CN105005107B - A kind of multispectral two-channel photon crystal wave filter of visible region - Google Patents
A kind of multispectral two-channel photon crystal wave filter of visible region Download PDFInfo
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- CN105005107B CN105005107B CN201510479980.2A CN201510479980A CN105005107B CN 105005107 B CN105005107 B CN 105005107B CN 201510479980 A CN201510479980 A CN 201510479980A CN 105005107 B CN105005107 B CN 105005107B
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- 230000005540 biological transmission Effects 0.000 abstract description 5
- 238000010276 construction Methods 0.000 abstract description 5
- 230000005284 excitation Effects 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 4
- 230000000007 visual effect Effects 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 62
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 23
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- 239000012530 fluid Substances 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a kind of multispectral two-channel photon crystal wave filter of visible region, so that filter range breaks through the regular filtering of conventional arrowband multi-channel filter.By Fabry-Perot(Fabry‑Perot)Photon crystal filter is overlapped with the photon crystal filter of short-pass and combined, and forms structure for (A/B/B/A)2B’(A/B/B/A)(yC/xD/yC)nThe photon crystal filter of type, wherein, A refractive index is higher than B, D refractive index is higher than C, B and B ' for the different same material of thickness, n is short-pass photon crystal filter periodicity, n is positive integer, x, y are positive number, keep n to immobilize, and only may be implemented in visual field while producing two different filtering channels by changing x, y value.The present invention is simple in construction, easy to process, has widened passband width, available for two channels filter of each transmission region without linear relationship is prepared, mean transmissivity can effectively improve brightness and the excitation of optical projection system more than 90%.
Description
Technical field
The present invention relates to a kind of photon crystal filter, more particularly to a kind of multispectral two-channel photon of visible region is brilliant
Fluid filter.
Background technology
Photonic crystal is the periodic structure combined by construction unit according to certain queueing discipline.According to medium arrangement side
The difference of formula, can be divided into one-dimensional, two dimension, three-D photon crystal.Forbidden photon band is the most significant feature of photonic crystal, and wavelength is in
The light of forbidden band scope can not be propagated, and this characteristic makes photonic crystal be had a wide range of applications at many aspects, and for example omnirange is anti-
Penetrate mirror, photonic crystal waveguide, photonic crystal fiber, polarizer, wave filter etc..Projection optical system has strict want to light source
Ask, the purity of light source colour decides the quality of projected picture color, in order that the excitation of light source is higher, it is necessary to obtain simultaneously
The light source of two or three wave bands, such as blue light 428nm-449nm and green glow 535nm-590nm, as this wave band is fixed, each band
There is no the filter field of linear relationship between width, requirement is unable to reach using traditional bandpass filter.At present in visible region
The photon crystal filter research of many passbands is very few, and the photon crystal filter of excellent in design is for example filtered for optical projection system
Colour wheel and dichronic mirror, can effectively improve excitation and brightness.
Chen Tao etc.(The development of multi-band linear variable filters, photoelectric project, 2007(34), 72-75)Devise
The multi-channel filter of spectral filtering, this kind of linear filter requires that centre wavelength and channel space position are linear, right
Fixed in each channel position and the filtering demands without linear relationship can not be met.
Gu Peifu(For the Interference filters with multiple transmittance peaks of wavelength-division multiplex system, photon journal, 2003,32(7):837~
839)The multimodal road interference filter for wavelength-division multiplex system has been made in experimental group, but this Fabry-Perot interference is filtered
The filter pass band of mating plate is very narrow, and the steepness of passband edge is bad.
The content of the invention
It is an object of the invention to provide a kind of multispectral two-channel photon crystal wave filter of visible region, so that filtering model
Enclose the regular filtering for breaking through conventional arrowband multi-channel filter.
The principle of the present invention is:In the photonic crystal, if long wave is led into photon crystal filter and short-pass photon
The passband position of crystal filter is overlapped mutually combination, it will a passband occur, regulation short-pass photon crystal filter
Per layer film thickness, the change of the passband position and width of the photon crystal filter after combination can be caused.If using a kind of structure
Fabry-Perot photon crystal filters and short-pass photon crystal filter stack combinations, just will appear from two passbands, together
Sample, regulation short-pass photon crystal filter can cause the passband position of the photon crystal filter after combination per layer film thickness
With the change of width, twin-channel photon crystal filter can be prepared using such characteristic.
A kind of multispectral two-channel photon crystal wave filter of visible region of the present invention is by Fabry-Perot photonic crystals
Wave filter and short-pass photon crystal filter two parts stack combinations are formed.Specifically, the present invention be by structure be (A/B/B/
A)2B ' (A/B/B/A) Fabry-Perot photon crystal filters are (yC/xD/yC) with structurenShort-pass photonic crystal filter
Ripple device superposition composition, the structure after stack combinations is (A/B/B/A)2B’(A/B/B/A)(yC/xD/yC)n。
Wherein, A, B, C and D are the materials for constituting the multispectral two-channel photon crystal wave filter, B ' and B be thickness not
Same same material;n1、n2、n4、n5Respectively materials A, B, C, D refractive index and need meet:n1> n2、n4< n5;d1、d2、d3、
d4、d5Respectively materials A, B, B ', C, D physical thickness and need to meet:d1=0.1136λ0/ n1、d2=0.1136λ0/ n2、d3=
0.2272λ0/ n2、d4=0. 25yλ0/ n4、d5=0.125xλ0/ n5;N is the periodicity of short-pass photon crystal filter, periodicity
N is positive integer;λ0Centered on wavelength;It can change D, C physical thickness by adjusting x, y value;X, y are positive number;Now, whole filter
Total number of plies of ripple device structure is 13+3n.
When A, B, C, D material are determined, hold period number n is constant, only changes D, C physical thickness by adjusting x, y value,
The band logical position of combination photon crystal filter and the change of bandwidth can be caused, so as to realize in visual field while producing two
Different filtering channels.
Wherein, a kind of multispectral two-channel photon crystal wave filter of visible region of construction is preferably used in the present invention
Structure is (A/B/B/A)2B’(A/B/B/A)(yC/xD/yC)n, still, the structure for building wave filter of the present invention is not limited only to
(A/B/B/A)2B’(A/B/B/A)(yC/xD/yC)n, every Fabry-Perot photonic crystals filter with single channel filtering characteristic
Ripple device and the structure of short-pass photon crystal filter superposition all may be used.
The preparation method of this combination photon crystal filter is:Using modes such as plated film or magnetron sputterings, in substrate of glass
On plate materials A, B, B, A of design thickness successively, grow 2 cycles according to the method, continue to plate design on this basis
The material B ' of thickness, then alternately plates materials A, B, B, A of design thickness again;Then continue alternately to plate successively on this basis
C, D, C of upper n cycle design thickness, you can realize two-channel photon crystal wave filter.
Compared with prior art, the present invention it is innovative by simple monocyclic Fabry-Perot photon crystal filters and
Short-pass photon crystal filter stack combinations, for designing two channels filter of each transmission region without linear relationship, make filter
Ripple scope breaks through the regular filtering of conventional arrowband multi-channel filter, with traditional Fabry-Perot multi-channel filter phases
Than, the present invention is simple in construction, easy to process, has widened passband width, and the two channels filter mean transmissivity 90% with
On, brightness and the excitation of optical projection system can be effectively improved.
Brief description of the drawings
Fig. 1 is (A/B/B/A)2The structural representation of B ' (A/B/B/A) type Fabry-Perot photon crystal filters.
In figure, A, B are two kinds of different materials, B ' and the B same material that to be thickness different, d1、d2、d3Respectively A, B,
The physical thickness of B ' materials.(A/B/B/A)2B ' (A/B/B/A) represents two kinds of materials of A, B according to A, B, B, A order growth design
In 2 cycles of thickness, on this basis, B ' is grown to a cycle of design thickness, then on this basis, according to A, B, B, A
Order grows 1 cycle of design thickness.
Fig. 2 is(TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2)Type Fabry-Perot photons are brilliant
The structural representation of fluid filter.
In figure, 1,4,5,8,10,13 layers be TiO2, its physical thickness d1=18nm;2nd, 3,6,7,11,12 layers are PMMA, its
Physical thickness d2=34nm;9 layers are PMMA, its physical thickness d3=67nm。
Fig. 3 is(TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2)Type Fabry-Perot photons are brilliant
The transmission curve figure of fluid filter.
Fig. 4 is(yC/xD/yC)nThe structural representation of type short-pass photon crystal filter.
In figure, C, D are two kinds of different materials, d4、d5It is the thickness of C, D material respectively, can be changed by adjusting x, y value
D, C physical thickness,(yC/xD/yC)nRepresent two kinds of different materials of C, D n periodic arrangement successively.
Fig. 5 is(Al2O3/ZnS/ Al2O3)20The structural representation of type short-pass photon crystal filter.
In figure, 1,3,4,6,7,9,10,12,13,15,16,18,19,21,22,24,25,27,28,30,31,33,34,
36th, 37,39,40,42,43,45,46,48,49,51,52,54,55,57,58,60 layers are Al2O3, its physical thickness d4=70nm;
2nd, 5,8,11,14,17,20,23,26,29,32,35,38,41,44,47,50,53,56,59 layers are ZnS, its physical thickness d5=
27nm。
Fig. 6 is(Al2O3/ZnS/ Al2O3)20The transmission curve figure of type short-pass photon crystal filter.
Fig. 7 is that structure is (A/B/B/A)2B ' (A/B/B/A) types and(yC/xD/yC)nThe photon crystal filter of type is folded
Plus after structural representation.
Fig. 8 is(TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2)(Al2O3/ZnS/ Al2O3)20
The structural representation of type photon crystal filter.
In figure, 1,4,5,8,10,13 layers be TiO2, 2,3,6,7,11,12 layers be PMMA, 9 layers are PMMA, 14,16,17,
19、20、22、23、25、26、28、29、31、32、34、35、37、38、40、41、43、44、46、47、49、50、52、53、55、
56th, 58,59,61,62,64,65,67,68,70,71,73 layers are Al2O3, 15,18,21,24,27,30,33,36,39,42,45,
48th, 51,54,57,60,63,66,69,72 layers are ZnS.
Fig. 9 is(TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2)(Al2O3/ZnS/ Al2O3)20
The transmission curve figure of type photon crystal filter.
Embodiment
Below in conjunction with the embodiment of the present invention, clear, complete description is carried out to the technical scheme in the embodiment of the present invention,
Obviously, described embodiment is only a part of embodiment of the present invention, and those of ordinary skill in the art are not making creation
Property work under the premise of the every other embodiment that is obtained, belong to the scope of the present invention.
Blue light 428nm-449nm and green glow 535nm-590nm dual-passband are realized using photon crystal filter is combined
Photonic crystal filter, situation about now studying assumes incident light vertical incidence photon crystal filter surface.
First, Fabry-Perot single channel photon crystal filters are chosen, preferred structure is (A/B/B/A)2B’(A/B/
B/A), such as Fig. 1.Wherein, A is preferred High Refractive Index Photonic Crystals material silica titanium TiO2(Refractive index n1=2.78), B is excellent
The low-refraction photon crystal material polymetylmethacrylate of choosing(Refractive index n2=1.49), it is different that B ' belongs to thickness from B
Same material, this structure is represented by(TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2), its structure
Schematic diagram such as Fig. 2.
Incident medium is air(Refractive index is 1.00), central wavelength lambda0=440nm, with glass(Refractive index is 1.52)For
Substrate, using vacuum coating equipment in substrate 13 layers of alternate plating successively, 1,4,5,8,10,13 layers be TiO2, its physical thickness
For d1=18nm;2nd, 3,6,7,11,12 layers are PMMA, its physical thickness d2=34nm;9th layer is PMMA, its physical thickness d3=
67nm.Abscissa table in the blue filter that filter range is 428nm-449nm, its characteristic curve such as Fig. 3, figure can now be prepared
The ratio of oscillography length and centre wavelength, ordinate represents the transmitance of light, a width of 21nm of passband half.
Secondly, preferred structure is(yC/xD/yC)nThe short-pass photon crystal filter structure of type, such as Fig. 4.Wherein, C is
It is preferred that low-refraction photon crystal material aluminium oxide Al2O3(Refractive index is n4=1.78), D is preferred high index of refraction photon crystalline substance
Body material cures zinc ZnS(Refractive index is n5=2.29), when taking n=20, this structure is represented by(Al2O3/ZnS/Al2O3)20, its
Structural representation such as Fig. 5.
Adjustment x, y numerical value make Al2O3, ZnS physical thickness be respectively d4=70nm、d5During=27nm, in above-mentioned preparation
On the basis of membrane system, 60 layers of alternate plating successively, 1,3,4,6,7,9,10,12,13,15,16,18,19,21,22,24,25,27,
28th, 30,31,33,34,36,37,39,40,42,43,45,46,48,49,51,52,54,55,57,58,60 layers are Al2O3;2、
5th, 8,11,14,17,20,23,26,29,32,35,38,41,44,47,50,53,56,59 layers are ZnS.One can now be increased
Scope is 535nm-590nm green color passband, its spectral pattern such as Fig. 6, and abscissa represents wavelength and centre wavelength in figure
Ratio, ordinate represents the transmitance of light, a width of 55nm of passband half.
So, it is formed a visible region multispectral twin-channel (A/B/B/A)2B’(A/B/B/A)(yC/xD/
yC)nType photon crystal filter, its structural representation such as Fig. 7.Specific to the present embodiment, the knot of photon crystal filter is combined
Structure is represented by (TiO2/PMMA/PMMA/TiO2)2PMMA(TiO2/PMMA/PMMA/TiO2)(Al2O3/ZnS/Al2O3)20, it is tied
Structure schematic diagram such as Fig. 8,1,4,5,8,10,13 layers be TiO2, its physical thickness d1=18nm;2nd, 3,6,7,11,12 layers are PMMA, its
Physical thickness d2=34nm;9 layers are PMMA, its physical thickness d3=67nm;14、16、17、19、20、22、23、25、26、28、29、
31、32、34、35、37、38、40、41、43、44、46、47、49、50、52、53、55、56、58、59、61、62、64、65、67、
68th, 70,71,73 layers are Al2O3, its physical thickness d4=70nm;15、18、21、24、27、30、33、36、39、42、45、48、51、
54th, 57,60,63,66,69,72 layers are ZnS, its physical thickness d5=27nm。
So it is achieved that blue light 428nm-449nm and green glow 535nm-590nm dual-passband photonic crystal filters, combination
Photonic crystal properties curve map is as shown in figure 9, abscissa represents wavelength and the ratio of centre wavelength in figure, and ordinate represents light
Transmitance.
It should be noted that:A kind of multispectral two-channel photon crystal of visible region of construction is preferably used in the present invention
The materials A of wave filter, B, C, D are respectively TiO2、PMMA、Al2O3, ZnS, still, for building the material of wave filter of the present invention not
It is only limitted to TiO2、PMMA、Al2O3, ZnS, every refractive index for meeting A is higher than B refractive index, and D refractive index is higher than C refraction
The material of rate all can, be not necessarily to limit A, B, C, D refractive index.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized with other concrete forms.Therefore, no matter from
From the point of view of which point.Embodiment all should be regarded as exemplary, and nonrestrictive, the scope of the present invention is by appended claims
Rather than described above is limited, it is intended that all changes capsule in the implication and scope of the equivalency of claim will be fallen
Include in the present invention.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narration of specification is only that for clarity, those skilled in the art will should say
Bright book is as an entirety, and the technical scheme in embodiment also can be appropriately combined, formed it will be appreciated by those skilled in the art that
Other embodiment.
Claims (2)
1. a kind of multispectral two-channel photon crystal wave filter of visible region, it is characterised in that the multispectral two-channel photon
Crystal filter is formed by stacking by Fabry Perot photon crystal filter and short-pass photon crystal filter, described multispectral
The structure of two-channel photon crystal wave filter is (A/B/B/A)2B’(A/B/B/A)(yC/xD/yC)n, wherein, A, B, C and D are structures
Into the material of the multispectral two-channel photon crystal wave filter, B ' and the B same material that to be thickness different;n1、n2、n4、n5Point
Not Wei materials A, B, C, D refractive index, and need meet:n1> n2、n4< n5;d1、d2、d3、d4、d5Respectively materials A, B, B ', C,
D physical thickness, and need to meet:d1=0.1136λ0/ n1、d2=0.1136λ0/ n2、d3=0.2272λ0/ n2、d4=0. 25yλ0/ n4、
d5=0.125xλ0/ n5;N is the periodicity of short-pass photon crystal filter, and periodicity n is positive integer;λ0Centered on wavelength;x、
Y is positive number.
2. the multispectral two-channel photon crystal wave filter of visible region according to claim 1, it is characterised in that the method
FP photon crystal filter structure is (A/B/B/A)2B ' (A/B/B/A), the short-pass photon crystal filter knot
Structure is (yC/xD/yC)n。
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