CN105040098A - Directional solidification furnace for casting and forming waste silicon pieces into silicon ingots - Google Patents
Directional solidification furnace for casting and forming waste silicon pieces into silicon ingots Download PDFInfo
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- CN105040098A CN105040098A CN201510447445.9A CN201510447445A CN105040098A CN 105040098 A CN105040098 A CN 105040098A CN 201510447445 A CN201510447445 A CN 201510447445A CN 105040098 A CN105040098 A CN 105040098A
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- directional solidification
- solidification furnace
- pipeline
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- pump unit
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Abstract
The invention belongs to the technical field of silicon ingot casting, and particularly relates to a directional solidification furnace for casting and forming waste silicon pieces into silicon ingots. The directional solidification furnace comprises a furnace body, an argon feeding pipeline, a vacuum pipeline and a vacuum pump unit, wherein an air control ball valve I is arranged on the argon feeding pipeline; an air control ball valve II is arranged on the vacuum pipeline; a branch pipeline I is connected onto the argon feeding pipeline in parallel; a manually-operated valve is mounted onto the branch pipeline I; a branch pipeline II is connected onto the vacuum pipeline in parallel; a manually-operated valve II is mounted onto the branch pipeline II; an impurity filter is arranged between the outlet of the vacuum pipeline and the vacuum pump unit. The directional solidification furnace is simple in structure and convenient to use, and continuous production is facilitated, so that the production efficiency is improved, and the directional solidification furnace is very suitable for popularization and implementation.
Description
Technical field
The invention belongs to silicon ingot casting technique field, particularly relate to a kind of waste silicon wafer cast molding silicon ingot directional solidification furnace.
Background technology
Existing silicon ingot casting directional solidification furnace, before operation by vacuum lead and vacuum pumping pump unit by body of heater inner chamber vacuum state, make cavity indoor pressure drop to below 0.05MPa rapidly, closed by gas control ball valve during operation.Need to be filled with argon gas by intake ducting in certain production phase, and control air input by gas control ball valve.It is convenient that gas control ball valve controls as self-acting valve, but once pneumatic element breaks down, or when dying, just cannot realize continuous seepage, greatly reducing production efficiency.
Summary of the invention
The technical problem to be solved in the present invention overcomes above-mentioned the deficiencies in the prior art exactly, and provides a kind of structure simple, easy to use; Can consecutive production be realized, thus the waste silicon wafer cast molding silicon ingot directional solidification furnace of enhancing productivity.
For solving the problems of the technologies described above, technical scheme of the present invention is:
Design a kind of waste silicon wafer cast molding silicon ingot directional solidification furnace, comprise body of heater, enter argon gas pipeline and vacuum lead and vacuum pumping pump unit, wherein entering on argon gas pipeline to be provided with gas control ball valve I, vacuum lead is provided with gas control ball valve II, enter argon gas pipeline is parallel with small transfer line I described, small transfer line I is equipped with manual valve I; Described vacuum lead is parallel with small transfer line II, small transfer line II is equipped with manual valve II.
Further, contaminant filter is provided with between described vacuum lead outlet and vacuum pumping pump unit.
Preferably, enter argon gas pipeline described in be connected by ring flange I and fastening piece with between body of heater.
Preferably, described vacuum lead is connected by ring flange II and fastening piece with between body of heater.
Preferably, be connected by ring flange III and fastening piece between described vacuum lead with vacuum pumping pump unit.
The beneficial effect of technical solution of the present invention is:
1, structurally, waste silicon wafer cast molding silicon ingot directional solidification furnace of the present invention is entering on argon gas pipeline and vacuum lead to be respectively equipped with bypass branch, and be provided with manual valve, break down once pneumatic ball valve or surprisingly die, manually can open bypass branch by valve, continue to produce; Carry out again overhauling or changing when naturally shutting down, thus realize consecutive production, improve production efficiency.
2, structurally; the present invention sets up contaminant filter on vacuum lead; to contained filtering from the Graphite Powder 99 in furnace chamber and other solid particle polluter in gas in pumping process; granule foreign is avoided to enter in the pump housing to wear and tear to mechanical part in pump and even make pumping set disorderly closedown; thus the work-ing life of improving pumping set is contributed to; reduce the number of times of disorderly closedown, enhance productivity further.In addition, connected by ring flange and fastening piece between each several part, fast and easy is installed or detachable maintaining, uses more convenient.
3, to sum up, waste silicon wafer cast molding silicon ingot directional freeze furnace structure of the present invention is simple, easy to use, contributes to realizing consecutive production, thus enhances productivity, therefore, be very suitable for promotion and implementation.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail, wherein:
Fig. 1 is one of structural representation of waste silicon wafer cast molding silicon ingot directional solidification furnace of the present invention;
Fig. 2 is the structural representation two of waste silicon wafer cast molding silicon ingot directional solidification furnace of the present invention;
Sequence number in figure: 1, body of heater, 2, enter argon gas pipeline, 3, vacuum lead, 4, vacuum pumping pump unit, 5, gas control ball valve I, 6, gas control ball valve II, 7, small transfer line I, 8, manual valve I, 9, small transfer line II, 10, manual valve II, 11, ring flange I, 12, ring flange II, 13, ring flange III, 14, contaminant filter.
Embodiment
Embodiment one:
See Fig. 1, in figure, waste silicon wafer cast molding silicon ingot directional solidification furnace of the present invention, comprise body of heater 1, enter argon gas pipeline 2 and vacuum lead 3 and vacuum pumping pump unit 4, wherein entering on argon gas pipeline to be provided with gas control ball valve I 5, vacuum lead being provided with gas control ball valve II 6, entering on argon gas pipeline to be parallel with small transfer line I 7, small transfer line I being equipped with manual valve I 8; Vacuum lead is parallel with small transfer line II 9, small transfer line II is equipped with manual valve II 10.Enter argon gas pipeline, between vacuum lead with body of heater respectively by ring flange I, II 11,12 and bolt be fixedly connected with.Be fixedly connected with by ring flange III 13 and bolt between vacuum lead with vacuum pumping pump unit.
Embodiment two:
See Fig. 2, in figure, the present embodiment and embodiment one structural similitude, wherein identical numbering represents same meaning, in structure, same section no longer repeats at this, and its difference is: the present embodiment is provided with contaminant filter 14 between vacuum lead outlet and vacuum pumping pump unit.
The foregoing is only the schematic embodiment of the present invention; and be not used to limit scope of the present invention; the equivalent variations that any those skilled in the art makes under the prerequisite not departing from design of the present invention and principle and amendment, all should belong to the scope of protection of the invention.
Claims (5)
1. a waste silicon wafer cast molding silicon ingot directional solidification furnace, comprise body of heater, enter argon gas pipeline and vacuum lead and vacuum pumping pump unit, wherein entering on argon gas pipeline to be provided with gas control ball valve I, vacuum lead is provided with gas control ball valve II, it is characterized in that: described in enter on argon gas pipeline to be parallel with small transfer line I, small transfer line I is equipped with manual valve I; Described vacuum lead is parallel with small transfer line II, small transfer line II is equipped with manual valve II.
2. waste silicon wafer cast molding silicon ingot directional solidification furnace according to claim 1, is characterized in that: be provided with contaminant filter between described vacuum lead outlet and vacuum pumping pump unit.
3. waste silicon wafer cast molding silicon ingot directional solidification furnace according to claim 1, is characterized in that: described in enter argon gas pipeline and be connected by ring flange I and fastening piece with between body of heater.
4. waste silicon wafer cast molding silicon ingot directional solidification furnace according to claim 1, is characterized in that: described vacuum lead is connected by ring flange II and fastening piece with between body of heater.
5. waste silicon wafer cast molding silicon ingot directional solidification furnace according to claim 1, be is characterized in that: be connected by ring flange III and fastening piece between described vacuum lead with vacuum pumping pump unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510447445.9A CN105040098A (en) | 2015-07-28 | 2015-07-28 | Directional solidification furnace for casting and forming waste silicon pieces into silicon ingots |
Applications Claiming Priority (1)
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CN201510447445.9A CN105040098A (en) | 2015-07-28 | 2015-07-28 | Directional solidification furnace for casting and forming waste silicon pieces into silicon ingots |
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CN105040098A true CN105040098A (en) | 2015-11-11 |
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CN201510447445.9A Pending CN105040098A (en) | 2015-07-28 | 2015-07-28 | Directional solidification furnace for casting and forming waste silicon pieces into silicon ingots |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN201096251Y (en) * | 2007-10-16 | 2008-08-06 | 上海华虹Nec电子有限公司 | Vacuum device exhaust piping |
CN201924103U (en) * | 2010-11-26 | 2011-08-10 | 安阳市凤凰光伏科技有限公司 | Pneumatic and manual valve for polycrystalline silicon ingot unidirectional solidification furnace |
CN202047171U (en) * | 2011-04-26 | 2011-11-23 | 安阳市凤凰光伏科技有限公司 | Novel argon inlet pipeline for polycrystalline ingot furnace |
CN202072798U (en) * | 2011-04-26 | 2011-12-14 | 安阳市凤凰光伏科技有限公司 | Novel compressed air pipeline for polycrystal ingot furnace |
CN202360360U (en) * | 2011-11-09 | 2012-08-01 | 唐山海泰新能科技有限公司 | Vacuum system of polycrystalline ingot casting equipment |
CN204959082U (en) * | 2015-07-28 | 2016-01-13 | 浙江羿阳太阳能科技有限公司 | Old and useless silicon chip casting shaping directional solidification furnace for silicon bulk |
-
2015
- 2015-07-28 CN CN201510447445.9A patent/CN105040098A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201096251Y (en) * | 2007-10-16 | 2008-08-06 | 上海华虹Nec电子有限公司 | Vacuum device exhaust piping |
CN201924103U (en) * | 2010-11-26 | 2011-08-10 | 安阳市凤凰光伏科技有限公司 | Pneumatic and manual valve for polycrystalline silicon ingot unidirectional solidification furnace |
CN202047171U (en) * | 2011-04-26 | 2011-11-23 | 安阳市凤凰光伏科技有限公司 | Novel argon inlet pipeline for polycrystalline ingot furnace |
CN202072798U (en) * | 2011-04-26 | 2011-12-14 | 安阳市凤凰光伏科技有限公司 | Novel compressed air pipeline for polycrystal ingot furnace |
CN202360360U (en) * | 2011-11-09 | 2012-08-01 | 唐山海泰新能科技有限公司 | Vacuum system of polycrystalline ingot casting equipment |
CN204959082U (en) * | 2015-07-28 | 2016-01-13 | 浙江羿阳太阳能科技有限公司 | Old and useless silicon chip casting shaping directional solidification furnace for silicon bulk |
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Application publication date: 20151111 |