CN104949694A - Magnetic torsion type magnetoelectric sensor - Google Patents

Magnetic torsion type magnetoelectric sensor Download PDF

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Publication number
CN104949694A
CN104949694A CN201410116568.XA CN201410116568A CN104949694A CN 104949694 A CN104949694 A CN 104949694A CN 201410116568 A CN201410116568 A CN 201410116568A CN 104949694 A CN104949694 A CN 104949694A
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piezoelectric
magnet
magnetic
turns round
magnetoelectric transducer
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CN104949694B (en
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邢增平
吉红伟
仲建安
刘宜伟
李润伟
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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Abstract

The invention provides a magnetic torsion type magnetoelectric sensor. A single piezoelectric plate is adopted for the magnetoelectric sensor. The electrode of the single piezoelectric plate is divided for forming more than two small piezoelectric areas which are separated from one another. Then electric polarization processing is performed on each segment of small piezoelectric area along a thickness direction. The polarization directions of two adjacent segments of small piezoelectric areas are opposite. After electric polarization, the segments of small piezoelectric areas with same polarization direction are connected as an output end, thereby obtaining two output ends. In an operation state, a magnet generates a magnetic torsion under the function of an applied magnetic field; and driving each segment of small piezoelectric area to perform bending deformation through interface contact, thereby generating voltage output at the two output ends. Compared with the prior art, the magnetic torsion type magnetoelectric sensor with the structure has functions of preventing a failure problem caused by interface slip in use of two voltage chips, reducing manufacture cost and facilitating batch production.

Description

A kind of magnetic turns round type magnetoelectric transducer
Technical field
The present invention relates to electronic material device field, the magnetic being specifically related to a kind of detectable magnetic signal turns round type Magnetic Sensor.
Background technology
Sensor technology has become the important technology weighing modernization progress, and the sensor of high precision, cheapness, low-power consumption has become the development trend of moment sensor.
As the one in sensor, Magnetic Sensor plays key player in development of modern scientific technology, and the raising of its reliability and dirigibility also makes it apply and becomes more and more extensive.With classification of type, Magnetic Sensor can be divided into: line of induction ring (Search coil), Hall effect type (Hall effect), magnetoelectricity resistance type (AMR or GMR), magnetic channel type (MTJ or SDJ), magneto-optical (Magneto-optical), optical pumping type (Optically pumped), magnetic diode type (Magneto-diode), magnetic triode type (Magneto-transistor), atomic magnetic force type (Nuclear precession), magnetic flux gate (Fluxgate), magnetoelectricity type (magnetoelectric), superconductive quantum interference type (SQUID) etc.
These Magnetic Sensors have himself relative merits.For low-frequency acquisition, the Magnetic Sensor of current full accuracy is SQUID, but SQUID needs to work at low temperatures, and expensive, is difficult to be widely used.The Magnetic Sensor that other detection accuracies are higher has atomic magnetic force type, magnetic flux gate, magnetoelectricity resistance type, optical pumping type Magnetic Sensor etc., but the Magnetic Sensor of these types is expensive or make complicated, constrains and generally applies.
Comparatively speaking, magnetoelectric transducer is subject to the favor of people because preparing simply.At present, common magnetoelectricity type sensor, primarily of magnetostriction materials and the stacked compound of piezoelectric, realizes magnetoelectricity conversion by the intrinsic coupling of material, obtains magnetoelectric effect.This layered electromagnetic effect is propose (US patent No.5675252.1997) by SQM Technology company the earliest, the Penn state Univedrsity of the U.S. afterwards, Virginia Tech, Oakland University, Muscovite Novgorod state University, the research work that the units such as the Tsing-Hua University of China and Nanjing University are correlated with.
The principle of work of this layered electromagnetic sensor is: when magnetic fields is to magnetoelectric transducer, magnetostriction materials generation deformation, by the coupling of interfacial force, deformation is passed to piezoelectric, thus make piezoelectric generation deformation, by the direct piezo electric effect output charge of piezoelectric, thus realize the conversion of magnetic to electricity.This coupling scheme are called magnetostriction-piezoelectricity coupling magnetoelectricity mode.In order to obtain strong magnetoelectric effect, often need to adopt the material having strong magnetostriction coefficient and suppress electrostrictive coefficient to carry out compound.The common material with giant magnetostrictive driver coefficient has terbium dysprosium ferrum (Terfenol-D), iron gallium (Galfenol), non-crystaline amorphous metal (Metglass) etc.But Terfenol-D and Galfenol all needs expensive rare earth material to prepare, expensive price, thus limit its scale and use; Although Metglass is relatively cheap, the magnetoelectric transducer sensitivity using it to make easily affects by magnetic field of the earth, thus limits its use under multiple occasion.
2008, scientist proposes a kind of method not adopting magnetostriction materials to make magnetoelectronic devices, see the article being published in Giant magnetoelectric effect in Pb (Zr, Ti) O-3-bimorph/NdFeB laminate device by name on 93 phase U.S. AIP association physical magazine Applied physics letters in 2008.The method adopts piezoelectric bimorph and magnet compound and realizes magnetoelectric effect, and in order to distinguish with aforesaid layered electromagnetic sensor, this magnetoelectronic devices is also referred to as magnetic and turns round type magnetoelectric transducer.Magnetic is turned round type magnetoelectric transducer and is replaced magnetostriction materials owing to have employed cheap magnet, and its cost of manufacture is reduced greatly; In addition, different from layered electromagnetic sensor, magnetic is turned round type magnetoelectric transducer and is adopted A.O. power to cause piezoelectric deforming, and magnet, A.O. power as NdFeB etc. all can keep stable in wider working range, and this makes such sensor all have very stable sensitivity at extremely wide magnetic field range.
But, current magnetic turns round in type magnetoelectric transducer structure to adopt the piezoelectric bimorph be stacked together more, easily there is interface sliding at this piezoelectric bimorph in environment that works long hours and cause losing efficacy, adopting multi-disc piezoelectric patches also to make element manufacturing cost increase in addition.
Summary of the invention
The magnetic that the present invention is directed to above-mentioned employing piezoelectric bimorph turns round the deficiency of type magnetoelectric transducer structure, and the magnetic providing a kind of new structure turns round type magnetoelectric transducer, and it has, and structure is simple, cost of manufacture is low, stable performance, and is applicable to the advantages such as large-scale production.
A kind of magnetic turns round type magnetoelectric transducer, comprises piezoelectric patches and magnet;
Described magnet is at least connected with one end of piezoelectric patches;
Described piezoelectric patches adopts monolithic piezoelectric sheet, and this monolithic piezoelectric plate electrode, through dividing processing, forms the little piezoelectric regions of more than two sections and two sections, there is interval between two sections of adjacent little piezoelectric regions; Then each section of little piezoelectric regions through-thickness is carried out polarization process, the polarised direction of two sections of adjacent little piezoelectric regions is contrary, is connected each section of identical for polarised direction little piezoelectric patches as an output terminal, obtains two output terminals after polarization;
During duty, magnet produces magnetic torsion under additional magnetic fields, drive the distortion of monolithic piezoelectric bending tablet by interracial contact, thus drive each section little piezoelectric regions to produce flexural deformation, the upper and lower surface of through-thickness produces contrary stress, produce voltages at two output terminals and export.
The piezoelectric that described monolithic piezoelectric sheet adopts this area general is made, and concrete material is not limit, preferably by piezoelectric coefficient d 33or d 31at the piezoelectric of more than 10pC/N, such as, select piezoelectric ceramic piece, piezoelectric monocrystal sheet or piezopolymer etc.
The shape of described monolithic piezoelectric sheet is not limit, and is preferably plates.
The permanent magnet that described magnet adopts this area common, concrete material is not limit, such as, can select metal alloy magnet or ferrite magnetic iron material etc., as ndfeb magnet (NdFeB), samarium cobalt magnet (SmCo) and ferrite lattice etc.
Described magnet is at least connected with one end of monolithic piezoelectric sheet, is specifically divided into the following two kinds situation:
(1) one end of monolithic piezoelectric sheet is connected with magnet, and the other end carries the baby fixing;
As shown in (a) in Fig. 1, monolithic piezoelectric sheet after electrode dividing processing, polarization process, A1(A2) district and B1(B2) polarised direction of district's through-thickness is contrary.
During duty, as shown in (b) Yu (c) in Fig. 1, as applying externally-applied magnetic field δ H, when corresponding magnetic induction density is δ B, magnetic moment m with magnet has an effect by magnetic field, produces magnetic torsion δ τ=m × δ B, and this magnetic torsion δ τ reverses making magnet to the direction that magnetic moment m and B is consistent.Due to magnet, by piezoelectric patches constraint, piezoelectric patches one end is subject to the constraints such as clamping, thus makes piezoelectric patches produce flexural deformation, and two surfaces up and down at piezoelectric patches through-thickness are produced contrary stress by this flexural deformation.Because upper and lower two Surface Polarizations of same polarized area point to contrary, to produce the electric charge of identical polar (such as, in Fig. 1 (b), upper surface A1 is identical with lower surface A2 charge polarity, upper surface B1 is identical with lower surface B2 charge polarity), and due to A1(A2) contrary with polarised direction B1(B2), so A1(A2) contrary with electric charge B1(B2).A1 with A2 conducting be connected as an output terminal, B1 with B2 conducting is connected as another one output terminal, namely produces voltage and exports.
(2) two ends of monolithic piezoelectric sheet are connected with the second magnet with the first magnet respectively, and the first magnet is contrary with the direction of magnetization of the second magnet;
As described in above-mentioned (1), first magnet and the second magnet all produce magnetic torsion, the magnetic torsion that first magnet produces is contrary with the magnetic torsion direction that the second magnet produces, and at piezoelectric patches two ends, so the first magnet and the second magnet produce identical stress by making piezoelectric patches, play Overlay, lacked clamping device compared with the situation therefore adding magnet with clamping one end, one end in above-mentioned (1), added the dirigibility of application.
When magnet produces magnetic torsion under additional magnetic fields, magnet is at least connected with one end of monolithic piezoelectric sheet.This connected mode is not limit, and such as, magnet can be connected to the end face of monolithic piezoelectric sheet, and also can be connected to the upper surface and lower surface etc. of monolithic pressure, described upper surface and lower surface refer to along the upper and lower surface of piezoelectric patches thickness direction.
Compared with prior art, tool of the present invention has the following advantages:
Adopt monolithic piezoelectric sheet, after splitting, polarize process, make it form two voltage output ends, one side effectively prevent generation interface sliding when adopting biplate voltage sheet and causes the problem of inefficacy, effectively reduce cost of manufacture on the other hand, be conducive to large-scale production.
Accompanying drawing explanation
Fig. 1 is the fundamental diagram that magnetic of the present invention turns round type magnetoelectric transducer;
Fig. 2 is the structural representation that magnetic in the embodiment of the present invention 1 turns round type magnetoelectric transducer;
Fig. 3 is the structural representation that magnetic in the embodiment of the present invention 2 turns round type magnetoelectric transducer;
Fig. 4 is the structural representation that magnetic in the embodiment of the present invention 3 turns round type magnetoelectric transducer;
Fig. 5 is the structural representation that magnetic in the embodiment of the present invention 4 turns round type magnetoelectric transducer.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is described in further detail, it is pointed out that the following stated embodiment is intended to be convenient to the understanding of the present invention, and any restriction effect is not play to it.
Embodiment 1:
In the present embodiment, magnetic turns round the structure of type magnetoelectric transducer as shown in Figure 2, comprises monolithic piezoelectric sheet 1 and magnet.
Monolithic piezoelectric sheet 1 is of a size of: long 29mm, wide 6mm, thick 0.8mm, and through-thickness, by this monolithic piezoelectric plate electrode dividing processing, forms two sections of little piezoelectric regions, and interval 1mm between this section little piezoelectric patches.
Magnet is made up of magnet 2 and 3, and magnet 2 and 3 is NdFeB, and this magnet 2 with 3 magnetic moment M direction all parallel with the thickness direction of monolithic piezoelectric sheet 1.
These two sections of piezoelectric regions through-thickness are carried out polarization process, and polarised direction is contrary.In addition, reserve 4mm at the left end of the little piezoelectric patches being positioned at the left side and do not cover electrode, in order to fixed clamp, namely adopt fixed clamp device to be fixed by this end; Reserve 4mm at the right-hand member of the little piezoelectric patches being positioned at the right and do not cover electrode in order to binding magnet, be bonded in by magnet 2 and 3 upper and lower surface that this reserves part through-thickness respectively.
The polarization of these two sections of piezoelectric regions through-thickness, and polarised direction is contrary, upper surface electrode is respectively A1, B1, and lower surface is respectively A2, B2.After polarization, upper and lower for A1 with A2 conducting is connected as an output terminal, upper and lower for B1 with B2 conducting is connected as another output terminal, obtains two output terminals.
During duty, externally-applied magnetic field, comprise Hac(to exchange) and Hdc(direct current), magnetic torsion is produced at magnetic fields lower magnet 2 and 3, drive piezoelectric patches to produce flexural deformation, thus drive each section of piezoelectric regions to produce flexural deformation, and produce pressure (drawing) stress along upper surface A1 and B1, produce along lower surface A2 and B2 and contrary draw (pressure) stress, thus produce voltages output at two output terminals.
In the present embodiment, low frequency 0.1 ~ 10Hz exports as 2V/cm.Oe, and resonance ~ 150Hz exports as 50V/cm.Oe.
Embodiment 2:
In the present embodiment, the structure that magnetic turns round type magnetoelectric transducer is substantially identical with the structure in embodiment 1, difference reserves 4mm at the left end of the little piezoelectric patches being positioned at the left side not cover electrode, in order to binding magnet 4 and 5, the upper and lower surface that this reserves part through-thickness is bonded in respectively, as shown in Figure 3 by magnet 4 and 5.Wherein, identical with magnet 2 and 3, magnet 4 and 5 is NdFeB, but this magnet 4 is contrary with the magnetic moment direction of magnet 2 and 3 with the magnetic moment direction of 5.
During duty, externally-applied magnetic field, produces magnetic torsion at magnetic fields lower magnet 2 and 3, and magnet 4 and 5 produces rightabout magnetic torsion.The magnetic torsion that magnet 2 and 3 produces drives the little piezoelectric patches being positioned at the right to produce flexural deformation, thus drive piezoelectric patches to produce flexural deformation, and produce pressure (drawing) stress along upper surface A1, B1, produce along lower surface A2, B2 and contrary draw (pressure) stress, thus produce voltages output at two output terminals.Magnet 4 is the same with magnet 2 and 3 effect with the flexural deformation effect that the magnetic torsion that 5 produce makes piezoelectric patches produce, and therefore plays Overlay.Compared with embodiment 1, the magnetic of this structure turns round type magnetoelectric transducer without the need to clamping device, adds the dirigibility of application.
In the present embodiment, low frequency 0.1 ~ 10Hz exports as 2V/cm.Oe, and resonance ~ 900Hz exports as 45V/cm.Oe.
Embodiment 3:
In the present embodiment, the structure that magnetic turns round type magnetoelectric transducer is substantially identical with the structure in embodiment 1, and difference is this monolithic piezoelectric sheet is multistage electrode, forms ten Duan little piezoelectric polarization districts, and interval 1mm between Liang Duan little piezoelectric polarization district adjacent one another are, as shown in Figure 4.
Electrode A 1 and A2 are in thickness direction overlap, and electrode B 1 and B2 are in thickness direction overlap.These ten sections of little piezoelectric regions through-thickness are carried out polarization process; The polarised direction of two sections of adjacent little piezoelectric regions is contrary.A1 with A2 is connected as an output terminal after polarization, B1 with B2 is connected another output terminal.Compared with embodiment 1, the advantage that the magnetic of this structure turns round type magnetoelectric transducer is that electric capacity is large, strong interference immunity.
Embodiment 4:
In the present embodiment, the structure that magnetic turns round type magnetoelectric transducer is substantially identical with the structure in embodiment 3, difference reserves 4mm at the left end of the little piezoelectric patches being positioned at the left side not cover electrode, in order to binding magnet 4 and 5, the upper and lower surface that this reserves part through-thickness is bonded in respectively, as shown in Figure 5 by magnet 4 and 5.Wherein, identical with magnet 2 and 3, magnet 4 and 5 is NdFeB, but this magnet 4 is contrary with the magnetic moment direction of magnet 2 and 3 with the magnetic moment direction of 5.Compared with embodiment 3, the magnetic of this structure turns round type magnetoelectric transducer without the need to clamping device, adds the dirigibility of application.
Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only specific embodiments of the invention; be not limited to the present invention; all any amendments and improvement etc. made in spirit of the present invention, all should be included within protection scope of the present invention.

Claims (6)

1. magnetic turns round a type magnetoelectric transducer, comprises piezoelectric patches and magnet, it is characterized in that:
Described magnet is at least connected with one end of piezoelectric patches;
Described piezoelectric patches adopts monolithic piezoelectric sheet, and this monolithic piezoelectric plate electrode, through dividing processing, forms the little piezoelectric regions of more than two sections and two sections, there is interval between two sections of adjacent little piezoelectric regions; Then each section of little piezoelectric regions through-thickness is carried out electric polarization process, the polarised direction of two sections of adjacent little piezoelectric regions is contrary, is connected each section of identical for polarised direction little piezoelectric regions as an output terminal, obtains two output terminals after polarization;
During duty, magnet produces magnetic torsion under additional magnetic fields, drive the distortion of monolithic piezoelectric bending tablet by interracial contact, thus drive each section little piezoelectric regions to produce flexural deformation, the upper and lower surface of through-thickness produces contrary stress, produce voltages at two output terminals and export.
2. magnetic according to claim 1 turns round type magnetoelectric transducer, it is characterized in that: described monolithic piezoelectric sheet is by piezoelectric coefficient d 33or d 31form at the piezoelectric of more than 10pC/N.
3. magnetic according to claim 1 turns round type magnetoelectric transducer, it is characterized in that: described piezoelectric is piezoelectric ceramics, piezoelectric monocrystal or piezopolymer.
4. magnetic according to claim 1 turns round type magnetoelectric transducer, it is characterized in that: the shape of described monolithic piezoelectric sheet is plates.
5. magnetic according to claim 1 turns round type magnetoelectric transducer, it is characterized in that: one end of described monolithic piezoelectric sheet is connected with magnet, and the other end of monolithic piezoelectric sheet carries the baby fixing.
6. magnetic according to claim 1 turns round type magnetoelectric transducer, it is characterized in that: the two ends of described monolithic piezoelectric sheet are connected with the second magnet with the first magnet respectively, and the first magnet is contrary with the direction of magnetization of the second magnet.
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CN110794346B (en) * 2019-09-26 2021-01-19 西安交通大学 Magnetic field sensor based on magnetic torsional electric effect and manufacturing method thereof

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