CN104914112A - Sheet detection apparatus - Google Patents
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- CN104914112A CN104914112A CN201510082816.8A CN201510082816A CN104914112A CN 104914112 A CN104914112 A CN 104914112A CN 201510082816 A CN201510082816 A CN 201510082816A CN 104914112 A CN104914112 A CN 104914112A
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Abstract
The invention provides a sheet detection apparatus which identifies types of abnormality of the abnormal portion of a sheet object to be detected. The sheet detection apparatus comprises a first light source irradiating visible light on the upper surface of the object to be detected, a second light source irradiating invisible light on the upper surface of the object to be detected, a third light source irradiating visible light on the lower surface of the object to be detected, a first shooting sensor configured to utilize visible light irradiated from the first light source and reflected on the object to be detected and visible light irradiated from the third light source and penetrated through the object to be detected to shoot the object to be detected, a second camera sensor configured to utilize visible light irradiated from the third light source and reflected on the object to be detected to shoot the object to be detected, and a processing portion which detects an abnormal portion and identifies the type of abnormality based on a first image obtained by the first shooting sensor and a second image obtained by the second shooting sensor.
Description
Technical field
The present invention relates to a kind of technology detecting the sheet material testing fixture of the unusual part of the checked property of sheet.
Background technology
For the manufacture of or processing sheet article production line on normal use a kind of testing fixture, this device uses by with visible ray, UV-irradiation sheet material, recycling camera takes its image obtained through light or reflected light, detect unusual part on sheet material (foreign matter is mixed into, dirty, fold etc.) (for example, referring to patent documentation 1).
In existing testing fixture, although the detection of the unusual part on sheet material can be carried out, cannot differentiate that what detect is the exception of what kind in detail.Therefore, prior art is forced to the process will carrying out the detailed inspection forwarded to by vision (visual inspection), differentiates and will detect that the sheet material of unusual part is discarded or be used as low grade products.But in fact, there is varied exception that may occur on sheet material, according to the difference of the kind, purposes, material etc. of product, also some need not be used as bad (defect).
Such as, micro-poriness polyolefin film is used, because separation layer itself is invisible to human eye, even if so some is dirty etc. a little although general on the separation layer of Li-Ion rechargeable battery, as long as functionally no problem, just do not need to be used as defective products.On the other hand, owing to there being the danger of short circuit, thus metal be mixed into or adhere to, exception that pin hole (hole) can be described as absolutely not negligible kind.Otherwise, to the situation of paper wood, although less pin hole can be allowed, in some cases, also want to be used as bad detection by influential dirty, the fold of outward appearance.
Patent documentation 1:JP JP 2010-8174 publication (patent No. 4950951 publication)
Summary of the invention
The present invention, in view of above-mentioned actual conditions, its object is to, the unusual part providing a kind of checked property that can detect sheet to have and differentiate the technology of abnormal kind.
First embodiment of the present invention is a kind of sheet material testing fixture, for checking the checked property of sheet, it is characterized in that, having: the first light source, irradiates visible ray to the first surface of checked property; Secondary light source, irradiates invisible light to the described first surface of described checked property; 3rd light source, irradiate visible ray to the second surface of described checked property, described second surface irradiates and is positioned at the opposition side contrary with described first surface; First image sensor, is configured to utilize from described first light source irradiation and the visible ray reflected at described checked property and through the visible ray of described checked property, take described checked property from described 3rd light source irradiation; Second image sensor, is configured to utilize and irradiates and the invisible light reflected at described checked property from described secondary light source, take described checked property; Handling part, based on the first image of the described checked property utilizing described first image sensor to obtain and the second image of the described checked property utilizing described second image sensor to obtain, detect the unusual part (position) that described checked property has, and differentiate the kind of the exception produced on the described unusual part detected; Efferent, exports the information relevant to unusual part, and this information at least comprises the information of the kind representing the exception utilizing described handling part to determine.
Herein, from " visible ray " of the first light source and the 3rd light source irradiation as long as at least comprise the light of the wavelength of visible region, differ and be decided to be the light (white light) of the wavelength comprising whole region, visible region, otherwise the light comprising the wavelength except visible region also has no relations.In addition, from secondary light source irradiate " invisible light " as long as at least comprise the light of the wavelength except visible region, do not get rid of the wavelength yet comprising visible region.
When there being any exception on checked property, on its unusual part compared with other positions (i.e. N/R position), the characteristic of the absorptivity, reflectivity, transmitance etc. of light may change.And the mode of its change depends on the wavelength of light and the kind of exception.Therefore, abnormal because which kind of produces on checked property, cause showing feature on the first image utilizing the first image sensor to obtain with the mode of the change of the respective pixel value of the second image utilizing the second image sensor to obtain.Especially, in said structure, visible ray is irradiated from the both sides (two surfaces) of checked property owing to using the first light source and the 3rd light source, and utilize the first identical image sensor to take these reflected light or through light, so when considering that the pixel value of the first image is in the first situation, second situation, different in 3rd situation, sometimes cause because producing exception light income to increase or reduce, and sometimes cause the color balance through light to change when light transmission unusual part from the 3rd light source because of the difference of the absorptivity of each wavelength, now, a variety of variation is there is in the variation pattern of the pixel value of the first image, described first situation refers to, only there is the situation of the reflected light of the light from the first light source, described second situation refers to, have the reflected light from the light of the first light source and the light from the 3rd light source through both situation of light (transmitted light), described 3rd situation refers to only there is the situation through light of the light from the 3rd light source.Therefore, if according to the structure of light source of the present invention and image sensor, then based on the first image utilizing the first image sensor to obtain and the second image utilizing the second image sensor to obtain, various abnormal detection can be carried out and kind differentiates.
Can by the first image when producing abnormal and the second image pixel value separately relative to state N/R on checked property, namely relative to usual state, what kind of occurring increases or reduces, and classifies as various abnormal kind in advance.Therefore, such as, described handling part, judges whether the pixel value of first image corresponding with the same position on described checked property and the pixel value of this second image meet any one type relative to the change of usual state respectively, just can differentiate the kind of the exception produced on this position.In addition, the type of the change (increase or reduce) of the pixel value of the first image and the pixel value of the second image can define with question blank with the corresponding relation of abnormal kind, also can install as the decision logic in program.
Preferably, described efferent also at least exports following customizing messages and is used as the information relevant to unusual part; Described customizing messages refer in following information any one: described first image comprising the region of this unusual part, comprise this unusual part region described second image, the chart of the change of the pixel value of described first image on this unusual part is shown, the chart of the change of the pixel value of described second image on this unusual part is shown.By exporting the information relevant to unusual part as such, user (examiner) can grasp the content of the exception of generation particularly, can for determining whether the exception being used as bad (defect), or the use such as the operating condition feedback feeding to production equipment.
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component; Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property; The pixel of described first image has the pixel value of each color component in multiple color component; Described checked property is selected arbitrarily pay close attention to position, when meeting first condition and second condition at the same time, the kind that described handling part is determined as the exception produced in described concern position is needle pore defect; Described first condition refers to: integrated value is than large when state N/R on checked property and usual state, described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive described first image corresponding with this concern position and the value that arrives; Described second condition refers to: the pixel value of described second image corresponding with described concern position is than little during usual state, and, the equilibrium phase under the balance of the described multiple color component in the pixel of described first image corresponding with described concern position and described usual state with.Utilize light source of the present invention and image sensor configuration and according to these Rule of judgment, needle pore defect can be differentiated accurately.When as the separation layer of rechargeable battery using pin hole as the product of one of significant deficiency, this function is particularly useful.
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component; Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property; The pixel of described first image has the pixel value of each color component in multiple color component; Described checked property is selected arbitrarily pay close attention to position, when meeting Article 3 part and Article 4 part at the same time, or when meeting Article 3 part and Article 5 part at the same time, the kind that described handling part is determined as the exception produced in described concern position is different types of exception with needle pore defect; Described Article 3 part refers to: integrated value is than large during described usual state, and described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive corresponding with this concern position described first image and the value that obtains; Described Article 4 part refers to: the pixel value of described second image corresponding with described concern position is than little during usual state, and the balance under the balance of the described multiple color component in the pixel of described first image corresponding with described concern position and described usual state is not identical; Described Article 5 part refers to: the pixel value of described second image is than large during usual state.By like this, can classify in detail according to the kind of exception.
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component; Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property; The pixel of described first image has the pixel value of each color component in multiple color component; Described checked property is selected arbitrarily pay close attention to position, when meeting Article 6 part and Article 7 part at the same time, the kind that described handling part is determined as the exception produced in described concern position is metal defect; Described Article 6 part refers to: integrated value is than little during described usual state, and described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive described first image corresponding with this concern position and the value that obtains; Described Article 7 part refers to: in the described multiple color component in the pixel of described first image corresponding with this concern position between the pixel value of each color component and the pixel value of described second image, the ratio declined relative to described usual state is identical.Utilize light source of the present invention and image sensor configuration and according to these Rule of judgment, metal defect can be differentiated accurately.When as the separation layer of rechargeable battery using being mixed into or adhering to the product as one of significant deficiency of metal, this function is particularly useful.
When assessing the change of pixel value, preferred utilization is as the reduction degree of the pixel value relative to usual state (on checked property N/R state) or increase degree, assess using the value of usual state as the relative value of standard, in other words, preferably utilize the value of usual state to carry out standardized value (standardization pixel value) to assess.The value (ratio) that the pixel value based on the output signal of image sensor obtains divided by the pixel value of usual state can be used, as the typical example of standardization pixel value.Assess by utilizing standardization pixel value as such, the variation of the light quantity because of light source can be eliminated, the difference of the transmitance of each unusual part, reflectivity, absorptivity, the deviation that the difference etc. of the transmitance of checked property, reflectivity, absorptivity causes.Therefore, it is possible to be difficult to be subject to the impact of deviation of the impact of noise, exception or checked property, the stable accuracy that the detection of unusual part and the kind of exception differentiate can be made.
Described invisible light is infrared light or ultraviolet light.If use the light of these wavelength, then because the output signal of sensor can change, even the exception of kind also can differentiate so only utilize visible ray to determine significantly according to the kind difference of exception.
Preferably, be provided with in a camera head: make not receive described first image sensor of described invisible light and make not receive described second image sensor of visible ray.By like this, can the miniaturization of implement device, improve the degree of freedom of setting.
Described camera head has a beam splitter, this beam splitter segmentation light path, and is guided respectively by light to described first image sensor and described second image sensor.By like this, carry out contraposition, so the summary of apparatus structure and process can be sought owing to not needing the departing from of side allocation of side allocation and the second image sensor in order to revise the first image sensor.
In addition, the present invention both can understand as the sheet material testing fixture at least partially with said structure, also can understand as the abnormal kind method of discrimination with the control method of sheet material testing fixture at least partially of above-mentioned process, sheet material inspection method or sheet material.In addition, the present invention can also understand as the program for making computing machine perform relevant method, the storage medium of embodied on computer readable that permanently stores program as such.Each above-mentioned structure and process only otherwise produce technical contradiction, just can mutually be combined and then form the present invention.
According to the present invention, the detection of the unusual part that the checked property that can carry out sheet has and the differentiation of abnormal kind.
Accompanying drawing explanation
Fig. 1 is the block diagram of the sheet material testing fixture of the first embodiment.
Fig. 2 is the figure of the example that the standardization pixel value utilizing each signal processing part to obtain is shown.
Fig. 3 is an example of the result output picture that efferent exports.
Fig. 4 A ~ 4E is for illustrating the reflection of the light when there being " dirty " and the figure through the situation of (transmission) and the change of each output valve.
Fig. 5 A ~ 5E for illustrate the light when there being " metal defect " reflection and through situation and the figure of change of each output valve.
Fig. 6 A ~ 6E for illustrate the light when there being " needle pore defect " reflection and through situation and the figure of change of each output valve.
Fig. 7 A ~ 7E for illustrate the light when there being " abnormal A " reflection and through situation and the figure of change of each output valve.
Fig. 8 A ~ 8E for illustrate the light when there being " abnormal B " reflection and through situation and the figure of change of each output valve.
Fig. 9 is the process flow diagram that the abnormality detection of being undertaken by sheet material testing fixture and kind are differentiated.
Figure 10 is the detail flowchart that abnormal kind differentiates.
Figure 11 is the block diagram of the sheet material testing fixture of the second embodiment.
Figure 12 is the figure of the configuration of the sensor that the second embodiment is shown.
Figure 13 is the block diagram of the sheet material testing fixture of the 3rd embodiment.
Figure 14 is the figure of the inner structure of the camera head that the 3rd embodiment is shown.
Wherein, description of reference numerals is as follows:
1: sheet material testing fixture, 2: checked property, 4: camera head, 5: treating apparatus,
31: visible light source, 32:IR/UV light sources, 33: through with visible light source,
41: visible image capturing head, 42:IR/UV light video camera head, 43: beam splitter,
51:R signal processing part, 52:G signal processing part, 53:B signal processing part, 54:IR/UV signal processing part, 55: contraposition handling part, 56: abnormity detection portion, 56A: detection threshold storage part, 57: judging part, 57A: judgment threshold storage part, 58: efferent
60: film, 61: dirty, 62: visible ray, 63: invisible light, 64: visible ray, 65: metal, 66: pin hole, 67: spot, 68: spot
Embodiment
Below, with reference to accompanying drawing, based on embodiment, be illustratively described in detail for implementing mode of the present invention.But as long as the aim of the size, material, shape, its relative configuration etc. of the component parts recorded in the present embodiment is record not special, and scope of the present invention is just not limited only to this.
< first embodiment >
Fig. 1 is the block diagram of the sheet material testing fixture 1 of the present embodiment.With regard to sheet material testing fixture 1, illuminator has: irradiate the visible light source 31 (the first light source) of visible ray to the upper surface (first surface) of checked property 2, the IR/UV light source 32 (secondary light source) to the upper surface irradiating ultraviolet light of checked property 2 or at least one of infrared light, the lower surface (second surface) to checked property 2 irradiate visible ray through with visible light source 33 (the 3rd light source).In addition, with regard to sheet material testing fixture 1, Analytical system has: visible image capturing 41 (the first image sensor), IR/UV light video camera head 42 (the second image sensor).Visible light source 31 and through the same position be set to visible light source 33 checked property 2 (but, the shadow surface of light is different) irradiate light, and, visible image capturing 41 is configured to, can utilize and irradiate and the light reflected at the upper surface of checked property 2 from visible light source 31, and through the light of checked property 2, take checked property 2 from through irradiating also straight line with visible light source 33.On the other hand, IR/UV light video camera head 42 is configured to, and can utilize and irradiate and the light reflected at the upper surface of checked property 2 from IR/UV light source 32, take checked property 2.Sheet material testing fixture 1 also has treating apparatus 5, and this treating apparatus 5 is based on a visible image capturing output signal of 41 and the output signal of IR/UV light video camera head 42, and the kind of the detection and exception of carrying out the unusual part that checked property 2 has differentiates.
With regard to checked property 2, such as, be formed as sheet, and transport to the direction of arrow of Fig. 1.With regard to checked property 2, paper delivery, film, resin, cellulose etc. can be illustrated.In addition, checked property 2 also can be the separation layer (separator) used in rechargeable battery, the optical sheet etc. used in liquid crystal.In addition, in the present embodiment, although the illuminator of securing and Analytical system, and mobile checked property 2, also can replace the method, and fixing checked property 2, and movable lighting system and Analytical system.
Sheet material testing fixture 1 has following function: based on utilizing visible image capturing 41 and the first image obtained and the second image utilizing IR/UV light video camera head 42 and obtain, detect the unusual part of checked property 2, differentiate the kind of the exception detected, and export its result.In the present embodiment, using middle porous quality films formed by olefine kind resin used such as the separation layers at rechargeable battery as checked property 2, detect and differentiate " dirty ", " metal defect ", " needle pore defect ", " abnormal A ", " abnormal B " these 5 kinds of exceptions." dirty " is for being attached to the dirty of film surface or foreign matter." metal defect " is such as, and it is bad that the metal powder etc. producing from the process of manufacturing installation, conveying arrangement or be stripped out is mixed into or is attached to film and causes, and " needle pore defect " is the hole vacated on film." abnormal A " refers to, the speckle (part that porous quality is roughening) that produces or attachment when processing porous quality film, infiltration have the part of oil, and compared with the film of normal condition, the transmitance of light becomes state." abnormal B " refers to, the speckle (porous quality becomes close part) produced when processing porous quality film, compared with the film of normal condition, reflectivity becomes large state." metal defect " and " needle pore defect " is for the separation layer of rechargeable battery, it is very important significant deficiency, and in the situation such as " dirty ", " abnormal A ", " abnormal B " area in unusual part be very little, also can not be used as the exception of bad (defect).
In the illumination system, the light source in the wavelength-limited regions such as LED can be used, or, use the light source coming wavelength-limited region with filter plate.As long as visible light source 31 and through with visible light source 33 to checked property 2 can irradiate with comprise multiple color component same spectra distribution light.In the present embodiment, utilize the white light source of identical type to make visible light source 31 and through with visible light source 33.
In Analytical system, can utilize and there is the camera head that such as arranged in series has the ccd image sensor of 4096 photo detectors.In each photo detector, according to light income, light is converted to electric charge.In addition, in the present embodiment, visible image capturing 41 has 3 ccd image sensors of each composition of R, G, B.In addition, IR/UV light video camera head 42 has the ccd image sensor of at least one detected in infrared light or ultraviolet light.The electric charge exported from each photo detector inputs to treating apparatus 5 as output signal (camera data).
In addition, in the present embodiment, in order to take the whole width of checked property 2 with camera, multiple camera can be had matchingly on the Width of checked property 2 with the width of checked property 2.In addition, visible image capturing 41 and IR/UV light video camera head 42 are in staggered configuration in the conveying direction.
Treating apparatus 5 has: process R signal handling part 51, G-signal handling part 52, the B signal processing part 53 from visible image capturing 41 camera data exported respectively by the composition of each RGB, and process is from the IR/UV signal processing part 54 of the camera data of IR/UV light video camera head 42 output.The signal (R signal) of R signal handling part 51 to the R component of (4096 pixel) from visible image capturing 41 1 line exported implements white balance correction (white shading) process, the deviation of the output level of each photo detector of correction.Similarly, the signal (G-signal) of G-signal handling part 52 pairs of G component, the signal (B signal) of B signal processing part 53 pairs of B component also implements white balance correction process respectively.In addition, the signal (IR/UV light signal) of IR/UV signal processing part 54 to the infrared light of 1 line exported from IR/UV light video camera head 42 or ultraviolet light implements white balance correction process.After, by R, G, B, IR/UV of exporting from each signal processing part 51,52,53,54 implement white balance correction process separately after value be denoted as output pixel value I
r, I
g, I
b, I
iR/UV.
Further, each signal processing part 51,52,53,54 calculates R, G, B, IR/UV standardization pixel value separately.Herein, standardization pixel value refers to, by the output pixel value I after white balance correction process
r, I
g, I
b, I
iR/UVdivided by output pixel value (general value) N under the N/R state of checked property 2
r, N
g, N
b, N
iR/UVand the value drawn.In the present embodiment, standardization pixel value has the codomain of 0 ~ 255, and general value is standardized as 128 of the intermediate value as codomain.With regard to " output pixel value (general value) under state without exception ", also can be set to the mean value when having carried out output pixel value when repeatedly taking.With regard to standardization pixel value, the minimizing degree of output pixel value (light income of camera) is larger, and standardization pixel value becomes less, the increase degree of output pixel value (light income of camera) is larger, and standardization pixel value becomes larger, that is, standardization pixel value and output pixel value change degree have correlationship.And on checked property 2 in N/R part (being called background color), standardization pixel value is the value be close with 128.In addition, in explanation afterwards, do not needing the situation distinguishing output pixel value and standardization pixel value especially, under be only denoted as pixel value.
Fig. 2 is the figure of the example that the standardization pixel value utilizing each signal processing part 51,52,53,54 to obtain is shown.Transverse axis is pixel (photo detector), and the longitudinal axis is standardization pixel value.Although be about 128 at N/R part (background color) Plays pixel value, in the pixel corresponding with unusual part, standardization pixel value increases or reduces.The direction (increase or reduce) of the change of standardization pixel value and its intensity of variation, may be different to the kind of each wavelength, each exception.In addition, even ground-color portion, because of the impact of the concavo-convex grade on the surface of checked property 2, standardization pixel value also can be caused in each pixel to have some deviations.
Treating apparatus 5 has the contraposition handling part 55 by carrying out contraposition from visible image capturing 41 image obtained and the image obtained from IR/UV light video camera head 42.Herein, because visible image capturing 41, IR/UV light video camera head 42 are in staggered configuration, so utilize visible image capturing 41 position photographed to arrive the position utilizing IR/UV light video camera head 42 to carry out taking will spend the regular hour on the transporting direction of checked property 2.In order to compare the pixel value of the identical point obtained from visible image capturing 41, IR/UV light video camera head 42, the view data from visible image capturing 41 1 line obtained is carried out contraposition (time match) with the view data of 1 line obtained from IR/UV light video camera head 42 by contraposition handling part 55.
Herein, due to the travelling speed of checked property 2 be what preset from the distance of visible image capturing 41 to an IR/UV light video camera head 42, based on these values, can calculate and utilize visible image capturing 41 position photographed again by time delay that IR/UV light video camera head 42 photographs.That is, by the amount of this time delay that data only staggered, contraposition can be carried out.Similarly, when utilizing R signal, G-signal, B signal to take other positions respectively, when utilizing ultraviolet light and infrared light to take other positions respectively, these contrapositions are carried out.
In addition, treating apparatus 5 has: detect the abnormity detection portion 56 of the unusual part of checked property 2, be stored in the detection threshold storage part 56A of the threshold value used in abnormal judgement.In the present embodiment, as aftermentioned, when the intensity of variation of the pixel value from visible image capturing 41 image obtained is greatly to certain degree, be judged as exception.Therefore, should be judged as that the threshold value of the intensity of variation of abnormal pixel value is held in detection threshold storage part 56A in advance.This threshold value decides according to the kind of checked property 2, the check criteria etc. of user's setting.
In addition, treating apparatus 5 has: differentiating the judging part 57 of the kind of its exception when detecting unusual part, being stored in the judgment threshold storage part 57A differentiating the multiple threshold values used in the process of abnormal kind.Judging part 57 is prespecified from visible image capturing 41 image obtained and the type of change (increase or reduce) of the respective pixel value of image obtained from IR/UV light video camera head 42 and the corresponding relation of aforesaid 5 kinds of exceptions, meet which kind of type by the mode of the change judging pixel value, differentiate abnormal kind.Detailed process is aftermentioned.
Efferent 58 has the function exporting the information relevant to unusual part.Although the output destination of information typically is display device, also can to printing equipment output information, from loudspeaker output message, alarm, utilize Email etc. to send message to the terminal of user, information is sent to the computing machine of outside.Fig. 3 is that efferent 58 exports an example of picture to the result that display device exports.Show in this picture: the information 580 (being " needle pore defect " in the example in figure 3) that the kind of the exception detecting and judge is shown, utilize the image 581 of visible image capturing 41 unusual part photographed, the image 582 of the unusual part utilizing IR/UV light video camera head 42 to photograph, illustrates that visible image capturing 41 and the respective output signal (output pixel value or standardization pixel value) of IR/UV light video camera head 42 are at the chart 584,585,586,587 etc. by the change on the line 583 of unusual part.By exporting the information relevant to unusual part as such, user (examiner) can hold the content of the exception of generation particularly, for determining whether the exception being used as bad (defect), or the use such as manufacturing condition, operating condition feedback of production equipment can be fed to.
The type of change (increase or reduce) of the standardization pixel value obtained from each signal processing part 51 ~ 54 and the corresponding relation of abnormal kind have been shown in Fig. 4 A ~ Fig. 8 E.Corresponding relation as such, can implement experiment by the kind of the exception produced each actual capabilities and try to achieve.In addition, Fig. 4 A ~ Fig. 8 E shows the example at middle porous quality films utilized such as rechargeable battery separation layers.Because the variation pattern, mode classification, issuable abnormal kind etc. of standardization pixel value change according to the material, materiality etc. of checked property, so also can prepare corresponding relation as Fig. 4 A ~ Fig. 8 E in advance to each imaginary checked property, and be installed on as question blank or decision logic in the program for the treatment of apparatus 5.
Fig. 4 A ~ Fig. 8 E schematically illustrates respectively, when " dirty ", " metal defect ", " needle pore defect ", " abnormal A ", " abnormal B " produce, and the change of the output signal (standardization pixel value) of visible ray and invisible light.In the various figures, Fig. 4 A, Fig. 5 A, Fig. 6 A, Fig. 7 A, Fig. 8 A be the light that unusual part is shown reflection and through the schematic diagram of situation, Fig. 4 B, Fig. 5 B, Fig. 6 B, Fig. 7 B, Fig. 8 B is the schematic diagram of the change of the standardization pixel value that R signal is shown, Fig. 4 C, Fig. 5 C, Fig. 6 C, Fig. 7 C, Fig. 8 C is the schematic diagram of the change of the standardization pixel value that G-signal is shown, Fig. 4 D, Fig. 5 D, Fig. 6 D, Fig. 7 D, Fig. 8 D is the schematic diagram of the change of the standardization pixel value that B signal is shown, Fig. 4 E, Fig. 5 E, Fig. 6 E, Fig. 7 E, Fig. 8 E is the schematic diagram of the change of the standardization pixel value that IR signal is shown.
As shown in Fig. 4 A ~ 4E, when " dirty " 61 is attached to film 60, because this dirty 61 absorbs visible rays 62, so diminish significantly compared with usual state as the R signal of the output signal of visible image capturing 41, G-signal, B signal (being always designated as rgb signal below).On the other hand, because the absorption of invisible light 63 (being infrared light in this example) is less, the reduction degree of IR signal obviously becomes less compared with rgb signal.In addition, visible ray 64 major part of irradiating from the lower surface of film 60 cannot through film 60 and then not by visible image capturing 41 light.
When " metal defect ", as shown in Fig. 5 A ~ 5E, because visible ray 62 is absorbed by metal 65 together with invisible light 63, so the rgb signal of output signal as visible image capturing 41, and the IR signal of output signal as IR/UV light video camera head 42, all obviously diminish compared with usual state.And the ratio of the reduction of R signal, G-signal, B signal, IR signal is roughly the same degree.In this case, visible ray 64 is all reflected, and visible image capturing 41 does not have light.
When " needle pore defect ", as shown in figs 6 a-6e, the visible ray 62 from upper surface passes through pin hole 66 through to lower face side together with invisible light 63, and camera does not have light.But, from the visible ray 64 of lower surface by pin hole 66 straight line through to upper surface side, and be incident to visible image capturing 41.Therefore, although rgb signal becomes significantly greatly compared with usual state, IR signal diminishes significantly compared with usual state.In addition, because visible ray 64 is directly transmitted to visible image capturing 41, so the color balance of the output signal of visible image capturing 41 is constant compared with original visible ray 64.
" abnormal A " is the speckle (part that porous quality is roughening) that produces when porous quality processing film or attachment, infiltration has oily state.In this case, speckle or attachment, infiltration have the part of oil to be the coloured transparent spot 67 of slightly.So, as shown in Fig. 7 A ~ 7E, from the visible ray 62 of upper surface and invisible light 63 by spot 67 major part through to lower face side.On the other hand, the visible ray 64 from lower surface passes through spot 67 through to upper surface side, by visible image capturing 41 light.But, different from the needle pore defect of Fig. 6, owing to being decayed by absorbing, so be broken through the color balance of light when the light through wavelength a part of during spot 67.In the example of Fig. 7 A ~ 7E, although any one in R signal, G-signal, B signal all increases significantly compared with usual state, compared with R signal, G-signal, B signal are less significantly, and known color balance changes.IR signal is identical with the situation of needle pore defect, reduction compared with usual state.
" abnormal B " speckle (porous quality becomes fine and close part) for producing when porous quality processing film is the state that light reflectance increases compared with the film of normal condition.In this case, as shown in Fig. 8 A ~ 8E, due on the spot 68 producing speckle, the visible ray 62 from upper surface is reflected together with invisible light 63, so any one in R signal, G-signal, B signal, IR signal all increases significantly compared with usual state.In addition, visible ray 64 major part of irradiating from the lower surface of film 60 cannot through film 60 and then not by visible image capturing 41 light.
By the change type of clear and definite each signal as described above in advance and the corresponding relation of abnormal kind, can easily and carry out the differentiation of abnormal kind accurately.In the present embodiment, use standardization pixel value to evaluate the intensity of variation of each signal, this standardization pixel value is utilize the value of usual state the output valve standardization of each signal to be obtained.By like this, the variation of the light quantity because of light source can be eliminated, the difference of the transmitance of each unusual part, reflectivity, absorptivity, the deviation caused by difference of the transmitance of checked property, reflectivity, absorptivity.Therefore, it is possible to make to be difficult to be subject to the impact of deviation of the impact of noise, exception or checked property, the stable accuracy that the detection of unusual part and the kind of exception differentiate can be made.
In addition, with regard to visible ray, also only can utilize any 1 or 2 kind differentiating defect in R component, G component, B component.In addition, to R, G, B, the one-tenth light splitting (such as, cyan, magenta, yellow etc.) of different wave length also can be utilized.In addition, also can utilize the one in infrared light or ultraviolet light or both differentiate the kind of defect.In addition, when select R component, G component, any 1 and infrared light or ultraviolet light in B component one time, select the combination that the difference of wavelength is large.Such as, when the ultraviolet light short with wavelength combines, the R component visible ray medium wavelength is longer is selected to combine; When the infrared light long with wavelength combines, the B component visible ray medium wavelength is shorter is selected to combine.By like this, the difference due to the reflectance of defect shows more remarkable, so can improve judgement precision.
In addition, to the photo detector of camera, use the semiconductor that Si (silicon) is.If use the semiconductor light-receiving device of Si system, then can detect ultraviolet light, visible ray, infrared light any one.In addition, can many pixelations be carried out, can carry out on a large scale or measurement at a high speed, can also cost be forced down.
Below, with reference to Fig. 9, the flow process of the process of sheet material testing fixture 1 is described.Fig. 9 is the process flow diagram of the process utilizing treating apparatus 5 to perform.
In step S101, light respectively visible light source 31, IR/UV light source 32, through under the state with visible light source 33, utilize visible image capturing 41 and IR/UV light video camera head 42 to carry out the shooting of checked property 2, and outputed signal and be sent to treating apparatus 5.
In step s 102, to the R signal exported from visible image capturing 41, G-signal, B signal and the IR/UV signal that exports from IR/UV light video camera head 42, implement white balance correction process at R signal handling part 51, G-signal handling part 52, B signal processing part 53, IR/UV signal processing part 54 respectively, and generate output pixel value I
r, I
g, I
b, I
iR/UV.In addition, each signal processing part 51 ~ 54 is from output pixel value I
r, I
g, I
b, I
iR/UVgenerate the standardization pixel value of R, G, B, IR/UV respectively.Export the data of output pixel value and standardization pixel value to contraposition handling part 55.Below, by R signal, G-signal, B signal, IR/UV signal standardization pixel value separately is also denoted as R value, G value, B value, IR value.
In step s 103, contraposition handling part 55, based on the travelling speed of checked property 2, the distance with camera 41 and 42, carries out the contraposition of the image of RGB and the image of IR/UV.
In step S104, abnormity detection portion 56 is utilized to detect exception.Such as, abnormity detection portion 56 uses following colour/grey conversion formula, according to the Computer image genration gray image of RGB.
Herein, I
r, I
g, I
bfor the output pixel value of R, G, B, N
r, N
g, N
bfor the output pixel value (output pixel value of background color) of the usual state of R, G, B.In addition, I
grayfor brightness value (gray value), be the pixel value (I of the color component of each RGB comprehensive
r, I
g, I
b) value.Coeff
r, Coeff
g, Coeff
bfor weighting coefficient, Coeff
divdivision factor, s is the symbol coefficient of the value of getting 1 or-1.In the present embodiment, will at (I
r-N
r), (I
g-N
g), (I
b-N
b) in become the value of maximal value symbol use as symbol coefficient s.
And abnormity detection portion 56 detects by brightness value I in gray image
graythe region (pixel group) of less than 128 × 0.9 pixel composition or by gray value I
graythe region (pixel group) of the pixel composition larger than 128 × 1.1, and judge that when the area in this region exceedes setting this region is as " unusual part ".In addition, although in the present embodiment, the discrimination threshold abnormal by whether be set as general value (128) ± value of 10%, this is an example only, also suitably can set threshold value according to the characteristic etc. of checked property, camera.In addition, although utilize the brightness value gone out with above-mentioned formulae discovery to carry out abnormal judgement in the present embodiment, but also merely can keep that the pixel value of any one in R, G, B (such as G) is constant just to be used as brightness value, the mean value of the pixel value of R, G, B or maximal value can also be used as brightness value.
In step S105, judge whether detect unusual part in step S104.When making affirmative determination in step S105, then enter into step S106.On the other hand, when making negative evaluation in step S105, then as not having abnormal and terminating this process.
In step s 106, utilize judging part 57 to differentiate abnormal kind.
Figure 10 illustrates the detailed process that abnormal kind differentiates.First, in step s 201, the brightness value (brightness value of background color) of the brightness value of the unusual part detected and usual state compares by judging part 57, judges that this exception is dark defect (brightness value (that is, I less of usual state
gray< 128)) or bright defect (brightness value (that is, I larger than usual state
gray> 128)).When dark defect, enter the differentiation process of dirty (Fig. 4 A ~ 4E)/metal defect (Fig. 5 A ~ 5E), when bright defect, enter the differentiation process of needle pore defect (Fig. 6 A ~ 6E)/abnormal A (Fig. 7 A ~ 7E)/abnormal B (Fig. 8 A ~ 8E).
In step S202, judging part 57 assesses the difference of the ratio of the reduction of visible ray and invisible light.Particularly, obtain the absolute value (be labeled as | B-IR|) of the difference of the absolute value (be labeled as | G-IR|) of the difference of the absolute value (be labeled as | R-IR|) of the difference of R value and IR value, G value and IR value, B value and IR value, and whether investigation is larger than threshold value TH1 as the min|V-IR| (but, V=R, G, B) of the minimum value in these.When min|V-IR| >=TH1, that is, when the ratio of visible ray and the reduction of invisible light is different significantly, meet the type of Fig. 4 A ~ 4E, be then judged as " dirty " (step S203).On the other hand, when min|V-IR| < TH1, that is, when visible ray is roughly the same with the ratio of the reduction of invisible light, meet the type of Fig. 5 A ~ 5E, be then judged as " metal defect " (step S204).
In step S205, whether judging part 57 investigates IR value larger than threshold value TH2.Such as, as long as TH2 is set as and value 128 same degree as usual state (background color).When IR > TH2, meet the type of Fig. 8 A ~ 8E, be judged as " abnormal B " (step S206).On the other hand, when IR≤TH2, then step S207 is entered.
In step S207, whether judging part 57 investigates the maximal value maxV in R value, G value, B value larger than threshold value TH3 with the difference maxV-minV of minimum value minV.This belongs to the process assessed the balance of the pixel value of each color component utilized in the pixel of visible image capturing 41 image obtained.When maxV-minV < TH3, that is, when color balance is roughly the same with the balance of usual state, meet the type of Fig. 6 A ~ 6E, be then judged as " needle pore defect " (step S208).On the other hand, when maxV-minV >=TH3, that is, when the balance of color balance and usual state is different significantly, meet the type of Fig. 7 A ~ 7E, be then judged as " abnormal A " (step S209).In addition, the method assessing color balance also can be other method.As long as threshold value TH3 is set as such as, 10% degree of the maximal value maxV in R value, G value, B value.In addition, the appraisal procedure of color balance also can use the method except the method described in the present embodiment.Such as, also from the saturation degree of this pixel of calculated for pixel values of R, G, B, when saturation degree is less than threshold value (that is, when close to netrual colour), can judge that color balance is roughly the same with the balance of usual state.
If determine abnormal kind by above decision logic, then enter the process of the step S107 of Fig. 9.In step s 107, efferent 58 exports the information (with reference to Fig. 3) relevant to unusual part.Now, also only just can carry out information output when " metal defect " and " needle pore defect " as significant deficiency, not carry out information output when exception in addition; Or also can only just process as bad (defect) when the area of unusual part is larger to a certain extent and carry out information output.In addition, in the situations such as larger other of " metal defect ", " needle pore defect ", area are abnormal, warning or alarm can also be exported, carry out the control of the manufacturing installation stopping film.
If according to above-mentioned the present embodiment, then the exception of the checked property 2 of sheet can be detected, and, the kind of the exception detected can be differentiated in detail.By like this, be the exception of the quality that possible affect product owing to can strictly distinguish, still can not be used as the exception of bad (defect), therefore, it is possible to avoid so-called inspection excessively (to cross and detect), improve the yield rate of product.
< second embodiment >
Figure 11 is the block diagram of the sheet material testing fixture 1 of the second embodiment.In the present embodiment, only there is 1 camera head 4.This 1 camera head 4 is utilized to double as visible image capturing 41, the IR/UV light video camera head 42 of the first embodiment.That is, the camera head 4 of the present embodiment has, the photo detector of the photo detector measuring at least 1 composition in R, G, B and at least one measuring infrared light or ultraviolet light.And, visible light source 31, IR/UV light source 32, through irradiating light (but, irradiate lower surface through with visible light source 33) on identical point with visible light source 33.Because other device etc. is all identical with the first embodiment, description will be omitted.
Herein, Figure 12 is for illustrating the figure of the configuration of the photo detector that camera head 4 has.R is the line sensor of the R component detected in visible ray, and G is the line sensor of the G component detected in visible ray, and B is the line sensor of the B component detected in visible ray, and IR/UV is the line sensor detecting infrared light or ultraviolet light.Each sensor of R, G, B, IR/UV is in staggered configuration in the conveying direction.Therefore, same with the first embodiment, need the contraposition of the output signal of carrying out each sensor.By using camera head 4 as such, can the miniaturization of implement device.
< the 3rd embodiment >
Figure 13 is the block diagram of the sheet material testing fixture 1 of the 3rd embodiment.In addition, Figure 14 is the figure of the inner structure that camera head 4 is shown.R is the sensor of the R component detected in visible ray, and G is the sensor of the G component detected in visible ray, and B is the sensor of the B component detected in visible ray, and IR/UV is the sensor detecting infrared light or ultraviolet light.With regard to the present embodiment, although have 1 camera head 4 on identical with the second embodiment, but be B light using the beam splitter 43 of segmentation light path by the light light splitting inciding camera head 4, G light, R light, IR/UV light, more different from the second embodiment in the aspect utilizing corresponding photo detector to carry out measuring respectively.
That is, 1 camera head 4 due in the present embodiment, utilizes beam splitter 43 to carry out light splitting and recycles each sensor and make it light, so can be utilized to take visible ray from the same position incidence of checked property 2 and IR/UV light.And, owing to can obtain the data of same position simultaneously, so do not need contraposition.Therefore, contraposition handling part 55 required in aforementioned first embodiment, 2 is not needed.Because other device etc. is identical with the second embodiment, description will be omitted.
By using camera head 4 as such, do not need contraposition owing to becoming, so the simplification processed can be realized.In addition, due to the impact not by aligning accuracy, so the precision of abnormality detection can be improved.
Other > of <
Above-described embodiment only illustratively illustrates the present invention, and the present invention is not limited to above-mentioned concrete mode.The present invention can carry out various distortion in the scope of its technological thought.Such as, although in the above-described embodiments, export R, G, B these 3 signals as visible ray, as long as the signal of more than 2, then use the signal of which kind of wavelength can.Such as, also can obtain the signal of cyan containing the light of B component and G component by a sensor receiving package, re-use R signal and these 2 signals of cyan signal signal as visible ray.
In addition, although in above-described embodiment (Fig. 9), first implement the check processing of unusual part, more only abnormal kind differentiation process is suitable for the unusual part detected, also can be suitable for abnormal kind to integral image and differentiates process.Such as, can after the check processing of unusual part (step S104) and abnormal kind differentiate process (step S106) in executed in parallel, merge two results processed, obtain the effect same with above-described embodiment.
Claims (7)
1. a sheet material testing fixture, for checking the checked property of sheet, is characterized in that, having:
First light source, irradiates visible ray to the first surface of checked property;
Secondary light source, irradiates invisible light to the described first surface of described checked property;
3rd light source, irradiate visible ray to the second surface of described checked property, described second surface irradiates and is positioned at the opposition side contrary with described first surface;
First image sensor, is configured to utilize from described first light source irradiation and the visible ray reflected at described checked property and through the visible ray of described checked property, take described checked property from described 3rd light source irradiation;
Second image sensor, is configured to utilize and irradiates and the invisible light reflected at described checked property from described secondary light source, take described checked property;
Handling part, based on the first image of the described checked property utilizing described first image sensor to obtain and the second image of the described checked property utilizing described second image sensor to obtain, detect the unusual part that described checked property has, and differentiate the kind of the exception produced on the described unusual part detected;
Efferent, exports the information relevant to unusual part, and this information at least comprises the information of the kind representing the exception utilizing described handling part to determine.
2. sheet material testing fixture as claimed in claim 1, is characterized in that,
Described efferent also at least exports following customizing messages and is used as the information relevant to unusual part,
Described customizing messages refer in following information any one: described first image comprising the region of this unusual part, comprise this unusual part region described second image, the chart of the change of the pixel value of described first image on this unusual part is shown, the chart of the change of the pixel value of described second image on this unusual part is shown.
3. sheet material testing fixture as described in claim 1 or 2, is characterized in that,
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component;
Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property;
The pixel of described first image has the pixel value of each color component in multiple color component;
Described checked property is selected arbitrarily pay close attention to position, when meeting first condition and second condition at the same time, the kind that described handling part is determined as the exception produced in described concern position is needle pore defect,
Described first condition refers to: integrated value is than large when state N/R on checked property and usual state, described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive described first image corresponding with this concern position and the value that arrives;
Described second condition refers to: the pixel value of described second image corresponding with described concern position is than little during usual state, and, the equilibrium phase under the balance of the described multiple color component in the pixel of described first image corresponding with described concern position and described usual state with.
4. sheet material testing fixture as described in claim 1 or 2, is characterized in that,
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component;
Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property;
The pixel of described first image has the pixel value of each color component in multiple color component,
Described checked property is selected arbitrarily pay close attention to position, when meeting Article 3 part and Article 4 part at the same time, or when meeting Article 3 part and Article 5 part at the same time, the kind that described handling part is determined as the exception produced in described concern position is different types of exception with needle pore defect
Described Article 3 part refers to: integrated value is than large during described usual state, and described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive corresponding with this concern position described first image and the value that obtains,
Described Article 4 part refers to: the pixel value of described second image corresponding with described concern position is than little during usual state, and, balance under the balance of the described multiple color component in the pixel of described first image corresponding with described concern position and described usual state is not identical
Described Article 5 part refers to: the pixel value of described second image is than large during usual state.
5. sheet material testing fixture as described in claim 1 or 2, is characterized in that,
From the visible ray of described first light source irradiation and the visible ray from described 3rd light source irradiation, be the light with the same spectra distribution comprising multiple color component;
Described first image sensor, is configured at the visible ray that can receive and reflect from described first light source irradiation and at described checked property, and can receive from described 3rd light source irradiation and straight line through the position of the visible ray of described checked property;
The pixel of described first image has the pixel value of each color component in multiple color component;
Described checked property is selected arbitrarily pay close attention to position, when meeting Article 6 part and Article 7 part at the same time, the kind that described handling part is determined as the exception produced in described concern position is metal defect,
Described Article 6 part refers to: integrated value is than little during described usual state, and described integrated value is the pixel value of each color component in the described multiple color component in the pixel of comprehensive described first image corresponding with this concern position and the value that obtains,
Described Article 7 part refers to: in the described multiple color component in the pixel of described first image corresponding with this concern position between the pixel value of each color component and the pixel value of described second image, the ratio declined relative to described usual state is identical.
6. the sheet material testing fixture as described in any one in Claims 1 to 5, is characterized in that,
In a camera head, be provided with described first image sensor not receiving described invisible light and described second image sensor not receiving visible ray.
7. sheet material testing fixture as claimed in claim 6, is characterized in that,
Described camera head has beam splitter, and this beam splitter is split a light path, is guided respectively by light to described first image sensor and described second image sensor.
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| CN111830058A (en) * | 2019-04-19 | 2020-10-27 | Ckd株式会社 | Maintenance support system |
| CN111830058B (en) * | 2019-04-19 | 2024-04-12 | Ckd株式会社 | Maintenance support system |
| CN111879789A (en) * | 2020-07-15 | 2020-11-03 | 深圳科瑞技术股份有限公司 | Metal surface defect detection method and system |
| CN116936396A (en) * | 2023-09-06 | 2023-10-24 | 信基科技(北京)有限公司 | Device and method for identifying and processing defects of thin film solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201534897A (en) | 2015-09-16 |
| JP6314557B2 (en) | 2018-04-25 |
| JP2015172519A (en) | 2015-10-01 |
| TWI571629B (en) | 2017-02-21 |
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Application publication date: 20150916 |