CN104897144A - Multi-drive electrode mode-coupled micro-solid mode gyroscope - Google Patents
Multi-drive electrode mode-coupled micro-solid mode gyroscope Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
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Abstract
The invention discloses a multi-drive electrode mode-coupled micro-solid mode gyroscope which comprises a piezoelectric vibrator, multiple pairs of drive electrodes, reference electrodes, signal detection electrodes and isolating electrodes, wherein the drive electrodes, the reference electrodes, the signal detection electrodes and the isolating electrodes are located on the upper surface and the lower surface of the piezoelectric vibrator and form fixed connection with the piezoelectric vibrator. The vibration in a special mode of the piezoelectric vibrator is utilized as reference vibration; and meanwhile, the coriolis effect and the piezoelectric effect are used for sensing the external input angle velocity to detect an output signal. By introducing the multiple pairs of drive electrodes, the reference vibration velocity amplitude is increased and the detection sensitivity of the micro-gyroscope is improved; and the size of the piezoelectric vibrator is optimized so that the inherent frequencies in the reference mode and the detection mode are the same; the detection vibration amplitude is increased by employing the mode-coupling effect; the output sensitivity of the gyroscope is improved; and the detection sensitivity of the micro-solid mode gyroscope is greatly improved.
Description
Technical field
What the present invention relates to is a kind of microthrust test of field of micro electromechanical technology, and specifically, what relate to is a kind of many drive electrodes modal coupling micro-solid mode gyroscope.
Background technology
Micro-solid mode gyroscope adopts piezoelectric as driving and detection part, is a kind of novel all solid state MEMS microthrust test.Different from general MEMS oscillation gyro, micro-solid mode gyroscope does not support or moving component, therefore have overload-resistant, strong shock resistance, resonant frequency of operation are high, do not need Vacuum Package, start-up time by the advantageous characteristic such as short, be with a wide range of applications in fields such as consumption electronic product, aircraft navigation, intelligent projectile and guidances.
Through finding the literature search of prior art, in January, 2006, in the MEMS2006 meeting that Turkey Istanbul holds, the people such as Japanese scholars k.Maenaka have delivered the paper that a section is entitled as " novel micro-solid-state gyro ", this paper is incorporated in the 634th page to the 637th page, proposes a kind of all solid state microthrust test based on the special mode of oscillation of piezoelectrics first.Researchist finds, a kind of special mode of oscillation is there is in square piezoelectrics mass under certain frequency, under this mode of oscillation, piezoelectrics mass stretches or compression movement along same direction, and the direction of vibration of adjacent two seamed edges contrary (for stretching time, then another is compression).Using the vibration under this special mode as with reference to vibration, suppose that the polarised direction of piezoelectrics is Z-direction, be X-direction with reference to vibration, when there is the turning rate input of Y-direction in the external world, due to the effect of coriolis force, piezoelectrics produce induction vibration in polarised direction.Due to the piezoelectric effect of piezoelectrics, the surface perpendicular to Z-direction will produce induced charge or voltage, and its value is directly proportional to extraneous input angular velocity, and the electric charge after being amplified by detection peripheral circuit or voltage can obtain the size of extraneous input angular velocity.
This technology exists following not enough: first, piezoelectric vibrator upper and lower surface only respectively has a pair drive electrode, and surperficial service efficiency is not high, and drive electrode spacing is relatively large, and electric field intensity is less, causes with reference to vibration amplitude less; Secondly, piezoelectric vibrator detects resonant frequency and the driven-mode frequency of mode of oscillation and inconsistent, when with carry out with reference to vibration modal frequency piezoelectrics drive time, detection vibration amplitude does not reach maximal value, cause the reduction of detecting electrode place voltage magnitude, have impact on the highly sensitive acquisition of microthrust test.
Summary of the invention
The object of the invention is for the deficiencies in the prior art, a kind of micro-solid mode gyroscope of many drive electrodes modal coupling is provided, utilize the special mode of oscillation of piezoelectric vibrator to carry out work, utilize the piezoelectric effect of coriolis effect and piezoelectric to detect; By introducing multipair drive electrode in piezoelectric vibrator upper and lower surface, improving surperficial service efficiency, increasing electric field intensity, and then increase with reference to vibration velocity amplitude; In addition, by adjusting the size of piezoelectrics, making detection mode of oscillation consistent with reference to mode of oscillation natural frequency, the induction vibration in polarised direction can be strengthened, improving the sensitivity of microthrust test.
The present invention is achieved by the following technical solutions:
The invention provides a kind of many drive electrodes modal coupling micro-solid mode gyroscope, comprise: piezoelectric vibrator, multipair drive electrode, multiple reference electrode, multiple signal detection electrode and a multiple isolated electrode, drive electrode, reference electrode, signal detection electrode, isolated electrode are all positioned at the upper and lower surface of piezoelectric vibrator, and form a fixed connection with piezoelectric vibrator;
It is four right that described drive electrode has, and wherein the two pairs of drive electrodes are evenly distributed on the centre of piezoelectric vibrator upper surface, and other two pairs of drive electrodes are evenly distributed on the centre of piezoelectric vibrator lower surface; Described drive electrode produces the driven-mode vibration shape for encouraging piezoelectric vibrator;
Described reference electrode has four, and wherein two reference electrodes are distributed in the centre position near relative two seamed edges of piezoelectric vibrator upper surface, and two other reference electrode is distributed in the centre position near relative two seamed edges of piezoelectric vibrator lower surface; Described reference electrode for monitoring piezoelectric vibrator whether normal starting of oscillation under the excitation of drive electrode, and follows the tracks of operational vibration mode, makes piezoelectric vibrator steady operation under operational vibration mode;
Described signal detection electrode has eight, and wherein four signal detection electrode are distributed on four angles of piezoelectric vibrator upper surface, and other four signal detection electrode are distributed on four angles of piezoelectric vibrator lower surface; Described signal detection electrode is for detecting the induced voltage that piezoelectric vibrator polarised direction produces;
Described isolated electrode has four, wherein between two drive electrodes at piezoelectric vibrator upper surface and reference electrode, signal detection electrode, between two other drive electrode at piezoelectric vibrator lower surface and reference electrode, signal detection electrode; Described isolated electrode is used for isolation drive voltage to the impact of signal detection electrode, reference electrode output voltage or electric charge.
Preferably, when applying alternating voltage with selected resonant frequency on described drive electrode, the special mode of oscillation in certain rank is there is in described piezoelectric vibrator under the excitation of alternating voltage, substantially move in the same direction with same frequency at this mode lower piezoelectric oscillator each point, and direction of vibration in adjacent two edges contrary (one for stretching time, then another is compression), direction of vibration on two relative limits is identical (be all and stretch or compression) just in time, using the special vibration under this frequency as reference vibration, and the polarised direction of piezoelectric vibrator and piezoelectric vibrator are perpendicular with reference to direction of vibration.
Preferably, when there being turning rate input perpendicular to reference direction of vibration, described piezoelectric vibrator is under the effect of coriolis force, polarised direction can induce and detect vibration, its amplitude is directly proportional to extraneous input angular velocity size, utilize and make to detect vibration amplitude reach maximal value under this frequency with reference to being coupled of mode and sensed-mode, by reversing situation and the variable quantity of piezoelectric voltage on detection signal detecting electrode, namely obtain the size of extraneous input angular velocity.
Preferably, described piezoelectric vibrator is rectangular structure, and material is piezoelectric ceramics or other piezoelectric.
Preferably, the selected of described piezoelectric vibrator length, width and height makes it identical with detection vibration modal frequency with reference to vibration modal frequency.
Preferably, ensure that the voltage being applied to adjacent driven electrode on piezoelectric vibrator the same face has identical frequency, amplitude during described drive electrode work, but polarity is contrary.
Preferably, the material of described drive electrode, described reference electrode, described signal detection electrode, described isolated electrode is metal, and structure is rectangle.
Compared with prior art, the present invention has following beneficial effect:
The invention provides a kind of micro-solid mode gyroscope of many drive electrodes modal coupling, introduce multipair drive electrode in the upper and lower surface of piezoelectric vibrator, surperficial service efficiency can not only be improved, can also electric field intensity be increased, and then increase with reference to vibration velocity amplitude; The again selected of microthrust test size ensure that with reference to the consistance of mode with sensed-mode natural frequency, utilize reference mode and sensed-mode intercouple increase detection vibration amplitude.Present invention optimizes the size of microthrust test, final output sensitivity and the performance improving microthrust test.
Accompanying drawing explanation
Fig. 1,2 is general structure schematic diagram of the present invention;
Fig. 3 is respectively driven-mode of the present invention, sensed-mode vibration shape emulation schematic diagram, and wherein (a) is that the driven-mode vibration shape emulates schematic diagram, 3 (b) is sensed-mode vibration shape emulation schematic diagram;
Fig. 4 be the present invention under the height of 5 different sizes, driven-mode, sensed-mode connecting curve figure;
In figure: piezoelectric vibrator 1, drive electrode 6,7,8,9,18,19,20,21, reference electrode 3,12,15,24, signal detection electrode 2,4,11,13,14,16,23,25 and isolated electrode 5,10,17,22.
Embodiment
Elaborate to embodiments of the invention below in conjunction with accompanying drawing, the present embodiment, premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, 2, the present embodiment provides a kind of micro-solid mode gyroscope of many drive electrodes modal coupling, comprise piezoelectric vibrator 1, drive electrode 6,7,8,9,18,19,20,21, reference electrode 3,12,15,24, signal detection electrode 2,4,11,13,14,16,23,25 and isolated electrode 5,10,17,22.
In the present embodiment, described piezoelectric vibrator 1 is rectangular structure, and material is piezoelectric ceramics or other piezoelectrics, and choosing of length, width and height size makes reference vibration modal frequency identical with detection vibration modal frequency, specifically as shown in Fig. 4 connecting curve, its polarised direction is along Z axis.
In the present embodiment, described drive electrode 6,7,8,9,18,19,20,21 material is metal, structure is rectangle, wherein: drive electrode 6,7,8,9 is evenly distributed on the centre of piezoelectric vibrator 1 upper surface, the centre of drive electrode 18,19,20,21 piezoelectric vibrator 1 lower surface, produces the driven-mode vibration shape for encouraging piezoelectric vibrator 1; During work, piezoelectric vibrator 1 same surface adjacent driven electrode applies constant amplitude, anti-phase driven-mode frequency alternating voltage is (as contrary in the polarity of voltage on drive electrode 6,7, but the polarity 6, on 8 is identical), the situation on lower surface drive electrode and upper surface similar.
In the present embodiment, described reference electrode 3,12,15,24 material is metal, structure is rectangle, wherein: reference electrode 3,12 is distributed in the centre position near relative two seamed edges of piezoelectric vibrator 1 upper surface, reference electrode 15,24 is distributed in the centre position near relative two seamed edges of piezoelectric vibrator 1 lower surface, for monitoring piezoelectric vibrator 1 whether normal starting of oscillation under the excitation of drive electrode, and following the tracks of operational vibration mode, making piezoelectric vibrator 1 steady operation under operational vibration mode.
In the present embodiment, described signal detection electrode 2,4,11,13,14,16,23,25 material is metal, structure is rectangle, wherein: signal detection electrode 2,4,11,13 is distributed on four angles of piezoelectric vibrator 1 upper surface, signal detection electrode 14,16,23,25 is distributed on four angles of piezoelectric vibrator 1 lower surface, for detecting the induced voltage that piezoelectric vibrator 1 polarised direction produces.
In the present embodiment, described isolated electrode 5,10,17,22 material is metal, and structure is rectangle, lays respectively between drive electrode and reference electrode, signal detection electrode, for isolating the impact of driving voltage on output voltage, reduces the impact of common-mode signal.
In the present embodiment, all electrodes (comprise drive electrode 6,7,8,9,18,19,20,21, reference electrode 3,12,15,24, signal detection electrode 2,4,11,13,14,16,23,25 and isolated electrode 5,10,17,22), all by MEMS technology, dual surface lithography and electroplating technology is adopted to be made on the upper and lower surface of piezoelectric vibrator 1.
As shown in Figure 2, described in the present embodiment, piezoelectric vibrator 1 structure is rectangular parallelepiped, and L represents its length, and W represents its width, and H represents its height, and the direction at height place is its polarised direction.Owing to utilizing the coupling effect with reference to mode and sensed-mode during micro-solid-state mode gyroscope work, thus the length, width and height size of piezoelectric vibrator 1 choose the certain relation of demand fulfillment.In the present embodiment, the variation range of piezoelectric vibrator 1 length L is 4.8mm to 5.6mm, and the variation range of width W is 3mm to 4mm, and height H have chosen 5 different sizes, is 2.8mm, 2.9mm, 3.0mm, 3.1mm and 3.2mm respectively.Find after deliberation, thickness one timing, the increase of length or the increase of width all can cause the reduction of driven-mode frequency, but the impact of width on driven-mode frequency is more remarkable; Sensed-mode frequency can reduce along with the increase of length, increases along with the increase of width, with driven-mode frequency unlike, the change of sensed-mode frequency to length is sensitiveer.
As shown in Figure 3, mode of oscillation and the sensed-mode vibration shape for being obtained piezoelectric vibrator 1 by finite element analysis emulate schematic diagram.Drive electrode 6,7,8,9,18,19,20,21 applies the alternating voltage signal of selected frequency, polarity of voltage wherein on 6,7 is contrary, but the polarity 6, on 8,19,21 is identical, piezoelectric vibrator 1 produces special reference mode of oscillation, as shown in Fig. 3 (a) due to inverse piezoelectric effect.Under this mode of oscillation, piezoelectric vibrator 1 each point stretches or compression movement substantially along the Y direction, the direction of vibration of adjacent two seamed edges is contrary, direction of vibration on two relative limits is then identical, now near seamed edge, middle is stressed maximum, displacement on four angles is maximum, and this is the reason of reference electrode and signal detection electrode distribution design.When X-direction has turning rate input, because a pair signal detection electrode 2,4 in Y-axis is contrary along the direction that X-axis is moved, they can be subject to contrary coriolis force, but direction is along polarised direction Z-direction, namely the detection direction of vibration of signal detection electrode 2,4 is contrary, cause the output signal change in signal detection electrode 2,4 contrary, the amplitude wherein outputed signal is relevant with input angular velocity size.What output signal amplitude by a pair signal detection electrode 2,4 in Y-axis subtracts each other the size that just can obtain Y-axis input angular velocity.As shown in Fig. 3 (b), when there is a turning rate input in the external world, the detection mode of oscillation that polarised direction induces, detects vibration frequency identical with reference vibration frequency.
As shown in Figure 4, for the present invention is under the height of 5 different sizes, driven-mode, sensed-mode connecting curve figure.When with driving resonance frequencies excitation piezoelectric vibrator 1, under coriolis effect, the acting in conjunction of piezoelectricity effect, polarised direction induces the detection vibration of same frequency, if the natural frequency of driven-mode, sensed-mode is identical, namely driven-mode and sensed-mode intercouple, the maximal value that the amplitude then detecting vibration will reach under this frequency, and then the change increasing signal detection electrode 2,4 place output signal, thus be conducive to the raising of sensitivity.In Fig. 4, eachly on curve represent the one group of length, width and height registration met under modal coupling condition, and the corresponding piezoelectric vibrator of every bar curve 1 one kinds of height, height is from left to right 2.8mm, 2.9mm, 3.0mm, 3.1mm and 3.2mm respectively.As shown in Figure 4, along with the increase of piezoelectric vibrator 1 height H, curve is more and more precipitous, namely along with the increase of height, the change of modal coupling curve to width is more and more sensitiveer, can optimize the size of micro-solid-state mode gyroscope according to the size on curve, makes with reference to mode identical with sensed-mode.
Choose 3 points from the every bar curve of Fig. 4, the piezoelectric vibrator of 15 different sizes can be obtained.Reference mode, sensed-mode resonant frequency corresponding under drawing different size by finite element analysis, then apply the angular velocity of 1rad/s in X-direction, record its scaling factor, detail parameters is as shown in the table.The reference mode of 15 points, the natural frequency of sensed-mode are basically identical, meet the requirement of modal coupling.Therefrom can find out, when length L remains unchanged, thickness H is larger, and scaling factor can and then become large; When thickness H is constant, scaling factor can reduce along with the increase of length L.
Following table is the design parameter of Fig. 4 curve top branch, comprises the size of piezoelectric vibrator, modal coupling frequency, corresponding sensitivity:
As a preferred implementation, described many drive electrodes modal coupling micro-solid mode gyroscope utilizes piezoelectric ceramics matrix, adopts double-sided alignment technique, first on matrix, sputters one deck Seed Layer; Then spin coating photoresist, utilizes the mask plate made to carry out photoetching; Develop afterwards, graphical; Following plated metal electrode forms drive electrode, reference electrode, signal detection electrode, isolated electrode; Finally connect peripheral circuit, encapsulation obtains finished product.
The present invention utilizes the vibration under the special mode of piezoelectric vibrator as with reference to vibrating, and utilizes coriolis effect and the next responsive extraneous input angular velocity of piezoelectric effect to carry out the detection outputed signal simultaneously.The present invention increases with reference to vibration velocity amplitude by introducing multipair drive electrode, improves microthrust test detection sensitivity; Optimize the size of piezoelectric vibrator, make with reference to mode identical with the natural frequency of the two under sensed-mode, utilize modal coupling effect to increase and detect vibration amplitude, improve the output sensitivity of gyro.The present invention is by adopting many drive electrodes and driving sensed-mode coupling effect greatly to improve the detection sensitivity of micro-solid mode gyroscope.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is not only confined to above-described embodiment, and all technical schemes belonged under thinking of the present invention all belong to protection category of the present invention.Should be understood that for those skilled in the art, also all should be considered as protection scope of the present invention not departing from the some improvements and modifications under prerequisite of the present invention.
Claims (7)
1. the micro-solid mode gyroscope of drive electrode modal coupling more than a kind, it is characterized in that, comprise: piezoelectric vibrator, multipair drive electrode, multiple reference electrode, multiple signal detection electrode and a multiple isolated electrode, drive electrode, reference electrode, signal detection electrode, isolated electrode are all positioned at the upper and lower surface of piezoelectric vibrator, and form a fixed connection with piezoelectric vibrator;
It is four right that described drive electrode has, and wherein the two pairs of drive electrodes are evenly distributed on the centre of piezoelectric vibrator upper surface, and other two pairs of drive electrodes are evenly distributed on the centre of piezoelectric vibrator lower surface; Described drive electrode produces the driven-mode vibration shape for encouraging piezoelectric vibrator;
Described reference electrode has four, and wherein two reference electrodes are distributed in the centre position near relative two seamed edges of piezoelectric vibrator upper surface, and two other reference electrode is distributed in the centre position near relative two seamed edges of piezoelectric vibrator lower surface; Described reference electrode for monitoring piezoelectric vibrator whether normal starting of oscillation under the excitation of drive electrode, and follows the tracks of operational vibration mode, makes piezoelectric vibrator steady operation under operational vibration mode;
Described signal detection electrode has eight, and wherein four signal detection electrode are distributed on four angles of piezoelectric vibrator upper surface, and other four signal detection electrode are distributed on four angles of piezoelectric vibrator lower surface; Described signal detection electrode is for detecting the induced voltage that piezoelectric vibrator polarised direction produces;
Described isolated electrode has four, wherein between two drive electrodes at piezoelectric vibrator upper surface and reference electrode, signal detection electrode, between two other drive electrode at piezoelectric vibrator lower surface and reference electrode, signal detection electrode; Described isolated electrode is used for isolation drive voltage to the impact of signal detection electrode, reference electrode output voltage or electric charge.
2. one many drive electrodes modal coupling micro-solid mode gyroscope according to claim 1, it is characterized in that, when applying alternating voltage with selected resonant frequency on described drive electrode, the special mode of oscillation in certain rank is there is in described piezoelectric vibrator under the excitation of alternating voltage, substantially move in the same direction with same frequency at this mode lower piezoelectric oscillator each point, and direction of vibration in adjacent two edges is contrary, direction of vibration on two relative limits is just in time identical, using the special vibration under this frequency as reference vibration, and the polarised direction of piezoelectric vibrator and piezoelectric vibrator are perpendicular with reference to direction of vibration.
3. one many drive electrodes modal coupling micro-solid mode gyroscope according to claim 2, it is characterized in that, when there being turning rate input perpendicular to reference direction of vibration, described piezoelectric vibrator is under the effect of coriolis force, polarised direction can induce and detect vibration, its amplitude is directly proportional to extraneous input angular velocity size, utilize and make to detect vibration amplitude reach maximal value under this frequency with reference to being coupled of mode and sensed-mode, by reversing situation and the variable quantity of piezoelectric voltage on detection signal detecting electrode, namely obtain the size of extraneous input angular velocity.
4. the one many drive electrodes modal coupling micro-solid mode gyroscope according to any one of claim 1-3, it is characterized in that, described piezoelectric vibrator is rectangular structure, and material is piezoelectric ceramics or other piezoelectric.
5. the one many drive electrodes modal coupling micro-solid mode gyroscope according to any one of claim 1-3, is characterized in that, the selected of described piezoelectric vibrator length, width and height makes it identical with detection vibration modal frequency with reference to vibration modal frequency.
6. the one many drive electrodes modal coupling micro-solid mode gyroscope according to any one of claim 1-3, it is characterized in that, ensure that the voltage being applied to adjacent driven electrode on piezoelectric vibrator the same face has identical frequency, amplitude during described drive electrode work, but polarity is contrary.
7. the one many drive electrodes modal coupling micro-solid mode gyroscope according to any one of claim 1-3, it is characterized in that, the material of described drive electrode, described reference electrode, described signal detection electrode, described isolated electrode is metal, and structure is rectangle.
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| CN109470231A (en) * | 2018-11-21 | 2019-03-15 | 中国船舶重工集团公司第七0七研究所 | Expand the piezoelectric electrode design structure of metal resonant gyroscope range |
| CN109655049A (en) * | 2018-12-21 | 2019-04-19 | 陕西航天时代导航设备有限公司 | A kind of method of extracted with high accuracy cupuliform gyroscopic vibration amplitude |
| CN113297707A (en) * | 2021-06-21 | 2021-08-24 | 上海交通大学 | Resonance gyro optimization method and system based on joint simulation |
| CN114113813A (en) * | 2021-11-24 | 2022-03-01 | 北京中科飞龙传感技术有限责任公司 | Self-adaptive MEMS electric field sensor and structure thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109470231A (en) * | 2018-11-21 | 2019-03-15 | 中国船舶重工集团公司第七0七研究所 | Expand the piezoelectric electrode design structure of metal resonant gyroscope range |
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| CN109655049B (en) * | 2018-12-21 | 2022-05-17 | 陕西航天时代导航设备有限公司 | Method for extracting vibration amplitude of cup-shaped gyroscope with high precision |
| CN113297707A (en) * | 2021-06-21 | 2021-08-24 | 上海交通大学 | Resonance gyro optimization method and system based on joint simulation |
| CN113297707B (en) * | 2021-06-21 | 2023-09-05 | 上海交通大学 | Resonance gyro optimization method and system based on joint simulation |
| CN114113813A (en) * | 2021-11-24 | 2022-03-01 | 北京中科飞龙传感技术有限责任公司 | Self-adaptive MEMS electric field sensor and structure thereof |
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