CN104959908A - Fiber and lithium niobate wafer pneumatic pressurized grinding mechanism and grinding method - Google Patents
Fiber and lithium niobate wafer pneumatic pressurized grinding mechanism and grinding method Download PDFInfo
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- CN104959908A CN104959908A CN201510276478.1A CN201510276478A CN104959908A CN 104959908 A CN104959908 A CN 104959908A CN 201510276478 A CN201510276478 A CN 201510276478A CN 104959908 A CN104959908 A CN 104959908A
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- lithium niobate
- travel mechanism
- grinding
- niobate crystal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Coupling Of Light Guides (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a fiber and lithium niobate wafer pneumatic pressurized grinding mechanism and grinding method, including a three dimensional positioning device, a pneumatic device, and a clamping mechanism, a z-axis moving mechanism switching board of the three dimensional positioning device is connected with the pneumatic device, and the clamping mechanism is arranged on the pneumatic device. A fiber and lithium niobate wafer is clamped by the clamping mechanism and is connected with a cylinder piston rod through an adjusting slide rod and a beam type force transducer. The three dimensional positioning device can realize the accurate positioning and grinding micro-feeding of a lithium niobate wafer clamping tool, the pneumatic device makes the change of the grinding pressure a gradually changing process, and the lithium niobate wafer clamping tool can stably and rapidly clamp a lithium niobate wafer. The grinding pressure during the grinding of the lithium niobate wafer is constant, and the changing process of the grinding pressure is a gradually changing process, so that the grinded end face quality is guaranteed, and the grinding process is stable and reliable; and meanwhile, the fiber end face of the grinded lithium niobate wafer can be conveniently observed.
Description
Technical field
The present invention relates to optical fiber and lithium niobate crystal chip grinding technique field, specifically, is a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process.
Background technology
End surface grinding can be become certain shape when grinding fiber stub and bare fibre by existing optic fiber polishing machine, in order to make to be coupled as much as possible by the optical signal of optical fiber, higher requirement is proposed to the end face flatness of lock pin and bare fibre and roughness.The lithium niobate integrated optical phase modulator used in optical fibre gyro (claims multifunction integrated optics chip abroad, MFIOC) waveguide device containing Y shape beam splitter, polarizer and phase-modulator function is referred to, by the integrated making of multiple for optical fibre gyro function element on the same chip, its good characteristic ensure that the realization of good digital closed-loop fiber optic gyroscope to this device.The input and output of Waveguide are by realizing with the direct-coupling of tail optical fiber end face, in order to obtain low optical coupling loss, need do high-quality polishing to lithium niobate crystal chip and fiber end face.There is no the special milling tool for the lithium niobate crystal chip with polarization maintaining optical fibre in the market.
The manufacturing procedure of existing fiber stub or bare fibre is: be placed on by grinding abrasive paper on abrasive disk, be arranged on grinding abrasive paper by fiber stub or bare fibre, grinder is driven by power set and grinds the fiber stub end face on abrasive disk or bare fibre end face.Existing lapping device has 8 font grinders and planetary-type grinding machine two kinds, and planetary-type grinding machine structure comparatively 8 font grinders is complicated, but grinding track more crypto set.Two kinds of modes that existing grinding pressuring method adopts center to pressurize and pressurize in corner, center pressurization can be divided into weight pressurization, Pneumatic Pressure and motor Fine Feed to pressurize three kinds by the difference of implementation, corner pressuring method adopts abrasive disk motor Fine Feed to realize, the shortcoming of weight pressurization and Pneumatic Pressure two kinds of lapping modes easily produces when being grinding optical fiber or fiber stub beats, Grinding Quality is difficult to ensure, current internal optical fiber grinder manufacturer all adopts 8 font grinders and corner pressuring method.
Summary of the invention
The object of the invention is to overcome some shortcomings of optic fiber polishing machine in the market, propose a kind of can specially for the grinding mechanism of lithium niobate crystal chip and the Ginding process of band polarization maintaining optical fibre.
Optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, comprise three-dimensional fix device, pneumatic means and clamping device.
Wherein, three-dimensional fix device is arranged on grinding plate.Slide block in three-dimensional fix device ZhongzZhou travel mechanism installs pneumatic means; Pneumatic means is provided with and accommodates mechanism.By three-dimensional fix device realize clamping device 3 that pneumatic means is installed spatially in the accurate location of any point, finally realize pneumatic means; Accommodate mechanism to be used for accommodating lithium niobate crystal chip.
Described pneumatic means comprises spring press out type cylinder, cylinder pole, governor motion, z-axis travel mechanism keyset, force snesor and precision rotation platform.
Wherein, in the cylinder body of spring press out type cylinder and cylinder mounting plate, installed surface threaded engagement is fixed; Cylinder mounting plate is used for being connected with z-axis travel mechanism; Make the piston rod of spring press out type cylinder perpendicular to grinding plate; The piston rod of spring press out type cylinder is used for being connected with governor motion.
Described governor motion has base plate, optical axis, top board, linear bearing and bearing holder (housing, cover).Wherein, optical axis is two, arranged in parallel; One end and the base plate of two optical axises are connected, and the other end and top board are connected; Two last covers of optical axis have a linear bearing, and the outer ring of two linear bearings is logical to be fixedly mounted in bearing holder (housing, cover), and is fixed by the relative position between two linear bearings by bearing holder (housing, cover); The piston rod axes normal of top board and spring press out type cylinder is arranged; Bearing holder (housing, cover) is connected with slide unit in z-axis travel mechanism.
Described force snesor stiff end is fixedly mounted on base plate bottom surface in governor motion, and power induction end installs precision rotation platform; Precision rotation platform round end is installed with clamping device.
4, for the Ginding process of optical fiber a kind of described in claim 1 and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, it is characterized in that: step is as follows:
Step 1: two pieces of optical fiber lithium niobate crystal chips are gripped by clamping device; And follow according to grinding requirement, make the angle between optical fiber lithium niobate crystal chip face machined flat normal direction and grinder surface normal by adjustment precision rotation platform;
Step 2: host computer controls three-dimensional fix device by motion controller, makes the lithium niobate crystal chip on clamping device move to above planetary-type grinding machine, ensures the contact point of two pieces of optical fiber lithium niobate crystal chips and grinder to grinder main shaft apart from equal; Meanwhile, grinding abrasive paper is placed on grinder.
Step 3: start the compressed air that air compressor machine passes into definite value pressure in the cylinder body of spring press out type cylinder, and then drive clamping device to move upward by piston rod; Now, two linear bearings are made to be positioned in the middle part of optical axis; And the back-moving spring in spring press out type cylinder block moves to the centre position of spring press out type cylinder stroke.
Step 4: host computer controls three-dimensional fix device ZhongzZhou travel mechanism by motion controller makes clamping device move downward, and when reducing to force sensor measuring value, host computer controls three-dimensional fix device by motion controller to be stopped; Now, optical fiber lithium niobate crystal chip contacts with grinder.
Step 5: setting grinder parameter, comprises grinding rotating speed, milling time; Subsequently, grinder is started.
Step 6: when after arrival milling time, close grinder.
Step 7: host computer controls three-dimensional fix device ZhongzZhou travel mechanism by motion controller makes clamping device raise.
Step 8: close air compressor machine, shut electromagnetic valve, closes pressure-reducing valve.
Step 9: the complete lithium niobate crystal chip of grinding is taken off by clamping device.
The invention has the advantages that:
1, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, grinding pressure accurately can be recorded by beam type force snesor, reads registration convenient;
2, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, the servomotor in beam type force snesor and three-dimensional fix device forms closed-loop control system, guarantees the constant of grinding pressure;
3, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, can change grinding pressure by the feed rate of the z-axis servomotor in host computer adjustment three-dimensional fix device, simple to operate;
4, optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process, introduce spring press out type cylinder and Pneumatic control circuit, make optical fiber and lithium niobate crystal chip grind start time, in process, at the end of the change procedure of grinding pressure be a progressive formation, the adjustment of grinding pressure is steadily reliable.
Accompanying drawing explanation
Fig. 1 is optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism overall structure schematic diagram;
Fig. 2 is pneumatic means structural representation in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 3 is pneumatic means structural blast figure in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 4 is clamping device overall structure schematic diagram in optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism;
Fig. 5 is left pedestal right side schematic view in clamping device;
Fig. 6 is schematic diagram on the left of middle left pedestal;
Fig. 7 is schematic diagram on the left of Right socle in clamping device;
Fig. 8 is Right socle right side schematic view in clamping device;
Fig. 9 is optical fiber lithium niobate crystal chip set-up mode schematic diagram on left pedestal in clamping device;
Figure 10 is in clamping device on Right socle, optical fiber lithium niobate crystal chip set-up mode schematic diagram;
Figure 11 is optical fiber lithium niobate crystal chip method of clamping schematic diagram on left pedestal in clamping device;
Figure 12 is pedestal holder structural representation in clamping device;
Figure 13 is mounting means schematic diagram between left pedestal and Right socle in clamping device;
Figure 14 is locking mechanism structure schematic diagram in clamping device;
Figure 15 is for locking mechanism structure schematic diagram that left pedestal and Right socle are locked in clamping device.
In figure:
1-three-dimensional fix device 2-pneumatic means 3-clamping device
4-grinding plate 5-grinder 101-x axle travel mechanism
102-y axle travel mechanism 103-z axle travel mechanism 104-pillar
201-spring press out type cylinder 202-governor motion 203-z axle travel mechanism keyset
204-force snesor 205-precision rotation platform 206-cylinder mounting plate
203a-base plate 203b-optical axis 203c-top board
The left pedestal of 203d-linear bearing 203e-bearing holder (housing, cover) 301-
302-Right socle 303-pedestal holder 304-retaining mechanism
305-base stand location shoulder 306-screw locating shoulder a-locating piece
B-clamp c-loading blocks d-fiber orientation groove
E-wafer orientation groove f-raised structures g-recessed structures
H-optical fiber i-lithium niobate crystal chip j-manhole
K--limited block
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
Optical fiber of the present invention and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, comprise three-dimensional fix device 1, pneumatic means 2 and clamping device 3, as shown in Figure 1.
Described three-dimensional fix device 1 is arranged on grinding plate 4, adopts door type design, comprises Liang Tao x-axis travel mechanism 101, a set of y-axis travel mechanism 102, a set of z-axis travel mechanism 103 and two pillars 104.X-axis travel mechanism 101, y-axis travel mechanism 102 are identical with in z-axis travel mechanism 103 structure, are made up of erecting bed, slide rail, slide unit, ball-screw and drive motors.Wherein, erecting bed is provided with two slide rails be parallel to each other.In ball-screw, screw rod and two slide rails be arranged in parallel, and screw rod two ends are arranged on erecting bed by support member, and are connected by bearing with between installed part; Screw rod one end is coaxially connected with drive motors output shaft, by drive motors drive screw turns.Slide block is arranged on two slide rails, is supported by two slide rails; In slide block and ball-screw, nut is fixed, and together can be moved along screw axial by rotating screw bolt by nut band movable slider.
The Liang Tao x-axis travel mechanism 101 of said structure is arranged in parallel on grinding plate 4; Two pillars 104 are vertically arranged, and bottom is arranged on the slide block in Liang Tao x-axis travel mechanism 101 respectively.Y-axis travel mechanism 102 two ends are fixedly mounted on two pillar 104 tops respectively, are supported by pillar 104.Z-axis travel mechanism 103 axis and y-axis travel mechanism 102 axes normal are arranged, and erecting bed is fixed on the slide unit in y-axis travel mechanism 102 by adaptor.Slide block in z-axis travel mechanism 103 is provided with keyset, is used for pneumatic means 2 is installed.Thus, send control command by host computer to motion controller, drive Liang Tao x-axis travel mechanism 101 to be synchronized with the movement by motion controller, the movement of pneumatic means 2 along x-axis can be realized; Drive y-axis travel mechanism 102 to move, the movement of pneumatic means 2 along y-axis can be realized; Drive z-axis travel mechanism 103 to move, realize the movement of pneumatic means 2 along z-axis.
In above-mentioned Liang Tao x-axis travel mechanism 101, any one puts, and is also provided with encoder and grating scale in y-axis travel mechanism 102 and in z-axis travel mechanism 103.Wherein, in encoder and ball-screw, the end of screw rod is coaxially fixed.In grating scale, scale grating is fixedly mounted on erecting bed, and grating reading head is arranged on the nut in ball-screw.Realize the measurement along the displacement on x, y, z axle of the measurement of ball screw turns angle and pneumatic means 2 respectively by encoder and grating scale, and measurement structural feedback is used for realizing to host computer, and feed back to host computer.
Thus, by said mechanism three-dimensional fix device 1 can realize pneumatic means 2 spatially in the accurate location of any point, the clamping device 3 finally realizing pneumatic means 2 is installed arrives the initial abrasion site preset and the Fine Feed realized in process of lapping; Start z-axis travel mechanism 103 afterwards, z-axis brushless servo motor is made to enter low-speed running state, servomotor exploitation speed becomes positive correlation with grinding pressure value, beam type force snesor, encoder, grating scale, servo-driver, servomotor, motion controller and host computer form closed loop servo-control system, can ensure the constant of servomotor exploitation speed and then ensure the constant of grinding pressure.
Described pneumatic means 2 comprises spring press out type cylinder 201, governor motion 202, z-axis travel mechanism keyset 203, force snesor 204 and precision rotation platform 205, as shown in Figure 2 and Figure 3.
Wherein, spring press out type cylinder 201 adopts SMC C85N-10-25T type, and in cylinder body, pass into compressed air by spring press out type cylinder 201 front end by soundproof oil free air compressor, piston rod can to contractile motion in cylinder body.Between the cylinder mounting holes in cylinder body and cylinder mounting plate 206, installed surface offered, threaded engagement is fixed; Cylinder mounting plate 206 also has the joint face vertical with installed surface, be used for connecting z-axis travel mechanism 103 keyset, z-axis travel mechanism 103 keyset is used for and the connection of slide unit in z-axis travel mechanism 103, and then realize the connection of spring press out type cylinder 201 and z-axis travel mechanism 103, and make the piston rod of spring press out type cylinder 201 perpendicular to grinding plate 4.The piston rod of spring press out type cylinder 201 is used for being connected with governor motion 202.
Described governor motion 202 has base plate 203a, optical axis 203b, top board 203c, linear bearing 203d and bearing holder (housing, cover) 203e; Wherein, optical axis 203b is two, arranged in parallel.One end and the base plate 203a of two optical axis 203b are connected, and the other end and top board 203c are connected; Two last covers of optical axis 203b have a linear bearing 203d, and the outer ring of two linear bearing 203d is logical to be fixedly mounted in bearing holder (housing, cover) 203e, and is fixed by the relative position between two linear bearing 203d by bearing holder (housing, cover) 203e; Two linear bearing 203d can ensure that two optical axis 203b slide smoothly in the axial direction, and limit the motion in two optical axis 203b radial directions.Above-mentioned top board 203c has connecting hole, the axis co-planar of the axis of connecting hole and two optical axis 203b, and equal with two optical axis 203b axis spacings.The piston rod axes normal of top board 203c and spring press out type cylinder 201 is arranged, and piston rod end and connecting hole threaded engagement are fixed, and realizes the location between governor motion 202 and spring press out type cylinder 201; , bearing holder (housing, cover) 203e is connected with slide unit in z-axis travel mechanism 103 meanwhile, realizes the connection of governor motion 202 and z-axis travel mechanism 103.Thus, optical axis 203b movement is in its axial direction driven by spring press out type cylinder 201.
Described force snesor 205 adopts beam type force snesor, and maximum load is 2kg.The stiff end of force snesor 205 is fixedly mounted on base plate 203a bottom surface in governor motion 202, and the power induction end of force snesor 205 is provided with keyset, is used for installing precision rotation platform 206; The stiff end of described precision rotation platform 206 is fixedly mounted on keyset, round end is installed with clamping device 3, stable holding is carried out by clamping device 3 pairs of optical fiber lithium niobate crystal chips, and the rotary motion of optical fiber lithium niobate crystal chip in the vertical direction can be controlled by precision rotation platform 206, and then accurately can realize the grinding angular adjustment of optical fiber lithium niobate crystal chip, formula its reach default grinding angle.
Described clamping device 3 comprises optical fiber lithium niobate crystal holder for x-ray film of the present invention, comprises left pedestal 301, Right socle 302, pedestal holder 303 and retaining mechanism 304, as shown in Figure 4.
Wherein, left pedestal 301 and Right socle 302 are symmetrical set, and are locating piece a, one rectangular block shape structure that clamp b and loading blocks c is formed, are made up of AISI 321 stainless steel of annealing.
As shown in Figure 5, Figure 6, in left pedestal 301, locating piece a, as non-deformed unit, right flank is designed with rectangular protrusions f, is used for coordinating with the rectangular recessed g that locating piece a left surface in Right socle 302 designs, and realizes the location between left pedestal 301 and Right socle 302.Clamp b is as deformation unit, and trailing flank top connects with the leading flank top of locating piece a, and makes clamp b trailing flank and locating piece a leading flank have gap.There is bottom clamp b the loading blocks c being only communicated with clamp b leading flank cavity is set, be used for arranging loading blocks c.Loading blocks c as non-deformed unit, with locating piece a leading flank bottom connection bottom trailing flank.The right flank of above-mentioned locating piece a is designed with the fiber orientation groove d of through locating piece a upper and lower side, is used for arranging optical fiber h; The side of fiber orientation groove d communicates with locating piece a leading flank, then form hierarchic structure in the front side edge position of locating piece a right flank; Meanwhile, also have lithium niobate crystal chip i locating slot e in one end of fiber orientation groove d, be positioned at the bottom of locating piece a, be used for arranging lithium niobate crystal chip i, as shown in Figure 9.
As shown in Figure 7, Figure 8, in Right socle 302, locating piece a, as non-deformed unit, left surface is designed with recessed structures g, coordinates with the raised structures f on left pedestal 301.Clamp b is as deformation unit, and trailing flank top connects with the leading flank top of locating piece a, makes clamp b trailing flank and locating piece a leading flank have gap.There is bottom clamp b the only through loading blocks c stepping up block leading flank cavity be set, be used for arranging loading blocks c, loading blocks c as non-deformed unit, with locating piece a leading flank bottom connection bottom trailing flank.The right flank of above-mentioned locating piece a is designed with the fiber orientation groove d being communicated with locating piece a upper and lower side, is used for arranging optical fiber h; The side of fiber orientation groove d communicates with locating piece a leading flank, then form hierarchic structure in the front side edge position of locating piece a right flank; Meanwhile, also have wafer orientation groove e in one end of fiber orientation groove d, be positioned at the bottom of locating piece a, be used for arranging lithium niobate crystal chip i, as shown in Figure 10.
The left pedestal 301 of said structure is with Right socle 302, loading blocks c has left-hand thread hole and the right-hand thread hole of through loading blocks c front and back sides, with pinching screw threaded engagement, by tightening pinching screw, pinching screw end is contacted, as shown in figure 11 with clamp b lower front through screw hole; Owing to only there being top to be connected between clamp b with locating piece a, and between leave gap, thus, by tightening pinching screw, promote clamp b bottom backward by pinching screw, and then by clamp b trailing flank, lithium niobate crystal chip i be clamped in wafer orientation groove e.Above-mentioned left pedestal 301 is with on Right socle 302, near locating piece and clamp joint, have the manhole j of through locating piece and clamp left and right side simultaneously, locating piece a and clamp b joint is made to form domes, power can be passed to the circular arc shaped portion of arch form when arch is stressed, spread out equably towards periphery, effectively can reduce locating piece a and clamp b joint by force intensity, make to step up position in left pedestal 301 and Right socle 302 can repeatedly use, and the phenomenon of stress concentrations and locating piece a and clamp b joint Strength Failure can not be produced.
Left pedestal 301 is accommodated by pedestal holder 303 with Right socle 302, the U-shaped structure that pedestal holder 303 is formed for having two side arms and back timber, as shown in figure 12, in two side arms, correspondence position has through hole and screwed hole, and on two side arms internal face, correspondence position is designed with base stand location shoulder 305.As shown in figure 13, left pedestal 301 coordinates relative positioning by rectangular protrusions f with Right socle 302 rectangular recessed g, now left pedestal 301 is fixed as one with Right socle 302 through the screw that locating piece a in locating piece a in left pedestal 301 and Right socle 302 offers by bolt, now left pedestal 301 right flank and Right socle 302 left surface are fitted, form overall base, be arranged between pedestal holder 303 two side arms, the left surface of locating piece a in left pedestal 301 and pedestal holder 303 left surface inwall are fitted, and the location of left pedestal 301 is realized by base stand location shoulder 305, in like manner, the right flank of locating piece a in Right socle 302 and pedestal holder 303 right flank inwall are fitted, and realizes the location of Right socle 302 by base stand location shoulder 305.Being threaded with the screwed hole on another side arm through rear by the through hole on a side arm by pinching screw, by tightening pinching screw, making two side arms relative movement, left pedestal 301 is fixedly clamped with Right socle 302, as shown in Figure 1.
Described retaining mechanism 304 has 3, is respectively left pedestal retaining mechanism, Right socle retaining mechanism and clamping device retaining mechanism, is used for realizing left pedestal 301 respectively, Right socle 302 is locked with the pinching screw in pedestal clamping device 3.3 retaining mechanisms 304 are U-shaped structure, and as shown in figure 14, on two sides, correspondence position has through hole and screwed hole, and bending position is as screw positioning port, inwall circumference is designed with screw locating shoulder 306, are used for locking screw.Thus, by pinching screw through after screw positioning port, locate after the nut of screw and screw locating shoulder 306 are fitted; Subsequently, by pinching screw through after the through hole on a side, be connected with the screwed hole matching thread on another side, by tightening pinching screw, retaining mechanism 304 two sides spacing reduced, and then dog screw mouth bore is reduced, pinching screw clamping the most at last.Just can be realized the rotation of pinching screw by rotation lock mechanism 304, be convenient to the precession of pinching screw.
Because optical fiber h Mohs' hardness is 7, lithium niobate crystal chip i Mohs' hardness is 5, both belongs to hard brittle material, and at left pedestal 301 with Right socle 302, manually tighten pinching screw when being clamped by lithium niobate crystal chip i, when pinching screw excessive screwing, be easy to cause lithium niobate crystal chip i to damage.Therefore need accurately to control screw precession distance, and in the present invention, side is designed with limited block in left pedestal retaining mechanism and Right socle retaining mechanism 304, as shown in figure 15; Simultaneously, need ensure after left pedestal 301 and the pinching screw screwed hole screwed on loading blocks c in Right socle 302 make end be passed by screwed hole, when contacting with clamp b leading flank, by the further left pedestal retaining mechanism of turn 45 ° left, limited block contacts with left pedestal 301 left surface, and now the lithium niobate crystal chip i on left pedestal 301 clamps by loading blocks c trailing flank; By further turn Right socle retaining mechanism 45 ° to the right, limited block contacts with Right socle 302 right flank, and now the lithium niobate crystal chip i on Right socle 302 clamps by loading blocks c trailing flank, as shown in figure 13.
For the Ginding process of said structure optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, concrete steps are as follows:
Step 1: two pieces of lithium niobate crystal chip i are gripped by clamping device, and by adjustment precision turntable.Optical fiber lithium niobate crystal chip need ensure that fiber axis grinds to form 15 degree to fiber end face normal direction, meets grinding requirement, effectively can reduce back-reflection when being coupled with Y waveguide.
Step 2: host computer controls three-dimensional fix device 1 by motion controller, the lithium niobate crystal chip i on clamping device 3 is made to move to 1 ~ 2mm place above planetary-type grinding machine 5, and the position in x, y direction of adjustment three-dimensional fix device, ensure that the central point of the central point of the optical fiber h bonding with two pieces of lithium niobate crystal chip i phases and grinder 5 main shaft is apart from equal.Meanwhile, grinding abrasive paper is placed on grinder 5.
Step 3: start air compressor machine, open magnetic valve, regulates pressure-reducing valve to certain value; In the cylinder body of spring press out type cylinder 201, passing into the compressed air of definite value pressure by starting soundproof oil free air compressor, under compressed-air actuated pressure effect, and then driving clamping device 3 to move upward by piston rod; Now, two linear bearing 203d are positioned in the middle part of optical axis 203b, prevent optical axis 203b and linear bearing 203d from occurring the situation that position is excessive; And the back-moving spring in spring press out type cylinder 201 cylinder body moves to the centre position of spring press out type cylinder 201 stroke, for when in process of lapping, the appearance of lithium niobate crystal chip i grinding pressure changes suddenly, the equilibrant force making it gradual change is provided, ensure that the change of grinding pressure is a process gradually changed, prevent breaking of the grinding pressure excessive lithium niobate crystal chip i that causes or optical fiber h.Above-mentioned piston rod is subject to the mass body gravity that downward spring restoring force and piston rod output connect, and force value size is equal with the cylinder interior pressure of spring press out type cylinder 201.
Step 4: the brushless servo motor that host computer controls three-dimensional fix device 1 ZhongzZhou travel mechanism by motion controller enters low-speed running state, clamping device 3 is moved downward, lithium niobate crystal chip i is contacted with grinder.
Due to when lithium niobate crystal chip i does not contact grinder, power measured by force snesor 205 is only the gravity of the mass body (keyset, precision rotation platform 206 and clamping device 3 that the power induction end comprising force snesor 205 is installed) be connected with force snesor 205, and when lithium niobate crystal chip i starts to contact grinder 5, the upward pressure that grinder 5 applies can be subject to, this pressure can offset the gravity of part mass body, and the measured value of force snesor 205 is reduced.Thus, when force snesor 205 measured value reduces, show that optical fiber lithium niobate crystal chip i has contacted grinder 5, now, the brushless servo motor that host computer controls three-dimensional fix device 1 ZhongzZhou travel mechanism by motion controller shuts down.
Step 5: by grinding requirement setting grinder parameter, comprise grinding rotating speed, milling time; Subsequently, start grinder 5, grinding rotating speed progressively rises to setting value by zero, can ensure that optical fiber and lithium niobate crystal chip i not easily make optical fiber and lithium niobate crystal chip i brittle fracture because motor speed increases suddenly the larger grinding pressure caused in process of lapping, ensures the steady of process of lapping.
Step 6: when after arrival milling time, close grinder.
Step 7: host computer controls the brushless servo motor running of three-dimensional fix device 1 ZhongzZhou travel mechanism by motion controller, and clamping device is raised.
Step 8: close air compressor machine, shut electromagnetic valve, closes pressure-reducing valve.
Step 9: the complete lithium niobate crystal chip i of grinding is taken off by clamping device 3.
Claims (5)
1. optical fiber and a lithium niobate crystal chip Pneumatic Pressure grinding mechanism, is characterized in that: comprise three-dimensional fix device, pneumatic means and clamping device;
Wherein, three-dimensional fix device is arranged on grinding plate; Slide block in three-dimensional fix device ZhongzZhou travel mechanism installs pneumatic means; Pneumatic means is provided with and accommodates mechanism; By three-dimensional fix device realize clamping device that pneumatic means is installed spatially in the location of any point; Accommodate mechanism to be used for accommodating lithium niobate crystal chip;
Described pneumatic means comprises spring press out type cylinder, cylinder pole, governor motion, z-axis travel mechanism keyset, force snesor and precision rotation platform;
Wherein, in the cylinder body of spring press out type cylinder and cylinder mounting plate, installed surface threaded engagement is fixed; Cylinder mounting plate is used for being connected with z-axis travel mechanism; Make the piston rod of spring press out type cylinder perpendicular to grinding plate; The piston rod of spring press out type cylinder is used for being connected with governor motion;
Described governor motion has base plate, optical axis, top board, linear bearing and bearing holder (housing, cover); Wherein, optical axis is two, arranged in parallel; One end and the base plate of two optical axises are connected, and the other end and top board are connected; Two last covers of optical axis have a linear bearing, and the outer ring of two linear bearings is logical to be fixedly mounted in bearing holder (housing, cover), and is fixed by the relative position between two linear bearings by bearing holder (housing, cover); The piston rod axes normal of top board and spring press out type cylinder is arranged; Bearing holder (housing, cover) is connected with slide unit in z-axis travel mechanism;
Described force snesor stiff end is fixedly mounted on base plate bottom surface in governor motion, and power induction end installs precision rotation platform; Precision rotation platform round end is installed with clamping device.
2. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 1, it is characterized in that: described three-dimensional fix device adopts door type design, comprises Liang Tao x-axis travel mechanism, a set of y-axis travel mechanism, a set of z-axis travel mechanism and two pillars; X-axis travel mechanism, y-axis travel mechanism are identical with in z-axis travel mechanism structure, are made up of erecting bed, slide rail, slide unit, ball-screw and drive motors; Wherein, erecting bed is provided with two slide rails be parallel to each other; In ball-screw, screw rod and two slide rails be arranged in parallel, and screw rod two ends are arranged on erecting bed by support member, and are connected by bearing with between installed part; Screw rod one end is coaxially connected with drive motors output shaft, by drive motors drive screw turns; Slide block is arranged on two slide rails, is supported by two slide rails; In slide block and ball-screw, nut is fixed; Above-mentioned Liang Tao x-axis travel mechanism is arranged in parallel; Two pillars are vertically arranged, and bottom is arranged on the slide block in Liang Tao x-axis travel mechanism respectively; Y-axis travel mechanism two ends are fixedly mounted on two pillar tops respectively, are supported by pillar; Z-axis travel mechanism axis and y-axis travel mechanism axes normal are arranged, and erecting bed is fixed on the slide unit in y-axis travel mechanism by adaptor.
3. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 2, is characterized in that: in described Liang Tao x-axis travel mechanism, any one puts, and is also provided with encoder and grating scale in y-axis travel mechanism and in z-axis travel mechanism; Wherein, in encoder and ball-screw, the end of screw rod is coaxially fixed; In grating scale, scale grating is fixedly mounted on erecting bed, and grating reading head is arranged on the nut in ball-screw.
4. a kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism as claimed in claim 1, is characterized in that: described force snesor adopts beam type force snesor.
5., for the Ginding process of a kind of optical fiber according to claim 1 and lithium niobate crystal chip Pneumatic Pressure grinding mechanism, it is characterized in that: step is as follows:
Step 1: two pieces of optical fiber lithium niobate crystal chips are gripped by clamping device; And follow according to grinding requirement, make the angle between optical fiber lithium niobate crystal chip face machined flat normal direction and grinder surface normal by adjustment precision rotation platform;
Step 2: host computer controls three-dimensional fix device by motion controller, makes the lithium niobate crystal chip on clamping device move to above grinder; Meanwhile, grinding abrasive paper is placed on grinder;
Step 3: start the compressed air that air compressor machine passes into definite value pressure in the cylinder body of spring press out type cylinder, and then drive clamping device to move upward by piston rod; Now, two linear bearings are made to be positioned in the middle part of optical axis; And the back-moving spring in spring press out type cylinder block moves to the centre position of spring press out type cylinder stroke;
Step 4: host computer controls three-dimensional fix device ZhongzZhou travel mechanism by motion controller makes clamping device move downward, and when reducing to force sensor measuring value, host computer controls three-dimensional fix device by motion controller to be stopped; Now, optical fiber lithium niobate crystal chip contacts with grinder;
Step 5: setting grinder parameter, comprises grinding rotating speed, milling time; Subsequently, grinder is started;
Step 6: when after arrival milling time, close grinder;
Step 7: host computer controls three-dimensional fix device ZhongzZhou travel mechanism by motion controller makes clamping device raise;
Step 8: close air compressor machine, shut electromagnetic valve, closes pressure-reducing valve;
Step 9: the complete optical fiber lithium niobate crystal chip of grinding is taken off by clamping device.
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| CN201510276478.1A CN104959908B (en) | 2015-05-26 | 2015-05-26 | A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process |
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| CN201510276478.1A CN104959908B (en) | 2015-05-26 | 2015-05-26 | A kind of optical fiber and lithium niobate crystal chip Pneumatic Pressure grinding mechanism and Ginding process |
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| CN105834889A (en) * | 2016-05-12 | 2016-08-10 | 苏州市展进机电设备有限公司 | Automatic grinding device for silicon wafer |
| CN106493633A (en) * | 2016-12-28 | 2017-03-15 | 青岛奥美克医疗科技有限公司 | A kind of apparatus and method of lighting fiber optical cable automatic grind polishing |
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| CN108406579A (en) * | 2018-01-31 | 2018-08-17 | 江苏法尔胜光电科技有限公司 | Grinding clamp suitable for fiber optic bundle end face |
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| CN107350961A (en) * | 2016-12-20 | 2017-11-17 | 北京航空航天大学 | A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp |
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| CN112558254A (en) * | 2020-12-08 | 2021-03-26 | 北京信息科技大学 | Be used for planting optic fibre flexible material sensor fixed knot to construct |
| CN113910019A (en) * | 2021-09-24 | 2022-01-11 | 杭州电子科技大学 | Conical optical fiber automatic grinding machine based on cone angle fine adjustment mechanism and grinding method thereof |
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