CN105092690B - Ionization absorption spectra detection device based on multi-channel electronic multiplier device - Google Patents
Ionization absorption spectra detection device based on multi-channel electronic multiplier device Download PDFInfo
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- CN105092690B CN105092690B CN201510305701.0A CN201510305701A CN105092690B CN 105092690 B CN105092690 B CN 105092690B CN 201510305701 A CN201510305701 A CN 201510305701A CN 105092690 B CN105092690 B CN 105092690B
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Abstract
The present invention provides a kind of ionization absorption spectra detection device based on multi-channel electronic multiplier, including the ionization chamber for being used to make gas ionization；The golden net being arranged in the ionization chamber is arranged to collect the ion for ionizing generation in the ionization chamber；The multi-channel electronic multiplier being arranged in the ionization chamber, position is opposite with the position of the gold net, and to form electric field therebetween, and the effect for passing through the electric field receives the ion that the gold net is collected and exports corresponding ion signal；Pressurization and the signal acquisition circuit of the multi-channel electronic multiplier are connected to, be arranged to provide voltage and acquisition to the multi-channel electronic multiplier and exports the ion signal；And signal processing system, it is arranged to receive the ion signal and corresponding ionization absorption spectra is obtained according to the ion signal.The present invention can improve the accuracy of measuring beam heat input resolution ratio, reduce influence of the gas collisions broadening to final result.
Description
Technical field
The present invention relates to ionization absorption spectra field of detecting more particularly to a kind of ionization based on multi-channel electronic multiplier device
Absorption spectra detection device.
Background technology
Shanghai synchrotron radiation light source (Shanghai Synchrotron Radiation Facility, abbreviation SSRF) is
Advanced third generation synchrotron radiation light source, main performance index occupy international forefront.SSRF can be generated from far infrared to hard X
The broad wave band of ray is the crowds such as life science, material science, environmental science, geoscience, physics, chemistry, information science
Irreplaceable advanced means and compositive research platform in more scientific researches.
The line of dream is the another high-performance line station after the seven light beam line stations built in the first batch, it has in soft X-band
Have compared with Kuan Neng areas scope (20-2000eV) and superenergy resolving power (being more than 10,000 1000eV).There are two the lines of dream
Branch line station, one is angle resolved photoelectron spectroscope (angle-resolved photoemission spectroscopy, letter
Claim ARPES) it stands, it can be with direct detection electronic band structure, the system complicated available for research, such as high-temperature superconductor, spin electricity
Sub- material, topological insulator etc..The other is photoelectron frequency microscope (photoemission electron microscopy, letter
Claim PEEM) it stands, it is a kind of highly useful surface Detection Techniques, important information can be provided for kinetics.
In the construction and debugging process stood online, the energy resolution for detecting light beam line is one of key problem.
In grenz ray energy range, a kind of method that assessment light beam line energy resolution generally uses is measurement standard gas
Absorption spectra is ionized, the broadening of absworption peak in the spectral line as obtained by analysis measurement, to obtain the instrumental broadening of light beam line.International same
It walks in radiation appliance, common ionization chamber has based on two kinds of electrode catheter and multi-channel electronic multiplier device.
Ionization chamber based on electrode catheter has relatively simple structure and electronics equipment, and collector not rapid wear
It is bad, so it is still worldwide widely used on synchrotron radiation bunch even to this day.Electrode catheter formula ionizes chamber
Structure diagram as shown in Figure 1, it include ionize chamber 100 ', be arranged on ionization chamber in anode 1 ', cathode 2 ' and zero
Pole 3 ' and the molecular pump 4 ' being arranged on ionization chamber chamber outer wall, Capacitance Diaphragm Gauge 5 ', picoammeter 6 ' and mass flowmenter 7 '.
It when X-ray enters ionization chamber, is actually taken up by gas so that the ionization of gas atom outer-shell electron generates electronic and ionic pair, electricity
Son and cation can form electricity under the action of the electric field between cathode and anode respectively to anode and cathodic drift in external circuit
Stream is ionization current.And ionization current is to absorption spectra that the response spectra of different-energy is the gas.By going out in analytical spectra
Existing peak position and halfwidth can calibrate the energy of light beam line and resolution ratio assessed.
However, in order to ensure that the signal of acquisition has preferable signal-to-noise ratio, the pressure of under test gas is higher in ionization chamber room
(10-1~10-3Torr), at this moment increased gas collisions broadening has absorption spectra peak width additional contribution, reduces the standard of measurement
Exactness.
The content of the invention
In view of the above shortcomings of the prior art, the present invention provides a kind of ionization based on multi-channel electronic multiplier device and absorbs
Detection device is composed, to improve the accuracy of measurement bunch energy resolution, reduces influence of the gas collisions broadening to final result.
To achieve these goals, the present invention adopts the following technical scheme that：
A kind of ionization absorption spectra detection device based on multi-channel electronic multiplier, including the ionization for being used to make gas ionization
Chamber further includes：
One is arranged on the golden net in the ionization chamber, is arranged to collect the ion generated in the ionization chamber；
One is arranged on the multi-channel electronic multiplier in the ionization chamber, and position is opposite with the position of the gold net,
To form electric field therebetween, and the effect reception gold for passing through the electric field nets the ion collected and the output phase is answered
Ion signal；
One is connected to the pressurization of the multi-channel electronic multiplier and signal acquisition circuit, is arranged to the multichannel
Electron multiplier provides voltage and acquisition and exports the ion signal；And
One is connected to the signal processing system of the pressurization and signal acquisition circuit, is arranged to receive the ion signal
And corresponding ionization absorption spectra is obtained according to the ion signal.
Further, the multi-channel electronic multiplier includes an anode plate and a connected front end microchannel plate and one
Rear end microchannel plate, the front end microchannel plate are set adjacent to the gold net, and the rear end microchannel plate is adjacent to the anode plate
It sets.
Preferably, the multi-channel electronic multiplier further includes at least one piece and is connected to the front end microchannel plate and rear end
Intermediate microchannel plate between microchannel plate.
Further, the pressurization and signal acquisition circuit include：
First divider resistance is connected between a negative voltage source and the front end microchannel plate；
Second divider resistance is connected between a positive voltage source and the rear end microchannel plate；
3rd divider resistance is connected between first divider resistance and the second divider resistance；
First RC circuits, its one end are connected between first divider resistance and the 3rd divider resistance, other end ground connection；
2nd RC circuits, its one end are connected between second divider resistance and the 3rd divider resistance, other end ground connection；
And
First capacitance, its one end are connected to the anode plate and are connected to the positive voltage source and second divider resistance
Between, the other end is connected to the signal processing system.
Preferably, the signal processing system includes：
One is connected to the amplifier of the pressurization and signal acquisition circuit, is arranged to receive the ion signal and to it
It is exported after being amplified；
One is connected to the discriminator of the amplifier, is arranged to the voltage amplitude for the ion signal for exporting the amplifier
Degree exports a count signal compared with predetermined threshold value when the voltage amplitude is more than the predetermined threshold value；
One is connected to the counter of the discriminator, is arranged to be counted according to the count signal；And
One is connected to the data processor of the counter, is arranged to obtain institute according to the count results of the counter
State ionization absorption spectra.
Further, the ionization absorption spectra detection device based on multi-channel electronic multiplier further includes one and is mounted on institute
State the gas injection system on the outer wall of ionization chamber and for injecting the gas to the ionization chamber.
Further, the ionization absorption spectra detection device based on multi-channel electronic multiplier further includes one and is mounted on institute
State the vacuum meter on the outer wall of ionization chamber and for monitoring the indoor air pressure of the ionization chamber.
Further, the ionization absorption spectra detection device based on multi-channel electronic multiplier further includes one and is mounted on institute
State the vacuum pump group on the outer wall of ionization chamber and for providing vacuum condition for the ionization chamber.
Preferably, the amplifier and discriminator are integrated on same electronics plug-in unit.
In conclusion since for electrode catheter, the ionization chamber based on multi-channel electronic multiplier device has
Inborn advantage, i.e. the air pressure itself when MCP is worked normally is relatively low, is generally less than 10-6Torr, this just substantially reduces collision
The influence that broadening measures energy resolution.
Description of the drawings
Fig. 1 is the structure diagram of the ionization absorption spectra detection device based on electrode catheter of the prior art；
Fig. 2 is the structure diagram of the ionization absorption spectra detection device based on multi-channel electronic multiplier device of the present invention；
Fig. 3 is the pressurization of the present invention and signal acquisition circuit and the circuit diagram of signal processing system；
Fig. 4 is the counting of the multi-channel electronic multiplier device of the present invention with the change curve of ionization chamber room pressure；
Fig. 5 is the absorption spectra using the Ar of the device of the invention measurement；
Fig. 6 is the N using the device of the invention measurement2Absorption spectra.
Specific embodiment
Presently preferred embodiments of the present invention is provided below in conjunction with the accompanying drawings, and is described in detail, and makes to be better understood when this hair
Bright function, feature.
As shown in Fig. 2, the present invention based on multi-channel electronic multiplier (Multi-channel photomultiplier,
Abbreviation MCP) ionization absorption spectra detection device include one ionization chamber 100, mounted on ionization chamber 100 outer wall on a note
Gas system 1, a vacuum meter 2 and a vacuum pump group, one is arranged on the golden net 4 in ionization chamber 100, and one is arranged on ionization chamber
Multi-channel electronic multiplier 5 in 100, one to be arranged on ionization chamber 100 outer and pass through connector and be connected to multi-channel electronic multiplication
The pressurization of device 5 and signal acquisition circuit 6, one is arranged on outside ionization chamber 100 and is connected to the letter of pressurization and signal acquisition circuit 6
Number processing system 7；In addition, further include by flange be mounted on ionization chamber 100 antetheca on long and narrow difference window 8 and
The photodiode 9 of the rear end part in ionization chamber 100 is arranged on along the optical path direction of X-ray.
The effect of each component is described in detail separately below：
Gas injection system 1 is used for injecting target gas to ionization chamber 100, and flow is controlled to ensure to ionize chamber by microleak valve
Gas in 100 can be stablized 10-6The magnitude of torr.
Vacuum meter 2 is for the air pressure in monitoring ionization chamber 100.
Vacuum pump group includes ionic pump 31 and molecule pump group 32, when measuring gas absorption spectrum, in order to ensure to ionize chamber
100 air pressure constant need to only open the relatively slow molecule pump group 32 of pumping speed at this time；After absorbing spectrometry, in order to make electricity
Normal condition, which is quickly returning to, from 100 vacuum of chamber (is better than 10-9Torr), then need to start the faster ionic pump 31 of pumping speed simultaneously；
After vacuum recovers normal condition, the valve of molecule pump group 32 can be closed.
Golden net 4 is applied with the first negative voltage-HV1, so that it can be used for collecting X-ray with target gas in ionization chamber 100
The ion generated after collision.
Multi-channel electronic multiplier 5 is oppositely arranged with golden net 4, to form electric field therebetween, so that golden net 4 is received
The ion of collection can be sent to multi-channel electronic multiplier 5 by the effect of the electric field, and multi-channel electronic multiplier 5 often receives
An ion signal is exported after one ion.
Pressurization and signal acquisition circuit 6 are used to provide voltage to multi-channel electronic multiplier 5, while gather multi-channel electronic
The ion signal that multiplier 5 exports, and the ion signal collected is outwards exported.
Signal processing system 7 is believed for the ion signal of reception pressurization and the output of signal acquisition circuit 6 and according to the ion
Number obtain corresponding ionization absorption spectra.
The critical component of the present invention --- multi-channel electronic multiplier 5, pressurization and signal acquisition circuit 6 and signal processing system
System 7 is as shown in Figure 3.After multi-channel electronic multiplier 5 includes an anode plate 54 and a connected front end microchannel plate 51 and one
Microchannel plate 52 is held, and the neighbouring golden net 4 of front end microchannel plate 51 is set, rear end microchannel plate 52 is set adjacent to anode plate 54.Its
In, microchannel plate 51,52 is a kind of vacuum detection device of two dimensional surface, be usually used to detection charged particle (such as electronics or from
Son) or photon, with very high spatial discrimination and temporal resolution, it is used as the probe of fast number system herein.In order to
Gain is improved, multi-channel electronic multiplier 5 of the invention, which further includes, is connected to front end microchannel plate 51 and rear end microchannel plate 52
Between intermediate microchannel plate 53, and three microchannel plates 51,52,53 Z-shape arrangements, this arrangement mode is art technology
Mode known to personnel.It, will be in front end microchannel plate 51 when the incident ion of certain energy is detected by front end microchannel plate 51
Conduit wall on get several secondary electrons；Then, the potential gradient in passage causes electronics to accelerate to obtain energy, bombards again
The conduit wall of intermediate microchannel plate 53, generates more electronics；Then, rear end microchannel plate 52 is reached, is generated micro- more logical than intermediate
53 more electronics of guidance tape.Finally, the electron beam after three microchannel plates 51,52,53 double is received by anode plate 54 made of copper
Collection.It should be understood that as needed, it is micro- logical that multiple centres can also be connected between front end microchannel plate 51 and rear end microchannel plate 52
Guidance tape 53.
In order to improve signal-to-noise ratio, the present invention devises pressurization as shown in Figure 3 and signal acquisition circuit 6 and signal processing system
System 7.Pressurization and signal acquisition circuit 6 include：First divider resistance R1 is connected to a negative voltage source-HV2 (HV2>HV1) with before
Between the microchannel plate 51 of end；Second divider resistance R2, is connected between a positive voltage source+HV and rear end microchannel plate 52；The
Three divider resistance R3 are connected between the first divider resistance R1 and the second divider resistance R2；First capacitance C1, its one end connection
Between positive voltage source and the second divider resistance R2, the other end is connected to signal processing system 7；The first RC being made of R4, C2
Circuit, its one end are connected between the first divider resistance R1 and the 3rd divider resistance R3, other end ground connection；And by R5, C3 group
Into the 2nd RC circuits, its one end is connected between the second divider resistance R2 and the 3rd divider resistance R3, other end ground connection；Its
In, anode plate 54 is connected between positive voltage source and the second divider resistance R2.Wherein, first, second RC circuits are respectively used to receive
Collect the signal of front and back ends microchannel plate 52, and the signal of anode plate 54 is sent into signal processing system 7 by the first capacitance C1.
Signal processing system 7 includes sequentially connected amplifier 71, discriminator 72, counter 73 and data processor
74, wherein, amplifier 71 is used to receive ion signal and be exported after being amplified to it；Discriminator 72 is used for amplifier 71
The voltage amplitude of the ion signal of output is compared with predetermined threshold value, and one meter of output when voltage amplitude is more than predetermined threshold value
Number signal, so that subsequent counter 73 is counted, while removes noise；Counter 73 according to count signal based on carrying out
Number；Data processor 74 (such as can be computer) is used to obtain ionization absorption spectra according to the count results of counter 73.
In preferred embodiment, amplifier 71 and discriminator 72 are integrated on same electronics plug-in unit.
The operation principle of the present invention is as follows：The X-ray being emitted from monochromatic optical slits enters ionization chamber 100 so that ionization chamber
Target gas ionization in room 100 generates electronic and ionic pair, and cation is under the action of the negative voltage-HV1 of golden net 4, rapid and electricity
Son separation, and the electric field (HV2-HV1) formed in the online voltage-HV1 of gold with the voltage-HV2 on front end microchannel plate 51
Continue to accelerate under effect, finally be collected by anode plate 54.The counting of anode plate 54 is to the response of monochromatic light energy
Gas ionization absorption spectra.This ionization chamber 100 based on multi-channel electronic multiplier 5 is substantially improved to light beam heat input point
The assessment result of resolution.
Example 1
In order to measure the working performance of MCP and obtain its optimum Working, in the case where not changing other conditions, survey
The counting of MCP has been measured with the change curve (as shown in Figure 4) of ionization chamber room pressure, in figure solid line be linear fit as a result,
It can be seen that MCP is 10 in air pressure-7The work of (normal work air pressure) is linearly fine within the scope of torr.
Example 2
Using the ionization chamber based on MCP detectors, the absorption spectra of the gases such as argon gas and nitrogen is measured respectively,
Obtain respectively the line of dream to should be able to area energy resolution.If Figures 5 and 6 are respectively the absorption spectra of argon gas and nitrogen, it is seen then that
Energy resolving power (E/E) has respectively reached 10382@243eV and 18000@400eV.
It is above-described, it is only presently preferred embodiments of the present invention, is not limited to the scope of the present invention, of the invention is upper
Stating embodiment can also make a variety of changes.What i.e. every claims and description according to the present patent application were made
Simply, equivalent changes and modifications falls within the claims of the present invention.
Claims (8)
1. a kind of ionization absorption spectra detection device based on multi-channel electronic multiplier, including the ionization chamber for being used to make gas ionization
Room, which is characterized in that further include：
One is arranged on the golden net in the ionization chamber, is arranged to collect the ion generated in the ionization chamber；
One be arranged on it is described ionization chamber in multi-channel electronic multiplier, position with it is described gold net position it is opposite, with
Form electric field between the two, and pass through the electric field effect receive it is described gold net collect the ion and export accordingly from
Subsignal；
One is connected to the pressurization of the multi-channel electronic multiplier and signal acquisition circuit, is arranged to the multi-channel electronic
Multiplier provides voltage and acquisition and exports the ion signal；And
One is connected to the signal processing system of the pressurization and signal acquisition circuit, is arranged to receive the ion signal and root
Corresponding ionization absorption spectra is obtained according to the ion signal；
Wherein, the golden net and multi-channel electronic multiplier are not disposed in the light path of X-ray；
The multi-channel electronic multiplier includes an anode plate and connected a front end microchannel plate and a rear end microchannel plate；
The pressurization and signal acquisition circuit include：
First divider resistance is connected between a negative voltage source and the front end microchannel plate；
Second divider resistance is connected between a positive voltage source and the rear end microchannel plate；
3rd divider resistance is connected between first divider resistance and the second divider resistance；
First RC circuits, its one end are connected between first divider resistance and the 3rd divider resistance, other end ground connection；
2nd RC circuits, its one end are connected between second divider resistance and the 3rd divider resistance, other end ground connection；And
First capacitance, its one end be connected to the anode plate and be connected to the positive voltage source and second divider resistance it
Between, the other end is connected to the signal processing system.
2. the ionization absorption spectra detection device according to claim 1 based on multi-channel electronic multiplier, which is characterized in that
The front end microchannel plate is set adjacent to the gold net, and the rear end microchannel plate is set adjacent to the anode plate.
3. the ionization absorption spectra detection device according to claim 2 based on multi-channel electronic multiplier, which is characterized in that
The multi-channel electronic multiplier further includes at least one piece and is connected between the front end microchannel plate and rear end microchannel plate
Intermediate microchannel plate.
4. the ionization absorption spectra detection device according to claim 1 based on multi-channel electronic multiplier, which is characterized in that
The signal processing system includes：
One is connected to the amplifier of the pressurization and signal acquisition circuit, is arranged to receive the ion signal and it is carried out
It is exported after amplification；
One is connected to the discriminator of the amplifier, be arranged to the voltage amplitude of the ion signal for exporting the amplifier with
Predetermined threshold value is compared, and exports a count signal when the voltage amplitude is more than the predetermined threshold value；
One is connected to the counter of the discriminator, is arranged to be counted according to the count signal；And
One is connected to the data processor of the counter, is arranged to obtain the electricity according to the count results of the counter
From absorption spectra.
5. the ionization absorption spectra detection device according to claim 1 based on multi-channel electronic multiplier, which is characterized in that
One is further included to be mounted on the outer wall of the ionization chamber and be used to inject the gas injection system of the gas to the ionization chamber.
6. the ionization absorption spectra detection device according to claim 1 based on multi-channel electronic multiplier, which is characterized in that
One is further included to be mounted on the outer wall of the ionization chamber and be used to monitor the vacuum meter of the indoor air pressure of the ionization chamber.
7. the ionization absorption spectra detection device according to claim 1 based on multi-channel electronic multiplier, which is characterized in that
It further includes one and is mounted on the outer wall of the ionization chamber and is used for the vacuum pump group that vacuum condition is provided for the ionization chamber.
8. the ionization absorption spectra detection device according to claim 4 based on multi-channel electronic multiplier, which is characterized in that
The amplifier and discriminator are integrated on same electronics plug-in unit.
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| CN106783502B (en) * | 2016-11-30 | 2018-08-24 | 中国科学院上海应用物理研究所 | A kind of lossless real time position resolution ionisation chamber of Synchrotron Radiation Soft X ray |
| CN108334706B (en) * | 2018-02-09 | 2021-10-01 | 哈尔滨工业大学 | Equivalent evaluation method for performance degradation caused by bipolar device displacement damage |
| CN108195405B (en) * | 2018-03-06 | 2024-05-17 | 中国科学技术大学 | Microchannel plate ion detection circuit |
| CN109001969B (en) * | 2018-07-02 | 2020-04-21 | 北京无线电计量测试研究所 | Microchannel plate electron multiplier |
| CN109856231B (en) * | 2019-02-27 | 2021-06-11 | 苏州大学 | Multi-channel high-flux composite ionization device |
| CN113031047B (en) * | 2021-03-02 | 2022-11-08 | 中国科学院近代物理研究所 | Bidirectional residual gas ionization profile detector system and detection method thereof |
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| CN103000483A (en) * | 2012-12-18 | 2013-03-27 | 常熟市信立磁业有限公司 | Bulk conductive microchannel plate |
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| CN103000483A (en) * | 2012-12-18 | 2013-03-27 | 常熟市信立磁业有限公司 | Bulk conductive microchannel plate |
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