CN104977815B - Scan table in write-through exposure system - Google Patents
Scan table in write-through exposure system Download PDFInfo
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- CN104977815B CN104977815B CN201510383235.8A CN201510383235A CN104977815B CN 104977815 B CN104977815 B CN 104977815B CN 201510383235 A CN201510383235 A CN 201510383235A CN 104977815 B CN104977815 B CN 104977815B
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- laminate floor
- plate
- floor beam
- lifting drive
- mounting seat
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Abstract
The invention discloses the scan table in a kind of write-through exposure system, including horizontally disposed rectangular mesa plate, two are provided with above the deck plate to be parallel to each other and parallel to the laminate floor beam of deck plate, two laminate floor beams are across deck plate, the side of the deck plate is provided with the mounting seat corresponding with each end of laminate floor beam, the mounting seat is relatively fixed with deck plate, a lifting drive is respectively arranged with each mounting seat, the both ends of the laminate floor beam are connected with the lifting drive in corresponding mounting seat respectively, the lifting drive at same laminate floor beam both ends synchronously drives the laminate floor beam to move up and down.Two laminate floor beams are added on traditional scan table deck plate, the side that soft exposed plate has warping phenomenon is pushed down using two laminate floor beams or the pressing plate on laminate floor beam, so when soft exposed plate is exposed, it is possible to avoid because exposure quality is bad caused by the side warpage of soft exposed plate the problem of.
Description
Technical field
The invention belongs to technical field of lithography, the scan table being related in a kind of write-through exposure system.
Background technology
Scan table in traditional write-through exposure system is general all to expose hardboard, and hardboard only just can by vacuum suction
It is firmly secured on the deck plate of scan table, but as the development of wearable device, soft exposed plate are done more and more, due to
The soft exposed plate in part is packed and stored into web-like, therefore the relative both sides of the soft exposed plate in the part have side warpage degree too
The problem of big, vacuum suction, which is used alone, can not be such that whole soft exposed plate is entirely fixed on deck plate, so as to influence to expose
Light quality.Therefore, it is necessary to a kind of device is provided to solve the problems, such as the soft influence exposure quality for exposing edges of boards warpage and bringing.
The content of the invention
The technical problems to be solved by the invention are：A kind of scan table in write-through exposure system is provided, it is soft exposing
When property exposed plate, it can avoid because exposure quality is bad caused by the side warpage of soft exposed plate the problem of.
In order to solve the above technical problems, the technical solution adopted by the present invention is：Scan table in write-through exposure system, bag
Horizontally disposed rectangular mesa plate is included, two are provided with above the deck plate and is parallel to each other and parallel to the pressing plate horizontal stroke of deck plate
Beam, across deck plate, the side of the deck plate is provided with corresponding with each end of laminate floor beam two laminate floor beams
Mounting seat, the mounting seat are relatively fixed with deck plate, and a lifting drive, the pressure are respectively arranged with each mounting seat
The both ends of plate crossbeam are connected with the lifting drive in corresponding mounting seat respectively, the lifting driving at same laminate floor beam both ends
Device synchronously drives the laminate floor beam to move up and down.
The laminate floor beam is fixedly installed respectively perpendicular to deck plate side corresponding with its both ends, four mounting seats
Lifting drive can be driven in being provided with deck plate and the orthogonal both sides side of two laminate floor beams, each mounting seat
The electric operator of side transverse shifting where along the mounting seat, the electric operator can be along electronic execution including one
The sliding stand that the driving direction of mechanism slides, the lifting drive are fixedly connected on sliding stand.
It is provided with one piece of connecting plate between the lifting drive and sliding block, it is relative with connecting plate on the laminate floor beam
Position be provided with a vertical through holes, a guide rod for passing through through hole is vertically fixedly connected with connecting plate, is arranged with guide rod
Precompressed spring, one end and the laminate floor beam bottom of spring offset, and the other end offsets with connecting plate upper surface.
The linear bearing that an internal diameter is engaged with guide rod diameter is provided with the through hole, the guide rod is located in straight line
In bearing.
The rubber pressing plate arranged along laminate floor beam length direction is provided with the laminate floor beam, the lower edge of rubber pressing plate is low
Lower edge in laminate floor beam and the upper surface parallel to deck plate.
The lifting drive is band guide rod cylinder.
The beneficial effects of the invention are as follows：Two laminate floor beams are added on traditional scan table deck plate, utilize two
Laminate floor beam or the pressing plate on laminate floor beam push down the side that soft exposed plate has warping phenomenon, so soft in exposure
When exposed plate, it is possible to avoid because exposure quality is bad caused by the side warpage of soft exposed plate the problem of.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the A portions enlarged drawing in Fig. 1；
Fig. 3 is the B-B sectional drawings in Fig. 1；
Fig. 4 is the C-C sectional views in Fig. 2.
In Fig. 1~Fig. 4：1st, deck plate, 2, laminate floor beam, 3, mounting seat, 4, lifting drive, 5, electronic execution machine
Structure, 6, sliding stand, 8, connecting plate, 9, through hole, 10, guide rod, 11, spring, 12, linear bearing, 13, rubber pressing plate.
Embodiment
Below in conjunction with the accompanying drawings, specific embodiments of the present invention are described in detail.
It is as shown in Figure 1 the scan table in write-through exposure system of the present invention, including horizontally disposed rectangle platform
Panel 1, the top of deck plate 1 are provided with two and are parallel to each other and parallel to the laminate floor beam 2 of deck plate 1, two laminate floor beams 2
Deck plate 1, the side of the deck plate 1 are provided with the mounting seat 3 corresponding with each end of laminate floor beam 2, should
Mounting seat 3 is relatively fixed with deck plate 1, and a lifting drive 4 is respectively arranged with each mounting seat 3, and the pressing plate is horizontal
The both ends of beam 2 are connected with the lifting drive 4 in corresponding mounting seat 3 respectively, the lifting driving at the same both ends of laminate floor beam 2
Device 4 synchronously drives the laminate floor beam 2 to move up and down.
The scan table 1 of laminate floor beam 2 is provided with, when soft exposed plate is exposed, is pressed in using laminate floor beam 2 soft
Property exposed plate have the both sides of alice phenomenon, the tiling of soft exposed plate effectively can be so fixed on to the deck plate 1 of scan table
On, being exposed position will not be influenceed by alice.
With reference to Fig. 1, Fig. 2, the laminate floor beam 2 is perpendicular to the side of deck plate 1 corresponding with its both ends, four installations
Seat 3 is fixedly installed on 1 and two laminate floor beam of deck plate, 2 orthogonal both sides side respectively, is provided with each mounting seat 3
Electric operator 5 of the lifting drive 4 along the place side transverse shifting of mounting seat 3, the electric operator 5 can be driven
Including a sliding stand 6 that can be slided along the driving direction of electric operator 5, the lifting drive 4 is fixedly connected on
On sliding stand 6.
Electric operator 5 is set in each mounting seat 3, to drive the transverse shifting of lifting drive 4, thus may be used
To change the spacing between two laminate floor beams 2 by lifting-transverse shifting drive device 4, so as to various sizes of soft exposure
Plate is fixed, and expands the scope of application.
The concrete structure of electric operator 5 described in text is referred to entitled " electric operator " (application publication number
For：CN103206500A patent of invention), but be not limited to the lead screw transmission mode described in the publication document, that is, exist
In the technical field, the kinds of drive such as linear electric motors, timing belt can also be used to replace the lead screw transmission side in the patent document
Formula is come in fact to the linear drives of sliding stand.
As shown in Figure 2 and Figure 4, one piece of connecting plate 8, the pressure are provided between the lifting drive 4 and sliding block 14
The position relative with connecting plate 8 is provided with a vertical through holes 9 on plate crossbeam 2, and being vertically fixedly connected with one on connecting plate 8 passes through
The guide rod 10 of through hole 9, precompressed spring 11 is arranged with guide rod 10, one end and the bottom of laminate floor beam 2 of spring 11 offset, separately
One end offsets with the upper surface of connecting plate 8.
Precompressed spring 11 is set on guide rod 10, when lifting drive 4 drives laminate floor beam 2 to decline,
By the reverse elastic force of spring 11, the decrease speed of laminate floor beam 2 slows down, to reduce impact of the laminate floor beam 2 to soft exposed plate
Power, prevent soft exposed plate from sustaining damage, when lifting drive 4 rises, by the positive elastic force of spring 11, laminate floor beam
2 rates of climb are accelerated, and can quickly upspring, and plate is received in favor of quick.
As shown in figure 4, the linear bearing 12 that an internal diameter is engaged with the diameter of guide rod 10 is provided with the through hole 9, institute
Guide rod 10 is stated to be located in linear bearing 12.
Increase the linear bearing 12 that internal diameter is engaged with the diameter of guide rod 10 between guide rod 10 and through hole 9, can be further
Reduce transversal displacement of the laminate floor beam 2 in lifting.
As shown in figure 3, the rubber pressing plate 13 arranged along the length direction of laminate floor beam 2, rubber are provided with the laminate floor beam 2
The lower edge of glue laminated plate 13 is less than the lower edge of laminate floor beam 2 and parallel to the upper surface of deck plate 1.
Set lower edge to be less than the rubber pressing plate 13 of laminate floor beam 2 on laminate floor beam 2, fixed with rubber pressing plate 13 soft
Exposed plate, because rubber pressing plate 13 has certain elasticity, so, soft exposed plate can be preferably fixed, and will not make soft
Property exposed plate sustains damage.
As shown in Fig. 2 in order to further reduce horizontal stroke of the lifting drive 4 when driving laminate floor beam 2 to move up and down
To offset, present invention preferably uses band guide rod cylinder as lifting drive 4.
The present invention the course of work be：First soft exposed plate is placed on the deck plate 1 of scan table, and adjustment direction,
Soft exposed plate is had the both sides parallel platen crossbeam 2 of side warping phenomenon, then start the electricity at the both ends of laminate floor beam 2 simultaneously
Dynamic executing agency 5, drives the laminate floor beam 2 corresponding with the laminate floor beam 2 soft along being moved to perpendicular to the direction of laminate floor beam 2
Property exposed plate one side, then start the lifting drive 4 at the both ends of laminate floor beam 2 simultaneously, push the laminate floor beam 2, press
Plate crossbeam 2 combines the reaction force of spring 11 under the cooperation of guide rod 10 and linear bearing 12, slowly moves downwards, directly
The upper surface of rubber pressing plate 13 and soft exposed plate on to laminate floor beam 2 is brought into close contact, the driving of another laminate floor beam 2
Journey with it is previous consistent, just do not repeating herein.When the rubber pressing plate 13 on two laminate floor beams 2 with soft exposed plate
Upper surface is brought into close contact, and the soft exposed plate is fixed on deck plate 1 with being just flattened, afterwards can be with to soft exposure
Plate is exposed operation., can be to avoid because soft exposure edges of boards warpage causes by the above-mentioned processing to soft exposed plate
Exposure quality it is bad the problem of.
Claims (5)
1. the scan table in write-through exposure system, including horizontally disposed rectangular mesa plate (1), it is characterised in that described
Two are provided with above panel (1) to be parallel to each other and parallel to the laminate floor beam (2) of deck plate (1), two laminate floor beams (2) horizontal stroke
Across deck plate (1), the side of the deck plate (1) is provided with the mounting seat corresponding with each end of laminate floor beam (2)
(3), the mounting seat (3) is relatively fixed with deck plate (1), and a lifting drive is respectively arranged with each mounting seat (3)
(4), the both ends of the laminate floor beam (2) are connected with the lifting drive (4) in corresponding mounting seat (3) respectively, same pressure
The lifting drive (4) at plate crossbeam (2) both ends synchronously drives the laminate floor beam (2) to move up and down；The lifting drive
(4) it is provided with one piece of connecting plate (8) between sliding stand (6), the position relative with connecting plate (8) on the laminate floor beam (2)
A vertical through holes (9) are provided with, a guide rod (10) for passing through through hole (9), guide rod are vertically fixedly connected with connecting plate (8)
(10) precompressed spring (11) is arranged with, one end and laminate floor beam (2) bottom of spring (11) offset, and the other end is with being connected
Plate (8) upper surface offsets.
2. the scan table in write-through exposure system according to claim 1, it is characterised in that the laminate floor beam (2)
Perpendicular to deck plate (1) side corresponding with its both ends, four mounting seats (3) be fixedly installed on respectively deck plate (1) with
The orthogonal both sides side of two laminate floor beams (2), lifting drive (4) can be driven by being provided with each mounting seat (3)
The electric operator (5) of side transverse shifting where along the mounting seat (3), the electric operator (5) can edge including one
The sliding stand (6) that the driving direction of electric operator (5) slides, the lifting drive (4) are fixedly connected on sliding stand
(6) on.
3. the scan table in write-through exposure system according to claim 2, it is characterised in that set in the through hole (9)
The linear bearing (12) that an internal diameter is engaged with guide rod (10) diameter is equipped with, the guide rod (10) is located in linear bearing (12)
It is interior.
4. the scan table in write-through exposure system according to claim 3, it is characterised in that the laminate floor beam (2)
On be provided with the rubber pressing plate (13) arranged along laminate floor beam (2) length direction, the lower edge of rubber pressing plate (13) is horizontal less than pressing plate
The lower edge of beam (2) and parallel to the upper surface of deck plate (1).
5. the scan table in write-through exposure system according to claim 4, it is characterised in that the lifting drive
(4) it is band guide rod cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510383235.8A CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510383235.8A CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104977815A CN104977815A (en) | 2015-10-14 |
| CN104977815B true CN104977815B (en) | 2018-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510383235.8A Active CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
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| Country | Link |
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| CN (1) | CN104977815B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109856928A (en) * | 2019-04-02 | 2019-06-07 | 合肥芯碁微电子装备有限公司 | A kind of direct-write lithography machine sucker presser device |
| CN112130423A (en) * | 2020-09-15 | 2020-12-25 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine sucker pressing plate device and control method thereof |
| CN113777891B (en) * | 2021-08-19 | 2022-08-26 | 杭州新诺微电子有限公司 | Movable pressing plate structure, exposure machine with movable pressing plate structure and pressing plate method of exposure machine |
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| JP3626888B2 (en) * | 1999-10-08 | 2005-03-09 | 日立ハイテク電子エンジニアリング株式会社 | Mask deflection correction mechanism, mask deflection correction method, and pattern formation method in substrate exposure apparatus |
| US7019816B2 (en) * | 2003-12-17 | 2006-03-28 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
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|---|---|---|---|---|
| CN101105640A (en) * | 2006-07-14 | 2008-01-16 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN101369523A (en) * | 2008-10-17 | 2009-02-18 | 格兰达技术（深圳）有限公司 | IC material strip laser mark printing machine and its operation mode |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN104977815A (en) | 2015-10-14 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Applicant after: SUZHOU WEIYING LASER TECHNOLOGY CO.,LTD. Address before: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Applicant before: ADVANCED MICROLITHO INSTRUMENT, Inc. |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Scanning stage in direct writing exposure system Effective date of registration: 20210128 Granted publication date: 20180223 Pledgee: Jiujiang Pohu new city investment and Construction Co.,Ltd. Pledgor: SUZHOU WEIYING LASER TECHNOLOGY Co.,Ltd. Registration number: Y2021980000823 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230508 Granted publication date: 20180223 Pledgee: Jiujiang Pohu new city investment and Construction Co.,Ltd. Pledgor: SUZHOU WEIYING LASER TECHNOLOGY CO.,LTD. Registration number: Y2021980000823 |