacturing method thereof generally includes: providing two parallel substrates, frame sealing glue (sealant) coated between the two substrates, and liquid crystal filled in a space formed by the frame sealing glue and the two substrate substrates; a Thin Film Transistor (TFT) is arranged on a lower substrate, a Color Film (CF) is arranged on an upper substrate, and the rotation direction of liquid crystal molecules in a liquid crystal box is controlled by changing signals and voltage on the TFT, so that whether polarized light of each pixel point is emitted or not is controlled, and the display purpose is achieved.
In the existing liquid crystal processing technology, when liquid crystal is filled in a liquid crystal dropping mode, the frame sealing glue can contact with the liquid crystal before the frame sealing glue is cured, so the industry generally adopts a UV curing mode to prevent the pollution to the liquid crystal caused by the direct contact of the liquid crystal and the frame sealing glue. The so-called UV curing (ultraviolet curing) mainly uses a mask (also called a mask) to cover a liquid crystal region (also called a display region, i.e., an a/a region), and exposes a region coated with a sealant to perform UV curing on the sealant by using a UV curing device, and such a mask is generally called a UV mask.
When the frame sealing glue is cured, UV mask plates with corresponding sizes are developed according to products with different sizes, and the UV mask plates with each size are only used once. The UV mask plates of all products with different sizes are independent, and a corresponding UV mask plate needs to be developed for each product, so that the manufacturing cost of the display device can be increased, and the liquid crystal manufacturing cost is not controlled favorably.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: how to adapt the UV mask to products of different sizes without separately manufacturing the UV mask.
In order to achieve the purpose, the invention provides a UV mask plate and an exposure method thereof.
In one aspect, the present invention provides a UV mask, including: the mask plate comprises a mask plate body and a shading sheet;
the mask plate body comprises a shading area and a light leakage area;
a light leakage area is formed between the adjacent light shielding areas; the light leakage region is a gap in a first direction or a gap in a second direction;
the shading sheet is used for shading the non-exposure area.
Wherein preferably, the first direction is a transverse direction;
the second direction is a longitudinal direction.
Preferably, the light-shielding region is rectangular.
Wherein preferably, the two adjacent light-shielding areas are arranged in a column or a row.
Preferably, the width of the gap is the same as the gap width of the adjacent liquid crystal panel.
Preferably, the width of the gap is the width of the frame sealing glue.
Preferably, the length and width of the UV mask plate are the same as those of the liquid crystal panel.
On the other hand, the invention also provides an exposure method of the UV mask plate, which applies the UV mask plate and the shading sheet and comprises the following steps:
aligning the gap with an exposure area;
covering a non-exposure area with the shading sheet;
and exposing and etching to form an etching pattern.
Preferably, the step of aligning the slit with the exposure area comprises:
and shielding the gap, so that the width of the gap is reduced to the width of the gap between adjacent liquid crystal panels or the width of the frame sealing glue.
Preferably, the method further comprises moving the UV mask plate body and the shading sheet to complete exposure of other exposure areas.
According to the UV mask plate and the exposure method thereof, the substrate is exposed in a mode of splicing and shielding the mask plate and the shading sheet, the effect of sharing the UV mask plate is achieved, substrates with different sizes can be manufactured by exposure and development of the UV mask plate provided by the invention, the UV mask plate does not need to be manufactured independently, and the manufacturing cost of a display device is saved.
Drawings
FIG. 1 is a schematic diagram of a UV mask plate according to the present invention;
FIG. 2 is a second schematic diagram of the structure of the UV mask of the present invention;
FIG. 3 is a schematic view illustrating alignment of a UV mask and a horizontal sealant according to the present invention;
FIG. 4 is a schematic diagram of the light-shielding sheet of the present invention shielding a non-exposure area;
FIG. 5 is a schematic view illustrating alignment of a UV mask and a longitudinal sealant according to the present invention;
FIG. 6 is a schematic diagram of the light-shielding sheet of the present invention shielding a non-exposure area;
FIG. 7 is a schematic flow chart of the UV mask exposure method of the present invention;
FIG. 8 is a schematic view of the alignment of the movable UV mask and the horizontal frame sealing glue according to the present invention;
FIG. 9 is a schematic diagram of the movable shade of the present invention blocking a non-exposure area.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1 and 2, the present invention provides a UV mask, including: a mask plate body 1 and a shading sheet 2 (not shown in the figure); the mask plate body 1 comprises a shading area 11 and a light leakage area 12; a light leakage region 12 is formed between the adjacent light shielding regions 11; the light leakage region 12 is a slit 121 in a first direction or a slit 122 in a second direction; the light shielding sheet 2 is used for shielding a non-exposure area. The following is a detailed description of the UV mask provided by the present invention.
As shown in fig. 1 and 2, the directions of the first-direction slits 121 and the second-direction slits 122 are set to have corresponding shapes according to the edge of the liquid crystal panel 3, and if the liquid crystal panel 3 has an irregular shape, the UV mask may also have an irregular shape, and the light-shielding region 11 may also have an irregular shape as the actual situation. The light leakage region 12 between two adjacent light-shielding regions 11 may also be shaped to fit the edge of the liquid crystal panel 3. Since the liquid crystal panel 3 is generally rectangular, the light-shielding regions 11 are arranged in a rectangular shape corresponding to the edges of the liquid crystal panel 3, the slits 121 in the first direction formed by the adjacent light-shielding regions 11 are in the horizontal direction, and the slits 122 in the second direction formed by the adjacent light-shielding regions 11 are in the vertical direction.
As shown in fig. 3, when the frame sealing adhesive of the liquid crystal panel 3 is cured, the light shielding region 11 is used to form a transverse first-direction gap 121, and the first-direction gap 121 is aligned with the transverse frame sealing adhesive of the liquid crystal panel 3 for fixing. As shown in fig. 4, the non-exposure area is covered with the light shielding plate 2, the lateral frame sealing paste of the liquid crystal panel 3 is cured, and all the lateral frame sealing pastes are cured in this way. As shown in fig. 5, the light-shielding region 11 is formed with a longitudinal gap 122 in the second direction, and the longitudinal frame sealing glue of the liquid crystal panel 3 is aligned and fixed to the gap 122 in the second direction. As shown in fig. 6, the non-exposure area is covered with the light shielding plate 2, the longitudinal frame sealing adhesive of the liquid crystal panel 3 is cured, and all the longitudinal frame sealing adhesives are cured in this way.
In order to reduce the use of the light shielding plate 2 as much as possible, the width of the gap 121 in the first direction or the gap 122 in the second direction between the adjacent light shielding regions 11 is preferably the same as the gap width of the adjacent liquid crystal panels. In this way, when the frame sealing glue of the adjacent liquid crystal panels is exposed and cured, two adjacent frame sealing glue of the adjacent liquid crystal panels can be exposed simultaneously. If the gap width is too large, enough light shielding plates 2 are needed to shield the non-exposure area, and the exposure process is complicated. If the width of the gap is too small, the frame sealing glue can not be completely exposed and cured, and the stability of the liquid crystal panel is affected. Preferably, the width of the gap is set to be the width of the frame sealing glue, when the frame sealing glue is exposed, the gap is aligned with the frame sealing glue to realize one-time accurate exposure of the frame sealing glue, and the width of the gap is the same as that of the frame sealing glue. Therefore, the width of the gap is not required to be shielded during exposure, and the frame sealing glue can be completely exposed and cured.
As shown in fig. 1 to 6, the length and width of the UV mask are the same as those of the liquid crystal panel. When the length of the UV mask is the same as that of the liquid crystal panel, the length of the light leakage region 12 formed between the adjacent light-shielding regions 11 is the same as that of the liquid crystal panel, so that the gap 121 in the first direction is fixed to the frame sealing adhesive in the transverse direction (length direction) of the liquid crystal panel 3 during exposure, thereby completing the curing of the frame sealing adhesive in the transverse direction of the liquid crystal panel. When the width of the UV mask is the same as the width of the liquid crystal panel, the length of the light leakage region 12 formed between the adjacent light-shielding regions 11 is the same as the width of the liquid crystal panel, so that the gap 122 in the second direction is fixed with the longitudinal (length direction) frame sealing glue of the liquid crystal panel 3 during exposure, thereby completing the curing of the longitudinal frame sealing glue of the liquid crystal panel.
In order to further embody the superiority of the UV mask provided by the present invention, the present invention also provides a UV mask exposure method, in which the UV mask and the gobo are applied, as shown in fig. 7, the method includes the following steps: aligning the gap with an exposure area; covering a non-exposure area with the shading sheet; and exposing and etching to form an etching pattern. The following is a detailed description of the UV mask exposure method provided by the present invention.
As shown in fig. 3, when the UV mask exposure method provided by the present invention is used for exposure, firstly, a light leakage region formed between adjacent light-shielding regions 11 needs to be aligned to an exposure region, and if a gap width formed by the light leakage region 12 is wider than a width of a gap width frame sealing adhesive of an adjacent liquid crystal panel to be exposed, a light shielding plate is used to shield the gap, so that the gap width is reduced to the gap width of the adjacent liquid crystal panel or the width of the frame sealing adhesive. As shown in fig. 4, after the slit formed in the light leakage region 12 is aligned with the exposure region, the non-exposure region is shielded by a light shielding plate to prevent exposure of other regions. And exposing the current exposure area to form an etching pattern. After completing one exposure as shown in fig. 8 and 9, moving the UV mask body and the light-shielding sheet to complete the exposure of other exposure areas. And after all the transverse frame sealing glue is exposed and cured, exposing and curing the longitudinal frame sealing glue by adopting the same method. The specific process is the same as the method for exposing and curing the transverse frame sealing glue, and is not repeated again.
In summary, according to the UV mask and the exposure method thereof provided by the invention, the substrate is exposed in a manner of splicing and shielding the mask and the shading sheet, so that the effect of sharing the UV mask is achieved, substrates with different sizes can be exposed and developed by using the UV mask provided by the invention, the UV mask does not need to be opened independently, and the manufacturing cost of the display device is saved.
The above embodiments are only for illustrating the invention and are not to be construed as limiting the invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention, therefore, all equivalent technical solutions also belong to the scope of the invention, and the scope of the invention is defined by the claims.
Claims (10)
1. The utility model provides a UV mask plate for liquid crystal display panel's frame sealing glue solidification, its characterized in that includes: the mask plate comprises a mask plate body and a shading sheet;
the mask plate body comprises a shading area and a light leakage area;
the light leakage area is formed between the adjacent light shielding areas, and when the frame sealing glue of the liquid crystal panel is cured, the light leakage area is a gap with one direction, and the gap is a gap with a first direction or a gap with a second direction;
the shading sheet is used for shading the non-exposure area.
2. The UV mask of claim 1, wherein the first direction is a lateral direction;
the second direction is a longitudinal direction.
3. The UV mask of claim 1, wherein the light-shielding region is rectangular.
4. The UV mask of claim 1, wherein the adjacent light-shielding regions are arranged in columns or rows.
5. The UV mask according to claim 1, wherein the width of the slit is the same as the gap width of the adjacent liquid crystal panel.
6. The UV mask according to claim 1, wherein the width of the gap is the width of the frame sealing glue.
7. The UV mask plate of claim 1, wherein the length and width of the UV mask plate are the same as the length and width of the liquid crystal panel.
8. An exposure method of a UV mask characterized by applying the UV mask and a mask according to any one of claims 1 to 7, comprising the steps of:
aligning the gap with an exposure area;
covering a non-exposure area with the shading sheet;
and exposing and etching to form an etching pattern.
9. The exposure method according to claim 8, wherein the step of aligning the slit with the exposure region includes:
and shielding the gap, so that the width of the gap is reduced to the width of the gap between adjacent liquid crystal panels or the width of the frame sealing glue.
10. The exposure method according to claim 8, further comprising moving the UV mask body and the shutter to complete exposure of other exposure regions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510512365.7A CN105093806B (en) | 2015-08-19 | 2015-08-19 | UV (ultraviolet) mask plate and exposure method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510512365.7A CN105093806B (en) | 2015-08-19 | 2015-08-19 | UV (ultraviolet) mask plate and exposure method thereof |
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| Publication Number | Publication Date |
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| CN105093806A CN105093806A (en) | 2015-11-25 |
| CN105093806B true CN105093806B (en) | 2019-12-27 |
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| CN201510512365.7A Active CN105093806B (en) | 2015-08-19 | 2015-08-19 | UV (ultraviolet) mask plate and exposure method thereof |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106896538B (en) * | 2017-02-28 | 2019-12-24 | 深圳市华星光电技术有限公司 | UV mask plate, manufacturing method thereof and frame glue curing system |
| CN107742472B (en) * | 2017-09-25 | 2021-03-26 | 昆山国显光电有限公司 | Packaging mask plate, packaging method and display panel |
| CN107761049A (en) * | 2017-10-09 | 2018-03-06 | 深圳市华星光电半导体显示技术有限公司 | Evaporation uses UV pre-processing devices |
| CN108255012A (en) * | 2018-03-26 | 2018-07-06 | 京东方科技集团股份有限公司 | The preparation method of optical mask plate and optical mask substrate based on optical mask plate |
| CN109856864A (en) * | 2019-04-01 | 2019-06-07 | 福州京东方光电科技有限公司 | A kind of display panel is to cassette method |
| CN114367423B (en) * | 2022-01-17 | 2023-03-21 | 深圳市洲明科技股份有限公司 | Glue pouring method for lamp seams of display module |
| CN116430688B (en) * | 2023-06-14 | 2024-03-01 | 日月新半导体(昆山)有限公司 | Semiconductor processing method |
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| JPH09258433A (en) * | 1996-03-19 | 1997-10-03 | Nikon Corp | Mask |
| CN101986206A (en) * | 2010-07-30 | 2011-03-16 | 南京中电熊猫液晶显示科技有限公司 | Method for utilizing functional mask board to manufacture mask substrate for solidifying sealing glue |
| CN102736323A (en) * | 2012-06-25 | 2012-10-17 | 深圳市华星光电技术有限公司 | Photomask capable of curing frame glue and method for manufacturing liquid crystal display panel |
| CN104503203A (en) * | 2015-01-15 | 2015-04-08 | 京东方科技集团股份有限公司 | Mask plate and production method thereof and display panel frame sealing adhesive curing method |
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| KR100662495B1 (en) * | 2002-03-07 | 2007-01-02 | 엘지.필립스 엘시디 주식회사 | Method of manufacturing Liquid Crystal Display Device |
| JP2012198357A (en) * | 2011-03-22 | 2012-10-18 | Panasonic Corp | Exposure mask film for printed wiring board and manufacturing method of the same |
| CN103941481A (en) * | 2013-06-27 | 2014-07-23 | 上海中航光电子有限公司 | Design of mask plate |
| CN103760747B (en) * | 2013-12-25 | 2015-05-06 | 深圳市华星光电技术有限公司 | Mask plate, method for carrying out exposure on the mask plate and liquid crystal panel comprising mask plate |
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| JPH09258433A (en) * | 1996-03-19 | 1997-10-03 | Nikon Corp | Mask |
| CN101986206A (en) * | 2010-07-30 | 2011-03-16 | 南京中电熊猫液晶显示科技有限公司 | Method for utilizing functional mask board to manufacture mask substrate for solidifying sealing glue |
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| CN105093806A (en) | 2015-11-25 |
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