CN105034345A - Dual-vibration-ultrasound micro-nano embossing molding device - Google Patents
Dual-vibration-ultrasound micro-nano embossing molding device Download PDFInfo
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- CN105034345A CN105034345A CN201510324951.9A CN201510324951A CN105034345A CN 105034345 A CN105034345 A CN 105034345A CN 201510324951 A CN201510324951 A CN 201510324951A CN 105034345 A CN105034345 A CN 105034345A
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Abstract
The invention discloses a dual-vibration-ultrasound micro-nano embossing molding device. The dual-vibration-ultrasound micro-nano embossing molding device comprises a lower embossing mold and an upper embossing mold which are coaxially arranged oppositely. When getting close to each other, the lower embossing mold and the upper embossing mold act on the upper surface and the lower surface of a polymer substrate respectively. An upper ultrasonic vibration generating device is arranged on the back face of the upper embossing mold. A lower ultrasonic vibration generating device is arranged on the back face of the lower embossing mold. The polymer substrate is fixed to horizontally-arranged substrate supporting plates. By means of the dual-vibration-ultrasound micro-nano embossing molding device, double-face molding can be achieved through one-time embossing, thermal stress can be prevented from being generated in the cooling releasing process, the upper mold and the lower mold can be automatically released, and high-efficiency, high-quality and high-automation embossing molding of a polymer micro-nano structure can be achieved.
Description
Technical field
The present invention relates to micro-nano imprint forming technique, particularly relate to the ultrasonic micro-nano embossing building mortion of a kind of two vibration.
Background technology
Polymer micro-nano impression forming technique is proposed in nineteen ninety-five by S.Y.Chou, and have low cost, high efficiency and high-resolution advantage, be applicable to shaping of micro polymer micro-nano structure.The essence of this technology is the process that liquid polymer fills cavity body of mould and the demoulding of polymer cooling curing.Current three kinds of typical micro-nano imprint forming techniques comprise: hot padding forming technique, ultra-violet curing impression forming technique and Microcontact printing forming technique.Its technical process mainly comprises: the making of (1) mould, usual employing optical lithography makes the mould seal with micron size features, and the electron beam that employing machining accuracy is higher, ion beam etching fabrication techniques have the mould seal of nano-grade size feature.(2) to exert pressure filling, mould is placed in and is heated to temperature higher than the polymer matrix film of glass transition temperature applies pressure, make polymer fully fill mould cavity.(3) cooling and demolding, when thing temperature to be polymerized drops to below glass transition temperature, polymer starts solidification, obtains and have micro-nano structure polymer device after the demoulding.
Utilize the polymers micro-devices that micro-nano imprint technology is shaped, its characteristic size is in micro-nano magnitude, and device architecture is very fragile.Adopt traditional one side stamping technique, when processing second, inevitably damage the micro nano structure machined, this certainly can affect shaping rate and the crudy of micro-nano embossing device.Therefore, the technology of seeking a kind of once-forming dual-side imprinting seems particularly important.
Adopt one side stamping technique, polymers micro-devices is when the demoulding, and device is more much bigger than the coefficient of thermal expansion coefficient of mould, and polymers micro-devices can produce larger stress after the cooling period and concentrate, and therefore the demoulding can have a strong impact on the forming quality of micro-nano structure.So will address this problem, the thermal coefficient of expansion of polymer during the demoulding will be reduced as far as possible, and make the amount of contraction of itself and mould suitable.
Summary of the invention
The present invention provides a kind of ultrasonic micro-nano embossing building mortion of two vibration that can realize once impressing two-sides forming for solving in known technology the technical problem that exists.
The technical scheme that the present invention takes for the technical problem existed in solution known technology is: the ultrasonic micro-nano embossing building mortion of a kind of two vibration, comprise the lower stamping die tool and upper impressing mould that are coaxially oppositely arranged, when described lower stamping die tool and described upper impressing mould close to each other time, act on upper surface and the lower surface of polymer matrix film respectively, the back side of impressing mould is provided with ultrasonic vibration generating means on described, be provided with lower ultrasonic vibration generating means at the back side of described lower stamping die tool, described polymer matrix film is fixed on horizontally disposed substrate support plate.
The upper surface of described polymer matrix film is provided with substrate block, and described substrate block is fixedly connected with described substrate support plate.
Described substrate support plate is provided with the vertical guide pillar be slidably connected with it, and described vertical guide pillar is fixed on the base of frame, between the base and described substrate support plate of described frame, be provided with back-moving spring.
Described lower ultrasonic vibration generating means is arranged on the base of described frame, and described upper ultrasonic vibration generating means is arranged on horizontally disposed workbench, and described workbench is provided with and moves up and down drive unit.
The described drive unit that moves up and down comprises the vertical ball-screw arranged, and described ball-screw is driven by motor, and described motor and described ball-screw are arranged in frame, and nut and the described workbench of described ball-screw are affixed.
Described upper ultrasonic vibration generating means comprises interconnective upper amplifier and upper supersonic generator, and described upper supersonic generator is arranged on described workbench, and described upper amplifier is connected with described upper impressing mould by upper tool heads; Described lower ultrasonic vibration generating means comprises interconnective lower amplifier and lower supersonic generator, and described lower supersonic generator is arranged on the base of described frame, and described lower amplifier is connected with described lower stamping die tool by lower tool heads.
The advantage that the present invention has and good effect are:
One) owing to have employed the structure of upper and lower ultrasonic two vibration, make upper and lower two formative interface of polymer absorb ultrasonic energy consistent, realize interface heat balance, make the impression quality of polymers micro-devices improve and improve.
Two) substrate is fixed by polymer matrix film block, prevents its thermal stress larger with generation during cooling and demolding of trembling, improves shaping and the demoulding quality of polymers micro-devices.
Three), during the demoulding, workbench moves upward and makes impressing mould and upper surface automatic demoulding, and lower surface and lower stamping die tool also realize automatic demoulding under the effect of back-moving spring.The introducing of back-moving spring both improve demoulding efficiency, also indirectly improve impression production efficiency.
In sum, the present invention once can impress two-sides forming, avoids the generation of thermal stress in cooling and demolding process, realizes upper/lower die automatic demoulding, realizes the high efficiency of micro polymer micro-nano structure, high-quality, and increasingly automated impression is shaped.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the partial schematic diagram that the upper and lower impressing mould of the present invention compresses polymer matrix film;
Fig. 3 is the present invention when applying, after ultrasonic vibration stops, and the partial schematic diagram of polymer matrix film micro-structure forming;
Fig. 4 is the polymer device schematic diagram adopting the present invention to impress shaping.
In figure: 1-motor, 2-shaft coupling, 3-ball-screw, 4-gusset, 5-workbench, the upper supersonic generator of 6-, the upper amplifier of 7-, the upper tool heads of 8-, the upper impressing mould of 9-, 10-polymer matrix film, 11-substrate block, 12-substrate support plate, 13-linear bearing, the vertical guide pillar of 14-, 15-lower stamping die tool, tool heads under 16-, amplifier under 17-, supersonic generator under 18-, 19-back-moving spring, the nut of 20-ball-screw, 21-frame.
Detailed description of the invention
For summary of the invention of the present invention, Characteristic can be understood further, hereby exemplify following examples, and coordinate accompanying drawing to be described in detail as follows:
Refer to Fig. 1 ~ Fig. 4, the ultrasonic micro-nano embossing building mortion of a kind of two vibration, comprise the lower stamping die tool 15 and upper impressing mould 9 that are coaxially oppositely arranged, when described lower stamping die tool 15 and described upper impressing mould 9 close to each other time, act on upper surface and the lower surface of polymer matrix film 10 respectively, the back side of impressing mould 9 is provided with ultrasonic vibration generating means on described, be provided with lower ultrasonic vibration generating means at the back side of described lower stamping die tool 15, described polymer matrix film 10 is fixed on horizontally disposed substrate support plate 12.
The present invention adopts ultrasonic wave vibrotechnique, when applying ultrasonic vibration at polymer surfaces, fast vibration can be there is in the particle at polymer matrix film and impressing mould contact surface place by ultrasonic excitation, and rub because vibration produces, make the temperature at polymer matrix film and impressing mould contact surface place raise rapidly thus realize the melting of polymer.In dual-side imprinting process, adopt the ultrasonic impression of two vibration up and down, the equilibrium of upper and lower interface heat can being realized, avoiding ultrasonic wave in transmittance process because running into barrier generation energy attenuation, and then avoid polymer matrix film upper and lower surface to produce temperature contrast.
In the present embodiment, the upper surface of described polymer matrix film 10 is provided with substrate block 11, described substrate block 11 is fixedly connected with described substrate support plate 12.Described substrate support plate 12 is provided with the vertical guide pillar 14 be slidably connected with it, and described vertical guide pillar 14 is fixed on the base of frame 21, between the base and described substrate support plate 12 of described frame 21, be provided with back-moving spring 19.Described lower ultrasonic vibration generating means is arranged on the base of described frame 21, and described upper ultrasonic vibration generating means is arranged on horizontally disposed workbench 5, and described workbench 5 is provided with and moves up and down drive unit.The described drive unit that moves up and down comprises the vertical ball-screw 3 arranged, and described ball-screw 3 is driven by motor 1, and output shaft and the ball-screw 3 of motor 1 adopt shaft coupling 2 to be connected.Described motor 1 and described ball-screw 3 are arranged in frame 21, and the nut 20 of described ball-screw 3 is affixed with described workbench 5.Described upper ultrasonic vibration generating means comprises interconnective upper amplifier 7 and upper supersonic generator 6, and described upper supersonic generator 6 is arranged on described workbench 5, and described upper amplifier 7 is connected with described upper impressing mould 9 by upper tool heads 8; Described lower ultrasonic vibration generating means comprises interconnective lower amplifier 17 and lower supersonic generator 18, described lower supersonic generator 18 is arranged on the base of described frame 21, and described lower amplifier 17 is connected with described lower stamping die tool 15 by lower tool heads 16.The effect of supersonic generator produces ultrasonic wave, and the major function of ultrasonic amplifier is the amplitude expanding vibration end face, and by energy transferring to tool heads, the ultrasonic wave of certain amplitude and frequency is passed to workpiece by tool heads.Above-mentioned workbench 5 is provided with gusset 4, to increase the rigidity of workbench.
Polymer matrix film 10 is fixed on substrate support plate 12 by substrate block 11, substrate support plate 12 two ends are connected with vertical guide pillar 14 by linear bearing 13, therefore substrate support plate 12 vertically can do linear relative movement by guide pillar 14, the lower surface of substrate support plate 12 is provided with back-moving spring 19, can lower stamping die tool 15 is made when the demoulding to be automatically separated with the lower surface of polymer matrix film 10.
The course of work of the present invention:
1) motor 1 is opened, the nut 20 that motor 1 rotarily drives on ball-screw upwards does rectilinear motion, workbench 5 is promoted to stroke peak, close motor 1, upper impressing mould 9 is arranged in upper tool heads 8, lower stamping die tool 15 is arranged on lower tool heads 16, and polymer matrix film 19 is placed on substrate support plate 12, and fixes with substrate block 11.
2) again open motor 1, make the nut 20 on ball-screw do rectilinear motion downwards, drive workbench 5 and the upper impressing mould 9 be connected with its lower surface move downward.After upper impressing mould 9 contacts with polymer matrix film 10, polymer matrix film 10 will be driven to move downward together with substrate support plate 12, until after impressing mould clamps polymer matrix film 10 up and down, locking motor 1, now, back-moving spring 19 is compressed, as shown in Figure 2.
3) supersonic generator 6 and lower supersonic generator 18 in unlatching.Start to produce ultrasonic vibration, keep pressure constant, polymer matrix film 10 is out of shape and fully fills the die cavity of lower stamping die tool 15 and upper impressing mould 8, as shown in Figure 3.
4) ultrasonic wave vibration is stopped, when polymer temperature is down to below glass transition temperature, pressurize a period of time, open motor 1, workbench 5 is promoted to peak, now substrate support plate 12 under the restoring force effect of back-moving spring 19 on move, polymer matrix film 10 completes automatic demoulding.
Unclamp substrate block 11, take out the polymers micro-devices with dual-side imprinting shaped structure of completion of processing, as shown in Figure 4.
Compared with previous typical micro-nano imprint forming technique, above-mentioned building mortion has done corresponding improvement in the following aspects:
1) structure of mould-polymer matrix film-mould is adopted to realize once impressing two-sides forming, this building mortion can be used for processing the polymer device with double-side micro structure, avoid by conventional method when processing second, the micro nano structure machined on face is damaged, improves crudy and the efficiency of imprinting device.
2) adopt upper and lower ultrasonic two vibration, overcome single ultrasonic wave because meeting the drawback of barrier energy attenuation, make polymer realize balancing energy in upper and lower surface, the impression quality of polymers micro-devices improves and improves.
3) polymer matrix film can be fixed by the use of substrate block, prevent polymer matrix film from because trembling, relative displacement occurring, avoid polymer matrix film to produce larger thermal stress because of excess shrinkage during follow-up cooling, improve forming quality and the demoulding quality of polymers micro-devices.
4) use of back-moving spring, after making the upper surface demoulding of polymer matrix film, lower surface and lower stamping die tool automatic demoulding, can avoid people to be the destruction of the demoulding to micro nano structure, thus improve demoulding efficiency and impression forming quality.
Although be described the preferred embodiments of the present invention by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned detailed description of the invention; above-mentioned detailed description of the invention is only schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present invention; do not departing under the ambit that present inventive concept and claim protect, can also make a lot of form, these all belong within protection scope of the present invention.
Claims (6)
1. the ultrasonic micro-nano embossing building mortion of two vibration, it is characterized in that, comprise the lower stamping die tool and upper impressing mould that are coaxially oppositely arranged, when described lower stamping die tool and described upper impressing mould close to each other time, act on upper surface and the lower surface of polymer matrix film respectively, the back side of impressing mould is provided with ultrasonic vibration generating means on described, and be provided with lower ultrasonic vibration generating means at the back side of described lower stamping die tool, described polymer matrix film is fixed on horizontally disposed substrate support plate.
2. the ultrasonic micro-nano embossing building mortion of two vibration according to claim 1, it is characterized in that, the upper surface of described polymer matrix film is provided with substrate block, and described substrate block is fixedly connected with described substrate support plate.
3. the ultrasonic micro-nano embossing building mortion of two vibration according to claim 2, it is characterized in that, described substrate support plate is provided with the vertical guide pillar be slidably connected with it, described vertical guide pillar is fixed on the base of frame, between the base and described substrate support plate of described frame, be provided with back-moving spring.
4. the ultrasonic micro-nano embossing building mortion of two vibration according to claim 3, it is characterized in that, described lower ultrasonic vibration generating means is arranged on the base of described frame, described upper ultrasonic vibration generating means is arranged on horizontally disposed workbench, and described workbench is provided with and moves up and down drive unit.
5. the ultrasonic micro-nano embossing building mortion of two vibration according to claim 4, it is characterized in that, the described drive unit that moves up and down comprises the vertical ball-screw arranged, described ball-screw is driven by motor, described motor and described ball-screw are arranged in frame, and nut and the described workbench of described ball-screw are affixed.
6. the ultrasonic micro-nano embossing building mortion of two vibration according to claim 3, it is characterized in that, described upper ultrasonic vibration generating means comprises interconnective upper amplifier and upper supersonic generator, described upper supersonic generator is arranged on described workbench, and described upper amplifier is connected with described upper impressing mould by upper tool heads; Described lower ultrasonic vibration generating means comprises interconnective lower amplifier and lower supersonic generator, and described lower supersonic generator is arranged on the base of described frame, and described lower amplifier is connected with described lower stamping die tool by lower tool heads.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107413871A (en) * | 2017-09-28 | 2017-12-01 | 中国地质大学（武汉） | A kind of composite ultraphonic vibration aids in micro- extrusion molding process equipment |
| CN107856427A (en) * | 2017-11-24 | 2018-03-30 | 华中科技大学 | A kind of ultrasonic vibration assistant metal coin chapter impressing building mortion and method |
| CN108297440A (en) * | 2018-01-17 | 2018-07-20 | 天津大学 | The three-dimensional adjustable clamp of ultrasonic microwelding coining |
| CN110361928A (en) * | 2018-04-11 | 2019-10-22 | 长春工业大学 | A kind of imprinting apparatus and method of two dimension ancillary vibration |
| CN110434191A (en) * | 2019-09-09 | 2019-11-12 | 长春理工大学 | A kind of two-way coining pore-forming circular cone pressure head centering detection and bearing calibration |
| CN114261947A (en) * | 2021-12-22 | 2022-04-01 | 东北林业大学 | Method for processing nano periodic structure by using vibration-assisted needle point track motion |
| CN114355725A (en) * | 2021-12-29 | 2022-04-15 | 苏州印象镭射科技有限公司 | Double-sided UV (ultraviolet) imprinting device for transparent film |
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| CN101863122A (en) * | 2010-05-18 | 2010-10-20 | 浙江大学 | Ultraphonic auxiliary micro-nano embossing forming device |
| WO2015048017A1 (en) * | 2013-09-27 | 2015-04-02 | 3M Innovative Properties Company | Dual-sided structured film articles |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107413871A (en) * | 2017-09-28 | 2017-12-01 | 中国地质大学（武汉） | A kind of composite ultraphonic vibration aids in micro- extrusion molding process equipment |
| CN107856427A (en) * | 2017-11-24 | 2018-03-30 | 华中科技大学 | A kind of ultrasonic vibration assistant metal coin chapter impressing building mortion and method |
| CN108297440A (en) * | 2018-01-17 | 2018-07-20 | 天津大学 | The three-dimensional adjustable clamp of ultrasonic microwelding coining |
| CN108297440B (en) * | 2018-01-17 | 2023-06-13 | 天津大学 | Three-dimensional adjustable clamp for ultrasonic micro-welding impression |
| CN110361928A (en) * | 2018-04-11 | 2019-10-22 | 长春工业大学 | A kind of imprinting apparatus and method of two dimension ancillary vibration |
| CN110434191A (en) * | 2019-09-09 | 2019-11-12 | 长春理工大学 | A kind of two-way coining pore-forming circular cone pressure head centering detection and bearing calibration |
| CN110434191B (en) * | 2019-09-09 | 2020-10-13 | 长春理工大学 | Centering detection and correction method for bidirectional coining pore-forming conical pressure head |
| CN114261947A (en) * | 2021-12-22 | 2022-04-01 | 东北林业大学 | Method for processing nano periodic structure by using vibration-assisted needle point track motion |
| CN114261947B (en) * | 2021-12-22 | 2024-05-14 | 东北林业大学 | Method for processing nano periodic structure by utilizing vibration-assisted needle point track motion |
| CN114355725A (en) * | 2021-12-29 | 2022-04-15 | 苏州印象镭射科技有限公司 | Double-sided UV (ultraviolet) imprinting device for transparent film |
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