CN104793833A - Touch substrate and manufacturing method thereof as well as display device - Google Patents

Touch substrate and manufacturing method thereof as well as display device Download PDF

Info

Publication number
CN104793833A
CN104793833A CN201510252881.0A CN201510252881A CN104793833A CN 104793833 A CN104793833 A CN 104793833A CN 201510252881 A CN201510252881 A CN 201510252881A CN 104793833 A CN104793833 A CN 104793833A
Authority
CN
China
Prior art keywords
electrode
chains
hanging structure
touch base
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510252881.0A
Other languages
Chinese (zh)
Other versions
CN104793833B (en
Inventor
张雷
徐宇博
胡明
谢涛峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei Xinsheng Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201510252881.0A priority Critical patent/CN104793833B/en
Publication of CN104793833A publication Critical patent/CN104793833A/en
Priority to PCT/CN2015/089435 priority patent/WO2016183971A1/en
Priority to US15/037,453 priority patent/US9965089B2/en
Application granted granted Critical
Publication of CN104793833B publication Critical patent/CN104793833B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0448Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

The invention provides a touch substrate and a manufacturing method thereof as well as a display device comprising the touch substrate. The touch substrate comprises a substrate body, a plurality of first electrode chains, a plurality of second electrode chains and a plurality of first suspended structures, wherein the first electrode chains are arranged on the substrate body and spaced apart from each other; each first electrode chain comprises a plurality of first electrodes; the second electrode chains are arranged on the substrate body and spaced apart from each other; each second electrode chain comprises a plurality of second electrodes; the first electrode chains and the second electrode chains are crosswise distributed; the first electrodes and the second electrodes are electrically insulated from each other and gaps exist between the adjacent first and second electrodes; the first suspended structures are spaced apart from each other; each first suspended structure is arranged in a corresponding gap, formed by a conductive material and electrically insulated from the first electrodes and the second electrodes.

Description

Touch base plate and preparation method thereof and display device
Technical field
Embodiments of the invention relate generally to technical field of touch-control display, and particularly, relates to a kind of touch base plate and preparation method thereof and comprises the display device of this touch base plate.
Background technology
Touch panel can be divided into resistance-type and condenser type two kinds by principle of work, and the application of capacitive touch panels on electronic product is a few days ago day by day universal.Capacitive touch panels utilizes the electric current of human body to respond to carry out work, is a kind of touch panel combining touch sensitive signal by electrode and human physical characteristics.When human body (finger) touch panel curtain, due to human body electric field effect, can form a coupling capacitance between the conductor layer of finger and touch panel, the electric current that touch panel top electrode produces can flow to contact, thus accurately can calculate the position of touch point.
Fig. 1 shows an example of touch control electrode pattern.Contact panel (TP) comprises multiple first electrode 11 and multiple second electrode 21 mutually alternately arranged, first electrode 11 and the second electrode 21 are electrically insulated from each other, multiple second electrodes 21 of one row are such as sequentially electrically connected each other by conduction connecting structure 23, multiple first electrodes 11 of a line are such as sequentially electrically connected each other by bridging structure, this bridging structure comprises the insulation course 12 covering conduction connecting structure 23 and the conduction connecting structure 13 formed on the insulating layer 12, and the first adjacent electrode 11 of same a line is electrically connected to each other by conduction connecting structure 13.As can be seen from Figure 1, electric capacity Cm is there is between the first adjacent electrode 11 and the second electrode 21, when human body (finger) touch panel curtain, due to human body electric field effect, a coupling capacitance can be formed between the conductor layer of finger and touch panel, cause electric capacity Cm to change, the position of touch point can be calculated according to this electric capacity Cm change.
But the structure comparison of existing touch panel is single, and its electric capacity Cm is incompatible with the capacitance of touch-control driving chip on the market, makes the application of the type touch panel have very large obstacle.Especially, touch-control IC (integrated circuit) manufacturer layout comparatively early, there is oneself touch control electrode pattern patent in Mei Jia IC manufacturer, and bind with oneself IC, if TP company uses the IC of A company and the die sinking of touch control electrode pattern to produce TP, afterwards because of other reasons, need the IC IC of A company being replaced by B company, the touch control electrode pattern of A company even if the IC of B company also can normally arrange in pairs or groups, but because the problem of patent, before made mould can not continue to use, the touch control electrode pattern of B company must be used again to make mould, this pattern brings great loss to TP company.
Summary of the invention
In order to overcome at least one in above-mentioned and other problem and defect that prior art exists, propose the present invention.
According to an aspect of the present invention, propose a kind of touch base plate, comprising:
Substrate;
Arrange those multiple first electrode chains separated on the substrate, each described first electrode chains comprises multiple first electrode;
Spaced multiple second electrode chains are on the substrate set, each described second electrode chains comprises multiple second electrode, described multiple second electrode chains and described multiple first electrode chains are arranged mutually across, described first electrode and the second electrode electrically insulated from one another and there is gap between the first adjacent electrode and the second electrode; With
Spaced multiple first hanging structures, each first hanging structure to be arranged in a corresponding gap and formed by conductive material and with the first electrode and the second electrode electrically insulated from one another.
In above-mentioned touch base plate, the first hanging structure can comprise engraved structure.
In above-mentioned touch base plate, engraved structure can comprise the multiple grids limited by conductive trace.
In above-mentioned touch base plate, the first electrode, the second electrode and the first hanging structure can be arranged on same layer and be made up of identical material.
In above-mentioned touch base plate, the first electrode and the first hanging structure can be arranged in ground floor and to be made up of identical material, and the second electrode can be arranged in the second layer different from described ground floor.
In above-mentioned touch base plate, described grid can have the structure closed or not exclusively close.
In above-mentioned touch base plate, first electrode and the second electrode can have diamond shape or square shape, and the first adjacent electrode is electrically connected to each other at the summit place of diamond shape or square shape in said first direction, the second adjacent electrode is electrically connected to each other by bridging structure at the summit place of diamond shape or square shape in this second direction.
In above-mentioned touch base plate, the first electrode and/or the second electrode can be the block structures be made up of transparent conductive material, or the reticulate texture that metal material is formed.
In above-mentioned touch base plate, the one in the first electrode and the second electrode is drive electrode, and another kind is induction electrode, and is provided with this electrode electrical isolation and the second hanging structure of hollow out in the central area of induction electrode.
In above-mentioned touch base plate, the second hanging structure can be made up of the material identical with the material of the first hanging structure.
In above-mentioned touch base plate, the shape of the second adjacent hanging structure can be different from each other.
In above-mentioned touch base plate, the area shared by each second hanging structure can in the scope of 0.2 ~ 0.45 with the area ratio of corresponding induction electrode.Preferably, described induction electrode can have square shape, cornerwise length of described square shape is P, distance between a side of each induction electrode and the outermost being arranged on the second hanging structure in this induction electrode is B, and as 4mm > P >=3mm, in the scope of B between 0.55mm and 0.83mm; As 5mm > P >=4mm, in the scope of B between 0.07mm and 1.1mm; As 6mm > P >=5mm, in the scope of B between 0.8mm and 1.2mm; As 7mm > P >=6mm, in the scope of B between 1.02mm and 1.54mm.
In above-mentioned touch base plate, the area of each first hanging structure and the area ratio of the first or second electrode can in the scopes of 0.045 ~ 0.11.Preferably, described first hanging structure has the width A extended between the first adjacent electrode and the second electrode, first electrode and the second electrode can have square shape, cornerwise length of this square shape is P, and as 4mm > P >=3mm, in the scope of A between 0.15mm and 0.23mm; As 5mm > P >=4mm, in the scope of A between 0.22mm and 0.32mm; As 6mm > P >=5mm, in the scope of A between 0.27mm and 0.41mm; As 7mm > P >=6mm, in the scope of A between 0.33mm and 0.49mm.
In above-mentioned touch base plate, the electric capacity formed between the first adjacent electrode and the second electrode can in the scope of 1.2PF ~ 1.6PF.
According to another aspect of the present invention, provide a kind of display device, it comprises above-mentioned arbitrary touch base plate.
According to a further aspect of the invention, provide a kind of method making touch base plate, comprise the steps:
Substrate is formed spaced multiple first electrode chains and spaced multiple second electrode chains, each described first electrode chains comprises multiple first electrode, each described second electrode chains comprises multiple second electrode, described multiple second electrode chains and described multiple first electrode chains are formed mutually across, described first electrode and the second electrode electrically insulated from one another and there is gap between the first adjacent electrode and the second electrode; And
In each gap, the first hanging structure with the first electrode and the second electrode electrically insulated from one another is formed by conductive material.
In the above-mentioned methods, described first electrode chains, the second electrode chains and the first hanging structure can be formed simultaneously.
In the above-mentioned methods, the step simultaneously forming described first electrode chains, the second electrode chains and the first hanging structure can comprise:
Substrate is formed the first conductive material layer;
Patterning processes is performed to described first conductive material layer, to form the pattern comprising described first electrode chains, the second electrode chains and the first hanging structure, described multiple first electrodes in each first electrode chains is electrically connected to each other successively;
Substrate is formed the insulation course covering described pattern;
Form the through hole corresponding to each second electrode in a insulating layer; And
Form the second conductive material layer on the insulating layer, second conductive material layer fills described through hole, and patterning processes is performed to described second conductive material layer, to form the bridging structure of two the second electrodes adjacent in each second electrode chains of electrical connection, described multiple second electrodes in each second electrode chains are electrically connected to each other successively.
When the one in the first electrode and the second electrode is used as drive electrode, another kind of when being used as induction electrode, utilize conductive material to form the second hanging structure with corresponding induction electrode electrical isolation in the central area that said method can also be included in induction electrode.
In the above-mentioned methods, the shape of the second adjacent hanging structure can be formed as different from each other.
By hereinafter with reference to accompanying drawing detailed description made for the present invention, other object of the present invention and advantage will be apparent, and can help there is comprehensive understanding to the present invention.
Accompanying drawing explanation
Clearly can understand the features and advantages of the present invention by reference to accompanying drawing, accompanying drawing is schematic and should not be construed as and carry out any restriction to the present invention, in the accompanying drawings:
Fig. 1 is the structural representation of an example of the touch control electrode patterned arrangement of existing contact panel;
Fig. 2 is the structural representation of the touch base plate according to one exemplary embodiment of the present invention.
Fig. 3 is the partial enlarged drawing of the dotted line circle " P " shown in Fig. 2, shows the touch control electrode pattern on touch base plate;
Fig. 4 is the zoomed-in view of " I " part in Fig. 3; And
Fig. 5 is the process flow diagram of the method for making touch base plate according to another exemplary embodiment of the present invention.
Embodiment
In the following detailed description, for ease of illustrating, many concrete details have been set forth to provide the complete understanding to embodiments of the invention.But significantly, one or more embodiment also can be implemented when not having these details.In other cases, known construction and device diagrammatically embodies to simplify accompanying drawing.
Fig. 2 shows and arranges according to the touch control electrode on the touch base plate of one exemplary embodiment of the present invention, and Fig. 3 is the partial enlarged drawing of the dotted line circle " P " shown in Fig. 2, shows the touch control electrode pattern on touch base plate.In an embodiment as illustrated in figure 2, touch base plate comprises a substrate and mutually intersects (such as on substrate, vertically intersect, but the present invention is not limited thereto) be arranged to multiple first electrode chains 100 of array and multiple second electrode chains 200, described multiple first electrode chains 100 can the column direction of this array (as, Y-direction) upper spaced, such as, separate in parallel with each other, described multiple second electrode chains 200 can the line direction of this array (as, X-direction) upper spaced, preferably, separate in parallel with each other.Each first electrode chains 100 can comprise multiple first electrode 110, and they such as can arrange in the row direction; Each second electrode chains 200 can comprise multiple second electrode 210, and they such as can arrange along column direction.
In one example, multiple first electrodes 110 of each first electrode chains 100 can be electrically connected each other in turn, and multiple second electrodes 210 of each second electrode chains 200 can be electrically connected each other in turn.But the present invention is not limited to this, such as, whether multiple first electrodes can determined in each first electrode chains according to the type of drive of touch panel are electrically connected and/or whether multiple second electrodes in each second electrode chains are electrically connected.
As shown in Figures 3 and 4, two the first electrodes 110 adjacent in each first electrode chains 100 can directly be electrically connected, also can be electrically connected to each other by conductive structure 130, two the second electrodes 210 adjacent in each second electrode chains 200 are electrically connected to each other by a bridging structure, in one example, this bridging structure comprises insulation course 220 across conductive structure 130 and the conductive structure 230 that is arranged on insulation course 220, and conductive structure 230 is electrically connected two the second electrodes 210 adjacent in each second electrode chains 200.
First electrode 110 and the second electrode 210 electrically insulated from one another, and as shown in Figure 3, between the first adjacent electrode 110 and the second electrode 210, there is clearance G, thus form electric capacity between the first adjacent electrode 110 and the second electrode 210.In one example, one in first electrode 110 and the second electrode 210 is drive electrode, another kind is induction electrode, thus by applying driving voltage to drive electrode, when carrying out touch action on touch panel, cause the capacitance variations between the first adjacent electrode 110 near touch point and the second electrode 210, respond to this capacitance variations by induction electrode, determine the position of touch point thus.
First electrode 110 and the second electrode 210 can be made up of multiple conductive material, and as transparent conductive material or metal material, and can be formed as various shape, as diamond shape, square shape, rectangular shape etc., the present invention does not limit this.In one example, the first electrode 110 and/or the second electrode 210 can be the block structures be made up of transparent conductive material, or the reticulate texture formed by metal material.In a preferred embodiment, when the first electrode and the second electrode have diamond shape or square shape, the first electrode 110 adjacent in each first electrode chains 100 is electrically connected to each other at the summit place of diamond shape or square shape in the row direction, and the second electrode 210 adjacent in each second electrode chains 200 is electrically connected to each other by above-mentioned bridging structure at the summit place of diamond shape or square shape in a column direction.
According to embodiments of the invention, touch base plate also comprises spaced multiple first hanging structures 310, as shown in Figures 2 and 3, each first hanging structure 310 is arranged between the first adjacent electrode 110 and the second electrode 210, namely be arranged in a corresponding clearance G, and formed by conductive material and with the first electrode 110 and the second electrode 210 electrically insulated from one another.When separate with the first and second electrodes or electrical isolation, each first hanging structure can extend along roughly all length in the gap of correspondence.
According to embodiments of the invention, adjust size or the structural parameters of the first hanging structure, the electric capacity between the first adjacent electrode and the second electrode can be regulated, to mate the capacitance that required touch-control driving chip can be compatible.Such as, reasonable design first hanging structure, make the electric capacity formed between the first adjacent electrode and the second electrode be 1.2PF ~ 1.6PF, can match by compatible capacitance (being generally 1 ~ 3PF) with touch-control IC on the market, thus realize good touch-control effect.Along with the difference of the size of touch panel or touch-screen product, the size of touch control electrode is not identical yet, and the size or the structural parameters that adjust the first hanging structure can obtain suitable capacitance, to adapt to the touch panel of different size.Further, the first hanging structure be arranged in the gap between the first adjacent electrode and the second electrode can reduce the adverse effect of fringe field, avoid touch panel only to the touch action sensitive issue near the position intersected at the first and second electrodes, make the touch action at any position place on electrode can cause capacitance variations between electrode, improve the sensitivity of touch panel thus.In addition, on touch panel, although the position arranging the first and second electrodes is transparent, but still reduce the illumination of light, and the illumination that the first hanging structure can reduce gap area is set, make touch screen uniform illuminating, improve display effect.
In one example, as shown in Figures 2 and 3, the first hanging structure 310 can comprise engraved structure, to reduce the adverse effect to display effect, and reduces electrostatic influence.Such as, engraved structure can comprise the multiple grid or grid that are limited by conductive trace, and grid can have the structure closed or not exclusively close.In one example, first electrode 110, second electrode 210 and the first hanging structure 310 can be arranged on the same layer on substrate, can be made up of identical material, as formed by identical transparent conductive material or metal material layer, thus can be formed by a patterning processes, Simplified flowsheet simultaneously.Replace in example at another, a kind of ground floor be arranged on the first hanging structure 310 on substrate in first electrode 110 and the second electrode 210, and can be made up of identical material, and the first electrode 110 and the another kind in the second electrode 210 are arranged on the second layer different from ground floor, thus above-mentioned bridging structure can be avoided the formation of.
According to another exemplary embodiment of the present invention, when the one in the first electrode and the second electrode is drive electrode, when another kind is induction electrode, such as, first electrode 110 is for drive electrode and the second electrode 210 is induction electrode, now can be provided with the second hanging structure 410 with this electrode electrical isolation in the central area of induction electrode.Second hanging structure 410 also can be engraved structure.The problem that second hanging structure of hollow out can avoid the touch action in the central area of induction electrode not easily to sense, improves the induction sensitivity of induction electrode, and reduces the interference as caused by outside noises such as electrostatic.
In one example, the second hanging structure 410 can be made up of the material identical with the first hanging structure 310, is preferably formed by the material identical with electrode, with Simplified flowsheet.In another example, the structure of the second adjacent hanging structure 410, shape or size can be different from each other, and the regular pattern avoiding the second hanging structure to be formed affect pattern displaying, raising visual uniformity.
Figure 3 illustrates a kind of exemplary arrangement and the correlation parameter of the first electrode 110, second electrode 210, first hanging structure 310, second hanging structure 410.In the example shown in fig. 3, first electrode 110 and the second electrode 210 all have square shape, it can be engraved structure, comprise the multiple grid or grid that are limited by conductive trace, cornerwise length of described square shape is P (e.g., Px, Py), preferably the first electrode 110 and the second electrode 210 are of similar shape, i.e. Px=Py; The value of P is relevant to the layout of the size of touch panel and electrode, and usually concerning TP manufacturer, the P value of the electrode that the touch panel of often kind of size is corresponding has fixing scope or presets, to reduce mask plate-making cost; Each first hanging structure 310 has the width A extended between the first adjacent electrode 110 and the second electrode 210, and the touch panel adjustment width A for often kind of size can obtain the electric capacity of optimization, with touch-control driving chip can be compatible capacitance mate; Distance between a side of each induction electrode and the outermost being arranged on the second hanging structure 410 in this induction electrode is B, and the size of adjustment B can be optimized and falls hot-tempered effect; There is point of crossing between first electrode 110 and the electrical connection of the second electrode 210, between the first and second adjacent electrodes, between clearance G and its contiguous point of crossing, there is the gap narrowed, the length of this gap narrowed is C; The restriction grid of engraved structure of electrode or the live width of the conductive trace of grid are D, and the length/width of grid or grid is E.
For different touch panels or touch-screen product size, the present inventor is optimized adjustment to above-mentioned parameter, can the optimization electric capacity that mates of compatible capacitance with touch-control driving chip to obtain.In one example, after optimizing, the electric capacity formed between the first adjacent electrode and the second electrode is 1.2PF ~ 1.6PF, and the capacitance (being generally 1 ~ 3PF) that this and touch-control IC on the market can be compatible matches, thus can realize good touch-control effect.Such as, the area of each first hanging structure and the area ratio of the first or second electrode can in the scopes of 0.045 ~ 0.11, and the area shared by each second hanging structure can in the scope of 0.2 ~ 0.45 with the area ratio of corresponding induction electrode.Following table 1 lists the Optimal Parameters according to an example.
Table 1
In another exemplary embodiment of the present invention, provide a kind of method making above-mentioned touch base plate, as shown in the process flow diagram in Fig. 5, the method mainly comprises the steps:
S1: form spaced multiple first electrode chains and spaced multiple second electrode chains on a substrate, each first electrode chains comprises multiple first electrode, each second electrode chains comprises multiple second electrode, described multiple second electrode chains and described multiple first electrode chains are formed mutually across, the first electrode and the second electrode electrically insulated from one another and there is gap between the first adjacent electrode and the second electrode; And
S2: form the first hanging structure with the first electrode and the second electrode electrically insulated from one another by conductive material in each gap.
In one example, in the method for above-mentioned making touch base plate, above-mentioned steps S1 and S2 can be performed in one step, to form the first electrode chains, the second electrode chains and the first hanging structure simultaneously.Exemplarily, the step simultaneously forming described first electrode chains, the second electrode chains and the first hanging structure can comprise:
Substrate forms the first conductive material layer, as transparent material layer or thin metal layer; And
Patterning processes is performed to described first conductive material layer, to form the pattern comprising described first electrode chains, the second electrode chains and the first hanging structure, described multiple first electrodes in each first electrode chains is electrically connected to each other successively.
After the above-mentioned pattern of formation, the insulation course covering described pattern can be formed on substrate, and form the through hole corresponding to each second electrode in a insulating layer.When the second electrode is formed as diamond shape or square shape, through hole can be formed in a insulating layer in the position on the summit corresponding to this shape, then, form the second conductive material layer on the insulating layer, second conductive material layer fills described through hole, and patterning processes is performed to described second conductive material layer, to form the bridging structure of two the second electrodes adjacent in each second electrode chains of electrical connection, described multiple second electrodes in each second electrode chains are electrically connected to each other successively.In this case, the first electrode formed, the second electrode and the first hanging structure are positioned at the same layer on substrate.On the other hand, can form the arrangement of electrodes of different layer, the first electrode and the second electrode are respectively formed at different layers, and the first hanging structure can optionally be formed in the layer identical with the first electrode or the second electrode.
Be appreciated that the first electrode and the second electrode can be made up of multiple conductive material, as transparent conductive material or metal material, and can be formed as various shape, as diamond shape, square shape etc., the present invention does not limit this.In one example, the first electrode and/or the second electrode can be the block structures be made up of transparent conductive material, or the reticulate texture formed by metal material.
In another example, one in the first electrode and the second electrode is used as drive electrode, another kind of when being used as induction electrode, utilize conductive material to form the second hanging structure with corresponding induction electrode electrical isolation in the central area that the method for above-mentioned making touch base plate can also be included in induction electrode.The second hanging structure can be formed in the induction electrode of some or all.In one example, the shape of the second adjacent hanging structure can be formed as different from each other.In a preferred embodiment, the first hanging structure and/or the second hanging structure can comprise engraved structure, to reduce the adverse effect to display effect.Such as, engraved structure can comprise the multiple grid or grid that are limited by conductive trace.
Further, embodiments of the invention additionally provide a kind of display device, it touch base plate comprising above-mentioned touch base plate or made by said method.This display device can comprise liquid crystal indicator, as LCD TV, mobile phone, e-book, panel computer etc.
Although illustrate and describe embodiments of the invention, for the ordinary skill in the art, be appreciated that and can change these embodiments without departing from the principles and spirit of the present invention, scope of the present invention is by claims and equivalents thereof.

Claims (21)

1. a touch base plate, is characterized in that, comprising:
Substrate;
Arrange those multiple first electrode chains separated on the substrate, each described first electrode chains comprises multiple first electrode;
Spaced multiple second electrode chains are on the substrate set, each described second electrode chains is included in multiple second electrode, described multiple second electrode chains and described multiple first electrode chains are arranged mutually across, described first electrode and the second electrode electrically insulated from one another and there is gap between the first adjacent electrode and the second electrode; With
Spaced multiple first hanging structures, each first hanging structure to be arranged in a corresponding gap and formed by conductive material and with the first electrode and the second electrode electrically insulated from one another.
2. touch base plate according to claim 1, is characterized in that, described first hanging structure comprises engraved structure.
3. touch base plate according to claim 2, is characterized in that, described engraved structure comprises the multiple grids limited by conductive trace.
4. the touch base plate according to any one of claim 1-3, is characterized in that, described first electrode, the second electrode and the first hanging structure are arranged on same layer and are made up of identical material.
5. the touch base plate according to any one of claim 1-3, it is characterized in that, described first electrode and described first hanging structure to be arranged in ground floor and to be made up of identical material, and described second electrode is arranged in the second layer different from described ground floor.
6. touch base plate according to claim 3, is characterized in that, described grid has the structure closed or not exclusively close.
7. the touch base plate according to any one of claim 1-3, it is characterized in that, described first electrode and the second electrode have diamond shape or square shape, and the first adjacent electrode is electrically connected to each other at the summit place of diamond shape or square shape in said first direction, the second adjacent electrode is electrically connected to each other by bridging structure at the summit place of diamond shape or square shape in this second direction.
8. the touch base plate according to any one of claim 1-3, is characterized in that, the first electrode and/or the second electrode are the block structures be made up of transparent conductive material, or the reticulate texture that metal material is formed.
9. the touch base plate according to any one of claim 1-3, it is characterized in that, one in described first electrode and the second electrode is drive electrode, and another kind is induction electrode, and is provided with this induction electrode electrical isolation and the second hanging structure of hollow out in the central area of induction electrode.
10. touch base plate according to claim 9, is characterized in that, described second hanging structure is made up of the material identical with the material of the first hanging structure.
11. touch base plates according to claim 9, is characterized in that, the shape of the second adjacent hanging structure is different from each other.
12. touch base plates according to claim 9, is characterized in that, the area ratio of the area shared by each second hanging structure and corresponding induction electrode is in the scope of 0.2 ~ 0.45.
13. touch base plates according to claim 12, it is characterized in that, described induction electrode has square shape, cornerwise length of described square shape is P, distance between a side of each induction electrode and the outermost being arranged on the second hanging structure in this induction electrode is B, and
As 4mm > P >=3mm, in the scope of B between 0.55mm and 0.83mm;
As 5mm > P >=4mm, in the scope of B between 0.07mm and 1.1mm;
As 6mm > P >=5mm, in the scope of B between 0.8mm and 1.2mm; And
As 7mm > P >=6mm, in the scope of B between 1.02mm and 1.54mm.
14. touch base plates according to claim 1, is characterized in that, the area of each first hanging structure and the area ratio of the first or second electrode are in the scope of 0.045 ~ 0.11.
15. touch base plates according to claim 14, it is characterized in that, described first hanging structure has the width A extended between the first adjacent electrode and the second electrode, and the first electrode and the second electrode have square shape, cornerwise length of this square shape is P, and
As 4mm > P >=3mm, in the scope of A between 0.15mm and 0.23mm;
As 5mm > P >=4mm, in the scope of A between 0.22mm and 0.32mm;
As 6mm > P >=5mm, in the scope of A between 0.27mm and 0.41mm; And
As 7mm > P >=6mm, in the scope of A between 0.33mm and 0.49mm.
16. 1 kinds of display device, is characterized in that, comprise the touch base plate as described in any one in claim 1-15.
17. 1 kinds of methods making touch base plate, is characterized in that, comprise the steps:
Substrate is formed spaced multiple first electrode chains and spaced multiple second electrode chains, each described first electrode chains comprises multiple first electrode, each described second electrode chains comprises multiple second electrode, described multiple second electrode chains and described multiple first electrode chains are formed mutually across, described first electrode and the second electrode electrically insulated from one another and there is gap between the first adjacent electrode and the second electrode; And
In each gap, the first hanging structure with the first electrode and the second electrode electrically insulated from one another is formed by conductive material.
18. methods according to claim 17, is characterized in that, described first electrode chains, the second electrode chains and the first hanging structure are formed simultaneously.
19. methods according to claim 18, is characterized in that, the step simultaneously forming described first electrode chains, the second electrode chains and the first hanging structure comprises:
Substrate is formed the first conductive material layer;
Patterning processes is performed to described first conductive material layer, to form the pattern comprising described first electrode chains, the second electrode chains and the first hanging structure, described multiple first electrodes in each first electrode chains is electrically connected to each other successively;
Substrate is formed the insulation course covering described pattern;
Form the through hole corresponding to each second electrode in a insulating layer; And
Form the second conductive material layer on the insulating layer, second conductive material layer fills described through hole, and patterning processes is performed to described second conductive material layer, to form the bridging structure of two the second electrodes adjacent in each second electrode chains of electrical connection, described multiple second electrodes in each second electrode chains are electrically connected to each other successively.
20. methods according to claim 17, it is characterized in that, wherein when the one in the first electrode and the second electrode is used as drive electrode, another kind of when being used as induction electrode, utilize conductive material to form the second hanging structure with corresponding induction electrode electrical isolation in the central area that the method is also included in induction electrode.
21. methods according to claim 20, is characterized in that, the shape of the second adjacent hanging structure is formed as different from each other.
CN201510252881.0A 2015-05-18 2015-05-18 Touch base plate and preparation method thereof and display device Active CN104793833B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201510252881.0A CN104793833B (en) 2015-05-18 2015-05-18 Touch base plate and preparation method thereof and display device
PCT/CN2015/089435 WO2016183971A1 (en) 2015-05-18 2015-09-11 Touch-control substrate, manufacturing method thereof, and display device
US15/037,453 US9965089B2 (en) 2015-05-18 2015-09-11 Touch substrate and method of manufacturing the same, and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510252881.0A CN104793833B (en) 2015-05-18 2015-05-18 Touch base plate and preparation method thereof and display device

Publications (2)

Publication Number Publication Date
CN104793833A true CN104793833A (en) 2015-07-22
CN104793833B CN104793833B (en) 2017-11-24

Family

ID=53558675

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510252881.0A Active CN104793833B (en) 2015-05-18 2015-05-18 Touch base plate and preparation method thereof and display device

Country Status (3)

Country Link
US (1) US9965089B2 (en)
CN (1) CN104793833B (en)
WO (1) WO2016183971A1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016183971A1 (en) * 2015-05-18 2016-11-24 京东方科技集团股份有限公司 Touch-control substrate, manufacturing method thereof, and display device
CN106325640A (en) * 2016-08-29 2017-01-11 红河以恒科技集团有限公司 Touch electrode structure, touch panel and touch display device
CN107085480A (en) * 2017-02-16 2017-08-22 京东方科技集团股份有限公司 A kind of touch base plate and preparation method thereof, touch control display apparatus
CN107831960A (en) * 2017-12-12 2018-03-23 武汉华星光电半导体显示技术有限公司 Contact panel and contactor control device
CN110716672A (en) * 2018-07-11 2020-01-21 上海和辉光电有限公司 Touch panel
WO2020029121A1 (en) * 2018-08-08 2020-02-13 深圳市柔宇科技有限公司 Touch display panel and touch display device
CN111538438A (en) * 2020-04-23 2020-08-14 京东方科技集团股份有限公司 Display substrate and display panel
WO2021056877A1 (en) * 2019-09-26 2021-04-01 武汉华星光电半导体显示技术有限公司 Touch electrode layer and touch display device
US11003298B2 (en) 2018-07-25 2021-05-11 Boe Technology Group Co., Ltd. Touch module, touch display substrate and touch display device
WO2022142980A1 (en) * 2020-12-29 2022-07-07 北京奕斯伟计算技术有限公司 Touch substrate, touch display panel and display apparatus
WO2023216283A1 (en) * 2022-05-09 2023-11-16 武汉华星光电半导体显示技术有限公司 Touch substrate and display panel

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106648240B (en) * 2016-12-26 2019-05-31 武汉华星光电技术有限公司 Touch control electrode and preparation method thereof
TWI613578B (en) * 2017-04-10 2018-02-01 友達光電股份有限公司 Touch electrode array and touch display apparatus
JP7106811B2 (en) * 2017-11-09 2022-07-27 京東方科技集團股▲ふん▼有限公司 Touch board and touch control display
TWI632503B (en) * 2017-12-15 2018-08-11 友達光電股份有限公司 Touch panel
US10691278B1 (en) * 2019-01-10 2020-06-23 Sharp Kabushiki Kaisha Reduced line count touch panel for mutual capacitance measurements
KR20210106595A (en) 2020-02-20 2021-08-31 삼성디스플레이 주식회사 Display device including touch sensor
GB2609824A (en) * 2021-01-28 2023-02-15 Boe Technology Group Co Ltd Touch module and manufacturing method therefor, and touch display device
KR20220143995A (en) * 2021-04-16 2022-10-26 삼성디스플레이 주식회사 Electronic device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102043548A (en) * 2009-10-14 2011-05-04 胜华科技股份有限公司 Capacitive touch-control panel
KR20120069234A (en) * 2010-12-20 2012-06-28 하이디스 테크놀로지 주식회사 Electrostatic capacity type touch screen panel and method for fabricating the same
TW201409296A (en) * 2012-08-20 2014-03-01 Sitronix Technology Corp Touch control electrode module and touch device thereof
CN203588229U (en) * 2013-09-17 2014-05-07 胜华科技股份有限公司 Touch panel
CN103955320A (en) * 2014-04-21 2014-07-30 合肥鑫晟光电科技有限公司 Touch substrate and touch screen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012178093A (en) 2011-02-28 2012-09-13 Japan Display East Co Ltd Touch panel device
TWI463387B (en) 2012-04-09 2014-12-01 Chunghwa Picture Tubes Ltd Capacitive touch panel
CN104793833B (en) 2015-05-18 2017-11-24 合肥鑫晟光电科技有限公司 Touch base plate and preparation method thereof and display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102043548A (en) * 2009-10-14 2011-05-04 胜华科技股份有限公司 Capacitive touch-control panel
KR20120069234A (en) * 2010-12-20 2012-06-28 하이디스 테크놀로지 주식회사 Electrostatic capacity type touch screen panel and method for fabricating the same
TW201409296A (en) * 2012-08-20 2014-03-01 Sitronix Technology Corp Touch control electrode module and touch device thereof
CN203588229U (en) * 2013-09-17 2014-05-07 胜华科技股份有限公司 Touch panel
CN103955320A (en) * 2014-04-21 2014-07-30 合肥鑫晟光电科技有限公司 Touch substrate and touch screen

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016183971A1 (en) * 2015-05-18 2016-11-24 京东方科技集团股份有限公司 Touch-control substrate, manufacturing method thereof, and display device
US9965089B2 (en) 2015-05-18 2018-05-08 Boe Technology Group Co., Ltd. Touch substrate and method of manufacturing the same, and display device
CN106325640A (en) * 2016-08-29 2017-01-11 红河以恒科技集团有限公司 Touch electrode structure, touch panel and touch display device
CN107085480A (en) * 2017-02-16 2017-08-22 京东方科技集团股份有限公司 A kind of touch base plate and preparation method thereof, touch control display apparatus
CN107831960A (en) * 2017-12-12 2018-03-23 武汉华星光电半导体显示技术有限公司 Contact panel and contactor control device
CN110716672A (en) * 2018-07-11 2020-01-21 上海和辉光电有限公司 Touch panel
CN110716672B (en) * 2018-07-11 2022-11-04 上海和辉光电股份有限公司 Touch panel
US11385752B2 (en) 2018-07-25 2022-07-12 Boe Technology Group Co., Ltd. Touch module, touch display substrate and touch display device
US11003298B2 (en) 2018-07-25 2021-05-11 Boe Technology Group Co., Ltd. Touch module, touch display substrate and touch display device
CN112639704A (en) * 2018-08-08 2021-04-09 深圳市柔宇科技股份有限公司 Touch display panel and touch display device
WO2020029121A1 (en) * 2018-08-08 2020-02-13 深圳市柔宇科技有限公司 Touch display panel and touch display device
WO2021056877A1 (en) * 2019-09-26 2021-04-01 武汉华星光电半导体显示技术有限公司 Touch electrode layer and touch display device
US11579735B2 (en) 2019-09-26 2023-02-14 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Touch electrode layer and touch display device
CN111538438A (en) * 2020-04-23 2020-08-14 京东方科技集团股份有限公司 Display substrate and display panel
CN111538438B (en) * 2020-04-23 2023-10-27 京东方科技集团股份有限公司 Display substrate and display panel
WO2022142980A1 (en) * 2020-12-29 2022-07-07 北京奕斯伟计算技术有限公司 Touch substrate, touch display panel and display apparatus
WO2023216283A1 (en) * 2022-05-09 2023-11-16 武汉华星光电半导体显示技术有限公司 Touch substrate and display panel

Also Published As

Publication number Publication date
CN104793833B (en) 2017-11-24
US9965089B2 (en) 2018-05-08
US20170108975A1 (en) 2017-04-20
WO2016183971A1 (en) 2016-11-24

Similar Documents

Publication Publication Date Title
CN104793833A (en) Touch substrate and manufacturing method thereof as well as display device
CN107977116B (en) Flexible touch panel, touch display screen and touch display device
CN107015691B (en) touch display panel with pressure sensor
CN104820519B (en) Touch-control display panel and touch display unit
WO2017004986A1 (en) Touch display panel and manufacturing method therefor, and touch display device
WO2017197934A1 (en) Array substrate and manufacturing method thereof, and touch display apparatus
JP6124997B2 (en) 3D touch liquid crystal lens grating, manufacturing method thereof, and 3D touch display device
CN108646945B (en) Touch panel, touch display panel and display device
EP3191923B1 (en) Touch sensors
WO2014153809A1 (en) Embedded capacitive touch screen and display apparatus
CN102799332B (en) A kind of embedded single layer capacitance touch-screen
US10061417B2 (en) Capacitive touch screen, method of manufacturing the same and display device
CN103268178A (en) Horizontal electric field driving mode array substrate and touch screen
CN103364983A (en) Liquid crystal display device and method of manufacturing the same
CN106055160B (en) Array substrate, preparation method thereof, display panel and display device
CN104937527A (en) Electrode for touch sensor, touch panel, and display device
CN103927072B (en) TFT (thin film transistor) array substrate, touch display panel and touch display device
US20140055405A1 (en) Touch electrode device and a method of manufacturing the same
JP2012248181A (en) Electrode structure of touch panel, method thereof and touch panel
WO2017076209A1 (en) Capacitive touch sensor and touch screen of individual layer wiring
CN104597646A (en) Display panel and display device
CN103838048B (en) A kind of array substrate and making method, display unit
KR20130027829A (en) Resistive overlay type touch sensor for touch screen panel and fabrication method thereof
CN103699261A (en) Touch panel and manufacturing method thereof
TWI727245B (en) Touch panel

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant