CN105047811A - Stack piezoelectric transducer based on piezoelectric material layers with different thicknesses - Google Patents
Stack piezoelectric transducer based on piezoelectric material layers with different thicknesses Download PDFInfo
- Publication number
- CN105047811A CN105047811A CN201510289652.6A CN201510289652A CN105047811A CN 105047811 A CN105047811 A CN 105047811A CN 201510289652 A CN201510289652 A CN 201510289652A CN 105047811 A CN105047811 A CN 105047811A
- Authority
- CN
- China
- Prior art keywords
- piezoelectric
- composite material
- thickness
- transducer
- pzt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 48
- 239000002131 composite material Substances 0.000 claims abstract description 112
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 229920000642 polymer Polymers 0.000 claims description 9
- 239000004814 polyurethane Substances 0.000 claims description 9
- 229920002635 polyurethane Polymers 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 229920002379 silicone rubber Polymers 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 230000002745 absorbent Effects 0.000 claims description 2
- 239000002250 absorbent Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229920003225 polyurethane elastomer Polymers 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 33
- 238000010586 diagram Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000004044 response Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000004568 cement Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010835 comparative analysis Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000005236 sound signal Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention relates to a stack piezoelectric transducer based on piezoelectric material layers with different thicknesses, which is characterized in that the piezoelectric material layers adopt piezoelectric composite materials such as a 1-3 type piezoelectric composite material and the like, or traditional piezoelectric materials such as piezoelectric ceramic, piezoelectric single crystals and the like. A stacked piezoelectric material oscillator is enabled to have various modes, namely, various resonant frequencies, because each piezoelectric material layer is different in thickness, and the resonant frequencies of the piezoelectric material layers are different. Through reasonably designing the thickness of each piezoelectric material layer, the resonant frequency of each piezoelectric material layer in the piezoelectric oscillator is enabled to be close to each other and coupled, the combination frequency can be enabled to not generate interruption or too deep valleys when the piezoelectric material layers operate simultaneously in a wide frequency range, composite multi-mode vibration is formed in the frequency band, that is, the operation bandwidth of the transducer can be effectively expanded, and transceiving sound waves with high frequency and wide band are realized.
Description
Technical field
The invention belongs to Underwater Detection technical field, be specifically related to the piezoelectric vibrator that a kind of piezoelectric adopting thickness different stacks, be applied to realize transmitting and receiving underwater sound signal in transducer thus realize hydrospace detection.
Background technology
Underwater acoustic transducer is device acoustic energy and electric energy being carried out conversion mutually, and its status is similar to the antenna in wireless device, is the Primary Component transmitting and receiving sound wave under water.Detection under water, identification, communication, and the exploitation of marine environmental monitoring and marine resources, all be unable to do without underwater acoustic transducer.Transducer can be divided into emission type, receiving type and transceiver type.Convert the electrical signal to underwater sound signal, and to the transducer of radiative acoustic wave in water, be called transmitting transducer, transmitting transducer requires larger output acoustic power and higher electro-acoustic conversion efficiency.Be used for receiving underwater acoustic wave signal, the transducer converting thereof into the signal of telecommunication is receiving transducer, is also often called hydrophone, then requires broadband and high sensitivity to receiving transducer.Both can convert acoustical signal to the signal of telecommunication, can acoustical signal be converted the electrical signal to again.Transmitting-receiving transducer is called for the transducer received or launch acoustical signal.
Piezoelectric vibrator is the core component of transducer, and the performance of oscillator decides the service behaviour of transducer, therefore, wants to make high performance underwater acoustic transducer, first will improve the performance of piezoelectric vibrator.In the material making piezoelectric vibrator, piezo-electricity composite material is because its acoustic impedance is little, it is roomy to be with, mechanical quality factor advantages of higher is widely used.Piezo-electricity composite material is a kind of heterogeneous material be made up by combination process of piezoelectric, polymer, metal etc., in composite material each mutually can with 0,1,2 or 3 dimension modes oneself be communicated with.Current composite material has 1-3 type, 3-1 type, 3-2 type, 3-3 type, 0-3 type, 2-2 type composite material, and crescent moon and hat shape metal-piezo ceramic wafers, and wherein 1-3 type piezo-electricity composite material is most widely used.Existing 1-3 type composite material PZT (piezoelectric transducer) mainly contains following several:
1,1-3 type piezo-electricity composite material transducer
1-3 type piezo-electricity composite material transducer (Chen Junbo, Wang Yuebing, Zhong Linjian, 1-3 type piezo-electricity composite material and the comparative analysis of common PZT transducer performance, acoustics and electronic engineering, by cutting-completion method prepared 1-3 type piezo-electricity composite material, and respectively with the 1-3 type piezo-electricity composite material of two panels same size and PZT potsherd be made into piston-type transducer 2007, vol.87 (3): 25-27).The piezoelectric element of transducer selects that thickness is 9mm, diameter is the disk of 42.7mm, fixes, and is arranged in metal shell, radiating surface encapsulating polyurethane with decoupling material.Through measure obtain two kinds of transducers in atmosphere with the mechanical admittance curves in water, transmitting voltage response, receiving sensitivity and Direction Curve in water.By comparative analysis, show that 1-3 type piezo-electricity composite material transducer has clear improvement than the transmitting-receiving performance of common PZT PZT (piezoelectric transducer).Because 1-3 type transducer transverse coupling is little, therefore present single thickness resonance, bandwidth broadens.
2,1-3 type piezo-electricity composite material broadband underwater acoustic transducer
1-3 type piezo-electricity composite material broadband underwater acoustic transducer (Zhang Kai, Lan Yu, Li Qi, 1-3 type piezo-electricity composite material broadband underwater acoustic transducer is studied, acoustic journal, 2011, Vol.36 (6), thickness vibration mode theory, horizontal modal theory and Finite Element Method 631-637) is adopted to study 1-3 type piezo-electricity composite material transducer, the FEM (finite element) model of transducer set up by application ANSYS software, then carry out structure optimization, finally make the 1-3 type piezo-electricity composite material wide-band transducer that utilizes thickness vibration mode and the horizontal mode mode of single order.Its bandwidth of operation is 190-390kHz.Result of study shows, utilizes thickness vibration mode and the horizontal mode of single order can expand the bandwidth of 1-3 type piezo-electricity composite material transducer.
3, monocrystalline composite material wide-band transducer
At document (S.Cochran, M.Parker, andP.Marin-Franch, Ultrabroadbandsinglecrystalcompositetransducersforunderw aterultrasound, IEEEUltrasonicsSymposium, 2005,231-234) in, the people such as British scholar S.Cochran utilize PMN-PT monocrystalline to make composite material, and add matching layer making monocrystalline composite material wide-band transducer on the composite.Monocrystalline composite material transducer-3dB the relative bandwidth made is 125%, close with 135% of theory calculate.Monocrystalline composite material transducer is compared with traditional ceramic composite transducer, and bandwidth adds nearly four times.
To sum up, in the method expanding transducer bandwidth, the first pours into polymer in conventional piezoelectric materials can expand bandwidth, but it expands the limited in one's ability of bandwidth; The second utilizes thickness vibration to be coupled with transverse vibration also can increase bandwidth, but the size of oscillator is not easy to control, and makes more difficult.The third adds matching layer on piezo-electricity composite material, and bandwidth can enlarge markedly, but the performance of matching layer can change along with the change of time, thus makes transducer performance unstable.
Summary of the invention
The object of the invention is to for the problems referred to above, a kind of PZT (piezoelectric transducer) stacked by the piezoelectric of different-thickness is provided, to expand the broadband of high-frequency transducer.
For achieving the above object, the present invention adopts following technical scheme:
A kind of PZT (piezoelectric transducer), comprises the piezoelectric material layer with different-thickness stacked, and the resonance frequency of each piezoelectric material layer is close to each other and be coupled.
Further, the piezoelectric that described piezoelectric material layer adopts is preferably piezo-electricity composite material, also can be the conventional piezoelectric materials such as piezoelectric ceramic, piezoelectric monocrystal in addition.
Further, described piezo-electricity composite material is 1-3 type piezo-electricity composite material, 2-2 type composite material, 0-3 type composite material etc., in piezo-electricity composite material, piezoelectric phase material is piezoelectric ceramic or piezoelectric monocrystal, and polymer phase material is epoxy resin, polyurethane, silicon rubber etc.
Further, the upper and lower surface covering electrodes layer of described piezoelectric material layer, the material of described electrode is gold, silver, conducting resinl etc.
Further, the piezoelectric material layer with different-thickness stacked described in forms by the piezoelectric material layer of two panels or multi-disc different-thickness is bonding.
Further, described in the piezoelectric material layer with different-thickness that stacks stacked by the piezoelectric of flat shape and form, or stacked by the piezoelectric of curve form (as arc-shaped) and form.
Further, the thickness t of described piezoelectric material layer is 2 ~ 10mm, and the thickness difference Δ t of each piezoelectric material layer is 0 ~ 1mm.
Of the present inventionly stack piezoelectric oscillator, because the thickness of each piezoelectric material layer is different, the resonance frequency of each piezoelectric material layer is different, makes the piezoelectric oscillator stacked there is multiple modalities (multiple resonance frequency).By the thickness of each piezoelectric material layer of appropriate design, make the resonance frequency of each piezoelectric material layer in piezoelectric vibrator close to each other and be coupled, work in wider frequency range simultaneously, its combination frequency can be made to respond and not produce interruption and excessively dark trench, the vibration of compound multimode will be formed in this frequency band, effectively can expand the bandwidth of operation of transducer, realize high frequency, receive and dispatch sound wave to broadband.
Accompanying drawing explanation
Fig. 1 is the structural representation of transducer in embodiment.
Fig. 2 is the structural representation of 1-3 type composite material in embodiment.
Fig. 3 is the schematic diagram of 1-3 type piezo-electricity composite material Making programme in embodiment.
Fig. 4 is the schematic diagram that the piezo-electricity composite material of two panels different-thickness in embodiment stacks.
Fig. 5 is the schematic diagram (double-layer structure) of piezoelectric vibrator side in embodiment.
Fig. 6 is the resonance frequency coupling schematic diagram of different-thickness piezo-electricity composite material in embodiment.
Fig. 7 is that in embodiment, two panels stacks the aerial resonance frequency of composite material piezoelectric vibrator and bandwidth performance schematic diagram.
Fig. 8 is the transmitting voltage response curve chart of the transducer that in embodiment, I piezoelectric vibrator is made into.
Fig. 9 is the schematic diagram that in embodiment, three different-thickness composite materials stack.
Figure 10 is the schematic diagram (three-decker) of piezoelectric vibrator side in embodiment.
Figure 11 be in embodiment three stack the aerial resonance frequency of composite material piezoelectric vibrator and bandwidth performance schematic diagram.
Figure 12 is the conductance plots figure that in embodiment, two panels different-thickness potsherd stacks.
Figure 13 is the conductance plots figure that in embodiment, two panels different-thickness single-chip stacks.
Figure 14 is the arc-shaped piezoelectric stacked structure schematic diagram of different-thickness in embodiment.
Symbol description in figure: 1. piezoelectric phase; 2. polymer phase; 3. piezoelectric substrate; 4. adhesive linkage; 5. electrode; t
1, t
2,
for piezo-electricity composite material thickness.
Embodiment
Coordinate accompanying drawing below by specific embodiment, the present invention is described in detail.
Embodiment 1: the composite material of two panels different-thickness stacks
Fig. 1 is the structural representation that in the present embodiment, two panels composite material stacks transducer.As shown in the drawing, this transducer comprises the 1-3 type piezo-electricity composite material of two panels different-thickness, the composite material 1 namely in figure and composite material 2; Be adhesive linkage between two-layer composite material, composite material upper and lower surface covering electrodes, from electrode outgoing cable; Composite material 1 top is provided with absorbent treatment, for absorbing unnecessary sound wave, prevents acoustic reflection; The most external of this transducer is the water-proof sound-transmitting layer (as polyurethane) of rubber seal.
Fig. 2 is the structural representation that the present embodiment makes the 1-3 type composite material of piezoelectric vibrator.As shown in the drawing, this composite material comprises piezoelectric phase 1, polymer phase 2 and piezoelectric substrate 3.
Fig. 3 is 1-3 type piezo-electricity composite material Making programme figure in the present embodiment.First in the x-direction cut piezoelectric phase 1, then cut piezoelectric phase 1 in the y-direction, then pour into polymer phase 2, finally make electrode 5.Composite material upper and lower surface covering electrodes, through-thickness and z direction polarization.Electrode is made by sintering silver, sputtering gold (or silver) or brushing conducting resinl etc.
Fig. 4 is the schematic diagram that the piezo-electricity composite material of two panels different-thickness stacks.The piezo-electricity composite material do not waited by the two panels thickness made is bonding by tack coat 4, makes and stacks piezoelectric vibrator, and two panels composite material polarised direction is contrary, and in parallel in electricity.If two panels composite material polarised direction is identical, then need interpolation one layer insulating between two panels composite material, insulating barrier can adopt the insulating material such as insulating cement, plastics, and thickness of insulating layer is as far as possible little.Adhesive linkage adopts polyurethane usually, epoxy resin and silicon rubber etc., and its thickness is between 0.2mm-0.5mm.
Fig. 5 is the schematic diagram that two-layer composite material stacks piezoelectric vibrator side, wherein t
1, t
2for the thickness of two panels piezo-electricity composite material.Structures of piezoelectric composite size distribution ranges is preferably: thickness t is 2mm ~ 10mm, and each thickness of composite material difference Δ t is 0mm ~ 1mm.The material of the piezoelectric phase of composite material can select piezoelectric ceramic, piezoelectric monocrystal etc., and polymer can select epoxy resin, polyurethane etc. mutually.
Due to two panels composite material thickness not etc., the resonance frequency of each composite material is different, and namely oscillator vibration system exists multiple modalities (multiple resonance frequency).The thickness of each composite material of appropriate design, by polyurethane adhesive layer, make the resonance frequency of each composite material of piezoelectric vibrator close to each other and be coupled (see Fig. 6), work in wider frequency range simultaneously, its combination frequency response is not produced be interrupted and excessively dark trench, then will form the vibration of compound multimode in this frequency band, effectively can expand the bandwidth of operation of oscillator.Multi-disc is also like this.
An instantiation is provided below.The two panels 1-3 type piezo-electricity composite material that this example adopts thickness not wait makes piezoelectric vibrator, and as shown in Figure 4, the structural parameters of each parts of oscillator are in table 1.
The structural parameters of table 1. piezoelectric vibrator embodiment parts
In showing in I ~ V group, No. 1 that often organizes and No. 2 composite materials stack by structure shown in Fig. 3, and use polyurethane adhesive therebetween, maintenance thickness of adhibited layer is 0.2mm ~ 0.5mm, after urethane cures, namely make piezoelectric vibrator.Measure resonance frequency and the bandwidth of oscillator with electric impedance analyzer, result is as shown in table 2 and Fig. 7.
Table 2. piezoelectric vibrator examples measure result
As can be seen from table 2 and Fig. 7, within the scope of certain thickness difference, stack piezoelectric vibrator bandwidth and be far longer than monolithic composite material bandwidth.When two panels thickness of composite material difference is excessive, the conductance plots of each composite material will no longer be coupled at-3dB place.
I piezoelectric vibrator is pressed construction packages shown in Fig. 1, makes transducer, in water, test its transmitting voltage response, obtain the change curve of transmitting voltage response as shown in Figure 8 with frequency.As can be seen from this curve chart, its bandwidth of operation is about 60KHz, has remarkable increase compared with institute's measuring tape is wide in air.Illustrate that structure of the present invention can significantly improve the bandwidth of oscillator, achieve progressive technique effect.
Embodiment 2: three different-thickness composite materials stack
Fig. 9 is that three layers of different-thickness piezo-electricity composite material stack oscillator structure schematic diagram.This oscillator is formed by bonding the stacking of adhesive linkage by the piezo-electricity composite material of three different-thickness.In three piezo-electricity composite materials, adjacent two panels piezo-electricity composite material polarised direction is contrary.As identical in adjacent two panels piezo-electricity composite material polarised direction, then need interpolation one layer insulating between two panels piezo-electricity composite material, insulating barrier can adopt the insulating material such as insulating cement, plastics, and thickness of insulating layer is as far as possible little.
Stack transducer for three piezo-electricity composite materials, structure is identical with Fig. 1.Difference is, compared to Figure 1 three piezo-electricity composite materials stack transducer, and composite material will increase a slice, and structure as shown in Figure 9, is formed by adhesive linkage is bonding by three composite materials.In addition the present invention stacks more than 3-layer composite material, and n layer composite transducers is then made up of the composite material of n sheet different-thickness, by that analogy.
Figure 10 is that three layers of different-thickness composite material stack oscillator sectional drawing.Structures of piezoelectric composite size distribution ranges is consistent with double-layer structure noted earlier.
Figure 11 is that 3-layer composite material thickness is respectively 4.8mm, in 4.6mm, 5mm situation, and the conductance plots figure of piezoelectric vibrator and composite material.As seen from the figure, the bandwidth of operation of piezoelectric vibrator, much larger than the bandwidth of each composite material, illustrates that multi-stacked structure can significantly heighten oscillator bandwidth.
The piezo-electricity composite material of the different-thickness described in the present invention program is not limited to 1-3 type piezo-electricity composite material, can be replaced by other composite material (as 2-2 type composite material, 0-3 type composite material etc.) and the conventional piezoelectric materials such as piezoelectric ceramic, monocrystalline.Figure 12 is that the potsherd that two panels thickness is respectively 5mm and 4.7mm stacks, potsherd and the conductance plots figure of piezoelectric vibrator stacked thereof.As seen from the figure, piezoelectric vibrator bandwidth is about 40KHz, has remarkable increase compared with the bandwidth of layered ceramic.Figure 13 is that the single-chip that two panels thickness is respectively 5mm and 4.7mm stacks, single-chip and the conductance plots figure of piezoelectric vibrator stacked thereof.As seen from the figure, the bandwidth of piezoelectric vibrator also has remarkable increase compared with the bandwidth of monolithic monocrystalline.
The piezoelectric that the structure of the present invention program is not limited to planar structure stacks, and also comprises the piezoelectric stacked structure of the arc-shaped of different-thickness, as shown in figure 14.
Above embodiment is only in order to illustrate technical scheme of the present invention but not to be limited; those of ordinary skill in the art can modify to technical scheme of the present invention or equivalent replacement; and not departing from the spirit and scope of the present invention, protection scope of the present invention should be as the criterion with described in claim.
Claims (10)
1. a PZT (piezoelectric transducer), is characterized in that, comprises the piezoelectric material layer with different-thickness stacked, and the resonance frequency of each piezoelectric material layer is close to each other and be coupled.
2. PZT (piezoelectric transducer) as claimed in claim 1, is characterized in that, the piezoelectric that described piezoelectric material layer adopts is piezo-electricity composite material, piezoelectric ceramic or piezoelectric monocrystal.
3. PZT (piezoelectric transducer) as claimed in claim 2, it is characterized in that, described piezo-electricity composite material is 1-3 type piezo-electricity composite material, 2-2 type composite material or 0-3 type composite material, piezoelectric phase in described piezo-electricity composite material is piezoelectric ceramic or piezoelectric monocrystal, and polymer is epoxy resin, polyurethane or silicon rubber mutually.
4. PZT (piezoelectric transducer) as claimed in claim 1, it is characterized in that, described stack have in the piezoelectric material layer of different-thickness, the polarised direction of two adjacent piezoelectric material layers is identical or different, between the piezoelectric material layer that different two of polarised direction are adjacent, add an insulating barrier.
5. PZT (piezoelectric transducer) as claimed in claim 1, is characterized in that, described in the piezoelectric material layer with different-thickness that stacks form by the piezoelectric material layer of two panels or multi-disc different-thickness is bonding, each piezoelectric material layer is plane stacked structure or curved surface stacked structure.
6. PZT (piezoelectric transducer) as claimed in claim 5, is characterized in that, adopt polyurethane, epoxy resin or silicon rubber to carry out described bonding, the thickness of adhesive linkage is 0.2mm ~ 0.5mm.
7. PZT (piezoelectric transducer) as claimed in claim 1, it is characterized in that, the upper and lower surface covering electrodes layer of described piezoelectric material layer, the material of described electrode layer is gold, silver or conducting resinl.
8. PZT (piezoelectric transducer) as claimed in claim 1, it is characterized in that, the thickness t of described piezoelectric material layer is 2 ~ 10mm, and the thickness difference Δ t of each piezoelectric material layer is 0 ~ 1mm.
9. the PZT (piezoelectric transducer) according to any one of claim 1 to 8, is characterized in that, also comprise the absorbent treatment adjacent with the described piezoelectric material layer with different-thickness stacked, and rubber seal is in outermost water-proof sound-transmitting layer.
10. prepare a method for composite material PZT (piezoelectric transducer), this composite material PZT (piezoelectric transducer) comprises the 1-3 type piezo-electricity composite material with different-thickness stacked, and the method comprises the steps:
1) cut piezoelectric phase in the x-direction, then cut this piezoelectric phase in the y-direction;
2) in the gap formed with the cutting of y direction in the x-direction, pour into polymer phase, form 1-3 type piezo-electricity composite material, at the upper and lower surface covering electrodes of 1-3 type piezo-electricity composite material;
3) the 1-3 type piezo-electricity composite material of different-thickness is undertaken bonding by tack coat, make the piezoelectric vibrator stacked, then cable is set and rubber seal formation composite material PZT (piezoelectric transducer).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510289652.6A CN105047811B (en) | 2015-05-29 | 2015-05-29 | Piezoelectric material layer based on different-thickness stacks PZT (piezoelectric transducer) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510289652.6A CN105047811B (en) | 2015-05-29 | 2015-05-29 | Piezoelectric material layer based on different-thickness stacks PZT (piezoelectric transducer) |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105047811A true CN105047811A (en) | 2015-11-11 |
CN105047811B CN105047811B (en) | 2018-04-24 |
Family
ID=54454194
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510289652.6A Active CN105047811B (en) | 2015-05-29 | 2015-05-29 | Piezoelectric material layer based on different-thickness stacks PZT (piezoelectric transducer) |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105047811B (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105388640A (en) * | 2015-12-29 | 2016-03-09 | 中国电子科技集团公司第二十六研究所 | Inclined transducer device used for acousto-optic tunable filter |
CN106876576A (en) * | 2017-02-13 | 2017-06-20 | 北京信息科技大学 | A kind of piezo-electricity composite material based on scissoring vibration and preparation method thereof |
CN106903037A (en) * | 2017-01-23 | 2017-06-30 | 中国科学院苏州生物医学工程技术研究所 | Ultrasonic transducer, ultrasonic array probe and ultrasonic image-forming system |
CN108988812A (en) * | 2017-05-30 | 2018-12-11 | 三星电机株式会社 | Acoustic resonator and method for manufacturing acoustic resonator |
CN108988818A (en) * | 2017-05-30 | 2018-12-11 | 三星电机株式会社 | Acoustic resonator and method for manufacturing acoustic resonator |
CN110277485A (en) * | 2019-02-21 | 2019-09-24 | 北京信息科技大学 | Composite lay bending vibration element and preparation method thereof |
CN110721890A (en) * | 2019-10-25 | 2020-01-24 | 海鹰企业集团有限责任公司 | Light and thin medium-high frequency broadband transduction element |
CN111048660A (en) * | 2020-03-12 | 2020-04-21 | 共达电声股份有限公司 | Piezoelectric transducer, method of manufacturing piezoelectric transducer, and electronic apparatus |
WO2022037250A1 (en) * | 2020-08-18 | 2022-02-24 | 上海隐冠半导体技术有限公司 | Long-stroke piezoelectric ceramic actuator and machining method therefor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201233908Y (en) * | 2008-08-01 | 2009-05-06 | 中国电子为华实业发展有限公司 | Piezoelectric transformer |
CN102057570A (en) * | 2008-06-04 | 2011-05-11 | 科学研究国家中心 | HBAR resonator stable at high temperatures |
CN102997989A (en) * | 2012-11-26 | 2013-03-27 | 沈阳辽海装备有限责任公司 | Method for measuring sound velocity of matching layer material |
CN103824934A (en) * | 2014-03-10 | 2014-05-28 | 北京信息科技大学 | Preparation method for curved-surface piezoelectric composite and stacked circular tube transducer |
CN103841499A (en) * | 2014-02-24 | 2014-06-04 | 北京信息科技大学 | Prestressed stacked piezoelectric round tube transducer |
-
2015
- 2015-05-29 CN CN201510289652.6A patent/CN105047811B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102057570A (en) * | 2008-06-04 | 2011-05-11 | 科学研究国家中心 | HBAR resonator stable at high temperatures |
CN201233908Y (en) * | 2008-08-01 | 2009-05-06 | 中国电子为华实业发展有限公司 | Piezoelectric transformer |
CN102997989A (en) * | 2012-11-26 | 2013-03-27 | 沈阳辽海装备有限责任公司 | Method for measuring sound velocity of matching layer material |
CN103841499A (en) * | 2014-02-24 | 2014-06-04 | 北京信息科技大学 | Prestressed stacked piezoelectric round tube transducer |
CN103824934A (en) * | 2014-03-10 | 2014-05-28 | 北京信息科技大学 | Preparation method for curved-surface piezoelectric composite and stacked circular tube transducer |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105388640B (en) * | 2015-12-29 | 2019-08-02 | 中国电子科技集团公司第二十六研究所 | Rhombic transducer device for acousto-optic turnable filter |
CN105388640A (en) * | 2015-12-29 | 2016-03-09 | 中国电子科技集团公司第二十六研究所 | Inclined transducer device used for acousto-optic tunable filter |
CN106903037A (en) * | 2017-01-23 | 2017-06-30 | 中国科学院苏州生物医学工程技术研究所 | Ultrasonic transducer, ultrasonic array probe and ultrasonic image-forming system |
CN106876576A (en) * | 2017-02-13 | 2017-06-20 | 北京信息科技大学 | A kind of piezo-electricity composite material based on scissoring vibration and preparation method thereof |
US11245066B2 (en) | 2017-02-13 | 2022-02-08 | Beijing Information Science & Technology University | Shear vibration-based piezoelectric composite material and preparation method thereof |
CN108988812A (en) * | 2017-05-30 | 2018-12-11 | 三星电机株式会社 | Acoustic resonator and method for manufacturing acoustic resonator |
CN108988818A (en) * | 2017-05-30 | 2018-12-11 | 三星电机株式会社 | Acoustic resonator and method for manufacturing acoustic resonator |
CN108988818B (en) * | 2017-05-30 | 2022-06-07 | 三星电机株式会社 | Acoustic wave resonator and method for manufacturing acoustic wave resonator |
CN108988812B (en) * | 2017-05-30 | 2022-06-07 | 三星电机株式会社 | Acoustic wave resonator and method for manufacturing acoustic wave resonator |
US11418168B2 (en) | 2017-05-30 | 2022-08-16 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for manufacturing the same |
CN110277485A (en) * | 2019-02-21 | 2019-09-24 | 北京信息科技大学 | Composite lay bending vibration element and preparation method thereof |
CN110721890A (en) * | 2019-10-25 | 2020-01-24 | 海鹰企业集团有限责任公司 | Light and thin medium-high frequency broadband transduction element |
CN111048660A (en) * | 2020-03-12 | 2020-04-21 | 共达电声股份有限公司 | Piezoelectric transducer, method of manufacturing piezoelectric transducer, and electronic apparatus |
WO2022037250A1 (en) * | 2020-08-18 | 2022-02-24 | 上海隐冠半导体技术有限公司 | Long-stroke piezoelectric ceramic actuator and machining method therefor |
Also Published As
Publication number | Publication date |
---|---|
CN105047811B (en) | 2018-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105047811A (en) | Stack piezoelectric transducer based on piezoelectric material layers with different thicknesses | |
CN103841499B (en) | One kind application is prestressed to stack piezoelectric circular transducer | |
CN101715157B (en) | Cascade and parallel piezoelectric composite material-based cylindrical transducer | |
CN202662279U (en) | High-frequency underwater acoustic emission transducer | |
CN103929149B (en) | Flexible piezoelectric film bulk acoustic wave resonator and manufacturing method thereof | |
CN102662166A (en) | Multimode broadband circular array transducer | |
CN106903037A (en) | Ultrasonic transducer, ultrasonic array probe and ultrasonic image-forming system | |
CN102843637B (en) | Cylindrical transducer with stacked piezoelectric circular tubes with different internal diameters | |
CN101909230A (en) | Broadband underwater acoustic transducer using composite material of metal, piezoelectric ceramics and polymer | |
AU2020103892A4 (en) | Sensing element used to fabricate high-frequency, wideband and high-sensitivity underwater acoustic transducer and fabrication method thereof | |
CN103027711A (en) | Ultrasonic probe and ultrasonic display device | |
CN108493330B (en) | Acoustic metamaterial, acoustic vibration energy collector, and electronic device | |
JPS60236600A (en) | Piezoelectric supersonic wave converter | |
WO2021093796A1 (en) | Piezoelectric mems acoustic sensor | |
KR20190047715A (en) | Hydrophone, energy conversion method and complex hydrophone | |
CN105702243A (en) | Dual-shell series connection IV type flextensional transducer | |
CN110277485B (en) | Composite material laminated bending vibration element and preparation method thereof | |
CN106448644B (en) | nondirectional broadband high-power Janus underwater acoustic transducer | |
CN115966886A (en) | Very-low-frequency multilayer magnetoelectric mechanical antenna and preparation method thereof | |
US9070355B2 (en) | Acoustic generator, acoustic generation device, and electronic device | |
JP5677637B2 (en) | SOUND GENERATOR, SOUND GENERATOR, AND ELECTRONIC DEVICE | |
CN117955451A (en) | Piezoelectric resonator, filter, communication device, and electronic apparatus | |
CN109984771A (en) | A kind of ultrasound transducer probe and ultrasonic imaging device | |
CN201854407U (en) | Energy converter diaphragm | |
CN103414987A (en) | PVDF/ piezoelectric ceramic transmit-receive transducer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |