CN105074222A - Method for cleaning a vacuum pump - Google Patents
Method for cleaning a vacuum pump Download PDFInfo
- Publication number
- CN105074222A CN105074222A CN201480019786.XA CN201480019786A CN105074222A CN 105074222 A CN105074222 A CN 105074222A CN 201480019786 A CN201480019786 A CN 201480019786A CN 105074222 A CN105074222 A CN 105074222A
- Authority
- CN
- China
- Prior art keywords
- rotor shaft
- electromagnet
- pump
- vacuum pump
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention relates to a method for cleaning a vacuum pump, in particular a Holweck pump, wherein the rotor element to be cleaned is vibrated. This occurs by actuating an electromagnet (38) using a control device (40), wherein the electromagnet (38) is in particular an electromagnet of a magnetic bearing (16) which bears the rotor shaft (12) in a housing (10).
Description
Technical field
The present invention relates to a kind of for clean vacuum pump, especially Hall dimension gram pump method, wherein Hall dimension gram pump can be configured to Hall dimension gram pump stage.
Background technique
The sediments on the rotor element of vacuum pump can be caused in the pump of gas with dirt.This can cause the damage of pump until cause pump to quit work.Need thus to be provided with the filtration system expended, vacuum pump can be used, be particularly useful for pumping this high vacuum pump being loaded with the gas of dirt.For vacuum pump especially severe it is possible to be attached to the existence of the dirt on rotor element as dust.
Summary of the invention
The object of the invention is, a kind of method for clean vacuum pump, especially Hall dimension gram pump is provided, the clean of rotor element can be realized in a straightforward manner by means of described method.
According to the present invention, the solution of described object is realized by the feature of claim 1.
The vacuum pump clean according to method according to the present invention has rotor shaft, and described rotor bearing carries at least one rotor element.Rotor element can be the rotor element of tubulose or the rotor disk of turbomolecular pump of Hall dimension gram pump.Usually, the static stator component carried by pump case and rotor element acting in conjunction.Hall dimension gram pump stage is the passage of zigzag shape at this, and described passage surrounds the rotor element of tubulose.Turbomolecular pump is stator disc, and described stator disc is arranged between rotor disk.Rotor shaft can be bearing in pump case via bearing element rotationally.In addition, drive unit is connected with as motor with rotor shaft.According to the present invention, be provided with electromagnet, described electromagnet is applied on rotor shaft.Electromagnet is connected with control gear.In order to produce vibration, realizing magnetic field by control gear and changing; At this, on the rotor shaft that electromagnet such as can be applied directly at least part of metal or be applied on the permanent magnet that is arranged on rotor shaft.
By the control gear especially causing the magnetic field of short time to change, rotor shaft and then the rotor element that at least one is carried by rotor shaft can vibrate.By vibration, the sediments that rotor element exists comes off.
Preferably, in the time lag of about 10-1000Hz, realize magnetic field by control gear to change.At this, magnetic field changes preferably periodically.In addition preferably, control gear is applied on multiple electromagnet.Thus it is possible that with time upper short interval, power is applied on rotor shaft along different direction and then is applied at least one rotor element.Especially the power of adverse effect, makes the vibration that can realize having high amplitude and time for acceleration short as far as possible.
At this, the power produced by least one electromagnet preferably substantially translationally with axially in rotor shaft effect, make it possible to the vibration of at least one rotor element that is that cause rotor shaft in a very effective manner and then that carried by rotor shaft.
In addition preferably, in the rotor shaft quiescent period, namely when can't help to perform cleaning by vibration when motor makes rotor shaft be in rotation.If desired, additionally, rotation is conducive to secondary process slowly.
Particularly preferably be, be not provided with electromagnet separately, but the electromagnet that use is the parts of magnetic bearing carrys out manner of execution.Especially, the rotor shaft of quick rotation is supported as follows continually: two bearing elements are configured to magnetic bearing.The bearing being arranged on suction side is usually directed at this.Thus, do not need to be provided with one or more additional electromagnet in a particularly preferred mode of execution of the present invention.Or rather, correspondingly can manipulate at least one and be arranged on electromagnet in magnetic bearing to produce vibration.If rotor shaft is carried by two magnetic bearings, so can manipulate the electromagnet of two magnetic bearings, vibration can be strengthened a little thus.
Because vacuum pump usually has inner control gear or is connected with the control gear of outside, so in addition preferably, realize the manipulation according to the present invention of at least one electromagnet to produce vibration by described control gear.
Accompanying drawing explanation
Hereinafter, reference accompanying drawing is according to preferred embodiment elaborating the present invention.
Accompanying drawing illustrates:
Fig. 1 illustrates the schematic diagram of the simplification of vacuum pump; And
Fig. 2 illustrates the chart of the vibration program for clean vacuum pump.
Embodiment
The vacuum pump illustrated is the turbomolecular pump with Hall dimension gram pump stage.Correspondingly, turbomolecular pump has the rotor shaft 12 of supporting in the pump case 10 of multi-part type where necessary.Rotor shaft supports via ball bearing 14 and supports via electromagnetic bearing 16 on the pressure side in suction side.In order to form molecule level 18, rotor shaft 12 carrying has the rotor element of multiple rotor disk 20.Rotor disk 20 and stator disc 22 acting in conjunction be arranged between rotor disk 20.Stator disc 22 is arranged in the housing 10 still.In order to form Hall dimension gram pump stage 24, the element 26 of the plate-like be connected with rotor shaft 10 is connected with pipe cylinder barrel 28.Pipe cylinder barrel 28 by be arranged in shell body wall or housing 10 special component in the groove 30 of zigzag shape surround.Thus, by means of the turbomolecular pump illustrated, gas can be aspirated by the direction of entrance 32 along arrow 34 and discharged from outlet 36.When pumping the gas of pollution, especially sediments can be there is on the rotor element 28 of the pipe cylinder type of Hall dimension gram pump stage 24.According to the present invention, in order to rotor for cleaning element 28, rotor shaft 12 is vibrated, the rotor element 28 be permanently connected with rotor shaft is vibrated.
In the particularly preferred mode of execution of method according to the present invention, clean and undertaken by following manner: at least one electromagnet 38 manipulating magnetic bearing 16 via control gear 40.Rotor shaft moving along radial direction 42 is substantially realized by changing the magnetic force produced by electromagnet 38 especially in short time.
Shown in figure 2 shown in chart for the vibration program of clean vacuum pump, wherein example is that the periodic magnetic field along translation and axial direction that the turbomolecular pump and carrying out of magnetic supporting has short time for acceleration and a high amplitude changes.In the graph, record amplitude in time, wherein solid line illustrates that axial motion and dotted line illustrate translational motion.
Claims (6)
1. for a clean vacuum pump, the especially method of Hall dimension gram pump,
Wherein said vacuum pump has the rotor shaft (12) of at least one rotor element of carrying (28), and described rotor shaft is bearing in pump case (10) via bearing element (14,16), and
Wherein in order to produce vibration in rotor element (28) described at least one, manipulated the electromagnet (38) be applied on described rotor shaft (12) by control gear (40), to change magnetic field.
2. method according to claim 1, wherein causes the magnetic field of short time to change by described control gear (40).
3. method according to claim 1 and 2, wherein said control gear (40) is applied on multiple electromagnet (38), especially makes capablely to be applied on described rotor shaft (12) along different direction one by one in time.
4. the power according to the method in any one of claims 1 to 3, wherein produced by electromagnet described at least one (38) is substantially radial in the longitudinal axis of described rotor shaft (12).
5. method according to any one of claim 1 to 4, wherein produces described vibration when described rotor shaft (12) is static.
6. method according to any one of claim 1 to 5, wherein electromagnet described at least one (38) is the parts of the magnetic bearing (16) of the described rotor shaft of supporting (12).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013206526.4A DE102013206526A1 (en) | 2013-04-12 | 2013-04-12 | Method for cleaning a vacuum pump |
| DE102013206526.4 | 2013-04-12 | ||
| PCT/EP2014/055535 WO2014166714A1 (en) | 2013-04-12 | 2014-03-19 | Method for cleaning a vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105074222A true CN105074222A (en) | 2015-11-18 |
Family
ID=50349603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480019786.XA Pending CN105074222A (en) | 2013-04-12 | 2014-03-19 | Method for cleaning a vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2016514802A (en) |
| KR (1) | KR20150142026A (en) |
| CN (1) | CN105074222A (en) |
| DE (1) | DE102013206526A1 (en) |
| WO (1) | WO2014166714A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108223112A (en) * | 2016-12-13 | 2018-06-29 | 株式会社丰田自动织机 | The control system of internal combustion engine |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112196812B (en) * | 2015-05-20 | 2022-06-07 | 菲舍尔和佩克尔应用有限公司 | Fan or pump arrangement and method of operation |
| JP6927735B2 (en) * | 2017-04-20 | 2021-09-01 | エドワーズ株式会社 | Vacuum pumps, magnetic bearings and rotors |
| FR3111958B3 (en) * | 2020-06-26 | 2022-07-15 | Pfeiffer Vacuum | Device, method for monitoring deposits and vacuum pump |
| CN114576181B (en) * | 2022-05-05 | 2022-07-05 | 成都高真科技有限公司 | High vacuum turbo molecular pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5961291A (en) * | 1996-08-30 | 1999-10-05 | Hitachi, Ltd. | Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump |
| US20080236629A1 (en) * | 2007-03-30 | 2008-10-02 | Tokyo Electron Limited | Cleaning method for turbo molecular pump |
| DE102008030788A1 (en) * | 2008-06-28 | 2009-12-31 | Oerlikon Leybold Vacuum Gmbh | Method for cleaning vacuum pumps |
| CN102202805A (en) * | 2008-10-28 | 2011-09-28 | 厄利孔莱博尔德真空技术有限责任公司 | Method for cleaning a vacuum pump |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168295A (en) * | 1983-03-16 | 1984-09-21 | Hitachi Ltd | Turbo molecular pump |
| FR2681689B1 (en) * | 1991-09-25 | 1993-11-12 | Alcatel Cit | GAS LEAK DETECTOR. |
| DE10338167A1 (en) * | 2003-08-20 | 2005-04-07 | Lust Antriebstechnik Gmbh | Hermetically sealed process chamber e.g. for liquid pumps or radial compressors, has shaft vibrations influenced by electromagnetic forces generated with permanent magnets and coil |
| JP5062964B2 (en) * | 2004-04-27 | 2012-10-31 | 株式会社大阪真空機器製作所 | Molecular pump |
| GB0511877D0 (en) * | 2005-06-10 | 2005-07-20 | Boc Group Plc | Vacuum pump |
| DE202010009989U1 (en) * | 2010-07-07 | 2012-02-22 | Alexander Hartwig | Dust filter and device for its cleaning |
-
2013
- 2013-04-12 DE DE102013206526.4A patent/DE102013206526A1/en not_active Ceased
-
2014
- 2014-03-19 KR KR1020157032217A patent/KR20150142026A/en not_active Application Discontinuation
- 2014-03-19 WO PCT/EP2014/055535 patent/WO2014166714A1/en active Application Filing
- 2014-03-19 JP JP2016506831A patent/JP2016514802A/en active Pending
- 2014-03-19 CN CN201480019786.XA patent/CN105074222A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5961291A (en) * | 1996-08-30 | 1999-10-05 | Hitachi, Ltd. | Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump |
| US20080236629A1 (en) * | 2007-03-30 | 2008-10-02 | Tokyo Electron Limited | Cleaning method for turbo molecular pump |
| DE102008030788A1 (en) * | 2008-06-28 | 2009-12-31 | Oerlikon Leybold Vacuum Gmbh | Method for cleaning vacuum pumps |
| CN102202805A (en) * | 2008-10-28 | 2011-09-28 | 厄利孔莱博尔德真空技术有限责任公司 | Method for cleaning a vacuum pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108223112A (en) * | 2016-12-13 | 2018-06-29 | 株式会社丰田自动织机 | The control system of internal combustion engine |
| CN108223112B (en) * | 2016-12-13 | 2020-12-18 | 株式会社丰田自动织机 | Control system for internal combustion engine |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20150142026A (en) | 2015-12-21 |
| JP2016514802A (en) | 2016-05-23 |
| WO2014166714A1 (en) | 2014-10-16 |
| DE102013206526A1 (en) | 2014-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: Cologne, Germany Applicant after: LEYBOLD Co. Ltd. Address before: Cologne, Germany Applicant before: Oerlikon Leybold Vacuum GmbH |
|
| COR | Change of bibliographic data | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151118 |
|
| RJ01 | Rejection of invention patent application after publication |