CN104923808B - Turning tool rest of extreme ultraviolet lithography light source collection mirror - Google Patents
Turning tool rest of extreme ultraviolet lithography light source collection mirror Download PDFInfo
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- CN104923808B CN104923808B CN201510363157.5A CN201510363157A CN104923808B CN 104923808 B CN104923808 B CN 104923808B CN 201510363157 A CN201510363157 A CN 201510363157A CN 104923808 B CN104923808 B CN 104923808B
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- extreme ultraviolet
- ultraviolet lithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/03—Stationary work or tool supports
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention relates to a turning tool rest of an extreme ultraviolet lithography light source collection mirror and belongs to the technical field of tool rest machining of extreme ultraviolet lithography light source collection mirrors. The turning tool rest aims to solve the problems that during machining, due to trembling of a turning tool, the surface of a lens shows ripples, and surface roughness cannot meet the requirement. The tool rest is divided into two parts, one part is a tool apron, and the other part is a cuboid. The tool apron is a cylinder. A through hole is formed in the side wall of the cylinder, and a deep inclined hole is formed. The cylinder and the cuboid are an integrated part. Two grooves in mirror symmetry are machined in the upper surface of the cuboid. Two threaded through holes are downwards machined in the bottom surfaces of the two grooves respectively, so a first screw hole and a second screw hole are formed respectively. The tool apron can guarantee advancing stability of the turning tool and the smoothness of a machining surface in the machining process. The turning tool rest is suitable for being used for turning the extreme ultraviolet lithography light source collection mirror.
Description
Technical field
The present invention relates to extreme ultraviolet (Extreme Ultraviolet, EUV) photolithography light source collects the knife rest processing skill of mirror
Art.
Technical background
With photoetching technique of the photoetching width in below 100nm, referred to as extreme ultraviolet lithography.Wherein, realize 22nm～
The groove of 45nm, as the developing goal of China's extreme Ultraviolet Lithography Source to the year two thousand twenty.At present this is realized in the world
Target mainly has two kinds of laser plasma (LPP) and discharge plasma (DPP) extreme Ultraviolet Lithography Source, and this two schemes leads to
Cross Xe or Sn media generation high-temperature high-density plasma and realize that 13.5nm (2% bandwidth) radiates light output.DPP light sources mainly by
The technical schemes such as capillary discharging, hollow cathode pipe, plasma focus, capillary discharging extreme Ultraviolet Lithography Source therein by
It is a kind of critically important light source package of current development in the advantage such as simple structure, plasmoid be stable.
Capillary discharging extreme Ultraviolet Lithography Source, refers to using Xe or Sn media, obtains under capillary discharging Z constriction mechanism
The radiation light output of the 13.5nm (2% bandwidth) for obtaining.The concrete forming process of described 13.5nm wavelength radiation light is：In capillary
During tube discharge, high voltage can make to form one layer of Xe or Sn plasma sheath along inner surface wall in capillary tube, and main pulse is put
When electric, acted on by self-field by the heavy current of plasma, powerful Lorentz force can be produced, make plasma radially
Constriction, referred to as Z constrictions.During plasma compression, plasma is subject to repulsive force and Ohmic heating simultaneously so that
Plasma temperature is raised, and collides the ion that Xe or Sn ions produce more expensive state, when plasma compression is minimum to radius,
About 300 μm, will now realize EUV-radiation light output.Plasma compression is to the plasma in capillary tube during least radius
Body is a very thin plasma column, and small section of each in this plasma column can be considered a point source, this
Individual point source uniformly will radiate EUV-radiation light into the π spatial angle ranges of surrounding 4.The EUV-radiation light that capillary discharging is formed,
Follow-up extreme ultraviolet collection optical system is had to pass through, intermediate focus IF point is imaged on, it is achieved thereby that the certain power of IF points
The radiation light output of 13.5nm wavelength.Because 13.5nm radiant lights are in extreme ultraviolet waveband, it is therefore necessary in glancing incidence scheme bar
Less angle of incidence is realized under part, while surface roughness is less than 1nm, to obtain higher collection efficiency.Jing Bi is collected simultaneously
Requirement can not block excessive light, so require that collection Jing Bi is very thin, additionally, the power higher in order to obtain IF points, improves
Collection efficiency, collecting mirror collection angle should be larger.Through design, collecting mirror should receive for Wolter-I type structures multi-layer nested
Collection mirror structure, outermost layer diameter will typically reach more than 500mm, and wall thickness can not be more than 3mm, and monolayer collects mirror and adds hyperbolic for ellipsoid
Face constitutes.
When using diamond lathe to the machining eyeglass of the shell structures of Φ more than 300, there is a very big difficult problem, i.e.,
Blade gait of march is adjusted to most preferably, feed yardstick is as far as possible little, and work in-process is trembled due to lathe tool, make the collection mirror table of processing
There is ripple in face, and surface roughness is more than 50nm, and surface roughness does not reach requirement.
The content of the invention
The present invention makes finished surface ripple occur to solve work in-process because lathe tool trembles, and surface roughness is not up to
To desired problem, so as to provide extreme Ultraviolet Lithography Source mirror turnery processing knife rest is collected.
Extreme Ultraviolet Lithography Source collects mirror turnery processing knife rest, and it includes tool rest, deep inclined hole, screw hole, No. two spiral shells
Silk hole.
Knife rest is divided into two parts, and a part is tool rest, and another part is a cuboid；The tool rest is a cylinder
Body, opens a through hole on the side wall of cylinder, forms deep inclined hole, the axis of the deep inclined hole and the axes intersect of cylinder, and two
The angle of person is α, α ≠ 90 °；One end face of cylinder is fixed on a side of cuboid, in the upper surface of cuboid
Process the groove of two speculars, described two grooves all extend in the X direction the side relative with the side, two
Individual groove extends to respectively two other side of cuboid along Y-direction and -Y direction, each downward on the bottom surface of two grooves
One tapped through hole of processing, forms respectively a screw hole and No. two screw holes, and the X-direction is put down with the axis direction of cylinder
OK, from cylinder to cuboid for just, Z-direction is the direction vertical with cuboid upper surface.
It also includes N number of lightening grooves, on the cylinder the N number of groove of turning, forms N number of lightening grooves.
An above-mentioned lightening grooves are four, and four lightening grooves are symmetrical on the cylinder.
It is 45 ﹟ stainless steel materials that above-mentioned extreme Ultraviolet Lithography Source collects the material of mirror turnery processing knife rest.
The value of above-mentioned α is 45 °.
The size of an above-mentioned screw hole and No. two screw holes is M5.
Above-mentioned tool rest is integrated part with cuboid.
Extreme Ultraviolet Lithography Source of the present invention collects mirror turnery processing knife rest, and four lightening grooves ensure that tool rest
There are enough deadweights, while turn avoid, handling are inconvenient, in order to ensure one deep inclined hole of processing on tool rest of cutter,
A number screw hole and No. two screw holes are used for immovable support.This tool rest work in-process can ensure the steady and processing table that lathe tool advances
Face it is smooth, can reach the surface roughness that diamond is reached to small-bore work pieces process, it is ensured that the requirement of processing, reach
Expected processing effect, it is adaptable to heavy caliber, shell structure workpiece finishing, is particularly suited for extreme Ultraviolet Lithography Source and collects mirror
Processing.The surface roughness of the collection mirror processed using above-mentioned knife rest can reach 0.0055nm.
Description of the drawings
Fig. 1 is that the extreme Ultraviolet Lithography Source in specific embodiment one and specific embodiment two collects mirror turnery processing knife
The axonometric chart of frame.
Extreme Ultraviolet Lithography Source in Fig. 2 specific embodiments one collects the front view of mirror turnery processing knife rest.
Fig. 3 is the top view of Fig. 1.
Fig. 4 is sectional views of the Fig. 2 along A-A directions.
Specific embodiment
Specific embodiment one：Present embodiment, the extreme ultraviolet described in present embodiment are illustrated referring to figs. 1 to Fig. 4
Photolithography light source collects mirror turnery processing knife rest, and it includes tool rest 1, the deep screw hole 4 of screw hole 3, two of inclined hole 2,.
Knife rest is divided into two parts, and a part is tool rest 1, and another part is a cuboid；The tool rest 1 is a cylinder
Body, opens a through hole on the side wall of cylinder, forms deep inclined hole 2, the axis of the deep inclined hole 2 and the axes intersect of cylinder,
The angle of the two is α, α ≠ 90 °；One end face of cylinder is fixed on a side of cuboid, in the upper table of cuboid
Face processes the groove of two speculars, and described two grooves all extend in the X direction the side relative with the side,
Two grooves extend to respectively two other side of cuboid along Y-direction and -Y direction, on the bottom surface of two grooves it is each to
One tapped through hole of lower processing, forms respectively the axis side of a screw hole 3 and No. two screw holes 4, the X-direction and cylinder
To parallel, from cylinder to cuboid for just, Z-direction is the direction vertical with cuboid upper surface.
This tool rest work in-process can ensure the smooth of the steady and finished surface that lathe tool advances, it is ensured that the requirement of processing,
Expected processing effect is reached, the detection of surface roughness model can reach 3nm, then can further improve surface through polishing
Roughness.
Specific embodiment two：Present embodiment is illustrated with reference to Fig. 1, present embodiment is to specific embodiment one
Described extreme Ultraviolet Lithography Source is collected mirror turnery processing knife rest and is described further, and in present embodiment, it also includes N number of one
Number lightening grooves 5, on the cylinder the N number of groove of turning, forms N number of lightening grooves 5.
Specific embodiment three：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment two
Turnery processing knife rest is described further, and in present embodiment, a lightening grooves 5 are four, and four lightening grooves 5 are in cylinder
It is symmetrical on body.
Specific embodiment four：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment one
Turnery processing knife rest is described further, and in present embodiment, extreme Ultraviolet Lithography Source collects the material of mirror turnery processing knife rest
For 45 ﹟ stainless steel materials.
Specific embodiment five：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment one
Turnery processing knife rest is described further, and in present embodiment, the value of α is 45 °.
Specific embodiment six：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment five
Turnery processing knife rest is described further, and in present embodiment, the size of a screw hole 3 and No. two screw holes 4 is M5.
Specific embodiment seven：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment one
Turnery processing knife rest is described further, and in present embodiment, tool rest 1 is integrated part with cuboid.
Specific embodiment eight：Present embodiment is to collect mirror to the extreme Ultraviolet Lithography Source described in specific embodiment one
Turnery processing knife rest is described further, and in present embodiment, an angle turning of tool rest 1 is fallen, and turning angle is 45 °, shape
Into breach 6.
Breach 6 ensure that tool rest has enough deadweights, while turn avoid handling inconvenience.
Specific embodiment nine：Present embodiment is collected using the extreme Ultraviolet Lithography Source described in specific embodiment one
The method that mirror turnery processing knife rest is processed, the method is comprised the following steps：
The first step, the original adjustable turning head of diamond lathe is pulled down first；
Because adjustable turning head rigidity is poor, and have obstacle to installing new knife rest feed, thus by diamond lathe is original can
Toolsetting frame is pulled down.
Second step, the knife rest of development is installed on the slide carriage of diamond lathe, it is ensured that cutter hub and main axis parallel, is easy to standard
Really fill knife；
3rd step, diamond tool is attached on knife rest, with sheet copper cutter height is adjusted, with spindle shaft height one is given a farewell dinner
Cause；
4th step, the position with the tool detector detection cutter of diamond lathe itself in lathe coordinate system, are given
Initial tool zero position；
5th step, initial manufacture (can also claim roughing)：Cutting depth 0.04mm-0.05mm, feed speed per minute is
15mm, the speed of mainshaft is 400 turns -500 turns per minute；
6th step, semifinishing, altogether twice, cutting depth is respectively 8 microns and 5 microns, feed speed per minute for processing
For 15mm, the speed of mainshaft is that 400-500 per minute turns；
7th step, polish, cutting depth is 2 microns, and feed speed is 2mm per minute, and the speed of mainshaft is per minute
400-500 turns；
Surface quality is looked in 8th step, sight, is such as still had some deficits, and repeats polish one time；
9th step, plus man-hour notice that cooling oil can not be interrupted, and oil supply amount increase, it is ensured that smart car quality；
Tenth step, using same processor and parameter processing test sample plate, the contourographs of Jing PGl 1240 survey rough surface
Spend for 0.0055nm.
Claims (7)
1. extreme Ultraviolet Lithography Source collects mirror turnery processing knife rest, it is characterised in that it include tool rest (1), deep inclined hole (2), one
Number screw hole (3), No. two screw holes (4)；
Knife rest is divided into two parts, and a part is tool rest (1), and another part is a cuboid；The tool rest (1) is a cylinder
Body, opens a through hole on the side wall of cylinder, forms deep inclined hole (2), the axis of the deep inclined hole (2) and the axis phase of cylinder
Hand over, the angle of the two is α, α ≠ 90 °；One end face of cylinder is fixed on a side of cuboid, in the upper of cuboid
Surface Machining goes out the groove of two speculars, and described two grooves all extend in the X direction the side relative with the side
Face, two grooves extend to respectively two other side of cuboid along Y-direction and -Y direction, each on the bottom surface of two grooves
Downwards one tapped through hole of processing, forms respectively a screw hole (3) and No. two screw holes (4), the X-direction and cylinder
Axis direction is parallel, from cylinder to cuboid for just, Z-direction is the direction vertical with cuboid upper surface.
2. extreme Ultraviolet Lithography Source according to claim 1 collects mirror turnery processing knife rest, it is characterised in that it also includes
N number of lightening grooves (5), on the cylinder the N number of groove of turning, forms N number of lightening grooves (5).
3. extreme Ultraviolet Lithography Source according to claim 2 collects mirror turnery processing knife rest, it is characterised in that described No. one
Lightening grooves (5) are four, and four lightening grooves (5) are symmetrical on the cylinder.
4. extreme Ultraviolet Lithography Source according to claim 1 collects mirror turnery processing knife rest, it is characterised in that described pole
The material of ultraviolet photolithographic source-collector mirror turnery processing knife rest is 45 ﹟ stainless steel materials.
5. extreme Ultraviolet Lithography Source according to claim 1 collects mirror turnery processing knife rest, it is characterised in that the value of α is
45°。
6. extreme Ultraviolet Lithography Source according to claim 1 collects mirror turnery processing knife rest, it is characterised in that described No. one
The size of screw hole (3) and No. two screw holes (4) is M5.
7. extreme Ultraviolet Lithography Source according to claim 1 collects mirror turnery processing knife rest, it is characterised in that tool rest (1)
Part is integrated with cuboid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510363157.5A CN104923808B (en) | 2015-06-26 | 2015-06-26 | Turning tool rest of extreme ultraviolet lithography light source collection mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510363157.5A CN104923808B (en) | 2015-06-26 | 2015-06-26 | Turning tool rest of extreme ultraviolet lithography light source collection mirror |
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| Publication Number | Publication Date |
|---|---|
| CN104923808A CN104923808A (en) | 2015-09-23 |
| CN104923808B true CN104923808B (en) | 2017-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510363157.5A Active CN104923808B (en) | 2015-06-26 | 2015-06-26 | Turning tool rest of extreme ultraviolet lithography light source collection mirror |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM367037U (en) * | 2009-06-25 | 2009-10-21 | Yi Ming Entpr Co Ltd | Central positioning base structure of inner hole turning tool holder |
| CN102441680A (en) * | 2011-09-26 | 2012-05-09 | 厦门大学 | Micro-vibration turning and polishing compound slide for internally progressive multifocal lenses |
| CN202461552U (en) * | 2012-03-13 | 2012-10-03 | 余姚市士森铜材厂 | Knife rest |
| CN104400020A (en) * | 2014-10-23 | 2015-03-11 | 秦科 | Tool post for machine tool |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6055242B2 (en) * | 1981-12-19 | 1985-12-04 | 株式会社大隈鐵工所 | Twin turret turret for lathe |
| JPH09253907A (en) * | 1996-03-27 | 1997-09-30 | Sankyo Seiki Mfg Co Ltd | Machining tool holder |
| WO2004022270A1 (en) * | 2002-09-03 | 2004-03-18 | Kennametal Inc. | Toolholder |
-
2015
- 2015-06-26 CN CN201510363157.5A patent/CN104923808B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM367037U (en) * | 2009-06-25 | 2009-10-21 | Yi Ming Entpr Co Ltd | Central positioning base structure of inner hole turning tool holder |
| CN102441680A (en) * | 2011-09-26 | 2012-05-09 | 厦门大学 | Micro-vibration turning and polishing compound slide for internally progressive multifocal lenses |
| CN202461552U (en) * | 2012-03-13 | 2012-10-03 | 余姚市士森铜材厂 | Knife rest |
| CN104400020A (en) * | 2014-10-23 | 2015-03-11 | 秦科 | Tool post for machine tool |
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| CN104923808A (en) | 2015-09-23 |
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Inventor after: Wang Qi Inventor after: Gao Rongxiang Inventor after: Xu Qiang Inventor after: Zhao Yongpeng Inventor before: Wang Qi Inventor before: Xu Qiang Inventor before: Zhao Yongpeng |