CN104812155A - Atmospheric pressure plasma generating device and method - Google Patents
Atmospheric pressure plasma generating device and method Download PDFInfo
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- CN104812155A CN104812155A CN201510238942.8A CN201510238942A CN104812155A CN 104812155 A CN104812155 A CN 104812155A CN 201510238942 A CN201510238942 A CN 201510238942A CN 104812155 A CN104812155 A CN 104812155A
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Abstract
The invention provides an atmospheric pressure plasma generating device and an atmospheric pressure plasma generating method. The atmospheric pressure plasma generating device comprises a pressure regulator, a high-frequency alternating-current power supply and a plasma generator, wherein the plasma generator comprises a metal electrode which is connected with one end of the high-frequency alternating-current power supply and a liquid storage pond, wherein an electrolyte liquid is injected into the liquid storage pond; the liquid storage pond is connected with the other end of the high-frequency alternating-current power supply; a discharging gap at a preset distance is reserved between the liquid storage pond and the metal electrode; the discharging gap is a plasma generating area. According to the atmospheric pressure plasma generating device and the atmospheric pressure plasma generating method, the metal electrode, the high-frequency alternating-current power supply and the liquid storage pond form a closed loop; the discharging gap can be broken down by increasing the output voltage of the high-frequency alternating-current power supply, so that a plasma area is formed; and a needle-liquid discharging mode is realized. In addition, a plurality of clear patterns with shape changes can be generated by regulating the discharging gap and the high-frequency alternating-current power supply.
Description
Technical field
The present invention relates to low temperature plasma application technical field, particularly relate to atmospheric pressure plasma generator and the method for a kind of adjustable self-organizing taches vierge figure.
Background technology
In recent years, atmospheric pressure plasma discharge is widely used at industrial circle due to advantages such as structure are simple, cost is lower, easy to use.On the one hand, atmospheric pressure plasma discharge eliminates costliness and extremely loaded down with trivial details vacuum system, its application cost is reduced greatly, obtains a wide range of applications, such as, be applied to the surface modification of material, the sterilizing etc. of medical instruments and equipment.On the other hand, because it discharges in air around, this makes some application that originally cannot realize also come true, and one of them very important application is the application of plasma medical science aspect.Atmospheric pressure plasma discharge technology is in a lot of application (as fields such as biomedicine process, material surface process, water body disinfection and analytical technologies), in order to reach better material processed and testing result, the radiation intensity of usual plasma and swept area have certain requirement.
In great majority experiment, owing to being difficult to produce plasma spot figure under other discharge modes, the plasma spot figure that gas discharge produces carries out under the condition of direct current or under the pattern of dielectric barrier discharge, and constraint of also having ready conditions in the process of direct-current discharge is substantially all doing negative electrode with miniflow gas (helium) and electrolyte solution produces under doing the condition of anode.In addition, at present for the generation of plasma spot figure, usual way is also all obtain by the method for direct-current discharge.And for AC gas discharge, also can only obtain closely spaced gas discharge pattern, and purposes is only confined to the ion detection in electrolyte aqueous solution, does not carry out Large space electric discharge, so more cannot produce plasma spot figure with alternating current discharge.
Summary of the invention
The invention provides a kind of atmospheric pressure plasma generator and method, achieve pin-liquid discharge mode, and produce the clear spot figure of various shape change, the fields such as material surface process, ozone generation, sterilization and large area water technology can be applied in.
To achieve these goals, the invention provides a kind of atmospheric pressure plasma generation device, described atmospheric pressure plasma generation device comprises: pressure regulation meter, high-frequency ac power and plasma generator; Wherein, described plasma generator comprises:
Metal electrode, is connected with one end of described high-frequency ac power;
Liquid storage tank, its inside is marked with electrolyte solution, and described liquid storage tank is connected with the other end of described high-frequency ac power, and the discharging gap of described liquid storage tank and described metal electrode predetermined spaced, described discharging gap is as plasma generation district.
In one embodiment, described plasma generator comprises: an auxiliary electrode, is arranged in described liquid storage tank, and described liquid storage tank is connected by the other end of described auxiliary electrode with described high-frequency ac power.
In one embodiment, described metal electrode is connected with the high-voltage output end of described high-frequency ac power, described liquid storage tank is connected by the low-voltage output of described auxiliary electrode with described high-frequency ac power, and described metal electrode, described high-frequency ac power and described liquid storage tank form closed-loop path.
In one embodiment, described metal electrode is connected with the low-voltage output of described high-frequency ac power, described liquid storage tank is connected by the high-voltage output end of described auxiliary electrode with described high-frequency ac power, and described metal electrode, described high-frequency ac power and described liquid storage tank form closed-loop path.
In one embodiment, described plasma generator also comprises: peristaltic pump, for regulating liquid level and the stability of described liquid storage tank.
In one embodiment, described metal electrode is arranged in the adjustable adjusting device of a vertical direction, and described metal electrode is placed perpendicular to the liquid level of liquid storage tank.
In one embodiment, the discharge voltage of described high-frequency ac power is that 0 ~ 30kV is adjustable, and frequency is that 4kHz ~ 20kHz is adjustable.
In one embodiment, the material of described metal electrode is tungsten, molybdenum, titanium, tantalum, and diameter is 0.5mm ~ 10mm, and needle point angle is 20 ° ~ 75 °.
In one embodiment, described electrolyte solution is the solution of deionized water or the inorganic reagent adding predetermined concentration, and the conductivity of described electrolyte solution is 1 μ S/cm ~ 10000 μ S/cm.
To achieve these goals, the invention provides a kind of atmospheric pressure plasma generating method, be applied to the atmospheric pressure plasma generation device according to any one of claim 1-9, described atmospheric pressure plasma generating method comprises:
Increase the output voltage of described high-frequency ac power gradually, the discharging gap between described liquid storage tank and described metal electrode is punctured, form plasma generation district;
Regulate output voltage or the frequency of described high-frequency ac power, and the spacing of described discharging gap, make plasma form difform spot figure on the surface of described electrolyte solution.
The technical scheme provided in the embodiment of the application can comprise following beneficial effect:
Should be understood that, it is only exemplary and explanatory that above general description and details hereinafter describe, and can not limit the application.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the atmospheric pressure plasma generation device of one embodiment of the invention;
Fig. 2 is the structural representation of the atmospheric pressure plasma generation device of another embodiment of the present invention;
Fig. 3 is the atmospheric pressure plasma generating method flow chart of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
In order to solve the problem that cannot produce plasma spot figure in prior art with alternating current discharge, embodiments provide a kind of atmospheric pressure plasma generation device, as shown in Figure 1, this atmospheric pressure plasma generation device comprises: pressure regulation meter 1, high-frequency ac power 2 and plasma generator.
The output voltage (discharge voltage) of high-frequency ac power 2 is adjustable and frequency is all adjustable, and it is adjustable that discharge voltage is generally 0 ~ 30kV, and it is adjustable that frequency is generally 4kHz ~ 20kHz.
Pressure regulation meter 1 is connected for the voltage of control inputs power supply with high-frequency ac power 2, thus reaches the effect of control inputs/power output.
Plasma generator comprises: metal electrode 3 and liquid storage tank 4, and metal electrode 3 is connected by exporting transmission line 9 with an output 13 of high-frequency ac power 2.
Metal electrode 3 can be a metal bar through polishing, and the material of metal electrode 3 can be tungsten, molybdenum, titanium, tantalum etc.The parameter of metal electrode 3 is generally as follows: diameter can be 0.5mm ~ 10mm, and needle point angle can be 20 ° ~ 75 °.Usually, the condition of metal electrode 3 is chosen as diameter 2mm × length 7mm, and needle point slope is 45 °; The electric voltage frequency of high-frequency ac power 2 is chosen as 7kHz ~ 14kHz, and power is chosen as 8W ~ 35W, and voltage amplitude is chosen as 2.5kV ~ 3.5kV.
The inside of liquid storage tank 4 is marked with electrolyte solution 11, and another output 14 of liquid storage tank 4 and high-frequency ac power 2 is connected by exporting transmission line 10 (be in fact with the inside of liquid storage tank 4 be marked with electrolyte solution 11 be connected with high-frequency ac power 9).The inside of liquid storage tank 4, because being marked with electrolyte solution 11, defines liquid sparking electrode, and like this, metal electrode 3 and electrolyte solution 11 form the two poles of the earth that pin-liquid discharges.
In one embodiment, above-mentioned liquid storage tank 4 can be made up of polymeric material or other glassware.
Electrolyte solution 11 can be the solution of deionized water or the inorganic reagent adding predetermined concentration, and the conductivity of electrolyte solution is generally 1 μ S/cm ~ 10000 μ S/cm, and the present invention is not as limit.
In addition, it should be noted that the discharging gap 7 of liquid storage tank 4 and metal electrode 3 predetermined spaced, this discharging gap 7 can as plasma generation district, and this preset space length can be 4mm ~ 30mm, and the present invention is not as limit.
Spacing between liquid storage tank 4 and metal electrode 3 is generally by regulating metal electrode 3 to realize, in implementing, metal electrode 3 can be arranged in a vertically adjustable adjusting device, metal electrode 3 can be moved at vertical direction, and keep metal electrode 3 perpendicular to the liquid level of liquid storage tank 4.
In one embodiment, metal electrode 3 is connected with the high-voltage output end of high-frequency ac power 2, liquid storage tank is connected with the low-voltage output of high-frequency ac power 2, exporting transmission line 9 is High voltage output transmission line, output 13 is high-voltage output end, export transmission line 10 for low pressure output transmission line, output 14 is low-voltage output.
In another embodiment, metal electrode 3 is connected with the low-voltage output of high-frequency ac power 2, liquid storage tank is connected with the high-voltage output end of high-frequency ac power 2, export transmission line 9 for low pressure output transmission line, output 13 is low-voltage output, exporting transmission line 10 is High voltage output transmission line, and output 14 is high-voltage output end.
Above-mentioned metal electrode 3, liquid storage tank 4, output transmission line 9, output transmission line 10 constitute a closed-loop path jointly, to realize pin-liquid electric discharge.The operation principle of the atmospheric pressure plasma generation device of the embodiment of the present invention is as follows:
When the output voltage of high-frequency ac power 2 raises, discharging gap 7 between metal electrode 3 and electrolyte solution 11 liang of electrodes punctures greatly due to the change of electric field strength, form plasma slab in-between the electrodes, plasma spot figure is then presented on liquid level 8 (spot figure viewing area) surface, and the definition of spot figure is very high.Particularly, by regulating pressure regulation meter 1, can increase output voltage, when output voltage values reaches certain value (being generally about 3000V), the gas between metal electrode lower end and liquid storage tank horizontal plane is breakdown, and discharge plasma is formed.Regulate the output voltage of high-frequency ac power 2 or the concentration of frequency and two die openings and electrolyte solution, can regulate the shape of the plasma of spot figure on horizontal plane, principal shape has mononuclear type, double ring type, point-like or gear type etc.
Usually, when two die openings are at 6mm ~ 28mm, when corona discharge frequency is 5kHz ~ 14kHz, voltage, when 1kV ~ 4.5kV, can present stable plasma glow discharge phenomenon.
One preferably in embodiment, and when two die openings are 6mm, when the discharge frequency of high-frequency ac power 2 is 7kHz, the voltage of high-frequency ac power 2, when 3kV, can present stable plasma glow discharge.
Because in the alternating current discharge experimentation of conventional obtain the discharge electrode spacing of glow discharge generally at about 1.5mm, and also observe the spot chart-pattern that liquid electrode surface presents, even and dielectric barrier discharge, the adjustable extent of die opening is also very limited.Therefore the maximum outstanding feature embodiments providing a kind of atmospheric pressure plasma generation device is, resistive due to liquid electrolyte in the process of whole discharge loop, and the capacitive characteristics of pin-liquid discharge mode, voltage die in guiding discharge process, thus obtain the discharge mode being similar to pulsed discharge, compared with the alternating current discharge of conventional, obtaining sparking electrode spacing when providing same voltage can be larger, and also can observe the spot chart-pattern of horizontal plane, this kind of discharge mode plasma has great importance in the application of industrial aspect.
Because the size of the plasma spot figure produced in whole discharge process is adjustable, and the spot figure of various shape change can be formed, and it is simple to operate, the fields such as material surface process, ozone generation, sterilization and large area water technology can be used in, be with a wide range of applications at industrial circle.
As shown in Figure 1, the atmospheric pressure plasma generation device of the embodiment of the present invention also comprises: oscilloscope 5, is connected to and exports transmission line 9, and the voltage in whole closed-loop path, current signal will import in oscilloscope 5 by exporting transmission line 9.In addition, during plasma glow discharge, oscilloscope 5 can also record the waveform situation of discharge voltage and discharging current.
As shown in Figure 1, the atmospheric pressure plasma generation device of the embodiment of the present invention also comprises: peristaltic pump 12, is connected in electrolyte solution 11 by pipeline, can be used for regulating the liquid level of liquid storage tank 4 and stability.
In order to solve the problem that cannot produce plasma spot figure in prior art with alternating current discharge, the embodiment of the present invention additionally provides a kind of atmospheric pressure plasma generation device, as shown in Figure 2, this atmospheric pressure plasma generation device comprises: pressure regulation meter 1, high-frequency ac power 2 and plasma generator.With the embodiment shown in Fig. 1 unlike, plasma generator in Fig. 2 comprises: plasma generator comprises: metal electrode 3, liquid storage tank 4 and auxiliary electrode 6, auxiliary electrode 6 is fixedly installed in liquid storage tank 4, metal electrode 3 is connected by exporting transmission line 9 with an output 13 of high-frequency ac power 2, and liquid storage tank 4 is connected with the other end of high-frequency ac power 2 by auxiliary electrode 6 and output transmission line 10.By auxiliary electrode 6, make to export transmission line 10 and be convenient to fix.
As shown in Figure 3, embodiments provide a kind of atmospheric pressure plasma generating method, be applied to the atmospheric pressure plasma generation device in Fig. 1 or Fig. 2, described atmospheric pressure plasma generating method comprises:
S301: by regulating described pressure regulation meter to increase the output voltage of described high-frequency ac power gradually, the discharging gap between described liquid storage tank and described metal electrode is punctured, forms plasma generation district;
S301: the output voltage or the frequency that regulate described high-frequency ac power, and the spacing of the concentration of electrolyte solution and described discharging gap, makes plasma form difform spot figure on the surface of described electrolyte solution.
By regulating pressure regulation meter 1, can increase output voltage, when output voltage values reaches certain value, the gas breakdown between metal electrode 3 lower end and liquid storage tank 4 horizontal plane, discharge plasma is formed.By regulating pressure regulation meter 1 to regulate the output voltage of high-frequency ac power 2 or the concentration of frequency and two die openings and electrolyte solution, can regulate the shape of the plasma of spot figure on horizontal plane, principal shape has mononuclear type, double ring type, point-like or gear type etc.
Because the size of the plasma spot figure produced in whole discharge process is adjustable, and the spot figure of various shape change can be formed, and it is simple to operate, the fields such as material surface process, ozone generation, sterilization and large area water technology can be used in, be with a wide range of applications at industrial circle.
Those skilled in the art should understand, embodiments of the invention can be provided as method, system or computer program.Therefore, the present invention can adopt the form of complete hardware embodiment, completely software implementation or the embodiment in conjunction with software and hardware aspect.And the present invention can adopt in one or more form wherein including the upper computer program implemented of computer-usable storage medium (including but not limited to magnetic disc store, CD-ROM, optical memory etc.) of computer usable program code.
The present invention describes with reference to according to the flow chart of the method for the embodiment of the present invention, equipment (system) and computer program and/or block diagram.Should understand can by the combination of the flow process in each flow process in computer program instructions realization flow figure and/or block diagram and/or square frame and flow chart and/or block diagram and/or square frame.These computer program instructions can being provided to the processor of all-purpose computer, special-purpose computer, Embedded Processor or other programmable data processing device to produce a machine, making the instruction performed by the processor of computer or other programmable data processing device produce device for realizing the function of specifying in flow chart flow process or multiple flow process and/or block diagram square frame or multiple square frame.
These computer program instructions also can be stored in can in the computer-readable memory that works in a specific way of vectoring computer or other programmable data processing device, the instruction making to be stored in this computer-readable memory produces the manufacture comprising command device, and this command device realizes the function of specifying in flow chart flow process or multiple flow process and/or block diagram square frame or multiple square frame.
These computer program instructions also can be loaded in computer or other programmable data processing device, make on computer or other programmable devices, to perform sequence of operations step to produce computer implemented process, thus the instruction performed on computer or other programmable devices is provided for the step realizing the function of specifying in flow chart flow process or multiple flow process and/or block diagram square frame or multiple square frame.
Apply specific embodiment in the present invention to set forth principle of the present invention and execution mode, be intended to further illustrate the method for operation, combination unit and the application direction thereof that realize the atmosphere glow-discharge plasma generator producing spot chart-pattern, the explanation of above embodiment just understands method of the present invention and core concept thereof for helping; Meanwhile, for one of ordinary skill in the art, according to thought of the present invention, all will change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (9)
1. an atmospheric pressure plasma generation device, is characterized in that, described atmospheric pressure plasma generation device comprises: pressure regulation meter, high-frequency ac power and plasma generator; Wherein, described plasma generator comprises:
Metal electrode, is connected with one end of described high-frequency ac power;
Liquid storage tank, its inside is marked with electrolyte solution, and described liquid storage tank is connected with the other end of described high-frequency ac power, and the discharging gap of described liquid storage tank and described metal electrode predetermined spaced, described discharging gap is as plasma generation district.
2. atmospheric pressure plasma generation device according to claim 1, it is characterized in that, described plasma generator comprises: an auxiliary electrode, is arranged in described liquid storage tank, and described liquid storage tank is connected by the other end of described auxiliary electrode with described high-frequency ac power.
3. atmospheric pressure plasma generation device according to claim 2, it is characterized in that, described metal electrode is connected with the high-voltage output end of described high-frequency ac power, described liquid storage tank is connected by the low-voltage output of described auxiliary electrode with described high-frequency ac power, and described metal electrode, described high-frequency ac power and described liquid storage tank form closed-loop path; Described metal electrode is connected with the low-voltage output of described high-frequency ac power, described liquid storage tank is connected by the high-voltage output end of described auxiliary electrode with described high-frequency ac power, and described metal electrode, described high-frequency ac power and described liquid storage tank form closed-loop path.
4. atmospheric pressure plasma generation device according to claim 1, is characterized in that, described plasma generator also comprises: peristaltic pump, for regulating liquid level and the stability of described liquid storage tank.
5. the atmospheric pressure plasma generation device according to any one of claim 1-4, is characterized in that, described metal electrode is arranged in the adjustable adjusting device of a vertical direction, and described metal electrode is placed perpendicular to the liquid level of liquid storage tank.
6. the atmospheric pressure plasma generation device according to any one of claim 1-4, is characterized in that, the discharge voltage of described high-frequency ac power is that 0 ~ 30kV is adjustable, and frequency is that 4kHz ~ 20kHz is adjustable.
7. the atmospheric pressure plasma generation device according to any one of claim 1-4, is characterized in that, the material of described metal electrode is tungsten, molybdenum, titanium, tantalum, and diameter is 0.5mm ~ 10mm, and needle point angle is 20 ° ~ 75 °.
8. the atmospheric pressure plasma generation device according to any one of claim 1-4, it is characterized in that, described electrolyte solution is the solution of deionized water or the inorganic reagent adding predetermined concentration, and the conductivity of described electrolyte solution is 1 μ S/cm ~ 10000 μ S/cm.
9. an atmospheric pressure plasma generating method, be applied to the atmospheric pressure plasma generation device according to any one of claim 1-8, it is characterized in that, described atmospheric pressure plasma generating method comprises:
By regulating described pressure regulation meter to increase the output voltage of described high-frequency ac power gradually, the discharging gap between described liquid storage tank and described metal electrode being punctured, forming plasma generation district;
Regulate output voltage or the frequency of described high-frequency ac power, and the spacing of described discharging gap, make plasma form difform spot figure on the surface of described electrolyte solution.
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Application publication date: 20150729 |