CN105075087B - Voltage-type continuous-current plant and the control method of voltage-type continuous-current plant - Google Patents
Voltage-type continuous-current plant and the control method of voltage-type continuous-current plant Download PDFInfo
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- CN105075087B CN105075087B CN201380075356.5A CN201380075356A CN105075087B CN 105075087 B CN105075087 B CN 105075087B CN 201380075356 A CN201380075356 A CN 201380075356A CN 105075087 B CN105075087 B CN 105075087B
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- 238000000034 method Methods 0.000 title claims description 17
- 238000010891 electric arc Methods 0.000 claims abstract description 114
- 230000001351 cycling effect Effects 0.000 claims description 19
- 230000005611 electricity Effects 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 239000000411 inducer Substances 0.000 claims description 7
- 238000009499 grossing Methods 0.000 claims description 4
- 230000001629 suppression Effects 0.000 abstract description 8
- 238000011084 recovery Methods 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 34
- 239000003990 capacitor Substances 0.000 description 8
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- 238000001914 filtration Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 239000000758 substrate Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
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- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
- H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
- H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
- H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
- H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
- H02M3/1582—Buck-boost converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/36—Means for starting or stopping converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4807—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode having a high frequency intermediate AC stage
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Inverter Devices (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Dc-Dc Converters (AREA)
Abstract
In the voltage-type continuous-current plant possessing inverter, when electric arc occurs, suppression supplies from inverter to the electric current of load-side.In stopping/recovery that the direct current of voltage-type continuous-current plant exports, copped wave portion is made to separate from inverter during stopping, the excess current to load when thus suppression electric arc occurs, carry out the extinguishing arc of electric arc at high speed, keep flow through the electric current in copped wave portion as circulating current, and inverter when restarting to the load circulating current that kept of supply, during the recovery of the direct current output thus reducing voltage-type continuous-current plant, postpone to the supply of the direct current power of load.
Description
Technical field
The present invention relates to a kind of voltage-type continuous-current plant and control method thereof, such as relate to a kind of wait from
Voltage-type continuous-current plant used in sub-generating means even load and control method thereof.
Background technology
The continuous-current plant used in plasma generation device, it is desirable to the suppression surplus when electric arc occurs
Electric current, carries out the extinguishing arc of electric arc at high speed.There is following problem in voltage-type DC source: because of with output even
The big capacitor connect flows through the discharge current of surplus when electric arc occurs, or in order to compensate when electric arc occurs
Output voltage declines makes output increase further, so that electric arc change for a long time etc. increase to the impact of load.
Corresponding method as arc discharge, it is known that have a following method etc.:
(1) suspend power supply, after certain time, restart operating.
(2) the LC vibrating circuit by being made up of the combination of reactance and capacitor produces back voltage and makes electricity
Arc self extinguishing arc.
(3) produce circuit generation back voltage by back voltage based on thyristor and make electric arc certainly
Body extinguishing arc.
These corresponding method are noted and there is following problem: in the case of arc discharge frequently occurs
Uncontrollable output electric current, or generation time delay when restarting in regular picture.
In order to solve above-mentioned problem, it is proposed that following plasma continuous-current plant: make as inverter
With current source inverter, control the switch motion of current source inverter as current source, thus control to wait from
The supply electricity (patent documentation 1) of sub-generating means.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2004-40962 publication (paragraph [0002]～paragraph [0027])
Summary of the invention
The problem that invention is to be solved
The plasma continuous-current plant proposed in patent documentation 1, is by controlling current source inverter
Switch motion control the quantity delivered to plasma generator, and stable by current source action supply
The current mode continuous-current plant of direct current power.It is to say, not as voltage source but as current source
Control electric power, it is possible to carry out stable control.
Therefore, the most known following voltage-type DC source: it is not change in current source, maintains
The structure of voltage source, it is possible to suppress excess current when electric arc occurs, and after electric arc extinguishing arc can being carried out rapidly
Direct current output supply recover.
Present invention aim to address above-mentioned conventional problem points, in voltage-type continuous-current plant,
Suppress from inverter to the supply of the excess current of load-side when electric arc occurs.
For solving the means of problem
Using plasma generator as load, in the case of supply direct current power, at load i.e. plasma
When generating means there occurs arc discharge, stop from voltage-type continuous-current plant to plasma generator
The supply of direct current power, thus suppression excess current reduces the damage of electrode or substrate.Further, at electricity
During arc discharge extinguishing arc, recover from voltage-type continuous-current plant to the confession of the direct current power of plasma generator
Give.
The voltage-type continuous-current plant of the present invention, keeps flow through voltage-type DC source dress when electric arc occurs
The DC current put, suppresses the supply to load-side, and the voltage-type continuous-current plant after electric arc extinguishing arc
The supply of direct current output when recovering, the direct current using the DC current that kept promptly to carry out to load is defeated
The supply gone out.
Voltage-type continuous-current plant direct current export stopping/recovery in, stop time making copped wave portion from
Inverter separates, and the excess current to load when thus suppression electric arc occurs carries out disappearing of electric arc at high speed
Arc.Further, keep then flowing through the electric current in copped wave portion as circulating current, and when restarting inverter
The circulating current kept is supplied to load, thus reduces the direct current output of voltage-type continuous-current plant
Supply during recovery, to the direct current power of load postpones.Here, inverter can be single-phase inverter or
Polyphase inverter, states with inverter the most simply.
The present invention includes the form of voltage-type continuous-current plant and the shape of the control method of continuous-current plant
State.
[continuous-current plant]
The voltage-type continuous-current plant of the present invention possesses: voltage-mode buck copped wave portion, and it constitutes DC source；
Inverter, it has the electric bridge electricity being made up of the 1st switch element～these 4 switch elements of the 4th switch element
Road, and be single-phase exchange by the action of switch element by the direct current output transform in voltage-mode buck copped wave portion
Electric power；Rectification part, the output of inverter is handed over straight conversion, and the direct current obtained is supplied to load by it；
Control portion, it controls voltage-mode buck copped wave portion and inverter；And short, it is cut at voltage-mode buck
Between ripple portion and inverter, made plus end and the negative terminal in voltage-mode buck copped wave portion by short switch element
Between short circuit.
In common power supply action, the voltage transformation of direct current power is pre-by voltage-mode buck copped wave portion
Determine voltage and export DC voltage.Inverter switches current path by the action of multiple switch elements, thus
It is single-phase alternating electromotive force by the direct current output transform in voltage-mode buck copped wave portion.Rectification part is by handing over straight conversion
Alternating electromotive force obtained by inverter converts is transformed to direct current power, and by the direct current power after conversion
It is supplied to load.
In the operating state to load supply direct current power, load i.e. plasma generator occur electricity
During arc discharge, load voltage declines, and flows through excess current from power supply side loading.The voltage of the present invention
Type continuous-current plant, when there occurs this arc discharge, stops the power supply from power supply side loading,
Afterwards, after arc discharge extinguishing arc, recover the power supply from power supply side loading.
Control portion there occurs the time point of arc discharge, and the switch element of inverter is set to off-state,
The switch element in described voltage-mode buck copped wave portion is set to off-state, by the short switch element of short
It is set to on-state, described short by the inducer in voltage-mode buck copped wave portion and diode and short
Way switch element forms cycling circuit.Arc discharge extinguishing arc time point or from arc discharge occur after through
The predetermined time point setting the time, is set to on-state by the switch element of inverter, by voltage-type
The switch element in buck chopper portion is set to on-state, and the short switch element of short is set to off-state,
The circulating current of cycling circuit is flow through to inverter supply.
The presence or absence of the extinguishing arc of arc discharge, in addition to can being judged by the voltage detecting of load voltage etc.,
The time to arc discharge extinguishing arc after arc discharge occurs can also be preset, and during according to this setting
Between judge whether extinguishing arc through coming.
The form of the short that the present invention is possessed can be located at voltage-mode buck copped wave portion and inverter it
Between, made short circuit current interrupted between the plus end in voltage-mode buck copped wave portion and negative terminal by switch element.
Other forms of the short that the present invention is possessed can be to be located at voltage-mode buck copped wave portion and inversion
Between device, the liter piezoelectricity of backward inverter supply of boosting as the direct current output making voltage-mode buck copped wave portion
The short circuit current of road function.
Short circuit current as booster circuit function possesses: be connected to the anode in voltage-mode buck copped wave portion
Switch element between son and negative terminal, the smoothing capacity device being connected between the input of inverter and connection
Diode between the plus end of voltage-mode buck copped wave portion and smoothing capacity device or between negative terminal.
[control method of voltage-type continuous-current plant]
The control method of the voltage-type continuous-current plant of the present invention, is the voltage-type direct current possessing following portion
The control method of supply unit: voltage-mode buck copped wave portion, it constitutes DC source；Inverter, its have by
The bridge circuit that 1st switch element～these 4 switch elements of the 4th switch element are constituted, and by switch unit
The direct current output transform in voltage-mode buck copped wave portion is single-phase alternating electromotive force by the action of part；Rectification part, its
Straight conversion is handed in output to inverter, and the direct current obtained is supplied to load；Short, it is at electricity
Between die mould buck chopper portion and inverter, made the plus end in voltage-mode buck copped wave portion by short switch element
And short circuit between negative terminal；And control portion, it controls voltage-mode buck copped wave portion and inverter.
Control portion,
A () there occurs the time point of arc discharge in the load, be set to break by the switch element of inverter
Open state, is set to off-state by the switch element in voltage-mode buck copped wave portion, by the short switch of short
Element is set to on-state, short by the inducer in voltage-mode buck copped wave portion and diode and short
Way switch element forms cycling circuit.
B () is till arc discharge extinguishing arc or through phase till the sufficient time for regarding as extinguishing arc
Between, maintain the circulating current of cycling circuit.
C () is at the time point of arc discharge extinguishing arc or have passed through the predetermined time that sets after electric arc occurs
Time point, is set to on-state by the switch element of inverter, by the switch unit in voltage-mode buck copped wave portion
Part is set to on-state, and the short switch element of described short is set to off-state, supplies to inverter
Flow through the circulating current of described cycling circuit.
Invention effect
As described above, according to the present invention, can suppress from inverter to load-side when electric arc occurs
Electric current supply.Additionally, keep flow through the DC current of voltage-type continuous-current plant when electric arc occurs,
And the voltage-type continuous-current plant after electric arc extinguishing arc direct current output supply recover time, use kept
DC current can promptly carry out to load direct current output supply.
Accompanying drawing explanation
Fig. 1 is the general block diagram of the structure example of the voltage-type continuous-current plant for the present invention is described.
Fig. 2 is the general block diagram of a structure example in the control portion for the present invention is described.
Fig. 3 is the flow chart of the action example of the voltage-type continuous-current plant for the present invention is described.
Fig. 4 is the sequential chart of the action example of the voltage-type continuous-current plant for the present invention is described.
Fig. 5 is the electric current of the arc discharge extinguishing arc of the voltage-type continuous-current plant for the present invention is described
The figure of flowing.
Fig. 6 is the figure of the structure example for inverter is described.
Fig. 7 is the figure of the structure example of the continuous-current plant representing the inverter employing the present invention.
Fig. 8 is the figure of the structure example of the twin cathode supply unit representing the inverter employing the present invention.
Detailed description of the invention
The present invention relates to a kind of when plasma generator even load supply direct current power, carry out direct current output
The voltage-type continuous-current plant of stopping/recovery and the control method of voltage-type continuous-current plant.
In the case of plasma generator is supplied direct current power as load, at load i.e. plasma
When generating means there occurs arc discharge, stop from voltage-type continuous-current plant to plasma generator
The supply of direct current power, thus reduce electrode or the damage of substrate.Further, when arc discharge extinguishing arc,
Recover from voltage-type continuous-current plant to the supply of the direct current power of plasma generator.
The present invention, in the stopping/recovery of the direct current output of voltage-type continuous-current plant, keeps stream during stopping
Cross the electric current in copped wave portion as circulating current, the circulating current supply that will be kept when restarting inverter
To load, thus when the direct current output recovering voltage-type continuous-current plant, reduce the unidirectional current to load
The supply of power postpones.
Hereinafter, referring to the drawings, embodiments of the present invention are described in detail.Hereinafter, for the voltage of the present invention
Type continuous-current plant and control method, use the knot of Fig. 1, Fig. 2 account for voltage type continuous-current plant
Structure example, uses the control example of Fig. 3～Fig. 5 account for voltage type continuous-current plant.
[structure of voltage-type continuous-current plant]
The voltage-type continuous-current plant of the present invention possesses: voltage-mode buck copped wave portion, and it constitutes DC source；
Inverter, it has the electric bridge electricity being made up of the 1st switch element～these 4 switch elements of the 4th switch element
Road, and be single-phase exchange by the action of switch element by the direct current output transform in voltage-mode buck copped wave portion
Electric power；Rectification part, the output of inverter is handed over straight conversion, and the direct current obtained is supplied to load by it；
Control portion, it controls voltage-mode buck copped wave portion and inverter；And short, it is cut at voltage-mode buck
Between ripple portion and inverter, made plus end and the negative terminal in voltage-mode buck copped wave portion by short switch element
Between short circuit.
In common power supply action, the voltage transformation of direct current power is pre-by voltage-mode buck copped wave portion
Determine voltage to export DC voltage.Inverter is switched by the action of the 1st switch element～the 4th switch element
Current path, is thus single-phase alternating electromotive force by the direct current output transform in voltage-mode buck copped wave portion.Rectification
Alternating electromotive force obtained by inverter converts, by handing over straight conversion, is transformed to direct current power by portion, and will
Direct current power after conversion is supplied to load.
In the operating state to load supply direct current power, load i.e. plasma generator occur electricity
During arc discharge, load voltage declines, and flows through excess current from power supply side loading.The voltage of the present invention
Type continuous-current plant, when there occurs this arc discharge, stops the power supply from power supply side loading,
Afterwards, after arc discharge extinguishing arc, recover the power supply from power supply side loading.
The presence or absence of the extinguishing arc of arc discharge, except judging by the voltage detecting of load voltage etc.
Outward, it is also possible to preset the time to arc discharge extinguishing arc after arc discharge occurs, and set according to this
That fixes time is judged as extinguishing arc through coming.
Use Fig. 1 and Fig. 2 illustrates the structure example of the voltage-type continuous-current plant of the present invention.
Voltage-type continuous-current plant 1 shown in Fig. 1, Fig. 8 possesses: voltage-mode buck copped wave portion 2, its
Constitute DC source；Inverter 3, it has by the 1st switch element～the 4th switch element these 4 switch first
The bridge circuit that part is constituted, and by the action of switch element, the direct current in voltage-mode buck copped wave portion 2 is exported
It is transformed to single-phase alternating electromotive force；Rectification part 4, the output of inverter 3 is handed over straight conversion, and is incited somebody to action by it
The direct current obtained is supplied to load；Control portion 5, it controls voltage-mode buck copped wave portion 2 and inverter 3；
And short 10, it is between voltage-mode buck copped wave portion 2 and inverter 3, is switched by short circuit
Element Q2Make short circuit between the plus end P and negative terminal N in voltage-mode buck copped wave portion 2.This short 10
Also serve as booster circuit and carry out action.
Voltage-mode buck copped wave portion 2 possesses switch element Q1, diode D1And direct current reactor LF1。
Switch element Q1Blood pressure lowering is carried out by DC voltage is carried out chop control.Direct current reactor LF1To entering
Direct current obtained by row chop control carries out electric current and smooths.It addition, diode D1Can also use IGBT or
The switch elements such as MOSFET.
Inverter 3 enter through voltage-mode buck copped wave portion 2 carry out electric current smooth obtained by direct current, by control
The switch element of the bridge circuit that inverter 3 processed is possessed is to carry out orthogonal conversion.
Short 10 be connected between the plus end P and negative terminal N in voltage-mode buck copped wave portion 2 short
Road switch element Q2Structure.At switch element Q1Off-state under, make plus end P and negative terminal
Short circuit between N, thus to capacitor CF1The DC voltage of charging is by diode D2Block, and and voltage-type
The diode D in buck chopper portion 21With direct current reactor LF1Form Guan Bi circuit together.
Diode D2It is to stop at switch element Q2For during on-state to switch element Q2Apply to electric capacity
Device CF1The blocking diode of the DC voltage of charging, as it is shown in figure 1, be not limited to be connected to plus end
The structure of P side, it is also possible to be connected to negative terminal N side.
Capacitor CF1Except the direct current reactor L in voltage-mode buck copped wave portion 2 is flow through in accumulationF1Electric current
Outside energy, also act as absorption between the switch element of inverter 3, carry out produced surge during change of current action
The energy of the inducer that voltage is connected with each switch elements in series is to protect the effect of switch element.
Electric bridge connects the 1st switch element～the 4th switch element constitutes inverter 3.Switch element such as may be used
To use the thyristors such as IGBT or MOSFET.Each switch element of inverter is based on control
The control signal in portion 5 carries out switch motion, exports after direct current power is transformed to alternating electromotive force.
The exchange of inverter 3 is exported and carries out rectification by rectification part 4, and direct current output is supplied to load.For
Remove the high-frequency ripple amount that the exchange output of inverter is comprised, it is also possible to the outfan in rectification part 4 has
Standby DC filtering circuit.The output capacitor (not shown) being connected in parallel with outfan can be used and connect
One or both of the output reactance device (not shown) connected constitutes DC filtering circuit.
Will by the output cable being connected between voltage-type continuous-current plant 1 and plasma generator
The direct current output of rectification part 4 is supplied to plasma generator.
As the structure of removal high-frequency ripple amount, voltage-type continuous-current plant 1 can use spurious impedance
Replace the DC filtering circuit being connected with rectification part 4.Such as, as inductance value, it is possible to use rectification part 4
And the inductance of the distribution between lead-out terminal, be connected to voltage-type continuous-current plant 1 and load between defeated
Go out inductance or capacitor that cable is comprised, or plasma can be used in the case of plasma load to occur
The electrode capacitance of device.The capacitance of the spurious impedance of above-mentioned inverter and output cable or electrode capacitance is real
Constitute DC filtering circuit in matter, reduce the high-frequency ripple that the exchange output of inverter is comprised.
Additionally, the ripple quantity of DC voltage has the characteristic increased when the driving frequency of inverter circuit declines.
Therefore, by improving the driving frequency of inverter circuit, can make output capacitor and output reactance device must
The property wanted declines.Additionally, by the driving frequency improving inverter circuit, it is possible to suppression voltage-type DC source
The energy that device 1 is possessed in inside.
Further, the voltage-type continuous-current plant 1 of the present invention possesses control portion 5, controls voltage-mode buck and cuts
Ripple portion 2, short 10 and inverter 3.Use the general block diagram of Fig. 2, a knot in control portion 5 is described
Structure example.
Control portion 5 possesses: control signal forms circuit 5a, and its formation is used for controlling voltage-mode buck copped wave
The switch element Q in portion 21The control signal of on/off；Control signal forms circuit 5b, and it forms use
In the short circuit switch element Q that control in short 10 is located between plus end and negative terminal2Connect on/off
The control signal opened；And control signal forms circuit 5c, it forms the switch for controlling inverter 3
The pulse control signal of the on/off of element.
It is the switch element Q to voltage-mode buck copped wave portion 2 that control signal forms circuit 5a1Carry out copped wave control
The circuit of system, detects switch element Q1Output electric current i.e. chopper current, voltage-type continuous-current plant 1
Output voltage and output electric current, and based on this chopper current, output voltage and output electric current detected value
Be controlled so that voltage-type continuous-current plant 1 be output into predetermined current value set in advance and
Predetermined magnitude of voltage.Additionally, arc detection signal based on arc-detection portion 6, switch when electric arc occurs
For off-state, switch to on-state when electric arc disappears from off-state.
It is the short circuit switch element Q controlling short 10 that control signal forms circuit 5b2On/off
Circuit, arc detection signal based on arc-detection portion 6, switch to on-state when electric arc occurs,
Off-state is switched to from on-state when electric arc disappears.
By switch element Q1With short circuit switch element Q2Action, with voltage-mode buck copped wave portion 2
Diode D1With direct current reactor LF1Form Guan Bi circuit together, be accumulated in direct current reactor LF1In energy
Measure and circulate in Guan Bi circuit as circulating current Δ i.
Control signal forms circuit 5c and forms the arteries and veins being used for controlling the on/off of the switch element of inverter 3
Rush control signal, control to constitute the switch element Q of each branch road of the bridge circuit of inverter 3U、QV、QX、
QYThe inverter 3 of switch motion, by the control of switch element, be transformed to the direct current orthogonal of input hand over
Stream.Additionally, arc detection signal based on arc-detection portion 6, switch to off-state when electric arc occurs,
On-state is switched to from off-state when electric arc disappears.
Control portion 5 is in addition to above-mentioned control signal forms circuit 5a～5c, it is also possible to possess the setting time
Through oversampling circuit 5d.The setting time is the circuit forming control signal when electric arc disappears through oversampling circuit 5d, in advance
First determine to occur to the longest required till electric arc the disappears setting time, from arc-detection from electric arc
Portion 6 have passed through the time point output control signal of setting time after inputting arc detection signal, from control signal
Form circuit 5a to export switch element Q1The control signal of on-state is switched to, from control from off-state
Waveshaping circuit 5b processed exports short circuit switch element Q2The control of off-state is switched to from on-state
Signal processed, forms circuit 5c output from control signal and is switched from off-state by the switch element of inverter 3
Control signal for on-state.
The setting time through oversampling circuit 5d timing from detect arc discharge occur start elapsed time, according to
Elapsed time is through setting time t set in advancearc, it is believed that arc discharge disappears, exports control signal.
Setting time tarcBe equivalent to keep using the DC current not long ago of arc discharge generation as circulating current Δ i
And the time of the current status flow through.This setting time tarcCan at random set as the retention time, example
As the load of control object can be obtained in advance arc discharge start to disappear required for time
Between, this time is determined plus the surplus etc. doped according to amplitude of fluctuation.
Such as based on load or outfan the voltage in arc-detection portion 6 detects load i.e. arc generating device
In the generation state of arc discharge.
The detection of conditions at the arc based on arc-detection portion 6, such as when flowing through from load current,
By the voltage of load or the voltage of the outfan of voltage-type continuous-current plant 1 and the 1st threshold value predetermined
Compare, when detecting voltage less than 1 threshold value, detect and there occurs arc discharge.Additionally, detection
After going out the generation of arc discharge, the voltage comparing detection and the 2nd threshold value predetermined, surpass at detection voltage
When having crossed 2 threshold value, it is judged that disappear for arc discharge.
Such as shown in Fig. 6, constitute inverter 3 by having the bridge circuit of 4 branch roads.At each branch road
On be respectively equipped with switch element QU、QV、QX、QY4 switch elements.Series-connected switches element QU
With switch element QX, series-connected switches element QVWith switch element QY。
Switch element QUWith switch element QXJunction point via inductance Lm1It is connected with the plus end side of load,
Switch element QVWith switch element QYJunction point be connected with the negative terminal side of load.
From the outfan of voltage-type continuous-current plant 1 or load lateral control portion 5 and feed back feedback signal.Instead
Feedback signal can be such as the voltage of the outfan of voltage-type continuous-current plant 1 or electric current or power.
[control action of continuous-current plant]
The control portion of the voltage-type continuous-current plant of the present invention, defeated at the direct current of voltage-type continuous-current plant
When going out to stop, in stopping and when restarting, by with controlling A～controlling the following each control shown in C
System and the fault control of control D, the direct current at voltage-type continuous-current plant exports and stops/restart
In, during stopping, the electric current flowing through copped wave portion is remained circulating current, and should when inverter restarts
Circulating current be supplied to load, thus reduce voltage-type continuous-current plant direct current output recover time, to
The supply of the direct current power of load postpones.
The control portion of the voltage-type continuous-current plant of the present invention is at the direct current of voltage-type continuous-current plant 1
Following control is carried out when output stops, in stopping and when restarting.
The direct current controlling voltage-type continuous-current plant when A: electric arc occurs exports (voltage-type fall when stopping
The stopping action in pressure copped wave portion)
Control when the direct current output of supply unit stops, by the switch in voltage-mode buck copped wave portion from connecting shape
State switches to off-state, makes short circuit between plus end and negative terminal by short.Thus, by inverter
Switch switches to off-state from on-state.
When arc discharge occurs, stopping is from the time point of the power supply of power supply side loading, stops voltage-type
The action in buck chopper portion, and make plus end side and the short circuit of negative terminal side in short, thus make from inversion
Device stops to the electric current of transformer side.
Voltage-type continuous-current plant 1, when to load supply direct current output, voltage-mode buck is cut
The direct current power of DC source is transformed to predetermined voltage and is input in inverter by ripple portion.Inverter is by unidirectional current
Force transformation is alternating electromotive force.Straight conversion is handed in the output of inverter by rectification part, and is supplied by direct current power
To load.
Direct current at voltage-type continuous-current plant 1 exports when stopping, by the switch in voltage-mode buck copped wave portion
Switch to off-state from on-state, stop the power supply from DC source.When this stopping, if logical
Cross short and make short circuit between plus end and negative terminal, then formed between voltage-mode buck copped wave portion and short and close
Close circuit.Be in closed circuit, the energy being accumulated in during stopping in the inducer in voltage-mode buck copped wave portion with
The state of circulating current flows through.When restarting inverter to recover direct current output, supplying from DC source
Time point before direct current output, this circulating current flows through and is positioned at load-side when observing from voltage-mode buck copped wave portion
Circuit, carry out from inverter to load rapid power supply.
Control (the formation action of cycling circuit in the direct current output stopping of B: voltage-type continuous-current plant 1
And the holding action of circulating current)
Control in the direct current output stopping of voltage-type continuous-current plant 1, breaking of the switch of holding inverter
Between open state, the off-state of switch in voltage-mode buck copped wave portion, the plus end of short and negative terminal
Short-circuit condition.
In stopping from the power supply of power supply side loading, form the inductance comprising voltage-mode buck copped wave portion
The cycling circuit of device, keeps the electric current flowing through inducer as circulating current.
Direct current at voltage-type continuous-current plant 1 exports in stopping, by keeping voltage-mode buck copped wave portion
The off-state of switch keep the stopping of the power supply from DC source, by just keeping short
Short-circuit condition between terminal and negative terminal keeps flow through and is formed between voltage-mode buck copped wave portion and short
The circulating current of cycling circuit.
Control (to make use of the inverse of circulating current during the direct current output recovery of C: voltage-type continuous-current plant 1
Become device restarts action)
Control when the direct current output of voltage-type continuous-current plant 1 recovers, by voltage-mode buck copped wave portion
Switch switch to on-state from off-state, short is set to open state, by the switch of inverter from
Off-state switches to on-state.
Direct current at voltage-type continuous-current plant 1 exports when recovering, by the switch of inverter from off-state
Switch to on-state, the switch in voltage-mode buck copped wave portion is switched to on-state from off-state, and
And restart to be transformed to the direct current power of DC source predetermined voltage by the opening of short, and will conversion
After direct current power be input in inverter.
When power supply is recovered after arc discharge extinguishing arc, make circulating current flow through inverter, weigh the most rapidly
Newly start inverter.
Control D: fault control
Control portion voltage-type continuous-current plant direct current export stop time and stop in short just
Fault control is carried out between terminal and negative terminal.In this fault control, by the switch unit of short will be constituted
Part is set to on-state makes short circuit between plus end and negative terminal, just makes by switch element is set to off-state
Open between terminal and negative terminal.
By controlling the stopping function in voltage-mode buck copped wave portion of A, the short action of short and inverse
Become the stopping function of device, stop the power supply to load when arc discharge, by controlling the voltage of B
The holding action of the circulating current in type buck chopper portion and use control the circulating current of C, make inverter fast
Speed restarts.
The voltage-type continuous-current plant 1 of the present invention, when there is arc discharge, control portion can be according to inspection
The detection signal in the arc-detection portion surveying conditions at the arc carries out the stopping of direct current output/restart to control.Control
Portion processed detects according to the generation of arc discharge and carries out stopping control, detects according to the disappearance of arc discharge and carries out weight
Newly start control.
The voltage of arc-detection portion detection load or the voltage of the outfan of voltage-type continuous-current plant, and compare
Relatively this detection voltage and the 1st threshold value predetermined, detect arc discharge when less than 1 threshold value.
Additionally, after detecting that electric arc occurs, compare detection voltage and the 2nd threshold value predetermined, exceeding
During 2 threshold value, it is judged that disappear for arc discharge.
[the action example of voltage-type continuous-current plant]
Then, use Fig. 3～Fig. 5 that the action example of voltage-type continuous-current plant 1 of the present invention is described.Fig. 3
Being the flow chart of the action example of voltage-type continuous-current plant 1 for the present invention is described, Fig. 4 is for saying
The sequential chart of the action example of the voltage-type continuous-current plant of the bright present invention, Fig. 5 is for illustrating the present invention
The figure of the flowing of the electric current when arc discharge of voltage-type continuous-current plant 1 disappears.
The flowchart representation of Fig. 3 when voltage-type continuous-current plant 1 carries out usual action, electric arc
Action example (S7～S11) when the action example (S1～S6) when occurring of discharging and arc discharge disappear.
Based on voltage-type continuous-current plant 1 under the supply condition of the direct current power of load, if negative
The arc generating device carried occurs arc discharge, the then input voltage loaded or voltage-type continuous-current plant
Output voltage decline.
Arc-detection portion 6 detect and monitor load or voltage-type continuous-current plant 1 outfan voltage and
Electric current, when voltage declines when load current flows through, detects and there occurs arc discharge.Can lead to
Cross and compare the threshold value predetermined with detected value to carry out the detection of the generation of arc discharge.It addition, electric arc is put
The detection of electricity is not limited to the detected value of voltage and the comparison (S1) of threshold value.
(action example when arc discharge occurs)
When the generation detecting arc discharge, make the switch element Q in voltage-mode buck copped wave portion 21Stop
(S2), by forming short circuit connection signal (S3) formed in circuit 5 by control signal in short circuit,
By the short circuit of short 10 switch element Q2It is set to on-state, just makes voltage-mode buck copped wave portion 2
Short circuit between terminals P and negative terminal N.By this short action, power supply based on inverter 3 is made to stop
Stop, and make inverter 3 stop (disconnection) (S4).
By the operation of S2～S4, stop from DC source to the power supply in voltage-mode buck copped wave portion 2,
Thus stop from voltage-type continuous-current plant 1 to the supply of the direct current power of load, formed and dropped by voltage-type
The diode D in pressure copped wave portion 21With direct current reactor LF1The Guan Bi circuit formed.Flow through voltage-mode buck
The direct current reactor L in copped wave portion 2F1Inductance electric current as circulating current Δ i formed Guan Bi circuit
Middle circulation (S5).
Circulating current Δ i is restarting from voltage-type continuous-current plant 1 to the direct current power of load
It is fed into inverter 3 during supply, makes the rising that orthogonal based on inverter 3 converts in advance.
(action example when arc discharge disappears)
In the case of detecting that arc discharge disappears after detecting arc discharge generation, or have passed through supposition electricity
In the case of the time that arc discharge disappears (S6), by the switch element Q in voltage-mode buck copped wave portion 21From disconnected
Open state switches to on-state (S7), terminates the output of short circuit control signal, thus by short circuit with opening
Close element Q2Switch to off-state (S8) from on-state, make the plus end in voltage-mode buck copped wave portion 2
Short-circuit condition between P and negative terminal N stops thus turning it on, and inverter 3 is set to operating state (S9).
By the operation of S7～S9, restart from DC source to the electric power in voltage-mode buck copped wave portion 2
Supply, before the power supply from voltage-mode buck copped wave portion 2, will flow through by voltage-mode buck copped wave portion
The diode D of 21With direct current reactor LF1The circulating current Δ i of the Guan Bi circuit formed is supplied to inverter
The bridge circuit (S10) of 3.
When having been restarted the conducting in voltage-mode buck copped wave portion 2 by the operation of S7, because of voltage-mode buck
Inductance value that copped wave portion 2 is had and parasitic capacitance, via voltage-mode buck copped wave portion 2 from unidirectional current
Source produces delay in the DC current that inverter 3 supplies.On the other hand, voltage-mode buck copped wave portion 2 is made
Plus end P and negative terminal N between short circuit stopping, and at voltage-mode buck copped wave portion 2 and inverter 3
Between form current path, it is possible to before direct-current power supply DC current, follow to inverter 3 supply
Circular current Δ i, makes to the power supply of load in advance.
Before the action of end voltage type continuous-current plant 1, repeat the operation (S11) of S1～S10.
The sequential chart of Fig. 4 is the figure of the action example of the voltage-type continuous-current plant 1 that the present invention is described, Fig. 4
A ()～(d) represents that electric arc based on arc-detection portion detects, electric arc extinguishing arc detects, electric arc sets
Elapsed time and arc detection signal, Fig. 4 (e) represents the switch element Q in voltage-mode buck copped wave portion1
With the operating state of inverter 3, Fig. 4 (f) represents the operating state in voltage-mode buck copped wave portion, Fig. 4 (g)
Represent the short circuit switch element Q of short2Operating state, Fig. 4 (h) represents voltage-type DC source
Output voltage (the V of deviceO)。
It addition, drive the switch element Q of the branch road of the plus end side of inverterU、QVSignal, drive
The switch element Q of the branch road of dynamic negative terminal sideX、QYSignal, it is possible to use generally known grid
Signal, therefore omits statement at this.
When detecting that electric arc occurs (Fig. 4 (a)) makes arc detection signal rise (figure in arc-detection portion 6
4 (d)), when detecting electric arc extinguishing arc, (Fig. 4 (b)) makes arc detection signal decline.Electric arc is examined
Survey the decline of signal, in addition to detection based on electric arc extinguishing arc, it is also possible to use based on from detecting that electric arc is sent out
The mode carried out through predetermined electric arc setting elapsed time (Fig. 4 (c)) after life.
When supplying direct current power from DC source to load, inverter 3 is on-state,
Stop making output voltage V by the operating of inverter 3OBecome no-voltage (Fig. 4 (h)).Additionally, it is electric
The switch element Q in die mould buck chopper portion 21In an ON state, the short circuit switch element of short 10
Q2It is off.Under this power supply state, when arc detection signal rises (Fig. 4 (d)),
Inverter is become to switch to off-state, by switch element Q by control portion 51Switch to off-state (Fig. 4
(e)), stop the power supply (Fig. 4 (h)) from DC source, and by short circuit switch unit
Part Q2Switch to on-state (Fig. 4 (g)), by the diode D in voltage-mode buck copped wave portion 21
With direct current reactor LF1Guan Bi circuit formed cycling circuit.
Arc-detection portion 6 is detecting the electric arc extinguishing arc (time point of Fig. 4 (b) or from detecting that electric arc is sent out
Have passed through predetermined electric arc after life and set the time point (Fig. 4 (c)) in elapsed time, make arc-detection believe
Number decline (Fig. 4 (d)).
When arc detection signal declines (Fig. 4 (d)), inverter 3 is cut by control portion 5 from off-state
It is changed to on-state, by switch element Q1On-state (Fig. 4 (e)) is switched to from off-state.Weight
Newly start the power supply (Fig. 4 (h)) from DC source, and short circuit is used switch element Q2From
On-state switches to off-state (Fig. 4 (g)), makes the circulating current Δ i flowing through cycling circuit flow to
Inverter side.Restarted by the operating of inverter 3, export output voltage VO(Fig. 4 (h)).
Setting elapsed time decision with electric arc, short circuit is used switch element Q2It is set to on-state Posterior circle electricity
In the case of the period that stream flows through cycling circuit, this electric arc setting elapsed time can at random set from electric arc
The time of origin point of electric discharge period to the extinction time point being judged as arc discharge, as keeping electric arc
The interval of state when electric discharge occurs (sets time tarc)。
Fig. 5 represents the circuit state of the voltage-type continuous-current plant of the present invention.Fig. 5 is denoted as short
Use the circuit state during short circuit current possessing boost function.At the diode D shown in Fig. 51、D2In,
The diode that the triangle part of Diode symbol is whitewashed is represented the state not having electric current to flow through, by two poles
The diode of the triangle part blacking of pipe symbol represents the state that electric current is flowing.
Fig. 5 (a) represents the state carrying out power supply from DC source to inverter 3 side.Supply at electric power
To time, switch element Q1In an ON state, the short circuit of booster circuit switch element Q2It is in disconnection shape
State, carries out power supply from DC source to inverter side via voltage-mode buck copped wave portion.
Fig. 5 (b) represents state when electric arc occurs.When electric arc occurs, by switch element Q1From connection
State switches to off-state, and short circuit is used switch element Q2On-state, shape is switched to from off-state
Become diode D based on voltage-mode buck copped wave portion 21With direct current reactor LF1Guan Bi circuit circulation
Circuit.Circulating current Δ i is flow through in cycling circuit.
Fig. 5 (c) represents hold mode.In hold mode, make switch element Q1Remain off,
Make the short circuit switch element Q of booster circuit2Remain turned on, stop the electric power to load and wait electricity
Arc disappears.During this period, circulating current Δ i flows through cycling circuit and is kept.
Fig. 5 (d) represents state during electric arc extinguishing arc.When electric arc extinguishing arc, by switch element Q1From disconnection
State switches to on-state, by the short circuit of booster circuit switch element Q2Switch to disconnected from on-state
Open state, makes the circulating current Δ i flowing through cycling circuit flow to load-side, and restarts via fall
Press copped wave portion from DC source to the power supply of inverter side.
[employing the structure example of the supply unit of inverter]
Fig. 7 represents the structure example of the voltage-type continuous-current plant 1 of the inverter employing the present invention.
Voltage-type continuous-current plant 1 is the power supply of the load supply high frequency electric power to plasma generator,
Plasma generator possesses the electrode from voltage-type continuous-current plant 1 input direct voltage and ground connection
Two electrodes of electrode.According to this voltage-type continuous-current plant 1, the electrode ground connection of a side can be made, and to
The electrode of the opposing party applies DC voltage.
Voltage-type continuous-current plant 1 possesses: rectification part, and it carries out rectification to the alternating electromotive force of alternating current power supply；
Buffer part, it constitutes the high-tension protection circuit produced transiently for suppression；Voltage-mode buck copped wave
Portion, the voltage transformation of the direct current power inputted from rectification part is to export DC current after predetermined voltage by it；Single
Phase inverter, the direct current output transform in voltage-mode buck copped wave portion is exchange output by it；Single-phase transformer,
The exchange output transform of single-phase inverter is predetermined voltage by it；And commutator, it is to single-phase transformer
Exchange output carries out rectification.The output of commutator is supplied to by voltage-type continuous-current plant via output cable
Electrode A.
(the structure example of twin cathode supply unit)
Fig. 8 represents voltage-type continuous-current plant 1, polyphase inverter and the heterogenize employing the present invention
The structure example of the twin cathode supply unit of transformator.
Twin cathode supply unit is the power supply of the load supply high frequency electric power to plasma generator, plasma
Generating means possesses electrode 1 and 2 two electrodes of electrode in the housing of ground connection.Fill according to this twin cathode power supply
Put and can apply the most symmetrical alternating voltage to two electrodes.
Twin cathode supply unit possesses: rectification part, and it carries out rectification to the alternating electromotive force of alternating current power supply；Buffering
Portion, it constitutes the high-tension protection circuit produced transiently for suppression；Voltage-mode buck copped wave portion,
The voltage transformation of the direct current power inputted from rectification part is to export DC current after predetermined voltage by it；Many contraries
Becoming device, the direct current output transform in voltage-mode buck copped wave portion is heterogeneous exchange output by it；And heterogenize
Transformator, the exchange output transform of polyphase inverter is predetermined voltage by it, and defeated by heterogenize transformator
Go out to be set to phase structure.
The output of one side of heterogenize transformator is supplied to a side via output cable by twin cathode supply unit
Electrode 1, the output of the opposing party is supplied to via output cable the electrode 2 of the opposing party.
It addition, the description in above-mentioned embodiment and variation is voltage-type DC source and the electricity of the present invention
One example of the control method of die mould continuous-current plant, the present invention is not limited to each embodiment, based on this
The objective of invention can carry out various deformation rather than they be got rid of from the scope of the present invention.
Industrial applicability
The voltage-type DC source of the present invention can be used as the electric power to plasma generator supply electric power
Source.
Symbol description
1 voltage-type continuous-current plant
2 voltage-mode buck copped wave portions
3 inverters
4 rectification part
5 control portions
5a control signal forms circuit
5b control signal forms circuit
5c control signal forms circuit
5d sets the time through oversampling circuit
6 arc-detection portions
10 short
CF1Capacitor
D1Diode
D2Diode
LF1Direct current reactor
Lm1Inductance
N negative terminal
P plus end
Q1Switch element
Q2Short circuit switch element
QUSwitch element
QVSwitch element
QXSwitch element
QYSwitch element
tarcThe setting time
VOOutput voltage
Δ i circulating current
Claims (4)
1. a voltage-type continuous-current plant, possesses:
Voltage-mode buck copped wave portion, it constitutes DC source；
Inverter, it has the electricity being made up of the 1st switch element～this 4 switch elements of the 4th switch element
Bridge circuit, and by the action of described 4 switch elements, the direct current in described voltage-mode buck copped wave portion is exported
It is transformed to single-phase alternating electromotive force；
Rectification part, the output of described inverter is handed over straight conversion, and is supplied to bear by the direct current obtained by it
Carry；And
Control portion, its described voltage-mode buck copped wave portion of control and described inverter,
This voltage-type continuous-current plant is characterised by,
Possessing short, it, between described voltage-mode buck copped wave portion and described inverter, is used by short circuit
Switch element (Q2) make short circuit between the plus end in described voltage-mode buck copped wave portion and negative terminal,
Described control portion there occurs the time point of arc discharge, by the 1st switch element of described inverter～
4th switch element is set to off-state, by the switch element (Q in described voltage-mode buck copped wave portion1) be set to
Off-state, by the short circuit switch element (Q of described short2) it is set to on-state, by described electricity
Inducer (the L in die mould buck chopper portionF) and diode (D1) and the described short circuit use of described short
Switch element (Q2) form cycling circuit,
Described control portion described arc discharge extinguishing arc time point or from arc discharge occur after have passed through pre-
The fixed time point setting the time, is set to connect by the 1st switch element～the 4th switch element of described inverter
Logical state, by the switch element (Q in described voltage-mode buck copped wave portion1) it is set to on-state, by described short
The short circuit in road portion switch element (Q2) it is set to off-state, flow through described cycling circuit to inverter supply
Circulating current.
Voltage-type continuous-current plant the most according to claim 1, it is characterised in that
Possessing short circuit current, it is between described voltage-mode buck copped wave portion and described inverter, by switch unit
Part makes between the plus end in described voltage-mode buck copped wave portion and negative terminal interrupted,
The short switch element of described short is the switch element of described short circuit current.
Voltage-type continuous-current plant the most according to claim 2, it is characterised in that
Described short circuit current possesses: be connected between plus end and the negative terminal in described voltage-mode buck copped wave portion
Short circuit switch element (Q2), the smoothing capacity device (C that is connected between the input of described inverterF)
And it is connected to described voltage-mode buck copped wave portion and described smoothing capacity device (CF) plus end between or negative terminal
Diode (D between son2), constitute booster circuit.
4. a control method for voltage-type continuous-current plant, this voltage-type continuous-current plant possesses:
Voltage-mode buck copped wave portion, it constitutes DC source；
Inverter, it has the electricity being made up of the 1st switch element～this 4 switch elements of the 4th switch element
Bridge circuit, and by the action of described 4 switch elements, the direct current in described voltage-mode buck copped wave portion is exported
It is transformed to single-phase alternating electromotive force；
Rectification part, the output of described inverter is handed over straight conversion, and is supplied to bear by the direct current obtained by it
Carry；
Short, it is between described voltage-mode buck copped wave portion and described inverter, by short switch unit
Part makes short circuit between the plus end in described voltage-mode buck copped wave portion and negative terminal；And
Control portion, its described voltage-mode buck copped wave portion of control and described inverter,
The control method of described voltage-type continuous-current plant is characterised by,
Described control portion there occurs the time point of arc discharge, by the 1st switch element of described inverter～
4th switch element is set to off-state, by the switch element (Q in described voltage-mode buck copped wave portion1) be set to
Off-state, by the short circuit switch element (Q of described short2) it is set to on-state, by described electricity
Inducer (the L in die mould buck chopper portionF) and diode (D1) and the described short circuit use of described short
Switch element (Q2) form cycling circuit,
Described control portion period till described arc discharge extinguishing arc or after arc discharge occurs to process
The predetermined period till the setting time, maintain the circulating current flowing through described cycling circuit,
Described control portion described arc discharge extinguishing arc time point or from arc discharge occur after have passed through pre-
The fixed time point setting the time, is set to connect by the 1st switch element～the 4th switch element of described inverter
Logical state, by the switch element (Q in described voltage-mode buck copped wave portion1) it is set to on-state, by described short
The short circuit in road portion switch element (Q2) it is set to off-state, flow through described cycling circuit to inverter supply
Circulating current.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013201952A JP5679241B1 (en) | 2013-09-27 | 2013-09-27 | Voltage source DC power supply and control method for voltage source DC power supply |
| JP2013-201952 | 2013-09-27 | ||
| PCT/JP2013/084822 WO2015045196A1 (en) | 2013-09-27 | 2013-12-26 | Voltage-type dc power supply and control method of voltage-type dc power supply |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105075087A CN105075087A (en) | 2015-11-18 |
| CN105075087B true CN105075087B (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380075356.5A Active CN105075087B (en) | 2013-09-27 | 2013-12-26 | Voltage-type continuous-current plant and the control method of voltage-type continuous-current plant |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9621064B2 (en) |
| EP (1) | EP2999106B1 (en) |
| JP (1) | JP5679241B1 (en) |
| KR (1) | KR101586183B1 (en) |
| CN (1) | CN105075087B (en) |
| TW (1) | TWI511621B (en) |
| WO (1) | WO2015045196A1 (en) |
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2013
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201513736A (en) | 2015-04-01 |
| TWI511621B (en) | 2015-12-01 |
| KR101586183B1 (en) | 2016-01-15 |
| EP2999106A4 (en) | 2017-04-05 |
| US20160141971A1 (en) | 2016-05-19 |
| EP2999106B1 (en) | 2018-01-31 |
| JP2015070677A (en) | 2015-04-13 |
| KR20150119450A (en) | 2015-10-23 |
| WO2015045196A1 (en) | 2015-04-02 |
| US9621064B2 (en) | 2017-04-11 |
| CN105075087A (en) | 2015-11-18 |
| JP5679241B1 (en) | 2015-03-04 |
| EP2999106A1 (en) | 2016-03-23 |
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