CN104894527A - Clamping tool for film coating to disk of hard disk through vacuum sputtering - Google Patents
Clamping tool for film coating to disk of hard disk through vacuum sputtering Download PDFInfo
- Publication number
- CN104894527A CN104894527A CN201510319088.8A CN201510319088A CN104894527A CN 104894527 A CN104894527 A CN 104894527A CN 201510319088 A CN201510319088 A CN 201510319088A CN 104894527 A CN104894527 A CN 104894527A
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- China
- Prior art keywords
- guide rail
- coil
- clamp mount
- vacuum sputtering
- disk
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- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
The invention relates to a clamping tool for film coating to the disk of a hard disk through vacuum sputtering. The clamping tool comprises a guide rail and a clamp seat positioned on the guide rail, wherein a coil is mounted at the bottom of the guide coil, the coil is connected with a power source and a control unit, a clamp used for clamping the disk of the hard disk is arranged on the clamp seat, and an electromagnet is loaded in the clamp seat; after electrifying, the magnetic field polarity produced by the coil at the guide rail and the magnetic field polarity on the clamp seat are the same, and are like magnetic poles repelling each other, and the repelling force enables the clamp seat to be suspended. The thrust produced by using the principle that the two like magnetic poles repel each other is higher than earth gravity, so that the tool is enabled to be suspended 3mm above the guide rail on an assembly line, and through controlling the sizes of the magnetic forces of the tool and the assembly line, the tool is enabled to run stably. Due to the adoption of the magnetic suspension principle, an original mechanical guide rail mounting way is changed, the clamping tool is enabled to be separated from a base to carry out flow production, the replacement time is shortened, small granules produced by mechanical friction are reduced, but a vacuum environment required by a coating process is polluted, therefore, product qualified rate and efficiency are improved.
Description
Technical field
The present invention relates to a kind of hard disc vacuum sputtering coating clamping tooling.
Background technology
At present, the clamping tooling that hard disc vacuum sputtering coating adopts is that mechanical guide mounting means carries out streamline operration, not only increases the time of remodeling, and makes to produce friction between machinery, and affects precision, pollution vacuum environment, causes product bad.
Summary of the invention
The object of the invention is the deficiency overcoming prior art existence, a kind of hard disc vacuum sputtering coating clamping tooling is provided.
Object of the present invention is achieved through the following technical solutions:
Hard disc vacuum sputtering coating clamping tooling, feature is: the clamp mount comprising guide rail and be located thereon, and is provided with coil bottom described guide rail, and coil connects power supply and control unit, described clamp mount is provided with the fixture for clamping hard disc, and clamp mount is built with electromagnet; After energising, the polarity of the magnetic field that guide rail coil produces keeps identical with the electromagnet polarity on clamp mount, both two like magnetic poles repel each others, and repulsive force makes clamp mount suspend.
Further, above-mentioned hard disc vacuum sputtering coating clamping tooling, wherein, coil is equipped with in described guide rail both sides, and alternating-current makes coil become electromagnet, interacts with the electromagnet on clamp mount, and clamp mount is moved ahead.
Further, above-mentioned hard disc vacuum sputtering coating clamping tooling, wherein, is intervally distributed with several electromagnet in described clamp mount.
Again further, above-mentioned hard disc vacuum sputtering coating clamping tooling, wherein, the levitation gap between described clamp mount and guide rail is 3mm.
The substantive distinguishing features that technical solution of the present invention is outstanding and significant progress are mainly reflected in:
The thrust that the present invention utilizes the principle of magnetic two like magnetic poles repel each other to produce, higher than terrestrial attraction, makes frock be suspended in about 3mm above streamline track reposefully, by controlling the magnetic force size of frock and streamline, frock is operated steadily.Magnetic suspension principle, change original mechanical guide mounting means, make clamping tooling depart from pedestal and carry out streamline operration, reduce and remodel the time, reduce mechanical friction and the molecule that produces and the vacuum bad border of polluting needed for coating process, thus improve qualification rate and the efficiency of product.By test magnetic force value, make operation and suspension effect the best.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, technical solution of the present invention is described further:
Fig. 1: structural representation of the present invention;
Fig. 2: the structural representation of clamp mount.
Embodiment
As shown in Figure 1 and Figure 2, hard disc vacuum sputtering coating clamping tooling, the clamp mount 3 comprising guide rail 1 and be located thereon, coil 2 is installed bottom guide rail, coil 2 connects power supply 7 and control unit 7, clamp mount 3 is provided with the fixture 4 for clamping hard disc 5, is intervally distributed with several electromagnet 6 in clamp mount 3; After energising, the polarity of the magnetic field that guide rail coil 2 produces keeps identical, both two like magnetic poles repel each others with electromagnet 6 polarity on clamp mount, and repulsive force makes clamp mount suspend, and the levitation gap between clamp mount and guide rail is 3mm.
In addition, coil is equipped with in guide rail 1 both sides, and alternating-current makes coil become electromagnet, interacts with the electromagnet on clamp mount, and clamp mount is moved ahead.
Utilize two like magnetic poles repel each other, the principle that there is a natural attraction between the sexes, make clamp mount 3 getaway 1, be suspended in distance track about 1 centimeters.Fixture is suspended on guide rail and moves ahead, and accurately must control the electric current of electro-magnet.
The thrust of the principle generation of magnetic two like magnetic poles repel each other, higher than terrestrial attraction, makes frock be suspended in about 3mm above streamline track reposefully.By controlling the magnetic force size of frock and streamline, frock is operated steadily.
Utilize magnetic suspension principle, change original mechanical guide mounting means, make clamping tooling depart from pedestal and carry out streamline operration, reduce and remodel the time, reduce mechanical friction and the molecule that produces and the vacuum bad border of polluting needed for coating process, thus improve qualification rate and the efficiency of product.By test magnetic force value, make operation and suspension effect the best.
It is to be understood that: the above is only the preferred embodiment of the present invention; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (4)
1. hard disc vacuum sputtering coating clamping tooling, it is characterized in that: the clamp mount comprising guide rail and be located thereon, bottom described guide rail, coil is installed, coil connects power supply and control unit, described clamp mount is provided with the fixture for clamping hard disc, and clamp mount is built with electromagnet; After energising, the polarity of the magnetic field that guide rail coil produces keeps identical with the electromagnet polarity on clamp mount, both two like magnetic poles repel each others, and repulsive force makes clamp mount suspend.
2. hard disc vacuum sputtering coating clamping tooling according to claim 1, is characterized in that: coil is equipped with in described guide rail both sides.
3. hard disc vacuum sputtering coating clamping tooling according to claim 1, is characterized in that: be intervally distributed with several electromagnet in described clamp mount.
4. hard disc vacuum sputtering coating clamping tooling according to claim 1, is characterized in that: the levitation gap between described clamp mount and guide rail is 3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510319088.8A CN104894527A (en) | 2015-06-11 | 2015-06-11 | Clamping tool for film coating to disk of hard disk through vacuum sputtering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510319088.8A CN104894527A (en) | 2015-06-11 | 2015-06-11 | Clamping tool for film coating to disk of hard disk through vacuum sputtering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104894527A true CN104894527A (en) | 2015-09-09 |
Family
ID=54027473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510319088.8A Pending CN104894527A (en) | 2015-06-11 | 2015-06-11 | Clamping tool for film coating to disk of hard disk through vacuum sputtering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104894527A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106180523A (en) * | 2016-07-10 | 2016-12-07 | 上海大学 | Cold headers magnetic suspension clamp transfer device |
| CN110670028A (en) * | 2019-11-12 | 2020-01-10 | 谢曲坚 | Equipment for evaporating dysprosium on surface of magnetic material |
Citations (7)
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| CN1561535A (en) * | 2001-08-31 | 2005-01-05 | 阿赛斯特技术公司 | Universal modular wafer transport system |
| CN102055381A (en) * | 2009-10-28 | 2011-05-11 | Sfa工程股份有限公司 | Transferring system for magnetic levitation |
| CN103420165A (en) * | 2013-08-06 | 2013-12-04 | 中国电子科技集团公司第四十八研究所 | Substrate conveying device |
| CN103572204A (en) * | 2012-08-03 | 2014-02-12 | 三星显示有限公司 | Organic layer deposition assembly, organic layer deposition apparatus, organic light-emitting display apparatus and method of manufacturing the same |
| CN203644750U (en) * | 2013-12-30 | 2014-06-11 | 上海集成电路研发中心有限公司 | Semiconductor wafer bearing platform |
| CN104167511A (en) * | 2013-05-16 | 2014-11-26 | 三星显示有限公司 | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
| TW201515980A (en) * | 2013-10-16 | 2015-05-01 | Korea Electrotech Res Inst | Magnetically levitated transportation apparatus |
-
2015
- 2015-06-11 CN CN201510319088.8A patent/CN104894527A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1561535A (en) * | 2001-08-31 | 2005-01-05 | 阿赛斯特技术公司 | Universal modular wafer transport system |
| CN102055381A (en) * | 2009-10-28 | 2011-05-11 | Sfa工程股份有限公司 | Transferring system for magnetic levitation |
| CN103572204A (en) * | 2012-08-03 | 2014-02-12 | 三星显示有限公司 | Organic layer deposition assembly, organic layer deposition apparatus, organic light-emitting display apparatus and method of manufacturing the same |
| CN104167511A (en) * | 2013-05-16 | 2014-11-26 | 三星显示有限公司 | Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same |
| CN103420165A (en) * | 2013-08-06 | 2013-12-04 | 中国电子科技集团公司第四十八研究所 | Substrate conveying device |
| TW201515980A (en) * | 2013-10-16 | 2015-05-01 | Korea Electrotech Res Inst | Magnetically levitated transportation apparatus |
| CN203644750U (en) * | 2013-12-30 | 2014-06-11 | 上海集成电路研发中心有限公司 | Semiconductor wafer bearing platform |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106180523A (en) * | 2016-07-10 | 2016-12-07 | 上海大学 | Cold headers magnetic suspension clamp transfer device |
| CN106180523B (en) * | 2016-07-10 | 2018-05-01 | 上海大学 | Cold headers magnetic suspension clamp transfer device |
| CN110670028A (en) * | 2019-11-12 | 2020-01-10 | 谢曲坚 | Equipment for evaporating dysprosium on surface of magnetic material |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150909 |