CN105066863A - Displacement sensor based on electroactive elastomer polymer - Google Patents

Displacement sensor based on electroactive elastomer polymer Download PDF

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Publication number
CN105066863A
CN105066863A CN201510471440.XA CN201510471440A CN105066863A CN 105066863 A CN105066863 A CN 105066863A CN 201510471440 A CN201510471440 A CN 201510471440A CN 105066863 A CN105066863 A CN 105066863A
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elastomer polymer
electroactive elastomer
layer
electroactive
sensor device
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CN105066863B (en
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谷国迎
朱利民
朱向阳
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The invention discloses a displacement sensor based on an electroactive elastomer polymer, which comprises a signal generating and conditioning device, a first connection electrode, a sensor device, a second connecting electrode and a signal feedback and detection device, wherein the sensor device is of a multilayer structure and comprises a protective layer, a flexible electrode layer, an electroactive elastomer polymer layer, a flexible electrode layer and a protective layer from top to bottom; and the sensor device has a great length-width ratio and high thin-layer thickness. The displacement sensor based electroactive elastomer polymer is simple in structure, convenient to manufacture, flexible in material and structure parameter selection and capable of being applicable to different working condition requirements, has the characteristic of full flexibility, and can be applied to the fields of artificial muscle, artificial organ and human body movement function detection, wearable equipment, medical rehabilitation and the like.

Description

Based on the displacement transducer of electroactive elastomer polymer
Technical field
The present invention relates to sensor technical field, specifically a kind of displacement transducer based on electroactive elastomer polymer.
Background technology
Along with the development of soft robot technology, traditional rigidity drives and sensing technology cannot meet the demands.Software robot extensively adopts elasticity or viscoelastic material element, has the ability of infinite degrees of freedom motion and continuous modification, can change own form and size arbitrarily on a large scale.The change in displacement how designing flexible sensor measurement soft-sphere model device and robot is large focus and a challenge of current research.
Through finding the retrieval of prior art document, China's application number is 201410803826.1, name is called " forced dielectric elastomer pressure transducer ", be 201510142816.2 with Chinese application number, name is called the patent of " the distributed flexible pressure transducer based on electroactive polymer ", has invented two kinds of flexible sensors.But in these two inventions, only relate to the design of forced pressure transducer, plane is generally all foursquare configuration, cannot be used for realizing displacement measurement.
Summary of the invention
For defect of the prior art, the object of this invention is to provide a kind of displacement transducer based on electroactive elastomer polymer, by setting the constraint on specific length breadth ratio and thickness direction, detecting the change in displacement of length direction, realizing displacement measurement.
The object of the invention is to be achieved through the following technical solutions:
The invention provides a kind of displacement transducer based on electroactive elastomer polymer, comprise signal and produce and conditioning device, the first connecting electrode, sensor device, the second connecting electrode and signal feedback and pick-up unit; Described signal is produced and is connected with sensor device one end by the first connecting electrode with conditioning device, and described signal feedback is connected with the sensor device other end by the second connecting electrode with pick-up unit; Described sensor device is the sandwich construction of rectangular parallelepiped, comprises from top to bottom: flexible electrode layer, electroactive elastomer polymer layer, flexible electrode layer; Length can anamorphic stretching when being subject to the stress of voltage or external displacement motion generation for described electroactive elastomer polymer layer.Sensor device is a kind of rectangular structure with aspect ratio and thickness of thin layer.Flexible electrode layer uniform fold is in the upper and lower surface of electroactive elastomer polymer layer.
Preferably, the length breadth ratio of described sensor device is 10 ~ 20, and thickness is within 1mm.
Preferably, the length breadth ratio of described sensor device is 10 ~ 15, and thickness is 0.2 ~ 1mm.
It is to ensure that described length breadth ratio is limited to 10 ~ 15 these scopes, and sensor in use, mainly through the change of measurement impedance or capacitive reactance, carrys out the change in displacement in reaction length direction, ignores impact in the direction of the width.Described thickness is within the scope of 0.2 ~ 1mm, and the detection sensitivity of sensor in other words precision can be ensured preferably, can reach good performance.
Preferably, also protective seam is provided with outside the flexible electrode layer of described sensor device.Its function is to prevent flexible electrode layer to be directly exposed to the external world, is convenient to be installed on different application scenarios simultaneously.
Preferably, the material of described protective seam is soft and can with the material of human contact.
Preferably, described first connecting electrode is connected with the flexible electrode layer of sensor device with the second connecting electrode.
Preferably, the low order of magnitude of the elastic modulus of electroactive elastomer polymer layer described in the modular ratio of described flexible electrode layer, the thickness of described flexible electrode layer should 2 orders of magnitude lower than the thickness of described electroactive elastomer polymer layer.Flexible electrode layer in described sensor device has thin, very submissive, conductive characteristic, its elastic modulus needs the elastic modulus much larger than electroactive elastomer polymer layer, its thickness needs the thickness far below electroactive elastomer polymer layer, ensure in drawing process, stress can not be produced or locally occur non-conductive phenomenon in flexible electrode layer.Electroactive elastomer polymer layer is a kind of membrane structure of soft material, the function of a capacitor is formed together with overall with flexible electrode layer, when the membrane structure of electroactive elastomer polymer layer can produce submissive large deformation when being subject to the stress of voltage or external displacement motion generation, form sensing function.
During sensor uses, polymeric material, when length direction has displacement to increase, thickness direction can have reduction simultaneously.Thickness 2 orders of magnitude low far below polymer thickness of described electrode ensure that electrode only plays the left and right of conduction, and can not because of the thickness effect of electrode or the distortion being tied to polymer thickness.
Preferably, the material of described flexible electrode layer is one or more combinations in carbon fat, carbon dust, thin metal layer, hydrogel, ionic gel.
Preferably, the material of described flexible electrode layer is carbon fat, ionic gel.
Preferably, the material of described electroactive elastomer polymer layer is one or more combinations in silica gel, silicones, polyurethane, acryl resin.
Preferably, the material of described electroactive elastomer polymer layer is silica gel, acryl resin.
Present invention also offers a kind of using method of the displacement transducer based on electroactive elastomer polymer, signal is produced and is produced periodic pumping signal with conditioning device, flexible electrode layer is transferred to by the first connecting electrode, flexible electrode layer converts the signal of reception to stress, impels the displacement of electroactive elastomer polymer layer to change; Signal feedback is connected with flexible electrode layer by the second connecting electrode with pick-up unit, the electroactive impedance of elastomer polymer layer after detection displacement changes or the change of capacitive reactance, by data analysis and process, complete the corresponding relation of impedance or capacitive reactance and change in displacement.
Preferably, required measuring-signal is periodic sinusoidal pumping signal.
The present invention devises a kind of this structure with large length breadth ratio, and centre does not need the combination designing various projection or projection, and the change of displacement is measured in the change mainly through detecting capacitive reactance or impedance.And by increasing layer protective layer, encapsulation can be realized, and installation easy to use.
Signal of the present invention is produced and conditioning device and signal feedback and pick-up unit, and circuit arrangement design part has versatility, and selection scheme has diversity, can select according to practical application, shorten product development cycle, reduce cost, decrease power consumption.
The principle of work of sensor device of the present invention is: sensor device, under the effect having pumping signal, can be regarded as the principle of plane-parallel capacitor in circuit, and the electric capacity of plane-parallel capacitor is wherein ε efffor constant, s is the area (being namely the area of plane of electroactive elastomer polymer and electrode overlay area) of plane-parallel capacitor, h is the distance (being namely the thickness of electroactive elastomer polymer) between plane-parallel capacitor, during two external displacement changes, the mainly elongation of length direction, the change in displacement of Width is ignored, initial area and the thickness of supposing plane-parallel capacitor are S and H, after change in displacement, the elongation ratio of length direction is λ, according to the constancy of volume of electroactive elastomer polymer, can obtain thus, when the change in displacement of sensor, bring the capacitive reactance of sensor to change, being reflected in collection terminal is exactly that the voltage signal at impedance R two ends can change.According to circuit theory, the voltage signal at the impedance R two ends of collection is thus can set up deflection with the pass gathering voltage is V d e c = V 1 + H / ( jωRϵ e f f Sλ 2 ) .
The principle of work of the displacement transducer based on electroactive elastomer polymer provided by the invention is:
Duty, signal is produced and is formed a path with conditioning device, sensor device and signal feedback and pick-up unit, and wherein, signal is produced with conditioning device with periodic sinusoidal signal (V=V ampsin (2 π ω t), ω is the angular frequency adopted) stimulus sensor device, the output signal of signal feedback and pick-up unit pick-up transducers device, be 1/j ω C by the equivalent impedance of sensor, and the impedance R impedance of known signal feedback and pick-up unit, general external displacement sensor is utilized to set up change in voltage relation sensor output being detected, or the impedance variation relation of sensor input/output terminal.Through this calibration process, in practical application, just directly displacement information can be determined according to the information measured.
Compared with prior art, the present invention has following beneficial effect:
1, sensor device of the present invention has the structure of large length breadth ratio, and centre does not need the combination designing various projection or projection, and the change mainly through detecting capacitive reactance or impedance can realize the change of measuring displacement.
2, structure of the present invention is simple, easy to make, materials and structures flexible parameter selection, applicable different duty requirements.Sensor has Grazing condition feature, can realize multiple degrees of freedom and arbitrary shape application of a surface, and the voltage of required measuring-signal is lower, may be used for artificial-muscle, man-made organ, human motion Function detection, the field such as wearable device and medical rehabilitation, realizes displacement measurement.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Fig. 1 is the planar structure schematic diagram of the displacement transducer based on electroactive elastomer polymer; Wherein, 1 is protective seam, and 2 is flexible electrode layer, and 3 is electroactive elastomer polymer layer, and 4 is the first connecting electrode, and 5 is signal production and conditioning device, and 6 is signal feedback and pick-up unit, and 7 is the second connecting electrode;
Fig. 2 is sensor operating principles schematic diagram.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
embodiment 1
As shown in Fig. 1 ~ 2, the displacement transducer based on electroactive elastomer polymer of the present embodiment, comprising: sensor device, the first connecting electrode 4, signal are produced and conditioning device 5, signal feedback and pick-up unit 6, second connecting electrode 7, wherein:
Sensor device be have length breadth ratio be 10 and thickness of thin layer be the sandwich construction of the rectangular parallelepiped of 1mm, comprise from top to bottom: protective seam 1, flexible electrode layer 2, electroactive elastomer polymer layer 3, flexible electrode layer 2 and protective seam 1.
Protective seam 1, material is soft and can with the material of human contact.Function is to prevent flexible electrode layer 2 to be directly exposed to the external world, is convenient to install and different application scenarios simultaneously.
Flexible electrode layer 2, uniform fold is in the upper and lower surface of electroactive elastomer polymer layer 3; The material adopted, as the combination of one or more in carbon fat, carbon dust, thin metal layer, hydrogel, ionic gel, there is thin, very submissive, conductive characteristic, the low order of magnitude of the elastic modulus of electroactive elastomer polymer layer 3 described in the modular ratio of described flexible electrode layer 2, the thickness of described flexible electrode layer 2 should 2 orders of magnitude lower than the thickness of described electroactive elastomer polymer layer 3; Its elastic modulus needs the elastic modulus much larger than electroactive elastomer polymer layer 3, its thickness needs the thickness far below electroactive elastomer polymer layer 3, ensure in drawing process, stress can not be produced or locally occur non-conductive phenomenon in flexible electrode layer 2.
Electroactive elastomer polymer layer 3 is a kind of membrane structure of soft material, the function of a capacitor is formed together with flexible electrode layer 2, when the membrane structure of elastomer polymer layer 3 can produce submissive large deformation when being subject to the stress of voltage or external displacement motion generation, form sensing function.
The material of electroactive elastomer polymer layer 3 can be silica gel, silicones, polyurethane, one or more the combination in acryl resin.
The first described connecting electrode 4 and the second connecting electrode 7 produce the connection with conditioning device 5 and signal feedback and pick-up unit 6 for sensor device and signal.
The using method of the displacement transducer based on electroactive elastomer polymer of the present embodiment is: signal is produced with conditioning device 5 as to produce periodic pumping signal, flexible electrode layer 2 is transferred to by the first connecting electrode 4, flexible electrode layer 2 converts the signal of reception to stress, the electroactive elastomer polymer layer 3 displacement signal feedback that changes is impelled to be connected with flexible electrode layer 2 by the second connecting electrode 7 with pick-up unit 6, the electroactive impedance of elastomer polymer layer 3 after detection displacement changes or the change of capacitive reactance, pass through data analysis and process, complete the corresponding relation of impedance or capacitive reactance and change in displacement.Required measuring-signal is periodic sinusoidal pumping signal.
Signal is produced and conditioning device 5 and signal feedback and pick-up unit 6, and circuit arrangement design part has versatility, and circuit design itself is not main points of the present invention.
embodiment 2
The displacement transducer based on electroactive elastomer polymer of the present embodiment, is with the difference of embodiment 1: sensor device be have length breadth ratio be 12 and thickness of thin layer be the sandwich construction of the rectangular parallelepiped of 0.5mm.
embodiment 3
The displacement transducer based on electroactive elastomer polymer of the present embodiment, is with the difference of embodiment 1: sensor device be have length breadth ratio be 15 and thickness of thin layer be the sandwich construction of the rectangular parallelepiped of 0.2mm.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.

Claims (10)

1. based on a displacement transducer for electroactive elastomer polymer, it is characterized in that, comprise signal and produce and conditioning device, the first connecting electrode, sensor device, the second connecting electrode and signal feedback and pick-up unit; Described signal is produced and is connected with sensor device one end by the first connecting electrode with conditioning device, and described signal feedback is connected with the sensor device other end by the second connecting electrode with pick-up unit; Described sensor device is the sandwich construction of rectangular parallelepiped, comprises from top to bottom: flexible electrode layer, electroactive elastomer polymer layer, flexible electrode layer; Length can anamorphic stretching when being subject to the stress of voltage or external displacement motion generation for described electroactive elastomer polymer layer.
2., as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, the length breadth ratio of described sensor device is 10 ~ 20, and thickness is within 1mm.
3., as claimed in claim 2 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, the length breadth ratio of described sensor device is 10 ~ 15, and thickness is 0.2 ~ 1mm.
4., as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, outside the flexible electrode layer of described sensor device, be also provided with protective seam.
5., as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, described first connecting electrode is connected with the flexible electrode layer of sensor device respectively with the second connecting electrode.
6. as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, the low order of magnitude of the elastic modulus of electroactive elastomer polymer layer described in the modular ratio of described flexible electrode layer, the thickness of described flexible electrode layer should 2 orders of magnitude lower than the thickness of described electroactive elastomer polymer layer.
7., as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, the material of described flexible electrode layer is one or more the combination in carbon fat, carbon dust, thin metal layer, hydrogel, ionic gel.
8., as claimed in claim 1 based on the displacement transducer of electroactive elastomer polymer, it is characterized in that, the material of described electroactive elastomer polymer layer is one or more the combination in silica gel, silicones, polyurethane, acryl resin.
9. the using method based on the displacement transducer of electroactive elastomer polymer as claimed in claim 1, it is characterized in that, signal is produced and is produced periodic pumping signal with conditioning device, flexible electrode layer is transferred to by the first connecting electrode, flexible electrode layer converts the signal of reception to stress, impels the displacement of electroactive elastomer polymer layer to change; Signal feedback and pick-up unit are by the second connecting electrode and flexible electrode layer, the electroactive impedance of elastomer polymer layer after detection displacement changes or the change of capacitive reactance, by data analysis and process, complete the corresponding relation of impedance or capacitive reactance and change in displacement.
10., as claimed in claim 9 based on a using method for the displacement transducer of electroactive elastomer polymer, it is characterized in that, required measuring-signal is periodic sinusoidal pumping signal.
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910529A (en) * 2016-06-24 2016-08-31 深圳市步莱恩科技有限公司 Resistance-type displacement sensor
CN106441073A (en) * 2016-09-05 2017-02-22 西安交通大学 Dielectric flexible sensor for big deformation and touch pressure measurement
CN106543703A (en) * 2016-10-26 2017-03-29 安徽飞达电气科技有限公司 A kind of stretchable ultracapacitor elastic polymer matrix and preparation method thereof
CN106546162A (en) * 2016-10-09 2017-03-29 深圳瑞湖科技有限公司 A kind of flexible sensor of detection strain
CN106595469A (en) * 2017-01-10 2017-04-26 昆山工研院新型平板显示技术中心有限公司 Bend sensor
CN107576258A (en) * 2017-08-08 2018-01-12 上海交通大学 A kind of software sensor for being used to measure continuous diameter change
CN109855525A (en) * 2018-12-12 2019-06-07 西安近代化学研究所 Effect target deformation measuring device and measurement method based on dielectric elastomer
CN110736420A (en) * 2019-09-19 2020-01-31 北京科技大学 Preparation method of portable self-powered hydrogel strain sensor
CN113063342A (en) * 2021-03-22 2021-07-02 华南理工大学 Flexible strain sensor based on same conductive material and preparation method thereof
CN115161803A (en) * 2022-06-30 2022-10-11 中国科学院工程热物理研究所 Flexible piezoelectric fiber for measuring stress strain and preparation method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101925793A (en) * 2008-01-28 2010-12-22 可乐丽股份有限公司 Flexible deformation sensor
US7966074B2 (en) * 2006-05-15 2011-06-21 Samsung Electronics Co., Ltd. Apparatus and method enhancing muscular movement
US20110241490A1 (en) * 2010-03-05 2011-10-06 Indian Institute Of Science Polymer Metal Composite Membranes
KR20120068336A (en) * 2010-12-17 2012-06-27 에스케이하이닉스 주식회사 Substrate for mounting semiconductor devices
CN103324288A (en) * 2013-06-21 2013-09-25 武汉纺织大学 System and method for human body movement identification of combined sensor
CN104535007A (en) * 2014-12-15 2015-04-22 哈尔滨工程大学 Distributed type optical fiber strain measurement system based on cavity-length-adjustable F-P white light interference demodulating device
CN104729769A (en) * 2015-03-30 2015-06-24 南京林业大学 Distributed flexible pressure sensor based on electrically active polymer

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7966074B2 (en) * 2006-05-15 2011-06-21 Samsung Electronics Co., Ltd. Apparatus and method enhancing muscular movement
CN101925793A (en) * 2008-01-28 2010-12-22 可乐丽股份有限公司 Flexible deformation sensor
US20110241490A1 (en) * 2010-03-05 2011-10-06 Indian Institute Of Science Polymer Metal Composite Membranes
KR20120068336A (en) * 2010-12-17 2012-06-27 에스케이하이닉스 주식회사 Substrate for mounting semiconductor devices
CN103324288A (en) * 2013-06-21 2013-09-25 武汉纺织大学 System and method for human body movement identification of combined sensor
CN104535007A (en) * 2014-12-15 2015-04-22 哈尔滨工程大学 Distributed type optical fiber strain measurement system based on cavity-length-adjustable F-P white light interference demodulating device
CN104729769A (en) * 2015-03-30 2015-06-24 南京林业大学 Distributed flexible pressure sensor based on electrically active polymer

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910529A (en) * 2016-06-24 2016-08-31 深圳市步莱恩科技有限公司 Resistance-type displacement sensor
CN106441073A (en) * 2016-09-05 2017-02-22 西安交通大学 Dielectric flexible sensor for big deformation and touch pressure measurement
CN106546162A (en) * 2016-10-09 2017-03-29 深圳瑞湖科技有限公司 A kind of flexible sensor of detection strain
CN106543703A (en) * 2016-10-26 2017-03-29 安徽飞达电气科技有限公司 A kind of stretchable ultracapacitor elastic polymer matrix and preparation method thereof
CN106595469A (en) * 2017-01-10 2017-04-26 昆山工研院新型平板显示技术中心有限公司 Bend sensor
CN107576258A (en) * 2017-08-08 2018-01-12 上海交通大学 A kind of software sensor for being used to measure continuous diameter change
CN109855525A (en) * 2018-12-12 2019-06-07 西安近代化学研究所 Effect target deformation measuring device and measurement method based on dielectric elastomer
CN109855525B (en) * 2018-12-12 2020-10-27 西安近代化学研究所 Dielectric elastomer-based effect target deformation measuring device and measuring method
CN110736420A (en) * 2019-09-19 2020-01-31 北京科技大学 Preparation method of portable self-powered hydrogel strain sensor
CN110736420B (en) * 2019-09-19 2020-09-11 北京科技大学 Preparation method of portable self-powered hydrogel strain sensor
CN113063342A (en) * 2021-03-22 2021-07-02 华南理工大学 Flexible strain sensor based on same conductive material and preparation method thereof
CN113063342B (en) * 2021-03-22 2022-06-07 华南理工大学 Flexible strain sensor based on same conductive material and preparation method thereof
CN115161803A (en) * 2022-06-30 2022-10-11 中国科学院工程热物理研究所 Flexible piezoelectric fiber for measuring stress strain and preparation method thereof

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