CN104914276A - Scanning probe microscope scanning control method based on hysteresis model - Google Patents
Scanning probe microscope scanning control method based on hysteresis model Download PDFInfo
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Abstract
The invention discloses a scanning probe microscope scanning control method based on a hysteresis model. In the method, an inverse hysteresis model is applied to a control system of a driver of a SPM to compensate hysteresis of the driver, and through PID feedback combined composite control, positioning precision is further improved. Compared with a conventional displacement feedback control method, the method in the invention has the maximum advantage that: in the model, characteristics of hysteresis phenomenon can be accurately reflected, and the problem of system instability due to high reaction coefficients does not exist.
Description
Technical field
The present invention relates to a kind of control method of scanning probe microscopy, particularly relate to a kind of scanning probe microscopy scanner driver control method based on Hysteresis Model.
Background technology
In scanning probe microscopy (SPM) family, member is numerous, but principle of work is close, is all the microscope carrying out scanning imagery with probe near sample surface.Wherein scanning tunnel microscope (STM) and atomic force microscope (AFM) are the most frequently used two kinds.The basic functional principle of STM adds bias voltage on the surface of probe and sample, when producing tunnel current between probe tip and sample, by can obtain the surface information of sample to the detection of tunnel current.The key distinction of AFM and STM is that AFM utilizes the van der Waals interaction between atom to detect the character of surface of sample, instead of utilizes tunnel effect.
Because SPM requires that in scanning process drive system displacement accuracy is high, fast response time, so the precision positioning driver of SPM adopts piezoelectric actuator mostly.This driver has fast response time, low in energy consumption, does not need the features such as gear train, but the lagging characteristics that piezoelectric actuator itself has, as shown in Figure 1, have impact on its positioning precision to a great extent.The precision positioning driver of current most of SPM adopts the method for Displacement Feedback to improve positioning precision.Such as, manual adjustments is replaced by the self-adjusting method of pid parameter; By the method for positive position feedback, be combined with PI controller.The advantage of these methods to improve precision, but do not comprise corresponding lagging characteristics in this compensated information, and if feedback factor too high, easily cause system unstability.
There are physical model and phenomenon model two class for the mathematical model describing piezoelectric actuator Hysteresis Nonlinear now.Physical model is the model that the physics occurred according to hysteresis phenomenon becomes thus to set up, and this model is difficult to be directly used in Controller gain variations.Phenomenon model describes the relation of piezoelectric actuator constrained input by accurate mathematical model of trying one's best and do not consider the physics origin cause of formation that hysteresis phenomenon occurs, and therefore facilitates modeling and be easy to Controller gain variations.Such as, Preisach model inversion modelling tracking control unit is utilized, for the control of piezoelectric bimorph; Based on PI model inversion modelling controller, compensate the sluggishness of piezoelectric actuator; Employ Maxwell model to control in the compound mini positioning platform of piezoelectric actuator and direct current generator, all achieve good effect.
Summary of the invention
The object of the invention is to, overcome the deficiencies in the prior art, provide a kind of and stably can improve the method for SPM in scanning process positioning precision.
technical scheme
In order to solve above-mentioned technical matters, method of the present invention comprises the following steps:
Step one: be put on the sample stage of scanning probe microscopy by by scanning samples, described sample stage is fixed on the scanner of the horizontal direction of scanning probe microscopy;
Step 2: perpendicular with scan-probe by the manual tilting table adjustment sample surfaces of scanning probe microscopy, by regulating the manual displacement platform of scanning probe microscopy to adjust sample position, makes sample be positioned at immediately below scan-probe;
Step 3: for the sweep limit of sample, the expectation displacement signal of the scanner of the horizontal direction of setting scanning probe microscopy, the expectation displacement signal form of precision displacement platform X-direction is sinusoidal signal or triangular signal, the expectation displacement signal form of Y-direction is rising signals, this signal is added on the scanner of the horizontal direction of scanning probe microscopy by power amplifier with the form of voltage signal, measure the sluggish relation obtaining expecting displacement and actual displacement; This expectation displacement signal is not be changed to output voltage signal by the displacement voltage transformational relation of routine wheel, but the control algolithm of the Hysteresis Model inversion model set up by subsequent step or Hysteresis Model inversion model and PID complex control algorithm calculate output voltage signal;
Step 4: to carry out inverting the sluggish inversion model obtained containing unknown parameter for Hysteresis Model, substitutes into inversion model carry out parameter identification by measuring the result obtained in step 3, obtain model parameter, thus set up sluggish inversion model;
Step 5: regulate the lifting of scanning probe microscopy lifting table and vertical direction scanner to stretch, make sample enter Close Tunnel, arranges tunnel current value and keeps tunnel current to stablize;
Step 6: set microscopical scan pattern, and setting is for the sweep limit of sample, then by the sluggish inversion model that step 4 is set up, displacement signal is converted to voltage signal output;
Step 7: the output voltage signal of step 6 is added on the displacement platform of scanning probe microscopy by power amplifier, scan, at this moment, the expectation displacement of retouching the scanner of the horizontal direction of probe microscope overlaps with actual displacement is approximate, namely, all there is sluggish relation between output voltage signal and output displacement signal, but expect that between displacement and output displacement be linear relationship.
Further, in step 5, scanning probe microscopy vertical direction scanner is the scanner replacing Conventional piezoelectric ceramic pipe with piezoelectric stack.
Further, in step one, one-dimensional electric grating selected by described sample.
Further, in step 5, described tunnel current presets, and the size of its numerical value is determined by sample type.
beneficial effect
The present invention proposes sluggish Inverse Model Control to be applied in the driver control system of SPM, compensates the sluggishness of driver; And by feeding back with PID the complex controll combined, improve positioning precision further.The present invention is compared with traditional Displacement Feedback control method, and maximum advantage is: the characteristic that accurately can reflect hysteresis phenomenon in model, there is not the too high problem causing system unstability of feedback factor.
Accompanying drawing explanation
Fig. 1 is the lagging characteristics curve synoptic diagram of piezoelectric actuator;
Fig. 2 is scanning probe microscopy driving mechanism and probe schematic diagram, and wherein each mark represents parts and is:
1: vertical direction scanner (piezoelectric stack); 2: scan-probe; 3: horizontal direction scanner (Precision Piezoelectric displacement platform; 4: manual displacement platform; 5: electric lifting platform; 6: be manual tilting table;
Fig. 3 is the predetermined track while scan schematic diagram of platform;
Fig. 4 is the SPM scanning process adopting sluggish Inverse Model Control device;
Fig. 5 is the SPM scanning process adopting sluggish inversion model and PID feedback complex controller;
Fig. 6 is sluggish Inverse Model Control schematic diagram;
Fig. 7 is sluggish inversion model and PID complex controll schematic diagram;
Fig. 8 is that wherein (a) is along X positive dirction scanning result, and (b) is along X negative direction scanning result without the sluggish Control of Voltage scanning result controlled;
Fig. 9 is sluggish Inverse Model Control scanning result, and wherein (a) is along X positive dirction scanning result, and (b) is along X negative direction scanning result;
Figure 10 is sluggish inversion model and PID complex controll scanning result, and wherein (a) is along X positive dirction scanning result, and (b) is along X negative direction scanning result.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
Use example as one, use scanning probe microscopy driving mechanism as shown in Figure 2 and probe structure.Specific implementation step is as follows:
Step one: be put on the sample stage of scanning probe microscopy by by scanning samples, this sample stage is fixed on the horizontal direction scanner of scanning probe microscopy, the horizontal direction scanner 3 used in this method adopts the XY100A type nanometer displacement platform of Npoint company of the U.S., the sample used in this example is one-dimensional electric grating, measured by scanning electron microscope (SEM) before experiment, recording screen periods is 20.64 μm, and live width is 11.32 μm; Predetermined track while scan as shown in Figure 3;
Step 2: adjust sample surfaces by the manual tilting table 6 of scanning probe microscopy and scan-probe 2 is perpendicular, by regulating the manual displacement platform 4 of scanning probe microscopy to adjust sample position, makes sample be positioned at immediately below scan-probe 2;
Step 3: setting tunnel current value, this example setting tunnel current value is 1nA, being extended by the lifting of scanning probe microscopy electric lifting platform 5 and vertical direction scanner 1 makes sample enter Close Tunnel with shortening, keep tunnel current to stablize, in this method, use piezoelectric stack 1 to replace conventional piezoelectric ceramic tube as the scanner (as its lagging characteristics curve of piezoelectric actuator as shown in Figure 2) holding up direction;
Step 4: be set as constant current scan pattern or permanent high scan pattern, this example is set as constant current scan pattern, select the sweep limit for sample, namely the expectation displacement signal of the precision displacement platform of scanning probe microscopy is preset, this example selects sweep limit 60.00 μm × 60.00 μm, the expectation displacement signal form of precision displacement platform X-direction is sinusoidal signal or triangular signal, the expectation displacement signal form of Y-direction is rising signals, this expectation displacement signal is not be changed to output voltage signal by the displacement voltage transformational relation wheel of routine, but calculate output voltage signal by Hysteresis Model Inverse Model Control algorithm or Hysteresis Model inversion model and PID complex control algorithm, the present embodiment does not use the direct voltage control of sluggish Inverse Model Control to scan respectively, use the scanning (scanning process as shown in Figure 4) of Hysteresis Model Inverse Model Control, use the scanning (scanning process as shown in Figure 5) of Hysteresis Model inversion model and PID complex controll, sluggish Inverse Model Control principle and with PID complex controll principle as shown in Figure 6 and Figure 7.
Step 5: output voltage signal is added on the Precision Piezoelectric displacement platform of scanning probe microscopy by power amplifier, expect displacement signal and output voltage signal, all there is sluggish relation between output voltage signal and output displacement signal, but expect that between displacement and output displacement be linear relationship.As scanning result, respectively as shown in Fig. 8, Fig. 9, Figure 10.
Claims (4)
1., based on a scanning probe microscopy scan control method for Hysteresis Model, it is characterized in that, comprise the following steps:
Step one: be put on the sample stage of scanning probe microscopy by by scanning samples, described sample stage is fixed on the scanner of the horizontal direction of scanning probe microscopy;
Step 2: perpendicular with scan-probe by the manual tilting table adjustment sample surfaces of scanning probe microscopy, by regulating the manual displacement platform of scanning probe microscopy to adjust sample position, makes sample be positioned at immediately below scan-probe;
Step 3: for the sweep limit of sample, the expectation displacement signal of the scanner of the horizontal direction of setting scanning probe microscopy, the expectation displacement signal form of precision displacement platform X-direction is sinusoidal signal or triangular signal, the expectation displacement signal form of Y-direction is rising signals, this signal is added on the scanner of the horizontal direction of scanning probe microscopy by power amplifier with the form of voltage signal, measure the sluggish relation obtaining expecting displacement and actual displacement;
Step 4: to carry out inverting the sluggish inversion model obtained containing unknown parameter for Hysteresis Model, substitutes into inversion model carry out parameter identification by measuring the result obtained in step 3, obtain model parameter, thus set up sluggish inversion model;
Step 5: regulate the lifting of scanning probe microscopy lifting table and vertical direction scanner to stretch, make sample enter Close Tunnel, arranges tunnel current value and keeps tunnel current to stablize;
Step 6: set microscopical scan pattern, and setting is for the sweep limit of sample, then by the sluggish inversion model that step 4 is set up, displacement signal is converted to voltage signal output;
Step 7: the output voltage signal of step 6 is added on the displacement platform of scanning probe microscopy by power amplifier, scans, at this moment, the expectation displacement of retouching the scanner of the horizontal direction of probe microscope overlaps with actual displacement is approximate.
2. as claimed in claim 1 based on the scanning probe microscopy scan control method of Hysteresis Model, it is characterized in that, in step 5, scanning probe microscopy vertical direction scanner is the scanner replacing Conventional piezoelectric ceramic pipe with piezoelectric stack.
3., as claimed in claim 1 based on the scanning probe microscopy scan control method of Hysteresis Model, it is characterized in that, in step one, one-dimensional electric grating selected by described sample.
4., as claimed in claim 1 based on the scanning probe microscopy scan control method of Hysteresis Model, it is characterized in that, in step 5, described tunnel current presets, and the size of its numerical value is determined by sample type.
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| CN106568989A (en) * | 2016-11-03 | 2017-04-19 | 北京航空航天大学 | Horizontal-type probe device for deep-space environment atomic force microscope system based on quartz tuning fork probe |
| CN106707760A (en) * | 2017-02-17 | 2017-05-24 | 南京理工大学 | Nonlinear inverse control method used for dynamic hysteresis compensation of piezoelectric actuator |
| CN113704957A (en) * | 2021-07-09 | 2021-11-26 | 厦门大学 | Multi-axis platform driving method of high-precision scanning tunnel microscope |
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| CN106707760A (en) * | 2017-02-17 | 2017-05-24 | 南京理工大学 | Nonlinear inverse control method used for dynamic hysteresis compensation of piezoelectric actuator |
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