CN104979156A - Beam adjusting device - Google Patents
Beam adjusting device Download PDFInfo
- Publication number
- CN104979156A CN104979156A CN201510410785.4A CN201510410785A CN104979156A CN 104979156 A CN104979156 A CN 104979156A CN 201510410785 A CN201510410785 A CN 201510410785A CN 104979156 A CN104979156 A CN 104979156A
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- China
- Prior art keywords
- iron core
- core section
- core
- core packet
- packet
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention belongs to the technical field of beam adjusting devices and particularly relates to a beam adjusting device, which comprises an iron core and two first coils, wherein the iron core comprises an upper iron core section and a lower iron core section; front and rear ends of the upper iron core section and the lower iron core section are connected via a front iron core section and a rear iron core section respectively; the upper iron core section, the lower iron core section, the front iron core section and the rear iron core section form a through hole; the two first coils are embedded in the upper iron core section and the lower iron core section respectively; and the front iron core section and the rear iron core section are sleeved with a second coil respectively. Compared with the prior art, as the front iron core section and the rear iron core section are sleeved with the second coil respectively, through adjusting the current direction and the current magnitude of the two second coils, a drum-shaped magnetic field between pole heads of a secondary magnet can be corrected, the magnetic field between the pole heads becomes a completely-uniform linear magnetic field, the section of a ribbon beam can always be in a straight line shape when the beam passes, post transmission and control of the beam are facilitated, and uniformity of an injected sample can be ensured.
Description
Technical field
The invention belongs to Beam-Conditioning Device technical field, particularly relate to a kind of can make line by time banded line cross sectional shape keep the Beam-Conditioning Device of rectilinear form.
Background technology
Secondary magnet (or claiming Beam-Conditioning Device) common in the market as depicted in figs. 1 and 2, it comprises iron core 1 ' and two coils 2 ', iron core 1 ' comprises upper core section 11 ' and lower core section 12 ', upper core section 11 ' is connected with rear core packet 14 ' respectively by front core packet 13 ' with the rear and front end of lower core section 12 ', upper core section 11 ', lower core section 12 ', form through hole 3 ', two coils 2 ' between front core packet 13 ' and rear core packet 14 ' and embed upper core section 11 ' and lower core section 12 ' respectively.
But, ribbon ion beam due to current semiconductor ion injection industry will adapt to the technique of 300mm or more, so distance between the cartridge of this kind of dipolar magnet is general comparatively large, the harmful effect thereupon brought is exactly magnetic field, in general between this dipolar magnet cartridge is drum type.Concrete, as shown in Figure 1, after a branch of ribbon ion beam 4 ' enters to inject iron core 1 ', the shape of ribbon ion beam 4 ' is out as shown on the right (in cydariform).Like this, banded line is by after this magnet, and due to uneven in short transverse of dipolar magnet, the cross sectional shape of banded line will become falcate by straight line, this is unfavorable for the later stage transmission of line and controls, and brings certain harmful effect also can to the uniformity injecting sample.
In view of this, necessary provide a kind of can make line by time banded line cross sectional shape keep the Beam-Conditioning Device of rectilinear form, to improve the uniformity of line, can evenly deflect.
Summary of the invention
The object of the invention is to: for the deficiencies in the prior art, and provide a kind of can make line by time banded line cross sectional shape keep the Beam-Conditioning Device of rectilinear form, to improve the uniformity of line, can evenly deflect.
In order to achieve the above object, the present invention adopts following technical scheme:
Beam-Conditioning Device, comprise iron core and two the first coils, described iron core comprises upper core section and lower core section, described upper core section is connected with rear core packet respectively by front core packet with the rear and front end of described lower core section, described upper core section, described lower core section, between described front core packet and described rear core packet, form through hole, two described first coils embed described upper core section and described lower core section respectively, and described front core packet and described rear core packet are arranged with second coil respectively.
One as Beam-Conditioning Device of the present invention is improved, and the cross section of described iron core is fan-shaped, and described through hole is set to arc-shaped through-hole.
One as Beam-Conditioning Device of the present invention is improved, described front core packet and described rear core packet are all set to arc, and the radian of described front core packet and described rear core packet is equal, the radian of the hole wall of described through hole is also equal with the radian of described front core packet, and the area of described front core packet is equal to or less than the area of described rear core packet.
One as Beam-Conditioning Device of the present invention is improved, the front and rear surfaces of the inner surface and described front core packet that are sheathed on described second coil on described front core packet is fitted, and the front and rear surfaces of the inner surface and described rear core packet that are sheathed on described second coil on described rear core packet is fitted.
One as Beam-Conditioning Device of the present invention is improved, and described second coil in described through hole is between two described first coils.
One as Beam-Conditioning Device of the present invention is improved, two described first coil corresponding settings mutually.
One as Beam-Conditioning Device of the present invention is improved, and the size of current of two described second coils and direction are all adjustable, thus revise the Distribution of Magnetic Field in described through hole.
One as Beam-Conditioning Device of the present invention is improved, and two end faces of described iron core are rectangle, and two openings of described through hole are also rectangle.
One as Beam-Conditioning Device of the present invention is improved, and the radian of described front core packet and described rear core packet is 0-3 π/4.
Relative to prior art, the present invention is by sheathed second coil of difference on front core packet and rear core packet, by regulating the sense of current and the size of these two the second coils, cydariform magnetic field between the cartridge can revising iron core, the magnetic field between cartridge is made to become completely uniform linear magnetic field, thus make line by time banded line cross sectional shape remain straight line, and then be conducive to the later stage transmission of line and control, being also conducive to the uniformity ensureing to inject sample.In addition, the present invention is simple and reliable for structure, and cost is low.
Accompanying drawing explanation
Fig. 1 is the perspective view of secondary magnet of the prior art.
Fig. 2 is the cross-sectional view of secondary magnet of the prior art.
Wherein:
1 '-iron core;
11 '-upper core section, 12 '-lower core section, 13 '-front core packet, 14 '-rear core packet;
2 '-coil;
3 '-through hole;
4 '-ribbon ion beam.
Fig. 3 is perspective view of the present invention.
Fig. 4 is sectional structure schematic diagram of the present invention.
Wherein:
1-iron core;
11-upper core section, 12-lower core section, core packet before 13-, core packet after 14-;
2-first coil;
3-through hole;
4-second coil;
5-ribbon ion beam.
Embodiment
As shown in Figures 3 and 4, Beam-Conditioning Device, comprise iron core 1 and two the first coils 2, iron core 1 comprises upper core section 11 and lower core section 12, upper core section 11 is connected with rear core packet 14 respectively by front core packet 13 with the rear and front end of lower core section 12, upper core section 11, lower core section 12, between front core packet 13 and rear core packet 14, form through hole 3, two the first coils 2 embed upper core section 11 and lower core section 12 respectively, and front core packet 13 and rear core packet 14 are arranged with second coil 4 respectively.That is, in the present embodiment, be forward and backwardly respectively provided with second coil 4, be upper and lowerly respectively provided with first coil 2.
The cross section of iron core 1 is fan-shaped, and through hole 3 is set to arc-shaped through-hole.As shown in Figure 1, after ribbon ion beam 5 enters on the left of iron core 1, penetrate from the right side of iron core 1 under the first coil 2 of energising and the deflecting action of the second coil 4.
Front core packet 13 and rear core packet 14 are all set to arc, and the radian of front core packet 13 and rear core packet 14 is equal, and the radian of the hole wall of through hole 3 is also equal with the radian of front core packet 13, and the area of front core packet 13 is less than the area of rear core packet 14.Specifically, front core packet 13 and rear core packet 14 lay respectively on two concentric circless, and front core packet 13 and the central angle of rear core packet 14 on the concentric circles of its correspondence are equal.The hole wall of through hole 3 and rear core packet 14 also lay respectively on two concentric circless, and the hole wall of through hole 3 and the central angle of rear core packet 14 on the concentric circles of its correspondence are equal.
Be sheathed on the inner surface of the second coil 4 on front core packet 13 and the front and rear surfaces of front core packet 13 is fitted, namely the second coil 4 is equal with the radian of front core packet 13 with the radian of those two sections of coils that front core packet 13 contacts;
Be sheathed on the inner surface of the second coil 4 on rear core packet 14 and the front and rear surfaces of rear core packet 14 is fitted, namely the second coil 4 is equal with the radian of rear core packet 14 with the radian of those two sections of coils that rear core packet 14 contacts.
The second coil 4 in through hole 3 is between two the first coils 2, and namely the height of the second coil 4 is lower than the distance between relative two surfaces of two the first coils 2.
Two the first coils 2 are mutually corresponding to be arranged, and relatively and be parallel to each other, and the size of two the first coils 2 is identical in its position.
The size of current of two the second coils 4 and direction are all adjustable, thus revise the Distribution of Magnetic Field in through hole 3.
Two end faces of iron core 1 are rectangle, and two openings of through hole 3 are also rectangle.The radian of front core packet 13 and rear core packet 14 is 0-3 π/4.
As shown in Figure 3, after a branch of ribbon ion beam 5 enters to inject the left side of through hole 3 of iron core 1, by regulating size of current and the direction of two the second coils 4, can make from the shape of the right side ribbon ion beam 5 out of the through hole 3 of iron core 1 as shown on the right, its cross sectional shape remains straight line.
In a word, the present invention is by sheathed second coil 4 of difference on front core packet 13 and rear core packet 14, by regulating the sense of current and the size of these two the second coils 4, cydariform magnetic field between the cartridge can revising iron core 1, the magnetic field between cartridge is made to become completely uniform linear magnetic field, thus make line by time banded line cross sectional shape remain straight line, and then be conducive to the later stage transmission of line and control, being also conducive to the uniformity ensureing to inject sample.In addition, the present invention is simple and reliable for structure, and cost is low.
The announcement of book and instruction according to the above description, those skilled in the art in the invention can also carry out suitable change and amendment to above-mentioned execution mode.Therefore, the present invention is not limited to embodiment disclosed and described above, also should fall in the protection range of claim of the present invention modifications and changes more of the present invention.In addition, although employ some specific terms in this specification, these terms just for convenience of description, do not form any restriction to the present invention.
Claims (9)
1. Beam-Conditioning Device, it is characterized in that: comprise iron core and two the first coils, described iron core comprises upper core section and lower core section, described upper core section is connected with rear core packet respectively by front core packet with the rear and front end of described lower core section, described upper core section, described lower core section, between described front core packet and described rear core packet, form through hole, two described first coils embed described upper core section and described lower core section respectively, it is characterized in that: described front core packet and described rear core packet are arranged with second coil respectively.
2. Beam-Conditioning Device according to claim 1, is characterized in that: the cross section of described iron core is fan-shaped, and described through hole is set to arc-shaped through-hole.
3. Beam-Conditioning Device according to claim 2, it is characterized in that: described front core packet and described rear core packet are all set to arc, and the radian of described front core packet and described rear core packet is equal, the radian of the hole wall of described through hole is also equal with the radian of described front core packet, and the area of described front core packet is equal to or less than the area of described rear core packet.
4. Beam-Conditioning Device according to claim 1, it is characterized in that: the front and rear surfaces of the inner surface and described front core packet that are sheathed on described second coil on described front core packet is fitted, the front and rear surfaces of the inner surface and described rear core packet that are sheathed on described second coil on described rear core packet is fitted.
5. Beam-Conditioning Device according to claim 4, is characterized in that: described second coil in described through hole is between two described first coils.
6. Beam-Conditioning Device according to claim 1, is characterized in that: two described first coil corresponding settings mutually.
7. Beam-Conditioning Device according to claim 1, is characterized in that: the size of current of two described second coils and direction are all adjustable, thus revise the Distribution of Magnetic Field in described through hole.
8. Beam-Conditioning Device according to claim 1, is characterized in that: two end faces of described iron core are rectangle, and two openings of described through hole are also rectangle.
9. Beam-Conditioning Device according to claim 3, is characterized in that: the radian of described front core packet and described rear core packet is 0-3 π/4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510410785.4A CN104979156B (en) | 2015-07-14 | 2015-07-14 | Beam-Conditioning Device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510410785.4A CN104979156B (en) | 2015-07-14 | 2015-07-14 | Beam-Conditioning Device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104979156A true CN104979156A (en) | 2015-10-14 |
| CN104979156B CN104979156B (en) | 2017-03-01 |
Family
ID=54275565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510410785.4A Active CN104979156B (en) | 2015-07-14 | 2015-07-14 | Beam-Conditioning Device |
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| Country | Link |
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| CN (1) | CN104979156B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107221485A (en) * | 2017-06-02 | 2017-09-29 | 东莞帕萨电子装备有限公司 | A kind of ion beam current adjusting means |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1160287A (en) * | 1995-10-19 | 1997-09-24 | 易通公司 | Method and apparatus for ion beam formation in ion implanter |
| JP2000204470A (en) * | 1998-12-23 | 2000-07-25 | Eaton Corp | Ion implantation apparatus, ion beam route forming apparatus and ion beam processing of workpiece |
| JP2004152557A (en) * | 2002-10-30 | 2004-05-27 | Mitsubishi Electric Corp | Analyzing magnet for ion implantation device |
| US20060113494A1 (en) * | 2004-05-18 | 2006-06-01 | Jiong Chen | Apparatus and methods for ion beam implantation using ribbon and spot beams |
| CN1791961A (en) * | 2003-05-15 | 2006-06-21 | 艾克塞利斯技术公司 | High resolution separation magnet for ribbon beam ion implanters |
| CN101114565A (en) * | 2006-06-09 | 2008-01-30 | 日新意旺机械股份有限公司 | Analyzing electromagnet |
| US20090321654A1 (en) * | 2007-05-04 | 2009-12-31 | Dirk Diehl | Beam guiding magnet for deflecting a particle beam |
| JP4582065B2 (en) * | 2006-07-25 | 2010-11-17 | 日新イオン機器株式会社 | Analysis electromagnet, control method thereof, and ion implantation apparatus |
| CN204720415U (en) * | 2015-07-14 | 2015-10-21 | 东莞帕萨电子装备有限公司 | Beam-Conditioning Device |
-
2015
- 2015-07-14 CN CN201510410785.4A patent/CN104979156B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1160287A (en) * | 1995-10-19 | 1997-09-24 | 易通公司 | Method and apparatus for ion beam formation in ion implanter |
| JP2000204470A (en) * | 1998-12-23 | 2000-07-25 | Eaton Corp | Ion implantation apparatus, ion beam route forming apparatus and ion beam processing of workpiece |
| JP2004152557A (en) * | 2002-10-30 | 2004-05-27 | Mitsubishi Electric Corp | Analyzing magnet for ion implantation device |
| CN1791961A (en) * | 2003-05-15 | 2006-06-21 | 艾克塞利斯技术公司 | High resolution separation magnet for ribbon beam ion implanters |
| US20060113494A1 (en) * | 2004-05-18 | 2006-06-01 | Jiong Chen | Apparatus and methods for ion beam implantation using ribbon and spot beams |
| CN101114565A (en) * | 2006-06-09 | 2008-01-30 | 日新意旺机械股份有限公司 | Analyzing electromagnet |
| JP4582065B2 (en) * | 2006-07-25 | 2010-11-17 | 日新イオン機器株式会社 | Analysis electromagnet, control method thereof, and ion implantation apparatus |
| US20090321654A1 (en) * | 2007-05-04 | 2009-12-31 | Dirk Diehl | Beam guiding magnet for deflecting a particle beam |
| CN204720415U (en) * | 2015-07-14 | 2015-10-21 | 东莞帕萨电子装备有限公司 | Beam-Conditioning Device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107221485A (en) * | 2017-06-02 | 2017-09-29 | 东莞帕萨电子装备有限公司 | A kind of ion beam current adjusting means |
| CN107221485B (en) * | 2017-06-02 | 2019-02-05 | 东莞帕萨电子装备有限公司 | A kind of ion beam current regulating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104979156B (en) | 2017-03-01 |
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Effective date of registration: 20221103 Address after: 523000 Room 302, Building 4, No. 2 Xinghui Road, Songshanhu Park, Dongguan, Guangdong Patentee after: Dongguan Jiatuo Risheng Intelligent Technology Co.,Ltd. Address before: 523000 Jinfu 2nd Road, Tangchun Management District, Liaobu Town, Dongguan City, Guangdong Province Patentee before: DONGGUAN PLASMA ELECTRONIC EQUIPMENT Co.,Ltd. |