CN105032308B - The charging reaction device to be cleaned in being produced for electronic chemical product - Google Patents
The charging reaction device to be cleaned in being produced for electronic chemical product Download PDFInfo
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- CN105032308B CN105032308B CN201510462556.7A CN201510462556A CN105032308B CN 105032308 B CN105032308 B CN 105032308B CN 201510462556 A CN201510462556 A CN 201510462556A CN 105032308 B CN105032308 B CN 105032308B
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Abstract
It is relatively low using charging reaction appliance arrangement complexity, the production efficiency of strong oxidizing property gas removal of impurities to solve the problems, such as to use at present it is an object of the invention to provide the charging reaction device to be cleaned in a kind of production for electronic chemical product.Described charging reaction device includes packed tower, the filler above screen in packed tower inner chamber can make strong oxidizing property gas and the abundant haptoreaction of material liquid to be processed, packed tower can complete the oxidation reaction of Strong oxdiative gas and impurity and separating for foreign gas and material liquid by cocurrent cooling operation or counter-current operation, one-level packed tower realizes gas liquid reaction and waste gas discharge simultaneously, equipment is simple, and production efficiency is high.The packed tower more than two-stage that the liquid outlet of upper level packed tower in adjacent two-stage packed tower connects with the inlet of next stage packed tower, the removal of impurity can more thoroughly be gone by the series connection of multiple packed towers.
Description
Technical field
It is more particularly to a kind of to be used for electronic chemical product the present invention relates to the charging reaction device field of production electronic chemical product
The charging reaction device to be cleaned in production.
Background technology
Electronic chemical product is key basic chemical industry material on a large scale, in super large-scale integration manufacturing process, it
Purity and cleanliness factor have highly important influence to the yield rate of integrated circuit, electric property and reliability, current domestic
Go in deimpurity method employed in the production process of electronic chemical product, including removed by oxidation reaction altering impurity boiling point
Miscellaneous method, this method be first with oxides impurity with formed boiling point be less than electronic chemical product raw material impurity so that
Impurity can be gasified when electronic chemical product raw material keeps liquid, then that the impurity of gasification and the electronic chemical product of liquid is former
Material separation.
The oxide used in the prior art is generally potassium permanganate, hydrogen peroxide etc., but uses such compound oxidation
New impurity can be brought after reaction into, it, which is carried out, using the gas oxidation impurities with strong oxidizing property, which reduces its boiling point, to bring into
New impurity, therefore, it is optimal selection to reduce impurity boiling point using the gas of strong oxidizing property, but due to the gas of strong oxidizing property
Chemical property is very active, is corrosivity, hypertoxicity gas mostly, and operating and using all has certain danger, and current
In production to realize this impurity-removing method, generally use carries out gas liquid reaction in a kettle, then again by reacted gas
Body and solution are separated in rectifying column, and this mode needs two kinds of different equipment to coordinate and could realize, thus equipment is answered
It is miscellaneous, it is not easy to operate, and oxidation reaction and separation are respectively completed in two equipment, cause production efficiency relatively low.
The content of the invention
It is an object of the invention to provide the charging reaction device to be cleaned in a kind of production for electronic chemical product, to solve mesh
The problem of preceding charging reaction appliance arrangement using the removal of impurities of strong oxidizing property gas that uses is complicated, production efficiency is relatively low.
The technical scheme is that：The charging reaction device to be cleaned in a kind of production for electronic chemical product, its feature
It is：Described charging reaction device includes packed tower, and the packed tower includes inner chamber, the screen being fixed in inner chamber, is located at
The filler above the screen in inner chamber, packed tower have inlet, liquid outlet, below the screen in corresponding packed tower
Air inlet, locate in the vertical direction in the gas outlet on the top of corresponding packed tower, the wherein inlet of packed tower and liquid outlet
In the both sides of the screen of corresponding packed tower, the packed tower be one-level packed tower or be in adjacent two-stage packed tower upper one
The packed tower more than two-stage that the liquid outlet of level packed tower connects with the inlet of next stage packed tower.
The packed tower is packed tower more than two-stage, and the inlet of first order packed tower is on screen and close to going out
Gas port position, liquid outlet are in below screen, and the liquid outlet of the packed tower of afterbody is on screen and close to gas outlet
Position, inlet are under screen.
The inlet of first order packed tower is higher than the inlet and liquid outlet of other any one-level packed towers.
The filler tower structure at different levels is identical, the height of first order packed tower higher than afterbody packed tower height or
The height of packed towers at different levels it is identical and by padded first order packed tower so that the inlet of first order packed tower is higher than last
The liquid outlet of level packed tower.
Described at least one packed tower is the split type packed tower being made up of upper and lower two sections, the split type packed tower
The screen connector for being detachably fixed and being connected with screen is fixed with the top of the bottom of upper section part and lower section part, it is split type to fill out
Expect to be respectively arranged with sealing gasket between the screen and screen connector of tower.
The screen of described split type packed tower is connected by screw bolts with screen connector.
The gas outlet of described at least one packed tower is arranged on the center of top sealing structure cross section.
The gas outlet of described at least one packed tower is sealedly and fixedly connected has gas treatment equipment respectively.
The top sealing structure of described at least one packed tower is closure, be fixed at the top of packed tower can with closure
Dismantle the closure connector being fixedly connected and the sealing gasket being arranged between closure connector and closure.
The sealed bottom structure of described at least one packed tower is close with the non-dismountable bottom that is fixedly connected of packed tower
Capping.
Beneficial effects of the present invention are：Described charging reaction device includes packed tower, and packed tower has inlet, goes out liquid
Mouthful, the air inlet below the screen in corresponding packed tower, in the gas outlet on the top of corresponding packed tower, wherein packed tower
Inlet and liquid outlet can make strong oxidizing property in the both sides of screen, the filler above screen in packed tower inner chamber
Gas and the abundant haptoreaction of material liquid to be processed, when inlet is on screen, packed tower can work as feed liquor with counter-current operation
When mouth is below screen, packed tower can be with cocurrent cooling operation, and when the reaction unit is one-level packed tower, one-level packed tower passes through
Cocurrent cooling operation or counter-current operation can complete the oxidation reaction and point of foreign gas and material liquid of Strong oxdiative gas and impurity
From simultaneously with traditional compared with by the way of reactor and rectifying column coordinate, one-level packed tower realizes gas liquid reaction and given up
Gas is discharged, and equipment is simple, and production efficiency is relatively low.It is upper level packed tower in adjacent two-stage packed tower to be when the reaction unit
The two-stage that is connected with the inlet of next stage packed tower of liquid outlet more than packed tower when, can by the series connection of multiple packed towers
More thoroughly to go the removal of impurity.
Further, the inlet of the first order packed tower of packed tower more than described two-stage is on screen simultaneously
It is in close to gas outlet position, liquid outlet below screen, the liquid outlet of the packed tower of afterbody is on screen and close
Gas outlet position, inlet are under screen.The liquid outlet of afterbody packed tower is arranged on above screen and close to outlet
Mouth makes the not too fast outflow of material liquid of two-stage filling tank, can control the reaction time of material liquid in packed tower, make strong oxidizing property
Gas effciency is high, and impurity removes thorough.
Further, the inlet of the first order packed tower of the packed tower more than two-stage is higher than other any one-levels
The liquid outlet and inlet of packed tower, material liquid enter from the inlet of first order packed tower, obtained after multistage purification
Scavenging solution flows out from the liquid outlet of the packed tower of afterbody, using the principle of linker, realizes material liquid and is filled out in the first order
Flowed from top to bottom in material tower, one-level packed tower to the end is entered after middle multi-stage packed tower impurity removal reaction and is flowed from bottom to top
Dynamic, material liquid does not need pump input, pump output from the whole process for entering outflow, avoids secondary pollution of the pump to product,
Reduce production cost.
Further, the height structure of the packed towers at different levels of the packed tower more than two-stage is all identical, simplifies production
Process, facilitate batch micro operations, reduce production cost.
Further, described at least one packed tower is described point by the upper and lower two split type packed towers that form of section
The screen company for being detachably fixed and being connected with screen is fixed with the top of the bottom of the upper section part of body formula packed tower and lower section part
Joint, sealing gasket is respectively arranged between the screen and screen connector of split type packed tower, it is possible to achieve above and below packed tower
Two sections are dismantled to facilitate the maintenance of tower body and screen, the maintenance of filler to change.
Further, the gas treatment equipment that the gas outlet seal of described at least one packed tower is fixedly connected, can
Pollution is produced to environment to avoid discharging waste gas.
Brief description of the drawings
Fig. 1 is the general assembly view of the present invention；
Fig. 2 is the zoomed-in view of A in Fig. 1；
Fig. 3 is the zoomed-in view of B in Fig. 1；
Fig. 4 is the screen part drawing in Fig. 1.
Embodiment
Embodiment 1：As Figure 1-Figure 4, charging reaction device of the present invention, strong oxidizing property gas used are fluorine
Gas, described charging reaction device include structure identical highly different first order packed tower 2 and second level packed tower 8, and first
Level packed tower 2, second level packed tower 8 are the split type packed tower of pipe vertical, by upper section tower body, lower section tower body two parts group
Into the bottom that tower body is saved under first and second grade of packed tower is respectively and fixedly provided with sealing structure, and sealing structure is sealed bottom lid 6, and bottom is close
Capping 6 is welded to connect with saving tower body under the first order, two level packed tower respectively, and the top that tower body is saved on first and second grade of packed tower is equal
Sealing solid welding has a closure connector 7 for being connected with top closure 1 surely, closure connector 7 and top closure 1 it
Between bolt connection, and sealing gasket 11 is provided between top closure 1 and closure connector 7.On first and second grade of packed tower
The inner chamber of section tower body is provided with the filler 4 that fluorine gas and material liquid to be processed can be made fully to contact, upper section tower body and lower section
The screen 5 to be played a supportive role to filler 4 is equipped between tower body, screen 5 is with being arranged on upper section tower body bottom and lower section tower body
The screen connector 3 at top is connected, and screen 5 is clipped between two screen connectors 3, passes through bolt 14, nut 13 and pad 12
Cooperate together, it is possible to achieve the two section dismountings up and down of packed tower are to facilitate the maintenance of tower body, screen 5 and filler 4
Maintenance is changed, and is provided with sealing gasket 9 between screen 5 and screen connector 3 in addition, to ensure the sealing of first and second grade of packed tower
Property, prevent material liquid and fluorine gas from revealing.
First order packed tower 2 has sets gas outlet N4, in upper section tower in the cross-section center position of top closure 1
Body and close to gas outlet N4 positions inlet N1 and be in it is lower section tower body liquid outlet N3 and air inlet N2, the second level fill out
Expect tower 8 with the gas outlet N8, upper section tower body and close gas outlet position set in the cross-section center position of top closure 1
Liquid outlet N7 and be in it is lower section tower body inlet N6 and air inlet N5.The liquid outlet N7 of second level packed tower and first
Level packed tower inlet N1 is equal with the vertical range between the top closure 1 of first order packed tower 2, first order packed tower
Liquid outlet connected with the inlet of second level packed tower by connecting pipe 9, the gas outlet of first and second grade of packed tower respectively with
Gas treatment equipment 10 is sealedly and fixedly connected, and the waste gas of discharge can be avoided to produce pollution to environment.
In production process, first order packed tower counter-current operation, second level packed tower cocurrent cooling operation, material liquid fills out from the first order
Expect that the inlet N1 of tower 2 enters, pass through the filler 4 in first order packed tower 2, while fluorine gas enters from air inlet N2
Fully contacted with material liquid through filler 4 from bottom to top, by oxidation of impurities therein, boiling point is less than the waste gas of material liquid after oxidation
Emission-control equipment is entered by gas outlet N4, treated electronic chemical product purifies thick liquid and goes out liquid by first order packed tower
Mouthful N3 and connecting pipe 9 enter in second level packed tower 8, from bottom to top by the filler 4 in second level packed tower 8, while fluorine
Gas is fully contacted through filler 4 with material liquid from bottom to top from air inlet N5, and further removing impurities by oxidation, will be filled out by the first order
The further exhaustive oxidation of impurity that material tower 2 has not aoxidized, the waste gas of generation are discharged by the gas outlet N8 of second level packed tower 8,
Electronic chemical product scavenging solution after purification overflows from the liquid outlet N7 of second level packed tower 8, and new material liquid is from first order filler
The inlet N1 supplements of tower 2 enter.Handled by the removal of impurities of two-stage packed tower, it is former less than electronic chemical product can to form boiling point
The impurity of material thoroughly removes, while whole reaction unit make use of the principle of linker, and the inlet N1 of first order packed tower is high
Position of the top close to gas outlet of screen is arranged in the liquid outlet N7 of second level packed tower, the liquid outlet N7 of second level packed tower
Put, the material liquid in filler can be made too fast will not to flow out, in the convenient reaction time for controlling material liquid in packed tower, make fluorine gas sharp
High with rate, impurity removes thoroughly, while can realize that material liquid does not need pump input, pump defeated from the whole process for entering outflow
Go out, avoid secondary pollution of the pump to product, reduce production cost.
Embodiment 2：The present embodiment differs only in embodiment 1：Described two-stage packed tower is arranged to structure and height
Spend all identical packed towers, and by padded first order packed tower so that the inlet of first order packed tower is higher than second level filler
The liquid outlet of tower, other parts embodiment is identical with the embodiment of embodiment 1, repeats no more.Two-stage packed tower structure height
All identical structure can simplify the process of production packed tower, facilitate batch micro operations, reduce production cost.
Embodiment 3：The present embodiment differs only in embodiment 2：First order packed tower and second level packed tower it
Between connect at least one-level packed tower, while the structure for the packed tower connected is identical with first and second grade of filler tower structure, is connected
The inlet of packed tower can be identical with first order packed tower with the position of liquid outlet, can also be with second level packed tower phase
Together, other parts embodiment is described identical with embodiment 2, repeats no more.Material liquid can be with by the processing of multistage packed tower
Make its purity higher.
Embodiment 4：The present embodiment differs only in embodiment 1：Pass through between described screen and two packed towers
Welded seal connects, and other parts embodiment is identical with described in embodiment 1, repeats no more.One between screen and packed tower
Design makes installation more simple.
In other embodiments of the invention, the strong oxidizing property gas in above-described embodiment is in addition to can be with fluorine gas,
The gases such as chlorine, tetrafluoride platinum can also be used；Described bolt connection can be in a manner of being fixedly connected of the other forms such as be hinged；
The reaction unit can also use single-stage packed tower to be cleaned to obtain the not high electronic chemical product of purity；By multistage filler
In the reaction unit of tower composition, the inlet of first order packed tower can also be not higher than afterbody liquid outlet, pass through during charging
Being pumped into offer power makes material liquid complete reaction；, can also be by afterbody in the reaction unit be made up of multistage packed tower
The liquid outlet of packed tower is arranged in the lower section of screen, and inlet is arranged on above screen；The shape of packed tower can also be set
Connected into central spherical both ends tubulose, both ends spherical；Sealed bottom lid can also be detachably fixed with two packed towers and be connected；
Top closure can also with two packed towers are non-dismountable is fixedly connected；The present invention can be also used for distillation, rectification method removes
The gas liquid reaction of high-boiling-point impurity.
Claims (7)
- A kind of 1. charging reaction device to be cleaned in production for electronic chemical product, it is characterised in that：Described charging reaction dress Put including packed tower, the packed tower includes inner chamber, is fixed on the screen in inner chamber, being in above screen in inner chamber Filler, packed tower have inlet, liquid outlet, the air inlet below the screen in corresponding packed tower, in corresponding packed tower Top gas outlet, wherein the inlet of packed tower and liquid outlet in the vertical direction in corresponding packed tower screen two Side, the packed tower are the two-stage packed towers that the liquid outlet of first order packed tower and the inlet of second level packed tower connect, the The inlet of one-level packed tower is on screen and is in close to gas outlet position, liquid outlet below screen, second level filler The liquid outlet of tower is on screen and is in close to gas outlet position, inlet under screen, the feed liquor of first order packed tower Mouth is higher than the liquid outlet of second level packed tower.
- 2. charging reaction device according to claim 1, it is characterised in that：Described packed tower is to be made up of upper and lower two sections Split type packed tower, be fixed with can with screen at the top of the bottom of the upper section part of the split type packed tower and lower section part The screen connector being fixedly connected is dismantled, sealing gasket is respectively arranged between the screen and screen connector of split type packed tower.
- 3. charging reaction device according to claim 2, it is characterised in that：The screen and grid of described split type packed tower Plate connector is connected by screw bolts.
- 4. charging reaction device according to claim 1, it is characterised in that：The gas outlet of described packed tower is arranged on top The center of part sealing structure cross section.
- 5. charging reaction device according to claim 1, it is characterised in that：The gas outlet of described packed tower seals respectively It is fixedly connected with gas treatment equipment.
- 6. charging reaction device according to claim 1, it is characterised in that：The top sealing structure of described packed tower is Closure, it is fixed at the top of packed tower to be detachably fixed the closure connector being connected with closure and be arranged on closure and connects Sealing gasket between joint and closure.
- 7. charging reaction device according to claim 1, it is characterised in that：The sealed bottom structure of described packed tower is With the non-dismountable sealed bottom lid being fixedly connected of packed tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510462556.7A CN105032308B (en) | 2015-07-31 | 2015-07-31 | The charging reaction device to be cleaned in being produced for electronic chemical product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510462556.7A CN105032308B (en) | 2015-07-31 | 2015-07-31 | The charging reaction device to be cleaned in being produced for electronic chemical product |
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| Publication Number | Publication Date |
|---|---|
| CN105032308A CN105032308A (en) | 2015-11-11 |
| CN105032308B true CN105032308B (en) | 2018-04-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510462556.7A Active CN105032308B (en) | 2015-07-31 | 2015-07-31 | The charging reaction device to be cleaned in being produced for electronic chemical product |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2547830B1 (en) * | 1983-06-22 | 1988-04-08 | Inst Francais Du Petrole | PROCESS FOR PRODUCING SUPER FUEL BY POLYMERIZATION OF C4 CUT |
| US4729857A (en) * | 1987-04-27 | 1988-03-08 | Glitsch, Inc. | Liquid distributor for packed tower |
| CN88211365U (en) * | 1988-01-23 | 1988-12-28 | 上海师范大学 | Waste water processing device |
| CN2145790Y (en) * | 1992-11-25 | 1993-11-10 | 上海师范大学 | Air-liquid integration pressure contact oxidation tower |
| CN1037263C (en) * | 1992-12-03 | 1998-02-04 | 中国石油化工总公司石家庄炼油厂 | Method for producing diisobutylene and triisobutene |
| CN104083982A (en) * | 2014-07-15 | 2014-10-08 | 南京大学 | Method for absorbing and recycling medium-high-concentration organic solvent |
| CN204170590U (en) * | 2014-09-30 | 2015-02-25 | 江苏九九久科技股份有限公司 | Multipurpose, efficient, multi-level gas absorption tower |
| CN204952863U (en) * | 2015-07-31 | 2016-01-13 | 多氟多化工股份有限公司 | A reinforced reaction unit for electronizing edulcoration during article of learning are produced |
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Effective date of registration: 20200922 Address after: No.1 Jiaoke Road, Xuheng street, zhongzhan District, Jiaozuo City, Henan Province Patentee after: Henan fluorine based new material technology Co.,Ltd. Address before: 454191, Feng County, Henan Province, Jiaozuo Feng Feng Chemical Industry Zone Patentee before: DO-FLUORIDE CHEMICALS Co.,Ltd. |
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