CN104849214A - Enhanced multi-group photoacoustic spectrum gas sensing device based on quartz tuning fork - Google Patents
Enhanced multi-group photoacoustic spectrum gas sensing device based on quartz tuning fork Download PDFInfo
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- CN104849214A CN104849214A CN201510187980.5A CN201510187980A CN104849214A CN 104849214 A CN104849214 A CN 104849214A CN 201510187980 A CN201510187980 A CN 201510187980A CN 104849214 A CN104849214 A CN 104849214A
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Abstract
The invention relates to an enhanced multi-group photoacoustic spectrum gas sensing device based on a quartz tuning fork and belongs to the field of a photoacoustic spectrum detection technology. According to the invention, the quartz tuning fork with high quality factor is used to replace a traditional broadband microphone so as to broaden the dynamic range and realize miniaturization of the whole gas sensing device. By arranging a fiber-optic amplifier between a light source and an optical fiber coupler, laser output power of the light source is increased. Thus, it is easy to capture a weak photoacoustic signal generated by the quartz tuning fork, and detection sensitivity of the gas sensing device can be enhanced.
Description
Technical field
The present invention relates to a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork, belong to optoacoustic spectroscopy detection technique field.
Background technology
The sensor-based system detecting gas concentration is requisite ingredient in urban air monitoring, commercial production monitoring and medical diagnosis.Recently, quartz enhanced photoacoustic spectroscopy sensor enjoys everybody to attract attention, and it utilizes quartz tuning-fork as optoacoustic converter, and when after gas absorption light wave, produce faint acoustic pressure wave, this pressure wave excites quartz tuning-fork to resonate, and produces electric signal by piezoelectric effect.Transimpedance amplifier is generally used for sensed current signal, and this signal is directly proportional to gas concentration.Experimental study shows that QEPAS technology other gas detection technologies of comparing have highly sensitive, miniaturization and exempt from the feature of neighbourhood noise.
On August 26th, 2011, in Chinese invention patent 201110257022 disclosed in Anhui Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences, " a kind of optoacoustic spectroscopy gas sensor " is described.This gas sensor is made up of the connecting circuit of light source, condenser lens, acoustic resonance cavity, quartz tuning-fork and light source and quartz tuning-fork, wherein acoustic resonance cavity is T-shaped, be made up of supervisor and arm, supervisor is vertically connected with arm, and its tubular axis line and light path center are on a horizontal line.The junction of supervisor and arm is positioned at the focus of condenser lens, and two fork stock faces of quartz tuning-fork and the axes normal of arm, fork stock gap center is positioned on axis.The misfortune that the arrangement achieves between optical excitation acoustic wave energy and quartz tuning-fork is closed, and can be used for the measurement of trace gas relative concentration, but is unfavorable for the absolute concentration obtaining gas.
Summary of the invention
The object of the invention is to the above-mentioned deficiency overcoming prior art, provide a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork, this gas sensing device can realize the miniaturization of sensing device; Increase luminous power, be easy to catch faint photoacoustic signal, improve detection sensitivity; The online of a laser instrument multicomponent gas can be realized measure, online self calibration simultaneously, and long-term non-calibrating, improve the practicality of whole device.
Above-mentioned purpose of the present invention is mainly achieved by following technical solution:
A kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork of the present invention, comprises laser instrument, fiber amplifier, fiber coupler, collimating apparatus, condenser lens, gas cell, reference cell, the first detector, the second detector, pre-amplification circuit module, lock-in amplifier and signal acquisition and controlling unit; Gas to be measured is filled with in gas cell;
Wherein gas cell inside is placed with miniature resonance kapillary and quartz tuning-fork, gas cell has a CaF
2window, the 2nd CaF
2window, air intake opening and gas outlet; One CaF
2window is positioned at the left side wall of gas cell, the 2nd CaF
2window is positioned at the right side wall of gas cell; Air intake opening and gas outlet are all positioned at the end face of gas cell; Miniature resonance kapillary is fixed on the both sides of quartz tuning-fork, and quartz tuning-fork is positioned at the focus place of condenser lens; The both sides composition spectrum that miniature resonance kapillary is fixed on quartz tuning-fork surveys sound module;
Wherein control signal produces and comprises data acquisition card, signal controlled processing unit, signal generating unit and laser drive unit with data acquisition unit;
Laser output laser beam, laser beam by its power amplification, is then coupled as two-way by fiber coupler through fiber amplifier, and wherein a road light beam is collimated through collimating apparatus, light beam after collimation is focused on by condenser lens, focused beam along light path successively through a CaF
2the center of window and the centre focus of miniature resonance kapillary are between two fork stocks of quartz tuning-fork; After quartz tuning-fork detects gas signal to be measured, can produce piezoelectric current, piezoelectric current becomes voltage signal by pre-amplification circuit module transitions, and voltage signal, through lock-in amplifier, produces second harmonic signal and measured signal;
Another road light beam that fiber coupler produces, by behind gas reference pond, is detected by the first detector, and the voltage signal obtained after detection is through lock-in amplifier, and produce standard second harmonic, this standard second harmonic is for locking Absorption Line centre wavelength;
Second detector detects through the 2nd CaF
2the gas absorption signal of window, gas absorption signal, through lock-in amplifier, produces first harmonic, and this first harmonic is used for calibrating to measured signal;
The measured signal produced by lock-in amplifier, standard second harmonic and first harmonic carry out signals collecting through data acquisition card, and the signal after collection carries out signal transacting by signal controlled processing unit;
Signal controlled processing unit control signal generating unit;
Laser drive unit controls the temperature of laser instrument and electric current, is used for adjusting the output wavelength of laser instrument; Signal generating unit on the one hand carries out frequency sweep to quartz tuning-fork, determines the resonant frequency of quartz tuning-fork, and signal generating unit produces modulation signal on the other hand, and the modulation signal of generation is sent into laser drive unit and is used for the laser output wavelength of modulated laser.
Laser instrument is distributed feedback laser, and its output wavelength is 2003-2005nm, and power is 2-3mW;
Fiber amplifier output wavelength scope 2000-2005nm, enlargement factor 100 times;
The laser temperature that laser drive unit provides is 22-40 DEG C, and electric current is 60-140mA;
Fiber coupler wavelength is 2003-2005nm, and splitting ratio is 1:99;
The material of condenser lens is N-BK7, and focal length is 65-80mm;
One CaF
2the center of window, the 2nd CaF
2the center of the center of window, the center of miniature resonance kapillary and quartz tuning-fork all in same level, and point-blank;
The resonant frequency of quartz tuning-fork is 32.768-77.503KHz;
The sample rate of data acquisition card is 10-20MS/s;
What reference cell adopted is hollow photon band-gap optical fiber, and its mode field diameter is 11 μm, logical optical range 1965nm-2125nm.
The present invention's advantage is compared with prior art:
(1) the present invention utilizes the quartz tuning-fork with high quality factor characteristic to replace traditional broadband microphone, can expand dynamic range, realize the miniaturization of whole gas sensing device;
(2) the present invention by arranging fiber amplifier between light source and fiber coupler, increases the power of light source Output of laser, is easy to the faint light acoustical signal catching quartz tuning-fork generation, can improves the detection sensitivity of gas sensing device;
(3) the present invention is by adopting the hollow photon band-gap optical fiber being filled with a certain proportion of polycomponent mixed gas as with reference to pond, reduces volume, can realize the online of a laser instrument multicomponent gas and measure simultaneously, long-term non-calibrating;
(4) the present invention is by arranging detector detection absorption signal at the rear of gas cell, to obtain the first harmonic of demodulation, can realize online self calibration, improve the practicality of whole device.
The present invention, because adopting the hollow photon band-gap optical fiber being filled with certain proportion polycomponent mixed gas as with reference to pond, measures while can realizing two kinds of gases, online self calibration, and is easy to the absolute concentration obtaining gas; In addition, increase light source Output of laser power, the detection sensitivity of gas sensing device can be improved.
Accompanying drawing explanation
Fig. 1 is the composition schematic diagram of device of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail:
Embodiment
As shown in Figure 1, based on the polycomponent optoacoustic spectroscopy gas sensing device that quartz tuning-fork strengthens, comprise laser instrument 1, fiber amplifier 3, fiber coupler 4, collimating apparatus 5, condenser lens 6, gas cell 10, reference cell 13, first detector 14, second detector 22, pre-amplification circuit module 15, lock-in amplifier 16 and signal acquisition and controlling unit 17; Be filled with gas to be measured in gas cell 10, gas to be measured is CO
2and NH
3, this device is for measuring CO
2and NH
3concentration;
Wherein gas cell 10 inside is placed with miniature resonance kapillary 11 and quartz tuning-fork 12, gas cell 10 has a CaF
2window 7, the 2nd CaF
2window 23, air intake opening 8 and gas outlet 9; One CaF
2window 7 is positioned at the left side wall of gas cell 10, the 2nd CaF
2window 23 is positioned at the right side wall of gas cell 10; Air intake opening 8 and gas outlet 9 are all positioned at the end face of gas cell 10; Miniature resonance kapillary 11 is fixed on the both sides of quartz tuning-fork 12, and quartz tuning-fork 12 is positioned at the focus place of condenser lens 6; The both sides composition spectrum that miniature resonance kapillary 11 is fixed on quartz tuning-fork 12 surveys sound module;
Wherein control signal produces and comprises data acquisition card 18, signal controlled processing unit 19, signal generating unit 20 and laser drive unit 21 with data acquisition unit 17;
Laser instrument 1 outgoing laser beam 2, laser beam 2 by its power amplification, is then coupled as two-way by fiber coupler 4 through fiber amplifier 3, and wherein a road light beam is collimated through collimating apparatus 5, light beam after collimation is focused on by condenser lens 6, focused beam along light path successively through a CaF
2the center of window 7 and the centre focus of miniature resonance kapillary 11 are between two fork stocks of quartz tuning-fork 12; After quartz tuning-fork 12 detects gas signal to be measured, can produce piezoelectric current, piezoelectric current is transformed into voltage signal by pre-amplification circuit module 15, and voltage signal, through lock-in amplifier 16, produces second harmonic signal and measured signal;
Another road light beam that fiber coupler 4 produces is by behind gas reference pond 13, detected by the first detector 14, the voltage signal obtained after detection is through lock-in amplifier 16, and produce standard second harmonic, this standard second harmonic is for locking Absorption Line centre wavelength;
Second detector 22 detects through the 2nd CaF
2the gas absorption signal of window 23, gas absorption signal, through lock-in amplifier 16, produces first harmonic, and this first harmonic is used for calibrating to measured signal;
The measured signal produced by lock-in amplifier 16, standard second harmonic and first harmonic carry out signals collecting through data acquisition card 18, and the signal after collection carries out signal transacting by signal controlled processing unit 19;
Signal controlled processing unit 19 control signal generating unit 20 produces signal;
Laser drive unit 21 controls temperature and the electric current of laser instrument 1, is used for adjusting the output wavelength of laser instrument 1; Frequency sweep is carried out to quartz tuning-fork 12 in signal generating unit 20 1 aspect, determine the resonant frequency of quartz tuning-fork 12, signal generating unit 20 on the other hand produces modulation signal, and the modulation signal of generation is sent into laser drive unit 21 and is used for the laser output wavelength of modulated laser 1.
Laser instrument 1 is distributed feedback laser, and its output wavelength is 2003-2005nm, and power is 2-3mW;
Fiber amplifier 3 output wavelength scope 2000-2005nm, enlargement factor 100 times;
Laser instrument 1 temperature that laser drive unit 21 provides is 22-40 DEG C, and electric current is 60-140mA;
Fiber coupler 4 wavelength is 2003-2005nm, and splitting ratio is 1:99;
The material of condenser lens 6 is N-BK7, and focal length is 65-80mm;
One CaF
2the center of window, the 2nd CaF
2the center of the center of window, the center of miniature resonance kapillary 11 and quartz tuning-fork 12 all in same level, and point-blank;
The resonant frequency of quartz tuning-fork 12 is 32.768-77.503KHz;
The sample rate of data acquisition card 18 is 10-20MS/s;
What reference cell 13 adopted is hollow photon band-gap optical fiber, and its mode field diameter is 11 μm, logical optical range 1965nm-2125nm.
When using said apparatus to measure gas concentration to be measured, first by air intake opening 8 valve closing of gas cell 10, with the gas outlet 9 of vacuum pump access gas cell 10, by gas cell 10 vacuum pumping state, close gas outlet 9 valve.Then air intake opening 8 is accessed gas cylinders to be measured, open air intake opening 8 valve, be filled with gas to be measured.
Signal controlled processing unit 19 control signal generating unit 20; Frequency sweep is carried out to quartz tuning-fork 12 in signal generating unit 20 1 aspect, determine the resonant frequency of quartz tuning-fork 12, signal generating unit 20 on the other hand produces modulation signal, and the modulation signal of generation is sent into laser drive unit 21 and is used for the laser output wavelength of modulated laser 1.
Laser drive unit 21 controls temperature and the electric current of laser instrument 1, is used for adjusting the output wavelength of laser instrument 1; Measure CO
2during gas, the temperature that laser drive unit provides is 25 DEG C, and electric current is 70mA, and laser output wavelength is 2004.5nm; Measure NH
3during gas, the temperature that laser drive unit provides is 34 DEG C, and electric current is 50mA, and laser output wavelength is 2005nm;
Laser instrument 1 outgoing laser beam 2, laser beam 2 by its power amplification, is then coupled as two-way by fiber coupler 4 through fiber amplifier 3, and wherein a road light beam is collimated through collimating apparatus 5, light beam after collimation is focused on by condenser lens 6, focused beam along light path successively through a CaF
2the center of window 7 and the centre focus of miniature resonance kapillary 11 are between two fork stocks of quartz tuning-fork 12; After quartz tuning-fork 12 detects gas signal to be measured, can produce piezoelectric current, piezoelectric current is transformed into voltage signal by pre-amplification circuit module 15, and voltage signal, through lock-in amplifier 16, produces second harmonic signal and measured signal;
Another road light beam that fiber coupler 4 produces, by behind gas reference pond 13, is detected by the first detector 14, and the voltage signal obtained after detection, through lock-in amplifier 16, produces standard second harmonic, the CO of this standard second harmonic locking
2the Absorption Line centre wavelength of gas is the NH of 2004.5nm, locking
3the Absorption Line centre wavelength of gas is 2005nm;
Second detector 22 detects through the 2nd CaF
2the gas absorption signal of window 23, gas absorption signal is through lock-in amplifier 16, and produce first harmonic, this first harmonic is calibrated to measured signal;
The measured signal produced by lock-in amplifier 16, standard second harmonic and first harmonic carry out signals collecting through data acquisition card 18, and the signal after collection carries out signal transacting by signal controlled processing unit 19;
Fiber amplifier 3 output wavelength scope 2000-2005nm, enlargement factor 100 times;
Fiber coupler 4 wavelength is 2003-2005nm, and splitting ratio is 1:99;
The material of condenser lens 6 is N-BK7, and focal length is 75mm;
One CaF
2the center of window, the 2nd CaF
2the center of the center of window, the center of miniature resonance kapillary 11 and quartz tuning-fork 12 all in same level, and point-blank;
The resonant frequency of quartz tuning-fork 12 is 40.003KHz;
The sample rate of data acquisition card 18 is 10-20MS/s;
What reference cell 13 adopted is hollow photon band-gap optical fiber, is wherein filled with a certain proportion of standard C O
2and NH
3gas, for locking Absorption Line centre wavelength.Test long 5 meters of hollow photon band-gap optical fiber used, two ends welding single-mode fiber, loss is less than 3dB.
Test CO
2and NH
3secondary harmonic amplitude be respectively 150 μ V and 180 μ V, normalization noise equivalent absorption coefficient is respectively 3.25 × 10
-8cm
-1w/ √ Hz and 1.2 × 10
-8cm
-1w/ √ Hz.
Experimental result shows: the present invention can realize CO
2and NH
3online to measure simultaneously, online self calibration, and detection sensitivity is high, improves the practicality of whole device.
The above; be only the embodiment of the best of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.
The content be not described in detail in instructions of the present invention belongs to the known technology of professional and technical personnel in the field.
Claims (10)
1., based on the polycomponent optoacoustic spectroscopy gas sensing device that quartz tuning-fork strengthens, it is characterized in that: this device comprises laser instrument, fiber amplifier, fiber coupler, collimating apparatus, condenser lens, gas cell, reference cell, the first detector, the second detector, pre-amplification circuit module, lock-in amplifier and signal acquisition and controlling unit; Gas to be measured is filled with in gas cell;
Wherein gas cell inside is placed with miniature resonance kapillary and quartz tuning-fork, gas cell has a CaF
2window, the 2nd CaF
2window, air intake opening and gas outlet; One CaF
2window is positioned at the left side wall of gas cell, the 2nd CaF
2window is positioned at the right side wall of gas cell; Air intake opening and gas outlet are all positioned at the end face of gas cell; Miniature resonance kapillary is fixed on the both sides of quartz tuning-fork, and quartz tuning-fork is positioned at the focus place of condenser lens; The both sides composition spectrum that miniature resonance kapillary is fixed on quartz tuning-fork surveys sound module;
Wherein control signal produces and comprises data acquisition card, signal controlled processing unit, signal generating unit and laser drive unit with data acquisition unit;
Laser output laser beam, laser beam by its power amplification, is then coupled as two-way by fiber coupler through fiber amplifier, and wherein a road light beam is collimated through collimating apparatus, light beam after collimation is focused on by condenser lens, focused beam along light path successively through a CaF
2the center of window and the centre focus of miniature resonance kapillary are between two fork stocks of quartz tuning-fork; After quartz tuning-fork detects gas signal to be measured, can produce piezoelectric current, piezoelectric current becomes voltage signal by pre-amplification circuit module transitions, and voltage signal, through lock-in amplifier, produces second harmonic signal and measured signal;
Another road light beam that fiber coupler produces, by behind gas reference pond, is detected by the first detector, and the voltage signal obtained after detection is through lock-in amplifier, and produce standard second harmonic, this standard second harmonic is for locking Absorption Line centre wavelength;
Second detector detects through the 2nd CaF
2the gas absorption signal of window, gas absorption signal, through lock-in amplifier, produces first harmonic, and this first harmonic is used for calibrating to measured signal;
The measured signal produced by lock-in amplifier, standard second harmonic and first harmonic carry out signals collecting through data acquisition card, and the signal after collection carries out signal transacting by signal controlled processing unit;
Laser drive unit controls the temperature of laser instrument and electric current, is used for adjusting the output wavelength of laser instrument; Signal generating unit on the one hand carries out frequency sweep to quartz tuning-fork, determines the resonant frequency of quartz tuning-fork, and signal generating unit produces modulation signal on the other hand, and the modulation signal of generation is sent into laser drive unit and is used for the laser output wavelength of modulated laser.
2. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, it is characterized in that: laser instrument is distributed feedback laser, its output wavelength is 2003-2005nm, and power is 2-3mW.
3. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: fiber amplifier output wavelength scope 2000-2005nm, enlargement factor 100 times.
4. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, it is characterized in that: the laser temperature that laser drive unit provides is 22-40 DEG C, electric current is 60-140mA.
5. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, it is characterized in that: fiber coupler wavelength is 2003-2005nm, splitting ratio is 1:99.
6. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: the material of condenser lens is N-BK7, and focal length is 65-80mm.
7. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: a CaF
2the center of window, the 2nd CaF
2the center of the center of window, the center of miniature resonance kapillary and quartz tuning-fork all in same level, and point-blank.
8. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: the resonant frequency of quartz tuning-fork is 32.768-77.503KHz.
9. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: the sample rate of data acquisition card is 10-20MS/s.
10. a kind of polycomponent optoacoustic spectroscopy gas sensing device strengthened based on quartz tuning-fork according to claim 1, is characterized in that: what reference cell adopted is hollow photon band-gap optical fiber, and its mode field diameter is 11 μm, logical optical range 1965nm-2125nm.
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|---|---|---|---|---|
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| CN106124411A (en) * | 2016-06-29 | 2016-11-16 | 内江师范学院 | A kind of wide spectral type optoacoustic spectroscopy trace materials long-range detection device and method |
| CN106198396A (en) * | 2016-08-01 | 2016-12-07 | 莆田学院 | A kind of SF 6 high-voltage detecting system |
| CN107991240A (en) * | 2017-11-22 | 2018-05-04 | 安徽大学 | A kind of multifunctional light electric explorer based on quartz tuning-fork resonance principle |
| CN109060719A (en) * | 2018-06-13 | 2018-12-21 | 北京航天控制仪器研究所 | A kind of detection of gas with multiple constituents device |
| CN109358002A (en) * | 2018-11-15 | 2019-02-19 | 中国科学院合肥物质科学研究院 | Open optical fiber cavity enhances optoacoustic spectroscopy sensing device |
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| CN117129421A (en) * | 2023-09-21 | 2023-11-28 | 河北金锁安防工程股份有限公司 | Gas detection system and method based on laser processing of miniature quartz tuning fork |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050117155A1 (en) * | 2002-06-10 | 2005-06-02 | William Marsh Rice University | Quartz-enhanced photoacoustic spectroscopy |
| CN101506645A (en) * | 2006-08-31 | 2009-08-12 | 皇家飞利浦电子股份有限公司 | Cavity-enhanced photo acoustic trace gas detector with improved feedback loop |
| CN101512317A (en) * | 2006-08-31 | 2009-08-19 | 皇家飞利浦电子股份有限公司 | Stable photo acoustic trace gas detector with optical power enhancement cavity |
| CN101813621A (en) * | 2009-02-19 | 2010-08-25 | 中国科学院安徽光学精密机械研究所 | Quartz tuning fork strengthened photoacoustic spectroscopy gas sensor based on acoustic resonator |
| CN102954948A (en) * | 2011-08-26 | 2013-03-06 | 中国科学院安徽光学精密机械研究所 | Gas sensor based on photoacoustic spectrometry |
| CN104237135A (en) * | 2014-10-22 | 2014-12-24 | 东北林业大学 | System and method for detecting CO gas based on quartz tuning fork enhanced photoacoustic spectrometry technology |
| CN204116216U (en) * | 2014-11-05 | 2015-01-21 | 山东大学 | Can to the optoacoustic spectroscopy gas-detecting device of quartz tuning-fork resonance frequency real time correction |
| CN104316466A (en) * | 2014-11-05 | 2015-01-28 | 山东大学 | Photoacoustic spectrometry gas detection device capable of correcting resonant frequency of quartz tuning fork in real time |
-
2015
- 2015-04-20 CN CN201510187980.5A patent/CN104849214A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050117155A1 (en) * | 2002-06-10 | 2005-06-02 | William Marsh Rice University | Quartz-enhanced photoacoustic spectroscopy |
| CN101506645A (en) * | 2006-08-31 | 2009-08-12 | 皇家飞利浦电子股份有限公司 | Cavity-enhanced photo acoustic trace gas detector with improved feedback loop |
| CN101512317A (en) * | 2006-08-31 | 2009-08-19 | 皇家飞利浦电子股份有限公司 | Stable photo acoustic trace gas detector with optical power enhancement cavity |
| CN101813621A (en) * | 2009-02-19 | 2010-08-25 | 中国科学院安徽光学精密机械研究所 | Quartz tuning fork strengthened photoacoustic spectroscopy gas sensor based on acoustic resonator |
| CN102954948A (en) * | 2011-08-26 | 2013-03-06 | 中国科学院安徽光学精密机械研究所 | Gas sensor based on photoacoustic spectrometry |
| CN104237135A (en) * | 2014-10-22 | 2014-12-24 | 东北林业大学 | System and method for detecting CO gas based on quartz tuning fork enhanced photoacoustic spectrometry technology |
| CN204116216U (en) * | 2014-11-05 | 2015-01-21 | 山东大学 | Can to the optoacoustic spectroscopy gas-detecting device of quartz tuning-fork resonance frequency real time correction |
| CN104316466A (en) * | 2014-11-05 | 2015-01-28 | 山东大学 | Photoacoustic spectrometry gas detection device capable of correcting resonant frequency of quartz tuning fork in real time |
Non-Patent Citations (4)
| Title |
|---|
| DONG L ET AL.: "QEPAS spectrophones: design，optimization，and performance", 《APPLIED PHYSICS B-LASERS AND OPTICS》 * |
| KOSTEREV.A.A. ET AL.: "QEPAS for chemical analysis of multi-component gas mixtures", 《APPLIED PHYSICS B- LASERS AND OPTICS》 * |
| PETRA.N. ET AL.: "Theoretical analysis of a quartz-enhanced photoacoustic spectroscopy sensor", 《APPLIED PHYSICS B-LASERS AND OPTICS》 * |
| 姜萌等: "小型化光声光谱气体传感器研究进展", 《激光与光电子学进展》 * |
Cited By (29)
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