CN104848782B - 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪及标定方法和测量方法 - Google Patents
一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪及标定方法和测量方法 Download PDFInfo
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CN114654092B (zh) * | 2022-04-18 | 2023-03-14 | 北京理工大学 | 一种激光微结构高效加工及精密测量的方法和装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1104081A (en) * | 1965-07-01 | 1968-02-21 | Zeiss Jena Veb Carl | Improvements in or relating to apparatus for measuring lengths |
US4309109A (en) * | 1972-05-25 | 1982-01-05 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed interferometric remote gauge |
CN102072769A (zh) * | 2010-11-05 | 2011-05-25 | 清华大学 | 一种新型傅立叶红外光谱仪和分析方法 |
CN103376055A (zh) * | 2012-04-20 | 2013-10-30 | 上海微电子装备有限公司 | 一种高分辨率线性干涉仪 |
CN104316158A (zh) * | 2014-10-21 | 2015-01-28 | 四川大学 | 一种基于激光多普勒效应的外差干涉式测振仪 |
CN204757922U (zh) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS6428503A (en) * | 1987-07-23 | 1989-01-31 | Yokogawa Electric Corp | Length measuring device |
JPH11142243A (ja) * | 1997-11-13 | 1999-05-28 | Yokogawa Electric Corp | 干渉計及びこれを用いたフーリエ変換型分光装置 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1104081A (en) * | 1965-07-01 | 1968-02-21 | Zeiss Jena Veb Carl | Improvements in or relating to apparatus for measuring lengths |
US4309109A (en) * | 1972-05-25 | 1982-01-05 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed interferometric remote gauge |
CN102072769A (zh) * | 2010-11-05 | 2011-05-25 | 清华大学 | 一种新型傅立叶红外光谱仪和分析方法 |
CN103376055A (zh) * | 2012-04-20 | 2013-10-30 | 上海微电子装备有限公司 | 一种高分辨率线性干涉仪 |
CN104316158A (zh) * | 2014-10-21 | 2015-01-28 | 四川大学 | 一种基于激光多普勒效应的外差干涉式测振仪 |
CN204757922U (zh) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | 一种对比式抗干扰微动级联阶梯角反射镜激光干涉仪 |
Non-Patent Citations (1)
Title |
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《红外光谱仪多级微反射镜模拟分析及制作研究》;郑莹 等;《光学学报》;20111210(第12期);第1222005-1至1222005-5页 * |
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