CN104952685B - The big pumping speed ionic pump of lightweight - Google Patents
The big pumping speed ionic pump of lightweight Download PDFInfo
- Publication number
- CN104952685B CN104952685B CN201510024775.7A CN201510024775A CN104952685B CN 104952685 B CN104952685 B CN 104952685B CN 201510024775 A CN201510024775 A CN 201510024775A CN 104952685 B CN104952685 B CN 104952685B
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- Prior art keywords
- pump
- pump housing
- pumping speed
- lightweight
- ionic pump
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
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- Structures Of Non-Positive Displacement Pumps (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
The present invention relates to a kind of ionic pump, more particularly to a kind of big pumping speed ionic pump of lightweight, including the pump housing, the pump housing is provided with high-pressure mini electrode；Anode cartridge module, cathode titanium plates and magnet assembly are provided with the pump housing, magnet assembly is made up of magnet steel and magnetic conduction iron；The pump housing is the titanium alloy pump housing；Magnet steel is Nd-Fe-B magnet steel；The overall rectangular frame of magnetic conduction iron, is formed, each U-shaped steel plate is that the wing plate by a bottom plate and positioned at the bottom plate both sides is integrally formed, and is gradually reduced from that end of the corner of each wing plate to the thickness of the wing plate other end by two U-shaped steel plate splicings；A square bar, center and the anode canister components welding of square bar, the both sides welding lug of square bar are provided with rear side of the pump housing；High-pressure mini electrode uses YV2TJ electric connectors and the wires of GFK 10KV 26, and by optimization design, ionic pump of the invention can reach the pumping speed of existing ionic pump, and weight is only 3KG.
Description
Technical field
The present invention relates in a kind of ionic pump, more particularly to a kind of big pumping speed ionic pump of lightweight.
Background technology
The function of ionic pump is to provide 10-4The pressure of below Pa magnitudes, mainly realize Gao Zhen using Penning discharge principle
Sky, basic functional principle are：
1. ionization is with bombardment when the air pressure of pipeline is evacuated to 5 × 10 by roughing vacuum pump-2During below Pa, ion pump startup, anode connects
Logical 6000V high voltage.In the presence of high pressure, the gas that pump body retains is ionized, and the ion of generation is in voltage and magnetic
In the presence of, bombarding cathode titanium plate, cathode material titanium is sputtered.
2. with landfill through Ions Bombardment, it is new that the titanium atom group come out from cathodic sputtering falls the formation on male or female for reaction
Fresh titanium film, run into active gases and just react, stable compound is generated, such as titanium oxygen compound or titanium nitrogen compound.It is lazy
Property gas and titanium film can not generate compound, if now at a time when titanium atom group comes, inert gas may be buried.If hair
The chance of raw this burial is few, and ionic pump is just very low to the pumping speed of inert gas.
Hydrionic quality very little, cathode material can not be caused to sputter during bombarding cathode, but slip into cathode internal generation
Titanium hydride compound forms solid solution between lattice.
In short, ionic pump is not outside gas excavationg pump, but gas is confined in pump.
At present, comparative maturity, primary structure include pump case, have anode and negative electrode in housing the technology of ionic pump,
There is the pumping hole flange of the vacuum feedthroughs that 6000V high direct voltages are inputted to anode and a suction pumped gas on housing, forever
Long magnet and magnetic conduction iron rule are wrapped in the outside of pump case, there is the magnetic of about 1500 Gausses at pump case inner cathode and anode
.
There are the following problems for ionic pump on the market：
1st, ionic pump is more heavy, even the product of famous foreign, the weight of 20L/s ionic pumps also 10 kilograms with
On, wherein permanent-magnet steel and magnetic conduction iron accounts for the 70% of gross weight.
2nd, the vacuum high-pressure lead on the pump housing is only suitable for working at low altitude area.And rarefaction of air at High aititude, Ke Nengyin
Arc discharge is played, so as to burn vacuum high-pressure lead.
In view of it is above-mentioned the defects of, the design people, be actively subject to research and innovation, to found a kind of big pumping speed of lightweight from
Sub- pump, solve the problems, such as above-mentioned.
The content of the invention
In order to solve the above technical problems, the present invention provides a kind of in light weight, portable, bigger ion of pumping speed weight
Pump.
The big pumping speed ionic pump of lightweight of the present invention, including the big pumping speed ionic pump of lightweight, including the pump housing, the pump housing are provided with micro-
Type high-field electrode；Anode cartridge module, cathode titanium plates and magnet assembly are provided with the pump housing, magnet assembly is by magnet steel and magnetic conduction channel-section steel group
Into；The pump housing is the titanium alloy pump housing；The magnet steel is Nd-Fe-B magnet steel；The overall rectangular frame of the magnetic conduction channel-section steel, by two U
Shape steel plate splicing forms, and each U-shaped steel plate is that the wing plate by a bottom plate and positioned at the bottom plate both sides is integrally formed, from each
That end of the corner of wing plate is being gradually reduced to the thickness of the wing plate other end；A square bar is provided with rear side of the pump housing,
The center of square bar and anode canister components welding, the both sides welding lug of square bar.
Further, the U-shaped steel plate is DT4 pure iron steel plates.
Further, the high-pressure mini electrode uses YV2TJ electric connectors and GFK-10KV-26 wires.
Further, it is connected on front side of the pump housing using loose flange with outside gas circuit, the material of loose flange is titanium
Category.
Further, the marginal portion of the loose flange offers several kidney-shapeds on the basis of existing circular port
Hole.
Further, the area of the anode cartridge module is 7000mm2。
Further, the thickness at that end of the corner of wing plate is 4mm, and the thickness of the other end of the wing plate is 2mm.
As described above, the concrete measure for mitigating weight is as follows for the structure of ionic pump：
1. using neodymium iron boron as permanent-magnet steel, weight is only 1/3rd of ferrite magnetic steel.
2. the thickness change of magnetic conduction iron.The big comparison of magnetic flux is thick, and the small ratio of magnetic flux is relatively thin, keeps magnetic conduction ferromagnetic logical close
Degree is approximate.
3. pump case material replaces stainless steel with titanium alloy, the proportion of titanium is only the 60% of stainless steel.Titanium the moon is eliminated simultaneously
Pole, instead titanium pump shell, so not only alleviates weight, and the gap between permanent-magnet steel is shortened, and magnetic field intensity improves, and takes out
Speed also therefore improves.
4. the pump housing is provided with loose flange, there are several waist-shaped holes, mitigate weight.
5. further mitigate weight as high-tension cable from advanced GFK-10KV-26 wires
Designed by above-mentioned method so that ionic pump gross weight of the invention is not higher than 3kg.Particularly set by loss of weight
The magnetic field intensity of the magnet assembly of the ionic pump of meter is higher than 1500 Gausses, and weight is only that (standardized product before relatively mitigates 2Kg
Half weight).Experiment proves：The weight of the ionic pump of Curve guide impeller manufacture is that appearance and size is (157 ± 1) no more than 3kg
× (170 ± 2) × (115 ± 1) (external import like product weight is 11 kilograms).
Brief description of the drawings
Fig. 1 is the structural representation of the big pumping speed ionic pump of lightweight of the present invention；
Fig. 2 is the sectional view of the big pumping speed ionic pump of lightweight of the present invention；
Fig. 3 is Fig. 2 top view；
Fig. 4 is the structural representation of magnet steel and magnetic conduction channel-section steel；
Fig. 5 is the structure chart of U-shaped steel plate；
Fig. 6 is the punching schematic diagram of loose flange.
In figure：1st, the pump housing；2nd, high-pressure mini electrode；3rd, anode cartridge module；4th, magnet steel；5th, magnetic conduction channel-section steel；6th, U-shaped steel plate；
7th, square bar；8th, lug；9th, loose flange；61st, bottom plate；62nd, wing plate；91st, mounting hole.
Embodiment
The present invention is further described with reference to the accompanying drawings and examples.
Referring to shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the big pumping speed ionic pump of lightweight shown in the present invention, including
The pump housing 1, the pump housing 1 are provided with high-pressure mini electrode 2, and high-pressure mini electrode 2 is led using YV2TJ electric connectors and GFK-10KV-26
Line；Anode cartridge module 3, cathode titanium plates (not shown) and magnet assembly are provided with the pump housing 1, the area of anode cartridge module is
7000mm2, magnet assembly is made up of magnet steel 4 and magnetic conduction channel-section steel 5；The pump housing 1 is the titanium alloy pump housing；Magnet steel 4 is Nd-Fe-B magnet steel；Lead
The overall rectangular frame of magnetic channel-section steel 5, is spliced by two U-shaped steel plates 6, and U-shaped steel plate is DT4 pure iron steel plates, each U-shaped steel plate 6
All it is that wing plate 62 by a bottom plate 61 and positioned at the bottom plate both sides is integrally formed, from that end of the corner of each wing plate to the wing
The thickness of the plate other end is being gradually reduced, and the thickness at that end of the corner of wing plate is 4mm, and the thickness of the other end of the wing plate is
2mm；The rear side of the pump housing 1 is provided with a square bar 7, center and the anode canister components welding of square bar 7, and the both sides of square bar are welded
Lug 8.It is connected on front side of the pump housing using loose flange 9 with outside gas circuit, the material of loose flange 9 is titanium, loose flange
Marginal portion offers several mounting holes 91 on the basis of existing circular port.
In order to mitigate case weight, the present invention devises processing mode of the titanium alloy as ion pump case making material.
The proportion of titanium alloy is 4.5g/cm3, is the 60% of stainless steel, meanwhile, titanium is specific strength highest metal, has specific stiffness, ratio
The advantages that intensity is high, and discharge quantity is small, and corrosion resistance is good.We can subtract the stainless steel making pump housing of selection titanium material substitution significantly
The quality of light ion pump.
In order to mitigate the weight of magnet steel, present invention design uses magnet steel of the Nd-Fe-B magnet steel as ionic pump.Neodymium iron boron is
A kind of rare earth permanent-magnetic material, there is high energy product, high-energy-density and rectify power by force；The minus plate of ionic pump two needs not
Less than the magnetic field intensity of 1500 Gausses, in the case of accumulating identical on the right side, it is strong that 500g Nd-Fe-B magnet steel can reach magnetic field
The requirement of degree, 1/3rd of magnetic material mass and volume before being only.
The use of magnetic conduction iron puies forward the magnetic field intensity at cathode anode significantly.The magnetic conduction iron of ionic pump is rectangle frame, by two U
Shape steel plate splicing is formed, and steel plate is made from DT4 pure iron, and having obtained the Distribution of Magnetic Field in magnetic conduction iron by emulation experiment is not
Uniformly, have have by force it is weak.According to the Distribution of Magnetic Field inside magnetic conduction iron, the present invention retains the thickness of the strong part of magnetic field intensity, and
The thickness of the weak part of magnetic field intensity is reduced, loss of weight 300g or so before the U-shaped steel plate structure ratio after optimization.
Ionic pump is connected using CF35 loose flanges with outside gas circuit, and flange is using the instead preceding stainless steel of titanium
Material is processed, and part metals are removed in punching in the marginal portion of overcoat flange；Experiment proves：The loose flange processed
Quality be only before stainless steel material 40%, and air-tightness and have good stability.
General ionic pump is equipped with rear baffle in the market, and physical support and protection are provided for pump body structure.
However, the operating mode in space station of TGTHB05121 ionic pumps it is more common atmospheric conditions it is good, and the anode of ionic pump is in itself
The closed component in nine Room, without carrying out safeguard measure again.Being analyzed more than, we eliminate the rear baffle of ionic pump, meanwhile, it is
The stability of ionic pump in itself is not influenceed, adds a square bar on rear side of the ion pump housing.The center of square bar and anode unit
Part welds, and both sides welding lug, the stable strong point is provided for lug.Experiment proves：Remove rear baffle, the ion of the side's of addition bar
The pump housing of pump alleviates 0.8kg or so, and overall stability has been lifted on the contrary.
The present invention have selected YV2TJ electric connectors and GFK-10KV-26 wires substitute traditional product.YV2TJ electric connectors
It itself can be resistant to 7000V high pressure, while its internal vacuum environment can effectively suppress glow discharge phenomenon, and its body
Electric connector before accumulating relatively greatly reduces.The electrical property feature of ionic pump is：Operating voltage is high, and current strength is small, is selected for this
With GFK-10KV-26 wires, drawn after wrapping up silicone rubber sleeve by the direct fishing line of motor cabinet, the electrical property for both having met ionic pump will
Summation stability requirement, the quality of ionic pump is reduced again.
Designed by above-mentioned method so that ionic pump gross weight of the invention is not higher than 3000 grams.Particularly through over-subtraction
The magnetic field intensity for reseting the magnet assembly of the ionic pump of meter is higher than 1500 Gausses, and weight is only the 2Kg (standardized products before relatively
Alleviate half weight).Experiment proves：The weight of the ionic pump of Curve guide impeller manufacture is no more than 3kg, and appearance and size is (157
± 1) × (170 ± 2) × (115 ± 1) (external import like product weight is 11 kilograms).
According to the classical formulas and design experiences of the ionic pump speed of exhaust, in the Gauss of magnetic field intensity 1500, operating voltage
In the case of 6000 volts, the pumping speed S of ionic pump Sole anode cylinder0Follow following equation：
S0=1.9hdHU1/2x10-6(liter/second)
Wherein：H anode canister height 2.4cm
D anode canister diameters 1.6cm
U high direct voltages 6000V
The Gauss of H magnetic field intensities 1500
Above-mentioned numerical value is substituted into and calculated, S0=0.8477 (liter/second).Because the ionic pump has 33 anode canisters altogether, so
Pumping speed S=33x S0=28 (liters/second).Influenceed in view of pump internal gas admittance, effective pumping speed SeffGeneral only S's
75%, therefore Seff=Sx75%=21 (liter/second).
The big pumping speed ionic pump of lightweight shown in the present invention, the basic parameter of design are：
Pumping speed：20L/S (dry air)；40L/S (hydrogen)；
Start pressure：Less than 1 × 10-3Pa of pressure.
Limiting pressure：No more than 5 × 10-8Pa.
Weight：3kg.
Weight composition such as following table：
| Part | Material | Weight | Percentage |
| The pump housing | Titanium | 850 grams | 29.3% |
| Anode cartridge module | Stainless steel 304 | 201 grams | 6.9% |
| Cathode titanium plates | β titaniums | 116 grams | 4% |
| Magnet steel | Neodymium iron boron | 500 grams | 17.2% |
| Magnetic conduction channel-section steel | Pure iron DT4 | 1100 grams | 37.9% |
| High-pressure mini electrode | Aluminum oxide | 130 grams | 4.4% |
Including the foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto,
Any one skilled in the art the invention discloses technical scope in, change or replacement can be readily occurred in, all
It should be included within the scope of the present invention.Therefore, protection scope of the present invention should be with the scope of the claims
It is defined.
Claims (7)
1. the big pumping speed ionic pump of lightweight, including the pump housing, the pump housing is provided with high-pressure mini electrode；Anode canister group is provided with the pump housing
Part, cathode titanium plates and magnet assembly, magnet assembly are made up of magnet steel and magnetic conduction channel-section steel；It is characterized in that：The pump housing closes for titanium
The golden pump housing；The magnet steel is Nd-Fe-B magnet steel；The overall rectangular frame of the magnetic conduction channel-section steel, is formed, often by two U-shaped steel plate splicings
Individual U-shaped steel plate is all that the wing plate by a bottom plate and positioned at the bottom plate both sides is integrally formed, from that end of the corner of each wing plate
Thickness to the wing plate other end is gradually reduced；A square bar, the center of square bar and anode canister are provided with rear side of the pump housing
Components welding, the both sides welding lug of square bar.
2. the big pumping speed ionic pump of lightweight as claimed in claim 1, it is characterised in that the U-shaped steel plate is DT4 pure iron steel
Plate.
3. the big pumping speed ionic pump of lightweight as claimed in claim 1, it is characterised in that the high-pressure mini electrode uses
YV2TJ type electric connectors.
4. the big pumping speed ionic pump of lightweight as claimed in claim 1, it is characterised in that use loose flange on front side of the pump housing
It is connected with outside gas circuit, the material of loose flange is titanium.
5. the big pumping speed ionic pump of lightweight as claimed in claim 4, it is characterised in that the marginal portion of the loose flange exists
On the basis of existing circular port, several mounting holes are offered.
6. the big pumping speed ionic pump of lightweight as claimed in claim 1, it is characterised in that the area of the anode cartridge module is
7000mm2。
7. the big pumping speed ionic pump of lightweight as claimed in claim 1, it is characterised in that the thickness at that end of the corner of the wing plate
Spend for 4mm, the thickness of the other end of the wing plate is 2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510024775.7A CN104952685B (en) | 2015-01-19 | 2015-01-19 | The big pumping speed ionic pump of lightweight |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510024775.7A CN104952685B (en) | 2015-01-19 | 2015-01-19 | The big pumping speed ionic pump of lightweight |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104952685A CN104952685A (en) | 2015-09-30 |
| CN104952685B true CN104952685B (en) | 2017-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510024775.7A Active CN104952685B (en) | 2015-01-19 | 2015-01-19 | The big pumping speed ionic pump of lightweight |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10121627B1 (en) * | 2017-10-26 | 2018-11-06 | Edwards Vacuum Llc | Ion pump noble gas stability using small grain sized cathode material |
| CN108287461A (en) * | 2017-12-22 | 2018-07-17 | 兰州空间技术物理研究所 | A kind of cesium beam tube titanium getter pump anode canister bracing means |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3042824A (en) * | 1960-06-22 | 1962-07-03 | Varian Associates | Improved vacuum pumps |
| GB1530411A (en) * | 1975-02-18 | 1978-11-01 | Varian Associates | Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope |
| CN1153832A (en) * | 1996-01-05 | 1997-07-09 | 日本真空技术株式会社 | Sputter-ion pump |
| CN1708822A (en) * | 2002-12-18 | 2005-12-14 | 瓦里安有限公司 | Magnet assembly for sputter ion pump |
| EP2431996A1 (en) * | 2010-09-17 | 2012-03-21 | Deutsches Elektronen-Synchrotron DESY | Vacuum ion pump |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07312202A (en) * | 1994-03-22 | 1995-11-28 | Ulvac Japan Ltd | Sputter ion pump |
| DE602006002264D1 (en) * | 2006-06-01 | 2008-09-25 | Varian Spa | Magnet arrangement for a sputter ion pump |
| EP2151849B1 (en) * | 2008-08-08 | 2011-12-14 | Agilent Technologies Italia S.p.A. | Vacuum pumping system comprising a plurality of sputter ion pumps |
-
2015
- 2015-01-19 CN CN201510024775.7A patent/CN104952685B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3042824A (en) * | 1960-06-22 | 1962-07-03 | Varian Associates | Improved vacuum pumps |
| GB1530411A (en) * | 1975-02-18 | 1978-11-01 | Varian Associates | Sputter-ion vacuum pump having replaceable cathodes as part of the vacuum/envelope |
| CN1153832A (en) * | 1996-01-05 | 1997-07-09 | 日本真空技术株式会社 | Sputter-ion pump |
| CN1708822A (en) * | 2002-12-18 | 2005-12-14 | 瓦里安有限公司 | Magnet assembly for sputter ion pump |
| EP2431996A1 (en) * | 2010-09-17 | 2012-03-21 | Deutsches Elektronen-Synchrotron DESY | Vacuum ion pump |
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| Publication number | Publication date |
|---|---|
| CN104952685A (en) | 2015-09-30 |
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